JP2019058864A - Electrostatic spray method and electrostatic spray device for the electrostatic spray method - Google Patents

Electrostatic spray method and electrostatic spray device for the electrostatic spray method Download PDF

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JP2019058864A
JP2019058864A JP2017185431A JP2017185431A JP2019058864A JP 2019058864 A JP2019058864 A JP 2019058864A JP 2017185431 A JP2017185431 A JP 2017185431A JP 2017185431 A JP2017185431 A JP 2017185431A JP 2019058864 A JP2019058864 A JP 2019058864A
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liquid
coated
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adsorption electrode
substrate
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JP6926370B2 (en
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和昭 佐藤
Kazuaki Sato
和昭 佐藤
秀俊 石川
Hidetoshi Ishikawa
秀俊 石川
昌大 久保
Masahiro Kubo
昌大 久保
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Anest Iwata Corp
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Abstract

To provide an electrostatic spray method capable of partially changing the coating amount of a liquid coating a coating object.SOLUTION: In an electrostatic spray method coating a coating object 40 with a liquid only by an electrostatic force from the liquid spray part 20 of an electrostatic spray device 10,: the conductive or semiconductive attraction electrode 30 of the electrostatic spray device 10 is disposed at a first position close to the coating object 40; a voltage generating the electrostatic force between the coating object 40 and an attraction electrode 30 and the liquid spray part 20 is applied while the coating object 40 and the attraction electrode 30 have the same electric potential; a spray step spraying the liquid toward the coating object 40 is included; the first position is a position within an existing range of the coating liquid of the coating object 40 among spraying liquids when the attraction electrode 30 is not disposed; and a part of the liquid which should be coated to the coating object 40 is attracted to the attraction electrode 30 and not coated to the coating object 40 when the attraction electrode 30 is not disposed in the spray step.SELECTED DRAWING: Figure 1

Description

本発明は静電噴霧方法及びその静電噴霧方法のための静電噴霧装置に関する。   The present invention relates to an electrostatic spraying method and an electrostatic spraying device for the electrostatic spraying method.

特許文献１には、静電気力だけで被塗物に液体を噴霧する静電噴霧措置が開示されている。
この静電噴霧装置は、被塗物に塗着できない液体を捕集する捕集体を備えており、被塗物に塗着できない液体によって周囲を汚すことなく液体の噴霧が行えるものになっている。 Patent Document 1 discloses an electrostatic spray device which sprays a liquid onto a substrate by electrostatic force alone.
This electrostatic sprayer is provided with a collection body for collecting a liquid that can not be applied to the object to be coated, and the liquid can be sprayed without contaminating the surroundings with the liquid that can not be applied to the object to be coated. .

特開２０１６−１３７４２８号公報JP, 2016-137428, A

ところで、静電噴霧装置の液体を噴霧するノズルから静電気力だけで液体を被塗物に向かって噴霧する場合、例えば、棒状の被塗物であって、その被塗物を回転させながら液体の噴霧が行えないときには、被塗物のノズルに対向する側（以下、前方側ともいう。）とその反対側（以下、後方側ともいう）で、後方側の方が液体の塗着量が多くなる傾向が見られる。   By the way, in the case where the liquid is sprayed toward the object to be coated only by the electrostatic force from the nozzle for spraying the liquid of the electrostatic spray device, it is, for example, a rod-like object to be coated. When spraying can not be performed, the amount of applied liquid on the rear side is larger on the side facing the nozzle of the object (hereinafter also referred to as the front side) and the opposite side (hereinafter referred to as the rear side) Tend to be

このため、例えば、液体の塗着量を被塗物の周方向に均一にするには、被塗物の後方側の液体の塗着量を減らすように変化させる必要がある。
また、上記とは別に、棒状の被塗物の長さ方向に液体の塗着量を変化させたい場合も考えられる。 For this reason, for example, in order to make the amount of application of the liquid uniform in the circumferential direction of the object to be coated, it is necessary to change the amount of application of the liquid on the rear side of the object to be reduced.
In addition to the above, it is also conceivable to change the amount of applied liquid in the longitudinal direction of the rod-like object to be coated.

本発明は、このような事情に鑑みてなされたものであり、被塗物に対して塗着する液体の塗着量を部分的に変化させることができる静電噴霧方法及びその静電噴霧方法のための静電噴霧装置を提供することを目的とする。   This invention is made in view of such a situation, and the electrostatic spraying method which can change the application quantity of the liquid to apply with respect to a to-be-coated-article partially, and its electrostatic spraying method The purpose of the invention is to provide an electrostatic spray device for

本発明は、上記目的を達成するために、以下の構成によって把握される。
（１）本発明の静電噴霧方法は、静電噴霧装置のノズルを有する液体噴霧部から静電気力だけで液体を噴霧して被塗物に液体を塗布する静電噴霧方法であって、前記被塗物の近くの第１位置に前記静電噴霧装置の導電性又は半導電性の吸着電極を配置して、前記被塗物及び前記吸着電極を同電位に保ちつつ、前記被塗物及び前記吸着電極と前記液体噴霧部の間に前記静電気力を発生させる電圧を印加して、前記被塗物に向かって前記液体を噴霧する噴霧ステップを含み、前記第１位置は、前記吸着電極を設けないときに、前記噴霧される液体のうち前記被塗物に塗着する液体が存在する範囲内の位置であり、前記噴霧ステップが、前記吸着電極を配置していなければ、前記被塗物に塗着できたはずの液体のうちの一部を前記吸着電極に吸着させて、前記被塗物に塗着させないように行われる。 The present invention is grasped by the following composition in order to achieve the above-mentioned object.
(1) The electrostatic spraying method of the present invention is an electrostatic spraying method in which a liquid is sprayed only from electrostatic force from a liquid spraying unit having a nozzle of an electrostatic spraying device to apply the liquid to a substrate to be coated, The conductive or semiconductive adsorption electrode of the electrostatic spray device is disposed at a first position near the substrate to be coated while the substrate and the adsorption electrode are kept at the same potential. Applying a voltage for generating the electrostatic force between the adsorption electrode and the liquid spray unit to spray the liquid toward the object to be coated, the first position including the adsorption electrode It is a position within the range in which the liquid to be applied to the object to be coated is present among the liquids to be sprayed, if not provided, and the object to be coated is not provided with the adsorption electrode, Part of the liquid that should have been applied to the Te, is performed so as not to coated on the object to be coated.

（２）上記（１）の構成において、前記被塗物から見て、前記液体噴霧部側を前記被塗物の前方側とし、前記前方側と反対側となる側を後方側とし、残る側を側方側とすると、前記噴霧ステップが、前記被塗物の後方側又は側方側に前記吸着電極を配置し、前記被塗物を固定した状態で行われる。 (2) In the configuration of the above (1), the liquid spray portion side is the front side of the substrate and the side opposite to the front side is the rear side, as viewed from the substrate. If the side surface is a side, the spraying step is performed in a state where the adsorption electrode is disposed on the rear side or the side of the object to be coated and the object to be coated is fixed.

（３）上記（１）の構成において、前記被塗物から見て、前記液体噴霧部側を前記被塗物の前方側とし、前記前方側と反対側となる側を後方側とし、残る側を側方側とすると、前記噴霧ステップが、前記被塗物の後方側及び側方側に沿った少なくとも一部の部分で前記吸着電極と前記被塗物との間の離間距離が変わるように、前記被塗物の側方側に沿って前記吸着電極を配置し、前記被塗物を回転させた状態で行われる。 (3) In the configuration of the above (1), the liquid spray portion side is the front side of the substrate and the side opposite to the front side is the rear side, as viewed from the substrate. And the spraying step is such that the separation distance between the adsorption electrode and the substrate changes at least in part along the rear side and the side of the substrate. The adsorption electrode is disposed along the lateral side of the object to be coated, and the object to be coated is rotated.

（４）上記（３）の構成において、前記噴霧ステップが、前記被塗物の対向する側方側のそれぞれに、前記吸着電極を配置して行われる。 (4) In the configuration of the above (3), the spraying step is performed by disposing the adsorption electrodes on each of the opposite side sides of the object to be coated.

（５）上記（１）から（４）のいずれか１つの構成において、細長い棒状の電極が前記吸着電極として用いられる。 (5) In the configuration of any one of the above (1) to (4), an elongated rod-like electrode is used as the adsorption electrode.

（６）上記（１）から（５）のいずれか１つの構成において、前記第１位置は、前記被塗物からの距離で２０ｍｍ以内に前記吸着電極の少なくとも一部が位置する位置である。 (6) In the configuration of any one of the above (1) to (5), the first position is a position where at least a part of the adsorption electrode is located within 20 mm as a distance from the object to be coated.

（７）本発明の静電噴霧装置は、被塗物に向けて静電気力だけで液体を噴霧する静電噴霧装置であって、前記静電噴霧装置は、ノズルを有する液体噴霧部と、前記被塗物の近くの第１位置に配置される導電性又は半導電性の吸着電極と、前記被塗物及び前記吸着電極を同電位に保ちつつ、前記被塗物及び前記吸着電極と前記液体噴霧部の間に電圧を印加して前記静電気力を発生させる電圧印加手段と、を備え、前記第１位置が、前記吸着電極を設けないときに、前記噴霧される液体のうち前記被塗物に塗着する液体が存在する範囲内の位置である。 (7) The electrostatic spray device according to the present invention is an electrostatic spray device which sprays a liquid toward a substrate with only electrostatic force, and the electrostatic spray device includes a liquid spray unit having a nozzle, A conductive or semiconductive adsorption electrode disposed at a first position near the substrate, and the substrate, the adsorption electrode, and the liquid while maintaining the substrate and the adsorption electrode at the same potential. And voltage applying means for applying a voltage between the spray units to generate the electrostatic force, wherein the first position corresponds to the object to be coated among the liquids to be sprayed when the adsorption electrode is not provided. It is a position within the range where the liquid to be applied is present.

（８）上記（７）の構成において、前記静電噴霧装置は前記被塗物を固定する固定手段を備え、前記被塗物から見て、前記液体噴霧部側を前記被塗物の前方側とし、前記前方側と反対側となる側を後方側とし、残る側を側方側とすると、前記吸着電極が、固定された前記被塗物の後方側又は側方側に配置される。 (8) In the configuration of the above (7), the electrostatic spray device includes fixing means for fixing the object to be coated, and the liquid spray portion side is the front side of the object to be coated when viewed from the object to be coated When the side opposite to the front side is the rear side and the remaining side is the side, the adsorption electrode is disposed on the rear side or the side of the fixed object to be coated.

（９）上記（７）の構成において、前記静電噴霧装置は前記被塗物を回転させる回転手段を備え、前記被塗物から見て、前記液体噴霧部側を前記被塗物の前方側とし、前記前方側と反対側となる側を後方側とし、残る側を側方側とすると、前記吸着電極が、回転する前記被塗物の側方側に沿った少なくとも一部の部分で前記吸着電極と前記被塗物との間の離間距離が変わるように、前記被塗物の側方側に沿って配置される。 (9) In the configuration of the above (7), the electrostatic spray device includes a rotating means for rotating the object to be coated, and the liquid spray portion side is the front side of the object to be coated when viewed from the object to be coated When the side opposite to the front side is the rear side and the remaining side is the side, the adsorption electrode is at least a part of the part along the side of the object to be rotated. It is disposed along the lateral side of the substrate such that the separation distance between the adsorption electrode and the substrate changes.

（１０）上記（９）の構成において、前記静電噴霧装置は、前記被塗物の対向する側方側のそれぞれに配置される一対の前記吸着電極を備えている。 (10) In the configuration of the above (9), the electrostatic spray device is provided with a pair of the adsorption electrodes arranged on each of opposite side sides of the object to be coated.

（１１）上記（７）から（１０）のいずれか１つの構成において、前記吸着電極が細長い棒状である。 (11) In the configuration of any one of the above (7) to (10), the adsorption electrode is in the shape of an elongated rod.

（１２）上記（７）から（１１）のいずれか１つの構成において、前記第１位置は、前記被塗物からの距離で２０ｍｍ以内に前記吸着電極の少なくとも一部が位置する位置である。 (12) In the configuration according to any one of (7) to (11), the first position is a position where at least a part of the adsorption electrode is located within 20 mm as a distance from the object to be coated.

本発明によれば、被塗物に対して塗着する液体の塗着量を部分的に変化させることができる静電噴霧方法及びその静電噴霧方法のための静電噴霧装置を提供することができる。   According to the present invention, there is provided an electrostatic spraying method capable of partially changing the application amount of a liquid to be applied to a substrate, and an electrostatic spraying device for the electrostatic spraying method. Can.

本発明に係る第１実施形態の静電噴霧装置を説明するための斜視図である。It is a perspective view for demonstrating the electrostatic spraying apparatus of 1st Embodiment which concerns on this invention. 本発明に係る第１実施形態の液体噴霧部だけを示した断面図である。It is sectional drawing which showed only the liquid spraying part of 1st Embodiment concerning this invention. 図２の液体噴霧部の先端側の拡大断面図であり、（ａ）は心棒の先端面が後方に位置する場合であり、（ｂ）は（ａ）の状態よりも心棒の先端面が前方に位置する場合である。It is an expanded sectional view of the tip side of the liquid spraying part of FIG. 2, (a) is a case where the tip surface of a mandrel is located back, (b) is a tip surface of a mandrel front rather than the state of (a). In the case of 本発明に係る第１実施形態のノズルから噴霧された液体が被塗物に塗着するところを示した図であり、（ａ）は吸着電極を配置した場合を示す図であり、（ｂ）は吸着電極を配置しなかった場合を示す図である。It is the figure which showed that the liquid sprayed from the nozzle of 1st Embodiment which concerns on this invention adheres to a to-be-coated-article, (a) is a figure which shows the case where an adsorption electrode is arrange | positioned, (b) These are figures which show the case where the adsorption electrode is not arrange | positioned. 本発明に係る第２実施形態の静電噴霧装置を説明するための斜視図である。It is a perspective view for demonstrating the electrostatic spraying apparatus of 2nd Embodiment which concerns on this invention.

以下、添付図面を参照して、本発明を実施するための形態（以下、実施形態）について詳細に説明する。
なお、実施形態の説明の全体を通して同じ要素には同じ番号又は符号を付している。 Hereinafter, with reference to the accompanying drawings, modes (hereinafter, embodiments) for carrying out the present invention will be described in detail.
In addition, the same number or code | symbol is attached | subjected to the same element through the whole description of embodiment.

また、特に断りがない場合、「先（端）」や「前（方）」等の表現は、各部材等において液体の噴霧方向側を表し、「後（端）」や「後（方）」等の表現は、各部材等において液体の噴霧方向と反対側を表すものとする。   Moreover, unless otherwise noted, expressions such as “front (end)” and “front (front)” indicate the spray direction side of the liquid in each member etc., and “rear (end)” and “rear (front)” The expression such as "represents the opposite side of the liquid spray direction in each member or the like.

（第１実施形態）
図１は、本発明に係る第１実施形態の静電噴霧装置１０を説明するための斜視図である。
図１に示すように、静電噴霧装置１０は、ノズル２２を有する液体噴霧部２０と、導電性又は表面抵抗が１０１０Ω以下の半導電性の吸着電極３０と、吸着電極３０及び被塗物４０と液体噴霧部２０の間に電圧を印加する電圧印加手段５０と、備えている。 First Embodiment
FIG. 1 is a perspective view for explaining an electrostatic spraying device 10 according to a first embodiment of the present invention.
As shown in FIG. 1, the electrostatic spray device 10 includes a liquid spray unit 20 having a nozzle 22, a conductive or semiconductive adsorption electrode 30 having a surface resistance of 10 10 Ω or less, an adsorption electrode 30, and a coating material A voltage application means 50 for applying a voltage between the object 40 and the liquid spray unit 20 is provided.

電圧印加手段５０は、電圧電源５１と、電圧電源５１の一方の電極と液体噴霧部２０を電気的に接続する第１電気配線５２と、電圧電源５１の他方の電極と吸着電極３０及び被塗物４０を電気的に接続する第２電気配線５３と、を備えている。   The voltage application means 50 includes a voltage power supply 51, a first electric wiring 52 electrically connecting one of the electrodes of the voltage power supply 51 and the liquid spray unit 20, the other electrode of the voltage power supply 51, the adsorption electrode 30, and a coating And a second electric wire 53 electrically connecting the object 40.

なお、第２電気配線５３は、電圧電源５１の他方の電極に接続されるのと反対側が２分岐された分岐配線を備えており、その分岐配線の一方の分岐配線である第１分岐配線５３ａが被塗物４０に接続され、他方の分岐配線である第２分岐配線５３ｂが吸着電極３０に接続されている。   The second electric wiring 53 is provided with a branch wiring that is branched into two on the side opposite to the side connected to the other electrode of the voltage power supply 51, and a first branch wiring 53a that is one branch wiring of the branch wiring. Are connected to the object to be coated 40, and the second branch wiring 53b, which is the other branch wiring, is connected to the adsorption electrode 30.

本実施形態では、第１分岐配線５３ａ及び第２分岐配線５３ｂが、直接、被塗物４０及び吸着電極３０に接続されている場合を示しているが、これらは電気的な接続がなされていればよい。
このため、第１分岐配線５３ａ及び第２分岐配線５３ｂと被塗物４０及び吸着電極３０の間の電気的な接続ができさえすれば、第１分岐配線５３ａ及び第２分岐配線５３ｂと被塗物４０及び吸着電極３０の間に介在する部材があってもよい。
なお、第２電気配線５３で、被塗物４０及び吸着電極３０と電圧電源５１の他方の電極が接続されているため、被塗物４０及び吸着電極３０は同電位になっており、後述するように、被塗物４０の近くの位置に吸着電極３０を配置しても、スパーク等が発生することを回避できる。 In the present embodiment, the case where the first branch wiring 53a and the second branch wiring 53b are directly connected to the object to be coated 40 and the adsorption electrode 30 is shown, but these are electrically connected. Just do it.
Therefore, as long as electrical connection between the first branch wiring 53a and the second branch wiring 53b and the object to be coated 40 and the adsorption electrode 30 can be made, the first branch wiring 53a and the second branch wiring 53b and the coating target are coated. There may be a member interposed between the object 40 and the adsorption electrode 30.
In addition, since the to-be-coated object 40, the adsorption electrode 30, and the other electrode of the voltage power supply 51 are connected by the 2nd electric wiring 53, the to-be-coated object 40 and the adsorption electrode 30 have the same electric potential and will be described later As such, even if the adsorption electrode 30 is disposed at a position near the object to be coated 40, generation of sparks and the like can be avoided.

本実施形態では、静電噴霧装置１０は、アース手段５４を備えており、第２電気配線５３がアース手段５４に接続されているため、被塗物４０及び吸着電極３０は、アースされた状態になっている。
なお、アース手段５４は、必須の要件ではないが、被塗物４０は作業者が触れる可能性があるので、安全面の観点からアース手段５４を設けて被塗物４０をアースするようにすることが好ましい。 In the present embodiment, the electrostatic spraying device 10 is provided with the grounding means 54, and the second electric wiring 53 is connected to the grounding means 54. Therefore, the object 40 and the attraction electrode 30 are in the state of being grounded. It has become.
Although the grounding means 54 is not an essential requirement, the workpiece 40 may be touched by the worker, so the grounding means 54 is provided to ground the workpiece 40 from the viewpoint of safety. Is preferred.

そして、後ほど、どのように液体が噴霧されるかについては説明するが、電圧印加手段５０は、被塗物４０及び吸着電極３０の電位を同電位である第１電位とし、液体噴霧部２０の電位を第２電位とすると、第１電位と第２電位の間の電位差が、ノズル２２から静電気力だけで液体を噴霧する静電気力を被塗物４０及び吸着電極３０と液体噴霧部２０の間に発生させるだけの電位差となるように、被塗物４０及び吸着電極３０と液体噴霧部２０の間に電圧を印加する。   Then, later, how the liquid is sprayed will be described, but the voltage application means 50 sets the potential of the object to be coated 40 and the adsorption electrode 30 to the first potential which is the same potential. Assuming that the electric potential is a second electric potential, the electric potential difference between the first electric potential and the second electric potential is an electrostatic force that sprays the liquid from the nozzle 22 only by the electrostatic force. A voltage is applied between the object to be coated 40 and the adsorption electrode 30 and the liquid spray unit 20 so as to have a potential difference sufficient to be generated.

したがって、静電噴霧装置１０を用いた静電噴霧方法では、液体を噴霧する噴霧ステップが、被塗物４０及び吸着電極３０を同電位に保ちつつ、被塗物４０及び吸着電極３０と液体噴霧部２０の間に静電気力を発生させる電圧を印加して、その電圧の印加によって発生する静電気力だけで被塗物４０に向かって液体を噴霧する噴霧ステップとなる。   Therefore, in the electrostatic spraying method using the electrostatic spraying device 10, the spraying step of spraying the liquid maintains the object to be coated 40 and the adsorption electrode 30 at the same potential, while the object to be coated 40 and the adsorption electrode 30 and the liquid are sprayed A voltage generating electrostatic force is applied between the sections 20, and the liquid is sprayed toward the object 40 only by the electrostatic force generated by the application of the voltage.

（液体噴霧部２０）
図２は、液体噴霧部２０だけを示した断面図であり、液体噴霧部２０から後述するように塗料等の液体が噴霧されている状態を合わせて図示したものになっている。 (Liquid spray unit 20)
FIG. 2 is a cross-sectional view showing only the liquid spray unit 20, and the liquid spray unit 20 also illustrates a state in which a liquid such as a paint is sprayed as described later.

図２に示すように、液体噴霧部２０は、液体の供給される液体供給口２１ａを有する液体流路２１ｂが形成された絶縁材料からなる胴体部２１と、貫通孔が胴体部２１の液体流路２１ｂに連通するように胴体部２１の先端に設けられるノズル２２と、胴体部２１の液体流路２１ｂ内及びノズル２２の貫通孔内に配置される導電材料からなる心棒２３と、を備えている。   As shown in FIG. 2, the liquid spray unit 20 includes a body portion 21 made of an insulating material and a liquid flow path 21 b having a liquid supply port 21 a to which the liquid is supplied. A nozzle 22 provided at the tip of the body 21 so as to communicate with the passage 21 b; and a mandrel 23 made of a conductive material disposed in the liquid flow path 21 b of the body 21 and in the through hole of the nozzle 22 There is.

胴体部２１には、心棒２３を後端側に取り出すために、液体流路２１ｂと連通した孔部２１ｃが設けられ、その孔部２１ｃ内には、心棒２３との間の隙間をシールして液体が漏れないようにするシール部材２４が設けられている。
なお、本実施形態では、シール部材２４としてＯリングを用いているが、Ｏリングに限らず、シールが可能なものであればよい。 The body portion 21 is provided with a hole 21c communicating with the liquid flow passage 21b in order to take out the mandrel 23 to the rear end side, and in the hole 21c, a gap with the mandrel 23 is sealed. A sealing member 24 is provided to prevent the liquid from leaking.
In the present embodiment, an O-ring is used as the seal member 24. However, the seal member 24 is not limited to the O-ring, and any seal may be used.

そして、孔部２１ｃを通じて胴体部２１の後端側に位置する心棒２３の後端には、絶縁材料からなる摘み部２３ａが設けられているとともに、摘み部２３ａのほぼ中央を貫通するように設けられた導電材料からなる電気配線接続部２３ｂが設けられている。   A knob 23a made of an insulating material is provided at the rear end of the stem 23 located on the rear end side of the body 21 through the hole 21c, and is provided to penetrate substantially the center of the knob 23a. An electrical wiring connection 23b made of the conductive material is provided.

図１に示すように、電気配線接続部２３ｂには、電圧印加手段５０の第１電気配線５２が接続され、電気配線接続部２３ｂが心棒２３に接触するようにされることで心棒２３と電気配線接続部２３ｂとが電気的に接続されている。   As shown in FIG. 1, the first electric wiring 52 of the voltage application means 50 is connected to the electric wiring connection 23b so that the electric wiring connection 23b is in contact with the mandrel 23. The wiring connection portion 23 b is electrically connected.

なお、本実施形態では、心棒２３を液体噴霧部２０側の電極としているが、例えば、液体噴霧部２０のノズル２２を導電材料からなるものとして、このノズル２２に電圧印加手段５０の第１電気配線５２を接続するようにし、ノズル２２を液体噴霧部２０側の電極としてもよい。   In the present embodiment, the mandrel 23 is an electrode on the liquid spray unit 20 side, but for example, assuming that the nozzle 22 of the liquid spray unit 20 is made of a conductive material, the first electric The wire 52 may be connected, and the nozzle 22 may be an electrode on the liquid spray unit 20 side.

また、図２に示すように、胴体部２１の後端開口部２１ｄの内周面には、摘み部２３ａを螺合接続するための雌ネジ構造２１ｅが設けられ、一方、摘み部２３ａの先端外周面には、雄ネジ構造２３ｃが設けられている。   Further, as shown in FIG. 2, a female screw structure 21e for screwing and connecting the knob 23a is provided on the inner peripheral surface of the rear end opening 21d of the body 21. On the other hand, the tip of the knob 23a A male screw structure 23c is provided on the outer peripheral surface.

したがって、胴体部２１の後端開口部２１ｄの雌ネジ構造２１ｅに摘み部２３ａの先端外周面の雄ネジ構造２３ｃを螺合させることで心棒２３が取外し可能に胴体部２１に取付けられている。
また、摘み部２３ａの螺合量を調節することで心棒２３を前後方向に移動させることができ、心棒２３の先端面２３ｄの位置を前後方向に調節できるようになっている。 Therefore, the mandrel 23 is removably attached to the body portion 21 by screwing the external thread structure 23c of the tip outer peripheral surface of the knob portion 23a with the internal thread structure 21e of the rear end opening 21d of the body portion 21.
Further, by adjusting the screwing amount of the knob portion 23a, the mandrel 23 can be moved in the front-rear direction, and the position of the tip surface 23d of the mandrel 23 can be adjusted in the front-rear direction.

なお、後述するように、静電気力だけで液体を良好に噴霧するためには、ノズル２２の開口部２２ｂをあまり大きな径にするのが難しいため、目詰まりが発生する場合があるが、上述のように、心棒２３を前後方向に移動させることができるため、ノズル２２に目詰まりが起きても心棒２３を移動させることで目詰まりを解消することができる。   As described later, clogging may occur because it is difficult to make the opening 22b of the nozzle 22 too large in diameter in order to spray the liquid satisfactorily only by the electrostatic force. As described above, since the mandrel 23 can be moved in the front-rear direction, the clogging can be eliminated by moving the mandrel 23 even if the nozzle 22 is clogged.

図３は、図２の液体噴霧部２０の先端側を拡大した拡大断面図であり、図３（ａ）は、心棒２３の先端面２３ｄが後方に位置する場合であり、図３（ｂ）は、図３（ａ）の状態よりも心棒２３の先端面２３ｄが前方に位置する場合である。   FIG. 3 is an enlarged cross-sectional view of the tip end side of the liquid spray unit 20 of FIG. 2, and FIG. 3 (a) is a case where the tip surface 23d of the mandrel 23 is located backward; Is a case where the tip end face 23d of the mandrel 23 is positioned forward of the state of FIG. 3 (a).

図３（ａ）に示すようにノズル２２は、開口部２２ｂ側に向かってテーパ状に内径が小さくなるテーパ角度がαであるテーパ状内径部（範囲Ｗ１参照）を有しており、心棒２３は、先端面２３ｄに向かって外径が小さくなるテーパ角度がβであるテーパ形状部（範囲Ｗ２参照）を有している。   As shown in FIG. 3A, the nozzle 22 has a tapered inner diameter portion (see the range W1) with a taper angle α, the inner diameter of which decreases in a tapered manner toward the opening 22b side. Has a tapered portion (see the range W2) in which the taper angle at which the outer diameter decreases toward the end face 23d is β.

そして、ノズル２２のテーパ状内径部のテーパ角度αが、心棒２３のテーパ形状部のテーパ角度βよりも大きくされている。
また、心棒２３の先端面２３ｄの直径は、ノズル２２の開口部２２ｂの開口直径よりも小さい直径とされているが、心棒２３のテーパ形状部は、後端側に向かって徐々に直径が大きくなり、ノズル２２の開口部２２ｂの開口直径よりも直径の大きい部分を有するように形成されている。 The taper angle α of the tapered inner diameter portion of the nozzle 22 is made larger than the taper angle β of the tapered portion of the mandrel 23.
The diameter of the end face 23d of the stem 23 is smaller than the diameter of the opening 22b of the nozzle 22, but the tapered portion of the stem 23 has a gradually larger diameter toward the rear end. And has a portion with a diameter larger than the diameter of the opening 22 b of the nozzle 22.

上記のように、ノズル２２及び心棒２３の先端側を形成することによって、図３（ａ）及び図３（ｂ）を見比べるとわかるように、心棒２３を前後方向に移動させることでノズル２２と心棒２３とで形成される隙間の幅を調節できるようになり、ノズル２２の開口部２２ｂから出る液体の量を調節することができる。   As described above, by forming the tip end side of the nozzle 22 and the mandrel 23, as shown in a comparison of FIGS. 3A and 3B, the nozzle 22 and the mandrel 22 are moved in the front-rear direction. The width of the gap formed by the mandrel 23 can be adjusted, and the amount of liquid exiting the opening 22 b of the nozzle 22 can be adjusted.

また、図３（ｂ）で示す状態よりも、更に、心棒２３を前方側に動かすことで、心棒２３がノズル２２の内周面に当接し、ノズル２２の開口部２２ｂを閉塞することが可能である。
したがって、液体を噴霧しない状態において、ノズル２２の開口部２２ｂを心棒２３で閉塞させ、ノズル２２内の液体が乾燥することを防止することが可能であるため、ノズル２２の目詰まりを抑制できる。 Further, by moving the mandrel 23 further forward than in the state shown in FIG. 3B, the mandrel 23 can abut on the inner peripheral surface of the nozzle 22, and the opening 22b of the nozzle 22 can be closed. It is.
Therefore, in the state where the liquid is not sprayed, the opening 22 b of the nozzle 22 can be closed by the mandrel 23 to prevent the liquid in the nozzle 22 from being dried, so clogging of the nozzle 22 can be suppressed.

（液体の基本的な噴霧状態）
次に、図２を参照しながら、まず、液体噴霧部２０から液体が噴霧される基本的な状態について説明を行い、その後、被塗物４０に液体を塗布するときの状態について説明する。 (Basic spray condition of liquid)
Next, the basic state in which the liquid is sprayed from the liquid spray unit 20 will be described first with reference to FIG. 2, and then the state when the liquid 40 is applied to the object 40 will be described.

胴体部２１の液体供給口２１ａに供給された液体は、ノズル２２の先端側に供給されて行き、電圧印加手段５０（図１参照）によって被塗物４０及び吸着電極３０と心棒２３との間に印加された電圧で発生する被塗物４０及び吸着電極３０と心棒２３の間の静電気力だけで、前方側に引っ張られて前方に離脱・霧化する。   The liquid supplied to the liquid supply port 21a of the body portion 21 is supplied to the tip end side of the nozzle 22, and the voltage applying means 50 (see FIG. 1) Only the electrostatic force between the object to be coated 40 and the adsorbing electrode 30 and the mandrel 23 generated by the voltage applied to it is pulled forward and it is separated and atomized forward.

この液体が離脱・霧化する状態をより具体的に説明すると、図２に示すように、液体の心棒２３の先端面２３ｄ及びノズル２２の先端外周縁２２ａへの表面張力や粘度による付着力に対して、液体を前方に引っ張る静電気力が釣り合うことで、ノズル２２の先端側に供給された液体が、その先端で円錐形の形状となるテーラコーン６０が形成される。   The state in which the liquid separates and atomizes will be described more specifically. As shown in FIG. 2, the adhesion by the surface tension and viscosity of the liquid to the tip end surface 23d of the mandrel 23 and the tip outer peripheral edge 22a of the nozzle 22 On the other hand, the electrostatic force pulling the liquid forward balances, whereby the liquid supplied to the tip side of the nozzle 22 forms a tailor cone 60 having a conical shape at its tip.

このテーラコーン６０は、電場の作用によって、液体中で正／負電荷の分離が起こり、過剰電荷で帯電したノズル２２の先端のメニスカスが変形して円錐状となって形成されているものである。
そして、テーラコーン６０の先端から静電気力によって液体が真直ぐに引っ張られ、その先端で静電爆発が起こり、液体が離脱・霧化、つまり、噴霧される。 In the tailor cone 60, positive / negative charge separation occurs in the liquid by the action of the electric field, and the meniscus of the tip of the nozzle 22 charged with excess charge is deformed and formed in a conical shape.
Then, the liquid is pulled straight from the tip of the tailor cone 60 by electrostatic force, electrostatic explosion occurs at the tip, and the liquid is detached / atomized, that is, sprayed.

この噴霧される液体、つまり、ノズル２２から離脱して液体粒子となった液体は、離脱前の状態に比べ、空気に触れる面積が飛躍的に大きくなるため溶剤の気化が促進され、その溶剤の気化に伴って帯電している電子間の距離が近づき、さらに、静電反発（静電爆発）が発生して、より小さい粒径の液体粒子に***する。   The sprayed liquid, that is, the liquid separated from the nozzle 22 to become liquid particles has a dramatically larger area in contact with air compared to the state before separation, so the vaporization of the solvent is promoted, and the solvent is With vaporization, the distance between the charged electrons approaches, and electrostatic repulsion (electrostatic explosion) occurs to break up into liquid particles of smaller particle size.

この***が起こると、さらに、***前に比べ空気に触れる表面積が増えることになるため、溶剤の気化が促進され、上述したのと同様に静電爆発が発生し、さらに、小さい粒径の液体粒子に***する。
このようにノズル２２から静電爆発によって噴霧された液体は、噴霧後にも静電爆発が繰り返されることで、更に微粒化が促進され、極めて小さい粒子の状態で被塗物４０に塗布されることになる。 When this split occurs, the surface area exposed to air further increases compared to that before the split, so the vaporization of the solvent is promoted, the electrostatic explosion occurs as described above, and the liquid with a smaller particle size is further generated. It breaks up into particles.
As described above, the liquid sprayed from the nozzle 22 by electrostatic explosion is further repeatedly atomized after atomization, whereby atomization is further promoted and applied to the substrate 40 in the form of extremely small particles. become.

次に、吸着電極３０が配置される位置等についての説明を行いながら、ノズル２２から噴霧された液体が、被塗物４０に塗着するときの状態について説明する。   Next, a state in which the liquid sprayed from the nozzle 22 is applied to the object to be coated 40 will be described while describing the position and the like where the adsorption electrode 30 is disposed.

図１に示すように、被塗物４０は円柱状の棒状であり、吸着電極３０も、その被塗物４０の長さ方向に沿って配置されるように、棒状（本例では、外形が四角形状の棒状体）になっている。
そして、この吸着電極３０は、被塗物４０の近くの第１位置に配置されるものになっている。 As shown in FIG. 1, the object to be coated 40 is in the shape of a cylindrical rod, and the adsorbing electrode 30 is also rod-shaped (in this example, the outer shape is arranged so as to be disposed along the length direction of the object 40). It is a square rod-shaped body).
And this adsorption | suction electrode 30 is arrange | positioned at the 1st position near the to-be-coated-article 40. FIG.

具体的には、第１位置は、吸着電極３０を設けないで、静電気力だけで液体噴霧部２０のノズル２２から被塗物４０に向かって液体が噴霧されるように、被塗物４０と液体噴霧部２０の間に電圧を印加したときに、被塗物４０に塗着する液体が存在する範囲内の位置である。   Specifically, in the first position, the object to be coated 40 is disposed so that the liquid is sprayed from the nozzle 22 of the liquid spray unit 20 toward the object to be coated 40 only by the electrostatic force without providing the adsorption electrode 30. When a voltage is applied between the liquid spray units 20, the position is within the range in which the liquid to be applied to the substrate 40 is present.

このような第１位置に吸着電極３０を配置すると、先にも説明したように、吸着電極３０は、被塗物４０と同電位に保たれているため、吸着電極３０自体も液体が塗着するターゲットとなる。   When the adsorption electrode 30 is disposed at such a first position, as described above, the adsorption electrode 30 is maintained at the same potential as the object 40 to be coated, so that the adsorption electrode 30 itself is also coated with liquid. Target.

このため、第１位置に吸着電極３０を配置した状態で、被塗物４０に沿って液体噴霧部２０を移動させながら、液体を噴霧する噴霧ステップを行うと、その噴霧ステップは、吸着電極３０を配置していなければ、被塗物４０に塗着できたはずの液体のうちの一部を吸着電極３０に吸着させて、被塗物４０に塗着させないものとなる。   For this reason, in the state where the adsorption electrode 30 is disposed at the first position, when the spraying step of spraying the liquid is performed while moving the liquid spraying unit 20 along the object 40, the spraying step is performed by the adsorption electrode 30. If the liquid is not disposed, a part of the liquid that should have been applied to the object to be coated 40 is adsorbed to the adsorption electrode 30 and not applied to the object to be coated 40.

図４は、ノズル２２から噴霧された液体が被塗物４０に塗着するところを示した図であり、図４（ａ）は吸着電極３０を配置した場合を示す図であり、図４（ｂ）は吸着電極３０を配置しなかった場合を示す図である。   FIG. 4 is a view showing that the liquid sprayed from the nozzle 22 is applied to the object to be coated 40, and FIG. 4 (a) is a view showing the case where the adsorption electrode 30 is disposed. b) is a figure which shows the case where the adsorption electrode 30 is not arrange | positioned.

先に説明したように、液体は、静電爆発によって、ノズル２２から噴霧されるほど、強く帯電しているため、静電気力によって、強く被塗物４０側に引き寄せられる。   As described above, since the liquid is so strongly charged that it is sprayed from the nozzle 22 by electrostatic explosion, the liquid is strongly attracted to the coated object 40 by the electrostatic force.

このため、被塗物４０から見て、ノズル２２側（液体噴霧部２０側）を被塗物４０の前方側とし、前方側と反対側となる側を後方側とすると、図４（ｂ）に示すように、被塗物４０の左右外側を通過した液体粒子であっても、被塗物４０の後側に引き寄せられるほどに液体粒子は強く被塗物４０側に引き寄せられる。   Therefore, when the nozzle 22 side (liquid spray unit 20 side) is the front side of the substrate 40 and the side opposite to the front side is the rear side, as viewed from the substrate 40, as shown in FIG. As shown in FIG. 5, even if the liquid particles have passed through the left and right outer sides of the object to be coated 40, the liquid particles are strongly drawn to the side of the object to be coated 40 so as to be attracted to the back side of the object 40 to be coated.

そうすると、被塗物４０が、静電噴霧装置１０の図示しない被塗物４０を固定する固定手段で固定されているだけで、被塗物４０が回転しない場合、被塗物４０の左右外側を回り込んだ液体が二重に被塗物４０の後方側に塗着し、被塗物４０の後方側は、周方向の他の部分よりも膜厚が厚くなった出っ張り（点線丸囲み部Ａ参照）が形成されてしまうことになる。   Then, the object 40 is fixed only by the fixing means for fixing the object 40 (not shown) of the electrostatic spray device 10, and when the object 40 does not rotate, the left and right outer sides of the object 40 are The liquid which has flowed in is applied to the rear side of the object to be coated 40, and the rear side of the object to be coated 40 has a thicker film thickness than the other portions in the circumferential direction (dotted circle encircling portion A Reference) will be formed.

一方、図４（ａ）に示すように、固定された被塗物４０の後方側であって、吸着電極３０を設けないときに、噴霧される液体のうち被塗物４０に塗着する液体が存在する範囲内の第１位置（例えば、被塗物４０からの距離が２０ｍｍ以内の位置）のように、被塗物４０の近くの位置に吸着電極３０が配置されていると、被塗物４０の左右外側を回り込んだ液体のうちの一部が吸着電極３０に吸着して、被塗物４０の後方側に付着しないため、図４（ｂ）で見られる出っ張り（点線丸囲み部Ａ参照）ができるのを抑制することができる。   On the other hand, as shown in FIG. 4A, the liquid to be applied to the object to be coated 40 among the liquids to be sprayed when the adsorption electrode 30 is not provided on the rear side of the object to be fixed 40 fixed. When the adsorption electrode 30 is disposed at a position near the object 40, such as a first position (for example, a position within 20 mm from the object 40) within the range where the Since a part of the liquid that has wound around the left and right outer sides of the object 40 is adsorbed to the adsorption electrode 30 and does not adhere to the rear side of the object 40, the protruding portion (dotted circle encircling portion seen in FIG. A) can be suppressed.

なお、被塗物４０と吸着電極３０との間の距離は、被塗物４０の大きさ（外径）によって、適切な距離が変わるため、静電噴霧装置１０に、吸着電極３０の被塗物４０からの距離が調節できる距離調節手段を設けるようにすることが好ましく、その距離調節手段は、はじめのセッティングのときに距離を調節するものであっても、噴霧ステップを行っているときに、距離を変化させるものであってもよい。   The appropriate distance between the object to be coated 40 and the adsorption electrode 30 changes depending on the size (outer diameter) of the object to be coated 40. It is preferable to provide a distance adjusting means capable of adjusting the distance from the object 40, and even if the distance adjusting means adjusts the distance at the time of the initial setting, when performing the spraying step The distance may be changed.

また、本実施形態では、被塗物４０の後方側に出っ張りができないようにする場合について説明したが、被塗物４０の後方側だけ膜厚を薄くしたい場合には、吸着電極３０をより被塗物４０に近づけて配置するようにすれば、吸着電極３０に吸着される液体の量が増えるため、吸着電極３０を用いれば、被塗物４０の後方側だけ膜厚を薄くすることも可能である。   Further, in the present embodiment, the case where protrusion is not allowed to the rear side of the object to be coated 40 is described, but when it is desired to make the film thickness thinner only on the rear side of the object to be coated 40 If it is arranged close to the coating 40, the amount of liquid adsorbed to the adsorption electrode 30 is increased. Therefore, if the adsorption electrode 30 is used, the film thickness can be reduced only at the rear side of the object 40. It is.

このように、第１実施形態では、被塗物４０が固定されている状態（周方向に回転できない状態）のときに、被塗物４０に対して塗着する液体の塗着量を部分的に変化させることができ、被塗物４０の後方側の塗膜の厚さを周方向の他の部分とほぼ同じ厚さにすることや、逆に、周方向の他の部分よりも薄くするという部分的な塗膜の厚みの調整が可能である。   As described above, in the first embodiment, when the object to be coated 40 is in a fixed state (a state in which it can not rotate in the circumferential direction), the application amount of the liquid applied to the object to be coated 40 is partially The thickness of the coating on the rear side of the article 40 is made to be substantially the same as that of the other portion in the circumferential direction, or conversely, thinner than that of the other portion in the circumferential direction. Partial adjustment of the thickness of the coating film is possible.

なお、上記では、吸着電極３０の外形が四角形状であったが、吸着電極３０の外形は、四角形状に限られず、その他の多角形状（例えば、三角形状等）でもよく、また、円形状であってもよい。   In the above description, the outer shape of the adsorption electrode 30 is a square, but the outer shape of the adsorption electrode 30 is not limited to a square, and may be another polygonal shape (for example, a triangle or the like). It may be.

ただし、先の説明でわかるように、吸着電極３０には、液体が付着することになるので、棒状のものとして、液体の噴霧が終わった後に、付着した液体を洗い流す清掃作業が行いやすいようにするのが好ましい。   However, as will be understood from the above description, since the liquid adheres to the adsorption electrode 30, it is easy to carry out a cleaning operation to wash away the adhered liquid after the spraying of the liquid is finished as a rod-like one. It is preferable to do.

（第２実施形態）
図５は本発明に係る第２実施形態の静電噴霧装置１０を説明するための斜視図である。
第２実施形態においても、静電噴霧装置１０の基本的な構成は、第１実施形態と同様であるため、以下では、第１実施形態と同様である点については説明を省略し、主に異なる点について説明を行う。 Second Embodiment
FIG. 5 is a perspective view for explaining an electrostatic spraying device 10 according to a second embodiment of the present invention.
Also in the second embodiment, the basic configuration of the electrostatic spray device 10 is the same as that of the first embodiment, and therefore, in the following, the description of the same points as the first embodiment is omitted. I will explain the differences.

図５に示すように、第２実施形態では、被塗物４０から見て、液体噴霧部２０側を被塗物４０の前方側とし、その前方側と反対側となる側を後方側とし、残る側を側方側（図では被塗物４０の上下両サイド）とすると、被塗物４０の対向する側方側のそれぞれに、吸着電極３０（一方の吸着電極３０Ａ及び他方の吸着電極３０Ｂ）を配置している。   As shown in FIG. 5, in the second embodiment, the liquid spray unit 20 side is the front side of the substrate 40 and the side opposite to the front side is the rear side, as viewed from the substrate 40, Assuming that the remaining side is the side (in the figure, both the upper and lower sides of the substrate 40), the adsorption electrode 30 (one adsorption electrode 30A and the other adsorption electrode 30B) ) Are placed.

この吸着電極３０（一方の吸着電極３０Ａ及び他方の吸着電極３０Ｂ）は、吸着電極３０（一方の吸着電極３０Ａ及び他方の吸着電極３０Ｂ）全体で見たときの一端側（図左側）が、被塗物４０との間の離間距離がほぼ一定となるように、被塗物４０に沿って配置される第１端（左端）と第２端（右端）を有する直線部とされている。   The adsorption electrode 30 (one adsorption electrode 30A and the other adsorption electrode 30B) has one end side (the left side in the figure) as viewed across the adsorption electrode 30 (one adsorption electrode 30A and the other adsorption electrode 30B). The linear portion has a first end (left end) and a second end (right end) disposed along the object 40 so that the distance between the object 40 and the object 40 is substantially constant.

また、この吸着電極３０（一方の吸着電極３０Ａ及び他方の吸着電極３０Ｂ）は、直線部の第２端から、さらに、吸着電極３０（一方の吸着電極３０Ａ及び他方の吸着電極３０Ｂ）全体で見たときの他端側（図右側）が、被塗物４０に沿って配置され、被塗物４０との間の離間距離が徐々に変わる（徐々に長くなる）ように、被塗物４０に対して傾斜した傾斜直線部とされている。   Further, the adsorption electrode 30 (one adsorption electrode 30A and the other adsorption electrode 30B) is further viewed from the second end of the linear portion in the entire adsorption electrode 30 (one adsorption electrode 30A and the other adsorption electrode 30B) The other end side (right side in the figure) of the case is disposed along the object 40 so that the distance between the object 40 and the object 40 gradually changes (becomes gradually longer). It is considered to be an inclined straight portion inclined to the opposite side.

つまり、吸着電極３０（一方の吸着電極３０Ａ及び他方の吸着電極３０Ｂ）は、くの字状に曲がった棒状（くの字状の棒状体）になっている。
なお、吸着電極３０（一方の吸着電極３０Ａ及び他方の吸着電極３０Ｂ）の外形は、円形状になっている。 That is, the adsorption electrode 30 (one adsorption electrode 30A and the other adsorption electrode 30B) is formed in a V-shaped rod shape (a V-shaped rod-like body).
The outer shape of the adsorption electrode 30 (one adsorption electrode 30A and the other adsorption electrode 30B) is circular.

そして、第２電気配線５３は、電圧電源５１の他方の電極に接続されるのと反対側が３分岐された分岐配線を備えており、その分岐配線のうちの１つである第１分岐配線５３ａが被塗物４０に電気的に接続され、もう１つの分岐配線である第２分岐配線５３ｂが一対設けられている吸着電極３０のうちの一方の吸着電極３０Ａに電気的に接続され、残る１つの分岐配線である第３分岐配線５３ｃが一対設けられている吸着電極３０のうちの他方の吸着電極３０Ｂに電気的に接続されている。   The second electric wiring 53 is provided with a branch wiring that is branched into three on the side opposite to the side connected to the other electrode of the voltage power supply 51, and one of the branch wirings is a first branch wiring 53a. Is electrically connected to the object to be coated 40, and the other second branch wiring 53b, which is another branch wiring, is electrically connected to one of the adsorption electrodes 30A of the adsorption electrodes 30, and the remaining 1 The third branch wiring 53c, which is one branch wiring, is electrically connected to the other adsorption electrode 30B of the adsorption electrodes 30 provided with a pair.

なお、第２実施形態では、被塗物４０が図示しない回転手段によって周方向に回転可能に保持されており、被塗物４０に接続されている第１分岐配線５３ａは、被塗物４０に固定されているのではなく、電気的な接続が可能なように接触させただけの状態にされている。   In the second embodiment, the object to be coated 40 is rotatably held in the circumferential direction by rotating means (not shown), and the first branch wiring 53 a connected to the object to be coated 40 is attached to the object to be coated 40. Rather than being fixed, it is in a state of contact only to allow electrical connection.

また、吸着電極３０（一方の吸着電極３０Ａ及び他方の吸着電極３０Ｂ）は、少なくとも一部（具体的には直線部の部分）が被塗物４０からの距離で２０ｍｍ以内に位置するように配置されている。   In addition, the adsorption electrode 30 (one adsorption electrode 30A and the other adsorption electrode 30B) is disposed such that at least a portion (specifically, a portion of the linear portion) is located within 20 mm from the object 40 It is done.

そして、第２実施形態では、噴霧ステップが被塗物４０を周方向に回転させながら、被塗物４０に沿って、液体噴霧部２０を動かすようにして行われる。
そうすると、最も被塗物４０に近く配置されている吸着電極３０（一方の吸着電極３０Ａ及び他方の吸着電極３０Ｂ）の直線部の部分は、傾斜直線部の部分に比べ、吸着電極３０（一方の吸着電極３０Ａ及び他方の吸着電極３０Ｂ）を設けないときに、被塗物４０に塗着できたはずの液体を多く吸着し、膜厚が薄くなる。 In the second embodiment, the spraying step is performed to move the liquid spray unit 20 along the object 40 while rotating the object 40 in the circumferential direction.
Then, the portion of the linear portion of the adsorption electrode 30 (one adsorption electrode 30A and the other adsorption electrode 30B) disposed closest to the object to be coated 40 has an adsorption electrode 30 (one When the adsorption electrode 30A and the other adsorption electrode 30B are not provided, a large amount of liquid that should have been applied to the object to be coated 40 is adsorbed, and the film thickness becomes thin.

なお、直線部は、被塗物４０との間の離間距離がほぼ一定となるように、被塗物４０に沿って配置されているため、この直線部に対応する被塗物４０の範囲では、被塗物４０上に形成される塗膜の厚さは、ほぼ均一な厚さとなる。   In addition, since the linear portion is disposed along the object to be coated 40 so that the separation distance between the linear portion and the object to be coated 40 is substantially constant, in the range of the object to be coated 40 corresponding to the linear portion The thickness of the coating formed on the substrate 40 is substantially uniform.

一方、傾斜直線部の部分では、吸着電極３０（一方の吸着電極３０Ａ及び他方の吸着電極３０Ｂ）全体で見たときの他端側に向かって、被塗物４０との間の離間距離が徐々に長くなっているため、他端側ほど吸着電極３０（一方の吸着電極３０Ａ及び他方の吸着電極３０Ｂ）に吸着される液体の量が減少し、逆に、被塗物４０に塗着する液体の量が増加する。   On the other hand, in the portion of the inclined linear portion, the distance between the object to be coated 40 gradually increases toward the other end side as viewed in the whole of the adsorption electrode 30 (one adsorption electrode 30A and the other adsorption electrode 30B). Therefore, the amount of the liquid adsorbed to the adsorption electrode 30 (one adsorption electrode 30A and the other adsorption electrode 30B) decreases toward the other end, and conversely, the liquid applied to the object 40 The amount of

このため、傾斜直線部に対応する被塗物４０の範囲では、被塗物４０の端部側（図５の被塗物４０の右の端部側）に向かって、被塗物４０上に形成される塗膜の厚さが次第に厚くなるように液体が塗布されることになる。   Therefore, in the range of the object to be coated 40 corresponding to the inclined linear portion, the object 40 is directed toward the end of the object to be coated 40 (the end on the right side of the object 40 of FIG. 5). The liquid is applied so that the thickness of the formed coating becomes gradually larger.

なお、上記では、被塗物４０の対向する側方側のそれぞれに、吸着電極３０（一方の吸着電極３０Ａ及び他方の吸着電極３０Ｂ）を配置しているが、どちらか一方を配置しても同様に塗膜の厚さを変えることは可能である。
ただし、被塗物４０の対向する側方側のそれぞれに、吸着電極３０（一方の吸着電極３０Ａ及び他方の吸着電極３０Ｂ）を配置した方が、塗膜の厚さをコントロールしやすい。 In the above, although the adsorption electrode 30 (one adsorption electrode 30A and the other adsorption electrode 30B) is disposed on each of the opposite side sides of the object to be coated 40, even if either one is disposed. It is likewise possible to vary the thickness of the coating.
However, when the adsorption electrodes 30 (one adsorption electrode 30A and the other adsorption electrode 30B) are arranged on each of the opposite side sides of the object to be coated 40, the thickness of the coating film can be easily controlled.

また、上記では、吸着電極３０（一方の吸着電極３０Ａ及び他方の吸着電極３０Ｂ）がくの字状の棒状体になっているが、くの字状に限定される必要はない。
例えば、被塗物４０の第１端（左端）から第２端（右端）に向かって、塗膜の厚さを次第に厚くしたり、逆に、薄くしたりする場合には、真直ぐな直線状の吸着電極３０（一方の吸着電極３０Ａ及び他方の吸着電極３０Ｂ）を被塗物４０に対して傾けて配置するようにすればよい。 Moreover, although the adsorption electrode 30 (one adsorption electrode 30A and the other adsorption electrode 30B) is a V-shaped rod-like body in the above, it is not necessary to limit to it.
For example, in the case of gradually increasing or decreasing the thickness of the coating film from the first end (left end) to the second end (right end) of the substrate 40, a straight straight line The adsorption electrode 30 (one adsorption electrode 30A and the other adsorption electrode 30B) may be inclined to the object 40 and disposed.

以上、具体的な実施形態に基づいて本発明の静電噴霧装置１０について説明してきたが、本発明は、上記の具体的な実施形態に限定されるものではなく、適宜、変形や改良を施したものも本発明の技術的範囲に含まれるものであり、そのことは、当業者にとって特許請求の範囲の記載から明らかである。   As mentioned above, although the electrostatic spraying apparatus 10 of this invention was demonstrated based on specific embodiment, this invention is not limited to said specific embodiment, A deformation | transformation and improvement are given suitably Those included in the technical scope of the present invention are obvious to the person skilled in the art from the description of the claims.

１０ 静電噴霧装置
２０ 液体噴霧部
２１ 胴体部
２１ａ 液体供給口
２１ｂ 液体流路
２１ｃ 孔部
２１ｄ 後端開口部
２１ｅ 雌ネジ構造
２２ ノズル
２２ａ 先端外周縁
２２ｂ 開口部
２３ 心棒
２３ａ 摘み部
２３ｂ 電気配線接続部
２３ｃ 雄ネジ構造
２３ｄ 先端面
２４ シール部材
３０ 吸着電極
３０Ａ 一方の吸着電極
３０Ｂ 他方の吸着電極
４０ 被塗物
５０ 電圧印加手段
５１ 電圧電源
５２ 第１電気配線
５３ 第２電気配線
５３ａ 第１分岐配線
５３ｂ 第２分岐配線
５３ｃ 第３分岐配線
５４ アース手段
６０ テーラコーン DESCRIPTION OF SYMBOLS 10 Electrostatic spraying apparatus 20 Liquid spraying part 21 Body part 21a Liquid supply port 21b Liquid flow path 21c Hole part 21d Rear end opening part 21e Female screw structure 22 Nozzle 22a Tip outer periphery 22b Opening part 23 Bar 23a Picking part 23b Electrical wiring connection Section 23c Male thread structure 23d Tip surface 24 Seal member 30 Adsorption electrode 30A One adsorption electrode 30B Another adsorption electrode 40 Substrate 50 Voltage application means 51 Voltage power source 52 First electric wiring 53 Second electric wiring 53a First branch wiring 53b second branch wiring 53c third branch wiring 54 grounding means 60 tailor cone

Claims (12)

静電噴霧装置のノズルを有する液体噴霧部から静電気力だけで液体を噴霧して被塗物に液体を塗布する静電噴霧方法であって、
前記被塗物の近くの第１位置に前記静電噴霧装置の導電性又は半導電性の吸着電極を配置して、前記被塗物及び前記吸着電極を同電位に保ちつつ、前記被塗物及び前記吸着電極と前記液体噴霧部の間に前記静電気力を発生させる電圧を印加して、前記被塗物に向かって前記液体を噴霧する噴霧ステップを含み、
前記第１位置は、前記吸着電極を設けないときに、前記噴霧される液体のうち前記被塗物に塗着する液体が存在する範囲内の位置であり、
前記噴霧ステップが、前記吸着電極を配置していなければ、前記被塗物に塗着できたはずの液体のうちの一部を前記吸着電極に吸着させて、前記被塗物に塗着させないように行われることを特徴とする静電噴霧方法。 An electrostatic spraying method of spraying a liquid from a liquid spraying unit having a nozzle of an electrostatic spraying device only by electrostatic force to apply the liquid to a substrate.
The conductive or semiconductive adsorbing electrode of the electrostatic spray device is disposed at a first position near the article to be coated while the article to be coated and the adsorption electrode are kept at the same potential. And applying a voltage that generates the electrostatic force between the adsorption electrode and the liquid spray unit to spray the liquid toward the substrate;
The first position is a position within a range in which the liquid to be applied to the object to be coated is present among the sprayed liquid when the adsorption electrode is not provided.
If the spray step does not arrange the adsorption electrode, a part of the liquid that should have been applied to the article is adsorbed onto the adsorption electrode and not applied to the article. An electrostatic spray method characterized in that it is carried out. 前記被塗物から見て、前記液体噴霧部側を前記被塗物の前方側とし、前記前方側と反対側となる側を後方側とし、残る側を側方側とすると、前記噴霧ステップが、前記被塗物の後方側又は側方側に前記吸着電極を配置し、前記被塗物を固定した状態で行われることを特徴とする請求項１に記載の静電噴霧方法。   Assuming that the liquid spray portion side is the front side of the substrate, the side opposite to the front side is the rear side, and the remaining side is the side, as viewed from the substrate, the spraying step 2. The electrostatic spray method according to claim 1, wherein the adsorption electrode is disposed on the rear side or the side of the object to be coated, and the object to be coated is fixed. 前記被塗物から見て、前記液体噴霧部側を前記被塗物の前方側とし、前記前方側と反対側となる側を後方側とし、残る側を側方側とすると、前記噴霧ステップが、前記被塗物の後方側及び側方側に沿った少なくとも一部の部分で前記吸着電極と前記被塗物との間の離間距離が変わるように、前記被塗物の側方側に沿って前記吸着電極を配置し、前記被塗物を回転させた状態で行われることを特徴とする請求項１に記載の静電噴霧方法。   Assuming that the liquid spray portion side is the front side of the substrate, the side opposite to the front side is the rear side, and the remaining side is the side, as viewed from the substrate, the spraying step Along the lateral side of the substrate such that the separation distance between the adsorbing electrode and the substrate changes at least in part along the rear side and the lateral side of the substrate; The electrostatic spray method according to claim 1, wherein the adsorption electrode is disposed, and the object to be coated is rotated. 前記噴霧ステップが、前記被塗物の対向する側方側のそれぞれに、前記吸着電極を配置して行われることを特徴とする請求項３に記載の静電噴霧方法。   The electrostatic spraying method according to claim 3, wherein the spraying step is performed by arranging the adsorption electrodes on each of opposite side sides of the object to be coated. 細長い棒状の電極が前記吸着電極として用いられることを特徴とする請求項１から請求項４のいずれか１項に記載の静電噴霧方法。   The electrostatic spray method according to any one of claims 1 to 4, wherein an elongated rod-like electrode is used as the adsorption electrode. 前記第１位置は、前記被塗物からの距離で２０ｍｍ以内に前記吸着電極の少なくとも一部が位置する位置であることを特徴とする請求項１から請求項５のいずれか１項に記載の静電噴霧方法。   The said 1st position is a position where at least one copy of the said adsorption electrode is located within 20 mm by the distance from the said to-be-coated-article, The any one of the Claims 1-5 characterized by the above-mentioned. Electrostatic spraying method. 被塗物に向けて静電気力だけで液体を噴霧する静電噴霧装置であって、
前記静電噴霧装置は、
ノズルを有する液体噴霧部と、
前記被塗物の近くの第１位置に配置される導電性又は半導電性の吸着電極と、
前記被塗物及び前記吸着電極を同電位に保ちつつ、前記被塗物及び前記吸着電極と前記液体噴霧部の間に電圧を印加して前記静電気力を発生させる電圧印加手段と、を備え、
前記第１位置が、前記吸着電極を設けないときに、前記噴霧される液体のうち前記被塗物に塗着する液体が存在する範囲内の位置であることを特徴とする静電噴霧装置。 An electrostatic sprayer for spraying a liquid onto a substrate by electrostatic force alone,
The electrostatic spray device is
A liquid spray unit having a nozzle;
A conductive or semiconductive adsorption electrode disposed at a first position near the substrate;
And voltage applying means for applying a voltage between the object to be coated and the adsorption electrode and the liquid spray section to generate the electrostatic force while maintaining the object to be coated and the adsorption electrode at the same potential.
The electrostatic spray device according to claim 1, wherein the first position is a position within a range where the liquid to be applied to the object to be coated is present among the sprayed liquid when the adsorption electrode is not provided. 前記静電噴霧装置は前記被塗物を固定する固定手段を備え、
前記被塗物から見て、前記液体噴霧部側を前記被塗物の前方側とし、前記前方側と反対側となる側を後方側とし、残る側を側方側とすると、前記吸着電極が、固定された前記被塗物の後方側又は側方側に配置されることを特徴とする請求項７に記載の静電噴霧装置。 The electrostatic spray device comprises fixing means for fixing the object to be coated,
When the liquid spray part side is the front side of the coated article, the side opposite to the front side is the rear side, and the remaining side is the side, as viewed from the article, the adsorption electrode The electrostatic spray device according to claim 7, wherein the electrostatic spray device is disposed on the rear side or the side of the fixed object to be coated. 前記静電噴霧装置は前記被塗物を回転させる回転手段を備え、
前記被塗物から見て、前記液体噴霧部側を前記被塗物の前方側とし、前記前方側と反対側となる側を後方側とし、残る側を側方側とすると、前記吸着電極が、回転する前記被塗物の側方側に沿った少なくとも一部の部分で前記吸着電極と前記被塗物との間の離間距離が変わるように、前記被塗物の側方側に沿って配置されることを特徴とする請求項７に記載の静電噴霧装置。 The electrostatic spray device comprises rotating means for rotating the object to be coated,
When the liquid spray part side is the front side of the coated article, the side opposite to the front side is the rear side, and the remaining side is the side, as viewed from the article, the adsorption electrode Along the lateral side of the substrate such that the separation distance between the adsorbing electrode and the substrate changes at least in part along the lateral side of the rotating substrate. An electrostatic spray device according to claim 7, characterized in that it is arranged. 前記静電噴霧装置は、前記被塗物の対向する側方側のそれぞれに配置される一対の前記吸着電極を備えていることを特徴とする請求項９に記載の静電噴霧装置。   The said electrostatic spraying apparatus is equipped with a pair of said adsorption | suction electrode arrange | positioned at each of the side side which the to-be-coated-article opposes, The electrostatic spraying apparatus of Claim 9 characterized by the above-mentioned. 前記吸着電極が細長い棒状であることを特徴とする請求項７から請求項１０のいずれか１項に記載の静電噴霧装置。   The electrostatic spray device according to any one of claims 7 to 10, wherein the adsorption electrode is an elongated rod shape. 前記第１位置は、前記被塗物からの距離で２０ｍｍ以内に前記吸着電極の少なくとも一部が位置する位置であることを特徴とする請求項７から請求項１１のいずれか１項に記載の静電噴霧装置。   The said 1st position is a position where at least one copy of the said adsorption electrode is located within 20 mm by the distance from the said to-be-coated-article, The any one of the Claims 7 to 11 characterized by the above-mentioned. Electrostatic sprayer.
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Publication number Priority date Publication date Assignee Title
CN113770868A (en) * 2021-07-27 2021-12-10 君原电子科技(海宁)有限公司 A hydrojet device that polishes for electrostatic chuck

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113770868A (en) * 2021-07-27 2021-12-10 君原电子科技(海宁)有限公司 A hydrojet device that polishes for electrostatic chuck

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