JP2018536160A - ロードセル - Google Patents
ロードセル Download PDFInfo
- Publication number
- JP2018536160A JP2018536160A JP2018523806A JP2018523806A JP2018536160A JP 2018536160 A JP2018536160 A JP 2018536160A JP 2018523806 A JP2018523806 A JP 2018523806A JP 2018523806 A JP2018523806 A JP 2018523806A JP 2018536160 A JP2018536160 A JP 2018536160A
- Authority
- JP
- Japan
- Prior art keywords
- load cell
- load
- sensor
- thin film
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 claims abstract description 71
- 239000012528 membrane Substances 0.000 claims abstract description 45
- 239000000758 substrate Substances 0.000 claims abstract description 10
- 238000005452 bending Methods 0.000 claims abstract description 4
- 230000002093 peripheral effect Effects 0.000 claims 1
- 210000004027 cell Anatomy 0.000 description 75
- 238000005259 measurement Methods 0.000 description 28
- 230000008859 change Effects 0.000 description 14
- 230000007423 decrease Effects 0.000 description 6
- 230000008901 benefit Effects 0.000 description 5
- 239000010408 film Substances 0.000 description 5
- 238000003466 welding Methods 0.000 description 5
- 230000009471 action Effects 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 1
- 210000005056 cell body Anatomy 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000012886 linear function Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/26—Auxiliary measures taken, or devices used, in connection with the measurement of force, e.g. for preventing influence of transverse components of force, for preventing overload
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01G—WEIGHING
- G01G21/00—Details of weighing apparatus
- G01G21/24—Guides or linkages for ensuring parallel motion of the weigh-pans
- G01G21/245—Guides or linkages for ensuring parallel motion of the weigh-pans combined with different kinds of bearings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01G—WEIGHING
- G01G7/00—Weighing apparatus wherein the balancing is effected by magnetic, electromagnetic, or electrostatic action, or by means not provided for in the preceding groups
- G01G7/06—Weighing apparatus wherein the balancing is effected by magnetic, electromagnetic, or electrostatic action, or by means not provided for in the preceding groups by electrostatic action
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
- G01L1/144—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors with associated circuitry
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
- Measurement Of Force In General (AREA)
Abstract
Description
C=A/a
Cは静電容量、Aは電極6および電極7の領域、ならびにaは距離を示す。よって静電容量Cは距離aの非線形関数であり、それは偏心的な荷重が中止されないことによる両面における距離の変化の大小による静電容量の減少および増加をも意味する。従来の技術に基づいたロードセル上に加えられた偏心的な荷重はしたがって測定エラーとなる。
Claims (15)
- 基板を有する弾性体と、
薄膜に荷重を加える際に曲がるように適した弾力薄膜と、
薄膜に加えた荷重を測定するセンサと、
薄膜に接続されている第1端部とセンサに接続されている第2端部とを有する少なくとも1つのコネクタを備えるロードセルであり、コネクタは薄膜に加えられた機械力をセンサに伝える構成であるロードセル。 - ロードセルの弾性体に固定された固定第1端部と自由第2端部とを有する請求項1に記載のロードセル。
- コネクタは第1センサ部分の第2端部に接続されているので、薄膜の動きは第1センサ部分の第2端部に伝達される請求項2に記載のロードセル。
- センサは第2部分を有し、前記第2部分は静電容量性測定手段を有する
請求項1〜3のうちいずれか一項に記載のロードセル。 - 前記静電容量性測定手段は少なくとも1つの電極を有する請求項4に記載のロードセル。
- 静電容量性測定回路をさらに備える請求項1〜5のうちいずれか一項に記載のロードセル。
- 前記センサは少なくとも1つの電極を備え、前記電極はロードセルの弾性体に固定されて接続されている請求項1〜6のうちいずれか一項に記載のロードセル。
- 前記センサはコネクタに接続している可動部分を備え、弾性体の他の部分に対して薄膜に合わせて動くように適合されている請求項1〜7のうちいずれか一項に記載のロードセル。
- 前記薄膜は荷重導入部分または荷重受理部分を備え、それらは荷重がロードセルに加えられるとされる薄膜の領域を定義する請求項1〜8のうちいずれか一項に記載のロードセル。
- 前記コネクタは、圧縮力および/または張力を薄膜からセンサに伝達する硬質コネクタである請求項1〜9のうちいずれか一項に記載のロードセル。
- 前記コネクタは、薄膜からセンサに張力を伝達するよう適合された弾力コネクタである請求項1〜10のうちいずれか一項に記載のロードセル。
- 前記ロードセルは側壁を備え、薄膜は側壁の片方の端部に接続されており、薄膜は、薄膜に荷重が加えられた時に側壁に対して動くよう適合されており、ロードセルの側壁は環状の壁でよく、環状の壁の片方は基板端部とみなされるが、もう片方の環状の壁は薄膜の周辺部に貼付されている請求項1〜11のうちいずれか一項に記載のロードセル。
- 前記側壁は十分に堅固である請求項12に記載のロードセル。
- 前記コネクタは軸接続部を介して前記薄膜および/または前記センサに付いている請求項1〜13のうちいずれか一項に記載のロードセル。
- 前記薄膜は前記ロードセルの基板に対向して配置される請求項1〜14のうちいずれか一項に記載のロードセル。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DKPA201500791 | 2015-12-07 | ||
DKPA201500791 | 2015-12-07 | ||
PCT/DK2016/000046 WO2017097304A1 (en) | 2015-12-07 | 2016-12-01 | Load cell |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018536160A true JP2018536160A (ja) | 2018-12-06 |
JP6864682B2 JP6864682B2 (ja) | 2021-04-28 |
Family
ID=59012612
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018523806A Active JP6864682B2 (ja) | 2015-12-07 | 2016-12-01 | ロードセル |
Country Status (6)
Country | Link |
---|---|
US (1) | US10451501B2 (ja) |
EP (1) | EP3387402B1 (ja) |
JP (1) | JP6864682B2 (ja) |
KR (1) | KR102557074B1 (ja) |
CN (1) | CN108291846B (ja) |
WO (1) | WO2017097304A1 (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110088586B (zh) * | 2016-08-05 | 2021-11-05 | 斯蒂芬.A.马什 | 微压力传感器 |
JP6257017B1 (ja) * | 2017-09-26 | 2018-01-10 | 株式会社トライフォース・マネジメント | 力覚センサ |
JP6925653B2 (ja) * | 2018-01-09 | 2021-08-25 | 株式会社トライフォース・マネジメント | 力覚センサ |
CN110476045B (zh) * | 2018-01-09 | 2022-08-12 | 三角力量管理株式会社 | 力觉传感器 |
EP3569994B1 (en) | 2018-05-16 | 2022-11-23 | Wincor Nixdorf International GmbH | Device for measuring of forces and weighing device |
EP3705861B1 (en) * | 2019-03-08 | 2021-05-12 | Infineon Technologies AG | Sensor with a membrane electrode, a counterelectrode, and at least one spring |
JP7152774B2 (ja) * | 2019-03-13 | 2022-10-13 | 株式会社タニタ | 重量測定装置 |
EP3798596A1 (en) * | 2019-09-26 | 2021-03-31 | Dana Motion Systems Italia S.R.L. | Sensor arrangement for measuring a mechanical loading |
GB202218260D0 (en) * | 2022-12-05 | 2023-01-18 | Metryx Ltd | Apparatus for measuring the weight or mass of an object |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3713333A (en) * | 1971-06-24 | 1973-01-30 | Testing Technology Corp | Force measuring apparatus |
CH595200A5 (ja) * | 1975-05-16 | 1978-02-15 | Kistler Instrumente Ag | |
US4773269A (en) * | 1986-07-28 | 1988-09-27 | Rosemount Inc. | Media isolated differential pressure sensors |
US4879914A (en) * | 1989-02-27 | 1989-11-14 | Sundstrand Data Control, Inc. | Unitary push-pull force transducer |
DE4023420A1 (de) * | 1990-07-24 | 1992-01-30 | Pfister Gmbh | Drucksensor |
RU2017100C1 (ru) * | 1991-02-25 | 1994-07-30 | Научно-исследовательский институт приборостроения Росгидромета | Датчик давления |
DE4132108A1 (de) * | 1991-09-26 | 1993-04-01 | Siemens Ag | Kraftsensor |
US5336854A (en) * | 1992-04-03 | 1994-08-09 | Weigh-Tronix, Inc. | Electronic force sensing load cell |
WO2002084580A1 (en) * | 2001-04-13 | 2002-10-24 | 3M Innovative Properties Company | Force sensors and touch panels using same |
CN2511958Y (zh) * | 2001-11-13 | 2002-09-18 | 孔载明 | 膜片压力表机芯 |
AU2002365685A1 (en) * | 2001-12-07 | 2003-06-17 | Nils Aage Juul Eilersen | Sealed load cell |
DE10325390A1 (de) * | 2003-05-28 | 2004-12-30 | Bizerba Gmbh & Co. Kg | Kraftmesszelle |
ATE376704T1 (de) * | 2005-03-21 | 2007-11-15 | Delfmems | Rf mems schalter mit einer flexiblen und freien schaltmembran |
WO2009049626A1 (en) * | 2007-10-16 | 2009-04-23 | Nils Aage Juul Eilersen | Eccentric load compensated load cell |
WO2009077463A1 (en) * | 2007-12-14 | 2009-06-25 | Siemens Aktiengesellschaft | Load cell |
US8191428B2 (en) | 2007-12-28 | 2012-06-05 | Ypoint Capital, Inc. | Thermal effect and off-center load compensation of a sensor |
JP2009186209A (ja) * | 2008-02-04 | 2009-08-20 | Toyota Motor Corp | 圧力センサ |
FR2977319B1 (fr) * | 2011-07-01 | 2014-03-14 | Commissariat Energie Atomique | Dispositif de mesure de pression a sensiblite optimisee |
FR3018916B1 (fr) | 2014-03-19 | 2017-08-25 | Commissariat Energie Atomique | Capteur de mesure de pression differentielle microelectromecanique et/ou nanoelectromecanique |
EP3155389B1 (en) * | 2014-06-11 | 2019-05-08 | EILERSEN, Nils Aage Juul | Load cell having an elastic body |
-
2016
- 2016-12-01 JP JP2018523806A patent/JP6864682B2/ja active Active
- 2016-12-01 KR KR1020187012752A patent/KR102557074B1/ko active IP Right Grant
- 2016-12-01 CN CN201680070076.9A patent/CN108291846B/zh active Active
- 2016-12-01 WO PCT/DK2016/000046 patent/WO2017097304A1/en active Application Filing
- 2016-12-01 EP EP16819804.2A patent/EP3387402B1/en active Active
-
2017
- 2017-11-28 US US15/824,756 patent/US10451501B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
KR20180090256A (ko) | 2018-08-10 |
EP3387402A1 (en) | 2018-10-17 |
CN108291846A (zh) | 2018-07-17 |
US10451501B2 (en) | 2019-10-22 |
JP6864682B2 (ja) | 2021-04-28 |
KR102557074B1 (ko) | 2023-07-18 |
EP3387402B1 (en) | 2021-04-07 |
US20180156678A1 (en) | 2018-06-07 |
WO2017097304A1 (en) | 2017-06-15 |
CN108291846B (zh) | 2020-08-04 |
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