JP2018517232A - 再充電可能電池及びその製造方法 - Google Patents
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- 238000004519 manufacturing process Methods 0.000 title claims description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 151
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 151
- 239000010703 silicon Substances 0.000 claims abstract description 151
- 239000010409 thin film Substances 0.000 claims abstract description 60
- 239000003792 electrolyte Substances 0.000 claims abstract description 20
- 229910003002 lithium salt Inorganic materials 0.000 claims abstract description 10
- -1 lithium salt compound Chemical class 0.000 claims abstract description 10
- 238000000034 method Methods 0.000 claims description 49
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 28
- 239000000203 mixture Substances 0.000 claims description 22
- 239000000758 substrate Substances 0.000 claims description 22
- 229910001416 lithium ion Inorganic materials 0.000 claims description 17
- 229910000676 Si alloy Inorganic materials 0.000 claims description 13
- 229910045601 alloy Inorganic materials 0.000 claims description 13
- 239000000956 alloy Substances 0.000 claims description 13
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims description 13
- 238000009830 intercalation Methods 0.000 claims description 11
- 230000002687 intercalation Effects 0.000 claims description 11
- 230000015572 biosynthetic process Effects 0.000 claims description 10
- 239000007789 gas Substances 0.000 claims description 9
- 229910021423 nanocrystalline silicon Inorganic materials 0.000 claims description 9
- 238000009792 diffusion process Methods 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- 229910052739 hydrogen Inorganic materials 0.000 claims description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 6
- 238000000151 deposition Methods 0.000 claims description 6
- 239000001257 hydrogen Substances 0.000 claims description 6
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 5
- 229910000077 silane Inorganic materials 0.000 claims description 5
- 239000002243 precursor Substances 0.000 claims description 4
- 229910018540 Si C Inorganic materials 0.000 claims description 3
- 229910018530 Si-Ag Inorganic materials 0.000 claims description 3
- 229910007991 Si-N Inorganic materials 0.000 claims description 3
- 229910008355 Si-Sn Inorganic materials 0.000 claims description 3
- 229910008383 Si—Ag Inorganic materials 0.000 claims description 3
- 229910008310 Si—Ge Inorganic materials 0.000 claims description 3
- 229910006294 Si—N Inorganic materials 0.000 claims description 3
- 229910006453 Si—Sn Inorganic materials 0.000 claims description 3
- 229910052786 argon Inorganic materials 0.000 claims description 3
- 239000004020 conductor Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 3
- 239000005046 Chlorosilane Substances 0.000 claims description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 2
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 claims description 2
- 238000009831 deintercalation Methods 0.000 claims description 2
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 description 19
- 230000008569 process Effects 0.000 description 11
- 239000007773 negative electrode material Substances 0.000 description 9
- 239000000463 material Substances 0.000 description 8
- 238000003860 storage Methods 0.000 description 8
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 7
- 229910052744 lithium Inorganic materials 0.000 description 7
- 230000008859 change Effects 0.000 description 6
- 238000005336 cracking Methods 0.000 description 6
- 238000009826 distribution Methods 0.000 description 6
- 230000008901 benefit Effects 0.000 description 5
- 230000008021 deposition Effects 0.000 description 5
- 239000002210 silicon-based material Substances 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 229910002804 graphite Inorganic materials 0.000 description 4
- 239000010439 graphite Substances 0.000 description 4
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 4
- 150000003377 silicon compounds Chemical class 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000004146 energy storage Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000009776 industrial production Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910021425 protocrystalline silicon Inorganic materials 0.000 description 2
- 229910012851 LiCoO 2 Inorganic materials 0.000 description 1
- 229910010707 LiFePO 4 Inorganic materials 0.000 description 1
- 229910015643 LiMn 2 O 4 Inorganic materials 0.000 description 1
- 229910015014 LiNiCoAlO Inorganic materials 0.000 description 1
- 229910013210 LiNiMnCoO Inorganic materials 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000010405 anode material Substances 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 239000011572 manganese Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- 239000002159 nanocrystal Substances 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 239000002071 nanotube Substances 0.000 description 1
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- 230000003287 optical effect Effects 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- 229910021426 porous silicon Inorganic materials 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
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- 229910052596 spinel Inorganic materials 0.000 description 1
- 239000011029 spinel Substances 0.000 description 1
- 238000012916 structural analysis Methods 0.000 description 1
- 230000002459 sustained effect Effects 0.000 description 1
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- H01M4/134—Electrodes based on metals, Si or alloys
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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Abstract
Description
本発明は、再充電可能電池に関し、特に、シリコンベースの負極材料が設けられたリチウムイオン再充電可能電池に関する。さらなる態様において、本発明は、再充電可能電池を製造する方法に関する。
現在最新のリチウムイオン電池は、典型的には、負極材料として黒鉛を採用し、黒鉛の貯蔵容量は、およそ370mAh/gである。シリコン負極材料は、およそ4200mAh/gよりずっと大きい理論容量を有するが、リチウムのインターカレーション法は300%もの、又はそれ以上もの高い、シリコン負極材料の体積増加をもたらすことが知られている。バルクシリコン負極材料に関する主な問題のうちの1つは、バルクシリコン負極材料がインターカレーション法の間に迅速に粉砕されること、及びバルクシリコン負極材料がその機能を比較的少数回の充電サイクルの後に失うことである。
本発明は、再充電可能電池を提供しようとするものであり、特に、単位重量当たりの改善された貯蔵容量及び低減された容量減退を有するシリコン負極材料を含むリチウムイオン電池提供しようとするものである。
金属基板に、負極層としてシリコンを含むナノ構造薄膜層を形成するステップであって、形成工程が、低圧PECVDによる負極層の堆積を含み、PECVD法が、シリコン含有ガスと水素H2とを含む混合物のマイクロ波プラズマの使用を含み、それにおいて、形成工程が、複数の隣接した列を含むナノ構造薄膜層を作り出すように構成されており、列が、基板から垂直方向に延び、互いに隣接して配列される一方で、垂直方向に延びる列境界によって分離されており、複数の列は、シリコンを含んでおり、ナノ結晶領域が存在する非晶構造を有する、形成するステップを含む。
図1は、本発明による再充電可能電池1の一実施形態の断面を示す。図示する実施形態において、再充電可能電池1は、少なくとも電解質層2と、正極層4と、負極層6とを備え、上記層2、4、6は、筐体1aによって囲まれている。電解質層2は、正極層4の正極表面8と負極層6の負極表面10との間に配列されたリチウム塩化合物を含む。正極層4並びに負極層6はそれぞれ、それぞれの基板5に配列されている。
Claims (25)
- 少なくとも電解質層(2)と、正極層(4)と、負極層(6)とを備える再充電可能電池であって、前記電解質層(2)が、
前記正極層(4)の正極表面(8)と前記負極層(6)の負極表面(10)との間に配列されたリチウム塩化合物を含み、
前記負極層(6)が、複数の隣接した列(12)を含むナノ構造薄膜層であり、前記列(12)が、前記負極表面(10)から垂直方向に延び、前記隣接した列が、前記垂直方向に延びる列境界(14)によって分離されており、
前記列(12)が、シリコンを含んでおり、ナノ結晶領域が存在する非晶構造を有する、再充電可能電池。 - 前記列が、最大で80%までのナノ結晶シリコンを含む、請求項1に記載の再充電可能電池。
- 前記列が、さらに、非晶質シリコンから成る、請求項1又は2に記載の再充電可能電池。
- 前記列が、シリコン合金をさらに含む、請求項1〜3のいずれか一項に記載の再充電可能電池。
- 前記シリコン合金が、非晶構造を有する、請求項4に記載の再充電可能電池。
- 前記シリコン合金が、Si−C、Si−N、Si−Ge、Si−Ag、Si−Snを含む合金の群から選択される、請求項4又は5に記載の再充電可能電池。
- 前記ナノ構造薄膜層が、約30%〜約70%の多孔率を有する、請求項1〜6のいずれか一項に記載の再充電可能電池。
- 前記列境界(14)が、インターカレーション及びデインターカレーション中にLiイオンの拡散経路を形成する、請求項1〜7のいずれか一項に記載の再充電可能電池。
- 前記列が、前記垂直方向に伸長される、請求項1〜8のいずれか一項に記載の再充電可能電池。
- 前記列が、前記垂直方向に約0.1μm〜約10μmの長さを有する、請求項9に記載の再充電可能電池。
- 前記列が、前記垂直方向に約3μm〜約8μmの長さを有する、請求項9又は10に記載の再充電可能電池。
- 前記列が、前記ナノ構造薄膜層の前記表面に沿って約0.25〜約0.5μm2の平均底面積を有する、請求項9〜11のいずれか一項に記載の再充電可能電池。
- 前記ナノ構造薄膜層が、金属導体層又は半導体層を備える基板に配列される、請求項1〜11のいずれか一項に記載の再充電可能電池。
- 少なくとも電解質層(2)と、正極層(4)と、負極層(6)とを備える再充電可能電池を製造するための方法であって、
金属基板に、負極層(6)としてシリコンを含むナノ構造薄膜層を形成するステップであり、前記形成工程が、低圧PECVDによる前記負極層の堆積を含み、前記PECVD法が、シリコン含有ガスと水素H2とを含む混合物のマイクロ波プラズマの使用を含み、それにおいて、前記形成工程が、複数の隣接した列(12)を含む前記ナノ構造薄膜層を作り出すように構成されており、前記列(12)が、前記基板から垂直方向に延び、互いに隣接して配列される一方で、前記垂直方向に延びる列境界(14)によって分離されており、前記複数の列(12)が、シリコンを含んでおり、ナノ結晶領域が存在する非晶構造を有する、形成するステップを含み、
前記方法は、
前記電解質層(2)としてリチウム塩化合物を用意するステップと、
前記正極層の正極表面(8)と前記ナノ構造薄膜層(6)の負極表面(10)との間に前記電解質層(2)を配列するステップと
をさらに含む、方法。 - 前記マイクロ波プラズマが、細長いアンテナ線によって作り出されており、前記線の各端部が、マイクロ波発振器に結合される、請求項14に記載の方法。
- 前記列が、最大で80%までのナノ結晶シリコンを含む、請求項14又は15に記載の方法。
- 前記列が、さらに、非晶質シリコンから成る、請求項14〜16のいずれか一項に記載の方法。
- 前記列が、シリコン合金をさらに含む、請求項14〜17のいずれか一項に記載の方法。
- 前記シリコン合金が、非晶質である、請求項14〜18のいずれか一項に記載の方法。
- 前記列が、非晶質シリコンとナノ結晶シリコン合金とを含む、請求項14〜18のいずれか一項に記載の方法。
- シリコン含有ガスとH2との前記混合物が、前記シリコン合金を形成するための合金成分をさらに含む、請求項20に記載の方法。
- 前記ナノ構造薄膜層の前記形成が、n型導電層又はp型導電層のいずれかとして前記ナノ構造薄膜層をドープするために、n型又はp型のいずれかのドーピング前駆体を添加するステップを含む、請求項14〜21のいずれか一項に記載の方法。
- シリコン含有ガスとH2との前記混合物が、アルゴンArをさらに含む、請求項21又は22に記載の方法。
- 前記基板が、金属導体層又は半導体層を備える、請求項14〜23のいずれか一項に記載の方法。
- 前記シリコン含有ガスが、シランとクロロシランとを含む群から選択される、請求項14〜24のいずれか一項に記載の方法。
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Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP4324577A1 (en) | 2015-12-16 | 2024-02-21 | 6K Inc. | Method of producing spheroidal dehydrogenated titanium alloy particles |
US10910653B2 (en) | 2018-02-26 | 2021-02-02 | Graphenix Development, Inc. | Anodes for lithium-based energy storage devices |
JP7064709B2 (ja) * | 2018-02-28 | 2022-05-11 | Tdk株式会社 | リチウムイオン二次電池用負極及びリチウムイオン二次電池 |
US10833356B2 (en) | 2018-07-03 | 2020-11-10 | International Business Machines Corporation | Kinetically fast charging lithium-ion battery |
US10833311B2 (en) | 2018-07-03 | 2020-11-10 | International Business Machines Corporation | Method of making an anode structure containing a porous region |
US10777842B2 (en) | 2018-07-03 | 2020-09-15 | International Business Machines Corporation | Rechargeable lithium-ion battery with an anode structure containing a porous region |
US10833357B2 (en) | 2018-07-03 | 2020-11-10 | International Business Machines Corporation | Battery structure with an anode structure containing a porous region and method of operation |
CN109698312A (zh) * | 2018-12-06 | 2019-04-30 | 上海空间电源研究所 | 一种用于锂电池的初晶态纳米硅负极材料的制备方法 |
EP3682962A1 (en) | 2019-01-18 | 2020-07-22 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Direct carbon dioxide capture from air |
SG11202111576QA (en) | 2019-04-30 | 2021-11-29 | 6K Inc | Mechanically alloyed powder feedstock |
US11024842B2 (en) | 2019-06-27 | 2021-06-01 | Graphenix Development, Inc. | Patterned anodes for lithium-based energy storage devices |
US11658300B2 (en) | 2019-08-13 | 2023-05-23 | Graphenix Development, Inc. | Anodes for lithium-based energy storage devices, and methods for making same |
NL2023642B1 (en) | 2019-08-14 | 2021-02-24 | Leydenjar Tech B V | Silicon composition material for use as battery anode |
US11489154B2 (en) | 2019-08-20 | 2022-11-01 | Graphenix Development, Inc. | Multilayer anodes for lithium-based energy storage devices |
CA3148530A1 (en) | 2019-08-20 | 2021-02-25 | Graphenix Development, Inc. | Structured anodes for lithium-based energy storage devices |
US11495782B2 (en) | 2019-08-26 | 2022-11-08 | Graphenix Development, Inc. | Asymmetric anodes for lithium-based energy storage devices |
JP2023512391A (ja) | 2019-11-18 | 2023-03-27 | シックスケー インコーポレイテッド | 球形粉体用の特異な供給原料及び製造方法 |
US11590568B2 (en) | 2019-12-19 | 2023-02-28 | 6K Inc. | Process for producing spheroidized powder from feedstock materials |
EP4173060A1 (en) | 2020-06-25 | 2023-05-03 | 6K Inc. | Microcomposite alloy structure |
CN116157189A (zh) | 2020-07-17 | 2023-05-23 | 卡宾控股有限公司 | 用于从空气直接捕获二氧化碳的装置和方法 |
AU2021349358A1 (en) | 2020-09-24 | 2023-02-09 | 6K Inc. | Systems, devices, and methods for starting plasma |
US11919071B2 (en) | 2020-10-30 | 2024-03-05 | 6K Inc. | Systems and methods for synthesis of spheroidized metal powders |
NL2032368B1 (en) * | 2022-07-04 | 2024-01-19 | Leydenjar Tech B V | High Cycle-life Lithium-ion Cells with Nano-structured Silicon Comprising Anodes |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002083594A (ja) * | 1999-10-22 | 2002-03-22 | Sanyo Electric Co Ltd | リチウム電池用電極並びにこれを用いたリチウム電池及びリチウム二次電池 |
JP2011519314A (ja) * | 2008-03-20 | 2011-07-07 | エコール ポリテクニク | 金属酸化物基体上でのナノ構造体の製造方法、金属酸化物基体上への薄膜の付着方法、および薄膜装置 |
JP2012023027A (ja) * | 2010-06-14 | 2012-02-02 | Semiconductor Energy Lab Co Ltd | 蓄電装置およびその作製方法 |
JP2013038073A (ja) * | 2011-07-14 | 2013-02-21 | Semiconductor Energy Lab Co Ltd | 蓄電装置、電極及びその作製方法 |
WO2014008433A1 (en) * | 2012-07-03 | 2014-01-09 | Catalyst Power Technologies, Inc. | Hybrid energy storage devices including support filaments |
JP2015510244A (ja) * | 2012-02-09 | 2015-04-02 | オヴォニック バッテリー カンパニー インコーポレイテッド | リチウム電池用安定化アノード及びその製造方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5568606A (en) * | 1994-10-11 | 1996-10-22 | International Business Machines Corporation | Method and apparatus for maximizing effective disk capacity using adaptive skewing |
TW447013B (en) * | 2000-05-18 | 2001-07-21 | Nat Science Council | Manufacturing method for self-polymerized silicon quantum dots |
US20060024442A1 (en) * | 2003-05-19 | 2006-02-02 | Ovshinsky Stanford R | Deposition methods for the formation of polycrystalline materials on mobile substrates |
GB0601319D0 (en) * | 2006-01-23 | 2006-03-01 | Imp Innovations Ltd | A method of fabricating pillars composed of silicon-based material |
US7718707B2 (en) * | 2006-12-21 | 2010-05-18 | Innovalight, Inc. | Method for preparing nanoparticle thin films |
GB0713898D0 (en) * | 2007-07-17 | 2007-08-29 | Nexeon Ltd | A method of fabricating structured particles composed of silcon or a silicon-based material and their use in lithium rechargeable batteries |
US7541297B2 (en) * | 2007-10-22 | 2009-06-02 | Applied Materials, Inc. | Method and system for improving dielectric film quality for void free gap fill |
US9564629B2 (en) * | 2008-01-02 | 2017-02-07 | Nanotek Instruments, Inc. | Hybrid nano-filament anode compositions for lithium ion batteries |
US20110189510A1 (en) * | 2010-01-29 | 2011-08-04 | Illuminex Corporation | Nano-Composite Anode for High Capacity Batteries and Methods of Forming Same |
KR101706353B1 (ko) * | 2010-04-02 | 2017-02-14 | 삼성전자주식회사 | 고밀도 금속 나노클러스터 함유 실리콘 나노와이어 및 그의 제조방법 |
CN102842662B (zh) * | 2012-09-10 | 2015-07-01 | 圆融光电科技有限公司 | 一种纳米柱阵列化合物半导体器件的自组装制备方法 |
US20150004485A1 (en) * | 2013-06-28 | 2015-01-01 | Zhaohui Chen | Robust amorphous silicon anodes, rechargable batteries having amorphous silicon anodes, and associated methods |
JP7021102B2 (ja) * | 2016-03-28 | 2022-02-16 | ビーエーエスエフ コーポレーション | 充電式電池用のシリコンに基づく固体電解質 |
-
2015
- 2015-04-07 NL NL2014588A patent/NL2014588B1/en not_active IP Right Cessation
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Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002083594A (ja) * | 1999-10-22 | 2002-03-22 | Sanyo Electric Co Ltd | リチウム電池用電極並びにこれを用いたリチウム電池及びリチウム二次電池 |
JP2011519314A (ja) * | 2008-03-20 | 2011-07-07 | エコール ポリテクニク | 金属酸化物基体上でのナノ構造体の製造方法、金属酸化物基体上への薄膜の付着方法、および薄膜装置 |
JP2012023027A (ja) * | 2010-06-14 | 2012-02-02 | Semiconductor Energy Lab Co Ltd | 蓄電装置およびその作製方法 |
JP2013038073A (ja) * | 2011-07-14 | 2013-02-21 | Semiconductor Energy Lab Co Ltd | 蓄電装置、電極及びその作製方法 |
JP2015510244A (ja) * | 2012-02-09 | 2015-04-02 | オヴォニック バッテリー カンパニー インコーポレイテッド | リチウム電池用安定化アノード及びその製造方法 |
WO2014008433A1 (en) * | 2012-07-03 | 2014-01-09 | Catalyst Power Technologies, Inc. | Hybrid energy storage devices including support filaments |
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