JP2018089587A - 超純水製造装置及び超純水製造装置の運転方法 - Google Patents
超純水製造装置及び超純水製造装置の運転方法 Download PDFInfo
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- 229910021642 ultra pure water Inorganic materials 0.000 title claims abstract description 59
- 239000012498 ultrapure water Substances 0.000 title claims abstract description 59
- 238000000034 method Methods 0.000 title claims description 17
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical group [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims abstract description 129
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 129
- 229910052751 metal Inorganic materials 0.000 claims abstract description 96
- 239000002184 metal Substances 0.000 claims abstract description 96
- 239000011347 resin Substances 0.000 claims abstract description 80
- 229920005989 resin Polymers 0.000 claims abstract description 80
- 239000003054 catalyst Substances 0.000 claims abstract description 73
- 230000003647 oxidation Effects 0.000 claims abstract description 33
- 238000007254 oxidation reaction Methods 0.000 claims abstract description 33
- 239000012528 membrane Substances 0.000 claims abstract description 31
- 239000002245 particle Substances 0.000 claims abstract description 17
- 238000005342 ion exchange Methods 0.000 claims abstract description 16
- 238000004519 manufacturing process Methods 0.000 claims description 48
- 239000007800 oxidant agent Substances 0.000 claims description 20
- 230000001172 regenerating effect Effects 0.000 claims description 15
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 12
- 229910052697 platinum Inorganic materials 0.000 claims description 9
- 238000009296 electrodeionization Methods 0.000 claims description 6
- 229910052763 palladium Inorganic materials 0.000 claims description 6
- 229910001252 Pd alloy Inorganic materials 0.000 claims description 5
- 229910001260 Pt alloy Inorganic materials 0.000 claims description 5
- 238000012545 processing Methods 0.000 claims description 5
- 239000002923 metal particle Substances 0.000 claims description 3
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 abstract description 110
- 238000000108 ultra-filtration Methods 0.000 abstract description 12
- 238000007872 degassing Methods 0.000 abstract description 3
- 230000009467 reduction Effects 0.000 abstract description 2
- 230000008929 regeneration Effects 0.000 abstract 2
- 238000011069 regeneration method Methods 0.000 abstract 2
- 239000002082 metal nanoparticle Substances 0.000 description 18
- 239000003957 anion exchange resin Substances 0.000 description 15
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 12
- 239000001257 hydrogen Substances 0.000 description 12
- 229910052739 hydrogen Inorganic materials 0.000 description 12
- 238000000354 decomposition reaction Methods 0.000 description 11
- 230000007423 decrease Effects 0.000 description 8
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 7
- 239000005416 organic matter Substances 0.000 description 7
- 239000001301 oxygen Substances 0.000 description 7
- 229910052760 oxygen Inorganic materials 0.000 description 7
- 239000000126 substance Substances 0.000 description 7
- 238000012360 testing method Methods 0.000 description 7
- 230000003197 catalytic effect Effects 0.000 description 6
- 238000005345 coagulation Methods 0.000 description 5
- 230000015271 coagulation Effects 0.000 description 5
- 230000006866 deterioration Effects 0.000 description 5
- 150000002500 ions Chemical class 0.000 description 5
- 150000007524 organic acids Chemical class 0.000 description 5
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- 239000010419 fine particle Substances 0.000 description 4
- 238000006722 reduction reaction Methods 0.000 description 4
- 150000003839 salts Chemical class 0.000 description 4
- 239000002344 surface layer Substances 0.000 description 4
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 125000000129 anionic group Chemical group 0.000 description 3
- 125000002091 cationic group Chemical group 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- 238000010828 elution Methods 0.000 description 3
- 238000001914 filtration Methods 0.000 description 3
- 230000007774 longterm Effects 0.000 description 3
- 229910021645 metal ion Inorganic materials 0.000 description 3
- 235000005985 organic acids Nutrition 0.000 description 3
- 238000004062 sedimentation Methods 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- IKHGUXGNUITLKF-UHFFFAOYSA-N Acetaldehyde Chemical compound CC=O IKHGUXGNUITLKF-UHFFFAOYSA-N 0.000 description 2
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 241000894006 Bacteria Species 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000003153 chemical reaction reagent Substances 0.000 description 2
- 239000003638 chemical reducing agent Substances 0.000 description 2
- 239000003792 electrolyte Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000005374 membrane filtration Methods 0.000 description 2
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 description 2
- 238000001471 micro-filtration Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- KJFMBFZCATUALV-UHFFFAOYSA-N phenolphthalein Chemical compound C1=CC(O)=CC=C1C1(C=2C=CC(O)=CC=2)C2=CC=CC=C2C(=O)O1 KJFMBFZCATUALV-UHFFFAOYSA-N 0.000 description 2
- -1 platinum group metals Chemical class 0.000 description 2
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 description 1
- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- 229910002651 NO3 Inorganic materials 0.000 description 1
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- PMZURENOXWZQFD-UHFFFAOYSA-L Sodium Sulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=O PMZURENOXWZQFD-UHFFFAOYSA-L 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
- 238000002835 absorbance Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000009841 combustion method Methods 0.000 description 1
- 150000004696 coordination complex Chemical class 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 229910000365 copper sulfate Inorganic materials 0.000 description 1
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 1
- 238000011033 desalting Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 235000019253 formic acid Nutrition 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000008235 industrial water Substances 0.000 description 1
- 239000003456 ion exchange resin Substances 0.000 description 1
- 229920003303 ion-exchange polymer Polymers 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 238000005339 levitation Methods 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 229910052762 osmium Inorganic materials 0.000 description 1
- SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 description 1
- 238000006864 oxidative decomposition reaction Methods 0.000 description 1
- 238000010525 oxidative degradation reaction Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000005502 peroxidation Methods 0.000 description 1
- 239000001267 polyvinylpyrrolidone Substances 0.000 description 1
- 235000013855 polyvinylpyrrolidone Nutrition 0.000 description 1
- 229920000036 polyvinylpyrrolidone Polymers 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052938 sodium sulfate Inorganic materials 0.000 description 1
- 235000011152 sodium sulphate Nutrition 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 235000020681 well water Nutrition 0.000 description 1
- 239000002349 well water Substances 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/58—Treatment of water, waste water, or sewage by removing specified dissolved compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
- B01D61/42—Electrodialysis; Electro-osmosis ; Electro-ultrafiltration; Membrane capacitive deionization
- B01D61/44—Ion-selective electrodialysis
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Abstract
【解決手段】 一次純水製造装置3は、タンク5と紫外線酸化装置6と白金族金属触媒樹脂塔7と再生型イオン交換装置8と膜式脱気装置9とを有する。サブシステム4は、サブタンク11とこのサブタンク11から送給される一次純水を処理する紫外線酸化装置12と白金族金属触媒樹脂塔13と膜式脱気装置14と非再生型混床式イオン交換装置15と限外濾過(UF)膜16とで構成されている。白金族金属触媒樹脂は、担体樹脂に白金族金属を担持させたものであり、 特に担体樹脂に白金族の金属のナノオーダーの粒径の粒子を担持させたものが好ましい。
【選択図】 図1
Description
平均粒子径3.5nmの白金ナノコロイド粒子を、0.07重量%の担持量で強塩基性ゲル型アニオン交換樹脂に担持させ、白金族金属触媒樹脂として、白金族の金属ナノ粒子を担持したアニオン交換樹脂を調製した。
実施例1において、一次純水装置3の紫外線酸化装置6の後段に白金族金属触媒樹脂塔7を設けなかった以外は同様にして超純水製造装置を構成して超純水W3を製造し、サブシステム4の白金族金属触媒樹脂塔13の入口水及び出口水の過酸化水素濃度(初期)を測定した結果を表1に示す。また、この超純水製造装置1の運転を長期間継続した後の白金族金属触媒樹脂塔13の出口水の過酸化水素濃度(末期)を測定した。結果を表1にあわせて示す。
比較例1において、長期間運転後の白金族金属触媒樹脂塔13の樹脂を表層部、中部、下部の3領域に分別して取り出し、表層部及び中部の樹脂をそれぞれの試験用のカラムに充填し、試験用の白金族金属触媒樹脂塔とした。また、参考例として新品の樹脂を同様に試験用のカラムに充填し、白金族金属触媒樹脂塔とした。
3 一次純水製造装置
4 サブシステム(二次純水製造装置)
6 紫外線酸化装置
7 白金族金属触媒樹脂塔
8 再生型イオン交換装置
9 膜式脱気装置
12 紫外線酸化装置
13 白金族金属触媒樹脂塔
14 膜式脱気装置
15 非再生型混床式イオン交換装置
W 原水
W1 前処理水
W2 一次純水
W3 超純水(二次純水)
Claims (8)
- 紫外線酸化装置、再生型混床式イオン交換塔又は電気脱イオン装置及び膜式脱気装置を有する一次純水装置と、紫外線酸化装置、白金族金属触媒樹脂塔及び膜式脱気装置を有し、該一次純水装置から得られた一次純水を処理するサブシステムとを備える超純水製造装置において、
前記一次純水装置の紫外線酸化装置の後段に白金族金属触媒樹脂塔を設けた、超純水製造装置。 - 前記サブシステムが非再生型混床式イオン交換塔をさらに有する、請求項1に記載の超純水製造装置。
- 前記一次純水装置の白金族金属触媒樹脂塔及び前記サブシステムの白金族金属触媒樹脂塔における白金族金属が白金、パラジウム又は白金/パラジウム合金である、請求項1又は2に記載の超純水製造装置。
- 前記白金族金属が平均粒子径1〜50nmの白金族の金属の粒子である、請求項1〜3のいずれかに記載の超純水製造装置。
- 紫外線酸化装置、白金族金属触媒樹脂塔、再生型混床式イオン交換塔又は電気脱イオン装置、及び膜式脱気装置を有する一次純水装置と、紫外線酸化装置、白金族金属触媒樹脂塔及び膜式脱気装置を有し、該一次純水装置から得られた一次純水を処理するサブシステムとを備える超純水製造装置の運転方法であって、被処理水を前記一次純水装置及び前記サブシステムに連続して通水して超純水を製造する、超純水製造装置の運転方法。
- 前記一次純水装置の白金族金属触媒樹脂塔及び前記サブシステムの白金族金属触媒樹脂塔における白金族金属が白金、パラジウム又は白金/パラジウム合金である、請求項5に記載の超純水製造装置の運転方法。
- 前記白金族金属が平均粒子径1〜50nmの白金族の金属の粒子である、請求項5又は6に記載の超純水製造装置の運転方法。
- 前記サブシステムの紫外線酸化装置の処理水のH2O2濃度が10〜100μg/Lであり、該サブシステムの白金族金属触媒樹脂塔の処理水のH2O2濃度が0.1〜10μg/Lである、請求項5〜7のいずれかに記載の超純水製造装置の運転方法。
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WO2024014218A1 (ja) * | 2022-07-14 | 2024-01-18 | 栗田工業株式会社 | 超純水製造装置及び超純水製造装置の運転方法 |
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