JP2017174988A - 半導体装置の製造方法及び半導体装置 - Google Patents
半導体装置の製造方法及び半導体装置 Download PDFInfo
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- JP2017174988A JP2017174988A JP2016059901A JP2016059901A JP2017174988A JP 2017174988 A JP2017174988 A JP 2017174988A JP 2016059901 A JP2016059901 A JP 2016059901A JP 2016059901 A JP2016059901 A JP 2016059901A JP 2017174988 A JP2017174988 A JP 2017174988A
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Abstract
【解決手段】半導体装置の製造方法は、半導体層の上に、窒素を含む有機金属を原料として原子層堆積法により絶縁膜を成膜する第1工程と、前記絶縁膜を、酸素とオゾンとの少なくとも一つを含む雰囲気下において酸素プラズマ処理する第2工程と、前記第2工程の後、窒素含有雰囲気下において、前記絶縁膜を熱処理する第3工程と、を備える。
【選択図】図3
Description
A−1.半導体装置の構成
図1は、第1実施形態における半導体装置100の構成を模式的に示す断面図である。図1には、相互に直交するXYZ軸が図示されている。図1のXYZ軸のうち、X軸は、図1の紙面左から紙面右に向かう軸である。+X軸方向は、紙面右に向かう方向であり、−X軸方向は、紙面左に向かう方向である。図1のXYZ軸のうち、Y軸は、図1の紙面手前から紙面奥に向かう軸である。+Y軸方向は、紙面奥に向かう方向であり、−Y軸方向は、紙面手前に向かう方向である。図1のXYZ軸のうち、Z軸は、図1の紙面下から紙面上に向かう軸である。+Z軸方向は、紙面上に向かう方向であり、−Z軸方向は、紙面下に向かう方向である。図1のXYZ軸は、他の図のXYZ軸に対応する。
図2は、第1実施形態における半導体装置100の製造方法を示す工程図である。まず、製造者は、基板110の上にn型半導体層112を結晶成長によって形成する(工程P110)。本実施形態では、製造者は、基板110における+Z軸方向側の表面にn型半導体層112を形成する。本実施形態では、製造者は、有機金属気相成長法(MOCVD:Metal Organic Chemical Vapor Deposition)によってn型半導体層112を形成する。本実施形態では、n型半導体層112は、主に、窒化ガリウム(GaN)から形成されている。
以上説明した第1実施形態の製造方法では、第1工程(工程P161)において絶縁膜130を成膜した後、第2工程(工程P163)において酸素プラズマ処理を行い、その後、第3工程(工程P165)において窒素(N)含有雰囲気下において絶縁膜130を熱処理する。このようにすることにより、絶縁膜130中の窒素(N)を好ましい濃度分布とすることができる。この結果、第1実施形態の製造方法では、絶縁膜130のCVヒステリシスを抑制できるため、動作の安定した半導体装置100を製造できる。以下、第1工程(工程P161)において絶縁膜130を成膜した後、第2工程(工程P163)及び第3工程(工程P165)を経ることにより、絶縁膜130のCVヒステリシスを抑制することを裏付ける評価試験の結果を示す。
図5から図10は、評価試験の結果を示す図である。評価試験には、以下の試料1から試料3を用いた。具体的には、試験者は、まず、n型半導体層116の上に絶縁膜130を成膜した。絶縁膜130の厚さは、100nmである。次に、試験者は、試料1及び試料2の絶縁膜130を酸素プラズマ処理した。具体的には、試験者は、上記実施形態と同様に、試料1の絶縁膜130を300℃に加熱した状態においてプラズマ処理した(工程P163)。また、試験者は、試料2の絶縁膜130を常温でプラズマ処理した(工程P163)。なお、試料1及び試料2は実施例であるのに対し、試料3は、比較例であるため、試験者は、試料3の絶縁膜130にプラズマ処理(工程P163)を行わなかった。なお、試験者は、いずれの試料においても、熱処理(工程P165)を行った。
・周波数:100kHz
・電圧掃引方向:0V→+4V→−6V→+8V→−10V→+12V→−16V
・掃引ステップ:0.2V/ステップ
・測定時温度:室温(25℃)
・測定環境:遮光環境
本発明は、上述の実施形態に限られるものではなく、その趣旨を逸脱しない範囲において種々の構成で実現することができる。例えば、発明の概要の欄に記載した各形態中の技術的特徴に対応する実施形態、実施例、変形例中の技術的特徴は、上述の課題の一部または全部を解決するために、あるいは、上述の効果の一部または全部を達成するために、適宜、差し替えや、組み合わせを行うことが可能である。また、その技術的特徴が本明細書中に必須なものとして説明されていなければ、適宜、削除することが可能である。
110…基板(半導体層)
112…n型半導体層(半導体層)
113…p型半導体領域(半導体層)
114…p型半導体層(半導体層)
116…n型半導体層(半導体層)
122…トレンチ
124…リセス
130…絶縁膜
132…領域(窒素低濃度領域)
134…領域(膜中領域)
136…領域(窒素高濃度領域)
142…ゲート電極
144…ボディ電極
146…ソース電極
148…ドレイン電極
R…領域
S1…面
S2…仮想面
S3…仮想面
S4…面
Claims (8)
- 半導体装置の製造方法であって、
半導体層の上に、窒素を含む有機金属を原料として原子層堆積法により絶縁膜を成膜する第1工程と、
前記絶縁膜を、酸素とオゾンとの少なくとも一つを含む雰囲気下において酸素プラズマ処理する第2工程と、
前記第2工程の後、窒素含有雰囲気下において、前記絶縁膜を熱処理する第3工程と、を備える、半導体装置の製造方法。 - 請求項1に記載の半導体装置の製造方法であって、
前記酸素プラズマ処理において、リモートプラズマを用いる、半導体装置の製造方法。 - 請求項2に記載の半導体装置の製造方法であって、
前記酸素プラズマ処理において、電子サイクロトロン共鳴プラズマを用いる、半導体装置の製造方法。 - 半導体層と、前記半導体層に接する絶縁膜と、を備える半導体装置であって、
前記絶縁膜の前記半導体層とは接しない面から深さが30nmまでの前記絶縁膜の領域における平均窒素濃度が3.0×1018cm−3未満であり、
前記絶縁膜の前記半導体層とは接しない面から深さが30nmの仮想面から、前記半導体層と接する面まで深さが20nmまでの仮想面までの絶縁膜の領域における平均窒素濃度が3.0×1018cm−3以上、かつ、1.0×1019cm−3未満である、半導体装置。 - 請求項4に記載の半導体装置であって、
前記絶縁膜の前記半導体層とは接しない面から深さが20nmまでの前記絶縁膜の領域における平均水素濃度が1.0×1020cm−3以上、かつ、1.0×1021cm−3未満である、半導体装置。 - 請求項4または請求項5に記載の半導体装置であって、
前記絶縁膜の上に、金属から形成された電極を備える、半導体装置。 - 請求項6に記載の半導体装置であって、
前記半導体層は、溝部を備え、前記絶縁膜は、前記溝部の内側に形成されている、半導体装置。 - 請求項7に記載の半導体装置であって、
前記半導体装置は、縦型トレンチMOSFETである、半導体装置。
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