JP2017157599A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
- Publication number
- JP2017157599A JP2017157599A JP2016037085A JP2016037085A JP2017157599A JP 2017157599 A JP2017157599 A JP 2017157599A JP 2016037085 A JP2016037085 A JP 2016037085A JP 2016037085 A JP2016037085 A JP 2016037085A JP 2017157599 A JP2017157599 A JP 2017157599A
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- Prior art keywords
- layer
- circuit layer
- semiconductor element
- glass
- underlayer
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
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Abstract
【解決手段】導電性材料からなる回路層12と、回路層12の一方の面に搭載された半導体素子3と、回路層12の他方の面に配設されたセラミックス基板とを備えた半導体装置であって、回路層12の一方の面には、ガラス層31とこのガラス層31上に積層されたAg層32とを有するAg下地層30が形成されており、このAg下地層30のAg層32と半導体素子3とが直接接合されていることを特徴とする。
【選択図】図2
Description
風力発電、電気自動車、ハイブリッド自動車等を制御するために用いられる大電力制御用のパワー半導体素子においては、発熱量が多いことから、これを搭載する基板としては、例えばAlN(窒化アルミ)、Al2O3(アルミナ)などのセラミックス基板からなる絶縁層と、この絶縁層の一方の面に導電性の優れた金属を配設して形成した回路層と、を備えたセラミックス回路基板(パワーモジュール用基板)が、従来から広く用いられている。
また、銅又は銅合金からなる回路層においては、溶融したはんだ材と銅とが反応して回路層の内部にはんだ材の成分が侵入し、回路層の特性が劣化するおそれがあった。
このため、従来は、特許文献1に示すように、回路層の表面にNiめっき膜を形成した上で、はんだ材によって半導体素子を実施していた。
また、例えば、特許文献3、4には、金属酸化物粒子と有機物からなる還元剤とを含む酸化物ペーストを用いて半導体素子を接合する技術が提案されている。
特に、最近では、シリコン半導体からSiC又はGaNなど化合物半導体素子の実用化が期待されており、半導体素子自体の耐熱性の向上が見込まれるため、半導体装置の使用温度が高くなる傾向にあり、従来のようにはんだ材で接合した構造では対応が困難となってきている。
前記半導体素子の前記Ag層と接合される面にAg膜を形成した場合には、Ag下地層(Ag層)と半導体素子(Ag膜)とが同種金属同士の接合となり、回路層と半導体素子とを良好に接合することができる。前記半導体素子の前記Ag層と接合される面にAu膜を用いた場合には、半導体素子(Au膜)とAg下地層(Ag層)とを比較的低温で固相拡散接合を行うことができる。
この構成の半導体装置によれば、発熱量の多いパワー半導体素子を用いた場合でも、効率的に熱を回路層へ伝達することができる。なお、パワー半導体としてはIGBT(Insulated Gate Bipolar Transistor)やMOSFET等があげられる。
このパワーモジュール1は、回路層12が配設されたパワーモジュール用基板(セラミックス回路基板)10と、回路層12の一方の面(図1において上面)に接合された半導体素子3と、パワーモジュール用基板10の他方側に配設された冷却器50とを備えている。
ここで、本実施形態では、表面処理膜3aは、スパッタ法等によって20nm〜300nmの厚さで成膜されている。
ガラス層31内部には、粒径が数ナノメートル程度の微細な導電性粒子33が分散されている。この導電性粒子33は、Ag又はAlの少なくとも一方を含有する結晶性粒子とされている。なお、ガラス層31内の導電性粒子33は、例えば透過型電子顕微鏡(TEM)を用いることで観察されるものである。
また、Ag層32の内部には、粒径が数ナノメートル程度の微細なガラス粒子(図示なし)が分散されている。
このガラス含有Agペーストは、Ag粉末と、ガラス粉末と、樹脂と、溶剤と、分散剤と、を含有しており、Ag粉末とガラス粉末とからなる粉末成分の含有量が、ガラス含有Agペースト全体の60質量%以上90質量%以下とされており、残部が樹脂、溶剤、分散剤とされている。
また、このガラス含有Agペーストは、その粘度が10Pa・s以上500Pa・s以下、より好ましくは50Pa・s以上300Pa・s以下に調整されている。
ガラス粉末は、例えば、酸化鉛、酸化亜鉛、酸化ケイ素、酸化ホウ素、酸化リン及び酸化ビスマスのいずれか1種又は2種以上を含有しており、そのガラス転移温度が300℃以上450℃以下、軟化温度が600℃以下、結晶化温度が450℃以上とされている。本実施形態では、主成分として酸化鉛と酸化亜鉛と酸化ホウ素とからなり、平均粒径が0.5μmのガラス粉末を使用した。
また、Ag粉末の重量Aとガラス粉末の重量Gとの重量比A/Gは、80/20から99/1の範囲内に調整されており、本実施形態では、A/G=80/5とした。
樹脂は、ガラス含有Agペーストの粘度を調整するものであり、400℃以上で分解されるものが適している。本実施形態では、エチルセルロースを用いている。
また、本実施形態では、ジカルボン酸系の分散剤を添加している。なお、分散剤を添加することなくガラス含有Agペーストを構成してもよい。
まず、セラミックス基板11の一方の面に回路層12が形成され、セラミックス基板11の他方の面に金属層13が形成されたパワーモジュール用基板10を準備し、このパワーモジュール用基板10の回路層12上にガラス含有Agペースト40を塗布する(ガラス含有Agペースト塗布工程S01)。ここで、ガラス含有Agペースト40を塗布する際には、スクリーン印刷法、オフセット印刷法、感光性プロセス等の種々の手段を採用することができる。本実施形態では、スクリーン印刷法によってガラス含有Agペースト40をパターン状に形成した。
さらに、Ag層32の内部に、粒径が数マイクロメートル程度のガラス粒子が分散されることになる。このガラス粒子は、Ag粒子の焼結が進行していく過程で、残存したガラス成分が凝集したものと推測される。
以上のことから、本実施形態では、第1加熱処理工程S02における加熱温度が350℃以上645℃以下の範囲内、加熱温度での保持時間が1分以上60分以下の範囲内に設定されている。
一方、第1加熱処理工程S02における焼成の進行を確実に抑制するためには、第1加熱処理工程S02における加熱温度の上限を600℃以下とすることが好ましく、575℃以下とすることが好ましい。また、加熱温度での保持時間の上限を45分以下とすることが好ましく、30分以下とすることが好ましい。そして、このような条件で加熱処理を行うことで、第1加熱処理工程S02後のAg下地層30におけるAg層32の平均結晶粒径が0.5μm以上3.0μm以下の範囲内に調整される。
なお、第2加熱処理工程S04後において、Ag層32の平均結晶粒径は変化しない。これは、第2加熱処理工程S04における加熱温度が、第1加熱処理工程S02よりも低いためである。
以上のことから、本実施形態では、第2加熱処理構成S04における積層方向の加圧圧力を5MPa以上40MPa以下の範囲内に設定している。
なお、半導体素子3と回路層12との接合強度をさらに向上させるためには、第2加熱処理構成S04における積層方向の加圧圧力の下限を10MPa以上とすることが好ましい。また、セラミックス基板11の割れの発生を確実に抑制するためには、第2加熱処理構成S04における積層方向の加圧圧力の上限を35MPa以下とすることが好ましい。
以上のことから、本実施形態では、第2加熱処理工程S04における加熱温度が200
℃以上400℃以下の範囲内、加熱温度での保持時間が1分以上60分以下の範囲内に設定されている。
例えば、本実施形態では、回路層及び金属層を構成する金属板を純度99.99mass%の純アルミニウム(4Nアルミニウム)の圧延板としたものとして説明したが、これに限定されることはなく、他のアルミニウム又はアルミニウム合金で構成されていてもよい。また、回路層及び金属層を構成する金属板を、銅または銅合金で構成されたものとしてもよい。さらには、銅板とアルミニウム板とを固相拡散接合した構造のものとしてもよい。
さらに、ヒートシンクと金属層との間に、緩衝層を設けても良い。緩衝層としては、アルミニウム又はアルミニウム合金若しくはアルミニウムを含む複合材(例えばAlSiC等)からなる板材を用いることができる。
例えば、半導体素子として熱電変換素子を用いた熱電変換モジュールであってもよい。
また、例えば、図6に示すように、LED素子(半導体素子)を搭載したLED装置(半導体装置)であってもよい。
このようなLED装置101においても、回路層112の一方の面にAg下地層130が形成されており、このAg下地層130とLED素子103とが直接接合されているので、高温環境下で使用した場合であっても回路層112とLED素子103との接合信頼性に優れている。
なお、金属板がアルミニウム板の場合には、接合材としてAl−Si系ろう材を用いた。また、金属板が銅板の場合には、接合材として活性金属ろう材(Ag−Cu−Tiろう材)を用いた。
なお、ガラス含有Agペーストのガラス粉末として、Bi2O3を90.6質量%、ZnOを2.6質量%、B2O3を6.8質量%、を含む無鉛ガラス粉末を用いた。また、樹脂としてエチルセルロースを、溶剤としてジエチレンクリコールジブチルエーテルを用いた。さらに、ジカルボン酸系の分散剤を添加した。
ここで、ガラス含有AgペーストにおけるAg粉末の重量Aとガラス粉末の重量Gとの重量比A/G、及び、塗布量を調整し、表1に示すようにガラス層とAg層の厚さを調整した。
ここで、本発明例1〜21及び比較例1〜2においては、半導体素子の回路層との接合面に、表1に示す材質からなる表面処理膜をスパッタ法で厚さ100nmとなるよう形成した。
酸化銀ペーストとして、市販の酸化銀粉末(和光純薬工業株式会社製)と、還元剤としてミリスチルアルコールと、溶剤として2,2,4−トリメチル−1,3−ペンタンジオールモノ(2−メチルプロパノエート)と、を用いて、酸化銀粉末;80質量%、還元剤(ミリスチルアルコール);10質量%、溶剤(2,2,4−トリメチル−1,3−ペンタンジオールモノ(2−メチルプロパノエート));残部、の割合で混合した酸化銀ペーストを用いた。
また、酸化銀ペーストの塗布厚さを50μmとし、焼成温度を300℃、焼成時間を10分とした。さらに、半導体素子の積層方向への加圧圧力を30MPaとした。
上述の本発明例及び比較例の半導体装置について、超音波探傷装置を用いて、以下の式から半導体素子と回路層との接合率を求めた。ここで、初期接合面積とは、接合前における接合すべき面積、すなわち半導体素子面積とした。超音波探傷像において剥離は接合部内の白色部で示されることから、この白色部の面積を剥離面積とした。
(接合率)={(初期接合面積)−(剥離面積)}/(初期接合面積)×100
なお、半導体装置に冷熱サイクル試験を行い、初期の接合率と冷熱サイクル試験後の接合率とを比較した。冷熱サイクルは、−40℃×5分←→200℃×15分、3000サイクルとした。評価結果を表1に示す。
3 半導体素子
3a 表面処理膜
10 パワーモジュール用基板
11 セラミックス基板
12 回路層
30 Ag下地層
31 ガラス層
32 Ag層
Claims (3)
- 導電性材料からなる回路層と、前記回路層の一方の面に搭載された半導体素子と、前記回路層の他方の面に配設されたセラミックス基板とを備えた半導体装置であって、
前記回路層の一方の面には、ガラス層とこのガラス層上に積層されたAg層とを有するAg下地層が形成されており、
このAg下地層の前記Ag層と前記半導体素子とが直接接合されていることを特徴とする半導体装置。 - 前記半導体素子は、前記Ag層と接合される面に、Au又はAu合金からなるAu膜、及び、Ag又はAg合金からなるAg膜のいずれかが形成されていることを特徴とする請求項1に記載の半導体装置。
- 前記半導体素子は、パワー半導体素子とされていることを特徴とする請求項1又は請求項2に記載の半導体装置。
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2019111997A1 (ja) * | 2017-12-06 | 2019-06-13 | 三菱マテリアル株式会社 | 絶縁伝熱基板、熱電変換モジュール、及び、絶縁伝熱基板の製造方法 |
JP2019102808A (ja) * | 2017-12-06 | 2019-06-24 | 三菱マテリアル株式会社 | 絶縁伝熱基板、熱電変換モジュール、及び、絶縁伝熱基板の製造方法 |
JPWO2020241739A1 (ja) * | 2019-05-29 | 2020-12-03 | ||
JP7492256B2 (ja) | 2020-10-01 | 2024-05-29 | 国立大学法人大阪大学 | 接合構造体及びその製造方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013211298A (ja) * | 2012-03-30 | 2013-10-10 | Mitsubishi Materials Corp | パワーモジュール、及び、パワーモジュールの製造方法 |
JP2014078558A (ja) * | 2012-10-09 | 2014-05-01 | Mitsubishi Materials Corp | 半導体装置、セラミックス回路基板及び半導体装置の製造方法 |
JP2014187251A (ja) * | 2013-03-25 | 2014-10-02 | Hitachi Ltd | 接合材、接合構造体 |
JP2015109434A (ja) * | 2013-10-23 | 2015-06-11 | 日立化成株式会社 | ダイボンド層付き半導体素子搭載用支持部材、ダイボンド層付き半導体素子及びダイボンド層付き接合板 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1297046A (ja) | 1969-08-25 | 1972-11-22 | ||
JP3922166B2 (ja) | 2002-11-20 | 2007-05-30 | 三菱マテリアル株式会社 | パワーモジュール用基板の製造方法並びにパワーモジュール用基板及びパワーモジュール |
JP2006202938A (ja) | 2005-01-20 | 2006-08-03 | Kojiro Kobayashi | 半導体装置及びその製造方法 |
JP4737116B2 (ja) | 2007-02-28 | 2011-07-27 | 株式会社日立製作所 | 接合方法 |
US8018047B2 (en) * | 2007-08-06 | 2011-09-13 | Infineon Technologies Ag | Power semiconductor module including a multilayer substrate |
US8513534B2 (en) | 2008-03-31 | 2013-08-20 | Hitachi, Ltd. | Semiconductor device and bonding material |
JP5212298B2 (ja) * | 2009-05-15 | 2013-06-19 | 三菱マテリアル株式会社 | パワーモジュール用基板、冷却器付パワーモジュール用基板、パワーモジュール及びパワーモジュール用基板の製造方法 |
JP5707886B2 (ja) | 2010-11-15 | 2015-04-30 | 三菱マテリアル株式会社 | パワーモジュール用基板、冷却器付パワーモジュール用基板、パワーモジュールおよびパワーモジュール用基板の製造方法 |
JP5966379B2 (ja) | 2011-05-31 | 2016-08-10 | 三菱マテリアル株式会社 | パワーモジュール、及び、パワーモジュールの製造方法 |
CN102810524B (zh) * | 2011-05-31 | 2016-12-14 | 三菱综合材料株式会社 | 功率模块及功率模块的制造方法 |
US8716864B2 (en) | 2012-06-07 | 2014-05-06 | Ixys Corporation | Solderless die attach to a direct bonded aluminum substrate |
WO2015060346A1 (ja) * | 2013-10-23 | 2015-04-30 | 日立化成株式会社 | ダイボンドシート及び半導体装置の製造方法 |
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013211298A (ja) * | 2012-03-30 | 2013-10-10 | Mitsubishi Materials Corp | パワーモジュール、及び、パワーモジュールの製造方法 |
JP2014078558A (ja) * | 2012-10-09 | 2014-05-01 | Mitsubishi Materials Corp | 半導体装置、セラミックス回路基板及び半導体装置の製造方法 |
JP2014187251A (ja) * | 2013-03-25 | 2014-10-02 | Hitachi Ltd | 接合材、接合構造体 |
JP2015109434A (ja) * | 2013-10-23 | 2015-06-11 | 日立化成株式会社 | ダイボンド層付き半導体素子搭載用支持部材、ダイボンド層付き半導体素子及びダイボンド層付き接合板 |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2019111997A1 (ja) * | 2017-12-06 | 2019-06-13 | 三菱マテリアル株式会社 | 絶縁伝熱基板、熱電変換モジュール、及び、絶縁伝熱基板の製造方法 |
JP2019102808A (ja) * | 2017-12-06 | 2019-06-24 | 三菱マテリアル株式会社 | 絶縁伝熱基板、熱電変換モジュール、及び、絶縁伝熱基板の製造方法 |
US11404622B2 (en) | 2017-12-06 | 2022-08-02 | Mitsubishi Materials Corporation | Insulated heat transfer substrate, thermoelectric conversion module, and method for manufacturing insulated heat transfer substrate |
JP7200616B2 (ja) | 2017-12-06 | 2023-01-10 | 三菱マテリアル株式会社 | 絶縁伝熱基板、熱電変換モジュール、及び、絶縁伝熱基板の製造方法 |
JPWO2020241739A1 (ja) * | 2019-05-29 | 2020-12-03 | ||
WO2020241739A1 (ja) * | 2019-05-29 | 2020-12-03 | 国立大学法人大阪大学 | 接合構造体の製造方法、及び接合構造体 |
JP7154655B2 (ja) | 2019-05-29 | 2022-10-18 | 国立大学法人大阪大学 | 接合構造体の製造方法、及び接合構造体 |
JP7492256B2 (ja) | 2020-10-01 | 2024-05-29 | 国立大学法人大阪大学 | 接合構造体及びその製造方法 |
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EP3425660A4 (en) | 2019-07-31 |
KR20180121527A (ko) | 2018-11-07 |
US10504749B2 (en) | 2019-12-10 |
CN109075081B (zh) | 2022-03-25 |
TW201742215A (zh) | 2017-12-01 |
EP3425660A1 (en) | 2019-01-09 |
WO2017150096A1 (ja) | 2017-09-08 |
JP6677886B2 (ja) | 2020-04-08 |
TWI711141B (zh) | 2020-11-21 |
CN109075081A (zh) | 2018-12-21 |
US20190027380A1 (en) | 2019-01-24 |
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