JP2017096833A - Leakage inspection device and leakage inspection method - Google Patents

Leakage inspection device and leakage inspection method Download PDF

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JP2017096833A
JP2017096833A JP2015230524A JP2015230524A JP2017096833A JP 2017096833 A JP2017096833 A JP 2017096833A JP 2015230524 A JP2015230524 A JP 2015230524A JP 2015230524 A JP2015230524 A JP 2015230524A JP 2017096833 A JP2017096833 A JP 2017096833A
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workpiece
seal member
sealed space
trace gas
opening
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JP6637298B2 (en
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将希 高根
Masaki Takane
将希 高根
佐々木　行雄
Yukio Sasaki
行雄 佐々木
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Yamaha Fine Technologies Co Ltd
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Yamaha Fine Technologies Co Ltd
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Priority to JP2015230524A priority Critical patent/JP6637298B2/en
Priority to KR1020160152347A priority patent/KR101961229B1/en
Priority to CN201611050911.0A priority patent/CN107024323B/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/12—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point by observing elastic covers or coatings, e.g. soapy water
    • G01M3/14—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point by observing elastic covers or coatings, e.g. soapy water for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M5/00—Investigating the elasticity of structures, e.g. deflection of bridges or air-craft wings
    • G01M5/0033—Investigating the elasticity of structures, e.g. deflection of bridges or air-craft wings by determining damage, crack or wear

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Examining Or Testing Airtightness (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a leakage inspection device and a leakage inspection method which can detect leakage with high accuracy and which enable a seal member to be repeatedly used.SOLUTION: A leakage inspection device includes: an inspection chamber capable of storing a workpiece; pressing means which closes an opening of the workpiece in the inspection chamber by bringing a seal member into contact with the opening and pressing it, so as to separate the inside of the inspection chamber into different sealed space parts on an inner side and an outer side of the workpiece; gas supply means for introducing a trace gas into one of the sealed space parts on the inner side and the outer side of the workpiece; leakage detection means for detecting the trace gas leaking out from one sealed space part to the other sealed space part; and lock means for stopping the movement of the seal member in a state of closing the opening.SELECTED DRAWING: Figure 1

Description

本発明は、トレースガスを利用してワークにおける漏れを検出する漏れ検査装置及び漏れ検査方法に関する。   The present invention relates to a leak inspection apparatus and a leak inspection method for detecting a leak in a workpiece using trace gas.

例えば自動車で使用されるタイヤを支持するホイールは、タイヤ内部の空気を密閉した状態で支持するために、気密性が要求される。ホイールは、一般に、アルミダイカストによる鋳造や鍛造、またマルチピースのホイールでは、ホイールリムとディスクとを溶接やシールを挟んでねじ止めする等により接合して形成される。ところが、ホイールには、鋳造時に発生する微小な孔や亀裂、溶接不良に起因するエア漏れが生じることがある。そこで、ホイールのように、気密性を要求されるワーク（ドラム缶、エアコン室外機、コンプレッサ、自動車用燃料タンク等の各種ワーク）においては、気密性を確実に維持するために、トレースガス（検査用ガス）を用いた漏れ検査（リークテスト）が行われている。   For example, a wheel for supporting a tire used in an automobile is required to be airtight in order to support the air inside the tire in a sealed state. The wheel is generally formed by casting or forging by aluminum die casting, and in a multi-piece wheel, the wheel rim and the disk are joined together by welding or screwing with a seal interposed therebetween. However, air leakage may occur in the wheel due to minute holes and cracks generated during casting and poor welding. Therefore, trace work (for inspection) is required to reliably maintain airtightness of workpieces that require airtightness (such as drums, air conditioner outdoor units, compressors, and fuel tanks for automobiles) such as wheels. Gas) is used for leak inspection (leak test).

このトレースガスを用いた漏れ検査を実施するための漏れ検査装置としては、例えば特許文献１に開示されるものが知られている。
特許文献１に記載される漏れ検査装置（リークテスト装置）は、ワークであるアルミホイールの軸方向端部を閉塞するシール治具と、アルミホイール及びシール治具を覆うコンテナと、真空チャンバーとを備えている。また、特許文献１には、シール治具は樹脂又はゴムからなるシールリングを有しており、シールリングによりアルミホイールの軸方向両端をシールすることが記載されている。そして、この漏れ検査装置では、シール治具でアルミホイールの軸方向両端を閉塞した状態で、アルミホイール内空間にヘリウム、エアー混合ガスを供給して、アルミホイール内から真空チャンバーに漏れ出たガスを検出することにより、ガス漏れの有無を判定している。 As a leak inspection apparatus for performing a leak inspection using this trace gas, for example, one disclosed in Patent Document 1 is known.
A leak inspection apparatus (leak test apparatus) described in Patent Document 1 includes a sealing jig that closes an axial end of an aluminum wheel that is a workpiece, a container that covers the aluminum wheel and the sealing jig, and a vacuum chamber. I have. Patent Document 1 describes that the sealing jig has a seal ring made of resin or rubber, and seals both ends of the aluminum wheel in the axial direction by the seal ring. In this leak inspection apparatus, helium and air mixed gas is supplied to the space inside the aluminum wheel with the sealing jig closed at both ends in the axial direction of the aluminum wheel, and the gas leaked from the aluminum wheel into the vacuum chamber. By detecting this, the presence or absence of gas leakage is determined.

特開２０００‐７４７７７号公報JP 2000-74777 A

このように、特許文献１に記載される漏れ検査装置では、ワーク（アルミホイール）の開口部（開口）を樹脂やゴムで形成された柔軟性を有するシール部材（シールリング）によって閉塞することで、ワークの内部側の密閉空間部と外部側の密閉空間部とを密閉した状態を維持している。また、このような構成の漏れ検査装置では、図６に示すように、ワーク２０の内部側の密閉空間部１１又は外部側の密閉空間部１２（図６では外部側の密閉空間部１２）にヘリウムガス等のトレースガスが導入されることで、シール部材３１Ａにトレースガスによってシール部材３１Ａを押し返す反力ｆ３が加えられる。このため、シール部材３１Ａ，３１Ｂをワーク２０の開口部２１ａ，２１ｂに密着させた状態を維持するために、ワーク２０及びシール部材３１Ａには、トレースガスによる反力ｆ３を考慮して、トレースガスの導入前におけるワーク２０の開口部２１ａ，２１ｂの閉塞に必要な押圧力、すなわちワーク２０がシール部材３１Ａを押し返す力ｆ２と、トレースガスによる反力ｆ３とを合わせた力よりも、大きな押圧力ｆ１を付加する必要がある。   Thus, in the leak inspection apparatus described in Patent Document 1, the opening (opening) of the work (aluminum wheel) is closed by a flexible sealing member (seal ring) formed of resin or rubber. The sealed space portion on the inner side of the workpiece and the sealed space portion on the outer side are maintained in a sealed state. Further, in the leak inspection apparatus having such a configuration, as shown in FIG. 6, in the sealed space portion 11 on the inner side of the workpiece 20 or the sealed space portion 12 on the outer side (the sealed space portion 12 on the outer side in FIG. 6). By introducing a trace gas such as helium gas, a reaction force f3 for pushing back the seal member 31A by the trace gas is applied to the seal member 31A. Therefore, in order to maintain the state in which the seal members 31A and 31B are in close contact with the openings 21a and 21b of the workpiece 20, the workpiece 20 and the seal member 31A are subjected to the trace gas in consideration of the reaction force f3 caused by the trace gas. Is greater than the pressing force required for closing the openings 21a and 21b of the workpiece 20 before the introduction of the workpiece 20, that is, the force f2 that the workpiece 20 pushes back the seal member 31A and the reaction force f3 caused by the trace gas. It is necessary to add f1.

ところが、この押圧力ｆ１を作用させると、トレースガスの導入初期においては、トレースガスによる反力ｆ３が生じていないことから、ワークに過剰な押圧力が付加され、検査すべき微小な孔や亀裂等が変形して塞がれることで、漏れを適正に検出できなくなることが問題となっている。また、シール部材にも過剰な押圧力が付加されることで、シール部材が短期間で摩耗することも問題となっている。   However, when this pressing force f1 is applied, the reaction force f3 due to the trace gas does not occur at the initial stage of the introduction of the trace gas, so that an excessive pressing force is applied to the workpiece, and a minute hole or crack to be inspected. As a result, the leakage cannot be properly detected. In addition, since an excessive pressing force is applied to the seal member, the seal member is worn out in a short period of time.

本発明は、このような事情に鑑みてなされたもので、高精度に漏れを検出でき、シール部材を繰り返し使用可能な漏れ検査装置及び漏れ検査方法を提供することを目的とする。   The present invention has been made in view of such circumstances, and an object of the present invention is to provide a leak inspection apparatus and a leak inspection method that can detect a leak with high accuracy and can repeatedly use a seal member.

本発明の漏れ検査装置は、ワークを収容可能な検査チャンバと、該検査チャンバ内の前記ワークの開口部にシール部材を当接させて押圧することにより該開口部を閉塞して前記検査チャンバ内を前記ワークの内部側と外部側とのそれぞれ別の密閉空間部として隔離する押圧手段と、前記ワークの前記内部側又は前記外部側のうちの一方の密閉空間部にトレースガスを導入するガス供給手段と、前記一方の密閉空間部から他方の密閉空間部に漏れ出る前記トレースガスを検出する漏れ検出手段と、前記開口部を閉塞した状態の前記シール部材の前記ワークから離間する方向への移動を停止するロック手段とを備えることを特徴とする。   The leak inspection apparatus according to the present invention includes an inspection chamber that can accommodate a workpiece, and a seal member that is brought into contact with and pressed against the opening of the workpiece in the inspection chamber to close the opening. A pressure means for isolating the inner side and the outer side of the workpiece as separate sealed spaces, and a gas supply for introducing a trace gas into one of the sealed spaces of the inner side or the outer side of the workpiece Means, leakage detection means for detecting the trace gas leaking from the one sealed space portion to the other sealed space portion, and movement of the seal member in a state of closing the opening portion in a direction away from the workpiece And a locking means for stopping the operation.

この漏れ検査装置においては、ワークの開口部にシール部材を当接させて押圧することによりワークの内部側と外部側とを別の密閉空間部として隔離する際に、シール部材及びワークにかけられる押圧力は、トレースガスを一方の密閉空間部に導入することで生じる反力（内圧）を考慮することなく、開口部を閉塞した状態に維持するのに必要な大きさとされる。そして、一方の密閉空間部にトレースガスを導入する前に、ロック手段によりシール部材のワークから離間する方向への移動を停止しておくことで、一方の密閉空間部にトレースガスを導入することによりトレースガスによる反力が徐々に上昇しても、シール部材により開口部を閉塞した状態を維持できる。
このように、この漏れ検査装置では、トレースガスの導入前において、ワークの開口部を閉塞した状態に維持するために、トレースガスによる反力を考慮した過剰な押圧力がワークにかけられることがないので、検査すべき微小な孔や亀裂等が変形して塞がれることがなく、高精度に漏れを検出できる。また、シール部材にも過剰な押圧力が付加されることがないので、シール部材の摩耗を防止でき、シール部材を長期的に継続して使用できる。 In this leak inspection apparatus, when the seal member is brought into contact with and pressed against the opening of the workpiece, the inner side and the outer side of the workpiece are separated as separate sealed spaces, and the pressing applied to the seal member and the workpiece is performed. The pressure is set to a magnitude necessary to maintain the opening in a closed state without considering the reaction force (internal pressure) generated by introducing the trace gas into one sealed space. Then, before introducing the trace gas into one sealed space, the trace gas is introduced into the one sealed space by stopping the movement of the seal member in the direction away from the workpiece by the locking means. Thus, even if the reaction force due to the trace gas gradually increases, the state in which the opening is closed by the seal member can be maintained.
As described above, in this leakage inspection apparatus, before the trace gas is introduced, an excessive pressing force in consideration of the reaction force due to the trace gas is not applied to the workpiece in order to keep the opening of the workpiece closed. Therefore, a minute hole or crack to be inspected is not deformed and blocked, and a leak can be detected with high accuracy. Further, since no excessive pressing force is applied to the seal member, it is possible to prevent the seal member from being worn, and the seal member can be used continuously for a long period of time.

本発明の漏れ検査装置において、前記押圧手段は油圧シリンダにより構成され、前記ロック手段は前記油圧シリンダの流体の流れを止めるバルブにより構成されているとよい。   In the leak inspection apparatus of the present invention, the pressing means may be constituted by a hydraulic cylinder, and the locking means may be constituted by a valve for stopping the flow of fluid in the hydraulic cylinder.

油圧シリンダは、非圧縮性のオイルを流体としていることから、油圧シリンダによりシール部材をワークの開口部に当接させて押圧した状態でバルブを閉栓して、油圧シリンダの流体の流れを遮断することで、その状態を保持することができる。このため、トレースガスによる反力が生じても、シール部材が押し戻されることがなく、ワークの開口部を閉塞した状態を維持できる。
なお、押圧手段としてエアシリンダを用いたとすると、エアシリンダは圧縮性を有する気体（エア）を流体としているため、バネを介して押圧していることと同じことになり、トレースガスによる反力がかかるとシール部材が押し戻されるおそれがある。このため、トレースガスの導入前においても、トレースガスによる反力を考慮して、ワークには、ワークの開口部の閉塞に必要な押圧力よりも大きな押圧力をかけることが必要となる。この場合、ワークに過剰な押圧力が付加されることで、検査すべき微小な孔や亀裂等が変形して塞がれるおそれがある。 Since the hydraulic cylinder uses incompressible oil as a fluid, the valve is closed while the sealing member is pressed against the opening of the workpiece by the hydraulic cylinder to block the flow of fluid in the hydraulic cylinder. In this way, the state can be maintained. For this reason, even if the reaction force by trace gas arises, a sealing member is not pushed back and the state which obstruct | occluded the opening part of the workpiece | work can be maintained.
If an air cylinder is used as the pressing means, the air cylinder uses a compressible gas (air) as a fluid, so it is the same as pressing through a spring, and the reaction force caused by the trace gas is In this case, the seal member may be pushed back. For this reason, even before the introduction of the trace gas, it is necessary to apply a pressing force larger than the pressing force necessary for closing the opening of the workpiece to the workpiece in consideration of the reaction force due to the trace gas. In this case, when an excessive pressing force is applied to the workpiece, there is a possibility that minute holes or cracks to be inspected are deformed and blocked.

本発明の漏れ検査装置において、前記押圧手段は、前記シール部材に当接して押圧する押圧板部を備え、前記ロック手段は、前記押圧板部に当接して前記シール部材の前記ワークから離間する方向への移動を停止するストッパ部材を有しているとよい。   In the leak inspection apparatus of the present invention, the pressing means includes a pressing plate portion that contacts and presses against the seal member, and the locking device contacts the pressing plate portion and separates from the work of the sealing member. It is preferable to have a stopper member that stops movement in the direction.

例えば押圧手段としてエアシリンダを用いた場合でも、ストッパ部材によりシール部材がワークから離間する方向へ移動すること停止しているので、トレースガスによる反力が生じても、シール部材が押し戻されることなく、ワークの開口部を閉塞した状態を維持できる。   For example, even when an air cylinder is used as the pressing means, the stopper member stops moving the seal member away from the workpiece, so that the seal member is not pushed back even if a reaction force is generated by the trace gas. The state in which the opening of the work is closed can be maintained.

本発明の漏れ検査方法は、ワークを収容可能な検査チャンバ内で、前記ワークの開口部にシール部材を当接させて押圧することにより該開口部を閉塞して前記検査チャンバ内を前記ワークの内部側と外部側とのそれぞれ別の密閉空間部として隔離した状態とし、前記ワークの内部側又は外部側のうちの一方の密閉空間部にトレースガスを導入し、前記一方の密閉空間部から他方の密閉空間部への前記トレースガスの漏れを検出する漏れ検査方法であって、前記開口部を閉塞した状態の前記シール部材の前記ワークから離間する方向への移動を停止した状態で、前記一方の密閉空間部に前記トレースガスを導入することを特徴とする。   In the inspection method of the present invention, in the inspection chamber capable of accommodating a workpiece, a seal member is brought into contact with and pressed against the opening of the workpiece to close the opening, and the inspection chamber is filled with the workpiece. It is set as the state which isolate | separated as each separate sealed space part of an internal side and an external side, trace gas is introduce | transduced into one sealed space part of the internal side or the external side of the said workpiece | work, and the other from said one sealed space part A leak inspection method for detecting leakage of the trace gas into the sealed space portion of the seal member, wherein the one of the seal member in a state where the opening portion is closed is stopped in a direction in which the seal member is separated from the workpiece. The trace gas is introduced into the sealed space.

本発明によれば、高精度にワークの漏れを検出でき、シール部材を長期的に繰り返し使用することができる。   According to the present invention, workpiece leakage can be detected with high accuracy, and the seal member can be used repeatedly over a long period of time.

本発明に係る漏れ検査装置の第１実施形態を示す模式図である。It is a mimetic diagram showing a 1st embodiment of a leak inspection device concerning the present invention. 第１実施形態の変形例を示す模式図である。It is a schematic diagram which shows the modification of 1st Embodiment. 本発明に係る漏れ検査装置の第２実施形態を示す模式図である。It is a schematic diagram which shows 2nd Embodiment of the leak test | inspection apparatus which concerns on this invention. 本発明に係る漏れ検査装置の第３実施形態を示す模式図である。It is a schematic diagram which shows 3rd Embodiment of the leak test | inspection apparatus which concerns on this invention. 本発明に係る漏れ検査装置の第４実施形態を示す模式図である。It is a schematic diagram which shows 4th Embodiment of the leak inspection apparatus which concerns on this invention. 従来の漏れ検査装置を示す模式図である。It is a schematic diagram which shows the conventional leak inspection apparatus.

以下、本発明の実施形態を図面を参照して説明する。
図１は、本発明の第１実施形態の漏れ検査装置１０１を示している。この漏れ検査装置１０１は、図１に示すように、両側（図１では上下）に開口部を有する筒状のワーク２０の開口部２１ａ，２１ｂを、シール部材３１Ａ，３１Ｂにより閉塞した状態で、このワーク２０を検査チャンバ１０内に配置し、トレースガスを利用してワーク２０の内部側の密閉空間部１１と外部側の密閉空間部１２との間の漏れを検出するものである。なお、トレースガスとしては、具体的にはヘリウムガスが用いられる。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 shows a leak inspection apparatus 101 according to a first embodiment of the present invention. As shown in FIG. 1, the leak inspection apparatus 101 has openings 21a and 21b of a cylindrical workpiece 20 having openings on both sides (up and down in FIG. 1) closed by seal members 31A and 31B. The workpiece 20 is arranged in the inspection chamber 10 and a leak between the sealed space portion 11 on the inner side of the workpiece 20 and the sealed space portion 12 on the outer side is detected using a trace gas. Specifically, helium gas is used as the trace gas.

漏れ検査装置１０１は、ワーク２０を収容可能な検査チャンバ１０と、この検査チャンバ１０内のワーク２０の上下の開口部２１ａ，２１ｂにシール部材３１Ａ，３１Ｂを当接させて押圧することにより開口部２１ａ，２１ｂを閉塞して、検査チャンバ内１０をワーク２０の内部側と外部側とのそれぞれ別の密閉空間部１１，１２として隔離する押圧手段４０と、ワーク２０の外部側の密閉空間部１２（本発明における一方の密閉空間部）にトレースガスを導入するガス供給手段５１と、外部側の密閉空間部１２から内部側の密閉空間部１１（本発明における他方の密閉空間部）に漏れ出るトレースガスを検出する漏れ検出手段５２と、ワーク２０の開口部２１ａ，２１ｂを閉塞した状態のシール部材３１Ａ，３１Ｂのワーク２０から離間する方向への移動を停止するロック手段６０とを備えている。   The leak inspection apparatus 101 has an opening by bringing the seal members 31A and 31B into contact with and pressing the inspection chamber 10 that can accommodate the workpiece 20 and the upper and lower openings 21a and 21b of the workpiece 20 in the inspection chamber 10. 21a and 21b are closed, the pressing means 40 for isolating the inside 10 of the inspection chamber as separate sealed spaces 11 and 12 on the inside and outside of the workpiece 20, and the sealed space 12 on the outside of the workpiece 20 The gas supply means 51 for introducing the trace gas into (one sealed space in the present invention) leaks from the outer sealed space 12 to the inner sealed space 11 (the other sealed space in the present invention). Leak detection means 52 for detecting the trace gas and the seal members 31A, 31B in a state where the openings 21a, 21b of the work 20 are closed are separated from the work 20 And a locking means 60 for stopping the movement in the direction.

そして、本実施形態の漏れ検査装置１０１では、押圧手段４０は、油圧シリンダ４１とその軸部４２に取り付けられた押圧板部４３とにより構成される。また、ロック手段６０は、押圧手段４０を構成する油圧シリンダ４１と油圧源４４Ａ，４４Ｂとの間に設けられたストップバルブ６１Ａ，６１Ｂ（本発明におけるバルブ）により構成される。ストップバルブ６１Ａ，６１Ｂは、開栓と閉栓の２ポジションを切り換えることにより、油圧シリンダ４１と油圧源４４Ａ，４４Ｂとの間でオイル（流体）の流路の開放と遮断とを切り換えるものであり、ストップバルブ６１Ａ，６１Ｂを開栓ポジションｐ１２としたときに、油圧シリンダ４１を駆動でき、押圧板部４３を上下移動させることができる。一方、ストップバルブ６１Ａ，６１Ｂを閉栓ポジションｐ１１としたときは、油圧シリンダ４１と油圧源４４Ａ，４４Ｂとの間のオイルの流通が遮断されることで、押圧板部４３の上下移動が止められ、押圧板部４３は、そのままの状態で保持される。   And in the leak test | inspection apparatus 101 of this embodiment, the press means 40 is comprised by the hydraulic cylinder 41 and the press plate part 43 attached to the axial part 42. As shown in FIG. The lock means 60 is constituted by stop valves 61A and 61B (valves in the present invention) provided between the hydraulic cylinder 41 constituting the pressing means 40 and the hydraulic power sources 44A and 44B. The stop valves 61A and 61B switch between opening and shutting off an oil (fluid) flow path between the hydraulic cylinder 41 and the hydraulic power sources 44A and 44B by switching between two positions of opening and closing. When the stop valves 61A and 61B are at the opening position p12, the hydraulic cylinder 41 can be driven and the pressing plate portion 43 can be moved up and down. On the other hand, when the stop valves 61A and 61B are set to the closing position p11, the vertical movement of the pressing plate portion 43 is stopped by blocking the flow of oil between the hydraulic cylinder 41 and the hydraulic sources 44A and 44B. The pressing plate portion 43 is held as it is.

検査チャンバ１０は、円板状の基部１３と、この基部１３上に載置されるドーム状の本体部１４とから構成される。また、検査チャンバ１０の本体部１４は、円板状の天井部１５と、この天井部１５の周縁から下方に延びる円筒状の円筒部１６とから構成される。なお、図示は省略するが、基部１３と本体部１４との間にはシール部材が取り付けられており、検査チャンバ１０の内部は密閉されて、外部と遮断されている。   The inspection chamber 10 includes a disc-shaped base portion 13 and a dome-shaped main body portion 14 placed on the base portion 13. The main body 14 of the inspection chamber 10 includes a disk-shaped ceiling 15 and a cylindrical cylindrical portion 16 that extends downward from the periphery of the ceiling 15. Although illustration is omitted, a seal member is attached between the base portion 13 and the main body portion 14, and the inside of the inspection chamber 10 is hermetically sealed from the outside.

そして、検査チャンバ１０の基部１３の上面には、ワーク２０の下側の開口部２１ｂを閉塞するための下側のシール部材３１Ｂが取り付けられている。また、これら基部１３及び下側のシール部材３１Ｂには、通気孔（図示略）が設けられており、この通気孔を介して漏れ検出手段５２が接続されている。   A lower seal member 31B for closing the lower opening 21b of the work 20 is attached to the upper surface of the base 13 of the inspection chamber 10. The base 13 and the lower seal member 31B are provided with vent holes (not shown), and the leak detection means 52 is connected through the vent holes.

検査チャンバ１０の本体部１４には、油圧シリンダ４１の軸部４２が上下移動可能に挿通する挿通孔１７が設けられており、この挿通孔１７を介して検査チャンバ１０の内部に軸部４２の下端が突出し、押圧板部４３に連結されている。なお、図示は省略するが、挿通孔１７には軸受が設けられており、軸受に軸部４２が摺動可能に嵌合していることで、軸部４２が円滑に上下移動可能となっている。そして、油圧シリンダ４１の駆動によって軸部４２が上下移動することで、押圧板部４３を上下移動させることができる。   The body portion 14 of the inspection chamber 10 is provided with an insertion hole 17 through which the shaft portion 42 of the hydraulic cylinder 41 is inserted so as to be movable up and down, and the shaft portion 42 is inserted into the inspection chamber 10 through the insertion hole 17. The lower end protrudes and is connected to the pressing plate portion 43. In addition, although illustration is abbreviate | omitted, the bearing is provided in the insertion hole 17, and since the axial part 42 is slidably fitted to the bearing, the axial part 42 can move smoothly up and down. Yes. Then, when the shaft portion 42 moves up and down by driving the hydraulic cylinder 41, the pressing plate portion 43 can be moved up and down.

押圧板部４３の下面には、上側のシール部材３１Ａが取り付けられており、押圧板部４３の上下移動に伴って、上側のシール部材３１Ａが上下移動可能に設けられている。また、この上側のシール部材３１Ａは、検査チャンバ１０の円筒部１６との間に空気漏れを生じさせることなく、上下移動可能に設けられている。したがって、下側のシール部材３１Ｂの上にワーク２０の下側の開口部２１ｂを向けて載置し、その状態で油圧シリンダ４１を駆動して上側のシール部材３１Ａを下降させることによって、上側のシール部材３１Ａをワーク２０の上側の開口部２１ａに当接させて押圧でき、ワーク２０の上下の開口部２１ａ，２１ｂを下側のシール部材３１Ｂと上側のシール部材３１Ａとの間で挟持してワーク２０の上側の開口部２１ａとシール部材３１Ａ、下側の開口部２１ｂとシール部材３１Ｂを密着させることができる。そして、この密着によってワーク２０の開口部２１ａ，２１ｂがシール部材３１Ａ，３１Ｂにより閉塞されることで、ワーク２０の内部側と外部側とが隔離されて、検査チャンバ１０の内部に密閉空間部１１，１２が形成される。
また、外部側の密閉空間部１２を構成する検査チャンバ１０の円筒部１６には、通気孔（図示略）が設けられており、この通気孔には検査用のトレースガスを供給するガス供給手段５１が接続されている。 An upper seal member 31A is attached to the lower surface of the pressing plate portion 43, and the upper sealing member 31A is provided so as to be movable up and down as the pressing plate portion 43 moves up and down. The upper seal member 31 </ b> A is provided so as to be movable up and down without causing air leakage between the seal member 31 </ b> A and the cylindrical portion 16 of the inspection chamber 10. Accordingly, the lower opening 21b is placed on the lower seal member 31B and the upper cylinder 21A is driven to lower the upper seal member 31A by driving the hydraulic cylinder 41 in this state. The seal member 31A can be pressed against the upper opening 21a of the workpiece 20, and the upper and lower openings 21a and 21b of the workpiece 20 are sandwiched between the lower seal member 31B and the upper seal member 31A. The upper opening 21a and the sealing member 31A of the workpiece 20 can be brought into close contact with the lower opening 21b and the sealing member 31B. The openings 21 a and 21 b of the workpiece 20 are closed by the sealing members 31 </ b> A and 31 </ b> B due to the close contact, so that the inner side and the outer side of the workpiece 20 are isolated, and the sealed space portion 11 is formed inside the inspection chamber 10. , 12 are formed.
Further, a vent hole (not shown) is provided in the cylindrical portion 16 of the inspection chamber 10 constituting the external sealed space portion 12, and a gas supply means for supplying a trace gas for inspection to the vent hole. 51 is connected.

次に、このように構成された漏れ検査装置１０１を用いて、円筒状のワーク２０の漏れ検査を行う方法について説明する。
まず、下側のシール部材３１Ｂ上にワーク２０の下側の開口部２１ｂを向けて載置する。そして、油圧シリンダ４１を駆動して押圧板部４３及び上側のシール部材３１Ａを下降移動させ、ワーク２０の上側の開口部２１ａに上側のシール部材３１Ａを当接させて押圧する。これにより、下側のシール部材３１Ｂと上側のシール部材３１Ａとの間にワーク２０が挟持され、ワーク２０の上下の開口部２１ａ，２１ｂが閉塞されることで、ワーク２０の内部側と外部側とが隔離され、密閉空間部１１，１２が形成される。この際、シール部材３１Ａ，３１Ｂ及びワーク２０にかけられる押圧力は、トレースガスを外部側の密閉空間部１２に導入することで生じる反力（内圧）を考慮することなく、ワーク２０の上下の開口部２１ａ，２１ｂを閉塞した状態に維持するのに必要な大きさとされる。 Next, a method for performing a leakage inspection of the cylindrical workpiece 20 using the leakage inspection apparatus 101 configured as described above will be described.
First, the workpiece 20 is placed on the lower seal member 31B with the lower opening 21b of the workpiece 20 facing it. Then, the hydraulic cylinder 41 is driven to move the pressing plate 43 and the upper sealing member 31A downward, and the upper sealing member 31A is brought into contact with and pressed against the upper opening 21a of the workpiece 20. Thereby, the work 20 is sandwiched between the lower seal member 31B and the upper seal member 31A, and the upper and lower openings 21a and 21b of the work 20 are closed, so that the inner side and the outer side of the work 20 are closed. Are isolated, and sealed spaces 11 and 12 are formed. At this time, the pressing force applied to the seal members 31A and 31B and the workpiece 20 is determined by the upper and lower openings of the workpiece 20 without considering the reaction force (internal pressure) generated by introducing the trace gas into the external sealed space 12. The size is required to maintain the portions 21a and 21b in a closed state.

そして、外部側の密閉空間部１２にトレースガスを導入する前に、ストップバルブ６１Ａ，６１Ｂを閉栓して、押圧板部４３の上下移動を停止し、ワーク２０の開口部２１ａ，２１ｂを閉塞した状態のシール部材３１Ａ，３１Ｂの上下移動を停止して、シール部材３１Ａのワーク２０から離間する方向への移動を停止する。なお、油圧シリンダ４１は、非圧縮性のオイルを流体としていることから、押圧板部４３によりシール部材３１Ａ，３１Ｂをワーク２０の開口部２１ａ，２１ｂに当接させて押圧した状態で油圧シリンダ４１のオイル（流体）の流れを遮断することで、ワーク２０の開口部２１ａ，２１ｂを閉塞した状態が保持される。   Then, before introducing the trace gas into the external sealed space 12, the stop valves 61A and 61B are closed, the vertical movement of the pressing plate 43 is stopped, and the openings 21a and 21b of the workpiece 20 are closed. The vertical movement of the sealing members 31A and 31B in the state is stopped, and the movement of the sealing member 31A in the direction away from the workpiece 20 is stopped. Since the hydraulic cylinder 41 uses incompressible oil as a fluid, the hydraulic cylinder 41 is in a state in which the seal members 31A and 31B are pressed against the openings 21a and 21b of the workpiece 20 by the pressing plate 43. By shutting off the flow of the oil (fluid), the state where the openings 21a and 21b of the workpiece 20 are closed is maintained.

次に、密閉空間部１１，１２内を排気して減圧し、ワーク２０の開口部２１ａ，２１ｂの閉塞を保持した状態でガス供給手段５１から外部側の密閉空間部１２内にトレースガスを導入するとともに、漏れ検査手段５２により内部側の密閉空間部１１内のトレースガスを検出する。これにより、内部側の密閉空間部１１内でトレースガスが検出されれば、ワーク２０に亀裂や孔等の欠陥があり漏れが発生したと判断され、トレースガスが検出されなければ、ワーク２０には亀裂や孔等の欠陥はなく、漏れはないと判断される。   Next, the inside of the sealed spaces 11 and 12 is evacuated and decompressed, and the trace gas is introduced from the gas supply means 51 into the sealed space 12 on the outside side while the openings 21a and 21b of the work 20 are kept closed. At the same time, the trace gas in the sealed space 11 on the inner side is detected by the leak inspection means 52. Thereby, if the trace gas is detected in the sealed space portion 11 on the inner side, it is determined that there is a defect such as a crack or a hole in the work 20 and leakage has occurred, and if the trace gas is not detected, the work 20 There are no defects such as cracks and holes, and it is judged that there is no leakage.

なお、外部側の密閉空間部１２内へのトレースガスの導入後においては、トレースガスが外部側の密閉空間部１２内に充填されることで内圧が上昇して、トレースガスによる反力が生じるが、トレースガスの導入前にストップバルブ６１Ａ，６１Ｂを閉栓して、油圧シリンダ４１のオイルの流れを遮断しているので、上側のシール部材３１Ａ及び押圧板部４３がトレースガスの反力によって押し戻されることがなく、安定して検査を行うことができる。   Note that after the trace gas is introduced into the external sealed space 12, the internal pressure is increased by filling the trace gas into the external sealed space 12, and a reaction force due to the trace gas is generated. However, before the introduction of the trace gas, the stop valves 61A and 61B are closed to block the oil flow of the hydraulic cylinder 41, so that the upper seal member 31A and the pressing plate 43 are pushed back by the reaction force of the trace gas. This makes it possible to perform inspections stably.

漏れ検査終了後は、検査チャンバ１０内を常圧に戻して、トレースガスを排気する。そして、ストップバルブ６１Ａ，６１Ｂを開栓して、油圧シリンダ４１を駆動させて押圧板部４３を上昇移動させ、検査済みのワーク２０を検査チャンバ１０内から取り出し、別の未検査のワーク２０と交換することで、複数のワーク２０について繰り返し漏れ検査を行うことができる。   After completion of the leak inspection, the inside of the inspection chamber 10 is returned to normal pressure, and the trace gas is exhausted. Then, the stop valves 61A and 61B are opened, the hydraulic cylinder 41 is driven, the pressing plate portion 43 is moved upward, the inspected work 20 is taken out from the inspection chamber 10, and another uninspected work 20 and By exchanging, a plurality of workpieces 20 can be repeatedly inspected for leaks.

このように、本実施形態の漏れ検査装置１０１では、ストップバルブ６１Ａ，６１Ｂを閉栓して、シール部材３１Ａのワーク２０から離間する方向への移動を停止しておくことで、外部側の密閉空間部１２にトレースガスを導入することによりトレースガスによる反力が徐々に上昇しても、シール部材３１Ａ，３１Ｂによりワーク２０の開口部２１ａ，２１ｂを閉塞した状態を維持できる。
したがって、この漏れ検査装置１０１では、トレースガスの導入前において、シール部材３１Ａ，３１Ｂによりワーク２０の開口部２１ａ，２１ｂを閉塞した状態に維持するために、トレースガスによる反力を考慮した過剰な押圧力がワーク２０にかけられることがないので、検査すべき微小な孔や亀裂等が変形して塞がれることがなく、高精度に漏れを検出できる。また、シール部材３１Ａ，３１Ｂにも過剰な押圧力が付加されることがないので、シール部材３１Ａ，３１Ｂの摩耗を防止でき、シール部材３１Ａ，３１Ｂを長期的に継続して使用できる。 As described above, in the leakage inspection apparatus 101 of the present embodiment, the stop valves 61A and 61B are closed, and the movement of the seal member 31A in the direction away from the workpiece 20 is stopped, so that the sealed space on the outside side is stopped. Even if the reaction force due to the trace gas gradually increases by introducing the trace gas into the portion 12, the state in which the openings 21a and 21b of the workpiece 20 are closed by the seal members 31A and 31B can be maintained.
Therefore, in this leak inspection apparatus 101, in order to keep the openings 21a and 21b of the workpiece 20 closed by the sealing members 31A and 31B before the introduction of the trace gas, an excessive amount considering the reaction force due to the trace gas is taken into account. Since the pressing force is not applied to the workpiece 20, minute holes or cracks to be inspected are not deformed and blocked, and leakage can be detected with high accuracy. Further, since excessive pressing force is not applied to the seal members 31A and 31B, wear of the seal members 31A and 31B can be prevented, and the seal members 31A and 31B can be used continuously for a long time.

なお、図１に示す漏れ検査装置１０１では、ワーク２０の両端の開口部２１ａ，２１ｂを、それぞれ別のシール部材３１Ａ，３１Ｂを密着させて閉塞するようにしていたが、図２に示す漏れ検査装置１０１Ｓのように、一方の開口部が閉塞された有底のワーク２３の検査を行う場合には、ワーク２３の１箇所の開口部２４を閉塞するシール部材３１Ａを設けておけばよく、下側のシール部材を省略することができる。   In the leak inspection apparatus 101 shown in FIG. 1, the openings 21 a and 21 b at both ends of the work 20 are closed with the separate seal members 31 </ b> A and 31 </ b> B in close contact, but the leak inspection shown in FIG. 2. When inspecting the bottomed work 23 with one opening closed as in the apparatus 101S, a sealing member 31A that closes one opening 24 of the work 23 may be provided. The side seal member can be omitted.

図３は、本発明の第２実施形態の漏れ検査装置１０２を示している。この漏れ検査装置１０２は、第１実施形態の漏れ検査装置１０１と同様に、両側（図３では上下）に開口部を有する筒状のワーク２０の開口部２１ａ，２１ｂを、シール部材３１Ａ，３１Ｂにより閉塞した状態で、このワーク２０を検査チャンバ１０内に配置し、トレースガスを利用してワーク２０の内部側の密閉空間部１１と外部側の密閉空間部１２との間の漏れを検出するものである。なお、第２実施形態の漏れ検査装置１０２において、第１実施形態の漏れ検査装置１０１と共通要素には、同一符号を付して説明を省略し、以降の第３実施形態の漏れ検査装置１０３、第４実施形態の漏れ検査装置１０４においても同様とする。   FIG. 3 shows a leak inspection apparatus 102 according to the second embodiment of the present invention. Similar to the leak inspection apparatus 101 of the first embodiment, the leak inspection apparatus 102 includes openings 21a and 21b of the cylindrical workpiece 20 having openings on both sides (up and down in FIG. 3) as seal members 31A and 31B. In this state, the work 20 is placed in the inspection chamber 10, and a leak between the sealed space portion 11 on the inner side of the work 20 and the sealed space portion 12 on the outer side is detected using the trace gas. Is. In the leak test apparatus 102 of the second embodiment, the same reference numerals are given to the same elements as those of the leak test apparatus 101 of the first embodiment, and the description thereof is omitted, and the leak test apparatus 103 of the third embodiment thereafter is described. The same applies to the leakage inspection apparatus 104 of the fourth embodiment.

この漏れ検査装置１０２においては、検査チャンバ１０、押圧手段４０、ガス供給手段５１、漏れ検出手段５２の構成は、第１実施形態の漏れ検査装置１０１と同様であるが、ロック手段７０が、押圧手段４０を構成する油圧シリンダ４１と油圧源４４との間に設けられたクローズドセンターバルブ７１（本発明におけるバルブ）により構成されている点が異なる。クローズドセンターバルブ７１は、１ポジションの閉栓と２ポジションの開栓との計３ポジションの切り換えを行うものであり、図３に示すように、中央の閉栓ポジションｐ２２では、油圧シリンダ４１と油圧源４４との間のオイルの流通が遮断され、押圧板部４３の上下移動が停止されることで、シール部材３１Ａのワーク２０から離間する方向への移動を停止することができる。また、クローズドセンターバルブ７１が、図３の左側の開栓ポジションｐ２１にあるときは、油圧シリンダ４１の上部空間に油圧源４４からオイルが流れ、下部空間から油圧源４４にオイルが戻ることで、軸部４２が下降移動し、押圧板部４３及びシール部材３１Ａをワーク２０に向けて前進させることができる。一方、クローズドセンターバルブ７１が、図３の右側の開栓ポジションｐ２３にあるときは、油圧シリンダ４１の下部空間に油圧源４４からオイルが流れ、上部空間から油圧源４４にオイルが戻ることで、軸部４２が上昇移動し、押圧板部４３及びシール部材３１Ａをワーク２０から退避させることができる。   In this leak test apparatus 102, the configuration of the test chamber 10, the pressing means 40, the gas supply means 51, and the leak detection means 52 is the same as that of the leak test apparatus 101 of the first embodiment, but the lock means 70 is pressed. The difference is that it is constituted by a closed center valve 71 (valve in the present invention) provided between a hydraulic cylinder 41 and a hydraulic power source 44 constituting the means 40. The closed center valve 71 switches between a total of three positions, that is, one-position closing and two-position opening. As shown in FIG. 3, at the central closing position p22, the hydraulic cylinder 41 and the hydraulic source 44 are switched. And the vertical movement of the pressing plate portion 43 is stopped, so that the movement of the sealing member 31A in the direction away from the workpiece 20 can be stopped. Further, when the closed center valve 71 is at the opening position p21 on the left side in FIG. 3, oil flows from the hydraulic source 44 to the upper space of the hydraulic cylinder 41 and returns from the lower space to the hydraulic source 44. The shaft portion 42 moves downward, and the pressing plate portion 43 and the seal member 31 </ b> A can be advanced toward the workpiece 20. On the other hand, when the closed center valve 71 is in the opening position p23 on the right side in FIG. 3, oil flows from the hydraulic source 44 to the lower space of the hydraulic cylinder 41 and returns from the upper space to the hydraulic source 44. The shaft part 42 moves upward, and the pressing plate part 43 and the seal member 31 </ b> A can be retracted from the work 20.

この第２実施形態の漏れ検査装置１０２において、油圧シリンダ４１を駆動してシール部材３１Ａ，３１Ｂによりワーク２０の開口部２１ａ，２１ｂを閉塞する際には、クローズドセンターバルブ７１を開栓ポジションｐ２１にし、押圧板部３２及び上側のシール部材３１Ａを下降移動させる。そして、シール部材３１Ａ，３１Ｂをワーク２０の開口部２１ａ，２１ｂに当接させて押圧し、開口部２１ａ，２１ｂを閉塞させた後、クローズドセンターバルブ７１を閉栓ポジションｐ２２にして押圧板部４３及び上側のシール部材３１Ａの下降移動を停止し、開口部２１ａ，２１ｂをシール部材３１Ａ，３１Ｂにより閉塞した状態を保持する。この際、シール部材３１Ａ，３１Ｂ及びワーク２０にかけられる押圧力は、トレースガスを外部側の密閉空間部１２に導入することで生じる反力（内圧）を考慮することなく、ワーク２０の上下の開口部２１ａ，２１ｂを閉塞した状態に維持するのに必要な大きさとされる。   In the leakage inspection apparatus 102 of the second embodiment, when the hydraulic cylinder 41 is driven and the openings 21a and 21b of the workpiece 20 are closed by the seal members 31A and 31B, the closed center valve 71 is set to the opening position p21. Then, the pressing plate portion 32 and the upper seal member 31A are moved downward. Then, the seal members 31A and 31B are pressed against the openings 21a and 21b of the workpiece 20 and pressed to close the openings 21a and 21b, and then the closed center valve 71 is set to the plugging position p22 and The downward movement of the upper seal member 31A is stopped, and the state in which the openings 21a and 21b are closed by the seal members 31A and 31B is maintained. At this time, the pressing force applied to the seal members 31A and 31B and the workpiece 20 is determined by the upper and lower openings of the workpiece 20 without considering the reaction force (internal pressure) generated by introducing the trace gas into the external sealed space 12. The size is required to maintain the portions 21a and 21b in a closed state.

第２実施形態の漏れ検査装置１０２においても、外部側の密閉空間部１２にトレースガスを導入することによりトレースガスによる反力が徐々に上昇しても、クローズドセンターバルブ７１を閉栓ポジションｐ２２とすることで、押圧板部４３の上下移動を停止してシール部材３１Ａの移動を止めることができるので、シール部材３１Ａ，３１Ｂによりワーク２０の開口部２１ａ，２１ｂを閉塞した状態を維持できる。
したがって、この漏れ検査装置１０２においても、第１実施形態の漏れ検査装置１０１と同様に、トレースガスの導入前において、シール部材３１Ａ，３１Ｂによりワーク２０の開口部２１ａ，２１ｂを閉塞した状態に維持するために、トレースガスによる反力を考慮した過剰な押圧力がワーク２０にかけられることがないので、検査すべき微小な孔や亀裂等が変形して塞がれることがなく、高精度に漏れを検出できる。また、シール部材３１Ａ，３１Ｂにも過剰な押圧力が付加されることがないので、シール部材３１Ａ，３１Ｂの摩耗を防止でき、シール部材３１Ａ，３１Ｂを長期的に継続して使用できる。 Also in the leak inspection apparatus 102 of the second embodiment, even if the reaction force due to the trace gas gradually increases by introducing the trace gas into the sealed space portion 12 on the outside side, the closed center valve 71 is set to the closing position p22. Thus, the vertical movement of the pressing plate portion 43 can be stopped to stop the movement of the seal member 31A, so that the state in which the openings 21a and 21b of the workpiece 20 are closed by the seal members 31A and 31B can be maintained.
Therefore, in this leak inspection apparatus 102 as well as the leak inspection apparatus 101 of the first embodiment, the opening portions 21a and 21b of the workpiece 20 are kept closed by the seal members 31A and 31B before the introduction of the trace gas. Therefore, since excessive pressing force in consideration of the reaction force due to the trace gas is not applied to the workpiece 20, minute holes or cracks to be inspected are not deformed and blocked, and leak with high accuracy. Can be detected. Further, since excessive pressing force is not applied to the seal members 31A and 31B, wear of the seal members 31A and 31B can be prevented, and the seal members 31A and 31B can be used continuously for a long time.

図４は、本発明の第３実施形態の漏れ検査装置１０３を示している。この漏れ検査装置１０３は、第１実施形態の漏れ検査装置１０１及び第２実施形態の漏れ検査装置１０２と同様に、両側（図４では上下）に開口部を有する筒状のワーク２０の開口部２１ａ，２１ｂを、シール部材３１Ａ，３１Ｂにより閉塞した状態で、このワーク２０を検査チャンバ１０内に配置し、トレースガスを利用してワーク２０の内部側の密閉空間部１１と外部側の密閉空間部１２との間の漏れを検出するものである。また、第３実施形態の漏れ検査装置１０３は、検査チャンバ１０、ガス供給手段５１、漏れ検出手段５２の構成は、第１実施形態の漏れ検査装置１０１と同様であるが、押圧手段４５が、エアシリンダ４６とその軸部４７に取り付けられた押圧板部４８とにより構成され、また、シール部材３１Ａのワーク２０から離間する方向への移動を停止するロック手段８０が、押圧板部４８に形成した係合孔４８ａ，４８ｂと、検査チャンバ１０の本体部１４に取り付けたエアシリンダ８１Ａ，８１Ｂの軸部８２Ａ，８２Ｂ（本発明におけるストッパ部材）との係合によるくさび機構８３Ａ，８３Ｂにより構成されている。すなわち、第３実施形態の漏れ検査装置１０３においては、ロック手段８０が、機械的手段により構成されている点が第１実施形態及び第２実施形態と大きく異なる。   FIG. 4 shows a leak inspection apparatus 103 according to the third embodiment of the present invention. The leak inspection apparatus 103 is similar to the leak inspection apparatus 101 according to the first embodiment and the leak inspection apparatus 102 according to the second embodiment. The opening portion of the cylindrical workpiece 20 having openings on both sides (up and down in FIG. 4). With the workpieces 21a and 21b closed by the sealing members 31A and 31B, the workpiece 20 is placed in the inspection chamber 10, and the sealed space 11 on the inner side of the workpiece 20 and the sealed space on the outer side using the trace gas. A leak between the unit 12 and the unit 12 is detected. Further, the leak inspection apparatus 103 of the third embodiment has the same configuration as the leak inspection apparatus 101 of the first embodiment except that the configuration of the inspection chamber 10, the gas supply means 51, and the leak detection means 52 is the same as that of the leak inspection apparatus 101 of the first embodiment. The pressing plate portion 48 is formed with a locking means 80 that includes the air cylinder 46 and the pressing plate portion 48 attached to the shaft portion 47 and stops the movement of the seal member 31 </ b> A in the direction away from the workpiece 20. And wedge mechanisms 83A, 83B by engagement between the engaging holes 48a, 48b and the shaft portions 82A, 82B (stop members in the present invention) of the air cylinders 81A, 81B attached to the main body 14 of the inspection chamber 10. ing. That is, in the leak inspection apparatus 103 of the third embodiment, the point that the lock means 80 is configured by mechanical means is greatly different from the first embodiment and the second embodiment.

押圧手段４５を構成するエアシリンダ４６は、クローズドセンターバルブ７５を介して空気圧源４９に接続されており、図４に示すように、中央の閉栓ポジションｐ３２では、エアシリンダ４６と空気圧源４９との間のエアの流通が遮断され、押圧板部４８の上下移動を停止できる。また、クローズドセンターバルブ７５が、図４の左側の開栓ポジションｐ３１にあるときは、エアシリンダ４６の上部空間に空気圧源４９からエアが流れ、下部空間から空気圧源４９にエアが戻ることで、軸部４７が下降移動し、押圧板部４８をワーク２０に向けて前進させることができる。そして、クローズドセンターバルブ７５が、図４の右側の開栓ポジションｐ３３にあるときは、エアシリンダ４６の下部空間に空気圧源４９からエアが流れ、上部空間から空気圧源４９にエアが戻ることで、軸部４７が上昇移動し、押圧板部４８をワーク２０から退避させることができる。   The air cylinder 46 constituting the pressing means 45 is connected to the air pressure source 49 via the closed center valve 75. As shown in FIG. 4, at the central closing position p32, the air cylinder 46 and the air pressure source 49 are connected. The air flow is interrupted, and the vertical movement of the pressing plate portion 48 can be stopped. Further, when the closed center valve 75 is at the opening position p31 on the left side of FIG. 4, air flows from the air pressure source 49 to the upper space of the air cylinder 46, and air returns from the lower space to the air pressure source 49. The shaft portion 47 moves downward, and the pressing plate portion 48 can be advanced toward the workpiece 20. When the closed center valve 75 is at the right opening position p33 in FIG. 4, air flows from the air pressure source 49 to the lower space of the air cylinder 46, and air returns from the upper space to the air pressure source 49. The shaft portion 47 moves upward, and the pressing plate portion 48 can be retracted from the workpiece 20.

また、ロック手段８０を構成するくさび機構８３Ａ，８３Ｂは、上述したように、押圧板部４８に形成した係合孔４８ａ，４８ｂと、エアシリンダ８１Ａ，８１Ｂの軸部８２Ａ，８２Ｂとにより構成され、軸部８２Ａ，８２Ｂをそれぞれ係合孔４８ａ，４８ｂに係合させることで押圧板部４８を固定し、その上下移動を停止する。一方、エアシリンダ８１Ａ，８１Ｂの軸部８２Ａ，８２Ｂを係合孔４８ａ，４８ｂから抜き出した状態では、押圧板部４８及びシール部材３１Ａは、押圧手段４５を構成するエアシリンダ４６の駆動に伴って上下移動可能となる。   Further, the wedge mechanisms 83A and 83B constituting the locking means 80 are constituted by the engaging holes 48a and 48b formed in the pressing plate portion 48 and the shaft portions 82A and 82B of the air cylinders 81A and 81B as described above. The pressing plate portion 48 is fixed by engaging the shaft portions 82A and 82B with the engaging holes 48a and 48b, respectively, and the vertical movement thereof is stopped. On the other hand, in a state where the shaft portions 82A and 82B of the air cylinders 81A and 81B are extracted from the engagement holes 48a and 48b, the pressing plate portion 48 and the seal member 31A are driven by driving the air cylinder 46 constituting the pressing means 45. Can move up and down.

また、くさび機構８３Ａ，８３Ｂを構成するエアシリンダ８１Ａ，８１Ｂは、ダブルバルブ８５を介して空気圧源８４と接続されており、図４に示すように、左側の開栓ポジションｐ４１にあるときは、エアシリンダ８１Ａ，８１Ｂの外周側空間に空気圧源８４からエアが流れ、内周側空間から空気圧源８４にエアが戻ることで、軸部８２Ａ，８２Ｂが内周側に向かって移動し、押圧板部４８の係合孔４８ａ，４８ｂと係合した状態が維持されることで、押圧板部４８の上下移動が停止され、シール部材３１Ａのワーク２０から離間する方向への移動を停止することができる。一方、ダブルバルブ８５が、図４の右側の開栓ポジションｐ４２にあるときは、エアシリンダ８１Ａ，８１Ｂの内周側空間に空気圧源８４からエアが流れ、外周側空間から空気圧源８４にエアが戻ることで、軸部８２Ａ，８２Ｂが外周側に向かって移動し、押圧板部４８の係合孔４８ａ，４８ｂから軸部８２Ａ，８２Ｂの先端が引き抜かれることで、軸部８２Ａ，８２Ｂによる拘束が解かれ、押圧板部４８をとともにシール部材３１Ａを上下移動させることができる。   Further, the air cylinders 81A and 81B constituting the wedge mechanisms 83A and 83B are connected to the air pressure source 84 via the double valve 85, and when in the left opening position p41 as shown in FIG. When air flows from the air pressure source 84 to the outer peripheral space of the air cylinders 81A and 81B and returns from the inner peripheral space to the air pressure source 84, the shaft portions 82A and 82B move toward the inner peripheral side, and the pressing plate By maintaining the engagement with the engagement holes 48a and 48b of the portion 48, the vertical movement of the pressing plate portion 48 is stopped, and the movement of the seal member 31A in the direction away from the workpiece 20 can be stopped. it can. On the other hand, when the double valve 85 is in the opening position p42 on the right side in FIG. 4, air flows from the air pressure source 84 to the inner peripheral space of the air cylinders 81A and 81B, and air flows from the outer peripheral space to the air pressure source 84. By returning, the shaft portions 82A and 82B move toward the outer peripheral side, and the tips of the shaft portions 82A and 82B are pulled out from the engagement holes 48a and 48b of the pressing plate portion 48, thereby restraining the shaft portions 82A and 82B. Is released, and the seal plate 31A can be moved up and down together with the pressing plate portion 48.

この第３実施形態の漏れ検査装置１０３において、シール部材３１Ａ，３１Ｂによりワーク２０の開口部２１ａ，２１ｂを閉塞する際には、ダブルバルブ８５を開栓ポジションｐ４２にしてくさび機構８３Ａ，８３Ｂの軸部８２Ａ，８２Ｂを外周側に退避させた状態としておく。そして、クローズドセンターバルブ７５を開栓ポジションｐ３１にして、押圧板部４８及び上側のシール部材３１Ａを下降移動させる。そして、シール部材３１Ａ，３１Ｂをワーク２０の開口部２１ａ，２１ｂに当接させて押圧し、開口部２１ａ，２１ｂを閉塞させた後、クローズドセンターバルブ７５を閉栓ポジションｐ３２にして押圧板部４８及び上側のシール部材３１Ａの上下移動を停止し、開口部２１ａ，２１ｂをシール部材３１Ａ，３１Ｂにより閉塞した状態を保持する。この際、シール部材３１Ａ，３１Ｂ及びワーク２０にかけられる押圧力は、トレースガスを外部側の密閉空間部１２に導入することで生じる反力（内圧）を考慮することなく、ワーク２０の上下の開口部２１ａ，２１ｂを閉塞した状態に維持するのに必要な大きさとされる。   In the leakage inspection apparatus 103 according to the third embodiment, when the openings 21a and 21b of the workpiece 20 are closed by the seal members 31A and 31B, the double valve 85 is set to the opening position p42 and the shafts of the wedge mechanisms 83A and 83B. The parts 82A and 82B are kept retracted to the outer peripheral side. Then, the closed center valve 75 is set to the opening position p31, and the pressing plate portion 48 and the upper seal member 31A are moved downward. Then, the seal members 31A and 31B are pressed against the openings 21a and 21b of the workpiece 20 and pressed to close the openings 21a and 21b. Then, the closed center valve 75 is set to the closing position p32 and the pressing plate 48 and The vertical movement of the upper seal member 31A is stopped, and the state in which the openings 21a and 21b are closed by the seal members 31A and 31B is maintained. At this time, the pressing force applied to the seal members 31A and 31B and the workpiece 20 is determined by the upper and lower openings of the workpiece 20 without considering the reaction force (internal pressure) generated by introducing the trace gas into the external sealed space 12. The size is required to maintain the portions 21a and 21b in a closed state.

また、外部側の密閉空間部１２にトレースガスを導入する前に、ダブルバルブ８５を開栓ポジションｐ４１にしてくさび機構８３Ａ，８３Ｂの軸部８２Ａ，８２Ｂを内周側に移動させることで、押圧板部４８の係合孔４８ａ，４８ｂと軸部８２Ａ，８２Ｂとを係合させ、押圧板部４８及びシール部材３１Ａの上下移動を停止する。   Further, before introducing the trace gas into the external sealed space 12, the double valve 85 is set to the opening position p41, and the shaft portions 82A and 82B of the rust mechanisms 83A and 83B are moved to the inner peripheral side, thereby pressing The engagement holes 48a and 48b of the plate part 48 are engaged with the shaft parts 82A and 82B, and the vertical movement of the pressing plate part 48 and the seal member 31A is stopped.

この漏れ検査装置１０３では、押圧手段４５としてエアシリンダ４６を用いているが、エアシリンダ４６は、圧縮性を有する気体（エア）を流体としていることから、バネを介してシール部材３１Ａ，３１Ｂを押圧していることと同じことになる。このため、トレースガスによる反力を受けた場合には、エアシリンダ４６の上部空間のエアが圧縮されて、押圧板部４８及び上側のシール部材３１Ａがワーク２０から離間する方向に押し戻されるおそれがある。しかし、第３実施形態の漏れ検査装置１０３では、ロック手段８０としてくさび機構８３Ａ，８３Ｂを設け、機械的手段により押圧板部４８の上下移動を停止することにしている。このように、トレースガスの導入前に、くさび機構８３Ａ，８３Ｂを構成する軸部８２Ａと係合孔４８ａ、軸部８２Ｂと係合孔４８ｂを係合させておくことで、トレースガスが外部側の密閉空間部１２内に充填されることにより内圧が上昇して、トレースガスによる反力が生じた場合にも、軸部８２Ａ，８２Ｂが係合孔４８ａ，４８ｂに当接して押圧板部４８がワーク２０から離間する方向への移動を停止できる。したがって、上側のシール部材３１Ａ及び押圧板部４８がトレースガスの反力によって押し戻されることがないので、安定して検査を行うことができる。   In this leak inspection apparatus 103, an air cylinder 46 is used as the pressing means 45. Since the air cylinder 46 uses a compressible gas (air) as a fluid, the seal members 31A and 31B are connected via springs. This is the same as pressing. For this reason, when receiving a reaction force due to the trace gas, the air in the upper space of the air cylinder 46 is compressed, and the pressing plate portion 48 and the upper seal member 31A may be pushed back in the direction away from the workpiece 20. is there. However, in the leakage inspection apparatus 103 according to the third embodiment, wedge mechanisms 83A and 83B are provided as the lock means 80, and the vertical movement of the pressing plate portion 48 is stopped by mechanical means. In this way, before the trace gas is introduced, the trace gas is externally connected by engaging the shaft portion 82A and the engagement hole 48a, and the shaft portion 82B and the engagement hole 48b constituting the wedge mechanisms 83A and 83B. Even when the internal pressure rises by filling the sealed space portion 12 and a reaction force is generated by the trace gas, the shaft portions 82A and 82B come into contact with the engagement holes 48a and 48b to press the pressing plate portion 48. Can stop moving in a direction away from the workpiece 20. Therefore, since the upper seal member 31A and the pressing plate portion 48 are not pushed back by the reaction force of the trace gas, the inspection can be performed stably.

なお、図４では、２個のくさび機構８３Ａ，８３Ｂが図示されているが、３個以上のくさび機構によりロック手段を構成することもできる。この場合、各くさび機構にトレースガスによる反力を分散させて受け持たせるため、各くさび機構は押圧板部４８の周方向に等間隔で配置しておくことが望ましい。   In FIG. 4, two wedge mechanisms 83 </ b> A and 83 </ b> B are illustrated, but the locking means may be configured by three or more wedge mechanisms. In this case, it is desirable that the wedge mechanisms be arranged at equal intervals in the circumferential direction of the pressing plate portion 48 so that the reaction force due to the trace gas is dispersed and received in each wedge mechanism.

なお、漏れ検査終了後は、ダブルバルブ８５を開栓ポジションｐ４２にして、軸部８２Ａ，８２Ｂを外周側に向かって移動させ、軸部８２Ａ，８２Ｂと係合孔４８ａ，４８ｂとの係合を解除する。そして、クローズドセンターバルブ７５を開栓ポジションｐ３３にし、エアシリンダ４６を駆動させて押圧板部４８を上昇移動させる。   After the leak inspection, the double valve 85 is set to the opening position p42, the shaft portions 82A and 82B are moved toward the outer peripheral side, and the shaft portions 82A and 82B are engaged with the engagement holes 48a and 48b. To release. Then, the closed center valve 75 is set to the opening position p33, the air cylinder 46 is driven, and the pressing plate portion 48 is moved upward.

このように、第３実施形態の漏れ検査装置１０３においても、外部側の密閉空間部１２にトレースガスを導入することによりトレースガスによる反力が徐々に上昇しても、くさび機構８３Ａ，８３Ｂにより押圧板部４８の上下移動を停止し、シール部材３１Ａのワーク２０から離間する方向への移動を停止しているので、シール部材３１Ａ，３１Ｂによりワーク２０の開口部２１ａ，２１ｂを閉塞した状態を維持できる。
したがって、この漏れ検査装置１０３においても、第１実施形態の漏れ検査装置１０１及び第２実施形態の漏れ検査装置１０２と同様に、トレースガスの導入前において、シール部材３１Ａ，３１Ｂによりワーク２０の開口部２１ａ，２１ｂを閉塞する際に、トレースガスによる反力を考慮した過剰な押圧力がワーク２０にかけられることがないので、検査すべき微小な孔や亀裂等が変形して塞がれることがなく、高精度に漏れを検出できる。また、シール部材３１Ａ，３１Ｂにも過剰な押圧力が付加されることがないので、シール部材３１Ａ，３１Ｂの摩耗を防止でき、シール部材３１Ａ，３１Ｂを長期的に継続して使用できる。 As described above, even in the leakage inspection apparatus 103 of the third embodiment, even if the reaction force due to the trace gas gradually rises by introducing the trace gas into the sealed space portion 12 on the outer side, the wedge mechanisms 83A and 83B Since the vertical movement of the pressing plate portion 48 is stopped and the movement of the sealing member 31A in the direction away from the workpiece 20 is stopped, the opening portions 21a and 21b of the workpiece 20 are closed by the sealing members 31A and 31B. Can be maintained.
Therefore, also in this leak inspection apparatus 103, as with the leak inspection apparatus 101 of the first embodiment and the leak inspection apparatus 102 of the second embodiment, the opening of the work 20 is opened by the seal members 31A and 31B before the introduction of the trace gas. When the portions 21a and 21b are closed, an excessive pressing force in consideration of the reaction force due to the trace gas is not applied to the workpiece 20, so that minute holes or cracks to be inspected may be deformed and closed. And leakage can be detected with high accuracy. Further, since excessive pressing force is not applied to the seal members 31A and 31B, wear of the seal members 31A and 31B can be prevented, and the seal members 31A and 31B can be used continuously for a long time.

なお、第３実施形態では、ストッパ部材の軸部８２Ａ，８２Ｂを、押圧板部４８の係合孔４８ａ，４８ｂに係合させて、シール部材３１Ａの上下移動を停止することとしていたが、軸部８２Ａ，８２Ｂを押圧板部４８の背面（シール部材３１Ａの取付面とは反対側の面）に当接させることにより、押圧板部４８及びシール部材３１Ａのワーク２０から離間する方向への移動を停止することとしてもよい。
また、第３実施形態では、ロック手段８０のくさび機構８３Ａ，８３Ｂを駆動する手段として、エアシリンダ８１Ａ，８１Ｂを用いていたが、これに限定されるものではなく、例えば、モータ等の他の動力源によって軸部８２Ａ，８２Ｂを移動する構成とすることも可能である。また、くさび機構の他の機械的手段により、ロック手段を構成することも可能である。 In the third embodiment, the shaft portions 82A and 82B of the stopper member are engaged with the engagement holes 48a and 48b of the pressing plate portion 48 to stop the vertical movement of the seal member 31A. Movement of the pressing plate portion 48 and the sealing member 31A in the direction away from the workpiece 20 by bringing the portions 82A and 82B into contact with the back surface of the pressing plate portion 48 (the surface opposite to the mounting surface of the sealing member 31A). It is good also as stopping.
In the third embodiment, the air cylinders 81A and 81B are used as means for driving the wedge mechanisms 83A and 83B of the lock means 80. However, the present invention is not limited to this. A configuration in which the shaft portions 82A and 82B are moved by a power source is also possible. It is also possible to constitute the locking means by other mechanical means of the wedge mechanism.

図５は、本実施形態の漏れ検査装置１０４を示している。第１実施形態〜第３実施形態の漏れ検査装置１０１〜１０３においては、両側に開口部２１ａ，２１ｂを有する筒状のワーク２０を検査対象としていたが、ワークはこれに限定されるものではなく、図５に示すように、ガスボンベ等の１箇所の開口部２６を有するワーク２５の漏れ検査を行うこともできる。   FIG. 5 shows the leak inspection apparatus 104 of the present embodiment. In the leak inspection apparatuses 101 to 103 of the first to third embodiments, the cylindrical workpiece 20 having the openings 21a and 21b on both sides is the inspection target, but the workpiece is not limited to this. As shown in FIG. 5, it is also possible to perform a leakage inspection on a workpiece 25 having one opening 26 such as a gas cylinder.

第４実施形態の漏れ検査装置１０４では、押圧手段４０は、油圧シリンダ４１とその軸部４２に取り付けられた押圧板部３５とにより構成される。また、ロック手段９０は、押圧手段４０を構成する油圧シリンダ４１と油圧源４４との間に設けられたクローズドセンターバルブ９１（本発明におけるバルブ）により構成される。この場合、クローズドセンターバルブ９１は、図５に示すように、中央の閉栓ポジションｐ５２では、油圧シリンダ４１と油圧源４４との間のオイルの流通が遮断され、押圧板部３５の進退移動が停止される。また、クローズドセンターバルブ９１が、図５の左側の開栓ポジションｐ５１にあるときは、油圧シリンダ４１の左側空間に油圧源４４からオイルが流れ、右側空間から油圧源４４にオイルが戻ることで、軸部４２が右側に移動し、押圧板部３５をワーク２５に向けて前進させることができる。そして、クローズドセンターバルブ９１が、図５の右側の開栓ポジションｐ５３にあるときは、油圧シリンダ４１の右側空間に油圧源４４からオイルが流れ、左側空間から油圧源４４にオイルが戻ることで、軸部４２が左側に移動し、押圧板部３５をワーク２５から退避させることができる。   In the leakage inspection apparatus 104 according to the fourth embodiment, the pressing means 40 includes a hydraulic cylinder 41 and a pressing plate portion 35 attached to the shaft portion 42. The locking means 90 is constituted by a closed center valve 91 (a valve in the present invention) provided between the hydraulic cylinder 41 and the hydraulic power source 44 constituting the pressing means 40. In this case, as shown in FIG. 5, in the closed center valve 91, the oil flow between the hydraulic cylinder 41 and the hydraulic power source 44 is blocked at the central closing position p52, and the forward and backward movement of the pressing plate portion 35 is stopped. Is done. Further, when the closed center valve 91 is in the left opening position p51 in FIG. 5, oil flows from the hydraulic source 44 to the left space of the hydraulic cylinder 41, and returns from the right space to the hydraulic source 44. The shaft part 42 moves to the right side, and the pressing plate part 35 can be advanced toward the work 25. When the closed center valve 91 is in the right opening position p53 in FIG. 5, oil flows from the hydraulic source 44 to the right space of the hydraulic cylinder 41, and returns from the left space to the hydraulic source 44. The shaft part 42 moves to the left side, and the pressing plate part 35 can be retracted from the work 25.

この第４実施形態の漏れ検査装置１０４において、油圧シリンダ４１を駆動してシール部材３２によりワーク２５の開口部２６を閉塞する際には、クローズドセンターバルブ９１を開栓ポジションｐ５１にし、押圧板部３５及びシール部材３２を進行移動させる。そして、シール部材３２をワーク２５の開口部２６に当接させて押圧し、開口部２６を閉塞させた後、クローズドセンターバルブ９１を閉栓ポジションｐ５２にして押圧板部４３及びシール部材３２の進退移動を停止して、開口部２６をシール部材３２により閉塞した状態を保持する。この際、シール部材３２及びワーク２５にかけられる押圧力は、トレースガスを外部側の密閉空間部１２に導入することで生じる反力（内圧）を考慮することなく、ワーク２５の開口部２６を閉塞した状態に維持するのに必要な大きさとされる。   In the leak test apparatus 104 of the fourth embodiment, when the hydraulic cylinder 41 is driven and the opening 26 of the workpiece 25 is closed by the seal member 32, the closed center valve 91 is set to the opening position p51, and the pressing plate portion 35 and the seal member 32 are moved forward. Then, the seal member 32 is pressed against the opening 26 of the workpiece 25 and pressed to close the opening 26, and then the closed center valve 91 is set to the closing position p52, and the pressing plate 43 and the seal member 32 are moved forward and backward. And the state in which the opening 26 is closed by the seal member 32 is maintained. At this time, the pressing force applied to the seal member 32 and the work 25 closes the opening 26 of the work 25 without considering the reaction force (internal pressure) generated by introducing the trace gas into the external sealed space 12. The size is necessary to maintain the condition.

なお、外部側の密閉空間部１２内へのトレースガスの導入後においては、トレースガスが外部側の密閉空間部１２内に充填されることで内圧が上昇して、トレースガスによる反力が生じるが、トレースガスの導入前にクローズドセンターバルブ９１を閉栓して、油圧シリンダ４１のオイルの流れを遮断しているので、シール部材３２及び押圧板部３５がトレースガスの反力によって押し戻されることがなく、安定して検査を行うことができる。   Note that after the trace gas is introduced into the external sealed space 12, the internal pressure is increased by filling the trace gas into the external sealed space 12, and a reaction force due to the trace gas is generated. However, since the closed center valve 91 is closed before the trace gas is introduced to block the flow of oil in the hydraulic cylinder 41, the seal member 32 and the pressing plate portion 35 may be pushed back by the reaction force of the trace gas. And stable inspection can be performed.

このように、第４実施形態の漏れ検査装置１０４においても、クローズドセンターバルブ９１を閉栓ポジションｐ５２としておくことで、外部側の密閉空間部１２にトレースガスを導入することによりトレースガスによる反力が徐々に上昇しても、押圧板部３５の進退移動を停止して、シール部材３２のワーク２５から離間する方向への移動を停止することができ、シール部材３２によりワーク２５の開口部２６を閉塞した状態を維持できる。
したがって、この漏れ検査装置１０４においても、第１実施形態〜第３実施形態の漏れ検査装置１０１〜１０３と同様に、トレースガスの導入前において、シール部材３２によりワーク２５の開口部２６を閉塞した状態に維持するために、トレースガスによる反力を考慮した過剰な押圧力がワーク２６にかけられることがないので、検査すべき微小な孔や亀裂等が変形して塞がれることがなく、高精度に漏れを検出できる。また、シール部材３２にも過剰な押圧力が付加されることがないので、シール部材３２の摩耗を防止でき、シール部材３２を長期的に継続して使用できる。 As described above, also in the leak test apparatus 104 of the fourth embodiment, by setting the closed center valve 91 at the closing position p52, the reaction force due to the trace gas is introduced by introducing the trace gas into the external sealed space 12. Even if the pressure plate gradually rises, the forward / backward movement of the pressing plate portion 35 can be stopped, and the movement of the seal member 32 in the direction away from the workpiece 25 can be stopped. The blocked state can be maintained.
Accordingly, also in this leak inspection apparatus 104, the opening 26 of the work 25 is closed by the seal member 32 before the introduction of the trace gas, similarly to the leak inspection apparatuses 101 to 103 of the first to third embodiments. In order to maintain the state, an excessive pressing force in consideration of the reaction force due to the trace gas is not applied to the workpiece 26, so that a minute hole or a crack to be inspected is not deformed and blocked. Leakage can be detected with accuracy. Further, since excessive pressing force is not applied to the seal member 32, wear of the seal member 32 can be prevented, and the seal member 32 can be used continuously for a long time.

なお、上述した漏れ検査装置１０１〜１０４では、外部側の密閉空間部にトレースガスを導入し、外部側の密閉空間部から内部側の密閉空間部に漏れ出るトレースガスを検出する構成としていたが、内部側の密閉空間部にトレースガスを導入して、内部側の密閉空間部から外部側の密閉空間部に漏れ出るトレースガスを検出する構成とすることもできる。   In the above-described leakage inspection apparatuses 101 to 104, the configuration is such that the trace gas is introduced into the external sealed space and the trace gas leaking from the external sealed space to the internal sealed space is detected. Alternatively, a configuration may be adopted in which trace gas is introduced into the sealed space portion on the inner side, and the trace gas leaking from the sealed space portion on the inner side to the sealed space portion on the outer side is detected.

なお、本発明は上記実施形態に限定されるものではなく、本発明の趣旨を逸脱しない範囲において種々の変更を加えることが可能である。   In addition, this invention is not limited to the said embodiment, A various change can be added in the range which does not deviate from the meaning of this invention.

１０…検査チャンバ、１１…内部側の密閉空間部（他方の密閉空間部）、１２…外部側の密閉空間部（一方の密閉空間部）、１３…基部、１４…本体部、１５…天井部、１６…円筒部、１７…挿通孔、２０，２３，２５…ワーク、２１ａ，２１ｂ，２４，２６…開口部、３１Ａ，３１Ｂ，３２…シール部材、４０，４５…押圧手段、４１…油圧シリンダ、４２，４７…軸部、３５，４３，４８…押圧板部、４６，８１Ａ，８１Ｂ…エアシリンダ、４８ａ，４８ｂ…係合孔、４４，４４Ａ，４４Ｂ…油圧源、４９，８４…空気圧源、５１…ガス供給手段、５２…漏れ検出手段、６０，７０，８０，９０…ロック手段、６１Ａ，６１Ｂ…ストップバルブ、７１，７５，９１…クローズドセンターバルブ、８２Ａ，８２Ｂ…軸部（ストッパ部材）、８３Ａ，８３Ｂ…くさび機構、８５…ダブルバルブ、１０１，１０１Ｓ，１０２，１０３，１０４…漏れ検査装置 DESCRIPTION OF SYMBOLS 10 ... Test | inspection chamber, 11 ... Inside sealed space part (the other sealed space part), 12 ... Outside sealed space part (one sealed space part), 13 ... Base part, 14 ... Main part, 15 ... Ceiling part , 16 ... cylindrical part, 17 ... insertion hole, 20, 23, 25 ... work, 21a, 21b, 24, 26 ... opening, 31A, 31B, 32 ... seal member, 40, 45 ... pressing means, 41 ... hydraulic cylinder , 42, 47 ... Shaft portion, 35, 43, 48 ... Press plate portion, 46, 81A, 81B ... Air cylinder, 48a, 48b ... Engagement hole, 44, 44A, 44B ... Hydraulic source, 49, 84 ... Air pressure source 51 ... Gas supply means, 52 ... Leak detection means, 60, 70, 80, 90 ... Lock means, 61A, 61B ... Stop valve, 71, 75, 91 ... Closed center valve, 82A, 82B ... Shaft (stopper member) ), 3A, 83B ... wedge mechanism, 85 ... double valve, 101,101S, 102, 103, 104 ... leak test apparatus

Claims (4)

ワークを収容可能な検査チャンバと、
該検査チャンバ内の前記ワークの開口部にシール部材を当接させて押圧することにより該開口部を閉塞して前記検査チャンバ内を前記ワークの内部側と外部側とのそれぞれ別の密閉空間部として隔離する押圧手段と、
前記ワークの前記内部側又は前記外部側のうちの一方の密閉空間部にトレースガスを導入するガス供給手段と、
前記一方の密閉空間部から他方の密閉空間部に漏れ出る前記トレースガスを検出する漏れ検出手段と、
前記開口部を閉塞した状態の前記シール部材の前記ワークから離間する方向への移動を停止するロック手段とを備えることを特徴とする漏れ検査装置。 An inspection chamber capable of accommodating workpieces;
A sealing member is brought into contact with and pressed against the opening of the work in the inspection chamber to close the opening, and the inside of the inspection chamber is divided into separate sealed spaces on the inside and outside of the work. Pressing means to isolate as,
A gas supply means for introducing a trace gas into one sealed space portion of the inner side or the outer side of the workpiece;
Leak detection means for detecting the trace gas leaking from the one sealed space to the other sealed space,
A leakage inspection apparatus comprising: a locking unit that stops movement of the seal member in a state in which the opening is closed away from the workpiece. 前記押圧手段は油圧シリンダにより構成され、前記ロック手段は前記油圧シリンダの流体の流れを止めるバルブにより構成されていることを特徴とする請求項１に記載の漏れ検査装置。   2. The leak inspection apparatus according to claim 1, wherein the pressing means is constituted by a hydraulic cylinder, and the locking means is constituted by a valve for stopping a flow of fluid in the hydraulic cylinder. 前記押圧手段は、前記シール部材に当接して押圧する押圧板部を備え、
前記ロック手段は、前記押圧板部に当接して前記シール部材の前記ワークから離間する方向への移動を停止するストッパ部材を有することを特徴とする請求項１に記載の漏れ検査装置。 The pressing means includes a pressing plate portion that contacts and presses the seal member,
The leak inspection apparatus according to claim 1, wherein the locking unit includes a stopper member that contacts the pressing plate portion and stops the movement of the seal member in a direction away from the workpiece. ワークを収容可能な検査チャンバ内で、
前記ワークの開口部にシール部材を当接させて押圧することにより該開口部を閉塞して前記検査チャンバ内を前記ワークの内部側と外部側とのそれぞれ別の密閉空間部として隔離した状態とし、
前記ワークの内部側又は外部側のうちの一方の密閉空間部にトレースガスを導入し、
前記一方の密閉空間部から他方の密閉空間部への前記トレースガスの漏れを検出する漏れ検査方法であって、
前記開口部を閉塞した状態の前記シール部材の前記ワークから離間する方向への移動を停止した状態で、前記一方の密閉空間部に前記トレースガスを導入することを特徴とする漏れ検査方法。 In an inspection chamber that can accommodate workpieces,
The seal member is brought into contact with and pressed against the opening of the workpiece to close the opening and separate the inside of the inspection chamber as separate sealed spaces on the inside and outside of the workpiece. ,
Introducing trace gas into one of the sealed spaces on the inside or outside of the workpiece,
A leakage inspection method for detecting leakage of the trace gas from the one sealed space to the other sealed space,
A leakage inspection method, wherein the trace gas is introduced into the one sealed space portion in a state where movement of the seal member in a state of closing the opening portion in a direction away from the workpiece is stopped.
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