CN107024323A - Leak inspection device and leak test method - Google Patents

Leak inspection device and leak test method Download PDF

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Publication number
CN107024323A
CN107024323A CN201611050911.0A CN201611050911A CN107024323A CN 107024323 A CN107024323 A CN 107024323A CN 201611050911 A CN201611050911 A CN 201611050911A CN 107024323 A CN107024323 A CN 107024323A
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CN
China
Prior art keywords
workpiece
seal member
confined space
space portion
leak
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201611050911.0A
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Chinese (zh)
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CN107024323B (en
Inventor
高根将希
佐佐木行雄
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Yamaha Fine Technologies Co Ltd
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Yamaha Fine Technologies Co Ltd
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Publication of CN107024323A publication Critical patent/CN107024323A/en
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Publication of CN107024323B publication Critical patent/CN107024323B/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00Investigating fluid-tightness of structures
    • G01M3/02Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00Investigating fluid-tightness of structures
    • G01M3/02Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00Investigating fluid-tightness of structures
    • G01M3/02Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/12Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point by observing elastic covers or coatings, e.g. soapy water
    • G01M3/14Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point by observing elastic covers or coatings, e.g. soapy water for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M5/00Investigating the elasticity of structures, e.g. deflection of bridges or air-craft wings
    • G01M5/0033Investigating the elasticity of structures, e.g. deflection of bridges or air-craft wings by determining damage, crack or wear

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Examining Or Testing Airtightness (AREA)

Abstract

A kind of leak inspection device and leak test method are provided, leak detection can be accurately carried out, and being capable of Reusability seal member.Leak inspection device possesses:Chamber is checked, it can store workpiece;Pressing member, the opening portion is blocked by making it be abutted with the opening portion of the workpiece in the inspection chamber seal member progress pressing, and will the confined space portion being separated from each other that check private side and outer side that the workpiece is isolated into chamber;The confined space portion supply search gas of a side in gas supply member, its described private side or the outer side to the workpiece;Leak detection component, it is detected to the search gas that the confined space portion of the opposing party is leaked into from the confined space portion of one;Blocking element, it makes the mobile stopping of the seal member of the state of the closure opening portion.

Description

Leak inspection device and leak test method
Technical field
It the present invention relates to the use of leak inspection device and leak test that search gas is detected to the leakage in workpiece Method.
Background technology
The wheel hub for example supported to the tire used in a motor vehicle, due to making the air of inside tires to be closed In the state of supported, therefore it is required that air-tightness.In general, wheel hub is by the casting and forging of aluminium casting or in group In box-like wheel hub, it is threadably secured and wheel rim and spoke is welded or sealed etc. and engage formation.However, can be produced on wheel hub Air is leaked caused by the raw small hole produced when in casting and crackle, failure welding.Then, as wheel hub It is required that in the workpiece (the various workpiece such as cylinder, air-conditioner outdoor unit, compressor, automotive fuel case) of air-tightness, in order to reliable Ground maintains air-tightness, carries out the leak test (leak test) using search gas (inspection gas).
It is used as the leak inspection device for implementing the leak test using the search gas, known such as patent document 1 Disclosed device.
Leak inspection device (leak test device) described in patent document 1 possesses:Sealing clamp, its block workpiece be The axial end portion of aluminium alloy wheel hub;Container, it covers aluminium alloy wheel hub and sealing clamp;And, vacuum chamber.In addition, special In sharp document 1, sealing clamp has the sealing ring being made up of resin or rubber, using sealing ring come the axle of sealing aluminium alloy wheel hub To two ends.Moreover, in the leak inspection device, the state at the axial two ends that aluminium alloy wheel hub is blocked using sealing clamp Under, space supply helium, air gas mixture into aluminium alloy wheel hub, by from aluminium alloy wheel hub internal leakage to vacuum chamber Gas detected, come judge gas leakage the presence or absence of.
Patent document 1:(Japan) JP 2000-74777 publications
So, in the leak inspection device described in patent document 1, by using resin, rubber formation have it is soft The seal member (sealing ring) of property is to block the opening portion (opening) of workpiece (aluminium alloy wheel hub), and being able to maintain that makes the inside of workpiece The closed state in the confined space portion of side and the confined space portion of outer side.In addition, in the leak inspection device of such structure In, as shown in fig. 6, by the confined space portion 11 of from the private side to workpiece 20 or the confined space portion 12 of outer side (in figure 6 For the confined space portion 12 of outer side) the supply search gas such as helium, search gas seal member 31A is pressed and close Envelope part 31A is applied with the reaction force f3 returned it to.Therefore, in order to maintain opening for seal member 31A, 31B and workpiece 20 The state that oral area 21a, 21b are in close contact, it is necessary to consider the anti-work that search gas is brought on workpiece 20 and seal member 31A Firmly f3, applies and is pressed than pressing force, the i.e. workpiece 20 needed for opening portion 21a, 21b of closure workpiece 20 before supply search gas The bigger pressing force f1 that makes a concerted effort for the reaction force f3 that the power f2 that seal member 31A is returned it to is brought with search gas.
If however, apply pressing force f1, at the initial stage of supply search gas, do not produce that search gas brings is anti- Active force f3, therefore be applied with workpiece the pressing force of surplus, the small hole that should be examined and crackle etc. deform and Blocked, the problem of appearance can not reasonably detect leakage.In addition, the pressing force of surplus is also applied with seal member, Therefore the problem of seal member weares and teares in a short time is also occurred in that.
The content of the invention
The present invention be in view of such situation and make, its object is to provide one kind can accurately be detected Detect and be capable of the leak inspection device and leak test method of Reusability seal member.
The leak inspection device of the present invention is characterised by possessing:Chamber is checked, it can store workpiece;Pressing member, It blocks the opening by making it be abutted with the opening portion of the workpiece seal member progress pressing in the inspection chamber Portion, and the confined space portion being separated from each other of the private side and outer side of the workpiece will be isolated into the inspection chamber;Gas The confined space portion supply spike gas of a side in body supply member, its described private side or the outer side to the workpiece Body;Leak detection component, it detects to leak into from the confined space portion of one shows described in the confined space portion of the opposing party Track gas;Blocking element, it makes the seal member of the state of the closure opening portion to the direction left from the workpiece Mobile stopping.
In the leak inspection device, it is set to be abutted with the opening portion of workpiece by workpiece by pressing seal member When private side and outer side are isolated into separated confined space portion, it can not consider to supply spike gas to the confined space portion of a side Body and the reaction force (internal pressure) that produces and the pressing force for putting on seal member and workpiece is set as to maintain to enter opening portion Size needed for the state of row closure.Moreover, before Xiang Yifang confined space portion supply search gas, by using locking Component makes mobile stopping of the seal member to the direction left from workpiece, even if Xiang Yifang confined space portion supply search gas And the reaction force for bringing search gas is gradually increasing, the shape blocked to opening portion can be also maintained using seal member State.
So, in the leak inspection device, before supply search gas, in order to maintain the opening portion progress to workpiece The state of closure, it is not necessary to consider reaction force that search gas brought and apply superfluous pressing force to workpiece, to be examined Small hole, crackle for looking into etc. will not deform and be blocked, and can accurately be detected.Also, due to will not be right Seal member applies superfluous pressing force, it is thus possible to prevent the abrasion of seal member, can for a long time, constantly use sealing Part.
In the leak inspection device of the present invention, preferably described pressing member is constituted using oil hydraulic cylinder, the blocking element Constituted using the valve of the flowing for the fluid for preventing the oil hydraulic cylinder.
Because oil hydraulic cylinder is using the oil of incompressibility as fluid, make itself and workpiece using oil hydraulic cylinder pressing seal member In the state of opening portion is abutted, the flowing of the fluid of oil hydraulic cylinder is cut off by making valve valve closing, the state can be kept.Therefore, Even if producing the reaction force brought by search gas, seal member will not be also pushed back, and be able to maintain that the opening portion to workpiece The state blocked.
It should be noted that when using cylinder as pressing member, it is (empty to have compressional gas due to cylinder Gas) as fluid, therefore it is identical with situation about being pressed via spring, there is sealing when search gas applies reaction force The hidden danger that part is pushed back.Therefore, before the supply of search gas, it is contemplated that the reaction force of search gas is, it is necessary in workpiece It is upper apply than block workpiece opening portion needed for the big pressing force of pressing force.In this case, due to applying to workpiece , there is the hidden danger that small hole, crackle to be checked etc. deforms and be plugged in superfluous pressing force.
In the leak inspection device of the present invention, preferably described pressing member, which possesses, to abut and carries out with the seal member The pressing plate portion of pressing, the blocking element has stop component, and the stop component is abutted with the pressing plate portion and made described Mobile stopping from seal member to the direction left from the workpiece.
For example in the case where using cylinder as pressing member, seal member is set to be left to from workpiece using stop component Direction mobile stopping, even if therefore produce the reaction force that is caused by search gas, seal member will not be also pushed back, energy Enough states for maintaining to block the opening portion of workpiece.
The leak test method of the present invention, in the inspection chamber that can store workpiece, makes it by pressing seal member Abut to block the opening portion with the opening portion of the workpiece, and be in the private side of the workpiece in the inspection chamber The state in separated confined space portion is isolated into outer side, the side's into the private side or outer side of the workpiece is closed Spatial portion supplies search gas, the confined space portion to the search gas from the confined space portion of one to the opposing party Leakage is detected that the leak test method is characterised by, in the seal member for the state for making the closure opening portion To in the state of the mobile stopping in the direction left from the workpiece, the spike gas is supplied to the confined space portion of one Body.
In accordance with the invention it is possible to which accurately the leakage to workpiece is detected, and can for a long time and repeatedly it use Seal member.
Brief description of the drawings
Fig. 1 is the schematic diagram for the first embodiment for representing the leak inspection device of the present invention.
Fig. 2 is the schematic diagram for the variation for representing first embodiment.
Fig. 3 is the schematic diagram for the second embodiment for representing the leak inspection device of the present invention.
Fig. 4 is the schematic diagram for the 3rd embodiment for representing the leak inspection device of the present invention.
Fig. 5 is the schematic diagram for the 4th embodiment for representing the leak inspection device of the present invention.
Fig. 6 is the schematic diagram for representing existing leak inspection device.
Description of reference numerals
10 ... check chamber,
The confined space portion (the confined space portion of the opposing party) of 11 ... private sides, the confined space portion (one of 12 ... outer sides The confined space portion of side), 13 ... base portions, 14 ... bodies, 15 ... tops, 16 ... cylindrical portions, 17 ... through holes, 20,23,25 ... works Part, 21a, 21b, 24,26 ... opening portions, 31A, 31B, 32 ... seal members, 40,45 ... pressing members, 41 ... oil hydraulic cylinders, 42, 47 ... axle portions, 35,43,48 ... pressing plate portions, 46,81A, 81B ... cylinder, 48a, 48b ... connecting hole, 44,44A, 44B ... oil pressure Source, 49,84 ... pneumatic supplies, 51 ... gas supply members, 52 ... leak detection components, 60,70,80,90 ... blocking elements, 61A, 61B ... stop valves, 71,75,91 ... middle position shutoff valves, 82A, 82B ... axle portion (stop component), 83A, 83B ... wedge structures, 85 ... two-way valves, 101, the leak inspection device of 101S, 102,103,104 ....
Embodiment
Hereinafter, embodiments of the present invention are illustrated referring to the drawings.
Fig. 1 represents the leak inspection device 101 of first embodiment of the invention.As shown in figure 1, the leak inspection device 101 are blocking opening for the workpiece 20 for the tubular for having opening portion in both sides (in Fig. 1 for above and below) using seal member 31A, 31B In the state of oral area 21a, 21b, the workpiece 20 is configured and checked in chamber 10, private side of the search gas to workpiece 20 is utilized Confined space portion 11 and outer side confined space portion 12 between leakage detected.Specifically, using helium as Search gas.
Leak inspection device 101 possesses:Chamber 10 is checked, it can store workpiece 20;Pressing member 40, it passes through pressing Seal member 31A, 31B and make its opening portion 21a, 21b with the workpiece in the inspection chamber 10 about 20 abut to block Opening portion 21a, 21b, will check in chamber and 10 be isolated into the private side of workpiece 20 and the confined space being separated from each other of outer side Portion 11,12;Gas supply member 51, its to the outer side of workpiece 20 confined space portion 12 (present invention in a side it is closed Spatial portion) supply search gas;Leak detection component 52, its detection leaks into private side from the confined space portion 12 of outer side The search gas in confined space portion 11 (the confined space portion of the opposing party in the present invention);Blocking element 60, it makes closure workpiece Seal member 31A, 31B of 20 opening portion 21a, 21b mobile stopping from state to the direction left from workpiece 20.
Moreover, in the leak inspection device 101 of present embodiment, pressing member 40 is using oil hydraulic cylinder 41 and in its axle portion The pressing plate portion 43 installed on 42 is constituted.In addition, blocking element 60 utilizes the oil hydraulic cylinder 41 and oil pressure in composition pressing member 40 Stop valve 61A, the 61B (valve in the present invention) set between source 44A, 44B is constituted.Stop valve 61A, 61B are by switching valve opening With the two positions of valve closing, being capable of the opening and cutting to the stream of oily (fluid) between oil hydraulic cylinder 41 and oil pressure source 44A, 44B It is disconnected to switch over, when making stop valve 61A, 61B be in valve opening position p12, oil hydraulic cylinder 41 can be driven, is made in pressing plate portion 43 Lower movement.On the other hand, when making stop valve 61A, 61B be in valve closing position p11, by cutting off oil hydraulic cylinder 41 and oil pressure source Oily circulation between 44A, 44B, can make pressing plate portion 43 moves up and down stopping, pressing plate portion 43 is kept current shape State.
Check that the body 14 for the arcuation that chamber 10 is loaded by discoideus base portion 13 and on the base portion 13 is constituted.Separately Outside, check chamber 10 body 14 by discoideus top 15 and the periphery from the top 15 extend downwards it is cylindric Cylindrical portion 16 is constituted.It should be noted that, although eliminating diagram, but sealing is installed between base portion 13 and body 14 Part, checks that the inside of chamber 10 is closed, with external environment.
Moreover, in the upper surface for the base portion 13 for checking chamber 10, being provided with the opening portion of the downside for blocking workpiece 20 The seal member 31B of 21b downside.Also, (omitted provided with passage on the seal member 31B of these base portions 13 and downside Diagram), it is connected with leak detection component 52 via the passage.
Checking the body 14 of chamber 10, the through hole that the axle portion 42 provided with oil hydraulic cylinder 41 can be inserted up or down 17, the lower end of axle portion 42 is prominents and be linked to and press plate portion 43 to the inside for checking chamber 10 via the through hole 17.Need explanation Be, although eliminate diagram, through hole 17 be provided with bearing, by enabling axle portion 42 to be slidably embedded in bearing, can make Axle portion 42 is swimmingly moved up and down.Moreover, moving up and down axle portion 42 by the driving of oil hydraulic cylinder 41, pressing plate portion 43 can be made Move up and down.
The seal member 31A of upside is installed in the lower surface of pressing plate portion 43, the seal member 31A of upside is arranged to Enough moving up and down and move up and down along with pressing plate portion 43.In addition, the seal member 31A on the upside of this is configured at it Move up and down with not occurring air leakage between cylindrical portion 16 with checking chamber 10.Therefore, the opening of the downside of workpiece 20 is made Portion 21b towards the seal member 31B of downside and be positioned in downside seal member 31B it is upper, in this condition pass through drive oil Cylinder pressure 41 and decline the seal member 31A of upside, the seal member 31A on the upside of pressing makes its opening with the upside of workpiece 20 Portion 21a is abutted, and upper and lower opening portion 21a, 21b of workpiece 20 are clipped in the seal member 31B of downside and the seal member 31A of upside Between, opening portion 21a and seal member 31A, the opening portion 21b and seal member 31B of downside of the upside of workpiece 20 can be made It is brought into close contact.Then, it is brought into close contact by this, opening portion 21a, 21b of workpiece 20 is blocked using seal member 31A, 31B, The private side of workpiece 20 is isolated with outer side, confined space portion 11,12 is internally formed in inspection chamber 10.
In addition, the cylindrical portion 16 in the inspection chamber 10 for constituting the confined space portion 12 of outer side (is omitted provided with passage Diagram), the gas supply member 51 of search gas of the passage with supplying inspection is connected.
Then, the leakage of the workpiece 20 to being carried out cylindrical shape using the leak inspection device 101 constituted by this way is examined The method looked into is illustrated.
First, the opening portion 21b of the downside of workpiece 20 is made to be positioned in downside towards the seal member 31B of downside On seal member 31B.Then, drive oil hydraulic cylinder 41 and the seal member 31A of pressing plate portion 43 and upside is declined movement, pressing The seal member 31A of upside makes it be abutted with the opening portion 21a of the upside of workpiece 20.Thus, workpiece 20 is sandwiched in the close of downside Between the seal member 31A for sealing part 31B and upside, by blocking upper and lower opening portion 21a, 21b of workpiece 20, workpiece 20 it is interior Portion side is isolated with outer side, forms confined space portion 11,12.Do not consider now by being supplied to the confined space portion 12 of outer side The reaction force (internal pressure) produced to search gas, turns into the pressing force for putting on seal member 31A, 31B and workpiece 20 Maintain the size needed for opening portion 21a, the 21b of closure workpiece about 20 state.
Then, before search gas is supplied to the confined space portion 12 of outer side, make stop valve 61A, 61B valve closing, make Press plate portion 43 moves up and down stopping, making seal member 31A, 31B of opening portion 21a, 21b of closure workpiece 20 state Stopping is moved up and down, makes mobile stoppings of the seal member 31A to the direction left from workpiece 20.Further, since oil hydraulic cylinder 41 with The oil of incompressibility is as fluid, by making itself and workpiece 20 using pressing seal member 31A, the 31B of plate portion 43 is pressed The flowing of the oil (fluid) of cut-out oil hydraulic cylinder 41 in the state of opening portion 21a, 21b are abutted, can keep blocking opening for workpiece 20 Oral area 21a, 21b state.
Then, the gas in discharge confined space portion 11,12 depressurizes it, by keeping the opening portion to workpiece 20 Search gas is supplied in confined space portion 12 in the state of 21a, 21b closure from from gas supply member 51 to outer side, and And the search gas in the confined space portion 11 of private side is detected using leak test component 52.Thus, if internally side Confined space portion 11 in detect search gas, then be judged as having the defects such as crackle, hole on workpiece 20 and let out Leakage, if not detecting search gas, is judged as on workpiece 20 that the defects such as crackle, hole are not present, in the absence of leakage.
In addition, after search gas is supplied in the confined space portion 12 to outer side, search gas is filled into outside Internal pressure is set to increase in the confined space portion 12 of side, although to generate the reaction force that search gas is brought, but be due to show Make stop valve 61A, 61B valve closing before the supply of track gas, cut off the oily flowing of oil hydraulic cylinder 41, therefore the seal member of upside 31A and pressing plate portion 43 will not be pushed back by the reaction force of search gas, can stably be checked.
After leak test terminates, make to revert to normal pressure in inspection chamber 10, discharge search gas.Then, stop valve is made 61A, 61B valve opening, drive oil hydraulic cylinder 41 and pressing plate portion 43 is risen movement, and the work after checking is taken out in chamber 10 from checking Multiple workpiece 20, by being changed with other unchecked workpiece 20, can repeatedly be carried out leak test by part 20.
So, in the leak inspection device 101 of present embodiment, made by making stop valve 61A, 61B valve closing in advance Mobile stopping from seal member 31A to the direction left from workpiece 20, even if to outer side confined space portion 12 supply spike Gas and make to be gradually increasing by the reaction force that search gas is caused, also can using seal member 31A, 31B maintain to workpiece The state that 20 opening portion 21a, 21b is blocked.
Therefore, in the leak inspection device 101, before the supply of search gas, in order to utilize seal member 31A, 31B The state blocked to opening portion 21a, 21b of workpiece 20 is maintained, applies not on workpiece 20 and considers what search gas was brought The superfluous pressing force of reaction force, therefore small hole, the crackle to be checked etc. will not deform and be plugged, can Accurately leakage is detected.In addition, will not also be applied with the pressing force of surplus on seal member 31A, 31B, therefore Seal member 31A, 31B abrasion can be prevented, can continue and chronically use seal member 31A, 31B.
In addition, in the leak inspection device 101 shown in Fig. 1, making seal member 31A, the 31B and workpiece 20 being separated from each other Opening portion 21a, the 21b at two ends be brought into close contact and blocked, but leak inspection device 101S as shown in Figure 2 is like that, In the case where the workpiece with the end 23 blocked to the opening portion of a side is checked, a portion to workpiece 23 is pre-set The seal member 31A that the opening portion 24 of position is blocked, can omit the seal member of downside.
Fig. 3 represents the leak inspection device 102 of second embodiment of the invention.The leak inspection device 102 and first is real The leak inspection device 101 for applying mode is identical, is being blocked using seal member 31A, 31B in both sides (in figure 3 for above and below) In the state of opening portion 21a, 21b of the workpiece 20 of tubular with opening portion, the workpiece 20 is configured and checked in chamber 10, The leakage between the confined space portion 11 of the private side of workpiece 20 and the confined space portion 12 of outer side is entered using search gas Row detection.It should be noted that in the leak inspection device 102 of second embodiment, for being let out with first embodiment The common key element of leakage check device 101 marks same reference and omits the description, and the 3rd embodiment after is let out It is also such to leak in check device 103, the leak inspection device 104 of the 4th embodiment.
In the leak inspection device 102, chamber 10, pressing member 40, gas supply member 51, leak detection structure are checked The structure of part 52 is identical with the leak inspection device 101 of first embodiment, but in blocking element 70 using in composition pressing This point that the middle position shutoff valve 71 (valve in the present invention) set between the oil hydraulic cylinder 41 and oil pressure source 44 of component 40 is constituted is not Together.The valve closing of one position of the progress of middle position shutoff valve 71 and the valve opening of two positions amount to the switching of three positions, such as Fig. 3 institutes Show, the valve closing position p22 in center, the oily circulation between oil hydraulic cylinder 41 and oil pressure source 44 is cut off, by making pressing plate portion 43 move up and down stopping, can making mobile stoppings of the seal member 31A to the direction left from workpiece 20.In addition, in middle position When shutoff valve 71 is in the valve opening position p21 in Fig. 3 left side, oil flows into the upper space of oil hydraulic cylinder 41 from oil pressure source 44, under Portion space returns to oil pressure source 44, and axle portion 42 can be made to decline movement, makes pressing plate portion 43 and seal member 31A towards before workpiece 20 Enter.On the other hand, when Fig. 3 valve opening position p23 on right side is in middle position shutoff valve 71, oil flows into oil hydraulic cylinder from oil pressure source 44 41 lower space, from upper space return oil pressure source 44, thus enable that axle portion 42 rise movement, make pressing plate portion 43 and close Envelope part 31A keeps out of the way from workpiece 20.
In the leak inspection device 102 of the second embodiment, driving oil hydraulic cylinder 41 utilize seal member 31A, During opening portion 21a, 21b to block workpiece 20 of 31B, middle position shutoff valve 71 is in valve opening position p21, make pressing plate portion 32 and The seal member 31A of upside declines movement.Then, opening portion 21a, 21b that seal member 31A, 31B make it with workpiece 20 are pressed Abut, after closure opening portion 21a, 21b, middle position shutoff valve 71 is in valve closing position p22 and is made pressing plate portion 43 and upside Seal member 31A decline movement stop, keeping blocking opening portion 21a, 21b state using seal member 31A, 31B.This When, the reaction force (internal pressure) by supplying search gas to the confined space portion 12 of outer side and producing is not considered, makes application Turn into the pressing force of seal member 31A, 31B and workpiece 20 and maintain to seal opening portion 21a, the 21b of workpiece about 20 Size needed for stifled state.
In the leak inspection device 102 of second embodiment, even if by being supplied to the confined space portion 12 of outer side Search gas and the reaction force that brings search gas is gradually increasing, by making middle position shutoff valve 71 be in valve closing position p22, Moving up and down stopping and making seal member 31A mobile stopping for pressing plate portion 43 can be made, therefore, it is possible to utilize seal member 31A, 31B maintain the state that opening portion 21a, 21b to workpiece 20 are blocked.
Therefore, it is identical with the leak inspection device 101 of first embodiment in the leak inspection device 102, in spike Before the supply of gas, in order to maintain the state of opening portion 21a, 21b using seal member 31A, 31B closure workpiece 20, do not exist Apply the superfluous pressing force of reaction force for considering that search gas is brought on workpiece 20, thus to be checked it is small Hole, crackle etc. will not deform and be plugged, and can accurately be detected.In addition, superfluous pressing force will not also be applied Seal member 31A, 31B are added on, can be for a long time and constantly using close therefore, it is possible to prevent seal member 31A, 31B abrasion Seal part 31A, 31B.
Fig. 4 represents the leak inspection device 103 of third embodiment of the invention.The leak inspection device 103 and first is real Apply mode leak inspection device 101 and second embodiment leak inspection device 102 it is identical, using seal member 31A, 31B closure has in both sides (in Fig. 4 for above and below) in the state of opening portion 21a, 21b of the workpiece 20 of the tubular of opening portion, By the workpiece 20 configure check chamber 10 in, detected using search gas workpiece 20 private side confined space portion 11 with Leakage between the confined space portion 12 of outer side.In addition, the inspection chamber of the leak inspection device 103 of the 3rd embodiment 10th, gas supply member 51, the structure of leak detection component 52 are identical with the leak inspection device 101 of first embodiment, but The pressing plate portion 48 that pressing member 45 is installed using cylinder 46 and in the axle portion 47 is constituted, also, make seal member 31A to from The blocking element 80 of the mobile stopping in the direction that workpiece 20 leaves is made up of wedge structures 83A, 83B, the wedge structures 83A, 83B By in pressing plate portion 48 connecting hole 48a, 48b for being formed with installed on the body 14 for checking chamber 10 cylinder 81A, The engaging of 81B axle portion 82A, 82B (present invention in stop component) is realized.That is, in the leak test of the 3rd embodiment In device 103, this point and first embodiment and second embodiment constituted in blocking element 80 using mechanical component is bright Aobvious difference.
The cylinder 46 for constituting pressing member 45 is connected via middle position shutoff valve 75 with pneumatic supply 49, as shown in figure 4, in center Valve closing position p32, the circulation of the air between cylinder 46 and pneumatic supply 49 is cut off, can make pressing plate portion 48 on move down It is dynamic to stop.In addition, when the valve opening position p31 in Fig. 4 left side is in middle position shutoff valve 75, air flows into cylinder from pneumatic supply 49 46 upper space, from lower space return pneumatic supply 49, thus enable that axle portion 47 decline movement, make the direction of pressing plate portion 48 Workpiece 20 advances.Moreover, when the valve opening position p33 on Fig. 4 right side is in middle position shutoff valve 75, air is flowed into from pneumatic supply 49 The lower space of cylinder 46, from upper space return pneumatic supply 49, thus enable that axle portion 47 rise movement, make pressing plate portion 48 Keep out of the way from workpiece 20.
In addition, as described above, wedge structures 83A, 83B for constituting blocking element 80 utilize what is formed in pressing plate portion 48 Connecting hole 48a, 48b and cylinder 81A, 81B axle portion 82A, 82B is constituted, by make axle portion 82A, 82B respectively with connecting hole 48a, Pressing plate portion 48 can be fixed for 48b engagings, it is moved up and down stopping.On the other hand, pulled out from connecting hole 48a, 48b In the state of axle portion 82A, 82B for going out cylinder 81A, 81B, pressing plate portion 48 and seal member 31A can be pressed along with constituting The driving of the cylinder 46 of component 45 and move up and down.
In addition, cylinder 81A, 81B for constituting wedge structures 83A, 83B are connected via two-way valve 85 with pneumatic supply 84, such as Fig. 4 Shown, in the valve opening position p41 in left side, air flows into cylinder 81A, 81B outer circumferential side space from pneumatic supply 84, from interior The week side of boss space returns to pneumatic supply 84, and thus axle portion 82A, 82B is moved towards inner circumferential side, is able to maintain that the engaging with pressing plate portion 48 The state of hole 48a, 48b engaging, thus press plate portion 48 moves up and down stopping, can making seal member 31A to from workpiece 20 The mobile stopping in the direction left.On the other hand, when Fig. 4 valve opening position p42 on right side is in two-way valve 85, air is from gas Potential source 84 flows into cylinder 81A, 81B inner circumferential side space, returns to pneumatic supply 84 from outer circumferential side space, thus makes axle portion 82A, 82B Towards outer circumferential side movement, by the way that the front end of axle portion 82A, 82B is extracted from connecting hole 48a, 48b of pressing plate portion 48, it can solve Except the constraint carried out using axle portion 82A, 82B, seal member 31A is set to be moved up and down together with pressing plate portion 48.
In the leak inspection device 103 of the 3rd embodiment, workpiece 20 is being blocked using seal member 31A, 31B Opening portion 21a, 21b when, make in advance two-way valve 85 be in valve opening position p42 and make wedge structures 83A, 83B axle portion 82A, 82B keeps out of the way outer circumferential side.Then, middle position shutoff valve 75 is in valve opening position p31, make the sealing of pressing plate portion 48 and upside Part 31A declines movement.Then, pressing seal member 31A, 31B makes it be abutted with opening portion 21a, 21b of workpiece 20, in closure After opening portion 21a, 21b, middle position shutoff valve 75 is set to be in valve closing position p32 and make the seal member of pressing plate portion 48 and upside 31A's moves up and down stopping, keeping blocking opening portion 21a, 21b state using seal member 31A, 31B.Now, do not consider The reaction force (internal pressure) that search gas is supplied into the confined space portion 12 of outer side and produced, makes to put on seal member The pressing force of 31A, 31B and workpiece 20 turns into the state institute for maintaining to be blocked to opening portion 21a, the 21b of workpiece about 20 The size needed.
In addition, before search gas is supplied to the confined space portion 12 of outer side, by making two-way valve 85 be in valve opening Position p41 and wedge structures 83A, 83B axle portion 82A, 82B is moved to inner circumferential side, make pressing plate portion 48 connecting hole 48a, 48b engages with axle portion 82A, 82B, makes pressing plate portion 48 and seal member 31A's to move up and down stopping.
Using cylinder 46 as pressing member 45, but it is due to cylinder 46 with pressure in the leak inspection device 103 The gas (air) of contracting is therefore identical with situation about being pressed via spring seal member 31A, 31B as fluid.Cause This, in the case of the reaction force brought by search gas, the air of the upper space of cylinder 46 is compressed, and presses plate portion The 48 and seal member 31A of upside is possible to be pushed back the direction left from workpiece 20.However, in the leakage of the 3rd embodiment In check device 103, set wedge structures 83A, 83B as blocking element 80, make the upper of pressing plate portion 48 using mechanical component Lower mobile stopping.So, before the supply of search gas, by the axle portion 82A and connecting hole that make composition wedge structures 83A, 83B 48a engagings, axle portion 82B is engaged with connecting hole 48b, even if search gas be filled into outer side confined space portion 12 it is interior and Internal pressure is increased, in the case of producing the reaction force that brings of search gas, by make axle portion 82A, 82B and connecting hole 48a, 48b is abutted and can be made mobile stopping of the pressing plate portion 48 to the direction for leaving workpiece 20.Therefore, the seal member 31A of upside And pressing plate portion 48 will not be pushed back by the reaction force of search gas, can stably be checked.
In addition, in Fig. 4, it is illustrated that two wedge structures 83A, 83B, but it is also possible to utilize the wedge structures of more than three To constitute blocking element.In this case, the reaction force for bringing search gas is scattered in each wedge structures, therefore preferably Each wedge structures are in the circumference of pressing plate portion 48 to configure at equal intervals.
In addition, after leak test terminates, making two-way valve 85 be in valve opening position p42, making axle portion 82A, 82B towards periphery Side is moved, and releases axle portion 82A, 82B engaging with connecting hole 48a, 48b.Then, middle position shutoff valve 75 is made to be in valve opening position P33, drives cylinder 46 and pressing plate portion 48 is risen movement.
So, in the leak inspection device 103 of the 3rd embodiment, even if being supplied to the confined space portion 12 of outer side Search gas and the reaction force that brings search gas is gradually increasing, also can make pressing plate using wedge structures 83A, 83B Portion 48 moves up and down stopping, making mobile stoppings of the seal member 31A to the direction left from workpiece 20, close therefore, it is possible to utilize Envelope part 31A, 31B maintain the state blocked to opening portion 21a, 21b of workpiece 20.
Therefore, in the leak inspection device 103, implement with the leak inspection device 101 and second of first embodiment The leak inspection device 102 of mode is identical, before the supply of search gas, is utilizing seal member 31A, 31B to workpiece 20 When opening portion 21a, 21b are blocked, apply not on workpiece 20 and consider the superfluous of the reaction force that search gas is brought Pressing force, therefore small hole, the crackle to be checked etc. will not deform and be plugged, and can accurately be examined Survey.In addition, the pressing force of surplus will not be also applied with to seal member 31A, 31B, therefore, it is possible to prevent seal member 31A, 31B Abrasion, can for a long time and constantly use seal member 31A, 31B.
In addition, in the third embodiment, by making axle portion 82A, 82B of stop component be sticked in the card of pressing plate portion 48 Hole 48a, 48b are closed, to make seal member 31A's to move up and down stopping, but it is also possible to by making axle portion 82A, 82B and pressing plate portion 48 back side (being located at the face of opposite side with seal member 31A mounting surface) abuts to make pressing plate portion 48 and seal member 31A To the mobile stopping in the direction for leaving workpiece 20.
In addition, in the third embodiment, using cylinder 81A, 81B as the wedge structures 83A of driving blocking element 80, 83B component, but not limited to this, for example, it is also possible to make the knot that axle portion 82A, 82B is moved using other power sources using motor etc. Structure.Alternatively, it is also possible to constitute blocking element using the mechanical component outside wedge structures.
Fig. 5 represents the leak inspection device 104 of the 4th embodiment.In letting out for the embodiment of first embodiment~the 3rd Leak in check device 101~103, to have the workpiece 20 of opening portion 21a, 21b tubular in both sides as check object, but work Part not limited to this, as shown in figure 5, can also carry out the leakage inspection of the workpiece 25 of the opening portion 26 with a position such as gas cylinder Look into.
In the leak inspection device 104 of the 4th embodiment, pressing member 40 is using oil hydraulic cylinder 41 and in its axle portion 42 The pressing plate portion 35 of upper installation is constituted.In addition, blocking element 90 utilizes the oil hydraulic cylinder 41 and oil pressure source in composition pressing member 40 The middle position shutoff valve 91 (valve in the present invention) set between 44 is constituted.In this case, as shown in figure 5, being closed in middle position When valve 91 is in the valve closing position p52 in center, the oily circulation between oil hydraulic cylinder 41 and oil pressure source 44 is cut off, and presses plate portion 35 Advance and retreat movement stop.In addition, when the valve opening position p51 in Fig. 5 left side is in middle position shutoff valve 91, oil flows from oil pressure source 44 Enter the leftward space of oil hydraulic cylinder 41, return to oil pressure source 44 from rightward space, axle portion 42 is moved to the right, pressing can be made Plate portion 35 is advanced towards workpiece 25.Moreover, when the valve opening position p53 on Fig. 5 right side is in middle position shutoff valve 91, it is oily from oil pressure Source 44 flows into the rightward space of oil hydraulic cylinder 41, returns to oil pressure source 44 from leftward space, axle portion 42 is moved to the left, can Pressing plate portion 35 is set to keep out of the way from workpiece 25.
In the leak inspection device 104 of the 4th embodiment, driving oil hydraulic cylinder 41 and using seal member 32 come When blocking the opening portion 26 of workpiece 25, middle position shutoff valve 91 is in valve opening position p51, make pressing plate portion 35 and seal member 32 Advance and move.Then, press seal member 32 and it is abutted with the opening portion 26 of workpiece 25, behind closure opening portion 26, make Middle position shutoff valve 91 is in valve closing position p52 and moves pressing plate portion 35 and the advance and retreat of seal member 32 and stop, and keeps utilizing The state that seal member 32 is blocked to opening portion 26.Now, the confined air of outer side is not considered search gas being supplied to Between portion 12 and the reaction force (internal pressure) that produces, make to put on the pressing force of seal member 32 and workpiece 25 and turn into and maintain to workpiece Size needed for the state that 25 opening portion 26 is blocked.
In addition, after search gas is supplied in the confined space portion 12 to outer side, search gas is filled into outside Internal pressure is increased in the confined space portion 12 of side, produce the reaction force that search gas is brought, but in search gas Close middle position shutoff valve 91 before supply, cut off the oily flowing of oil hydraulic cylinder 41, therefore seal member 32 and pressing plate portion 35 will not be pushed back due to the reaction force of search gas, can stably be checked.
So, in the leak inspection device 104 of the 4th embodiment, by making middle position shutoff valve 91 be in valve closing in advance Position p52, even if supplying search gas to the confined space portion 12 of outer side and making the reaction force that search gas is brought gradually Rise, the advance and retreat of pressing plate portion 35 can also moved and stops, making seal member 32 to the movement in the direction left from workpiece 25 Stop, being able to maintain that the state blocked using seal member 32 to the opening portion 26 of workpiece 25.
Therefore, in the leak inspection device 104, the leak inspection device with the embodiment of first embodiment~the 3rd 101~103 is identical, before the supply of search gas, in order to maintain to carry out the opening portion 26 of workpiece 25 using seal member 32 The state of closure, does not apply the superfluous pressing force for considering the reaction force that search gas is brought, therefore want to workpiece 26 Small hole, crackle checked etc. will not deform and be plugged, and can accurately be detected.In addition, also will not be right Seal member 32 applies the pressing force of surplus, therefore, it is possible to prevent the abrasion of seal member 32, can for a long time and constantly use Seal member 32.
In addition, in above-mentioned leak inspection device 101~104, search gas is supplied to the confined space portion of outer side, it is right The search gas that the confined space portion of private side is leaked into from the confined space portion of outer side is detected, but it is also possible to internally The confined space portion supply search gas of side, shows the confined space portion for leaking into from the confined space portion of private side outer side Track gas is detected.
It should be noted that the invention is not restricted to above-mentioned embodiment, without departing from the scope of the subject in the invention can Implement various changes.

Claims (4)

1. a kind of leak inspection device, it is characterised in that possess:
Chamber is checked, it can store workpiece;
Pressing member, by seal member carry out pressing it is abutted with the opening portion of the workpiece in the inspection chamber come Block the opening portion, and by be isolated into the inspection chamber workpiece private side and outer side be separated from each other it is closed Spatial portion;
The confined space portion supply of a side in gas supply member, its described private side or the outer side to the workpiece Search gas;
Leak detection component, its described spike to leaking into the confined space portion of the opposing party from the confined space portion of one Gas is detected;
Blocking element, it makes the seal member of the state of the closure opening portion to the shifting in the direction left from the workpiece It is dynamic to stop.
2. leak inspection device according to claim 1, it is characterised in that
The pressing member is constituted using oil hydraulic cylinder, and the blocking element is stopped using the flowing for the fluid for making the oil hydraulic cylinder Valve is constituted.
3. leak inspection device according to claim 1, it is characterised in that
The pressing member possesses the pressing plate portion for abutting and being pressed with the seal member,
The blocking element has a stop component, the stop component abutted with the pressing plate portion and make the seal member to The mobile stopping in the direction left from the workpiece.
4. a kind of leak test method,
In the inspection chamber that can store workpiece,
It is abutted with the opening portion of the workpiece by pressing seal member and block the opening portion, and in checking described The state in the private side of the workpiece and the confined space portion being separated from each other of outer side is isolated into chamber,
The confined space portion supply search gas of a side into the private side or outer side of the workpiece,
The leakage in the confined space portion to the search gas from the confined space portion of one to the opposing party detects,
The leak test method is characterised by,
Make the seal member of the state of the closure opening portion to the mobile stopping in the direction left from the workpiece Under state, the search gas is supplied to the confined space portion of one.
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KR20170061597A (en) 2017-06-05

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