JP2017050574A5 - Dicing tape heating apparatus and dicing tape heating method - Google Patents
Dicing tape heating apparatus and dicing tape heating method Download PDFInfo
- Publication number
- JP2017050574A5 JP2017050574A5 JP2016243282A JP2016243282A JP2017050574A5 JP 2017050574 A5 JP2017050574 A5 JP 2017050574A5 JP 2016243282 A JP2016243282 A JP 2016243282A JP 2016243282 A JP2016243282 A JP 2016243282A JP 2017050574 A5 JP2017050574 A5 JP 2017050574A5
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- Prior art keywords
- dicing tape
- heating
- tape heating
- slack portion
- heating apparatus
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- 238000010438 heat treatment Methods 0.000 title claims 15
Claims (4)
前記加熱手段を前記ダイシングテープの弛み部分に沿って相対的に移動させる移動手段と、 Moving means for relatively moving the heating means along the slack portion of the dicing tape;
を備える、ダイシングテープ加熱装置。 A dicing tape heating device.
請求項1に記載のダイシングテープ加熱装置。 A plurality of the heating means are provided at different positions with respect to the slack portion of the dicing tape,
The dicing tape heating apparatus according to claim 1.
請求項1から3のいずれか1項に記載のダイシングテープ加熱装置。 The dicing tape heating apparatus according to any one of claims 1 to 3.
前記加熱が行われる位置を前記ダイシングテープの弛み部分に沿って相対的に移動させる移動ステップと、 A moving step of relatively moving a position where the heating is performed along a slack portion of the dicing tape;
を備える、ダイシングテープ加熱方法。 A dicing tape heating method comprising:
Applications Claiming Priority (2)
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JP2011031291 | 2011-02-16 | ||
JP2011031291 | 2011-02-16 |
Related Parent Applications (1)
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JP2015121666A Division JP6069740B2 (en) | 2011-02-16 | 2015-06-17 | Work dividing apparatus and work dividing method |
Related Child Applications (1)
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JP2017030266A Division JP6383030B2 (en) | 2011-02-16 | 2017-02-21 | Work dividing apparatus and work dividing method |
Publications (2)
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JP2017050574A JP2017050574A (en) | 2017-03-09 |
JP2017050574A5 true JP2017050574A5 (en) | 2017-06-29 |
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Family Applications (11)
Application Number | Title | Priority Date | Filing Date |
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JP2011282761A Active JP5013148B1 (en) | 2011-02-16 | 2011-12-26 | Work dividing apparatus and work dividing method |
JP2012126847A Active JP5871719B2 (en) | 2011-02-16 | 2012-06-04 | Work dividing apparatus and work dividing method |
JP2015121666A Active JP6069740B2 (en) | 2011-02-16 | 2015-06-17 | Work dividing apparatus and work dividing method |
JP2016243282A Pending JP2017050574A (en) | 2011-02-16 | 2016-12-15 | Work division device |
JP2017030266A Active JP6383030B2 (en) | 2011-02-16 | 2017-02-21 | Work dividing apparatus and work dividing method |
JP2017099990A Active JP6384975B2 (en) | 2011-02-16 | 2017-05-19 | Work dividing apparatus and work dividing method |
JP2017203593A Active JP6508286B2 (en) | 2011-02-16 | 2017-10-20 | Work division apparatus and work division method |
JP2018175177A Active JP6452016B1 (en) | 2011-02-16 | 2018-09-19 | Work dividing apparatus and work dividing method |
JP2018219316A Active JP6466620B1 (en) | 2011-02-16 | 2018-11-22 | Work dividing device |
JP2019001461A Active JP6562170B2 (en) | 2011-02-16 | 2019-01-08 | Work dividing device |
JP2019001460A Active JP6562169B2 (en) | 2011-02-16 | 2019-01-08 | Work dividing device |
Family Applications Before (3)
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JP2011282761A Active JP5013148B1 (en) | 2011-02-16 | 2011-12-26 | Work dividing apparatus and work dividing method |
JP2012126847A Active JP5871719B2 (en) | 2011-02-16 | 2012-06-04 | Work dividing apparatus and work dividing method |
JP2015121666A Active JP6069740B2 (en) | 2011-02-16 | 2015-06-17 | Work dividing apparatus and work dividing method |
Family Applications After (7)
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JP2017030266A Active JP6383030B2 (en) | 2011-02-16 | 2017-02-21 | Work dividing apparatus and work dividing method |
JP2017099990A Active JP6384975B2 (en) | 2011-02-16 | 2017-05-19 | Work dividing apparatus and work dividing method |
JP2017203593A Active JP6508286B2 (en) | 2011-02-16 | 2017-10-20 | Work division apparatus and work division method |
JP2018175177A Active JP6452016B1 (en) | 2011-02-16 | 2018-09-19 | Work dividing apparatus and work dividing method |
JP2018219316A Active JP6466620B1 (en) | 2011-02-16 | 2018-11-22 | Work dividing device |
JP2019001461A Active JP6562170B2 (en) | 2011-02-16 | 2019-01-08 | Work dividing device |
JP2019001460A Active JP6562169B2 (en) | 2011-02-16 | 2019-01-08 | Work dividing device |
Country Status (3)
Country | Link |
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JP (11) | JP5013148B1 (en) |
KR (1) | KR101522276B1 (en) |
TW (1) | TWI433228B (en) |
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JP6060475B2 (en) * | 2016-05-16 | 2017-01-18 | 株式会社東京精密 | Work dividing apparatus and work dividing method |
JP6741529B2 (en) * | 2016-09-09 | 2020-08-19 | 株式会社ディスコ | Tip spacing maintenance method |
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JP2018170525A (en) * | 2018-07-09 | 2018-11-01 | 株式会社東京精密 | Workpiece division device and workpiece division method |
TWI677932B (en) * | 2019-02-01 | 2019-11-21 | 相豐科技股份有限公司 | Expansion method of stretch film and expander thereof |
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JP7386649B2 (en) * | 2019-08-29 | 2023-11-27 | 株式会社ディスコ | tape expansion unit |
JP7345328B2 (en) * | 2019-09-13 | 2023-09-15 | 株式会社ディスコ | Processing method of workpiece |
CN110729186A (en) * | 2019-10-24 | 2020-01-24 | 东莞记忆存储科技有限公司 | Processing method for wafer cutting and separating |
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2011
- 2011-12-26 JP JP2011282761A patent/JP5013148B1/en active Active
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2012
- 2012-02-10 KR KR1020120013857A patent/KR101522276B1/en active IP Right Grant
- 2012-02-15 TW TW101104820A patent/TWI433228B/en active
- 2012-06-04 JP JP2012126847A patent/JP5871719B2/en active Active
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- 2016-12-15 JP JP2016243282A patent/JP2017050574A/en active Pending
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- 2017-02-21 JP JP2017030266A patent/JP6383030B2/en active Active
- 2017-05-19 JP JP2017099990A patent/JP6384975B2/en active Active
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