JP2017044384A - High-temperature fluid generation device - Google Patents

High-temperature fluid generation device Download PDF

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JP2017044384A
JP2017044384A JP2015165825A JP2015165825A JP2017044384A JP 2017044384 A JP2017044384 A JP 2017044384A JP 2015165825 A JP2015165825 A JP 2015165825A JP 2015165825 A JP2015165825 A JP 2015165825A JP 2017044384 A JP2017044384 A JP 2017044384A
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combustion
temperature fluid
temperature
fluid generator
heat output
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JP6938110B2 (en
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伸朗 長
Noburo Osa
伸朗 長
達雄 三摩
Tatsuo Mima
達雄 三摩
博和 野田
Hirokazu Noda
博和 野田
正 山本
Tadashi Yamamoto
正 山本
明男 金岡
Akio Kaneoka
明男 金岡
遼 橋本
Ryo Hashimoto
遼 橋本
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Chubu Electric Power Co Inc
Naomoto Industry Co Ltd
Tokyo Gas Co Ltd
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Chubu Electric Power Co Inc
Naomoto Industry Co Ltd
Tokyo Gas Co Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide a high-temperature fluid generation device capable of highly accurately controlling temperature and reducing electrical power consumption, especially, power capacity in startup.SOLUTION: The high-temperature fluid generation device 2 includes: a combustion heating part 21 combusting fuel to heat fluid; electric heating parts 22a, 22b connected to the combustion heating part 21 in series and heating the fluid by an electrical heat generator; a combustion control part 23 for controlling heat output from the combustion heating part 21; and heater control parts 24a, 24b for controlling heat output from the electric heating part 22a, 22b.SELECTED DRAWING: Figure 1

Description

本発明は、高温流体を発生する高温流体発生装置に関する。   The present invention relates to a high-temperature fluid generator that generates a high-temperature fluid.

従来より、食品や機械部品等を加熱処理するために、高温流体（例えば、過熱水蒸気、高温空気、それらの混合流体）が用いられている。高温流体を発生する装置として、電気ヒーター等の電気的発熱体によって高温流体を発生する電気式高温流体発生装置が提案されている。   Conventionally, a high-temperature fluid (for example, superheated steam, high-temperature air, or a mixed fluid thereof) has been used to heat-treat foods, machine parts, and the like. As an apparatus for generating a high-temperature fluid, an electric high-temperature fluid generator that generates a high-temperature fluid by an electric heating element such as an electric heater has been proposed.

例えば、特許文献１には、気体（蒸気または空気）をカーボンヒーターで過熱する高温気体装置が開示されている。また、特許文献２には、飽和水蒸気をハロゲンヒーターで過熱して過熱水蒸気を発生させる装置が開示されている。これらの電気式高温流体発生装置は、高精度の温度制御が可能であるという長所を有する。   For example, Patent Document 1 discloses a high-temperature gas device that superheats a gas (steam or air) with a carbon heater. Patent Document 2 discloses an apparatus for generating superheated steam by heating saturated steam with a halogen heater. These electric high-temperature fluid generators have the advantage that highly accurate temperature control is possible.

特開２０１０−１２１９３０号公報JP 2010-121930 A 特開２００８−２１５６７１号公報JP 2008-215671 A

一方で、電気式高温流体発生装置は、特に起動時の消費電力が大きく、電力デマンドや受電設備の設備容量が増大するという欠点がある。そのような欠点が、電気式高温流体発生装置の普及の妨げとなっていた。   On the other hand, the electric high-temperature fluid generator has a drawback that power consumption at startup is particularly large, and the power demand and the capacity of power receiving equipment increase. Such drawbacks have hindered the widespread use of electrical hot fluid generators.

本発明は、上記問題を解決するためになされたものであって、高精度の温度制御が可能であり、かつ、消費電力を低減可能な高温流体発生装置の提供を目的とする。   The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a high-temperature fluid generator capable of highly accurate temperature control and reducing power consumption.

本発明に係る高温流体発生装置は、上記課題を解決するためになされたものであり、燃料を燃焼させることにより流体を加熱する燃焼加熱部と、前記燃焼加熱部に直列に接続され、電気的発熱体により流体を加熱する電気加熱部と、前記燃焼加熱部の熱出力を制御する燃焼制御部と、前記電気加熱部の熱出力を制御する電気加熱制御部と、を備えることを特徴とする。   A high-temperature fluid generator according to the present invention has been made to solve the above-described problems, and is connected in series to a combustion heating unit that heats a fluid by burning fuel and the combustion heating unit. An electric heating unit that heats a fluid with a heating element, a combustion control unit that controls the heat output of the combustion heating unit, and an electric heating control unit that controls the heat output of the electric heating unit. .

また、上記高温流体発生装置において、前記電気加熱部は、前記燃焼加熱部によって加熱された前記流体を加熱することが好ましい。   Moreover, the said high temperature fluid generator WHEREIN: It is preferable that the said electric heating part heats the said fluid heated by the said combustion heating part.

また、上記高温流体発生装置において、前記高温流体発生装置の設定熱出力が、前記燃焼加熱部で制御可能な下限燃焼の熱出力よりも小さい場合、前記燃焼制御部は、前記燃焼加熱部の熱出力が０となるように制御することが好ましい。   In the high-temperature fluid generator, when the set heat output of the high-temperature fluid generator is smaller than the heat output of the lower limit combustion that can be controlled by the combustion heating unit, the combustion control unit It is preferable to control the output to be zero.

また、上記高温流体発生装置において、前記流体は水蒸気、空気、窒素またはそれらの少なくとも２つの混合気体であることが好ましい。   In the high-temperature fluid generator, the fluid is preferably water vapor, air, nitrogen, or a mixed gas of at least two of them.

本発明によれば、高精度の温度制御が可能であり、かつ、消費電力を低減可能な高温流体発生装置を提供することができる。   According to the present invention, it is possible to provide a high-temperature fluid generator that can perform highly accurate temperature control and can reduce power consumption.

本発明の一実施形態に係る加熱処理施設の概略構成を示すブロック図である。It is a block diagram showing a schematic structure of a heat treatment facility concerning one embodiment of the present invention.

以下、本発明の実施形態について添付図面を参照して説明する。なお、本発明は、下記の実施形態に限定されるものではない。   Embodiments of the present invention will be described below with reference to the accompanying drawings. In addition, this invention is not limited to the following embodiment.

（全体構成）
図１は、本発明の一実施形態に係る加熱処理施設１の概略構成を示すブロック図である。加熱処理施設１は、高温流体発生装置２、ボイラー３、コンプレッサー４、および２つの加熱処理室５ａ・５ｂを備えており、食品や機械部品等の対象物６ａ・６ｂの加熱処理工程を行うための施設である。 (overall structure)
FIG. 1 is a block diagram showing a schematic configuration of a heat treatment facility 1 according to an embodiment of the present invention. The heat treatment facility 1 includes a high-temperature fluid generator 2, a boiler 3, a compressor 4, and two heat treatment chambers 5a and 5b, and performs a heat treatment process for the objects 6a and 6b such as food and machine parts. The facility.

高温流体発生装置２は、高温流体を発生させる装置である。高温流体とは、高温気体および高温液体を含む概念である。高温気体とは、水蒸気を沸点以上に加熱させた過熱水蒸気、高温ガス（高温空気、高温窒素など）または、それらの混合気体を意味する。また、高温液体は、高温の水、油等を意味する。本実施形態では、高温流体発生装置２の給気口は、ボイラー３およびコンプレッサー４に配管で接続されている。これにより、ボイラー３が発生する飽和水蒸気、コンプレッサー４が発生する圧縮空気（以下エアーという）、または、飽和水蒸気とエアーとの混合気体が、高温流体発生装置２に供給可能となっている。   The high-temperature fluid generator 2 is a device that generates a high-temperature fluid. The high temperature fluid is a concept including a high temperature gas and a high temperature liquid. The high-temperature gas means superheated steam obtained by heating water vapor to the boiling point or higher, high-temperature gas (high-temperature air, high-temperature nitrogen, etc.), or a mixed gas thereof. Moreover, a high temperature liquid means high temperature water, oil, etc. In the present embodiment, the air supply port of the high-temperature fluid generator 2 is connected to the boiler 3 and the compressor 4 by piping. As a result, saturated steam generated by the boiler 3, compressed air (hereinafter referred to as air) generated by the compressor 4, or a mixed gas of saturated steam and air can be supplied to the high-temperature fluid generator 2.

高温流体発生装置２とボイラー３との間の配管には、バルブ３１が設けられており、バルブ３１の開閉制御によって、高温流体発生装置２への飽和水蒸気の供給量を調整することができる。同様に、高温流体発生装置２とコンプレッサー４との間の配管には、バルブ４１が設けられており、バルブ４１の開閉制御によって、高温流体発生装置２へのエアーの供給量を調整することができる。   The piping between the high temperature fluid generator 2 and the boiler 3 is provided with a valve 31, and the supply amount of saturated steam to the high temperature fluid generator 2 can be adjusted by opening / closing control of the valve 31. Similarly, a valve 41 is provided in the piping between the high temperature fluid generator 2 and the compressor 4, and the supply amount of air to the high temperature fluid generator 2 can be adjusted by opening / closing control of the valve 41. it can.

高温流体発生装置２は、ボイラー３および／またはコンプレッサー４から供給された飽和水蒸気、エアー、または、それらの混合気体を加熱して、高温気体を発生させる。また、高温流体発生装置２の排気口は、加熱処理室５ａ・５ｂに配管で接続されており、高温流体発生装置２が発生した高温気体は、加熱処理室５ａ・５ｂ（チャンバー）に供給される。加熱処理室５ａ・５ｂにはそれぞれ対象物６ａ・６ｂが収容されており、高温流体発生装置２から供給される高温気体によって対象物６ａ・６ｂが加熱処理される。   The high temperature fluid generator 2 generates saturated gas by heating saturated steam, air, or a mixed gas thereof supplied from the boiler 3 and / or the compressor 4. Moreover, the exhaust port of the high temperature fluid generator 2 is connected to the heat treatment chambers 5a and 5b by piping, and the high temperature gas generated by the high temperature fluid generator 2 is supplied to the heat treatment chambers 5a and 5b (chamber). The The objects 6a and 6b are accommodated in the heat treatment chambers 5a and 5b, respectively, and the objects 6a and 6b are heated by the high-temperature gas supplied from the high-temperature fluid generator 2.

なお、図１は、バルブ３１が開いている一方、バルブ４１が閉じられており、高温流体発生装置２に飽和水蒸気のみ供給される状態を示している。そのため、高温流体発生装置２は、飽和水蒸気を過熱して、高温流体として過熱水蒸気を発生させる。   FIG. 1 shows a state in which the valve 31 is open while the valve 41 is closed, and only the saturated water vapor is supplied to the high-temperature fluid generator 2. Therefore, the high-temperature fluid generator 2 superheats the saturated water vapor and generates superheated water vapor as a high-temperature fluid.

（高温流体発生装置の構成）
続いて、高温流体発生装置２の構成について説明する。 (Configuration of high-temperature fluid generator)
Then, the structure of the high temperature fluid generator 2 is demonstrated.

図１に示すように、高温流体発生装置２は、燃焼加熱部２１、２つの電気加熱部２２ａ・２２ｂ、燃焼制御部２３、２つのヒーター制御部２４ａ・２４ｂ、および運転制御部２５を備えている。   As shown in FIG. 1, the high-temperature fluid generator 2 includes a combustion heating unit 21, two electric heating units 22a and 22b, a combustion control unit 23, two heater control units 24a and 24b, and an operation control unit 25. Yes.

燃焼加熱部２１は、燃料を燃焼させることにより流体を加熱する装置である。本実施形態では、燃料としてガスを用いている。ガスは、メタンを主成分とするガスであってもよいし、プロパン・ブタンを主成分とするガスであってもよい。燃焼加熱部２１の具体的な構成は特に限定されないが、例えば、筒状の筐体内にガスバーナーを配置した構成とすることができる。本実施形態では、燃焼加熱部２１には、ボイラー３が発生した飽和水蒸気が供給される。燃焼加熱部２１は、飽和水蒸気を加熱（過熱）して過熱水蒸気を排出する。なお、燃料としてガス以外に、油、石炭、木材、廃材等を用いてもよい。   The combustion heating unit 21 is a device that heats a fluid by burning fuel. In this embodiment, gas is used as fuel. The gas may be a gas mainly composed of methane or a gas mainly composed of propane / butane. Although the specific structure of the combustion heating part 21 is not specifically limited, For example, it can be set as the structure which has arrange | positioned the gas burner in the cylindrical housing | casing. In the present embodiment, saturated steam generated by the boiler 3 is supplied to the combustion heating unit 21. The combustion heating unit 21 heats (superheats) the saturated steam and discharges the superheated steam. In addition to gas, oil, coal, wood, waste materials, etc. may be used as fuel.

電気加熱部２２ａ・２２ｂは、電気的発熱体により流体を加熱する装置である。電気加熱部２２ａ・２２ｂの具体的な構成は特に限定されないが、例えば、筒状の筐体内に電気ヒーターを配置した構成とすることができる。電気ヒーターとしては、例えば、カートリッジヒーター、シーズヒーター、ニクロム線ヒーター等を用いることができる。電気加熱部２２ａ・２２ｂは、燃焼加熱部２１に直列に接続されている。これにより、電気加熱部２２ａ・２２ｂは、燃焼加熱部２１によって加熱された過熱水蒸気をさらに加熱（過熱）する。電気加熱部２２ａ・２２ｂによってさらに加熱された過熱水蒸気は、高温流体発生装置２から排出され、加熱処理室５ａ・５ｂに供給される。   The electric heating units 22a and 22b are devices that heat the fluid with an electric heating element. Although the specific structure of the electric heating parts 22a and 22b is not particularly limited, for example, an electric heater can be arranged in a cylindrical casing. As the electric heater, for example, a cartridge heater, a sheathed heater, a nichrome wire heater or the like can be used. The electric heating units 22 a and 22 b are connected to the combustion heating unit 21 in series. Thereby, the electric heating parts 22a and 22b further heat (superheat) the superheated steam heated by the combustion heating part 21. The superheated steam further heated by the electric heating units 22a and 22b is discharged from the high-temperature fluid generator 2 and supplied to the heat treatment chambers 5a and 5b.

このように本実施形態では、電気加熱部２２ａ・２２ｂを燃焼加熱部２１の下流側に配置している。すなわち、高温流体発生装置２に供給された流体を、ガス燃焼で一次加熱した後に、電気ヒーターで二次加熱する構成としている。しかし、本発明はこれに限定されず、電気加熱部２２ａ・２２ｂを燃焼加熱部２１の上流側に配置してもよい。また本実施形態では、電気加熱部の個数は２であるが、１または３以上であってもよい。   As described above, in the present embodiment, the electric heating units 22 a and 22 b are arranged on the downstream side of the combustion heating unit 21. That is, the fluid supplied to the high-temperature fluid generator 2 is primarily heated by gas combustion and then secondarily heated by an electric heater. However, the present invention is not limited to this, and the electric heating units 22 a and 22 b may be arranged on the upstream side of the combustion heating unit 21. In the present embodiment, the number of electric heating units is 2, but it may be 1 or 3 or more.

燃焼制御部２３は、燃焼加熱部２１の熱出力を制御する装置である。本実施形態では、燃焼制御部２３は、燃焼加熱部２１のガスバーナーへのガス供給量と空気供給量を調整することにより、燃焼加熱部２１の熱出力の制御（ガスの着火および消火を含む）を行う。   The combustion control unit 23 is a device that controls the heat output of the combustion heating unit 21. In the present embodiment, the combustion control unit 23 controls the heat output of the combustion heating unit 21 (including gas ignition and extinguishing) by adjusting the gas supply amount and the air supply amount to the gas burner of the combustion heating unit 21. )I do.

ヒーター制御部２４ａ・２４ｂはそれぞれ、電気加熱部２２ａ・２２ｂの熱出力を制御する装置であり、特許請求の範囲に記載の電気加熱制御部に相当する。本実施形態では、ヒーター制御部２４ａ・２４ｂはそれぞれ、ヒーター制御部２４ａ・２４ｂの電気ヒーターへの電力供給量を調整可能であり、ヒーター制御部２４ａ・２４ｂの熱出力を互いに独立して制御することができる。なお、ヒーター制御部を１つだけ設け、当該ヒーター制御部は、電気加熱部２２ａ・２２ｂの熱出力が互いに連動するように（例えば、常に熱出力が同じになるように）制御してもよい。   The heater control units 24a and 24b are devices for controlling the heat output of the electric heating units 22a and 22b, respectively, and correspond to the electric heating control unit described in the claims. In the present embodiment, the heater controllers 24a and 24b can adjust the amount of power supplied to the electric heaters of the heater controllers 24a and 24b, respectively, and control the heat outputs of the heater controllers 24a and 24b independently of each other. be able to. Note that only one heater control unit may be provided, and the heater control unit may be controlled so that the heat outputs of the electric heating units 22a and 22b are linked to each other (for example, the heat outputs are always the same). .

運転制御部２５は、ユーザーの操作を受け付けて、高温流体発生装置２の加熱処理動作全般を制御する装置であり、例えばＰＬＣ（プログラマブル・ロジック・コントローラ）で構成される。運転制御部２５は、ユーザーによる操作に応じて、燃焼制御部２３およびヒーター制御部２４ａ・２４ｂに制御信号を送る。なお、運転制御部２５は、高温流体発生装置２に内蔵されていてもよいし、高温流体発生装置２の外部に設けられてもよい。   The operation control unit 25 is a device that receives a user operation and controls the overall heat treatment operation of the high-temperature fluid generator 2, and is configured by, for example, a PLC (programmable logic controller). The operation control unit 25 sends a control signal to the combustion control unit 23 and the heater control units 24a and 24b in accordance with a user operation. The operation control unit 25 may be built in the high temperature fluid generator 2 or may be provided outside the high temperature fluid generator 2.

また、高温流体発生装置２には、燃焼加熱部２１および電気加熱部２２ａ・２２ｂからそれぞれ排出される高温流体の温度を測定する温度センサ（図示省略）が設けられており、各温度センサが測定した温度の情報は、燃焼制御部２３およびヒーター制御部２４ａ・２４ｂにフィードバックされる。燃焼制御部２３およびヒーター制御部２４ａ・２４ｂは、運転制御部２５からの制御信号および温度センサからの温度情報に基づき、燃焼加熱部２１および電気加熱部２２ａ・２２ｂの熱出力をそれぞれ制御する。これにより、高温流体発生装置２の熱出力を調整することができる。   The high-temperature fluid generator 2 is provided with temperature sensors (not shown) that measure the temperature of the high-temperature fluid discharged from the combustion heating unit 21 and the electric heating units 22a and 22b, respectively. The temperature information is fed back to the combustion controller 23 and the heater controllers 24a and 24b. The combustion control unit 23 and the heater control units 24a and 24b respectively control the heat outputs of the combustion heating unit 21 and the electric heating units 22a and 22b based on the control signal from the operation control unit 25 and the temperature information from the temperature sensor. Thereby, the heat output of the high-temperature fluid generator 2 can be adjusted.

なお、運転制御部２５を設けずに、ユーザーが燃焼制御部２３およびヒーター制御部２４ａ・２４ｂをそれぞれ個別に制御できるように、高温流体発生装置２を構成してもよい。   Note that the high-temperature fluid generator 2 may be configured so that the user can individually control the combustion controller 23 and the heater controllers 24a and 24b without providing the operation controller 25.

（高温流体発生装置の効果）
以上のように、本実施形態に係る高温流体発生装置２は、流体を加熱する手段として、燃焼加熱部２１と電気加熱部２２ａ・２２ｂとを備えている。すなわち、高温流体発生装置２は、燃焼式加熱手段と電気式加熱手段とを併用したハイブリッド式の高温流体発生装置である。これにより、高温流体発生装置２の熱出力の少なくとも一部を燃焼加熱部２１に負担させることができるので、従来の電気式高温流体発生装置に比べ、電気ヒーターの容量を抑え、消費電力を低減することができる。また、電気加熱部２２ａ・２２ｂは、電気式高温流体発生装置であるため、発生する高温流体の温度を高精度に制御することができる。よって、高温流体発生装置２は、高精度の温度制御が可能であり、かつ、消費電力を低減可能とすることができる。 (Effect of high-temperature fluid generator)
As described above, the high-temperature fluid generator 2 according to the present embodiment includes the combustion heating unit 21 and the electric heating units 22a and 22b as means for heating the fluid. That is, the high-temperature fluid generator 2 is a hybrid high-temperature fluid generator that uses both combustion-type heating means and electric-type heating means. Thereby, since at least a part of the heat output of the high-temperature fluid generator 2 can be borne by the combustion heating unit 21, the capacity of the electric heater is reduced and the power consumption is reduced as compared with the conventional electric high-temperature fluid generator. can do. Moreover, since the electric heating parts 22a and 22b are electric high temperature fluid generators, the temperature of the generated high temperature fluid can be controlled with high accuracy. Therefore, the high-temperature fluid generator 2 can perform highly accurate temperature control and can reduce power consumption.

（運転モード）
本実施形態において、ユーザーは、高温流体発生装置２に対し、下記の４つの運転モードを選択することができる。運転制御部２５は、設定された運転モードに基づき、燃焼制御部２３およびヒーター制御部２４ａ・２４ｂに制御信号を送り、燃焼制御部２３およびヒーター制御部２４ａ・２４ｂはそれぞれ、当該制御信号に基づき、燃焼加熱部２１および電気加熱部２２ａ・２２ｂの熱出力を制御する。 (Operation mode)
In the present embodiment, the user can select the following four operation modes for the high-temperature fluid generator 2. The operation control unit 25 sends a control signal to the combustion control unit 23 and the heater control units 24a and 24b based on the set operation mode, and the combustion control unit 23 and the heater control units 24a and 24b are respectively based on the control signal. The heat output of the combustion heating unit 21 and the electric heating units 22a and 22b is controlled.

１．起動運転モード
起動運転モードは、高温流体発生装置２の起動時の運転モードである。加熱処理室５ａ・５ｂを高温状態にするために大きな熱出力が必要となるので、燃焼制御部２３は、燃焼加熱部２１の熱出力が最大定格出力となるように制御する。また、緻密な温度制御は不要であるため、ヒーター制御部２４ａ・２４ｂは、電気加熱部２２ａ・２２ｂの熱出力が０となるように制御する。これにより、起動運転モードでの消費電力を抑えることができる。 1. Start-up operation mode The start-up operation mode is an operation mode when the high-temperature fluid generator 2 is started. Since a large heat output is required to bring the heat treatment chambers 5a and 5b to a high temperature state, the combustion control unit 23 controls the heat output of the combustion heating unit 21 to be the maximum rated output. In addition, since precise temperature control is unnecessary, the heater control units 24a and 24b perform control so that the heat output of the electric heating units 22a and 22b becomes zero. Thereby, power consumption in the start-up operation mode can be suppressed.

なお、起動運転モードでは、バルブ４１のみを開け、高温流体発生装置２にエアーのみを供給することが好ましい。すなわち、高温流体発生装置２は、高温空気を発生することが好ましい。これにより、高温流体発生装置２の内部にドレンが残っている場合であっても、ウォーターハンマー等の不具合を回避することができる。また、起動時間をさらに短縮するために、電気加熱部２２ａ・２２ｂの電気ヒーターを稼働して、それらの熱出力を０より大きくしてもよい。   In the startup operation mode, it is preferable to open only the valve 41 and supply only air to the high-temperature fluid generator 2. That is, it is preferable that the high temperature fluid generator 2 generates high temperature air. Thereby, even if the drain remains inside the high-temperature fluid generator 2, problems such as a water hammer can be avoided. In order to further shorten the start-up time, the electric heaters of the electric heating units 22a and 22b may be operated so that their heat outputs are greater than zero.

２．高負荷運転モード
高負荷運転モードでは、対象物６ａ・６ｂを加熱処理するための熱負荷が大きい場合の運転モードである。この場合、高温流体発生装置２の熱出力を大きくする必要があるため、燃焼制御部２３およびヒーター制御部２４ａ・２４ｂは、燃焼加熱部２１が熱出力全体の９割程度を負担し、電気加熱部２２ａ・２２ｂが熱出力全体の１割程度を負担するように制御する。すなわち、燃焼加熱部２１が熱出力のベース部分を負担し、電気加熱部２２ａ・２２ｂが残余の熱出力（例えば２０℃〜５０℃程度）を負担する。これにより、高温流体発生装置２は、熱出力が大きくなっても、電気加熱部２２ａ・２２ｂによって、負荷変動に応じた温度補正や緻密な温度制御が可能となる。 2. High-load operation mode The high-load operation mode is an operation mode when the heat load for heating the objects 6a and 6b is large. In this case, since it is necessary to increase the heat output of the high-temperature fluid generator 2, the combustion control unit 23 and the heater control units 24a and 24b are responsible for about 90% of the total heat output by the combustion heating unit 21 and electric heating. The parts 22a and 22b are controlled to bear about 10% of the total heat output. That is, the combustion heating unit 21 bears the base portion of the heat output, and the electric heating units 22a and 22b bear the remaining heat output (for example, about 20 ° C to 50 ° C). Thereby, even if a heat output becomes large, the high-temperature fluid generator 2 can perform temperature correction and precise temperature control according to load fluctuations by the electric heating units 22a and 22b.

３．中負荷運転モード
中負荷運転モードでは、燃焼制御部２３およびヒーター制御部２４ａ・２４ｂは、燃焼加熱部２１が高温流体発生装置２の熱出力全体の７割程度を負担し、電気加熱部２２ａ・２２ｂが熱出力全体の３割程度を負担するように制御する。すなわち、高負荷運転モードと同様に、燃焼加熱部２１が熱出力のベース部分を負担し、電気加熱部２２ａ・２２ｂが緻密な温度制御が可能な残余の熱出力部分（例えば２０℃〜５０℃程度）を負担する。 3. Medium load operation mode In the medium load operation mode, the combustion control unit 23 and the heater control units 24a and 24b are configured such that the combustion heating unit 21 bears about 70% of the total heat output of the high-temperature fluid generator 2, and the electric heating unit 22a It controls so that 22b bears about 30% of the whole heat output. That is, as in the high-load operation mode, the combustion heating unit 21 bears the base portion of the heat output, and the electric heating units 22a and 22b are the remaining heat output portions (for example, 20 ° C. to 50 ° C.) capable of precise temperature control. Degree).

４．低負荷運転モード
低負荷運転モードは、対象物６ａ・６ｂを加熱処理するための熱負荷が小さい場合の運転モードであり、本実施形態では、高温流体発生装置２の設定熱出力が、燃焼加熱部２１のガスバーナーの制御可能な下限燃焼の熱出力より小さい場合の運転モードを意味する。この場合、燃焼制御部２３およびヒーター制御部２４ａ・２４ｂは、電気加熱部２２ａ・２２ｂが流体を加熱する一方、燃焼加熱部２１の熱出力が０となるように制御する。すなわち、電気加熱部２２ａ・２２ｂのみが、高温流体発生装置２の熱出力全体を負担する。電気加熱部２２ａ・２２ｂは、熱出力が０になるまで供給電力に比例した熱出力制御が可能であるため、高温流体発生装置２は、全体の熱出力が小さくても、緻密な温度制御（±５℃程度の精度）が可能である。 4). Low-load operation mode The low-load operation mode is an operation mode when the heat load for heating the objects 6a and 6b is small. In this embodiment, the set heat output of the high-temperature fluid generator 2 is the combustion heating This means an operation mode when the heat output of the lower limit combustion controllable by the gas burner of the section 21 is smaller. In this case, the combustion control unit 23 and the heater control units 24a and 24b control the electric heating units 22a and 22b to heat the fluid, while controlling the heat output of the combustion heating unit 21 to be zero. That is, only the electric heating units 22 a and 22 b bear the entire heat output of the high-temperature fluid generator 2. Since the electric heating units 22a and 22b can perform heat output control in proportion to the supplied power until the heat output becomes zero, the high-temperature fluid generator 2 can perform precise temperature control even if the overall heat output is small ( Accuracy of about ± 5 ° C) is possible.

なお、燃焼式高温流体発生装置によって低負荷運転モードを実現する場合、熱出力がガスバーナーの制御可能な下限燃焼の熱出力より小さいため、ガスバーナーをＯＮ／ＯＦＦ制御しなければならない。しかし、ガスバーナーを一旦ＯＦＦした後、再度ＯＮするためには、装置内の未燃ガスをパージする必要がある。そのため、ガス式高温流体発生装置では、設定温度に対して２０℃程度の誤差が生じ、低負荷運転モードにおける緻密な温度制御は不可能である。   Note that when the low-load operation mode is realized by the combustion type high-temperature fluid generator, the heat output is smaller than the heat output of the lower limit combustion that can be controlled by the gas burner, so the gas burner must be ON / OFF controlled. However, in order to turn the gas burner off and then on again, it is necessary to purge the unburned gas in the apparatus. Therefore, in the gas type high temperature fluid generator, an error of about 20 ° C. occurs with respect to the set temperature, and precise temperature control in the low load operation mode is impossible.

以上のように、高温流体発生装置２の運転モードについて説明した。高温流体発生装置２は、燃焼式加熱手段と電気式加熱手段とを併用したハイブリッド式であるため、低負荷運転モード、中負荷運転モードおよび高負荷運転モードのいずれにおいても、高精度の温度制御が可能であるという利点を有する。また、燃焼制御部２３による燃焼加熱部２１のガスバーナーの制御幅を一定範囲に抑えることができるので、ガスバーナーの不完全燃焼等を抑えることができ、高温流体発生装置２の特に起動時の電気容量（電力デマンド、電気設備容量）を抑えることができる。   As described above, the operation mode of the high-temperature fluid generator 2 has been described. Since the high-temperature fluid generator 2 is a hybrid type that uses both the combustion type heating means and the electric type heating means, highly accurate temperature control can be performed in any of the low load operation mode, the medium load operation mode, and the high load operation mode. Has the advantage of being possible. In addition, since the control range of the gas burner of the combustion heating unit 21 by the combustion control unit 23 can be suppressed within a certain range, incomplete combustion of the gas burner can be suppressed, and particularly when the high-temperature fluid generator 2 is started. Electric capacity (power demand, electric equipment capacity) can be reduced.

なお、燃焼加熱部２１のガスバーナーの容量と電気加熱部２２ａ・２２ｂの電気ヒーターの容量との比率は、
ガスバーナーの制御可能な下限燃焼の熱出力＜電気ヒーターの最大熱出力
となるように設定することが好ましい。これにより、高温流体発生装置２が発生する高温流体を、任意の温度で高精度に制御することができる。また、ガスバーナーの最大熱出力と電気ヒーターの最大熱出力との和は、高温流体発生装置２が発生する設定最大量の高温流体を設定最高温度に加熱することができる熱出力以上であることが好ましい。 In addition, the ratio of the capacity of the gas burner of the combustion heating unit 21 and the capacity of the electric heaters of the electric heating units 22a and 22b is as follows:
It is preferable to set so that the heat output of the lower limit combustion controllable by the gas burner <the maximum heat output of the electric heater. Thereby, the high temperature fluid which high temperature fluid generator 2 generates can be controlled with high accuracy at arbitrary temperature. The sum of the maximum heat output of the gas burner and the maximum heat output of the electric heater is equal to or higher than the heat output that can heat the set maximum amount of high-temperature fluid generated by the high-temperature fluid generator 2 to the set maximum temperature. Is preferred.

以上、本発明の実施形態について説明したが、本発明は上記実施形態に限定されるものではなく、その趣旨を逸脱しない限りにおいて、種々の変更が可能である。   Although the embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the spirit of the present invention.

本実施例では、上記実施形態に係る高温流体発生装置２を用いて、図１に示す加熱処理室５ａの庫内を１５℃から３２０℃に昇温させた。この時の運転モードは起動運転モードであり、燃焼加熱部２１の熱出力が最大定格出力、電気加熱部２２ａの熱出力が０となるように制御して、加熱処理室５ａに高温空気（４５０℃）を供給した。加熱処理室５ａの電気ヒーター（庫内ヒーター）の出力を３５％とした。なお、庫内温度のオーバーシュートを防ぐために、昇温完了の５分前の時点で、高温空気の温度を４５０℃から３６０℃に切り換えた。   In this example, the inside of the heat treatment chamber 5a shown in FIG. 1 was heated from 15 ° C. to 320 ° C. using the high-temperature fluid generator 2 according to the above embodiment. The operation mode at this time is a start-up operation mode, and control is performed so that the heat output of the combustion heating unit 21 is the maximum rated output, and the heat output of the electric heating unit 22a is 0, so that high-temperature air (450 ° C). The output of the electric heater (internal heater) in the heat treatment chamber 5a was set to 35%. In order to prevent overshooting of the internal temperature, the temperature of the hot air was switched from 450 ° C. to 360 ° C. 5 minutes before the completion of the temperature increase.

一方、比較例として、高温流体発生装置２を用いずに、加熱処理室５ａの電気ヒーターの出力を１００％にすることにより、加熱処理室５ａの庫内を１５℃から３２０℃に昇温させた。   On the other hand, as a comparative example, the internal temperature of the heat treatment chamber 5a is raised from 15 ° C. to 320 ° C. by setting the output of the electric heater in the heat treatment chamber 5a to 100% without using the high temperature fluid generator 2. It was.

その結果、実施例における消費電力量は７．０ｋＷｈであった。一方、比較例における消費電力量は１１．６ｋＷｈであった。よって、本発明に係る高温流体発生装置によって、起動時の電力容量を抑えることができることが分かった。   As a result, the power consumption in the example was 7.0 kWh. On the other hand, the power consumption in the comparative example was 11.6 kWh. Therefore, it has been found that the power capacity at startup can be suppressed by the high-temperature fluid generator according to the present invention.

１ 加熱処理施設
２ 高温流体発生装置
３ ボイラー
４ コンプレッサー
５ａ 加熱処理室
５ｂ 加熱処理室
６ａ 対象物
６ｂ 対象物
２１ 燃焼加熱部
２２ａ 電気加熱部
２２ｂ 電気加熱部
２３ 燃焼制御部
２４ａ ヒーター制御部（電気加熱制御部）
２４ｂ ヒーター制御部（電気加熱制御部）
２５ 運転制御部
３１ バルブ
４１ バルブ DESCRIPTION OF SYMBOLS 1 Heat processing facility 2 High temperature fluid generator 3 Boiler 4 Compressor 5a Heat processing chamber 5b Heat processing chamber 6a Object 6b Object 21 Combustion heating part 22a Electric heating part 22b Electric heating part 23 Combustion control part 24a Heater control part (electric heating) Control part)
24b Heater controller (electric heating controller)
25 Operation control unit 31 Valve 41 Valve

Claims (4)

燃料を燃焼させることにより流体を加熱する燃焼加熱部と、
前記燃焼加熱部に直列に接続され、電気的発熱体により流体を加熱する電気加熱部と、
前記燃焼加熱部の熱出力を制御する燃焼制御部と、
前記電気加熱部の熱出力を制御する電気加熱制御部と、
を備える、高温流体発生装置。 A combustion heating section for heating a fluid by burning fuel;
An electric heating unit connected in series to the combustion heating unit and heating a fluid by an electric heating element;
A combustion control unit for controlling the heat output of the combustion heating unit;
An electric heating control unit for controlling a heat output of the electric heating unit;
A high-temperature fluid generator. 前記電気加熱部は、前記燃焼加熱部によって加熱された前記流体を加熱する、請求項１に記載の高温流体発生装置。   The high-temperature fluid generator according to claim 1, wherein the electric heating unit heats the fluid heated by the combustion heating unit. 前記高温流体発生装置の設定熱出力が、前記燃焼加熱部で制御可能な下限燃焼の熱出力よりも小さい場合、前記燃焼制御部は、前記燃焼加熱部の熱出力が０となるように制御する、請求項１または２に記載の高温流体発生装置。   When the set heat output of the high-temperature fluid generator is smaller than the heat output of the lower limit combustion that can be controlled by the combustion heating unit, the combustion control unit controls the heat output of the combustion heating unit to be zero. The high-temperature fluid generator according to claim 1 or 2. 前記流体は水蒸気、空気、窒素またはそれらの少なくとも２つの混合気体である、請求項１〜３のいずれかに記載の高温流体発生装置。   The high-temperature fluid generator according to any one of claims 1 to 3, wherein the fluid is water vapor, air, nitrogen, or a mixed gas of at least two of them.
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