JP2017032560A - 圧力センサ及び前記圧力センサを製造するプロセス - Google Patents
圧力センサ及び前記圧力センサを製造するプロセス Download PDFInfo
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Classifications
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- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
- G01L23/22—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines
- G01L23/221—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines for detecting or indicating knocks in internal combustion engines
- G01L23/222—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines for detecting or indicating knocks in internal combustion engines using piezoelectric devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
- G01L23/08—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically
- G01L23/10—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically by pressure-sensitive members of the piezoelectric type
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/08—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of piezoelectric devices, i.e. electric circuits therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/0008—Soldering, e.g. brazing, or unsoldering specially adapted for particular articles or work
- B23K1/0016—Brazing of electronic components
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/02—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a press ; Diffusion bonding
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/02—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a press ; Diffusion bonding
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- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
- G01D11/24—Housings ; Casings for instruments
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- G—PHYSICS
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- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0061—Electrical connection means
- G01L19/0069—Electrical connection means from the sensor to its support
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
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- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
- G01L23/22—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines
- G01L23/221—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines for detecting or indicating knocks in internal combustion engines
- G01L23/225—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines for detecting or indicating knocks in internal combustion engines circuit arrangements therefor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/008—Transmitting or indicating the displacement of flexible diaphragms using piezoelectric devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M15/00—Testing of engines
- G01M15/04—Testing internal-combustion engines
- G01M15/08—Testing internal-combustion engines by monitoring pressure in cylinders
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- Engineering & Computer Science (AREA)
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- Combustion & Propulsion (AREA)
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- Analytical Chemistry (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
【解決手段】本発明は、センサ組立体2と評価ユニット5とを備え、前記センサ組立体2は、センサ22と電極構成体23とを備え、前記センサ22は、圧力プロファイルの作用の下で信号を生成し、前記電極構成体23は、信号を評価ユニット5に送信する、圧力センサ1に関し、前記評価ユニット5は、電気回路基板51を備え、前記電極構成体23及び前記電気回路基板51は、互いに対して材質的接合によって接続される。
【選択図】図11
Description
AA’、BB’、CC’ 軸
AB 半径方向面
1 圧力センサ
2 センサ組立体
5 評価ユニット
20 センサ筐体組立体
20.1 封止コーン
20.2 センサ・フランジ
20.3 センサ筐体フレーム
21 膜
22 センサ
22.1、22.3 支持要素
22.2 圧電センサ要素
23 電極構成体
23.1 電荷ピックオフ
23.2 電荷出力部
25 電気絶縁体
26 補償要素
50 評価ユニット筐体
51 電気回路基板
51.1 高温度区域
51.2 通常温度区域
52.1、52.2 補強要素
52.3、52.3’ 係止要素
52.4 窓
52.5 湾曲ゾーン
52.6、52.6’、52.6” 領域
53 電気的接続要素
53.0 ソケットの形態のアダプタ
53.1 環状のアダプタ
53.2 補償要素
54 信号ケーブル・フランジ
55 信号ケーブル
Claims (15)
- センサ組立体(2)と評価ユニット(5)とを備え、前記センサ組立体(2)は、センサ(22)と電極構成体(23)とを備え、前記センサ(22)は、圧力プロファイルの作用の下で信号を生成し、前記電極構成体(23)は、前記信号を前記評価ユニット(5)に送信する、圧力センサ(1)であって、前記評価ユニット(5)は、電気回路基板(51)を備え、前記電極構成体(23)及び前記電気回路基板(51)は、互いに対して材質的接合によって接続されることを特徴とする、圧力センサ(1)。
- 前記電極構成体(23)から前記評価ユニット(5)への信号送信は、材質的接合のみを介して起こり、又は前記センサ(22)と前記電極構成体(23)との間の電気的面接触から前記評価ユニット(5)への信号送信は、材質的接合のみを介して起こることを特徴とする、請求項1に記載の圧力センサ(1)。
- 前記圧力センサ(1)は、圧電式圧力センサ(1)であり、前記センサ(22)は、圧電センサ(22)であり、前記圧電センサ(22)は、圧力プロファイルの作用の下で圧電電荷を生じ、前記電極構成体(23)は、前記圧電電荷を前記圧電センサ(22)から受け取り、前記受け取った圧電電荷を信号として前記評価ユニット(5)に送信することを特徴とする、請求項1又は2のいずれか一項に記載の圧力センサ(1)。
- 前記電極構成体(23)は、電荷出力部(23.2)を備え、前記電気回路基板(51)は、電気的接続要素(53)を備え、前記電荷出力部(23.2)は、特定の領域において前記電気的接続要素(53)への材質的接合を備えることを特徴とする、請求項1から3までのいずれか一項に記載の圧力センサ(1)。
- 前記電極構成体(23)は、円筒形状の電荷ピックオフ(23.1)と棒形状の電荷出力部(23.2)とを備え、前記電荷ピックオフ(23.1)及び電荷出力部(23.2)は、一体的に形成され、又は前記電荷出力部(23.2)は、前記圧電センサ(22)から離れる方を向く前記センサ組立体(2)の端部まで延在することを特徴とする、請求項4に記載の圧力センサ(1)。
- 前記電気回路基板(51)は、電気的接続要素(53)を備え、前記電気的接続要素(53)は、前記電気回路基板(51)の高温度区域(51.1)に配置され、前記電極構成体(23)は、特定の領域において前記電気的接続要素(53)に結合され、前記電気的接続要素(53)は、ソケットの形態のアダプタ(53.0)を備え、前記ソケットの形態のアダプタ(53.0)は、前記電気回路基板(51)の前記高温度区域(51.1)において、前記電気回路基板(51)の電気信号導体に材質的接合によって接続されることを特徴とする、請求項1から5までのいずれか一項に記載の圧力センサ(1)。
- 前記電気回路基板(51)は、電気的接続要素(53)を備え、前記電気的接続要素(53)は、前記電気回路基板(51)の高温度区域(51.1)に配置され、前記電極構成体(23)は、特定の領域において前記電気的接続要素(53)に結合され、前記電気的接続要素(53)は、環状のアダプタ(53.1)と補償要素(53.2)とを備え、前記環状のアダプタ(53.1)及び前記補償要素(53.2)は、一体的に形成され、又は前記環状のアダプタ(53.1)は、前記電気的接続要素(53)の前方端部に配置されることを特徴とする、請求項1から5までのいずれか一項に記載の圧力センサ(1)。
- 前記補償要素(53.2)は、少なくとも1つの湾曲を備え、前記湾曲は、前記圧力センサ(1)の信号送信部品の線熱膨脹率における差を補償し、又は前記湾曲は、前記センサ組立体(2)及び前記評価ユニット(5)の構成部品の長手方向軸線(CC’)に沿った製作公差を補償することを特徴とする、請求項7に記載の圧力センサ(1)。
- 前記補償要素(53.2)は、概して前記電気回路基板(51)の前記高温度区域(51.1)の全域にわたって延在し、前記補償要素(53.2)は、少なくとも1つの脚部を備え、前記脚部は、前記電気回路基板(51)の前記高温度区域(51.1)の少なくとも1つの対応する開口に挿入可能であり、前記脚部は、前記開口への挿入の際に弾性変形又は塑性変形可能であり、前記補償要素(53.2)は、前記電気回路基板(51)の前記高温度区域(51.1)に、前記開口に挿入された前記脚部を介して機械的に取り付けられることを特徴とする、請求項7又は8のいずれか一項に記載の圧力センサ(1)。
- 前記補償要素(53.2)は、前記電気回路基板(51)の低温度範囲(51.1)において、前記電気回路基板(51)の電気信号導体に材質的接合によって接続されることを特徴とする、請求項7から9までのいずれか一項に記載の圧力センサ(1)。
- 前記電気回路基板(51)は、高温度区域(51.1)と通常温度区域(51.2)とを備え、前記電気回路基板(51)の電子部品は、前記通常温度区域(51.2)にのみ装着されることを特徴とする、請求項1から10までのいずれか一項に記載の圧力センサ(1)。
- 前記評価ユニット(5)は、補強要素(52.1、52.2)を備え、前記補強要素(52.1、52.2)は、前記電気回路基板(51)を包囲し、及び/又は前記前記補強要素(52.1、52.2)は少なくとも2つのシェル(52.1、52.2)からなり、前記シェル(52.1、52.2)は、形態拘束又は力拘束によって、前記電気回路基板(51)に対して又は互いに対して、機械的に分離可能に接続可能であることを特徴とする、請求項1から11までのいずれか一項に記載の圧力センサ(1)。
- 請求項1から12までのいずれか一項に記載の圧力センサ(1)を製造するためのプロセスであって、センサ組立体(2)が、半製品として形成され、前記センサ組立体(2)は、センサ(22)、好ましくは圧電センサ(22)と電極構成体(23)とを備え、電気回路基板(51)を有する評価ユニット(5)が形成され、前記電極構成体(23)は、特定の領域において前記電気回路基板(51)に結合され、前記電極構成体(23)と前記電気回路基板(51)との間の材質的接合がなされることを特徴とするプロセス。
- 前記電気回路基板(51)は、補強要素(52.1、52.2)によって取り囲まれ、前記補強要素(52.1、52.2)は、窓(52.4)を備え、前記電荷出力部(23.2)と前記電気的接続要素(53)との間の前記材質的接合は、前記窓(52)を通じてなされることを特徴とする、請求項13に記載のプロセス。
- 前記電極構成体(23)と前記電気回路基板(51)との間の前記材質的接合がなされた後に、評価ユニット筐体(50)が、センサ・フランジ(20.2)に対して移動され、前記評価ユニット筐体(50)範囲は、特定の領域において前記センサ・フランジ(20.2)に接続されることを特徴とする、請求項13又は14のいずれか一項に記載のプロセス。
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JP6196960B2 (ja) * | 2014-11-20 | 2017-09-13 | 長野計器株式会社 | 圧力センサ |
KR101656723B1 (ko) * | 2015-06-30 | 2016-09-12 | 재단법인 오송첨단의료산업진흥재단 | 피드스루 제조방법 |
AT518650B1 (de) * | 2016-06-07 | 2017-12-15 | Piezocryst Advanced Sensorics | Piezoelektrischer drucksensor zum messen hoher drücke |
CN112180037B (zh) * | 2020-09-15 | 2022-09-09 | 华帝股份有限公司 | 一种氧传感器和家用电器 |
JP7515528B2 (ja) * | 2021-03-22 | 2024-07-12 | キストラー ホールディング アクチエンゲゼルシャフト | 圧電トランスデューサ |
CN114264481B (zh) * | 2021-12-13 | 2023-12-08 | 中国船舶重工集团公司第七0三研究所 | 一种双向补偿的燃气轮机抗冲击外部支撑***及试验装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61107127A (ja) * | 1984-10-26 | 1986-05-26 | テキサス インスツルメンツ インコーポレイテツド | 内燃機関用シリンダ圧力伝達装置 |
WO2011047919A1 (de) * | 2009-10-19 | 2011-04-28 | Robert Bosch Gmbh | Drucksensor, insbesondere für bremsvorrichtungen |
JP2013205307A (ja) * | 2012-03-29 | 2013-10-07 | Citizen Finetech Miyota Co Ltd | 圧力検出装置、圧力検出装置付き内燃機関 |
JP2015121426A (ja) * | 2013-12-20 | 2015-07-02 | 株式会社デンソー | 溶接部を有する継手構造の組付構造 |
Family Cites Families (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3158763A (en) * | 1961-01-02 | 1964-11-24 | List Hans | Piezoelectric gauge |
US3364368A (en) | 1963-04-05 | 1968-01-16 | Messrs Kistler Instr A G | Piezo-electric transducer |
CH394637A (de) | 1963-04-05 | 1965-06-30 | Kistler Instrumente Ag | Verfahren zur Herstellung eines piezoelektrischen Messwandlers |
US3461327A (en) * | 1965-12-09 | 1969-08-12 | List Hans | Piezoelectric pressure transducer |
AT269514B (de) * | 1966-07-12 | 1969-03-25 | Piezoelektrischer Meßwandler | |
AT283010B (de) * | 1967-02-09 | 1970-07-27 | List H | Piezoelektrischer Meßwandler |
AT276810B (de) * | 1967-06-14 | 1969-12-10 | List Hans | Piezoelektrischer Meßwandler |
US3960018A (en) * | 1973-07-23 | 1976-06-01 | Pcb Piezotronics, Inc. | Conformal pressure transducer |
GB2022261A (en) * | 1978-04-28 | 1979-12-12 | Atomic Energy Authority Uk | A piezo-electric pressure transducer |
US4220390A (en) * | 1978-07-25 | 1980-09-02 | Amp Incorporated | Terminating means for terminating more than one wire in a single slotted terminal |
AT384676B (de) * | 1983-07-07 | 1987-12-28 | Avl Verbrennungskraft Messtech | Messwertaufnehmer zur messung heisser medien und verfahren zur montage eines als druckaufnehmerausgebildeten messwertaufnehmers |
EP0140992B1 (de) | 1983-11-10 | 1988-05-25 | Kristal Instrumente AG | Wandlerelement, Verfahren zu seiner Herstellung sowie Verwendung für einen Druckaufnehmer |
US4645965A (en) * | 1984-10-26 | 1987-02-24 | Texas Instruments Incorporated | Cylinder pressure transmitter for an internal combustion engine |
US4701726A (en) * | 1985-12-03 | 1987-10-20 | Northeast Filter Co., Inc. | Trap filter assembly |
US4776804A (en) * | 1987-02-05 | 1988-10-11 | Texas Instruments Incorporated | Circuit board systems, connectors used therein, and methods for making the connectors and systems |
US4950181A (en) * | 1988-07-28 | 1990-08-21 | Ncr Corporation | Refrigerated plug-in module |
TW382180B (en) * | 1996-07-15 | 2000-02-11 | Sony Corp | Camera lens |
JP3309808B2 (ja) | 1998-08-04 | 2002-07-29 | 株式会社デンソー | 圧力検出装置 |
US20030076691A1 (en) * | 2001-10-19 | 2003-04-24 | Becks Eric Roger | Impact resistant - long life trouble light |
DE10333438A1 (de) * | 2003-07-23 | 2005-02-17 | Robert Bosch Gmbh | Brennraumdrucksensor mit Metallmembran mit piezoresistiver Metalldünnschicht |
JP4742593B2 (ja) * | 2005-01-19 | 2011-08-10 | 株式会社デンソー | 圧力検出装置の製造方法 |
US7000478B1 (en) * | 2005-01-31 | 2006-02-21 | Texas Instruments Incorporated | Combined pressure and temperature transducer |
CN100580403C (zh) * | 2005-02-24 | 2010-01-13 | 基斯特勒控股公司 | 用于压电式作用力或压力传感器的、通过电绝缘膜固定在一起的部件 |
AT505015B1 (de) * | 2007-07-27 | 2008-10-15 | Piezocryst Advanced Sensorics | Drucksensor |
EP2138820B1 (en) * | 2008-06-25 | 2016-09-21 | Sensata Technologies, Inc. | A piezoresistive pressure-measuring plug for a combustion engine |
US9155964B2 (en) * | 2011-09-14 | 2015-10-13 | Steelseries Aps | Apparatus for adapting virtual gaming with real world information |
DE102012204905B4 (de) * | 2012-03-27 | 2024-07-11 | Robert Bosch Gmbh | Schaltungsträger für eine Sensoreinheit und korrespondierende Sensoreinheit |
JP5975793B2 (ja) * | 2012-08-29 | 2016-08-23 | シチズンファインデバイス株式会社 | 燃焼圧センサ |
WO2013147260A1 (ja) * | 2012-03-29 | 2013-10-03 | シチズンファインテックミヨタ株式会社 | 圧力検出装置、圧力検出装置付き内燃機関 |
CN202749551U (zh) * | 2012-06-29 | 2013-02-20 | 浙江盾安人工环境股份有限公司 | 一种压力变送器接插件 |
CN106415229B (zh) * | 2014-03-27 | 2020-06-30 | 西铁城精密器件株式会社 | 燃烧压力传感器及其制造方法 |
JP6615565B2 (ja) * | 2014-10-24 | 2019-12-04 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP6114332B2 (ja) * | 2015-04-13 | 2017-04-12 | 日本特殊陶業株式会社 | 圧力センサ |
-
2016
- 2016-07-07 DK DK16178284.2T patent/DK3124943T3/da active
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61107127A (ja) * | 1984-10-26 | 1986-05-26 | テキサス インスツルメンツ インコーポレイテツド | 内燃機関用シリンダ圧力伝達装置 |
WO2011047919A1 (de) * | 2009-10-19 | 2011-04-28 | Robert Bosch Gmbh | Drucksensor, insbesondere für bremsvorrichtungen |
JP2013205307A (ja) * | 2012-03-29 | 2013-10-07 | Citizen Finetech Miyota Co Ltd | 圧力検出装置、圧力検出装置付き内燃機関 |
JP2015121426A (ja) * | 2013-12-20 | 2015-07-02 | 株式会社デンソー | 溶接部を有する継手構造の組付構造 |
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