JP2016129107A - Apparatus and method for removing static electricity - Google Patents

Apparatus and method for removing static electricity Download PDF

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JP2016129107A
JP2016129107A JP2015003219A JP2015003219A JP2016129107A JP 2016129107 A JP2016129107 A JP 2016129107A JP 2015003219 A JP2015003219 A JP 2015003219A JP 2015003219 A JP2015003219 A JP 2015003219A JP 2016129107 A JP2016129107 A JP 2016129107A
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workpiece
fixing table
nozzle
ionizer
ion wind
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JP6077023B2 (en
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啓 宇澤
Hiroshi Uzawa
啓 宇澤
孝夫 久保
Takao Kubo
孝夫 久保
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Shinko Co Ltd
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Shinko Co Ltd
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Priority to TW104133876A priority patent/TWI559493B/en
Priority to KR1020150154201A priority patent/KR101747795B1/en
Priority to CN201510774168.2A priority patent/CN105792493B/en
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Abstract

PROBLEM TO BE SOLVED: To provide a static electricity removing apparatus capable of surely preventing discharge phenomenon due to static electricity, and preventing adsorption of foreign matter.SOLUTION: An ionizer 2 is for preventing static electricity generated when a workpiece W, whose rear surface Wb is in the form of a smooth surface, is separated from a front surface 1a of a table for fixing 1 by a separation means 3. The ionizer 2 is disposed on a rear surface 1b of the table for fixing 1 so that an ion wind from the ionizer 2 is jetted, via a hole 11 extending through the table for fixing 1, to a gap space part J formed between the front surface 1a of the table for fixing 1 and the rear surface Wb of the workpiece W.SELECTED DRAWING: Figure 1

Description

本発明は、静電気除去装置及び静電気除去方法に関する。   The present invention relates to a static eliminating device and a static eliminating method.

従来、液晶パネル、有機ＥＬパネル、半導体、精密電子部品など、静電気による放電現象によって破壊される虞れのあるワークを、ワーク固定用テーブルから分離する際に、イオナイザからのイオン風（イオン化気体）をワークの上面に吹き付けて、静電気（剥離帯電）による放電現象を防止する静電気除去装置及び静電気除去方法があった（例えば、特許文献１参照）。   Conventionally, an ion wind (ionized gas) from an ionizer is used to separate a workpiece, such as a liquid crystal panel, an organic EL panel, a semiconductor, or a precision electronic component, that may be destroyed by a discharge phenomenon due to static electricity from the workpiece fixing table. There has been a static eliminator and a static eliminator method for preventing discharge phenomenon due to static electricity (peeling electrification) by spraying the upper surface of the workpiece (see, for example, Patent Document 1).

特開平７−３１２３３７号公報JP-A-7-31337

図10に示すように、従来は、分離する際に、イオナイザ92からのイオン風をワークＷの表て面Ｗａに吹き付けて、除電を行っていたが、イオン風のイオンはワークＷの表て面Ｗａに付着するため、固定用テーブル91からワークＷを剥離した瞬間に、ワークＷの裏面Ｗｂに発生する電荷（図10においてプラス電荷）と、固定用テーブル91の表て面91ａに発生する電荷（図10においてマイナス電荷）とを、中和することは困難で、ワークＷと固定用テーブル91の間で放電現象が起こるという虞れがあった。
また、イオン風によって、ワークＷの表て面Ｗａと裏面Ｗｂとが電気的に中和しているように見えるが、実際は、ワークＷの表て面Ｗａに、電荷（図10においてマイナス電荷）がたまった状態となる。この状態で、浮遊粉塵等の異物がワークＷの表て面Ｗａに落下して、その電荷と接触すると、電荷の電界によるクーロン力が異物を吸着させてしまうといった問題があった。 As shown in FIG. 10, conventionally, when separating, ion wind from the ionizer 92 was blown onto the surface Wa of the workpiece W to perform static elimination, but ions in the ion wind represent the workpiece W. Since it adheres to the surface Wa, the charge (positive charge in FIG. 10) generated on the back surface Wb of the work W and the display surface 91a of the fixing table 91 are generated at the moment when the work W is peeled off from the fixing table 91. It is difficult to neutralize the charge (negative charge in FIG. 10), and there is a possibility that a discharge phenomenon occurs between the workpiece W and the fixing table 91.
In addition, the surface Wa and the back surface Wb of the workpiece W appear to be electrically neutralized by the ion wind. However, in actuality, the charge (negative charge in FIG. 10) is applied to the surface Wa of the workpiece W. It becomes a state that accumulated. In this state, when foreign matters such as floating dust fall on the surface Wa of the workpiece W and come into contact with the electric charge, there is a problem that the Coulomb force due to the electric field of the electric charge adsorbs the foreign matter.

そこで、本発明は、静電気によるワークと固定用テーブルとの間の放電現象を確実に防止できると共に、異物の吸着を防止可能な静電気防止装置の提供を目的とする。   SUMMARY OF THE INVENTION An object of the present invention is to provide an antistatic device that can reliably prevent a discharge phenomenon between a workpiece and a fixing table due to static electricity and can prevent foreign matter from being adsorbed.

上記目的を達成するために、本発明の静電気除去装置は、裏面が平滑面状のワークを固定用テーブルの表て面から分離手段で分離する際に発生する静電気を防止するためのイオナイザを、上記固定用テーブルの裏面側に設け、上記固定用テーブルに貫設した孔を介して、上記イオナイザからのイオン風を、上記固定用テーブルの上記表て面と上記ワークの裏面との間に形成される間隙空間部に噴出させるように構成したものである。
また、上記イオナイザにイオン風を噴出させるための円筒状のノズルを設け、該ノズルを上記固定用テーブルの上記孔に挿入したものである。
また、上記イオナイザはワーク分離方向へワーク分離速度と同一速度をもって移動するように上記分離手段と連動連結され、上記ノズルの先端と上記ワークの上記裏面の間の間隔寸法が一定に保持されるように構成したものである。
または、上記分離手段は上記ワークの裏面を押し上げるためのリフトピンを備え、上記イオナイザにイオン風を噴出させるためのノズルを設け、該ノズルの先端部は丸山状であって上記イオン風が噴出する噴出孔を有し、さらに、上記ノズルを上記固定用テーブルの上記孔に挿入し、該ノズルを上記リフトピンと兼用したものである。 In order to achieve the above object, the static eliminator of the present invention is an ionizer for preventing static electricity generated when a workpiece having a smooth back surface is separated from the surface of the fixing table by the separating means. An ion wind from the ionizer is formed between the front surface of the fixing table and the rear surface of the workpiece through a hole provided on the rear surface side of the fixing table and penetrating the fixing table. It is configured to be ejected into the gap space portion.
Further, a cylindrical nozzle for ejecting ion wind to the ionizer is provided, and the nozzle is inserted into the hole of the fixing table.
The ionizer is interlocked with the separation means so as to move in the workpiece separation direction at the same speed as the workpiece separation speed, so that the distance between the tip of the nozzle and the back surface of the workpiece is kept constant. It is configured.
Alternatively, the separating means is provided with a lift pin for pushing up the back surface of the workpiece, and a nozzle for ejecting ion wind to the ionizer is provided, and the tip of the nozzle is rounded and ejects the ion wind. The nozzle is inserted into the hole of the fixing table, and the nozzle is also used as the lift pin.

また、本発明の静電気除去方法は、裏面が平滑面状のワークを保持するための固定用テーブルに孔を貫設して、上記固定用テーブルから上記ワークを分離する際に発生する静電気を防止するためのイオナイザを、上記固定用テーブルの裏面側に配設し、上記固定用テーブルから上記ワークを分離する際に、上記イオナイザからのイオン風を、上記孔を介して、上記固定用テーブルの上記表て面と上記ワークの裏面との間に形成される間隙空間部に噴出させる方法である。
また、上記イオナイザに、イオン風を噴出させるための円筒状のノズルを設け、上記固定用テーブルから上記ワークを分離する際に、上記孔に上記ノズルを挿通させて、上記ノズルの先端を上記間隙空間部に侵入させる方法である。
また、上記固定用テーブルから上記ワークを分離する際に、上記イオナイザをワーク分離方向へワーク分離速度と同一速度をもって移動させ、上記ノズルの先端と上記ワークの上記裏面の間の間隔寸法を一定に保持しつつイオン風の噴出を行う方法である。
また、上記固定用テーブルから第１所定分離距離までの範囲において上記ワークが分離する際の分離速度が、第１所定分離距離を越え第２所定分離距離までの範囲において上記ワークが分離する際の分離速度よりも遅くなるように、上記固定用テーブルから上記ワークを分離させる方法である。
または、上記イオナイザにイオン風を噴出させるためのノズルを設け、該ノズルの先端部を丸山状に形成すると共に上記イオン風が噴出する噴出孔を形成し、上記ノズルを上記固定用テーブルの上記孔に挿入し、上記ノズルの先端部で上記ワークの裏面を押し上げて、上記固定用テーブルから分離させつつ上記間隙空間部にイオン風を噴出させる方法である。 Further, the static electricity removing method of the present invention prevents static electricity generated when the workpiece is separated from the fixing table by penetrating a hole in the fixing table for holding a workpiece having a smooth back surface. An ionizer is disposed on the back side of the fixing table, and when the work is separated from the fixing table, an ion wind from the ionizer is passed through the hole to the fixing table. This is a method of spraying into a gap space formed between the surface to be displayed and the back surface of the workpiece.
Further, the ionizer is provided with a cylindrical nozzle for ejecting an ion wind, and when separating the work from the fixing table, the nozzle is inserted into the hole, and the tip of the nozzle is placed in the gap. This is a method of invading the space.
Further, when separating the workpiece from the fixing table, the ionizer is moved in the workpiece separation direction at the same speed as the workpiece separation speed, and the distance between the nozzle tip and the back surface of the workpiece is kept constant. This is a method of ejecting ion wind while holding.
Further, when the workpiece is separated in the range from the fixing table to the first predetermined separation distance, the workpiece is separated in the range from the first predetermined separation distance to the second predetermined separation distance. In this method, the workpiece is separated from the fixing table so as to be slower than the separation speed.
Alternatively, a nozzle for ejecting an ion wind to the ionizer is provided, a tip portion of the nozzle is formed in a round mountain shape, and an ejection hole for ejecting the ion wind is formed, and the nozzle is formed in the hole of the fixing table. In this method, the back surface of the work is pushed up by the tip of the nozzle, and the ion wind is ejected into the gap space while being separated from the fixing table.

本発明によれば、剥離帯電によってワークの裏面と固定用テーブルの表て面に発生する電荷を完全に中和することができ、放電現象によるワークの破壊を確実に防止できる。狭い間隙空間部を利用して、イオン濃度を大きく低下させずに、剥離帯電が発生している二面に対して、イオン風を素早く当てることで、効率良く除電（中和）を行うことができる。特に、固定用テーブルからワークを分離した瞬間に除電でき、放電の危険を防ぎ得る。１本の電極針で除電可能な範囲が広くなって、装置の簡素化を実現できる。電荷による異物吸着を確実に防止でき、除塵ヘッド等の洗浄機による異物除去効果を向上させることができる。   According to the present invention, it is possible to completely neutralize the charge generated on the back surface of the workpiece and the front surface of the fixing table by the peeling charging, and it is possible to reliably prevent the workpiece from being destroyed by the discharge phenomenon. Efficient charge removal (neutralization) can be achieved by quickly applying ion wind to the two surfaces where peeling electrification has occurred without significantly reducing the ion concentration using a narrow gap. it can. In particular, the charge can be removed at the moment when the workpiece is separated from the fixing table, and the risk of discharge can be prevented. The range that can be neutralized with one electrode needle is widened, and the apparatus can be simplified. Adsorption of foreign matters due to electric charges can be reliably prevented, and the effect of removing foreign matters by a cleaning machine such as a dust removal head can be improved.

本発明の静電気防止装置の実施の一形態を示す断面正面図である。It is a section front view showing one embodiment of an antistatic device of the present invention. 平面図である。It is a top view. 分離距離と分離速度の関係を示すグラフ図である。It is a graph which shows the relationship between a separation distance and a separation speed. 分離した瞬間の状態を示す断面正面図である。It is a sectional front view showing the state at the time of separation. 分離した瞬間の状態を示す断面正面図である。It is a sectional front view showing the state at the time of separation. 分離完了直後の状態を示す断面正面図である。It is a cross-sectional front view which shows the state immediately after completion of separation. 分離回数と帯電量の関係を示すグラフ図である。It is a graph which shows the relationship between the frequency | count of separation, and the amount of electrification. 実施例の作用を説明するための平面図であって、（ａ）は除塵前のワークの表て面を示す平面図であり、（ｂ）は除塵後のワークの表て面を示す平面図である。It is a top view for demonstrating the effect | action of an Example, Comprising: (a) is a top view which shows the surface of the workpiece | work before dust removal, (b) is a top view which shows the surface of the workpiece | work after dust removal It is. 従来例の問題点を説明するための平面図であって、（ａ）は除塵前のワークの表て面を示す平面図であり、（ｂ）は除塵後のワークの表て面を示す平面図である。It is a top view for demonstrating the problem of a prior art example, Comprising: (a) is a top view which shows the surface of the workpiece | work before dust removal, (b) is a plane which shows the surface of the workpiece | work after dust removal FIG. 従来技術を説明するための断面正面図である。It is a cross-sectional front view for demonstrating a prior art. ワークが撓む場合を説明するための断面正面図である。It is a cross-sectional front view for demonstrating the case where a workpiece | work bends. 他の実施形態の断面正面図である。It is a section front view of other embodiments. 他の実施形態の要部拡大断面図である。It is a principal part expanded sectional view of other embodiment. 他の実施形態の分離開始状態を示す断面正面図である。It is a section front view showing the separation start state of other embodiments.

以下、図示の実施形態に基づき本発明を詳説する。
本発明に係る静電気除去装置は、図１に示すように、裏面Ｗｂが平滑面状のワーク（基材）Ｗを保持（載置）するための固定用テーブル１と、図示省略するがワークＷの裏面Ｗｂと固定用テーブル１の表て面１ａを密着させて固定するためのワーク固定手段と、ワーク固定手段による固定が解除された後に固定用テーブル１の表て面１ａとワークＷの裏面Ｗｂとを分離させるための分離手段（剥離手段）３と、分離手段３にて固定用テーブル１からワークＷを分離させる際に発生する静電気を防止するためのイオナイザ（除電器）２と、を備えている。 Hereinafter, the present invention will be described in detail based on illustrated embodiments.
As shown in FIG. 1, the static eliminator according to the present invention includes a fixing table 1 for holding (mounting) a workpiece (base material) W having a smooth back surface Wb and a workpiece W (not shown). The back surface Wb of the fixing table 1 and the surface 1a of the fixing table 1 are fixed in contact with each other, and the fixing surface 1a of the fixing table 1 and the back surface of the work W after the fixing by the work fixing means is released. Separation means (separation means) 3 for separating Wb, and ionizer (discharger) 2 for preventing static electricity generated when the workpiece W is separated from the fixing table 1 by the separation means 3. I have.

イオナイザ２は、プラスイオンとマイナスイオンを交互に発生させるための電極針21と、パージエアやキャリアガス等の搬送気体を吐出する吐出口22と、を有し、さらに、発生させたイオンを搬送気体と共にイオン風（イオン気体流とも呼ばれる）として噴出させる円筒状（煙突状）のノズル20を有している。   The ionizer 2 has an electrode needle 21 for alternately generating positive ions and negative ions, and a discharge port 22 for discharging a carrier gas such as purge air or carrier gas. Further, the ionizer 2 carries the generated ions as a carrier gas. At the same time, it has a cylindrical (chimney-like) nozzle 20 that is ejected as an ionic wind (also called an ionic gas flow).

そして、イオナイザ２を、固定用テーブル１の裏面１ｂ（ワークＷの裏面Ｗｂ）側に設けている。
分離前の状態で、ノズル20の先端20ａを、固定用テーブル１に貫設したノズル用の孔11に挿入して配設している。
また、図２に示すように、ノズル20の先端20ａは、平面視で格子状（格子の交点状）に配設し、１つのワークＷ及び固定用テーブル１に複数のイオナイザ２を対応させている。なお、ノズル20及び孔11は、平面視で千鳥状に配設しても良い。要するに、散点状に配設されている。 And the ionizer 2 is provided in the back surface 1b (back surface Wb of the workpiece | work W) side of the table 1 for fixation.
In the state before separation, the tip 20 a of the nozzle 20 is inserted into the nozzle hole 11 provided through the fixing table 1.
As shown in FIG. 2, the tip 20 a of the nozzle 20 is arranged in a lattice (intersection of lattice) in a plan view, and a plurality of ionizers 2 are associated with one work W and the fixing table 1. Yes. The nozzles 20 and the holes 11 may be arranged in a zigzag shape in plan view. In short, they are arranged in the form of dots.

分離手段３は、固定用テーブル１の表て面１ａに対して先端部31ａが出没自在に設けられた複数のリフトピン31，31と、複数のリフトピン31を駆動（昇降）させるための電動アクチュエータ32と、リフトピン31と電動アクチュエータ32を連結する連結部材33と、を備えている。
分離前の状態で、リフトピン31の先端部31ａを、固定用テーブル１に貫設したリフトピン用の貫通孔12に挿入して配設している。
分離手段３は、電動アクチュエータ32の直線運動によって、リフトピン31の先端部31ａを固定用テーブル１の表て面１ａから突出させ、固定用テーブル１に載置したワークＷの裏面Ｗｂに当接させて、ワークＷの裏面Ｗｂを水平面状に保持しつつ分離（剥離）させる。 The separating means 3 includes a plurality of lift pins 31, 31 having tip portions 31 a that can be moved in and out with respect to the surface 1 a of the fixing table 1, and an electric actuator 32 for driving (raising and lowering) the plurality of lift pins 31. And a connecting member 33 that connects the lift pin 31 and the electric actuator 32.
In the state before separation, the tip end portion 31 a of the lift pin 31 is inserted into the through hole 12 for the lift pin provided through the fixing table 1.
The separating means 3 causes the tip 31a of the lift pin 31 to protrude from the front surface 1a of the fixing table 1 by linear movement of the electric actuator 32, and abuts against the back surface Wb of the workpiece W placed on the fixing table 1. Then, the back surface Wb of the workpiece W is separated (separated) while being held in a horizontal plane.

そして、イオナイザ２を、上記連結部材33に取着して、リフトピン31及び電動アクチュエータ32と連結し、リフトピン31と連動するように設け、イオナイザ２が、リフトピン31の移動方向へ、リフトピン上昇速度と同一速度をもって上昇するように構成している。
つまり、イオナイザ２が、ワーク分離方向へ、ワーク分離速度と同一速度をもって移動し、リフトピン31が突出しワークＷの裏面Ｗｂが固定用テーブル１の表て面１ａから離間しても、ノズル20の先端20ａと、ワークＷの裏面Ｗｂの間の間隔寸法Ｓが一定に保持されるように構成している。 Then, the ionizer 2 is attached to the connecting member 33, connected to the lift pin 31 and the electric actuator 32, and provided so as to be interlocked with the lift pin 31, and the ionizer 2 has a lift pin rising speed in the moving direction of the lift pin 31. It is configured to ascend at the same speed.
That is, even if the ionizer 2 moves in the workpiece separation direction at the same speed as the workpiece separation speed, even if the lift pin 31 protrudes and the back surface Wb of the workpiece W is separated from the front surface 1a of the fixing table 1, the tip of the nozzle 20 The space dimension S between 20a and the back surface Wb of the workpiece W is configured to be kept constant.

さらに、固定用テーブル１からワークＷを離間させる際の分離速度を制御するためのＣＰＵやシーケンサ、コンピュータ等の制御部５を備えている。
制御部５は、電動アクチュエータ32に電気的に接続され、図３に実線又は二点鎖線で示すように、固定用テーブル１の表て面１ａから第１所定分離距離Ｈａまでの範囲においてワークＷが分離する際の分離速度が、第１所定分離距離Ｈａを越え第２所定分離距離Ｈｂまでの範囲においてワークＷが分離する際の分離速度よりも遅くなるように、分離手段３を制御するものである。
言い換えると、固定用テーブル１の表て面１ａから第１所定分離距離Ｈａまでの範囲においてワークＷが分離する際の分離速度が、基準分離速度Ｕａ以下になるように制御し、第１所定分離距離Ｈａを越え第２所定分離距離Ｈｂまでの範囲においてワークＷが分離する際の分離速度を、基準分離速度Ｕａよりも速くなるように制御するものである。 Furthermore, a control unit 5 such as a CPU, a sequencer, or a computer for controlling the separation speed when separating the workpiece W from the fixing table 1 is provided.
The control unit 5 is electrically connected to the electric actuator 32. As shown by a solid line or a two-dot chain line in FIG. 3, the control unit 5 works in a range from the surface 1a of the fixing table 1 to the first predetermined separation distance Ha. Controls the separating means 3 so that the separation speed when the workpiece W is separated is slower than the separation speed when the workpiece W is separated in the range from the first predetermined separation distance Ha to the second predetermined separation distance Hb. It is.
In other words, the separation speed when the workpiece W is separated in the range from the front surface 1a of the fixing table 1 to the first predetermined separation distance Ha is controlled to be equal to or lower than the reference separation speed Ua, and the first predetermined separation is performed. The separation speed when the workpiece W is separated in the range from the distance Ha to the second predetermined separation distance Hb is controlled to be faster than the reference separation speed Ua.

固定用テーブル１の表て面１ａから分離終了状態のワークＷの裏面Ｗｂまでの距離を分離終了距離Ｈｅとすると、第１所定分離距離Ｈａは、分離終了距離Ｈｅの１％以上３５％以下の値、好ましくは１％以上２０％以下の値とし、第２所定分離距離Ｈｂは、分離終了距離Ｈｅの７０％以上１００％以下の値とするのが望ましい。   Assuming that the distance from the front surface 1a of the fixing table 1 to the back surface Wb of the workpiece W in the separation end state is the separation end distance He, the first predetermined separation distance Ha is not less than 1% and not more than 35% of the separation end distance He. The value is preferably 1% or more and 20% or less, and the second predetermined separation distance Hb is preferably 70% or more and 100% or less of the separation end distance He.

図示省略のワーク固定手段は、固定用テーブル１の表て面に開口する吸着孔と、吸着孔を介してワークＷを負圧吸引して固定するための吸引ポンプ（真空ポンプ）及び吸引路や吸引配管等である吸引固定装置、或いは、ワークＷを押さえる機械式クランプ装置等、ワークＷの裏面Ｗｂを固定用テーブル１の表て面１ｂに接触（密着）させて固定可能であれば良い。あるいは、ワーク固定手段を省略しても良い場合もある。   The workpiece fixing means (not shown) includes a suction hole that opens on the front surface of the fixing table 1, a suction pump (vacuum pump) for suctioning and fixing the workpiece W through the suction hole, a suction path, It is only necessary that the back surface Wb of the work W can be brought into contact with (in close contact with) the surface 1b of the fixing table 1 such as a suction fixing device such as a suction pipe or a mechanical clamp device that holds the work W. Alternatively, the work fixing means may be omitted.

また、ワークＷは、半導体、液晶パネル、有機ＥＬパネル、ＩＣパッケージ、ＣＭＯＳセンサ等の精密電子部品、ガラス基板等のような、固定用テーブル１の表て面１ａから分離する際に、剥離帯電によって帯電する虞れのある部材である。   Further, when the workpiece W is separated from the surface 1a of the fixing table 1 such as a semiconductor, a liquid crystal panel, an organic EL panel, an IC package, a precision electronic component such as a CMOS sensor, a glass substrate, etc., it is peeled and charged. It is a member that is likely to be charged by the above.

次に、本発明に係る静電気除去方法及び静電除去装置の使用方法（作用）について説明する。
先ず、固定用テーブル１に孔11を貫設すると共にイオナイザ２にノズル20を設ける。
そして、イオナイザ２を、固定用テーブル１の裏面１ｂ側に配設すると共にノズル20の先端20ａを孔11に配設する。また、リフトピン31の先端部31ａを貫通孔12に配設する。 Next, the static electricity removal method and usage method (action) of the static electricity removal apparatus according to the present invention will be described.
First, the hole 11 is provided in the fixing table 1 and the nozzle 20 is provided in the ionizer 2.
The ionizer 2 is disposed on the back surface 1 b side of the fixing table 1 and the tip 20 a of the nozzle 20 is disposed in the hole 11. Further, the tip 31 a of the lift pin 31 is disposed in the through hole 12.

次に、固定用テーブル１の表て面１ａにワークＷの裏面Ｗｂを接触するように載置し、ワーク固定手段により固定用テーブル１にワークＷを固定する。
ワークＷに表面処理剤の塗布や密着強化剤の塗布、或いは、ワークＷと他部材との結合、熱処理等の所定の作業工程を行う。
そして、所定の作業工程後に、ワーク固定手段によるワークＷの固定を解除する。 Next, the workpiece W is placed so that the back surface Wb of the workpiece W is in contact with the front surface 1a of the fixing table 1, and the workpiece W is fixed to the fixing table 1 by the workpiece fixing means.
A predetermined work process such as application of a surface treatment agent or adhesion reinforcing agent to the workpiece W, bonding between the workpiece W and another member, heat treatment, or the like is performed.
Then, after the predetermined work process, the workpiece W is released from being fixed by the workpiece fixing means.

ワーク固定解除後に、ワークＷの洗浄や搬送等の次の所定の作業工程を行うために、リフトピン31を上昇（分離手段３を作動）させ、固定用テーブル１の表て面１ａからワークＷの裏面Ｗｂを分離させる。   After the work is released, the lift pin 31 is moved up (the separating means 3 is operated) to perform the next predetermined work process such as cleaning or transporting the work W, and the work W is removed from the surface 1a of the fixing table 1. The back surface Wb is separated.

ここで、図１に示すように、分離手段３にてワークＷを分離する直前（分離開始の数秒前）に、イオナイザ２を起動させ、マイナスイオン及びプラスイオンの発生を開始する（除電分離工程開始）。   Here, as shown in FIG. 1, immediately before the work W is separated by the separating means 3 (several seconds before the start of separation), the ionizer 2 is activated to start generation of negative ions and positive ions (static elimination separation step). start).

図４に示すように、分離が開始されると、固定用テーブル１の表て面１ａとワークＷの裏面Ｗｂとの間の間隙空間部Ｊに、孔11を介して、イオン風が噴出される。
分離すると直ぐに、剥離帯電により、固定用テーブル１がマイナス帯電すると共にワークＷがプラス帯電する（ワークＷの裏面Ｗｂにプラス電荷が存在すると共に固定用テーブル１の表て面１ａにマイナス電荷が存在する）。このまま分離を進めると、放電現象が起こり、ワークＷが破壊される虞れがある。
ところが、図４乃至図５に示すように、分離開始から、瞬間的に（分離開始から０．１秒以内に）、ワークＷの裏面Ｗｂに存在するプラス電荷と、固定用テーブル１の表て面１ａに存在するマイナス電荷を、イオン風のプラスイオン及びマイナスイオンによって完全に中和し、放電現象を防止する。 As shown in FIG. 4, when the separation is started, an ion wind is ejected through the hole 11 into the gap space J between the front surface 1 a of the fixing table 1 and the back surface Wb of the workpiece W. The
Immediately after separation, the fixing table 1 is negatively charged and the workpiece W is positively charged due to peeling charging (a positive charge is present on the back surface Wb of the workpiece W and a negative charge is present on the front surface 1a of the fixing table 1). To do). If separation is continued as it is, a discharge phenomenon may occur and the workpiece W may be destroyed.
However, as shown in FIGS. 4 to 5, the positive charge existing on the back surface Wb of the workpiece W and the appearance of the fixing table 1 are instantaneously (within 0.1 second from the start of separation) from the start of the separation. The negative charge existing on the surface 1a is completely neutralized by positive ions and negative ions of the ion wind to prevent the discharge phenomenon.

また、固定用テーブル１からワークＷを分離する際に（除電分離工程において）、イオン風は、ワークＷの裏面Ｗｂにノズル20によって吹き付けられ、ワークＷに沿って流れる。図２に一点鎖線で示す円のように、イオン風をノズル20を中心とした円形に拡散させて流す。
例えば、ワークＷの表て面Ｗａに向けてイオン風を吹き付ける従来の場合は、電極針21を５０〜１００ｍｍ間隔で配設して除電を行う必要があったが、本発明の装置及び方法では、１本の電極針21で、半径２００〜３００ｍｍの除電を行うことができ、ワークＷの単位面積あたりに必要な電極針21の本数を少なくできる。 Further, when the work W is separated from the fixing table 1 (in the static elimination process), the ion wind is blown by the nozzle 20 to the back surface Wb of the work W and flows along the work W. The ion wind is diffused in a circle centered on the nozzle 20 and flows as shown by a dashed line in FIG.
For example, in the conventional case where ion wind is blown toward the surface Wa of the workpiece W, the electrode needles 21 need to be arranged at intervals of 50 to 100 mm to perform static elimination, but in the apparatus and method of the present invention, One electrode needle 21 can perform static elimination with a radius of 200 to 300 mm, and the number of electrode needles 21 required per unit area of the workpiece W can be reduced.

また、固定用テーブル１からワークＷを分離する際に、ノズル20の先端20ａとワークＷの裏面Ｗｂの間の間隔寸法Ｓを一定に保持するように、孔11にノズル20を挿通させて、ノズル20の先端20ａを間隙空間部Ｊに侵入させつつ、イオン風の吹き付けを行う。
ワークＷの裏面Ｗｂに吹き付けられるイオン量（濃度）が安定し、確実に除電効果が得られる。なお、図４及び図５は、間隙空間部Ｊや間隔寸法Ｓを実際よりも大きく図示している。 Further, when separating the workpiece W from the fixing table 1, the nozzle 20 is inserted into the hole 11 so as to keep the spacing dimension S between the tip 20a of the nozzle 20 and the back surface Wb of the workpiece W constant, While the tip 20a of the nozzle 20 enters the gap space J, ion wind is blown.
The amount (concentration) of ions sprayed on the back surface Wb of the workpiece W is stabilized, and a static elimination effect is reliably obtained. 4 and 5 show the gap space portion J and the interval dimension S larger than the actual size.

さらに、固定用テーブル１から第１所定分離距離Ｈａまでの範囲においてワークＷが分離する際の分離速度を、基準分離速度Ｕａ以下の速度にする。
間隙空間部Ｊが急激に広くならず、イオン密度（濃度）の急激な低下や、イオンの拡散速度の急激な低下を防止し、除電効果が効率良く行われる。 Further, the separation speed when the workpiece W is separated in the range from the fixing table 1 to the first predetermined separation distance Ha is set to a speed equal to or lower than the reference separation speed Ua.
The gap space J is not rapidly widened, and a rapid decrease in ion density (concentration) and a rapid decrease in the diffusion rate of ions are prevented, so that the charge removal effect is efficiently performed.

第１所定分離距離Ｈａを越えると、第２所定分離距離Ｈｂ（又は、分離終了距離Ｈｅ）まで、分離速度を基準分離速度Ｕａよりも速くして、生産効率（生産速度）を向上させる。   When the first predetermined separation distance Ha is exceeded, the separation speed is made faster than the reference separation speed Ua up to the second predetermined separation distance Hb (or the separation end distance He), thereby improving the production efficiency (production speed).

そして、図６に示すように、ワークＷが分離終了距離Ｈｅまで分離すると、イオナイザ２の作動を停止する（除電分離工程終了）。
ワークＷの表て面Ｗａ及び裏面Ｗｂに、剥離帯電による電荷が無く、ワークＷの表て面Ｗａにイオン風による電荷（イオン）が大量に蓄積されず、浮遊粉塵等の異物が落下してワークＷの表て面Ｗａに乗っても、電荷接触による吸着が無く、除塵ヘッド７等の洗浄機による異物除去効果を向上させることができる。 Then, as shown in FIG. 6, when the workpiece W is separated to the separation end distance He, the operation of the ionizer 2 is stopped (end of the static elimination separation step).
There is no charge due to peeling electrification on the surface Wa and the back surface Wb of the work W, and a large amount of charges (ions) due to the ion wind are not accumulated on the surface Wa of the work W, and foreign matters such as floating dust fall. Even when the workpiece W is placed on the surface Wa, there is no adsorption due to charge contact, and the foreign matter removal effect by a cleaning machine such as the dust removal head 7 can be improved.

ここで、図７に、分離毎に分離完了状態でのワークＷの帯電量を測定した比較試験結果のグラフ図を示す。
イオナイザ２を起動させずに固定用テーブル１に対してワークＷを接触・分離を繰り返した比較例をバツ（×）印で示し、本発明に係る実施例（図１乃至図６参照）を黒丸（●）印で示し、図10に示すようにイオナイザ92をワークＷの表て面Ｗａに吹き付けるように構成した従来例を三角（△）印で示している。ワークＷはガラス基板とした。 Here, FIG. 7 shows a graph of the result of a comparative test in which the amount of charge of the workpiece W in the separation completed state is measured for each separation.
A comparative example in which contact / separation of the workpiece W is repeated with respect to the fixing table 1 without starting the ionizer 2 is indicated by a cross (x) mark, and the embodiment according to the present invention (see FIGS. 1 to 6) is indicated by a black circle. A conventional example in which the ionizer 92 is sprayed on the surface Wa of the workpiece W as shown in FIG. 10 is indicated by a triangle (Δ). The workpiece W was a glass substrate.

図７から明らかなように、比較例（×印）は、イオナイザ２を起動していないため、１回目の分離で帯電量が最も少ないが、ワークＷが電気的に中和されておらず、静電気による放電現象が発生する虞れがある。さらに、分離回数が増えるにつれて、帯電量が増加している。
従来例（△印）は、イオナイザ92により電気的に中和されているように見えるが、イオナイザ92からのイオンがワークＷの表て面Ｗａに蓄積されるため、帯電量が多くなっている。つまり、浮遊粉塵等の異物が吸着する虞れが高いと言える。
実施例（●印）は、イオナイザ２により電気的に中和され、分離を繰り返し行っても、比較例及び従来例に比べて帯電量が非常に少なく、異物吸着の虞れが殆ど無いと言える。 As is clear from FIG. 7, in the comparative example (x mark), since the ionizer 2 is not activated, the charge amount is the smallest in the first separation, but the workpiece W is not electrically neutralized, There is a risk of discharge due to static electricity. Further, as the number of separations increases, the charge amount increases.
In the conventional example (marked with Δ), it seems that the ionizer 92 is electrically neutralized, but since the ions from the ionizer 92 are accumulated on the surface Wa of the workpiece W, the charge amount is increased. . That is, it can be said that there is a high possibility that foreign matters such as suspended dust will be adsorbed.
In the example (marked with ●), even if it is electrically neutralized by the ionizer 2 and the separation is repeated, the charge amount is very small compared to the comparative example and the conventional example, and it can be said that there is almost no possibility of foreign matter adsorption. .

図８（ａ）に示すように、実施例は、帯電量が少ないため、分離完了状態で、ワークＷの表て面Ｗａに異物が落下しても電荷による吸着が発生せず（付着力が弱く）、除塵ヘッド７にて除塵を行うと、図８（ｂ）に示すように、きれいに除塵できる。
しかし、従来例や比較例のように帯電量が多いと、図９（ａ）に示すように、ワークＷの表て面Ｗａに無数の異物が吸着する。そして、除塵ヘッド７（図６参照）を走行させて除塵を行っても、電荷による吸着力が強く、図９（ｂ）に示すように、異物が波模様（縞模様）のように残存し、除塵ヘッド７の性能を十分に発揮できていない。
なお、除塵ヘッド７は、ワークＷに平行に走行し、ワークＷの表て面Ｗａに向かって、エアを噴出し、異物をワークＷから剥離させ、エアと異物を吸引ノズルから吸入して除塵を行うものである。また、図８及び図９において異物を実際よりも大きく図示している。 As shown in FIG. 8A, since the charge amount is small in the embodiment, even when a foreign matter falls on the surface Wa of the workpiece W in the separation completed state, the adsorption due to the charge does not occur (adhesion force is low). If the dust removal head 7 removes dust, the dust can be removed cleanly as shown in FIG.
However, when the charge amount is large as in the conventional example and the comparative example, innumerable foreign substances are attracted to the surface Wa of the workpiece W as shown in FIG. Even if dust removal is performed by running the dust removal head 7 (see FIG. 6), the adsorption force due to the electric charge is strong, and the foreign matter remains like a wave pattern (striped pattern) as shown in FIG. 9B. The performance of the dust removal head 7 is not fully exhibited.
The dust removal head 7 travels parallel to the workpiece W, blows air toward the surface Wa of the workpiece W, separates foreign matter from the workpiece W, and sucks air and foreign matter from the suction nozzle to remove dust. Is to do. 8 and 9, the foreign matter is shown larger than the actual size.

ここで、図11に示すように、ワークＷが薄いガラス板や薄いプラスチック板のように剛性の小さく撓みやすい部材の場合、リフトピン31にて押し上げた部位から分離（剥離）が始まり、ノズル20の先端20ａ近傍の分離が始まらず（図11に示すＹの区域が密着状態のままとなり）、イオン風が直ぐに分離開始部位（リフトピン31の先端部31ａ近傍）Ｑに流れず静電気を防止できない場合がある。
そこで、図12乃至図14に示す他の実施形態では、ノズル20を、リフトピン31と兼用している。
図13に示すようにノズル20は、先端部20ｄが丸山状（球頭状）に形成され、丸山の裾部20ｅにイオン風が噴出する噴出孔20ｆを開口している。噴出孔20ｆは、ノズル20の軸心廻りに複数設けられ、斜め上方へ開口するように設けている。頂部（先端）20ａがワークＷに当接しても噴出孔20ｆが塞がれず確実にイオン風を噴出でき、かつ、ワークＷの裏面Ｗｂに沿ってイオン風が薄い膜状（平面状）に拡散しつつ流れる。 Here, as shown in FIG. 11, in the case where the workpiece W is a rigid and flexible member such as a thin glass plate or a thin plastic plate, separation (peeling) starts from the portion pushed up by the lift pin 31, and the nozzle 20 Separation in the vicinity of the tip 20a does not start (the Y area shown in FIG. 11 remains in close contact), and the ion wind does not immediately flow to the separation start site (near the tip 31a of the lift pin 31) Q, preventing static electricity. is there.
Therefore, in another embodiment shown in FIGS. 12 to 14, the nozzle 20 is also used as the lift pin 31.
As shown in FIG. 13, the nozzle 20 has a tip portion 20d formed in a round mountain shape (ball head shape), and has an ejection hole 20f through which ion wind is ejected at a skirt portion 20e of the round mountain. A plurality of ejection holes 20f are provided around the axial center of the nozzle 20, and are provided so as to open obliquely upward. Even if the top (tip) 20a abuts against the workpiece W, the ejection holes 20f are not blocked and the ion wind can be reliably ejected, and the ion wind diffuses along the back surface Wb of the workpiece W into a thin film (planar shape). While flowing.

図14に示すように、ノズル20を固定用テーブル１の孔11に挿入し、ノズル20の先端部20ｄでワークＷの裏面Ｗｂを押し上げて、固定用テーブル１から分離させつつイオン風を噴出させる。ワークＷが撓みやすい部材であっても、ノズル20の先端20ａがワークＷの裏面Ｗｂに当接して、ワークＷの裏面Ｗｂと固定用テーブル１の表て面１ａの間の分離開始部位Ｑにイオン風を送り静電気を防止できる。さらに、図４乃至図６を用いて説明したように、間隙空間部Ｊにイオン風を噴出させて、静電気を防止する。ところで、図11，図12，図14に於ては、（図１，図４，図５等に示した）プラス電荷，マイナス電荷の図示を省略している。   As shown in FIG. 14, the nozzle 20 is inserted into the hole 11 of the fixing table 1, and the back surface Wb of the workpiece W is pushed up by the tip 20 d of the nozzle 20, and the ion wind is ejected while being separated from the fixing table 1. . Even if the workpiece W is a flexible member, the tip 20a of the nozzle 20 abuts on the back surface Wb of the workpiece W, and the separation start site Q between the back surface Wb of the workpiece W and the front surface 1a of the fixing table 1 is formed. Ion wind can be sent to prevent static electricity. Further, as described with reference to FIGS. 4 to 6, ion wind is blown into the gap space J to prevent static electricity. In FIG. 11, FIG. 12, and FIG. 14, the illustration of positive charges and negative charges (shown in FIG. 1, FIG. 4, FIG. 5, etc.) is omitted.

なお、本発明は、設計変更可能であって、固定用テーブル１は、表て面１ａが、傾斜状や垂直面状のものであっても良い。つまり、図示のようにワークＷが上下方向に分離するものに限らず、水平方向に分離するものであっても良い。分離手段３はリフトピン31を用いたものに限らず、負圧吸引部材を吸盤部材をワークＷに吸着させて、ワークＷを分離させる構造とするも良い。   The design of the present invention can be changed, and the fixing table 1 may have an inclined surface or a vertical surface as the surface 1a. That is, the workpiece W is not limited to the vertical direction as illustrated, but may be a horizontal direction. The separating means 3 is not limited to the one using the lift pins 31, and the negative pressure suction member may be made to adsorb the suction cup member to the work W to separate the work W.

以上のように本発明の静電気除去装置は、裏面Ｗｂが平滑面状のワークＷを固定用テーブル１の表て面１ａから分離手段３で分離する際に発生する静電気を防止するためのイオナイザ２を、固定用テーブル１の裏面１ｂ側に設け、固定用テーブル１に貫設した孔11を介して、イオナイザ２からのイオン風を、固定用テーブル１の表て面１ａとワークＷの裏面Ｗｂとの間に形成される間隙空間部Ｊに噴出させるように構成したので、剥離帯電によってワークＷの裏面Ｗｂと固定用テーブル１の表て面１ａに発生する電荷を完全に中和することができ、放電現象によるワークＷの破壊を確実に防止できる。狭い間隙空間部Ｊを利用して、イオン濃度を大きく低下させずに、剥離帯電が発生している二面に対して、イオン風を素早く当てることで、効率良く除電（中和）を行うことができる。特に、固定用テーブル１からワークＷを分離した瞬間に除電でき、放電の危険を防ぎ得る。１本の電極針21で除電可能な範囲が広くなって、装置の簡素化を実現できる。電荷による異物吸着を確実に防止でき、除塵ヘッド７等の洗浄機による異物除去効果を向上させることができる。   As described above, the static eliminator of the present invention is an ionizer 2 for preventing static electricity generated when the separating means 3 separates the workpiece W having a smooth back surface Wb from the surface 1a of the fixing table 1. Is provided on the back surface 1b side of the fixing table 1, and the ion wind from the ionizer 2 is blown through the hole 11 penetrating the fixing table 1 so that the surface 1a of the fixing table 1 and the back surface Wb of the work W In this case, the charge generated on the back surface Wb of the workpiece W and the surface 1a of the fixing table 1 can be completely neutralized by peeling charging. It is possible to reliably prevent the workpiece W from being destroyed by the discharge phenomenon. Efficient charge removal (neutralization) by quickly applying ion wind to the two surfaces where peeling electrification has occurred without significantly reducing the ion concentration using the narrow gap space J Can do. In particular, the charge can be removed at the moment when the workpiece W is separated from the fixing table 1, and the risk of discharge can be prevented. The range that can be neutralized by one electrode needle 21 is widened, and the apparatus can be simplified. Adsorption of foreign matters due to electric charges can be reliably prevented, and the effect of removing foreign matters by a cleaning machine such as the dust removal head 7 can be improved.

また、イオナイザ２にイオン風を噴出させるための円筒状のノズル20を設け、ノズル20を固定用テーブル１の孔11に挿入したので、安定したイオン濃度のイオン風をワークＷに吹き付けることができる。イオン風をノズル20を中心とした円形状に拡散させることができ、効率良くイオンを作用させることができる。１つのワークＷ及び固定用テーブル１に対応させるイオナイザ２の電極針21の本数を少なくでき、装置の小型化・簡略化に貢献できる。   Moreover, since the cylindrical nozzle 20 for ejecting the ion wind to the ionizer 2 is provided and the nozzle 20 is inserted into the hole 11 of the fixing table 1, the ion wind having a stable ion concentration can be blown onto the workpiece W. . The ion wind can be diffused in a circular shape centering on the nozzle 20, and ions can be efficiently applied. The number of electrode needles 21 of the ionizer 2 corresponding to one workpiece W and the fixing table 1 can be reduced, which contributes to the miniaturization and simplification of the apparatus.

また、イオナイザ２はワーク分離方向へワーク分離速度と同一速度をもって移動するように分離手段３と連動連結され、ノズル20の先端20ａとワークＷの裏面Ｗｂの間の間隔寸法Ｓが一定に保持されるように構成したので、ワークＷの裏面Ｗｂに吹き付けるイオン量（濃度）が安定し、効率良くイオンをワークＷに作用させることができる。確実に除電効果を得ることができる。ワークＷの裏面Ｗｂに発生する電荷を瞬間的に中和させることができる。   Further, the ionizer 2 is interlocked with the separating means 3 so as to move in the workpiece separating direction at the same speed as the workpiece separating speed, and the distance dimension S between the tip 20a of the nozzle 20 and the back surface Wb of the workpiece W is kept constant. Since it comprised so that the ion quantity (concentration) sprayed on the back surface Wb of the workpiece | work W could be stabilized, an ion can be made to act on the workpiece | work W efficiently. A static elimination effect can be obtained with certainty. Charges generated on the back surface Wb of the workpiece W can be instantaneously neutralized.

また、分離手段３はワークＷの裏面Ｗｂを押し上げるためのリフトピン31を備え、イオナイザ２にイオン風を噴出させるためのノズル20を設け、ノズル20の先端部20ｄは丸山状であってイオン風が噴出する噴出孔20ｆを有し、さらに、ノズル20を固定用テーブル１の孔11に挿入し、ノズル20をリフトピン31と兼用したので、ワークＷが薄いガラス板のように剛性の小さく撓みやすい部材であっても分離開始部位Ｑにイオン風を送り確実にかつ瞬間に放電現象によるワークＷの破壊を防止できる。   Further, the separating means 3 includes a lift pin 31 for pushing up the back surface Wb of the workpiece W, and a nozzle 20 for ejecting the ion wind to the ionizer 2 is provided. Since the nozzle 20 is inserted into the hole 11 of the fixing table 1 and the nozzle 20 is also used as the lift pin 31, the workpiece W is a rigid and flexible member such as a thin glass plate. Even so, it is possible to send the ion wind to the separation start site Q reliably and instantaneously to prevent the workpiece W from being destroyed by the discharge phenomenon.

また、本発明の静電気除去方法は、裏面Ｗｂが平滑面状のワークＷを保持するための固定用テーブル１に孔11を貫設して、固定用テーブル１からワークＷを分離する際に発生する静電気を防止するためのイオナイザ２を、固定用テーブル１の裏面１ｂ側に配設し、固定用テーブル１からワークＷを分離する際に、イオナイザ２からのイオン風を、孔11を介して、固定用テーブル１の表て面１ａとワークＷの裏面Ｗｂとの間に形成される間隙空間部Ｊに噴出させるので、剥離帯電によってワークＷの裏面Ｗｂと固定用テーブル１の表て面１ａに発生する電荷を完全に中和することができ、放電現象によるワークＷの破壊を確実に防止できる。狭い間隙空間部Ｊを利用して、イオン濃度を大きく低下させずに、剥離帯電が発生している二面に対して、イオン風を素早く当てることで、効率良く除電（中和）を行うことができる。特に、固定用テーブル１からワークＷを分離した瞬間に除電でき、放電の危険を防ぎ得る。１本の電極針21で除電可能な範囲が広くなって、装置の簡素化を実現できる。電荷による異物吸着を確実に防止でき、除塵ヘッド７等の洗浄機による異物除去効果を向上させることができる。   Further, the static electricity removing method of the present invention is generated when the work W is separated from the fixing table 1 by penetrating the hole 11 in the fixing table 1 for holding the work W whose back surface Wb is smooth. An ionizer 2 for preventing static electricity is disposed on the back surface 1b side of the fixing table 1, and when the work W is separated from the fixing table 1, the ion wind from the ionizer 2 is passed through the hole 11. Since it is ejected to the gap space portion J formed between the front surface 1a of the fixing table 1 and the back surface Wb of the work W, the back surface Wa of the work W and the front surface 1a of the fixing table 1 by peeling electrification. The electric charges generated in the battery can be completely neutralized, and the destruction of the workpiece W due to the discharge phenomenon can be reliably prevented. Efficient charge removal (neutralization) by quickly applying ion wind to the two surfaces where peeling electrification has occurred without significantly reducing the ion concentration using the narrow gap space J Can do. In particular, the charge can be removed at the moment when the workpiece W is separated from the fixing table 1, and the risk of discharge can be prevented. The range that can be neutralized by one electrode needle 21 is widened, and the apparatus can be simplified. Adsorption of foreign matters due to electric charges can be reliably prevented, and the effect of removing foreign matters by a cleaning machine such as the dust removal head 7 can be improved.

また、イオナイザ２に、イオン風を噴出させるための円筒状のノズル20を設け、固定用テーブル１からワークＷを分離する際に、孔11にノズル20を挿通させて、ノズル20の先端20ａを間隙空間部Ｊに侵入させるので、安定したイオン濃度のイオン風をワークＷに吹き付けることができる。イオン風をノズル20を中心とした円形状に拡散させることができ、効率良くイオンを作用させることができる。１つのワークＷ及び固定用テーブル１に対応させるイオナイザ２の電極針21の本数を少なくでき、装置の小型化・簡略化に貢献できる。   Further, the ionizer 2 is provided with a cylindrical nozzle 20 for ejecting ion wind, and when separating the workpiece W from the fixing table 1, the nozzle 20 is inserted into the hole 11 so that the tip 20a of the nozzle 20 is Since the gap space portion J is entered, an ion wind having a stable ion concentration can be blown onto the workpiece W. The ion wind can be diffused in a circular shape centering on the nozzle 20, and ions can be efficiently applied. The number of electrode needles 21 of the ionizer 2 corresponding to one workpiece W and the fixing table 1 can be reduced, which contributes to the miniaturization and simplification of the apparatus.

また、固定用テーブル１からワークＷを分離する際に、イオナイザ２をワーク分離方向へワーク分離速度と同一速度をもって移動させ、ノズル20の先端20ａとワークＷの裏面Ｗｂの間の間隔寸法Ｓを一定に保持しつつイオン風の噴出を行うので、ワークＷの裏面Ｗｂに吹き付けるイオン量（濃度）が安定し、効率良くイオンをワークＷに作用させることができる。確実に除電効果を得ることができる。ワークＷの裏面Ｗｂに発生する電荷を瞬間的に中和させることができる。   Further, when separating the workpiece W from the fixing table 1, the ionizer 2 is moved in the workpiece separation direction at the same speed as the workpiece separation speed, and the interval dimension S between the tip 20a of the nozzle 20 and the back surface Wb of the workpiece W is set. Since the ion wind is ejected while being kept constant, the amount (concentration) of ions sprayed on the back surface Wb of the workpiece W is stabilized, and ions can be efficiently applied to the workpiece W. A static elimination effect can be obtained with certainty. Charges generated on the back surface Wb of the workpiece W can be instantaneously neutralized.

また、固定用テーブル１から第１所定分離距離Ｈａまでの範囲においてワークＷが分離する際の分離速度が、第１所定分離距離Ｈａを越え第２所定分離距離Ｈｂまでの範囲においてワークＷが分離する際の分離速度よりも遅くなるように、固定用テーブル１からワークＷを分離させるので、分離した直後にイオン濃度（密度）を大きく低下させることなく、無駄なく、イオン風をワークＷに沿わせて拡散させ、瞬間的な除電を実現できる。生産効率（速度）を低下させずに、分離中の除電を行うことができる。   Further, the workpiece W is separated in the range where the separation speed when the workpiece W is separated in the range from the fixing table 1 to the first predetermined separation distance Ha exceeds the first predetermined separation distance Ha and to the second predetermined separation distance Hb. Since the workpiece W is separated from the fixing table 1 so as to be slower than the separation speed at the time of the separation, the ion wind is applied to the workpiece W without waste without greatly reducing the ion concentration (density) immediately after the separation. It can be diffused and instantaneous charge removal can be realized. Static electricity can be removed during separation without reducing production efficiency (speed).

また、イオナイザ２にイオン風を噴出させるためのノズル20を設け、ノズル20の先端部20ｄを丸山状に形成すると共にイオン風が噴出する噴出孔20ｆを形成し、ノズル20を固定用テーブル１の孔11に挿入し、ノズル20の先端部20ｄでワークＷの裏面Ｗｂを押し上げて、固定用テーブル１から分離させつつ間隙空間部Ｊにイオン風を噴出させるので、ワークＷが薄いガラス板のように剛性の小さく撓みやすい部材であっても分離開始部位Ｑにイオン風を送り確実にかつ瞬間に放電現象によるワークＷの破壊を防止できる。   Further, a nozzle 20 for ejecting ion wind to the ionizer 2 is provided, the tip 20d of the nozzle 20 is formed in a round mountain shape, and an ejection hole 20f for ejecting ion wind is formed. Inserted into the hole 11, the back surface Wb of the workpiece W is pushed up by the tip 20d of the nozzle 20, and the ion wind is ejected into the gap space J while being separated from the fixing table 1, so that the workpiece W looks like a thin glass plate. Even if the member is small and easy to bend, it is possible to send the ion wind to the separation start site Q reliably and instantaneously to prevent the workpiece W from being destroyed by the discharge phenomenon.

１ 固定用テーブル
１ａ 表て面
１ｂ 裏面
２ イオナイザ
３ 分離手段
11 孔
20 ノズル
20ａ 先端
20ｄ 先端部
20ｆ 噴出孔
Ｈａ 第１所定分離距離
Ｈｂ 第２所定分離距離
Ｊ 間隙空間部
Ｓ 間隔寸法
Ｗ ワーク
Ｗａ 表て面
Ｗｂ 裏面 DESCRIPTION OF SYMBOLS 1 Fixing table 1a Front surface 1b Back surface 2 Ionizer 3 Separation means
11 holes
20 nozzles
20a tip
20d tip
20f Ejection hole Ha First predetermined separation distance Hb Second predetermined separation distance J Gap space S S Dimension W Work Wa Front surface Wb Back surface

Claims (9)

裏面（Ｗｂ）が平滑面状のワーク（Ｗ）を固定用テーブル（１）の表て面（１ａ）から分離手段（３）で分離する際に発生する静電気を防止するためのイオナイザ（２）を、上記固定用テーブル（１）の裏面（１ｂ）側に設け、上記固定用テーブル（１）に貫設した孔（11）を介して、上記イオナイザ（２）からのイオン風を、上記固定用テーブル（１）の上記表て面（１ａ）と上記ワーク（Ｗ）の裏面（Ｗｂ）との間に形成される間隙空間部（Ｊ）に噴出させるように構成したことを特徴とする静電気除去装置。   Ionizer (2) for preventing static electricity generated when the workpiece (W) having a smooth back surface (Wb) is separated from the surface (1a) of the fixing table (1) by the separating means (3). On the back surface (1b) side of the fixing table (1), and the ion wind from the ionizer (2) is fixed to the fixing table (1) through the hole (11) penetrating the fixing table (1). Static electricity characterized by being ejected into a gap space (J) formed between the front surface (1a) of the table (1) and the back surface (Wb) of the work (W). Removal device. 上記イオナイザ（２）にイオン風を噴出させるための円筒状のノズル（20）を設け、該ノズル（20）を上記固定用テーブル（１）の上記孔（11）に挿入した請求項１記載の静電気除去装置。   The cylindrical nozzle (20) for ejecting ion wind to the ionizer (2) is provided, and the nozzle (20) is inserted into the hole (11) of the fixing table (1). Static eliminator. 上記イオナイザ（２）はワーク分離方向へワーク分離速度と同一速度をもって移動するように上記分離手段（３）と連動連結され、上記ノズル（20）の先端（20ａ）と上記ワーク（Ｗ）の上記裏面（Ｗｂ）の間の間隔寸法（Ｓ）が一定に保持されるように構成した請求項２記載の静電気除去装置。   The ionizer (2) is linked to the separation means (3) so as to move in the workpiece separation direction at the same speed as the workpiece separation speed, and the tip (20a) of the nozzle (20) and the workpiece (W) The static eliminator of Claim 2 comprised so that the space | interval dimension (S) between back surfaces (Wb) might be kept constant. 上記分離手段（３）は上記ワーク（Ｗ）の裏面（Ｗｂ）を押し上げるためのリフトピン（31）を備え、
上記イオナイザ（２）にイオン風を噴出させるためのノズル（20）を設け、該ノズル（20）の先端部（20ｄ）は丸山状であって上記イオン風が噴出する噴出孔（20ｆ）を有し、
さらに、上記ノズル（20）を上記固定用テーブル（１）の上記孔（11）に挿入し、該ノズル（20）を上記リフトピン（31）と兼用した請求項１記載の静電気除去装置。 The separating means (3) includes a lift pin (31) for pushing up the back surface (Wb) of the work (W),
The ionizer (2) is provided with a nozzle (20) for ejecting ion wind, and the tip (20d) of the nozzle (20) has a round mountain shape and has an ejection hole (20f) through which the ion wind is ejected. And
The static eliminating device according to claim 1, wherein the nozzle (20) is inserted into the hole (11) of the fixing table (1), and the nozzle (20) is also used as the lift pin (31). 裏面（Ｗｂ）が平滑面状のワーク（Ｗ）を保持するための固定用テーブル（１）に孔（11）を貫設して、
上記固定用テーブル（１）から上記ワーク（Ｗ）を分離する際に発生する静電気を防止するためのイオナイザ（２）を、上記固定用テーブル（１）の裏面（１ｂ）側に配設し、
上記固定用テーブル（１）から上記ワーク（Ｗ）を分離する際に、上記イオナイザ（２）からのイオン風を、上記孔（11）を介して、上記固定用テーブル（１）の上記表て面（１ａ）と上記ワーク（Ｗ）の裏面（Ｗｂ）との間に形成される間隙空間部（Ｊ）に噴出させることを特徴とする静電気除去方法。 A hole (11) is provided through the fixing table (1) for holding the work (W) having a smooth surface on the back surface (Wb),
An ionizer (2) for preventing static electricity generated when separating the workpiece (W) from the fixing table (1) is disposed on the back surface (1b) side of the fixing table (1);
When the work (W) is separated from the fixing table (1), the ion wind from the ionizer (2) is passed through the hole (11) to the fixing table (1). A method of removing static electricity, characterized by causing a gap (J) formed between the surface (1a) and the back surface (Wb) of the workpiece (W) to be ejected. 上記イオナイザ（２）に、イオン風を噴出させるための円筒状のノズル（20）を設け、
上記固定用テーブル（１）から上記ワーク（Ｗ）を分離する際に、上記孔（11）に上記ノズル（20）を挿通させて、上記ノズル（20）の先端（20ａ）を上記間隙空間部（Ｊ）に侵入させる請求項５記載の静電気除去方法。 The ionizer (2) is provided with a cylindrical nozzle (20) for ejecting ion wind,
When separating the workpiece (W) from the fixing table (1), the nozzle (20) is inserted into the hole (11), and the tip (20a) of the nozzle (20) is inserted into the gap space portion. 6. The static electricity removing method according to claim 5, wherein the static electricity removing method is allowed to enter (J). 上記固定用テーブル（１）から上記ワーク（Ｗ）を分離する際に、上記イオナイザ（２）をワーク分離方向へワーク分離速度と同一速度をもって移動させ、上記ノズル（20）の先端（20ａ）と上記ワーク（Ｗ）の上記裏面（Ｗｂ）の間の間隔寸法（Ｓ）を一定に保持しつつイオン風の噴出を行う請求項６記載の静電気除去方法。   When separating the workpiece (W) from the fixing table (1), the ionizer (2) is moved in the workpiece separation direction at the same speed as the workpiece separation speed, and the tip (20a) of the nozzle (20) The static electricity removal method of Claim 6 which ejects ion wind, maintaining the space | interval dimension (S) between the said back surfaces (Wb) of the said workpiece | work (W) constant. 上記固定用テーブル（１）から第１所定分離距離（Ｈａ）までの範囲において上記ワーク（Ｗ）が分離する際の分離速度が、第１所定分離距離（Ｈａ）を越え第２所定分離距離（Ｈｂ）までの範囲において上記ワーク（Ｗ）が分離する際の分離速度よりも遅くなるように、上記固定用テーブル（１）から上記ワーク（Ｗ）を分離させる請求項５，６又は７記載の静電気除去方法。   In the range from the fixing table (1) to the first predetermined separation distance (Ha), the separation speed when the workpiece (W) separates exceeds the first predetermined separation distance (Ha) and the second predetermined separation distance ( The workpiece (W) is separated from the fixing table (1) so as to be slower than the separation speed when the workpiece (W) separates in the range up to Hb). Static electricity removal method. 上記イオナイザ（２）にイオン風を噴出させるためのノズル（20）を設け、該ノズル（20）の先端部（20ｄ）を丸山状に形成すると共に上記イオン風が噴出する噴出孔（20ｆ）を形成し、
上記ノズル（20）を上記固定用テーブル（１）の上記孔（11）に挿入し、上記ノズル（20）の先端部（20ｄ）で上記ワーク（Ｗ）の裏面（Ｗｂ）を押し上げて、上記固定用テーブル（１）から分離させつつ上記間隙空間部（Ｊ）にイオン風を噴出させる請求項５記載の静電気除去方法。 The ionizer (2) is provided with a nozzle (20) for ejecting ion wind, and the tip (20d) of the nozzle (20) is formed in a round mountain shape, and an ejection hole (20f) for ejecting the ion wind is formed. Forming,
The nozzle (20) is inserted into the hole (11) of the fixing table (1), and the back surface (Wb) of the work (W) is pushed up by the tip (20d) of the nozzle (20), 6. The static electricity removing method according to claim 5, wherein an ion wind is jetted into the gap space (J) while being separated from the fixing table (1).
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