CN112788824A - Electrostatic removing device, vapor deposition device, and electrostatic removing method - Google Patents
Electrostatic removing device, vapor deposition device, and electrostatic removing method Download PDFInfo
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- CN112788824A CN112788824A CN202011545337.2A CN202011545337A CN112788824A CN 112788824 A CN112788824 A CN 112788824A CN 202011545337 A CN202011545337 A CN 202011545337A CN 112788824 A CN112788824 A CN 112788824A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
- H05F3/00—Carrying-off electrostatic charges
- H05F3/04—Carrying-off electrostatic charges by means of spark gaps or other discharge devices
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
Abstract
The application discloses static remove device, coating by vaporization device and static remove method, this static remove device includes: the lifting frame comprises a bottom plate and a plurality of substrate separating pieces which are arranged on the upper surface of the bottom plate and are spaced from each other, a plurality of suspension areas which are arranged at intervals are formed by the substrate separating pieces in a surrounding mode, and spacing areas are formed among the suspension areas; the electrode assembly comprises a plurality of plate-shaped electrodes which are supported on the upper surface of the bottom plate and are opposite to the upper surface of the bottom plate, the plate-shaped electrodes and the suspended areas are arranged in a one-to-one correspondence mode, the plate-shaped electrodes are arranged at intervals, and the shape of the plate-shaped electrodes is matched with that of the suspended areas. The application provides an electrostatic removal device, with the shape and the position of electrode and the corresponding setting of the suspended space region that the base plate separator encloses and closes the formation, can not harm the positive organic material of glass substrate, also can activate and the static elimination to the non-display area that the glass substrate back corresponds with the interval region, the fragmentation rate when reducing glass substrate and crane separation.
Description
Technical Field
The application relates to the technical field of display, in particular to a static electricity removing device, an evaporation device and a static electricity removing method.
Background
With the development of the liquid crystal industry, semiconductor manufacturing processes and structures become finer and finer, and the integration density of circuits is continuously improved, so that the sensitivity of electronic devices to electrostatic discharge (ESD) is continuously improved, and the electrostatic problem is increasingly prominent.
At present, there are two ways for manufacturing large-sized organic light-Emitting diodes (OLEDs): pure evaporation and printing and evaporation. Pure coating by vaporization adopts tray formula conveying system, has a process that plasma (plasma) handled glass substrate before the coating by vaporization, and the purpose has two: firstly, anode carrier injection is improved, and luminous efficiency is improved; and secondly, the static electricity on the back surface of the glass is eliminated, the glass is activated, the bonding characteristic of the glass and a bonding part (gluon) can be improved, and the glass is easier to separate from a tray when being mechanically separated after evaporation. However, in the printing and evaporation mode, the organic film layer is already printed on the glass before evaporation, and if the traditional plasma is still adopted to eliminate the back static electricity before evaporation, the plasma gas can damage the organic film layer on the front side of the glass, thereby affecting the performance of the OLED.
Disclosure of Invention
The application provides an electrostatic removal device, aims at solving the problem that electrostatic removal device under the prior art can cause the damage to the positive organic rete of glass substrate.
In a first aspect, the present application provides an electrostatic removing apparatus, comprising:
the lifting frame comprises a bottom plate and a plurality of substrate separating pieces which are arranged on the upper surface of the bottom plate and are spaced from each other, a plurality of suspension areas which are arranged at intervals are formed by the substrate separating pieces in a surrounding mode, and spacing areas are formed among the suspension areas;
and the electrode assembly comprises a plurality of plate-shaped electrodes which are supported on the upper surface of the base plate and are opposite to the upper surface of the base plate, the plate-shaped electrodes and the suspended areas are arranged in a one-to-one correspondence manner, the plate-shaped electrodes are arranged at intervals, and the plate-shaped electrodes are matched with the suspended areas in shape.
Furthermore, the substrate separating part is connected with the bottom plate in a sliding mode, and an included angle is formed between the sliding direction of the substrate separating part and the upper surface of the bottom plate.
Further, the substrate separator has a support position and an escape position in the sliding direction, and the height of the substrate separator is greater than the height of the plurality of plate-shaped electrodes at the support position; the height difference between the height of the substrate separating piece and the height of the plurality of plate-shaped electrodes is 1-2 mm.
Further, the crane further comprises a bonding part, the bonding part is arranged in the spacing area, and when the substrate separating part is at the avoiding position, the height of the substrate separating part is smaller than that of the bonding part.
Further, the static electricity removing device further comprises a gas injection unit, and the gas injection unit is used for injecting gas into the gaps among the plurality of plate-shaped electrodes.
Further, the static electricity removing device further comprises an alternating current power supply, and the alternating current power supply is electrically connected with the plurality of plate-shaped electrodes.
Further, the alternating current power source is plural, the electrode assembly includes at least one plate electrode group including a plurality of the plate electrodes, and the plurality of the plate electrodes in the plate electrode group includes a first plate electrode and at least one second plate electrode adjacent to the first plate electrode; the first plate electrode is connected to one end of the ac power supply, and the at least one second plate electrode is connected to the other end of the ac power supply.
Furthermore, two plate-shaped electrodes which are randomly arranged oppositely in the electrode assembly are provided with mutually opposite side faces, and insulating medium layers are further arranged on the side faces.
In a second aspect, the present application also provides an evaporation apparatus including the static electricity removal apparatus as described in any one of the above.
In a third aspect, the present application also provides a static electricity removing method using the static electricity removing apparatus as described in any one of the above, the method including:
providing a glass substrate with an organic layer formed on one side, wherein the glass substrate is provided with a display area corresponding to the suspension area and a non-display area corresponding to the spacing area;
applying a voltage to a plurality of plate electrodes of the electrode assembly on the static electricity removing device to remove static electricity on the non-display area of the glass substrate;
and separating the glass substrate after the static electricity is removed by the plurality of substrate separating pieces of the static electricity removing device.
The static remove device that this application embodiment provided through the suspended area that encloses the interval setting that closes formation with the shape and the position of electrode and base plate separator and correspond the setting for the plasma that the electrode circular telegram back ionization produced mostly moves between the electrode, and a small number of plasma spreads the interval region between a plurality of suspended areas in order to neutralize static, thereby eliminates the static that is located the non-display area of glass substrate of suspended area. Therefore, organic materials on the front surface of the glass substrate are not damaged, the non-display area corresponding to the spacing area on the back surface of the glass substrate can be activated and eliminated with static electricity, and the fragment rate of the glass substrate when the glass substrate is separated from the lifting frame is reduced.
Drawings
The technical solution and other advantages of the present application will become apparent from the detailed description of the embodiments of the present application with reference to the accompanying drawings.
Fig. 1 is a schematic structural view of an embodiment of a crane provided in the embodiment of the present application;
FIG. 2 is a schematic view of an embodiment of a glass substrate according to the present disclosure;
fig. 3 is a simplified schematic diagram illustrating an embodiment of an electrostatic discharge apparatus according to an embodiment of the present disclosure;
FIG. 4 is a schematic view of an embodiment of the electrode assembly connection provided by the present application;
fig. 5 is a cross-sectional view of an embodiment of an electrostatic discharge apparatus according to an embodiment of the present disclosure.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. It is to be understood that the embodiments described are only a few embodiments of the present application and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
In the description of the present application, it is to be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the present application and for simplicity in description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be operated in a particular manner, and are not to be construed as limiting the present application. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", may explicitly or implicitly include one or more of the described features. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.
In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; may be mechanically connected, may be electrically connected or may be in communication with each other; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.
In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact of the first and second features, or may comprise contact of the first and second features not directly but through another feature in between. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
The following disclosure provides many different embodiments or examples for implementing different features of the application. In order to simplify the disclosure of the present application, specific example components and arrangements are described below. Of course, they are merely examples and are not intended to limit the present application. Moreover, the present application may repeat reference numerals and/or letters in the various examples, such repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed. In addition, examples of various specific processes and materials are provided herein, but one of ordinary skill in the art may recognize applications of other processes and/or use of other materials.
The embodiments of the present application provide an electrostatic removal device, a deposition device, and an electrostatic removal method, which are described below.
The embodiment of the application provides an electrostatic removal device, and the device can include:
the lifting frame 10 comprises a base plate 101 and a plurality of substrate separating pieces 102 which are arranged on the upper surface of the base plate 101 and are spaced from each other, a plurality of suspension areas 103 which are arranged at intervals are formed by the plurality of substrate separating pieces 102 in a surrounding mode, and spacing areas 104 are formed among the plurality of suspension areas 103;
the electrode assembly 20 includes a plurality of plate electrodes 201 supported on the upper surface of the base plate 101 and facing the upper surface of the base plate 101, the plurality of plate electrodes 201 are disposed in one-to-one correspondence with the plurality of suspended regions 103, the plurality of plate electrodes 201 are disposed at intervals, and the plate electrodes 201 are adapted to the shapes of the suspended regions 103.
The static remove device that this application embodiment provided through the suspended area that encloses the interval setting that closes formation with the shape and the position of electrode and base plate separator and correspond the setting for the plasma that the electrode circular telegram back ionization produced mostly moves between the electrode, and a small number of plasma spreads the interval region between a plurality of suspended areas in order to neutralize static, thereby eliminates the static that is located the non-display area of glass substrate of suspended area. Therefore, organic materials on the front surface of the glass substrate are not damaged, the non-display area corresponding to the spacing area on the back surface of the glass substrate can be activated and eliminated with static electricity, and the fragment rate of the glass substrate when the glass substrate is separated from the lifting frame is reduced.
Specifically, in the embodiment of the present application, the static electricity removing apparatus may include a lifting frame 10, and the lifting frame 10 includes a base plate 101, and the base plate 101 may be used to place a glass substrate, so as to perform display panel processes such as printing, evaporation, and the like on the glass substrate.
As shown in fig. 1, a schematic structural diagram of an embodiment of the crane provided in the embodiment of the present application is shown. In the above embodiment, the plurality of substrate separation members 102 are formed on the base plate 101, the substrate separation members 102 are disposed on the upper surface of the base plate 101, the plurality of substrate separation members 102 are disposed at intervals, and the plurality of substrate separation members 102 surround and form the plurality of suspended regions 103 disposed at intervals. In the embodiment of the present application, the substrate separating member 102 may be slidably connected to the base plate 101, that is, the substrate separating member 102 may be a slidable separating member.
In the above embodiments, the sliding direction of the substrate separating member 102 may form an angle with the upper surface of the base plate 101. That is, the substrate separator 102 can slide up and down in a direction perpendicular to the base plate 101; the substrate separating member 102 may also have an acute angle with the bottom plate 101, and the substrate separating member 102 slides up and down along the included angle, i.e. the sliding direction of the substrate separating member 102 is inclined at a certain angle with respect to the vertical direction of the bottom plate 101.
In the above embodiment, when the glass substrate is subjected to the electrostatic removal, the glass substrate needs to be separated from the base plate 101, and since the substrate separation member 102 is disposed between the glass substrate and the base plate 101, the glass substrate can be separated from the base plate 101 by the substrate separation member 102.
Fig. 2 is a schematic view of an embodiment of a glass substrate according to the present application. Referring to fig. 1 and 2, in an embodiment of the present application, a glass substrate may be placed in the suspended region 103 after inkjet printing to obtain an organic layer. Meanwhile, as a plurality of display panels with different sizes can be formed on one glass substrate, a plurality of organic layers with different sizes can be formed on the glass substrate; and a glass substrate formed with a plurality of different sizes may be placed in the suspended region 103, and the shape position of the suspended region 103 may be disposed to correspond to the shape position of the organic layer on the glass substrate. As shown in fig. 2, a plurality of organic layers of different sizes are also formed with a spacing region therebetween, and the spacing region between the plurality of organic layers corresponds to a spacing region 104 between the plurality of suspension regions 103. And the glass substrate is placed in the suspended region 103, and the plurality of substrate separators 102 support the glass substrate.
The static electricity removing apparatus provided by the embodiment of the present application further includes an electrode assembly 20, and the electrode assembly 20 may include a plurality of plate-shaped electrodes 201 supported on the upper surface of the base plate 101 and opposite to the upper surface of the base plate 101; that is, the electrode assembly 20 is located on the upper surface of the base plate 101, the electrode assembly 20 is disposed between the base plate 101 and the glass substrate, and the electrode assembly 20 includes a plurality of plate-shaped electrodes 201. The plurality of plate electrodes 201 are disposed in one-to-one correspondence with the suspended regions 103, that is, the plurality of plate electrodes 201 are disposed at intervals, a spacing region also exists between the plurality of plate electrodes 201, and the spacing region between the plurality of plate electrodes 201 is disposed in correspondence with the spacing region 104 between the plurality of suspended regions 103.
And in the embodiment of the present application, the shape of the plate electrode 201 may be adapted to the suspended region 103. Specifically, the error between the edge region of the plate electrode 201 and the edge region of the suspended region 103 may be within a preset error range. Preferably, the edge region of the plate electrode 201 and the edge region of the suspended region 103 may completely overlap, i.e., the shape of the plate electrode 201 is identical to the shape of the suspended region 103.
As shown in fig. 3, a simplified schematic diagram of an embodiment of an electrostatic removing apparatus provided in the present application is provided, where the electrostatic removing apparatus includes electrodes disposed opposite to each other, when a voltage is applied to the electrodes, a gas existing between the electrodes may be ionized to generate a plasma, and the plasma may diffuse to a surface of an object to neutralize static electricity on the surface of the object. The dashed line in fig. 3 represents the direction of diffusion of the plasma, i.e. after the plasma is generated, a part of the plasma will diffuse towards the object surface.
The plasma is the fourth state of the substance after three states of solid, gas and liquid, and is composed of positive ions, negative ions, electrons and neutral ions, and the total number of the positive and negative charges in the system is equal, so the plasma is called as 'plasma'. The plasma generation path is many, and in the embodiment of the present application, the plasma may be generated by using a Dielectric Barrier Discharge (DBD) technology. A dielectric barrier discharge is a gas discharge with an insulating dielectric inserted into the discharge space, which insulating dielectric may be covered on electrodes or suspended in the discharge space. Thus, when a sufficiently high ac voltage is applied to the discharge electrode, the gas between the electrodes is ionized to form a dielectric barrier discharge.
In fig. 3, in the dielectric barrier discharge, an insulating dielectric (not shown) needs to be inserted into the discharge space, and preferably, the insulating dielectric may be covered on the electrodes, and an ac voltage needs to be applied across the electrodes. The air between the electrodes is broken down under the action of alternating voltage to generate dielectric barrier discharge, and the existence of the insulating dielectric blocks the formation of a breakdown channel, so that the insulating dielectric discharge can not generate sparks or electric arcs.
The dielectric barrier discharge can be performed in a large gas pressure range, for example, in a pressure of 0.1atm to 10 atm; wherein the standard atmospheric pressure is 101.325kPa, in units of pressure, and is referred to as atm. Meanwhile, when the dielectric barrier discharges, the voltage at two ends of the electrode needs to be alternating voltage, and the frequency of the alternating voltage can be 50Hz-1 MHZ.
As shown in fig. 4, an embodiment of the connection relationship of the electrode assembly provided for the embodiment of the present application is illustrated, because the plurality of suspended regions 103 in the embodiment of the present application are arranged at intervals, the plurality of plate electrodes 201 included in the electrode assembly 20 are also arranged at intervals, and the plurality of plate electrodes 201 are adapted to the shape of the suspended regions 103. And, in order to perform the subsequent ionization process, it is necessary to electrically connect the plurality of plate-shaped electrodes 201 to a power source. When no voltage is applied to the two ends of the electrodes, the plurality of plate-shaped electrodes 201 are insulated from each other; when the plate electrodes 201 are energized, an electric field exists between the plate electrodes 201, and the gas between the plate electrodes 201 is ionized under the action of the electric field to generate plasma. As shown in fig. 4, the dotted line in fig. 4 represents an electric field generated between the plate-shaped electrodes 201 when the power is applied.
In the embodiment of the present application, since the substrate separation member 102 is slidably connected to the base plate 101, that is, the substrate separation member 102 can slide, the substrate separation member 102 may have a support position and an escape position in the sliding direction. When the substrate separating member 101 is located at the supporting position, the substrate separating member 102 supports the glass substrate; when the substrate separating member 101 is located at the retracted position, the substrate separating member 102 is away from the glass substrate.
In an embodiment of the present application, the substrate separating element 102 may be a thimble, and the bottom plate 101 is provided with a through hole, so that when the static electricity is removed, the thimble can penetrate through the through hole to jack up the glass substrate, thereby separating and supporting the glass substrate.
In the above-described embodiment, when the substrate separator 102 reaches the supporting position, the substrate separator 102 supports the glass substrate while the height of the substrate separator 102 is larger than the height of the plurality of plate-shaped electrodes 201. In some embodiments of the present application, when the substrate separator 102 is located at the supporting position, the position of the plurality of plate-shaped electrodes 201 is kept unchanged, and the difference between the height of the substrate separator 102 and the height of the plurality of plate-shaped electrodes 201 may be 1-2 mm.
The arrangement is such that when the electrode assembly 20 is subjected to dielectric discharge, most of the generated plasma moves between the electrodes, the distance between the lower surface of the glass substrate and the electrode assembly 20 is very short, only 1-2mm, and part of the plasma diffuses in the direction perpendicular to the electrodes and reaches the display area on the surface of the display panel, so as to neutralize the static electricity in the display area.
Meanwhile, in the embodiment of the present application, two plate-shaped electrodes 201 disposed in any opposite direction in the electrode assembly 20 have side surfaces opposite to each other, and an insulating medium layer is disposed on the side surfaces, and the insulating medium layer is used to block the plate-shaped electrodes 201 from forming a breakdown channel when discharging, thereby generating a spark arc and other adverse effects, and further affecting the organic layer prepared by inkjet printing on the glass substrate.
It should be noted that, in the embodiment of the present application, the voltage at two ends of the electrode assembly 20 is an ac voltage, that is, the static electricity removing apparatus provided in the embodiment of the present application further includes an ac power source, and the ac power source is electrically connected to the plurality of plate electrodes 201, and the ac power source is used for providing a voltage to the electrode assembly 20 to generate an ionization phenomenon.
In the above-described embodiment, when the ac power source is plural, the electrode assembly 20 includes at least one plate electrode group, wherein the plate electrode group may include a plurality of plate electrodes 201. And the plurality of plate electrodes 201 in the plate electrode group may include a first plate electrode and at least one second plate electrode adjacent to the first plate electrode; the first plate-shaped electrode can be connected with one end of one alternating current power supply in a plurality of alternating current power supplies, and at least one second plate-shaped electrode is connected with the other end of the alternating current power supply; namely, a first plate electrode in the same plate electrode group and at least one second plate electrode adjacent to the first plate electrode are respectively connected to two ends of the same alternating current power supply.
In other embodiments of the present application, when there are a plurality of ac power supplies, the plate electrodes 201 located in different areas may be respectively connected to different ac power supplies to individually control the areas where static electricity needs to be removed. The voltage may be different between different ac sources.
In an embodiment of the present application, the crane 10 may further include a bonding part 105, referring to fig. 1, the bonding part 105 is disposed in a spaced area on the base plate 101, and the glass substrate may be connected to the base plate 101 through the bonding part 105. However, when the glass substrate is removed, the glass substrate needs to be separated from the base 101 for subsequent processes; because the non-display area on the glass substrate is subjected to static electricity removal in the embodiment of the application, the connecting force between the bonding part 105 and the glass substrate is weakened, and compared with the separation of the bonding part 105 and the glass substrate in the prior art, the separation is simpler and the manpower and material resources are saved.
In some embodiments of the present application, bonds 105 may be disposed in the spacing region 104 between any two of the overhanging regions 103; in other embodiments of the present application, the bonds 105 may be provided only at the edge regions of the chassis 101. When the substrate separation member 102 is located at the escape position, the adhesion portion 105 is connected to the glass substrate, and the height of the substrate separation member 102 is smaller than the height of the adhesion portion 105.
In the embodiment of the present application, the bonding portion 105 is used to bond the glass substrate and the base plate 101, and the bonding portion 105 may be a material or a device having a bonding function. In one embodiment of the present application, the bonding portion 105 may be glue, i.e., the glass substrate is connected with the base plate 101 through the glue.
In an embodiment of the present application, the static electricity removing apparatus may further include a gas injection unit that may inject gas into the gap between the plurality of plate electrodes 201. Since the plurality of plate electrodes 201 form the spacing region therebetween, the gas injection unit may inject the gas into the spacing region between the plurality of plate electrodes 201, and the plate electrodes 201 may ionize the injected gas to generate plasma after being energized, thereby eliminating static electricity in the non-display region on the glass substrate.
Fig. 5 is a cross-sectional view of an embodiment of an electrostatic discharge apparatus according to an embodiment of the present disclosure. In fig. 5, an electrode assembly 20 is disposed on a base 101, and the electrode assembly 20 includes a plurality of plate electrodes 201, the plate electrodes 201 are disposed corresponding to a suspended region 103 defined by a plurality of separators 102, and the suspended region 103 is disposed corresponding to an organic layer on a glass substrate. When the plate electrodes 201 are in dielectric discharge, gas between the plate electrodes 201 is ionized to generate plasma, and part of the plasma is diffused to the back surface of the glass substrate, namely to the side of the glass substrate close to the plate electrodes 201, so as to eliminate static electricity on the back surface of the glass substrate.
The present application also provides an evaporation apparatus including the static electricity removal apparatus according to any one of the above aspects. After the glass substrate on which the organic layer is formed is subjected to static electricity removal, only vapor deposition is performed in a vapor deposition apparatus to prepare a completed display panel.
The utility model provides an evaporation plating device, through setting up static remove device, and the shape and the position of electrode among the static remove device and the suspended area that the interval that the base plate separator encloses and closes the formation correspond the setting for the plasma that the electrode circular telegram back ionization produced mostly moves between the electrode, and a small number plasma spreads the interval region between a plurality of suspended areas with neutralization static, thereby eliminates the static that is located the non-display area of glass substrate of suspended area. Therefore, organic materials on the front surface of the glass substrate are not damaged, the non-display area corresponding to the spacing area on the back surface of the glass substrate can be activated and eliminated with static electricity, and the fragment rate of the glass substrate when the glass substrate is separated from the lifting frame is reduced.
The present application also provides a static electricity removing method for removing static electricity using the static electricity removing apparatus as described in any one of the above, the method may include:
providing a glass substrate with an organic layer formed on one side surface, wherein the glass substrate is provided with a display area corresponding to the suspension area and a non-display area corresponding to the spacing area; supporting a non-display area on one side of the glass substrate, which is far away from the organic layer, by a plurality of substrate separating pieces of the static electricity removing device; a voltage is applied to a plurality of plate electrodes of the electrode assembly to remove static electricity on the non-display area of the glass substrate.
Specifically, an organic layer can be prepared on a glass substrate by using ink-jet printing, namely a display area on the glass substrate is prepared, and the glass substrate also comprises a non-display area besides the organic layer; and the display region on the glass substrate corresponds to the suspended region 103 in the aforementioned electrostatic device, and the non-display region on the glass substrate corresponds to the spacing region in the aforementioned electrostatic device.
The static electricity removing apparatus further includes a plurality of substrate separators 102, and the plurality of substrate separators 102 can support the non-display region of the glass substrate on the side away from the organic layer, so as to perform a subsequent static electricity removing process. The static electricity removing device also comprises an electrode assembly 20, and the electrode assembly 20 also comprises a plurality of plate-shaped electrodes 201; the plurality of plate electrodes 201 are disposed corresponding to the display region of the glass substrate, and when a voltage is applied to the plurality of plate electrodes 201 in the electrode assembly 20, gas between the plurality of plate electrodes is ionized to generate plasma, and the plasma diffuses into the non-display region of the glass substrate to remove static electricity on the non-display region.
Specifically, the static electricity in the non-display area of the glass substrate is removed by using the static electricity removing device as described in any one of the above embodiments, because the shape and position of the electrodes in the static electricity removing device are arranged corresponding to the spaced suspended areas formed by the enclosing of the substrate separating member, most of the plasma generated by ionization of the electrodes after the electrodes are electrified moves between the electrodes, and a small amount of plasma is diffused to the spaced areas among the plurality of suspended areas to neutralize the static electricity, so that the static electricity in the non-display area of the glass substrate located in the suspended areas is eliminated. Therefore, organic materials on the front surface of the glass substrate are not damaged, the non-display area corresponding to the spacing area on the back surface of the glass substrate can be activated and eliminated with static electricity, and the fragment rate of the glass substrate when the glass substrate is separated from the lifting frame is reduced.
In the foregoing embodiments, the descriptions of the respective embodiments have respective emphasis, and for parts that are not described in detail in a certain embodiment, reference may be made to related descriptions of other embodiments.
The above describes in detail a static electricity removing apparatus, an evaporation apparatus, and a static electricity removing method provided in the embodiments of the present application, and specific examples are applied herein to explain the principles and embodiments of the present application, and the description of the above embodiments is only used to help understand the technical solutions and core ideas of the present application; those of ordinary skill in the art will understand that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications or substitutions do not depart from the spirit and scope of the present disclosure as defined by the appended claims.
Claims (10)
1. An electrostatic removing apparatus, characterized by comprising:
the lifting frame comprises a bottom plate and a plurality of substrate separating pieces which are arranged on the upper surface of the bottom plate and are spaced from each other, a plurality of suspension areas which are arranged at intervals are formed by the substrate separating pieces in a surrounding mode, and spacing areas are formed among the suspension areas;
and the electrode assembly comprises a plurality of plate-shaped electrodes which are supported on the upper surface of the base plate and are opposite to the upper surface of the base plate, the plate-shaped electrodes and the suspended areas are arranged in a one-to-one correspondence manner, the plate-shaped electrodes are arranged at intervals, and the plate-shaped electrodes are matched with the suspended areas in shape.
2. The static electricity removing apparatus according to claim 1, wherein the substrate separating member is slidably connected to the base plate, and a sliding direction of the substrate separating member forms an included angle with an upper surface of the base plate.
3. The static electricity removing apparatus according to claim 2, wherein the substrate separator has a support position in which a height of the substrate separator is larger than a height of the plurality of plate-like electrodes and an escape position in the sliding direction; the difference between the height of the substrate separating member and the height of the plurality of plate-shaped electrodes is 1-2 mm.
4. The static electricity removing device according to claim 3, wherein the lift frame further includes a bonding portion provided in the spaced area, and a height of the substrate separator is smaller than a height of the bonding portion when the substrate separator is in the escape position.
5. The static electricity removal apparatus according to claim 1, further comprising a gas injection unit for injecting a gas into the gaps between the plurality of plate-shaped electrodes.
6. The static electricity removing apparatus according to claim 1, further comprising an alternating current power source electrically connected to the plurality of plate electrodes.
7. The static electricity removing apparatus according to claim 6, wherein the alternating current power source is plural, the electrode assembly includes at least one plate electrode group including a plurality of the plate electrodes, the plurality of the plate electrodes in the plate electrode group includes a first plate electrode and at least one second plate electrode adjacent to the first plate electrode; the first plate electrode is connected to one end of the ac power supply, and the at least one second plate electrode is connected to the other end of the ac power supply.
8. The static electricity removing apparatus according to claim 1, wherein any two of said plate-like electrodes disposed oppositely in said electrode assembly have side faces opposed to each other, and said side faces are provided with insulating medium layers.
9. An evaporation apparatus comprising the electrostatic removal apparatus according to any one of claims 1 to 8.
10. An electrostatic removing method using the electrostatic removing apparatus according to any one of claims 1 to 8, the method comprising:
providing a glass substrate with an organic layer formed on one side, wherein the glass substrate is provided with a display area corresponding to the suspension area and a non-display area corresponding to the spacing area;
applying a voltage to a plurality of plate electrodes of the electrode assembly on the static electricity removing device to remove static electricity on the non-display area of the glass substrate;
and separating the glass substrate after the static electricity is removed by the plurality of substrate separating pieces of the static electricity removing device.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202011545337.2A CN112788824B (en) | 2020-12-24 | Electrostatic removing device, vapor deposition device, and electrostatic removing method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011545337.2A CN112788824B (en) | 2020-12-24 | Electrostatic removing device, vapor deposition device, and electrostatic removing method |
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| Publication Number | Publication Date |
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| CN112788824A true CN112788824A (en) | 2021-05-11 |
| CN112788824B CN112788824B (en) | 2024-04-30 |
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