JP2016040494A - 超高純度酸素の製造方法および超高純度酸素製造装置 - Google Patents
超高純度酸素の製造方法および超高純度酸素製造装置 Download PDFInfo
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- JP2016040494A JP2016040494A JP2014164260A JP2014164260A JP2016040494A JP 2016040494 A JP2016040494 A JP 2016040494A JP 2014164260 A JP2014164260 A JP 2014164260A JP 2014164260 A JP2014164260 A JP 2014164260A JP 2016040494 A JP2016040494 A JP 2016040494A
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- oxygen
- high purity
- raw material
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- 239000001301 oxygen Substances 0.000 title claims abstract description 196
- 229910052760 oxygen Inorganic materials 0.000 title claims abstract description 196
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 title claims abstract description 195
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 87
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 133
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims abstract description 81
- 238000000926 separation method Methods 0.000 claims abstract description 58
- 229910052786 argon Inorganic materials 0.000 claims abstract description 43
- 239000012535 impurity Substances 0.000 claims abstract description 36
- 229910001873 dinitrogen Inorganic materials 0.000 claims abstract description 33
- 239000007788 liquid Substances 0.000 claims abstract description 24
- 239000002994 raw material Substances 0.000 claims description 93
- 238000009835 boiling Methods 0.000 claims description 48
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 29
- 238000001816 cooling Methods 0.000 claims description 25
- 238000000034 method Methods 0.000 claims description 25
- 238000013461 design Methods 0.000 claims description 8
- 230000006835 compression Effects 0.000 claims description 7
- 238000007906 compression Methods 0.000 claims description 7
- 238000011084 recovery Methods 0.000 claims description 2
- 239000002699 waste material Substances 0.000 claims description 2
- 238000007796 conventional method Methods 0.000 abstract description 3
- 239000000463 material Substances 0.000 abstract 5
- 229910052757 nitrogen Inorganic materials 0.000 description 51
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 16
- 239000007789 gas Substances 0.000 description 14
- 238000001179 sorption measurement Methods 0.000 description 9
- 230000000052 comparative effect Effects 0.000 description 5
- 229910001882 dioxygen Inorganic materials 0.000 description 5
- 238000010992 reflux Methods 0.000 description 5
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- 238000004821 distillation Methods 0.000 description 3
- 229930195733 hydrocarbon Natural products 0.000 description 3
- 150000002430 hydrocarbons Chemical class 0.000 description 3
- 229910052743 krypton Inorganic materials 0.000 description 3
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 3
- 229910052724 xenon Inorganic materials 0.000 description 3
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 3
- 150000001485 argon Chemical class 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 150000002829 nitrogen Chemical class 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 239000003463 adsorbent Substances 0.000 description 1
- 238000012824 chemical production Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000004508 fractional distillation Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 239000010808 liquid waste Substances 0.000 description 1
- 239000002808 molecular sieve Substances 0.000 description 1
- 150000002926 oxygen Chemical class 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 230000003134 recirculating effect Effects 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 1
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- F25J3/04357—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion using quasi-closed loop internal vapor compression refrigeration cycles, e.g. of intermediate or oxygen enriched (waste-)streams of nitrogen and comprising a gas work expansion loop
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Abstract
Description
この図における超高純度酸素製造用空気分離装置は、外部から取り入れた原料空気を用いて高濃度酸素および窒素を製造する空気分離プロセス(窒素製造プロセス)Aと、得られた高濃度酸素を精留して不純物を取り除く超高純度酸素製造プロセスBと、これらの工程に深冷分離のための冷熱(寒冷)を供給する窒素液化プロセスCを備える。
まず、原料空気供給工程(過程)は、外部から取り入れた原料空気を圧縮する原料空気圧縮機41と、圧縮された空気から水分や炭酸ガス等を取り除くための吸着手段(吸着塔42)とを備える。
この図に示す第2実施形態は、先に述べたように、超高純度酸素製造プロセスBの脱メタン精留塔21から得られる超高純度酸素を、液化せず、気体状態のまま「超高純度酸素ガス」として取り出す例である。なお、この脱メタン精留塔21からは、第1実施形態のように、系外に「排酸素ガス」を排出していない。それ以外の構成は第1実施形態と同じである。
精留塔
・高圧塔:理論段数27〜54段(例では、27段または54段に固定。)
・低圧塔:理論段数52〜70段(例では、52段,59段,70段に固定。ただし、低圧塔の理論段数は50〜100段で設定可能。)
・低圧塔から得られる「高濃度酸素(設定濃度99.8%)」の流量Fは、1630Nm3/hに設定。
・設計原料空気流量(比較例):4.92F(例では4.92±0.02、流量では8008〜8212Nm3/hに設定。)
・導入原料空気流量(実施例):上記4.92Fに対して、例では1.13〜2.60倍、流量では9040〜21381Nm3/hに設定。
・なお、「排ガス」量は、全ての精留条件において「原料空気の45容積%」になるようになっている。
11 高圧塔
12 低圧塔
13 主熱交換器
14 過冷却器
15 窒素昇圧圧縮機
16 気液分離器
21 脱メタン精留塔
22 脱アルゴン精留塔
23 循環窒素圧縮器
24 循環窒素ガス熱交換器
31 液化熱交換器
32 循環窒素圧縮機
33,34 膨張タービン
35 気液分離器
41 原料空気圧縮機
42 吸着塔
51 アルゴン精留塔
52 ポンプ
Claims (4)
- 不純物の少ない超高純度酸素を製造する方法であって、外部より取り入れた空気を圧縮する原料空気圧縮工程と、上記原料空気圧縮工程で昇圧された圧縮原料空気を熱交換により冷却する原料空気冷却工程と、高圧塔と低圧塔からなり、上記原料空気冷却工程を経て高圧塔に導入された冷却圧縮原料空気を、各成分の沸点差を利用した深冷液化分離により、低圧塔の底部に液体酸素を溜め、低圧塔の上部に窒素ガスを溜める空気分離工程と、上記低圧塔の底部から取り出された高濃度液体酸素を精留塔に導入し、深冷液化分離により、酸素より高沸点の成分を取り除いて系外に液状で排出し、上記高濃度液体酸素を超高純度酸素とする超高純度酸素製造工程と、上記低圧塔の頂部から取り出した窒素ガスを圧縮・冷却しながら循環させて液化させ、この液化窒素ガスを上記空気分離工程および超高純度酸素製造工程に寒冷として供給する寒冷供給工程と、を備え、上記空気分離工程に導入される冷却圧縮原料空気の流量が、酸素の体積比20.9476vol%の標準大気を用いて濃度99.8%の高濃度酸素を所要の酸素流量F(Nm3/h)で継続して取り出す際に必要とされる設計原料空気流量4.92F(Nm3/h)の1.13〜2.60倍の流量に、設定されていることを特徴とする超高純度酸素の製造方法。
- 上記超高純度酸素製造工程で排出された排出液を、上記原料空気冷却工程の熱交換手段に送給し、この排出液と上記昇圧後の圧縮原料空気とを熱交換させて、排出液の冷熱を回収する排液冷熱回収工程を備える請求項1記載の超高純度酸素の製造方法。
- 上記低圧塔の中間部から取り出された窒素ガスをアルゴン精留塔に導入し、深冷液化分離により、上記窒素ガス中のアルゴンを高純度で取り出すアルゴン精留工程を備える請求項1または2記載の超高純度酸素の製造方法。
- 外部より取り入れた空気を圧縮する原料空気圧縮手段と、昇圧された圧縮原料空気を冷却する熱交換手段と、高圧塔と低圧塔からなり、上記原料空気圧縮手段および熱交換手段を経て塔内に導入された冷却圧縮原料空気を、各成分の沸点差を利用した深冷液化分離により、高沸点成分を含む液体酸素と低沸点成分を含む窒素ガスとに分留する空気分離手段と、上記空気分離手段から取り出された、酸素より低沸点の成分の少ない高濃度液体酸素から、深冷液化分離により、酸素より高沸点の成分を取り除いて超高純度酸素をつくる高沸点不純物除去手段と、上記空気分離手段から取り出された低温の窒素ガスの一部を用いて、上記空気分離手段および高沸点不純物除去手段に、冷熱源となる寒冷を供給する寒冷供給手段と、を備え、上記空気分離手段に、酸素の体積比20.9476vol%の標準大気を用いて濃度99.8%の高濃度酸素を所要の酸素流量F(Nm3/h)で継続して取り出す際に必要とされる設計原料空気流量4.92F(Nm3/h)の1.13〜2.60倍の流量の冷却圧縮原料空気が、導入されるようになっていることを特徴とする超高純度酸素製造装置。
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