JP2016001706A - ウエハ搬入装置 - Google Patents
ウエハ搬入装置 Download PDFInfo
- Publication number
- JP2016001706A JP2016001706A JP2014121773A JP2014121773A JP2016001706A JP 2016001706 A JP2016001706 A JP 2016001706A JP 2014121773 A JP2014121773 A JP 2014121773A JP 2014121773 A JP2014121773 A JP 2014121773A JP 2016001706 A JP2016001706 A JP 2016001706A
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- wafer
- bottom plate
- cover
- clean chamber
- carrier
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- 239000004065 semiconductor Substances 0.000 claims abstract description 26
- 238000004519 manufacturing process Methods 0.000 claims abstract description 19
- 238000003860 storage Methods 0.000 claims abstract description 18
- 239000000126 substance Substances 0.000 abstract description 2
- 230000032258 transport Effects 0.000 description 9
- 230000007246 mechanism Effects 0.000 description 7
- 239000000463 material Substances 0.000 description 5
- 239000002184 metal Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 210000000078 claw Anatomy 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
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Abstract
Description
本発明は、半導体に用いられるウエハをクリーン室に搬送する場合に異物の侵入を防止しつつ、省スペース化を図るようにしたウエハ搬入装置を提供することを目的とする。
Claims (1)
- 半導体製造装置の中に形成されたクリーン室にウエハを搬入するウエハ搬入装置であって、
前記ウエハを収納し且つ下面側に開口が形成されたウエハ収納空間を有するカバーと、
前記ウエハ収納空間の前記開口を塞ぎ、前記ウエハを上面に載置する底板と、
前記クリーン室の上壁に形成されたウエハ取入口を塞ぎ前記クリーン室内に移動自在な可動手段と、
前記ウエハ取入口の周囲に配置され、前記カバーの下面に密着して前記カバーを固定する固定手段と、
前記可動手段に設けられ、前記底板と前記可動手段との間の密閉空間を吸引して前記可動手段に対して前記底板を吸着させる吸引手段と、
を備えるウエハ搬入装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014121773A JP6340928B2 (ja) | 2014-06-12 | 2014-06-12 | ウエハ搬入装置 |
Applications Claiming Priority (1)
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JP2014121773A JP6340928B2 (ja) | 2014-06-12 | 2014-06-12 | ウエハ搬入装置 |
Publications (2)
Publication Number | Publication Date |
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JP2016001706A true JP2016001706A (ja) | 2016-01-07 |
JP6340928B2 JP6340928B2 (ja) | 2018-06-13 |
Family
ID=55077162
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2014121773A Active JP6340928B2 (ja) | 2014-06-12 | 2014-06-12 | ウエハ搬入装置 |
Country Status (1)
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JP (1) | JP6340928B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7506279B1 (ja) | 2024-01-11 | 2024-06-25 | 株式会社ノリタケカンパニーリミテド | 熱処理装置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0684738A (ja) * | 1991-09-20 | 1994-03-25 | Shinko Electric Co Ltd | 機械式インターフェース装置 |
JPH08172120A (ja) * | 1994-12-16 | 1996-07-02 | Hitachi Ltd | 半導体装置の製造方法および搬送インターフェース装置 |
JP2002184831A (ja) * | 2000-12-11 | 2002-06-28 | Hirata Corp | Foupオープナ |
JP2004063934A (ja) * | 2002-07-31 | 2004-02-26 | Nikon Corp | 収納装置、露光装置、清掃処理方法及び露光方法 |
JP2004311864A (ja) * | 2003-04-10 | 2004-11-04 | Tdk Corp | 半導体処理装置用ロードポート |
-
2014
- 2014-06-12 JP JP2014121773A patent/JP6340928B2/ja active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0684738A (ja) * | 1991-09-20 | 1994-03-25 | Shinko Electric Co Ltd | 機械式インターフェース装置 |
JPH08172120A (ja) * | 1994-12-16 | 1996-07-02 | Hitachi Ltd | 半導体装置の製造方法および搬送インターフェース装置 |
JP2002184831A (ja) * | 2000-12-11 | 2002-06-28 | Hirata Corp | Foupオープナ |
JP2004063934A (ja) * | 2002-07-31 | 2004-02-26 | Nikon Corp | 収納装置、露光装置、清掃処理方法及び露光方法 |
JP2004311864A (ja) * | 2003-04-10 | 2004-11-04 | Tdk Corp | 半導体処理装置用ロードポート |
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