JP2015532261A - 2つのステップで得られる遷移金属窒化物層を用いて少なくとも1つのナノワイヤを成長させる方法 - Google Patents
2つのステップで得られる遷移金属窒化物層を用いて少なくとも1つのナノワイヤを成長させる方法 Download PDFInfo
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- JP2015532261A JP2015532261A JP2015538470A JP2015538470A JP2015532261A JP 2015532261 A JP2015532261 A JP 2015532261A JP 2015538470 A JP2015538470 A JP 2015538470A JP 2015538470 A JP2015538470 A JP 2015538470A JP 2015532261 A JP2015532261 A JP 2015532261A
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- 229910052723 transition metal Inorganic materials 0.000 title claims abstract description 136
- 239000002070 nanowire Substances 0.000 title claims abstract description 98
- 238000000034 method Methods 0.000 title claims abstract description 38
- -1 transition metal nitride Chemical class 0.000 title claims abstract description 27
- 150000003624 transition metals Chemical class 0.000 claims abstract description 111
- 238000005121 nitriding Methods 0.000 claims abstract description 63
- 230000006911 nucleation Effects 0.000 claims abstract description 52
- 238000010899 nucleation Methods 0.000 claims abstract description 52
- 239000000758 substrate Substances 0.000 claims abstract description 48
- 238000000151 deposition Methods 0.000 claims abstract description 30
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 12
- 229910052804 chromium Inorganic materials 0.000 claims abstract description 11
- 229910052720 vanadium Inorganic materials 0.000 claims abstract description 10
- 229910052735 hafnium Inorganic materials 0.000 claims abstract description 9
- 229910052758 niobium Inorganic materials 0.000 claims abstract description 9
- 229910052715 tantalum Inorganic materials 0.000 claims abstract description 9
- 229910052726 zirconium Inorganic materials 0.000 claims abstract description 8
- 229910052750 molybdenum Inorganic materials 0.000 claims abstract description 7
- 239000004065 semiconductor Substances 0.000 claims abstract description 7
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 38
- 239000013078 crystal Substances 0.000 claims description 25
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 22
- 229910052710 silicon Inorganic materials 0.000 claims description 22
- 239000010703 silicon Substances 0.000 claims description 22
- 229910002601 GaN Inorganic materials 0.000 claims description 20
- 229910021529 ammonia Inorganic materials 0.000 claims description 19
- 230000008021 deposition Effects 0.000 claims description 14
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims description 12
- 238000009792 diffusion process Methods 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 230000005693 optoelectronics Effects 0.000 claims description 8
- 229910021350 transition metal silicide Inorganic materials 0.000 claims description 5
- 239000010410 layer Substances 0.000 description 133
- 239000007789 gas Substances 0.000 description 17
- 239000010955 niobium Substances 0.000 description 13
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 11
- 239000011651 chromium Substances 0.000 description 10
- 239000000463 material Substances 0.000 description 10
- 239000010936 titanium Substances 0.000 description 10
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- 230000015572 biosynthetic process Effects 0.000 description 7
- 230000008901 benefit Effects 0.000 description 6
- 239000012159 carrier gas Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 229910021332 silicide Inorganic materials 0.000 description 6
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 6
- 238000000137 annealing Methods 0.000 description 5
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 5
- 238000001465 metallisation Methods 0.000 description 5
- 150000004767 nitrides Chemical class 0.000 description 5
- 229910052757 nitrogen Inorganic materials 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000002441 X-ray diffraction Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- 229910019974 CrSi Inorganic materials 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 2
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- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000000407 epitaxy Methods 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 238000002513 implantation Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 238000005036 potential barrier Methods 0.000 description 2
- 230000002829 reductive effect Effects 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- 229910000807 Ga alloy Inorganic materials 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 229910020010 Nb—Si Inorganic materials 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- CHXGWONBPAADHP-UHFFFAOYSA-N [Si].[Si].[Cr] Chemical group [Si].[Si].[Cr] CHXGWONBPAADHP-UHFFFAOYSA-N 0.000 description 1
- SJKRCWUQJZIWQB-UHFFFAOYSA-N azane;chromium Chemical compound N.[Cr] SJKRCWUQJZIWQB-UHFFFAOYSA-N 0.000 description 1
- GPBUGPUPKAGMDK-UHFFFAOYSA-N azanylidynemolybdenum Chemical compound [Mo]#N GPBUGPUPKAGMDK-UHFFFAOYSA-N 0.000 description 1
- CFJRGWXELQQLSA-UHFFFAOYSA-N azanylidyneniobium Chemical compound [Nb]#N CFJRGWXELQQLSA-UHFFFAOYSA-N 0.000 description 1
- SKKMWRVAJNPLFY-UHFFFAOYSA-N azanylidynevanadium Chemical compound [V]#N SKKMWRVAJNPLFY-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- GPPXJZIENCGNKB-UHFFFAOYSA-N vanadium Chemical compound [V]#[V] GPPXJZIENCGNKB-UHFFFAOYSA-N 0.000 description 1
- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
- ZVWKZXLXHLZXLS-UHFFFAOYSA-N zirconium nitride Chemical compound [Zr]#N ZVWKZXLXHLZXLS-UHFFFAOYSA-N 0.000 description 1
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Abstract
Description
Claims (13)
- 少なくとも1つの半導体ナノワイヤ(3)を成長させる方法において、
基板(1)上にナノワイヤ(3)の成長のための核生成層(2)を形成するステップと、ナノワイヤ(3)を成長させるステップとを有し、前記核生成層(2)を形成するステップは、
前記基板(1)上にTi、V、Cr、Zr、Nb、Mo、Hf、Taから選択される遷移金属の層(4)を堆積させるステップと、
前記遷移金属の層の少なくとも一部(2)を窒化し、前記ナノワイヤ(3)を成長させることを意図した表面を有する遷移金属窒化物層を形成するステップとを含む方法。 - 前記遷移金属層(4)の窒化のステップが実行されることによって、前記遷移金属層の結晶構造の少なくとも一部が、面心立方格子構造、特に方向[111]、又は六方格子構造、特に方向[0001]、又は遷移金属窒化物層に関連する軸「C」の方向に沿って配向するように変更される請求項1記載の方法。
- 前記窒化ステップは、
第1の流量で窒化ガスを注入することによって少なくとも部分的に第1の温度で実行される第1の窒化サブステップ(En1)と、
前記第1の流量と異なる又は等しい第2の流量で窒化ガスを注入し、少なくとも部分的に前記第1の温度以下の第2の温度で実行される第2の窒化サブステップ(En2)とを含む請求項1又は2記載の方法。 - 前記注入される窒化ガスは、アンモニアであり、
前記第1の温度は、1000℃乃至1050℃、特に1050℃であり、
対応する窒化チャンバの総容積をリットルで表した値をVとして、
前記第1の流量は、500*V/8sccm乃至2500*V/8sccm、特に1600*V/8sccmであり、
前記第2の温度は、950℃乃至1050℃、特に1000℃であり、
前記第2の流量は、500*V/8sccm乃至2500*V/8sccm、特に500*V/8sccmである請求項3記載の方法。 - 前記窒化ステップは、
第1の流量で窒化ガスを注入することによって少なくとも部分的に第1の温度で実行される第1の窒化サブステップ(En1)と、
前記第1の流量と異なる又は等しい第2の流量で窒化ガスを注入し、少なくとも部分的に前記第1の温度以上の第2の温度で実行される第2の窒化サブステップ(En2)とを含む請求項1又は2記載の方法。 - 前記窒化ステップは、50mbar乃至800mbar、特に100mbarの圧力に調整された窒化チャンバで実行される請求項3乃至5何れか1項記載の方法。
- 前記ナノワイヤ(3)の成長ステップは、前記第2の窒化サブステップ(En2)の後に実行され、又は前記第2の窒化サブステップ(En2)の間に開始される請求項3乃至6何れか1項記載の方法。
- 前記ナノワイヤ(3)の成長ステップは、Gaを注入し、窒化ガリウムナノワイヤを形成するステップを含み、前記ナノワイヤ(3)は、前記核生成層(2)の成長表面から延び出す請求項1乃至7何れか1項記載の方法。
- 前記基板(1)は、シリコンであり、前記遷移金属層を堆積させるステップは、前記堆積される遷移金属層への前記シリコンの相互拡散が10nmより小さくなるように、及び/又は少なくとも2nmの前記遷移金属層の非珪化スライスが残存するように構成される請求項1乃至8何れか1項記載の方法。
- 前記堆積される遷移金属は、Cr、V及びTiから選択され、前記遷移金属は、100℃未満の温度で堆積される請求項1乃至9何れか1項記載の方法。
- 前記基板は、シリコン系の基板であり、
前記遷移金属層(4)を堆積させるステップは、前記堆積させる遷移金属層(4)の厚さを決定する予備的ステップを含み、前記予備的ステップは、
使用される前記遷移金属及び堆積温度の関数として、前記遷移金属層(4)の将来の堆積の間の前記遷移金属層(4)へのシリコンの第1の拡散距離を判定するステップと、
将来の前記遷移金属層(4)の窒化のステップの間の前記遷移金属層(4)へのシリコンの第2の拡散距離を判定するステップとを含み、
前記堆積される遷移金属窒化物層の厚さは、前記遷移金属層(4)の所望の厚さと、前記判定された第1及び第2の拡散距離から将来の前記遷移金属層(4)に生じる遷移金属の珪化スライスの厚さとに基づいて決定される請求項1乃至10何れか1項記載の方法。 - 前記遷移金属層の堆積ステップ及び窒化ステップは、前記成長ステップの前に行われる請求項1乃至11何れか1項記載の方法。
- 光電子デバイスを製造する方法において、
請求項1乃至12何れか1項記載の成長方法を実行するステップと、
前記基板(1)の反対側の前記ナノワイヤ(3)の少なくとも1つの端部(3a)に第1のタイプの電気的ドーピングを行うステップと、
前記基板(1)の反対側の前記ナノワイヤ(3)の端部(3a)に、前記第1のタイプとは逆の第2のタイプに電気的にドーピングされた要素(9)を形成するステップとを有する方法。
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PCT/EP2013/072424 WO2014064263A2 (fr) | 2012-10-26 | 2013-10-25 | Procede de croissance d'au moins un nanofil a partir d'une couche d'un metal de transition nitrure obtenue en deux etapes |
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Publication number | Publication date |
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US10636653B2 (en) | 2020-04-28 |
KR102134495B1 (ko) | 2020-07-15 |
EP3719849A3 (fr) | 2021-02-24 |
KR20150082341A (ko) | 2015-07-15 |
BR112015009308A2 (pt) | 2017-07-04 |
JP6367208B2 (ja) | 2018-08-01 |
CN104871317A (zh) | 2015-08-26 |
FR2997420B1 (fr) | 2017-02-24 |
EP2912692B1 (fr) | 2020-06-03 |
WO2014064263A2 (fr) | 2014-05-01 |
US9698011B2 (en) | 2017-07-04 |
EP3739634A1 (fr) | 2020-11-18 |
BR112015009308B1 (pt) | 2022-02-22 |
EP3719849A2 (fr) | 2020-10-07 |
US20140120637A1 (en) | 2014-05-01 |
EP2912692A2 (fr) | 2015-09-02 |
FR2997420A1 (fr) | 2014-05-02 |
US20150279672A1 (en) | 2015-10-01 |
CN104871317B (zh) | 2018-09-18 |
WO2014064263A3 (fr) | 2014-07-17 |
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