JP2015524358A5 - - Google Patents
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- Publication number
- JP2015524358A5 JP2015524358A5 JP2015525533A JP2015525533A JP2015524358A5 JP 2015524358 A5 JP2015524358 A5 JP 2015524358A5 JP 2015525533 A JP2015525533 A JP 2015525533A JP 2015525533 A JP2015525533 A JP 2015525533A JP 2015524358 A5 JP2015524358 A5 JP 2015524358A5
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- main surface
- diamond
- abrasive
- major surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005498 polishing Methods 0.000 claims 16
- 238000005296 abrasive Methods 0.000 claims 11
- 229910003460 diamond Inorganic materials 0.000 claims 7
- 239000010432 diamond Substances 0.000 claims 7
- 239000000969 carrier Substances 0.000 claims 3
- 239000011248 coating agent Substances 0.000 claims 2
- 238000000576 coating method Methods 0.000 claims 2
- 229910052799 carbon Inorganic materials 0.000 claims 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- 239000000919 ceramic Substances 0.000 claims 1
- 239000011521 glass Substances 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
Claims (6)
- 第1の研磨要素と、
第2の研磨要素と、
第1主表面及び第2主表面を有する弾性要素と、
キャリアと、を備え、
前記第1の研磨要素及び前記第2の研磨要素が、第1主表面及び第2主表面をそれぞれ備え、
前記第1の研磨要素及び前記第2の研磨要素の少なくとも前記第1主表面が、複数の精密に成形された構造部を備え、
前記研磨要素が、実質的に無機のモノリシック構造を備える、研磨物品。 - 前記無機のモノリシック構造が、99重量%の炭化物セラミックスである、請求項1に記載の研磨物品。
- 精密に成形された構造部を有する前記第1の要素及び前記第2の要素のそれぞれが、前記構造部高さの約20%未満の構造部不均一性を有する、請求項1に記載の研磨物品。
- 研磨物品を作製する方法であって、
第1の研磨要素及び第2の研磨要素を準備する工程であって、前記第1の研磨要素及び前記第2の研磨要素のそれぞれが、第1主表面及び第2主表面を備え、少なくとも前記第1主表面が、複数の精密に成形された構造部を備える工程と、
前記第1の研磨要素及び前記第2の研磨要素の前記第1主表面を、位置合わせプレートと接触させて定置する工程と、
第1主表面及び第2主表面を有する弾性要素を準備する工程と、
前記弾性要素の前記第1主表面を、前記研磨要素の前記第2主表面に固定する工程と、
締結要素を準備する工程と、
前記締結要素によって、前記弾性要素の前記第2主表面をキャリアに固定する工程と、を含み、
D0の共通の最大設計構造部高さを有する、全ての前記研磨要素上の構造部の集合的グループが、前記構造部高さの約20%未満の非共平面性を有する、方法。 - 第1の研磨要素と、
第2の研磨要素と、
第1主表面及び第2主表面を有する弾性要素と、
キャリアと、を備え、
前記第1の研磨要素及び前記第2の研磨要素が、第1主表面及び第2主表面をそれぞれ備え、
前記第1の研磨要素及び前記第2の研磨要素の少なくとも前記第1主表面が、ダイヤモンドコーティングを有する、複数の精密に成形された構造部を備え、
前記研磨要素が、実質的に無機のモノリシック構造を備える、研磨物品。 - 前記ダイヤモンドコーティングが、ダイヤモンド、ドープダイヤモンド、ダイヤモンド状炭素、ダイヤモンド状ガラス、多結晶ダイヤモンド、微結晶ダイヤモンド、ナノ結晶ダイヤモンド、及びこれらの組み合わせのうちの1つから選択される、請求項5に記載の研磨物品。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201261678666P | 2012-08-02 | 2012-08-02 | |
US61/678,666 | 2012-08-02 | ||
PCT/US2013/052834 WO2014022465A1 (en) | 2012-08-02 | 2013-07-31 | Abrasive articles with precisely shaped features and method of making thereof |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2015524358A JP2015524358A (ja) | 2015-08-24 |
JP2015524358A5 true JP2015524358A5 (ja) | 2016-09-23 |
JP6715006B2 JP6715006B2 (ja) | 2020-07-01 |
Family
ID=50028491
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015525533A Active JP6715006B2 (ja) | 2012-08-02 | 2013-07-31 | 精密に成形された構造部を有する研磨物品及びその作製方法 |
Country Status (8)
Country | Link |
---|---|
US (2) | US10710211B2 (ja) |
EP (1) | EP2879838B1 (ja) |
JP (1) | JP6715006B2 (ja) |
KR (1) | KR102089383B1 (ja) |
CN (1) | CN104736299A (ja) |
SG (1) | SG11201500802TA (ja) |
TW (1) | TWI695756B (ja) |
WO (1) | WO2014022465A1 (ja) |
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-
2013
- 2013-07-31 US US14/418,959 patent/US10710211B2/en active Active
- 2013-07-31 SG SG11201500802TA patent/SG11201500802TA/en unknown
- 2013-07-31 KR KR1020157004847A patent/KR102089383B1/ko active IP Right Grant
- 2013-07-31 CN CN201380041063.5A patent/CN104736299A/zh active Pending
- 2013-07-31 EP EP13825436.2A patent/EP2879838B1/en active Active
- 2013-07-31 WO PCT/US2013/052834 patent/WO2014022465A1/en active Application Filing
- 2013-07-31 JP JP2015525533A patent/JP6715006B2/ja active Active
- 2013-08-01 TW TW102127668A patent/TWI695756B/zh active
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2020
- 2020-06-05 US US16/946,089 patent/US11697185B2/en active Active
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