JP2015517200A - 薄膜トランジスター機器上にケイ素含有膜を製造する方法 - Google Patents
薄膜トランジスター機器上にケイ素含有膜を製造する方法 Download PDFInfo
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- JP2015517200A JP2015517200A JP2014561148A JP2014561148A JP2015517200A JP 2015517200 A JP2015517200 A JP 2015517200A JP 2014561148 A JP2014561148 A JP 2014561148A JP 2014561148 A JP2014561148 A JP 2014561148A JP 2015517200 A JP2015517200 A JP 2015517200A
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- silicon
- silane
- film
- deposition
- chemical vapor
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- 239000010408 film Substances 0.000 title claims abstract description 345
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 100
- 239000010703 silicon Substances 0.000 title claims abstract description 100
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 98
- 239000010409 thin film Substances 0.000 title claims abstract description 27
- 238000004519 manufacturing process Methods 0.000 title abstract description 8
- 238000000034 method Methods 0.000 claims abstract description 131
- 239000002243 precursor Substances 0.000 claims abstract description 83
- 238000005229 chemical vapour deposition Methods 0.000 claims abstract description 58
- UCXUKTLCVSGCNR-UHFFFAOYSA-N diethylsilane Chemical compound CC[SiH2]CC UCXUKTLCVSGCNR-UHFFFAOYSA-N 0.000 claims abstract description 58
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims abstract description 51
- 238000000231 atomic layer deposition Methods 0.000 claims abstract description 30
- AQRLNPVMDITEJU-UHFFFAOYSA-N triethylsilane Chemical compound CC[SiH](CC)CC AQRLNPVMDITEJU-UHFFFAOYSA-N 0.000 claims abstract description 30
- 238000005137 deposition process Methods 0.000 claims abstract description 24
- 125000004122 cyclic group Chemical group 0.000 claims abstract description 17
- 150000001343 alkyl silanes Chemical class 0.000 claims abstract description 11
- 238000007740 vapor deposition Methods 0.000 claims abstract description 3
- 238000000151 deposition Methods 0.000 claims description 102
- 230000008021 deposition Effects 0.000 claims description 78
- 229910052760 oxygen Inorganic materials 0.000 claims description 50
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 44
- 239000001301 oxygen Substances 0.000 claims description 44
- 229910052739 hydrogen Inorganic materials 0.000 claims description 31
- 239000001257 hydrogen Substances 0.000 claims description 30
- 238000006243 chemical reaction Methods 0.000 claims description 29
- 229910044991 metal oxide Inorganic materials 0.000 claims description 29
- 150000004706 metal oxides Chemical class 0.000 claims description 29
- 229910052757 nitrogen Inorganic materials 0.000 claims description 20
- 125000000217 alkyl group Chemical group 0.000 claims description 19
- 230000015556 catabolic process Effects 0.000 claims description 18
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 16
- 125000003118 aryl group Chemical group 0.000 claims description 13
- -1 diethylisopropyl Chemical group 0.000 claims description 13
- 125000003342 alkenyl group Chemical group 0.000 claims description 12
- 125000000304 alkynyl group Chemical group 0.000 claims description 12
- 125000006165 cyclic alkyl group Chemical group 0.000 claims description 11
- 230000005684 electric field Effects 0.000 claims description 11
- 229910000077 silane Inorganic materials 0.000 claims description 11
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims description 10
- 229910002091 carbon monoxide Inorganic materials 0.000 claims description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 10
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 9
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 8
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 4
- 239000001569 carbon dioxide Substances 0.000 claims description 4
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 4
- IWKGLSFHHONSJB-UHFFFAOYSA-N bis(2-methylbutan-2-yl)silane Chemical compound CCC(C)(C)[SiH2]C(C)(C)CC IWKGLSFHHONSJB-UHFFFAOYSA-N 0.000 claims description 3
- CIDUUVWYLCAUFO-UHFFFAOYSA-N bis(2-methylpropyl)silane Chemical compound CC(C)C[SiH2]CC(C)C CIDUUVWYLCAUFO-UHFFFAOYSA-N 0.000 claims description 3
- IRRVTIDUSZWLNF-UHFFFAOYSA-N cyclopentylsilane Chemical compound [SiH3]C1CCCC1 IRRVTIDUSZWLNF-UHFFFAOYSA-N 0.000 claims description 3
- DJODXBLSFLZTSN-UHFFFAOYSA-N di(butan-2-yl)silane Chemical compound CCC(C)[SiH2]C(C)CC DJODXBLSFLZTSN-UHFFFAOYSA-N 0.000 claims description 3
- DEHCLLRUWOGPJR-UHFFFAOYSA-N di(propan-2-yl)silane Chemical compound CC(C)[SiH2]C(C)C DEHCLLRUWOGPJR-UHFFFAOYSA-N 0.000 claims description 3
- ZLKSBZCITVUTSN-UHFFFAOYSA-N ditert-butylsilane Chemical compound CC(C)(C)[SiH2]C(C)(C)C ZLKSBZCITVUTSN-UHFFFAOYSA-N 0.000 claims description 3
- PARWUHTVGZSQPD-UHFFFAOYSA-N phenylsilane Chemical compound [SiH3]C1=CC=CC=C1 PARWUHTVGZSQPD-UHFFFAOYSA-N 0.000 claims description 3
- ICMAQZNWLUHPMK-UHFFFAOYSA-N tert-butyl(diethyl)silane Chemical compound CC[SiH](CC)C(C)(C)C ICMAQZNWLUHPMK-UHFFFAOYSA-N 0.000 claims description 3
- LLLCCVMWJWCXHH-UHFFFAOYSA-N tert-butyl(dipropyl)silane Chemical compound CCC[SiH](CCC)C(C)(C)C LLLCCVMWJWCXHH-UHFFFAOYSA-N 0.000 claims description 3
- XGZIBBIQQCAYDT-UHFFFAOYSA-N tri(butan-2-yl)silane Chemical compound CCC(C)[SiH](C(C)CC)C(C)CC XGZIBBIQQCAYDT-UHFFFAOYSA-N 0.000 claims description 3
- YDJXDYKQMRNUSA-UHFFFAOYSA-N tri(propan-2-yl)silane Chemical compound CC(C)[SiH](C(C)C)C(C)C YDJXDYKQMRNUSA-UHFFFAOYSA-N 0.000 claims description 3
- LHPXCGYDDXQHSF-UHFFFAOYSA-N tris(2-methylbutan-2-yl)silane Chemical compound CCC(C)(C)[SiH](C(C)(C)CC)C(C)(C)CC LHPXCGYDDXQHSF-UHFFFAOYSA-N 0.000 claims description 3
- BORQTRQJFUNMBC-UHFFFAOYSA-N tris(2-methylpropyl)silane Chemical compound CC(C)C[SiH](CC(C)C)CC(C)C BORQTRQJFUNMBC-UHFFFAOYSA-N 0.000 claims description 3
- 150000002431 hydrogen Chemical class 0.000 claims 4
- 230000009977 dual effect Effects 0.000 claims 3
- UNWUYTNKSRTDDC-UHFFFAOYSA-N tert-butylsilane Chemical compound CC(C)(C)[SiH3] UNWUYTNKSRTDDC-UHFFFAOYSA-N 0.000 claims 2
- 230000008569 process Effects 0.000 abstract description 72
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 63
- 229910004298 SiO 2 Inorganic materials 0.000 description 46
- 229910052814 silicon oxide Inorganic materials 0.000 description 35
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 29
- 239000000758 substrate Substances 0.000 description 29
- 239000000203 mixture Substances 0.000 description 26
- 230000000694 effects Effects 0.000 description 23
- 239000000463 material Substances 0.000 description 21
- 239000007789 gas Substances 0.000 description 19
- 238000012545 processing Methods 0.000 description 18
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 16
- 230000001965 increasing effect Effects 0.000 description 15
- 239000007788 liquid Substances 0.000 description 13
- 239000000377 silicon dioxide Substances 0.000 description 13
- 239000000126 substance Substances 0.000 description 13
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 12
- 235000012239 silicon dioxide Nutrition 0.000 description 12
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 11
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 10
- 229910052799 carbon Inorganic materials 0.000 description 10
- 229910052581 Si3N4 Inorganic materials 0.000 description 9
- 229910002808 Si–O–Si Inorganic materials 0.000 description 9
- 238000000137 annealing Methods 0.000 description 9
- 230000008859 change Effects 0.000 description 9
- 239000003153 chemical reaction reagent Substances 0.000 description 9
- 238000009413 insulation Methods 0.000 description 9
- 230000007246 mechanism Effects 0.000 description 9
- 238000010926 purge Methods 0.000 description 9
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 9
- 238000011282 treatment Methods 0.000 description 9
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 8
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 8
- 239000012528 membrane Substances 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 8
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 8
- 238000012360 testing method Methods 0.000 description 8
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 7
- 238000010521 absorption reaction Methods 0.000 description 7
- 238000001678 elastic recoil detection analysis Methods 0.000 description 7
- 238000005530 etching Methods 0.000 description 7
- 229910010271 silicon carbide Inorganic materials 0.000 description 7
- 230000035882 stress Effects 0.000 description 7
- 125000001424 substituent group Chemical group 0.000 description 7
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 6
- 238000004458 analytical method Methods 0.000 description 6
- 125000004432 carbon atom Chemical group C* 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- 238000000354 decomposition reaction Methods 0.000 description 6
- 230000003247 decreasing effect Effects 0.000 description 6
- 125000000524 functional group Chemical group 0.000 description 6
- 238000005001 rutherford backscattering spectroscopy Methods 0.000 description 6
- 229910020781 SixOy Inorganic materials 0.000 description 5
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 5
- 125000003545 alkoxy group Chemical group 0.000 description 5
- 229910021529 ammonia Inorganic materials 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 5
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 5
- 239000011261 inert gas Substances 0.000 description 5
- 239000012212 insulator Substances 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 238000004151 rapid thermal annealing Methods 0.000 description 5
- 241000894007 species Species 0.000 description 5
- 235000012431 wafers Nutrition 0.000 description 5
- 229910052786 argon Inorganic materials 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 238000003795 desorption Methods 0.000 description 4
- 239000003989 dielectric material Substances 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 4
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- 238000009832 plasma treatment Methods 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- 238000001179 sorption measurement Methods 0.000 description 4
- 238000001157 Fourier transform infrared spectrum Methods 0.000 description 3
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 3
- 229910018557 Si O Inorganic materials 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
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- 238000005452 bending Methods 0.000 description 3
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- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 3
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- 125000004430 oxygen atom Chemical group O* 0.000 description 3
- 239000000523 sample Substances 0.000 description 3
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Inorganic materials [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 3
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- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 2
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Abstract
Description
本特許出願は、2012年3月9日に出願された米国仮特許出願第61/608,955号明細書に基づく優先権を主張する。
Si−OR+Si−OH→Si−O−Si+R−OH
Si−OH+Si−OH−→Si−O−Si+H2O
スタウトらは、例えば低温堆積プロセスのように、最後の反応が完全に起こらない場合、Si(OR)n(OH)4−n分子種が発生する可能性があることを示している。したがって、得られた膜は、Si−OH結合を含有することがある。
以下の実施例では、特に別の指定がなければ、特性は、中抵抗(8−12Ωcm)の単結晶シリコンウエハー基材上に堆積されたサンプル膜から得られた。全ての堆積は、Advanced Energy 2000 RF発生器を取り付けた200mmのDXZチャンバー内でApplied Materials Precision 5000システム上で、TEOSプロセスキットを用いて行われた。PECVDチャンバーは、直接液体注入供給能力を備えている。すべての前駆体は、送達温度が前駆体の沸点に依存する液体であった。特に別の指定がなければ、典型的な前駆体流量は、25〜150sccmで、プラズマ電力密度は0.5〜3W/cm2で、圧力は0.75〜12torrであった。厚さと648nmでの屈折率(RI)は、反射率計によって測定した。すべての膜測定値(誘電率、絶縁破壊電界、およびリーク電流が提示される)について、水銀プローブが使用された。X線光電子分光法(XPS)およびラザフォード後方散乱法(RBS)/水素前方散乱法(HFS)を行って、膜組成を決定した。水素前方散乱法(HFS)を使用して、膜中の水素含有量を定量した。
酸化ケイ素膜は、ケイ素前駆体2ESと3ESから堆積された。SiO2膜は、上記の一般的な堆積条件を使用して、異なる温度およびプロセス条件で堆積された。BL−1およびBL−2条件は、前駆体流速を除いて同一である。BL−1のプロセスは、より速い前駆体流速のために最も速い堆積速度を有しているが、これが、ゲート絶縁層のための最も重要な基準ではない。BL−3は低圧条件であり、一般的により貧弱な膜を提供する。真に優れた品質の膜を製造することができるかどうかを理解するために、前駆体間で同量のSi原料が比較された。図1Aおよび2Aに見られるように、BL−2工程では膜>200nmについて一般的により高い密度(>2.2g/cc)が得られ、図1B、2Bに見られるように、BL−3工程ではわずかに低い密度(〜2.2g/cc)が得られた。BL−1プロセス条件では、密度がBL−2とBL−3のプロセス条件の密度との間にあると予想されたため、さらに詳細には調べなかった。
SiO2膜は、一般的堆積条件と表1中の上記プロセス条件を使用して堆積された。図1Cと1Dにおいて、異なる厚さを有するTEOS堆積酸化ケイ素膜は、表1で上記の同じBL−2プロセス条件およびBL−3プロセス条件で堆積された。図1Cを参照すると、同じ堆積温度(図1Aと図2Aとを参照)でBL−2を使用して堆積された2ES膜および3ES膜と比較すると、200℃のような低い堆積温度では、TEOS堆積膜は、一般的に2ES膜または3ES膜より低い密度を有した。図1Dのデータを図1Bと2B中の2ES膜および3ES膜についてのデータと比較すると、同じ堆積温度について、同様の効果が観察された。2ES膜および3ES膜は一般に、より薄い膜について同等かまたはより高い密度を示した。一般に、TEOS膜の密度は、両方のプロセス条件で、<200nm膜について<2.2g/ccまで低下する。
以下に要約される実験計画(DOE)法を使用して、3ES酸化ケイ素膜のためのプロセス条件をスクリーニングした:10〜200sccmの前駆体流速;100〜1000sccmのO2/He流速、0.75〜10torrの圧力;0〜100Wの低周波(LF)電力;および25〜350℃の範囲の堆積温度。どのプロセスパラメータが、表示機器でゲート絶縁層として使用される最適な膜を製造するかを調べるために、DOE実験を使用した。
2ES酸化ケイ素膜のためのプロセス条件を、以下に要約される実験計画(DOE)法を使用してスクリーニングした:典型的な前駆体流速は25〜150sccmであり、プラズマ電力密度は0.5〜3W/cm2であり、圧力は0.75〜12torrであった。
本例は、3ESを使用する薄い高密度のSiO2膜の堆積が広いプロセスウィンドウを提供することを証明するために使用される。表4は、2種類の3ES堆積されたSiO2膜のプロセス条件と、異なる前駆体流速(29sccmと68sccm)での膜特性とを提供する。表は広範囲の堆積速度を示すが、高密度膜が得られた。
膜中の炭素濃度を調べるために、XPSが使用される。表面でおよび50nmスパッタリング後に、相対的原子パーセントが測定される。表5は、100℃と150℃で堆積された2種類の3ES膜のプロセス条件と膜特性を示す。表6は、膜のXPSデータを提供する。バルク膜中に炭素は検出されず、膜のO/Si比は2.0に非常に近く、または化学量論的であった。
最適化された低温酸化物は、表7aと7bおよび図11に示されるように良好な安定性を有する。表7aと7bは、3ESにより堆積したいくつかのSiO2膜の空気中で3週間後のk値の変化を示す。表7a中の膜は3週間後も非常に安定(2.5%未満のk値の変化)であるが、表7b中のものはあまり安定ではない(3〜20%のk値の変化)。表7a中の膜の平均密度は、表7b中のものより高く、これは安定性に一致する。従って最適化された膜は、非常に薄くても良好な安定性を有する。一般に、密度とk安定性との間にある傾向が見られ、最大密度(2.28g/cc)の膜はk値の0%変化を示し、<2.23g/cm3を有する膜はk値の顕著な変化(>3%)を示す。
Claims (26)
- 金属酸化物を含む機器の少なくとも1つの表面上にケイ素含有膜を堆積させる方法であって、
反応チャンバー中に該機器の該少なくとも1つの表面を提供する工程と、
式R1R2R3SiH(式中、R1は、C1〜10の直鎖または分枝アルキル基、C4〜C10の環状アルキル基、C3〜C12のアルケニル基、C3〜C12のアルキニル基、およびC6〜C10のアリール基からなる群から選択され、R2およびR3は、水素、C1〜10の直鎖または分枝アルキル基、C4〜C10の環状アルキル基、C3〜C12のアルケニル基、C3〜C12のアルキニル基、およびC6〜C10のアリール基から独立して選択され、そしてR2およびR3が水素でない場合、R2およびR3のいずれか1つとR1とは結合して環を形成できる。)を有するアルキルシラン前駆体を該反応チャンバー中に導入する工程と、
該反応チャンバー中に酸素源を導入する工程と、
25℃〜400℃の範囲の1つまたは2つ以上の反応温度において該機器の該少なくとも1つの表面上に該ケイ素含有膜を堆積プロセスにより堆積させる工程と、
を含み、
該ケイ素含有膜が、約2nm〜約200nmの範囲の厚さおよび約2.2g/cm3以上の密度を含み、
該堆積プロセスが、化学気相堆積(CVD)、プラズマ増強化学気相堆積(PECVD)、サイクリック化学気相堆積(CCVD)、プラズマ増強サイクリック化学気相堆積(PECCVD)、原子層堆積(ALD)、およびプラズマ増強原子層堆積(PEALD)からなる群から選択される、方法。 - 該機器が、ゲート電極をさらに含む、請求項1に記載の方法。
- 該アルキルシラン前駆体が、ジエチルシラン、ジ(tert−ブチル)シラン、ジ(イソプロピル)シラン、ジ(sec−ブチル)シラン、ジ(イソブチル)シラン、ジ(tert−アミル)シラン、トリエチルシラン、トリ(tert−ブチル)シラン、トリ(イソプロピル)シラン、トリ(sec−ブチル)シラン、トリ(イソブチル)シラン、トリ(tert−アミル)シラン、tert−ブチルジエチルシラン、tert−ブチルジロピルシラン、ジエチルイソプロピルシラン、シクロペンチルシラン、フェニルシラン、およびそれらの組み合わせからなる群から選択される、請求項1に記載の方法。
- 該酸素源が、水(H2O)、酸素(O2)、酸素プラズマ、オゾン(O3)、NO、N2O、一酸化炭素(CO)、二酸化炭素(CO2)およびそれらの組み合わせからなる群から選択される、請求項1に記載の方法。
- 該1つまたは2つ以上の反応温度が、約100℃〜約300℃の範囲である、請求項1に記載の方法。
- 該堆積プロセスが、プラズマ増強化学気相堆積(PECVD)である、請求項1に記載の方法。
- 該堆積プロセスが、デュアルのRF周波数源を用いたプラズマ増強化学気相堆積(PECVD)である、請求項1に記載の方法。
- 約2nm〜約200nmの厚さおよび約2.2g/cm3以上の密度を含むケイ素含有膜であって、
このケイ素を含有する薄膜が、化学気相堆積(CVD)、プラズマ増強化学気相堆積(PECVD)、サイクリック化学気相堆積(CCVD)、プラズマ増強サイクリック化学気相堆積(PECCVD)、原子層堆積(ALD)、およびプラズマ増強原子層堆積(PEALD)からなる群から選択された堆積プロセスによって堆積され、そして
該堆積プロセスがジエチルシラン、トリエチルシラン、およびそれらの組み合わせからなる群から選択されるアルキルシラン前駆体を使用して、約25℃〜約400℃の範囲の1つまたは2つ以上の温度において行われる、ケイ素含有膜。 - 該1つまたは2つ以上の温度が、約150℃〜約325℃の範囲である、請求項8に記載のケイ素含有膜。
- 該堆積プロセスが、プラズマ増強化学気相堆積(PECVD)である、請求項8に記載のケイ素含有膜。
- 該堆積プロセスが、デュアルのRF周波数源を用いたプラズマ増強化学気相堆積(PECVD)である、請求項8に記載のケイ素含有膜。
- 該アルキルシラン前駆体が、ジエチルシランを含む、請求項8に記載のケイ素含有膜。
- 該アルキルシラン前駆体が、トリエチルシランを含む、請求項8に記載のケイ素含有膜。
- 該密度が、少なくとも2.25g/cm3以上である、請求項8に記載のケイ素含有膜。
- 約5原子%以下の水素含有量を含む、請求項8に記載のケイ素含有膜。
- 該ケイ素含有膜が、約1.9〜約2.1の範囲のO/Si比を有する、請求項8に記載のケイ素含有膜。
- 薄膜トランジスター機器中の少なくとも1つの表面上にケイ素含有膜を堆積させる方法であって、
反応チャンバー中に該薄膜トランジスターの該少なくとも1つの表面を提供する工程と、
式:R1R2R3SiH(式中、R1は、C1〜10の直鎖または分枝アルキル基、C4〜C10の環状アルキル基、C3〜C12のアルケニル基;C3〜C12のアルキニル基、およびC6〜C10のアリール基からなる群から選択され、R2およびR3は、水素、C1〜10の直鎖または分枝アルキル基、C4〜C10の環状アルキル基、C3〜C12のアルケニル基、C3〜C12のアルキニル基およびC6〜C10のアリール基から独立して選択され、そしてR2およびR3が水素でない場合、R2およびR3のいずれか1つとR1とは結合して環を形成できる。)を有するアルキルシラン前駆体を該反応チャンバー中に導入する工程と、
該反応チャンバー中に酸素源を導入する工程と、
25℃〜400℃の範囲の1つまたは2つ以上の反応温度において、該薄膜トランジスター機器の該少なくとも1つの表面上に該ケイ素含有膜を、蒸着を介して堆積させる工程と、
を含み、
該ケイ素含有膜が、約2nm〜約200nmの範囲の厚さおよび約2.2g/cm3以上の密度を含み、
該堆積させる工程が、化学気相堆積(CVD)、プラズマ増強化学気相堆積(PECVD)、サイクリック化学気相堆積(CCVD)、プラズマ増強サイクリック化学気相堆積(PECCVD)、原子層堆積(ALD)、およびプラズマ増強原子層堆積(PEALD)からなる群から選択される、方法。 - 該アルキルシラン前駆体が、ジエチルシラン、ジ(tert−ブチル)シラン、ジ(イソプロピル)シラン、ジ(sec−ブチル)シラン、ジ(イソブチル)シラン、ジ(tert−アミル)シラン、トリエチルシラン、トリ(tert−ブチル)シラン、トリ(イソプロピル)シラン、トリ(sec−ブチル)シラン、トリ(イソブチル)シラン、トリ(tert−アミル)シラン、tert−ブチルジエチルシラン、tert−ブチルジロピルシラン、ジエチルイソプロピルシラン、シクロペンチルシラン、フェニルシラン、およびそれらの組み合わせからなる群から選択される、請求項17に記載の方法。
- 該酸素源が、水(H2O)、酸素(O2)、酸素プラズマ、オゾン(O3)、NO、N2O、一酸化炭素(CO)、二酸化炭素(CO2)およびそれらの組み合わせからなる群から選択される、請求項17に記載の方法。
- 該1つまたは2つ以上の温度が、約100℃〜325℃の範囲である、請求項17に記載の方法。
- 該堆積させる工程が、プラズマ増強化学気相堆積(PECVD)を含む、請求項17に記載の方法。
- 該堆積させる工程が、デュアルのRF周波数源を用いたプラズマ増強化学気相堆積(PECVD)を含む、請求項21に記載の方法。
- 該アルキルシラン前駆体が、ジエチルシラン、トリエチルシラン、およびそれらの組み合わせからなる群から選択される、請求項17に記載の方法。
- 該ケイ素含有層が、薄膜トランジスター機器中のゲート絶縁層である、請求項17に記載の方法。
- 該ケイ素含有膜が、6MV/cmより下の電界において10−7A/cm2未満のリーク電流を有し、そして7MV/cm超の絶縁破壊電圧を有する、請求項16に記載の方法。
- 該ケイ素含有膜が、約1.9〜約2.1の範囲のO/Si比を有する、請求項17に記載の方法。
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KR101996942B1 (ko) | 2019-07-05 |
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