JP2015119531A - リニアモータを備えた直線駆動装置を有する工作機械 - Google Patents
リニアモータを備えた直線駆動装置を有する工作機械 Download PDFInfo
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- JP2015119531A JP2015119531A JP2013260434A JP2013260434A JP2015119531A JP 2015119531 A JP2015119531 A JP 2015119531A JP 2013260434 A JP2013260434 A JP 2013260434A JP 2013260434 A JP2013260434 A JP 2013260434A JP 2015119531 A JP2015119531 A JP 2015119531A
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- Prior art keywords
- coil
- magnetic gap
- magnet
- drive device
- linear
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Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
- H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K21/00—Synchronous motors having permanent magnets; Synchronous generators having permanent magnets
- H02K21/02—Details
- H02K21/021—Means for mechanical adjustment of the excitation flux
- H02K21/022—Means for mechanical adjustment of the excitation flux by modifying the relative position between field and armature, e.g. between rotor and stator
- H02K21/025—Means for mechanical adjustment of the excitation flux by modifying the relative position between field and armature, e.g. between rotor and stator by varying the thickness of the air gap between field and armature
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
- H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
- H02K41/033—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type with armature and magnets on one member, the other member being a flux distributor
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/035—DC motors; Unipolar motors
- H02K41/0352—Unipolar motors
- H02K41/0354—Lorentz force motors, e.g. voice coil motors
- H02K41/0356—Lorentz force motors, e.g. voice coil motors moving along a straight path
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/06—Rolling motors, i.e. motors having the rotor axis parallel to the stator axis and following a circular path as the rotor rolls around the inside or outside of the stator ; Nutating motors, i.e. having the rotor axis parallel to the stator axis inclined with respect to the stator axis and performing a nutational movement as the rotor rolls on the stator
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
- B23Q5/22—Feeding members carrying tools or work
- B23Q5/28—Electric drives
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
- H02K2201/03—Machines characterised by aspects of the air-gap between rotor and stator
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K2213/00—Specific aspects, not otherwise provided for and not covered by codes H02K2201/00 - H02K2211/00
- H02K2213/09—Machines characterised by the presence of elements which are subject to variation, e.g. adjustable bearings, reconfigurable windings, variable pitch ventilators
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Electromagnetism (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Linear Motors (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
Description
22、42a、42b コイル
24、44 スライド
26、46a、46b 磁石
30、50a、50b 固定子
34、54 スライド軸受
36、56a、56b アクチュエータ
38、58a、58b コイル軸受
64 圧力源
66 電磁弁
70 工作機械
72、74、76 直動軸
80 ワーク
82 工具
84 主軸
86 制御装置
88 操作パネル
90 エアダンパ
Claims (7)
- コイル鉄心を有するコイル及び磁石を備えたリニアモータを具備し、固定部に対して可動部が軸受を介して直線的に移動可能となっている直線駆動装置において、
前記コイル及び前記磁石の少なくとも一方を、前記コイル及び前記磁石が互いに接離するように変位させることにより、前記コイルと前記磁石との間に形成される磁気ギャップの大きさを変更する磁気ギャップ変更機構を有することを特徴とする、直線駆動装置。 - 前記磁気ギャップ変更機構は、電気、空気圧又は油圧で駆動するアクチュエータであることを特徴とする請求項1に記載の直線駆動装置。
- 前記磁気ギャップ変更機構は、前記コイルを前記磁石に対して、前記磁気ギャップが第1の値となる第1の位置と、前記磁気ギャップが前記第1の値より大きい第2の値となる第2の位置と、前記第1の位置と前記第2の位置との間の位置に位置決めし保持するように構成されていることを特徴とする、請求項1又は2に記載の直線駆動装置。
- 一対のリニアモータが、前記磁気ギャップの方向に互いに対向して配置され、前記一対のリニアモータの磁気ギャップは互いに等しいことを特徴とする、請求項1〜3のいずれか1項に記載の直線駆動装置。
- 前記一対のリニアモータにおいて、前記コイル、前記磁石及び前記アクチュエータが対称構造であり、前記アクチュエータは磁気ギャップを同時に同じ変位量で変更できるように構成されることを特徴とする、請求項2に従属するときの請求項4に記載の直線駆動装置。
- 前記軸受が静圧空気軸受であることを特徴する、請求項1〜5のいずれか1項に記載の直線駆動装置。
- 請求項1〜6のいずれか1項に記載の直線駆動装置を少なくとも1つ有し、前記磁気ギャップの大きさが互いに異なる複数の加工モードを持つことを特徴とする、工作機械。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013260434A JP5855631B2 (ja) | 2013-12-17 | 2013-12-17 | リニアモータを備えた直線駆動装置を有する工作機械 |
CN201410674112.5A CN104716810B (zh) | 2013-12-17 | 2014-11-21 | 具备直线电动机的直线驱动装置以及机床 |
KR1020140168745A KR101651340B1 (ko) | 2013-12-17 | 2014-11-28 | 리니어 모터를 구비한 직선 구동 장치 및 공작 기계 |
DE102014118335.5A DE102014118335A1 (de) | 2013-12-17 | 2014-12-10 | Linearantriebseinheit mit Linearmotor und eine Werkzeugmaschine damit |
US14/568,918 US9729039B2 (en) | 2013-12-17 | 2014-12-12 | Linear drive unit with a magnetic gap changing mechanism |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013260434A JP5855631B2 (ja) | 2013-12-17 | 2013-12-17 | リニアモータを備えた直線駆動装置を有する工作機械 |
Publications (2)
Publication Number | Publication Date |
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JP2015119531A true JP2015119531A (ja) | 2015-06-25 |
JP5855631B2 JP5855631B2 (ja) | 2016-02-09 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2013260434A Active JP5855631B2 (ja) | 2013-12-17 | 2013-12-17 | リニアモータを備えた直線駆動装置を有する工作機械 |
Country Status (5)
Country | Link |
---|---|
US (1) | US9729039B2 (ja) |
JP (1) | JP5855631B2 (ja) |
KR (1) | KR101651340B1 (ja) |
CN (1) | CN104716810B (ja) |
DE (1) | DE102014118335A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2018174235A1 (ja) * | 2017-03-24 | 2018-09-27 | 日立金属株式会社 | リニアモータ |
JP2020501477A (ja) * | 2016-10-21 | 2020-01-16 | エーエスエムエル ネザーランズ ビー.ブイ. | モータアセンブリ、リソグラフィ装置、及びデバイス製造方法 |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
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TWI631289B (zh) * | 2015-12-04 | 2018-08-01 | 財團法人金屬工業研究發展中心 | 氣靜壓平台及其間隙調整方法 |
US10428682B2 (en) * | 2017-01-13 | 2019-10-01 | Hamilton Sundstrand Corporation | Electric motor arrangements for gas turbine engines |
WO2018204006A1 (en) * | 2017-05-02 | 2018-11-08 | Laitram, L.L.C. | Tray conveyor driven by brushless dc motor |
AT520088B1 (de) | 2017-06-29 | 2019-01-15 | B & R Ind Automation Gmbh | Verfahren zum Betreiben einer Transporteinrichtung in Form eines Langstatorlinearmotors |
KR102106579B1 (ko) * | 2017-10-31 | 2020-05-28 | 숭실대학교산학협력단 | 선형 모터를 이용한 비접촉 수직 이송 장치 |
DE102018209727A1 (de) * | 2018-06-15 | 2019-12-19 | Krones Ag | Mover für eine Transportvorrichtung |
CN109904960A (zh) * | 2019-04-05 | 2019-06-18 | 南京理工大学 | 一种气隙磁密可调的永磁同步电机的转子 |
KR102282917B1 (ko) | 2019-05-31 | 2021-07-29 | 주식회사 제우기술 | 리니어 모터의 추력 및 자석 전단력 측정장치 |
DE102019005966A1 (de) * | 2019-08-23 | 2021-02-25 | Kern Microtechnik Gmbh | Hochpräzisions-Werkzeugmaschine mit linearem Antriebs- und Führungslager |
EP3832860A1 (en) * | 2019-12-05 | 2021-06-09 | Phi-Power AG | Single sided axial flux electrical machine with additional passive stator |
DE102020005171B4 (de) | 2020-08-24 | 2022-11-24 | Kern Microtechnik Gmbh | Hochpräzisions-Werkzeugmaschine, Verfahren zur Erzeugung einer glatten Oberfläche mit der Hochpräzisions-Werkzeugmaschine sowie Computerprogrammprodukt hierfür |
CN213402770U (zh) * | 2020-08-28 | 2021-06-08 | 瑞声科技(南京)有限公司 | 气隙可调直线电机 |
DE102021103220A1 (de) | 2021-02-11 | 2022-08-11 | IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH) | Positionierungssystem zur dreidimensionalen Positionierung eines Objektes sowie Verfahren zu seinem Betrieb |
CN113601246B (zh) * | 2021-08-16 | 2022-06-17 | 宁波米诺机床有限公司 | 一种直线电机驱动的立卧复合加工中心 |
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2013
- 2013-12-17 JP JP2013260434A patent/JP5855631B2/ja active Active
-
2014
- 2014-11-21 CN CN201410674112.5A patent/CN104716810B/zh active Active
- 2014-11-28 KR KR1020140168745A patent/KR101651340B1/ko active IP Right Grant
- 2014-12-10 DE DE102014118335.5A patent/DE102014118335A1/de not_active Ceased
- 2014-12-12 US US14/568,918 patent/US9729039B2/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS614460A (ja) * | 1984-06-14 | 1986-01-10 | Fujitsu Ltd | リニアパルスモ−タ |
JPH03169253A (ja) * | 1989-11-27 | 1991-07-22 | Amada Co Ltd | リニア交流サーボモータ |
JP2002034231A (ja) * | 2000-07-19 | 2002-01-31 | Yaskawa Electric Corp | リニアスライダ |
JP2008118778A (ja) * | 2006-11-02 | 2008-05-22 | Toto Ltd | 永久磁石型同期機の初期位相検出方法、永久磁石型同期機の制御方法、移動装置、電子部品の製造装置、電子部品の検査装置、精密部品の製造装置、精密部品の検査装置 |
JP2010162659A (ja) * | 2009-01-16 | 2010-07-29 | Jtekt Corp | 移動テーブル |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2020501477A (ja) * | 2016-10-21 | 2020-01-16 | エーエスエムエル ネザーランズ ビー.ブイ. | モータアセンブリ、リソグラフィ装置、及びデバイス製造方法 |
WO2018174235A1 (ja) * | 2017-03-24 | 2018-09-27 | 日立金属株式会社 | リニアモータ |
Also Published As
Publication number | Publication date |
---|---|
CN104716810A (zh) | 2015-06-17 |
KR101651340B1 (ko) | 2016-08-25 |
DE102014118335A1 (de) | 2015-06-18 |
CN104716810B (zh) | 2018-12-14 |
KR20150070942A (ko) | 2015-06-25 |
US20150171722A1 (en) | 2015-06-18 |
JP5855631B2 (ja) | 2016-02-09 |
US9729039B2 (en) | 2017-08-08 |
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