JP2015091740A - β−Ga2O3系単結晶膜の成長方法、及び結晶積層構造体 - Google Patents
β−Ga2O3系単結晶膜の成長方法、及び結晶積層構造体 Download PDFInfo
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- 239000013078 crystal Substances 0.000 title claims abstract description 241
- 238000000034 method Methods 0.000 title claims abstract description 56
- 239000007789 gas Substances 0.000 claims abstract description 140
- 239000000758 substrate Substances 0.000 claims abstract description 64
- UPWPDUACHOATKO-UHFFFAOYSA-K gallium trichloride Chemical compound Cl[Ga](Cl)Cl UPWPDUACHOATKO-UHFFFAOYSA-K 0.000 claims abstract description 21
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 12
- 239000001301 oxygen Substances 0.000 claims abstract description 12
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 12
- 238000002248 hydride vapour-phase epitaxy Methods 0.000 claims abstract 2
- 229910005191 Ga 2 O 3 Inorganic materials 0.000 claims description 216
- XOYLJNJLGBYDTH-UHFFFAOYSA-M chlorogallium Chemical compound [Ga]Cl XOYLJNJLGBYDTH-UHFFFAOYSA-M 0.000 claims description 58
- 229910052733 gallium Inorganic materials 0.000 claims description 12
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 10
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- 238000001228 spectrum Methods 0.000 description 20
- 239000002994 raw material Substances 0.000 description 15
- 239000012159 carrier gas Substances 0.000 description 13
- 238000010438 heat treatment Methods 0.000 description 12
- 238000002441 X-ray diffraction Methods 0.000 description 10
- 239000012535 impurity Substances 0.000 description 9
- 238000005259 measurement Methods 0.000 description 7
- 239000011261 inert gas Substances 0.000 description 6
- 238000001947 vapour-phase growth Methods 0.000 description 6
- 238000011156 evaluation Methods 0.000 description 5
- 229910052739 hydrogen Inorganic materials 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 4
- 238000002484 cyclic voltammetry Methods 0.000 description 4
- 239000001257 hydrogen Substances 0.000 description 4
- 238000004549 pulsed laser deposition Methods 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 238000001451 molecular beam epitaxy Methods 0.000 description 3
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 2
- 238000005231 Edge Defined Film Fed Growth Methods 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- 239000003595 mist Substances 0.000 description 2
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000005049 silicon tetrachloride Substances 0.000 description 2
- 238000003980 solgel method Methods 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 229910021480 group 4 element Inorganic materials 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 238000000927 vapour-phase epitaxy Methods 0.000 description 1
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Abstract
【解決手段】一実施の形態として、HVPE法によるβ−Ga2O3系単結晶膜の成長方法であって、Ga2O3系基板10を塩化ガリウム系ガス及び酸素含有ガスに曝し、Ga2O3系基板10の主面11上にβ−Ga2O3系単結晶膜12を900℃以上の成長温度で成長させる工程を含む、β−Ga2O3系単結晶膜の成長方法を提供する。
【選択図】図2
Description
(結晶積層構造体の構成)
図1は、実施の形態に係る結晶積層構造体1の垂直断面図である。結晶積層構造体1は、Ga2O3系基板10と、Ga2O3系基板10の主面11上にエピタキシャル結晶成長により形成されたβ−Ga2O3系単結晶膜12を有する。
以下に、本実施の形態に係るβ−Ga2O3系単結晶膜12の成長に用いる気相成長装置の構造の一例について説明する。
以下に、本実施の形態に係るβ−Ga2O3系単結晶膜12の成長工程の一例について説明する。
上記実施の形態によれば、HVPE法を用いて、ガリウムの原料ガスの生成条件や、β−Ga2O3系単結晶膜の成長条件を制御することにより、高品質かつ大口径のβ−Ga2O3系単結晶膜を効率的に成長させることができる。また、β−Ga2O3系単結晶膜が結晶品質に優れるため、β−Ga2O3系単結晶膜上に品質のよい結晶膜を成長させることができる。このため、本実施の形態に係るβ−Ga2O3系単結晶膜を含む結晶積層構造体を高品質な半導体装置の製造に用いることができる。
Claims (12)
- HVPE法によるβ−Ga2O3系単結晶膜の成長方法であって、
Ga2O3系基板を塩化ガリウム系ガス及び酸素含有ガスに曝し、前記Ga2O3系基板の主面上にβ−Ga2O3系単結晶膜を900℃以上の成長温度で成長させる工程を含む、β−Ga2O3系単結晶膜の成長方法。 - 金属ガリウムとCl2ガス又はHClガスであるCl含有ガスとを反応させることにより前記塩化ガリウム系ガスを生成する、
請求項1に記載のβ−Ga2O3系単結晶膜の成長方法。 - 前記塩化ガリウム系ガスのうち、GaClガスの分圧比が最も高い、
請求項1又は2に記載のβ−Ga2O3系単結晶膜の成長方法。 - 前記酸素含有ガスはO2ガスである、
請求項1〜3のいずれか1項に記載のβ−Ga2O3系単結晶膜の成長方法。 - 前記Cl含有ガスはCl2ガスである、
請求項2に記載のβ−Ga2O3系単結晶膜の成長方法。 - 前記β−Ga2O3系単結晶膜を成長させる際の前記酸素含有ガスの供給分圧の前記塩化ガリウム系ガスの供給分圧に対する比の値は0.5以上である、
請求項1〜5のいずれか1項に記載のβ−Ga2O3系単結晶膜の成長方法。 - 前記Ga2O3系基板の前記主面の面方位は、(010)、(−201)、(001)、又は(101)である、
請求項1〜6のいずれか1項に記載のβ−Ga2O3系単結晶膜の成長方法。 - 300℃以上の雰囲気温度下で前記塩化ガリウム系ガスを生成する、
請求項1〜7のいずれか1項に記載のβ−Ga2O3系単結晶膜の成長方法。 - Ga2O3系基板と、
前記Ga2O3系基板の主面上にエピタキシャル結晶成長により形成された、Clを含むβ−Ga2O3系単結晶膜と、
を含む結晶積層構造体。 - 前記β−Ga2O3系単結晶膜のCl濃度は、5×1016atoms/cm3以下である、
請求項9に記載の結晶積層構造体。 - 前記β−Ga2O3系単結晶膜はβ−Ga2O3結晶膜である、
請求項9又は10に記載の結晶積層構造体。 - 前記β−Ga2O3系単結晶膜の残留キャリア濃度は、3×1015atoms/cm3以下である、
請求項11に記載の結晶積層構造体。
Priority Applications (9)
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JP2014088589A JP5984069B2 (ja) | 2013-09-30 | 2014-04-22 | β−Ga2O3系単結晶膜の成長方法、及び結晶積層構造体 |
TW109123514A TWI727849B (zh) | 2013-09-30 | 2014-09-16 | β-Ga2O3系單晶膜的成長方法及結晶積層構造體 |
TW103131951A TWI702300B (zh) | 2013-09-30 | 2014-09-16 | β-GaO系單晶膜的成長方法及結晶積層構造體 |
PCT/JP2014/074659 WO2015046006A1 (ja) | 2013-09-30 | 2014-09-18 | β-Ga2O3系単結晶膜の成長方法、及び結晶積層構造体 |
CN201480053760.7A CN105992841B (zh) | 2013-09-30 | 2014-09-18 | β-Ga2O3系单晶膜的生长方法和晶体层叠结构体 |
US15/025,956 US20160265137A1 (en) | 2013-09-30 | 2014-09-18 | METHOD FOR GROWING BETA-Ga2O3-BASED SINGLE CRYSTAL FILM, AND CRYSTALLINE LAYERED STRUCTURE |
EP14849461.0A EP3054037A4 (en) | 2013-09-30 | 2014-09-18 | METHOD FOR GROWING -Ga2O3-BASED SINGLE CRYSTAL FILM, AND CRYSTALLINE LAYERED STRUCTURE |
CN202111128251.4A CN113832544B (zh) | 2013-09-30 | 2014-09-18 | β-Ga2O3系单晶膜的生长方法和晶体层叠结构体 |
US17/471,395 US11982016B2 (en) | 2013-09-30 | 2021-09-10 | Method for growing beta-Ga2O3-based single crystal film, and crystalline layered structure |
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EP3054037A1 (en) | 2016-08-10 |
TW201522680A (zh) | 2015-06-16 |
CN113832544A (zh) | 2021-12-24 |
EP3054037A4 (en) | 2017-06-21 |
TWI702300B (zh) | 2020-08-21 |
JP5984069B2 (ja) | 2016-09-06 |
CN105992841B (zh) | 2021-10-22 |
US20210404086A1 (en) | 2021-12-30 |
WO2015046006A1 (ja) | 2015-04-02 |
CN105992841A (zh) | 2016-10-05 |
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US11982016B2 (en) | 2024-05-14 |
US20160265137A1 (en) | 2016-09-15 |
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TW202102698A (zh) | 2021-01-16 |
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