JP2015023011A - Charged particle beam device - Google Patents
Charged particle beam device Download PDFInfo
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- JP2015023011A JP2015023011A JP2013153168A JP2013153168A JP2015023011A JP 2015023011 A JP2015023011 A JP 2015023011A JP 2013153168 A JP2013153168 A JP 2013153168A JP 2013153168 A JP2013153168 A JP 2013153168A JP 2015023011 A JP2015023011 A JP 2015023011A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
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Abstract
Description
本発明は、荷電粒子線装置に関し、特に、容易に試料ホルダを試料ステージに導入することが可能となる試料ホルダのローダ機構を備えた荷電粒子線装置に関する。 The present invention relates to a charged particle beam apparatus, and more particularly to a charged particle beam apparatus including a loader mechanism for a sample holder that allows a sample holder to be easily introduced into a sample stage.
荷電粒子線装置の一つである、透過型電子顕微鏡（ＴＥＭ）に関して図６を用いて装置構成概略を説明する。電子銃５１によって生成された電子ビームを電子レンズ５４を用いて収束し、試料ステージ１０に搭載された試料へ照射する。試料を透過した電子を検出器５５によって検出し、主制御装置５７へ取り込み画像化し、試料を観察する。鏡体１は除振された架台５０に締結されている。試料ステージ１０は主制御装置５７からの指令を受け、ステージコントローラ５３にて制御する。鏡体１は図示しない真空排気用ポンプにて、10-5Pa程度まで真空排気される。 An outline of the apparatus configuration will be described with reference to FIG. 6 regarding a transmission electron microscope (TEM) which is one of charged particle beam apparatuses. The electron beam generated by the electron gun 51 is converged by using an electron lens 54 and irradiated onto a sample mounted on the sample stage 10. Electrons that have passed through the sample are detected by the detector 55, taken into the main controller 57 and imaged, and the sample is observed. The mirror body 1 is fastened to a gantry 50 that has been subjected to vibration isolation. The sample stage 10 receives a command from the main controller 57 and is controlled by the stage controller 53. The mirror body 1 is evacuated to about 10 −5 Pa by an evacuation pump (not shown).
透過型電子顕微鏡電子顕微鏡においては、サイドエントリー方式の試料ホルダが採用されている。特許文献１は透過型電子顕微鏡にサイドエントリー方式の試料ホルダを採用したものである。 In a transmission electron microscope, an electron microscope employs a side entry type sample holder. Patent Document 1 employs a side-entry type sample holder in a transmission electron microscope.
近年、透過型電子顕微鏡では、１Å以下の高分解能化が進んでいる。高分解能観察を阻害する要因の一つが試料ホルダ・試料ステージの振動である。試料ホルダを低振動化する一つの手法が 試料ホルダの大口径化である。 In recent years, transmission electron microscopes have been improved in resolution of 1 mm or less. One factor that hinders high-resolution observation is the vibration of the sample holder and sample stage. One technique for reducing the vibration of the sample holder is to increase the diameter of the sample holder.
しかし、試料ホルダを大口径化すると、鏡体１から試料ホルダ４０を引く抜く際に必要とされる真空負圧に対抗する力も増大するという問題も発生する。 However, when the diameter of the sample holder is increased, there also arises a problem that the force against the vacuum negative pressure required when pulling out the sample holder 40 from the mirror 1 is increased.
本発明は、大口径化された試料ホルダを安全に鏡体から引き抜くことが可能な荷電粒子線装置を提供することを目的とする。 An object of the present invention is to provide a charged particle beam apparatus capable of safely pulling out a large-diameter sample holder from a mirror body.
上記課題に鑑み、本発明は以下の構成を備える。サイドエントリー方式の試料ホルダが挿入される荷電粒子線装置において、前記試料ホルダが搭載されるホルダ支持部と、前記ホルダ支持部を駆動する駆動部を備えたローダを備え、当該ローダにより前記試料ホルダの荷電粒子線装置の鏡体内への導入及び引き出しを行うことを特徴とする荷電粒子線装置。 In view of the above problems, the present invention has the following configuration. In a charged particle beam apparatus into which a side-entry type sample holder is inserted, the charged particle beam apparatus includes a holder support portion on which the sample holder is mounted, and a loader including a drive unit that drives the holder support portion. The charged particle beam apparatus is characterized in that the charged particle beam apparatus is introduced into and extracted from the lens body.
試料ホルダのロード機構により、大口径化された試料ホルダを安全に鏡体から引き抜くことが可能となる。また、これにより試料ホルダの大口径化が実現できるので、試料ホルダの振動を抑制することができ、より測定精度の高い荷電粒子線装置を提供することができる。 With the sample holder loading mechanism, the large-diameter sample holder can be safely pulled out of the mirror body. In addition, since the diameter of the sample holder can be increased, vibration of the sample holder can be suppressed, and a charged particle beam apparatus with higher measurement accuracy can be provided.
まず、実施例を説明する前に、本発明の概要を述べる。 First, an outline of the present invention will be described before describing the embodiments.
試料ホルダ軸の大口径化により試料ホルダを鏡体から引き抜く際に必要な力も大きくなる。ＴＥＭでは、試料ホルダの位置は床面から1.5メートル以上程度であり、大口径化された試料ホルダを安全に鏡体から引き抜くことが困難になっている。これに対し、本発明では、下記実施例で説明するローダを荷電粒子線装置に備えた。 The force required for pulling out the sample holder from the mirror body is increased by increasing the diameter of the sample holder shaft. In the TEM, the position of the sample holder is about 1.5 meters or more from the floor surface, and it is difficult to safely pull out the large-diameter sample holder from the mirror body. On the other hand, in the present invention, the charged particle beam apparatus is provided with a loader described in the following examples.
次に、試料ホルダの先端は、非常に精密な構造であるため、試料先端が試料ステージ等へ接触すると破損する場合がある。上記課題で記載したように試料ホルダの試料ステージへの投入口は地上から1.5メートル程度であり、試料の先端を試料ステージに触れないようにホルダ投入口へ導入することが困難である。これに対し、本発明では、下記実施例で説明するセンサを荷電粒子線装置に備えた。 Next, since the tip of the sample holder has a very precise structure, it may be damaged if the tip of the sample comes into contact with the sample stage or the like. As described in the above problem, the inlet of the sample holder to the sample stage is about 1.5 meters from the ground, and it is difficult to introduce the tip of the sample into the holder inlet so as not to touch the sample stage. In contrast, in the present invention, a charged particle beam apparatus is provided with a sensor described in the following examples.
さらに、鏡体はカバー内に設置されているため、試料交換するためにはカバーの扉を開ける必要がある。カバーをあけるとカバー内雰囲気の温度および鏡体温度が変化する。このため、温度変化に伴う熱変形によって観察中に視野が移動する試料ドリフト現象が生じる。これに対し、本発明では、下記実施例で説明する試料ホルダストッカーを備えた。 Furthermore, since the mirror is installed in the cover, it is necessary to open the cover door in order to change the sample. When the cover is opened, the temperature of the atmosphere inside the cover and the temperature of the mirror body change. For this reason, a sample drift phenomenon occurs in which the visual field moves during observation due to thermal deformation accompanying temperature change. On the other hand, in this invention, the sample holder stocker demonstrated by the following Example was provided.
そして、試料ホルダ先端への異物の付着はコンタミネーションの要因となる。試料ホルダの導入時に試料ステージ投入口の内壁に試料ホルダ先端部が接触すると、異物が付着する場合がある。これに対し、本発明では、上記のローダが試料ホルダを導入するためのガイドの役割をし、試料ホルダ先端部が試料ステージ投入口の内壁に接触しないようにした。 Then, the adhesion of foreign matter to the tip of the sample holder becomes a cause of contamination. If the tip of the sample holder comes into contact with the inner wall of the sample stage inlet when the sample holder is introduced, foreign matter may adhere. In contrast, in the present invention, the loader serves as a guide for introducing the sample holder so that the tip of the sample holder does not contact the inner wall of the sample stage inlet.
以下、図面を用いて説明していく。 Hereinafter, description will be made with reference to the drawings.
＜本発明の試料ホルダローダ機能を備える電子顕微鏡全体の概略図＞図１に本発明の試料ホルダローダ２０を備えた透過型電子顕微鏡の概略図を示す。ローダ２０は試料ステージ１０の概略前面に備えられる。ローダ２０は、第１支持部２２と第２支持部２３から構成されるアーム部とガイドレール部を備えている。 <Schematic diagram of the entire electron microscope having the sample holder loader function of the present invention> FIG. 1 shows a schematic diagram of a transmission electron microscope including the sample holder loader 20 of the present invention. The loader 20 is provided on the approximate front surface of the sample stage 10. The loader 20 includes an arm portion and a guide rail portion that are composed of a first support portion 22 and a second support portion 23.
第１支持部２２と第２支持部２３は、半円形状でこれらのホルダ支持部に試料ホルダ４０を置いたときに、試料ホルダ４０の軸中心と試料投入口の中心が一致するように調整されている。 The first support part 22 and the second support part 23 are semicircular and are adjusted so that the axis center of the sample holder 40 and the center of the sample inlet coincide with each other when the sample holder 40 is placed on these holder support parts. Has been.
試料ホルダ４０を鏡体１に導入する手順について説明する。試料ホルダ４０をローダに備えられた第１支持部２２および第２支持部２３上に設置する。この作業は、電子顕微鏡の操作者が行う。この時のローダ及び試料ホルダ位置を試料交換位置と定義する。
支持部へ試料ホルダを設置した後、試料ホルダを試料ステージの試料投入口へ導入する。
A procedure for introducing the sample holder 40 into the mirror body 1 will be described. The sample holder 40 is installed on the first support part 22 and the second support part 23 provided in the loader. This operation is performed by an operator of the electron microscope. The loader and sample holder positions at this time are defined as sample replacement positions.
After installing the sample holder on the support part, the sample holder is introduced into the sample inlet of the sample stage.
＜ローダ部の詳細構造＞図２にローダ２０の詳細図（側面図）を示す。ローダの試料ホルダ送り機能は、一端にモータ２４が取り付けられたボールネジ２５によって駆動されるベース３０にて構成されている。 <Detailed Structure of Loader> FIG. 2 shows a detailed view (side view) of the loader 20. The sample holder feeding function of the loader is configured by a base 30 driven by a ball screw 25 having a motor 24 attached to one end.
＜支持部の詳細構造＞図４に試料ホルダ支持部の詳細を示す。第１支持部２２および第２支持部２３は試料ホルダ４０の軸を中心に回転運動をする。支持部の移動、回転等の駆動力を伝えるために、試料ホルダの支持棒には突起が備えられている。試料ホルダを第１支持部２２および第２支持部２３に搭載するときには、突起部４５と第１支持部２２の穴に挿入する。試料ホルダの機構部にも同様の突起部が備えられており、第１支持部２２及び第２支持部２３に設けられた穴を一致させるように、試料ホルダを搭載する。これらの突起部４５と穴の結合によって、ローダ部の駆動力を試料ホルダへ伝えることが可能となる。第１支持部２２及び第２支持部２３両方に設ければより安定してローダの駆動力を伝達できる。なお、穴と突起の関係は逆に設けられて（つまり、突起部が支持部に、穴が試料ホルダに設けられて）いてもよい。 <Detailed Structure of Support Unit> FIG. 4 shows details of the sample holder support unit. The first support part 22 and the second support part 23 rotate around the axis of the sample holder 40. In order to transmit driving force such as movement and rotation of the support portion, the support rod of the sample holder is provided with a protrusion. When the sample holder is mounted on the first support portion 22 and the second support portion 23, the sample holder is inserted into the holes of the protrusion 45 and the first support portion 22. A similar protrusion is provided in the mechanism portion of the sample holder, and the sample holder is mounted so that the holes provided in the first support portion 22 and the second support portion 23 are aligned. By coupling the projections 45 and the holes, it is possible to transmit the driving force of the loader unit to the sample holder. If it provides in both the 1st support part 22 and the 2nd support part 23, the driving force of a loader can be transmitted more stably. The relationship between the hole and the protrusion may be provided in reverse (that is, the protrusion is provided in the support part and the hole is provided in the sample holder).
＜支持部の回転機構＞図３の断面図に示すように、ベース３０上には曲線型のガイドレール（Ｒガイド）２９が備えられ、ハンドル２８を操作することにより試料ホルダへ正確に回転力を与えることができる。Ｒガイド２９の曲率中心は、試料ホルダ４０の軸中心と一致するように取り付けられている。 <Rotating Mechanism of Support Unit> As shown in the cross-sectional view of FIG. 3, a curved guide rail (R guide) 29 is provided on the base 30, and the rotational force is accurately applied to the sample holder by operating the handle 28. Can be given. The center of curvature of the R guide 29 is attached so as to coincide with the axis center of the sample holder 40.
＜ローダの設置場所＞図１ではローダを荷重板２上に設置する場合を説明したが、図１０のように鏡体１に設置してもよい。また、荷重板を支持する架台にローダを取り付けてもよい。 <Installation Location of Loader> Although the case where the loader is installed on the load plate 2 has been described with reference to FIG. 1, it may be installed on the mirror body 1 as shown in FIG. Moreover, you may attach a loader to the mount frame which supports a load board.
試料ホルダの導入手順について説明する。まず、試料ホルダの導入部の詳細機構について説明する。 A procedure for introducing the sample holder will be described. First, the detailed mechanism of the introduction part of the sample holder will be described.
図７に試料ステージ１０の詳細を示す。観察試料を搭載した試料ホルダ４０は、試料ステージ１０の試料投入口から導入する。鏡体１に固定された球面受け７６は球形支点７７と接触している。球形支点７７と外筒７９で囲まれたユニットはエアーロックシリンダと呼ばれ、球形支点７７の中心を軸として首振り運動をし、その結果として、試料３をＺ方向（鉛直方向）およびＹ方向（紙面垂直方向）に移動させることが可能となる。試料Ｚ方向に駆動させるためには、回転筒６０に固定されたＺ駆動用リニア機構６１を動作させる。Ｚ駆動用リニア機構６１は、その対面に位置したＺバネ６２によって常に反発力を受ける。図示しない紙面に垂直方向に駆動可能な別のリニア機構によってＹ方向へ試料ホルダ４０を駆動する。 FIG. 7 shows details of the sample stage 10. The sample holder 40 carrying the observation sample is introduced from the sample insertion port of the sample stage 10. The spherical receiver 76 fixed to the mirror body 1 is in contact with the spherical fulcrum 77. The unit surrounded by the spherical fulcrum 77 and the outer cylinder 79 is called an air lock cylinder, and swings around the center of the spherical fulcrum 77. As a result, the sample 3 moves in the Z direction (vertical direction) and the Y direction. It is possible to move in the direction perpendicular to the page. In order to drive in the sample Z direction, the Z driving linear mechanism 61 fixed to the rotating cylinder 60 is operated. The Z driving linear mechanism 61 always receives a repulsive force by the Z spring 62 located on the opposite side. The sample holder 40 is driven in the Y direction by another linear mechanism that can be driven in a direction perpendicular to the paper surface (not shown).
試料ホルダ４０を鏡体１内へ導入する動作について説明する。まず試料ホルダ４０を内筒７３内へ挿入する。この状態でエアーロック真空排気ポート６５に接続された図示しない真空ポンプにてエアーロックシリンダ内を真空排気する。 An operation of introducing the sample holder 40 into the mirror body 1 will be described. First, the sample holder 40 is inserted into the inner cylinder 73. In this state, the inside of the air lock cylinder is evacuated by a vacuum pump (not shown) connected to the air lock vacuum exhaust port 65.
内筒７３内の真空度が鏡体１内の真空度と同程度になった後、試料ホルダ２の長手方向を軸として回転させる。このとき、内筒７３が回転し、内筒７３の左端に備えられた傘歯車によってバルブ７４を開ける。その後、図８に示したように試料ホルダ４０を観察位置まで移動させる。通常この位置が、試料観察位置である。 After the degree of vacuum in the inner cylinder 73 becomes approximately the same as the degree of vacuum in the mirror body 1, the sample holder 2 is rotated about the longitudinal direction. At this time, the inner cylinder 73 rotates and the valve 74 is opened by the bevel gear provided at the left end of the inner cylinder 73. Thereafter, the sample holder 40 is moved to the observation position as shown in FIG. Usually, this position is the sample observation position.
試料交換をする場合には、試料ホルダ４０は図８の位置から図７に示された位置まで引き抜く。この位置で試料ホルダ４０導入時とは逆向きに試料ホルダ４０を回転させ、エアーロックバルブ７４を閉じる。試料ホルダ４０を引き抜くときは、試料ホルダのＯリングの真空側と大気側の圧力差による真空負圧に対抗して力を及ぼす必要がある。 When exchanging the sample, the sample holder 40 is pulled out from the position shown in FIG. 8 to the position shown in FIG. At this position, the sample holder 40 is rotated in the opposite direction to that when the sample holder 40 is introduced, and the air lock valve 74 is closed. When pulling out the sample holder 40, it is necessary to exert a force against the vacuum negative pressure due to the pressure difference between the vacuum side and the atmospheric side of the O-ring of the sample holder.
＜試料ホルダの鏡体への導入＞次に、本発明の試料導入ステップについて説明する。 <Introduction of Sample Holder into Mirror> Next, the sample introduction step of the present invention will be described.
試料ホルダ４０を試料投入口へ送る場合には、ローダ付近に設置されたスイッチをいれることによりモータ２４を駆動する。 When the sample holder 40 is sent to the sample insertion port, the motor 24 is driven by turning on a switch installed near the loader.
試料投入口には、センサが備えられており、ホルダが規定の位置まで到達したことを検知する。この位置を予備排気位置と定義する。位置検知は、試料ホルダに備えられたガイドピン４２とセンサの接触によって行われる。このセンサとガイドピンが接触したときに、自動で試料ホルダ送り用のモータが停止する。より安全に試料ホルダ４０を規定の位置で停止させるためには、図２および図３に示すようにローダのガイドレール部にもセンサ２６を設けることも可能である。 A sensor is provided at the sample insertion port, and detects that the holder has reached a specified position. This position is defined as a preliminary exhaust position. The position detection is performed by contact between the guide pin 42 provided on the sample holder and the sensor. When this sensor comes into contact with the guide pin, the sample holder feeding motor automatically stops. In order to stop the sample holder 40 at a specified position more safely, it is possible to provide the sensor 26 also on the guide rail portion of the loader as shown in FIGS.
図９に示すように予備排気位置まで試料ホルダ４０が到達し、センサにて試料ホルダを確認したと同時に試料ステージの内筒７３とエアーロックバルブ７４で囲まれたエアーロック室を真空排気する。エアーロック室内が規定の圧力になった後、エアーロック室先端のエアーロックバルブ７４を開ける。 As shown in FIG. 9, the sample holder 40 reaches the preliminary exhaust position, and after confirming the sample holder by the sensor, the air lock chamber surrounded by the inner cylinder 73 of the sample stage and the air lock valve 74 is evacuated. After the air lock chamber reaches a specified pressure, the air lock valve 74 at the tip of the air lock chamber is opened.
次に、上記エアーロックバルブを解放する作業を本発明のローダを用いて実施した場合について説明する。エアーロックバルブ７４を開けるためには、ガイドピンを用いてエアーロック室の内筒７４を回転させることによって行われる。内筒７３とエアーロックバルブ７４は図示しない傘歯車によって結合されており、内筒軸中心の回転力をピン８１軸中心の回転力に変換し、エアーロックバルブ７４を開く。 Next, the case where the operation | work which releases the said air lock valve is implemented using the loader of this invention is demonstrated. The air lock valve 74 is opened by rotating the inner cylinder 74 of the air lock chamber using a guide pin. The inner cylinder 73 and the air lock valve 74 are coupled by a bevel gear (not shown), and the rotational force about the inner cylinder axis is converted into the rotational force about the pin 81 axis to open the air lock valve 74.
図４に示したように第１支持部２２と第２支持部２３は、試料ホルダ４０に備えられた突起４５で結合されている。ハンドル２８を図５の矢印１００のＡ方向へ移動させることにより図３の角度までハンドル２８を回転させる。 As shown in FIG. 4, the first support portion 22 and the second support portion 23 are coupled by a protrusion 45 provided on the sample holder 40. The handle 28 is rotated to the angle shown in FIG. 3 by moving the handle 28 in the direction indicated by the arrow 100 in FIG.
ハンドル２８の回転は、試料ホルダ４０を回転させ、同時に試料ホルダ４０に備えられたガイドピン４２を回転させる。これにより内筒７３を回転させエアーロックバルブ７４を解放する。 The rotation of the handle 28 rotates the sample holder 40 and simultaneously rotates the guide pin 42 provided on the sample holder 40. As a result, the inner cylinder 73 is rotated to release the air lock valve 74.
＜エアーロックバルブ解放後のホルダ駆動＞エアーロックバルブ７４を解放後、ローダのモータを駆動して試料ホルダ４０を観察位置まで駆動する。 <Holder drive after releasing air lock valve> After releasing the air lock valve 74, the motor of the loader is driven to drive the sample holder 40 to the observation position.
＜ハンドルの試料ホルダからの切り離し＞観察位置まで試料ホルダを移動させた後、試料ホルダ４０と第１支持部２２、第２支持部２３を切り離す。ハンドル２８をハンドル軸方向に移動可能な構造となっている。ハンドル２８を矢印１０１のC方向に移動させて切り離す。 <Separation of Handle from Sample Holder> After the sample holder is moved to the observation position, the sample holder 40 is separated from the first support portion 22 and the second support portion 23. The handle 28 can be moved in the handle axial direction. The handle 28 is moved in the direction C indicated by the arrow 101 and separated.
＜試料ホルダの鏡体からの引き抜き＞観察が完了した後、試料ホルダを鏡体から引き抜く動作について説明する。第１支持部２２と第２支持部２３を試料ホルダ４０と接続する。次にローダ２０に備えられたモータ２４を駆動して試料ホルダ４０を予備排気位置まで移動させる。 <Extraction of Sample Holder from Mirror> The operation of extracting the sample holder from the mirror after the observation is completed will be described. The first support part 22 and the second support part 23 are connected to the sample holder 40. Next, the motor 24 provided in the loader 20 is driven to move the sample holder 40 to the preliminary exhaust position.
次に図３中のハンドル２８を図５中の矢印１００のＢ方向に回転させることにより、エアーロックバルブ７４を閉じる。エアーロック室に窒素を導入して、エアーロック室を大気圧にする。ローダの送り機構を再度駆動して、試料ホルダ導入原点位置まで移動する。 Next, the air lock valve 74 is closed by rotating the handle 28 in FIG. 3 in the direction B of the arrow 100 in FIG. Nitrogen is introduced into the air lock chamber to bring the air lock chamber to atmospheric pressure. The feeding mechanism of the loader is driven again to move to the sample holder introduction origin position.
このような手法により、ローダを用いて試料ホルダの鏡体への導入、引き抜きが出来るようになる。 By such a method, the loader can be used to introduce and remove the sample holder from the mirror body.
＜試料ホルダストッカー＞図５に示すようにローダのガイドレール２１に試料ホルダストッカー３１を搭載すれば、観察試料を搭載した試料ホルダ４０を待機させ、これらの試料ホルダを自動で鏡体に導入することが可能となる。 <Sample Holder Stocker> If the sample holder stocker 31 is mounted on the guide rail 21 of the loader as shown in FIG. 5, the sample holder 40 loaded with the observation sample is put on standby, and these sample holders are automatically introduced into the mirror body. It becomes possible.
試料ホルダ４０の試料ホルダストッカーへの搬送は、試料ホルダ搬送アーム３２を用いる。試料ホルダ搬送アームは紙面上下方向（矢印１０５方向）および左右方向（矢印１０４方向）に移動でき、試料ホルダ第１支持部２２および第２支持部２３に搭載されている試料ホルダ４０を試料ホルダストッカー３１に搬送することが可能である。 The sample holder transport arm 32 is used to transport the sample holder 40 to the sample holder stocker. The sample holder transport arm can move in the up and down direction (arrow 105 direction) and the left and right direction (arrow 104 direction) on the paper surface, and the sample holder 40 mounted on the sample holder first support portion 22 and the second support portion 23 is moved to the sample holder stocker. 31 can be conveyed.
通常鏡体はカバー内に設置されているため、試料交換するためにはカバーの扉を開ける必要がある。カバー内外は温度差があるため、カバーをあけるとカバー内雰囲気の温度および鏡体温度が変化する。このため、温度変化に伴う熱変形によって観察中に視野が移動する試料ドリフト現象が生じる。試料ホルダストッカーを用いれば、試料交換時にカバーの扉を開ける必要がなくなるため、試料ドリフトを低減することが可能となる。 Since the mirror body is usually installed in the cover, it is necessary to open the cover door in order to change the sample. Since there is a temperature difference between the inside and outside of the cover, the temperature of the atmosphere inside the cover and the mirror body temperature change when the cover is opened. For this reason, a sample drift phenomenon occurs in which the visual field moves during observation due to thermal deformation accompanying temperature change. If the sample holder stocker is used, it is not necessary to open the cover door at the time of exchanging the sample, so that the sample drift can be reduced.
なお、自動で試料ホルダ４０を鏡体１へ導入するためには、モータを用いてハンドルを回転させる必要がある。 In order to automatically introduce the sample holder 40 into the mirror body 1, it is necessary to rotate the handle using a motor.
＜ホルダストッカーでのホルダ衝突防止機能＞ホルダストッカーには、試料ホルダ４０の有無を検知するセンサを備えると、試料ホルダ同士の衝突による破損を防止することが可能である。センサは、光を用いたセンサや接点を有するタッチセンサなどが考えられる。 <Holder Collision Prevention Function in Holder Stocker> If the holder stocker is provided with a sensor for detecting the presence or absence of the sample holder 40, it is possible to prevent damage due to collision between the sample holders. As the sensor, a sensor using light, a touch sensor having a contact point, or the like can be considered.
＜エアーシリンダを用いたローダ＞以上では電動アクチュエータを用いたローダ機能について説明したが、以下では空圧アクチュエータを用いた場合の簡易なローダ機能の実施例について説明する。 <Loader Using Air Cylinder> The loader function using an electric actuator has been described above. However, an example of a simple loader function in the case of using a pneumatic actuator will be described below.
図１１は、試料ホルダ４０は観察位置にある。本図でのローダ機能は、試料ホルダ４０に力を直接及ぼすアーム１１０、駆動力を発生する空圧アクチュエータ１１１、アクチュエータベース１１２、鏡体に直接取り付けられたベース１１３で構成されている。 In FIG. 11, the sample holder 40 is in the observation position. The loader function in this figure includes an arm 110 that directly exerts a force on the sample holder 40, a pneumatic actuator 111 that generates a driving force, an actuator base 112, and a base 113 that is directly attached to the mirror body.
試料交換時に試料ホルダ４０を鏡体１から引き抜く必要があるが、引き抜くためには真空負圧に抗する力が必要である。引き抜く際にはアーム１１０を試料ホルダ４０の段差に突き当て、空圧シリンダ１１０のを縮めることにより、試料ホルダ４０を予備排気位置まで引き抜く。その後、ＴＥＭ操作者が試料ホルダを回転させ、エアーロックバルブを閉じた後、試料ホルダ４０を鏡体１から完全に引き抜く。 Although it is necessary to pull out the sample holder 40 from the mirror body 1 when exchanging the sample, in order to pull it out, a force that resists vacuum negative pressure is required. When pulling out, the arm 110 is abutted against the step of the sample holder 40 and the pneumatic cylinder 110 is contracted to pull the sample holder 40 to the preliminary exhaust position. Thereafter, the TEM operator rotates the sample holder, closes the air lock valve, and then completely pulls out the sample holder 40 from the mirror body 1.
試料ホルダ４０を鏡体１に導入する場合は、引き抜く場合と逆の手順で行えばよい。観察位置に試料ホルダ４０が到達した後は、アーム１１０と試料ホルダ４０は、接触していない状態が望ましい。空圧アクチュエータベース１１２はベース１１３の軸中心に回転可能となっており、ベース１１３を軸にアーム１１０、空圧アクチュエータ１１１、空圧アクチュエータベース１１２全体を回転させることにより、アーム１１０と試料ホルダ４０を非接触状態とすることができる。 When the sample holder 40 is introduced into the mirror body 1, the procedure may be performed in the reverse order to the extraction. It is desirable that the arm 110 and the sample holder 40 are not in contact after the sample holder 40 reaches the observation position. The pneumatic actuator base 112 is rotatable about the axis of the base 113. By rotating the arm 110, the pneumatic actuator 111, and the entire pneumatic actuator base 112 around the base 113, the arm 110 and the sample holder 40 are rotated. Can be brought into a non-contact state.
上記の各実施例によれば、試料ホルダを安全に鏡体へ導入することが可能となる。試料ホルダ先端を試料ステージ等に接触させることなく確実に鏡体に導入することができるため、ホルダ先端への異物の付着を低減することができる。そのため、観察時のコンタミネーションを低減することができる。鏡体/試料ホルダの温度変化を小さくし、観察時の試料ドリフトを低減することができる。 According to each of the above embodiments, the sample holder can be safely introduced into the mirror body. Since the tip of the sample holder can be reliably introduced into the mirror body without contacting the sample stage or the like, the adhesion of foreign matter to the tip of the holder can be reduced. Therefore, contamination during observation can be reduced. The temperature change of the mirror / sample holder can be reduced, and the sample drift during observation can be reduced.
１…鏡体、２…荷重板、１０…試料ステージ、２０…ローダ、２１…ガイドレール、２２…第１支持部、２３…第２支持部、２４…モータ、２５…ボールネジ、２６…センサ、２７…位置検知板、２８…ハンドル、２９…Rガイド、３０…ベース、３１…試料ホルダストッカー、３２…試料ホルダ搬送アーム、４０…試料ホルダ、４１…ホルダ用Ｏリング、４２…ガイドピン、４３…試料、４４…支持棒、４５…突起１、５０…架台、５１…電子銃、５３…ステージ用コントローラ、５４…電子レンズ、５５…検出器、５７…主制御装置、６０…回転筒、６１…Ｚ駆動用リニア機構、６２…Ｚバネ、６３…ベアリング、６４…ベース、６５…エアーロック真空排気ポート、７３…内筒、７４…エアーロックバルブ１、７５…バルブ固定部、７６…球面受け、７７…球形支点、７８…外筒、７９…ホルダガイド溝、８１…ピン、８２…エアーロックバルブ用Ｏリング、８３…球形支点用Ｏリング１、８４…球形支点用Ｏリング２、１００…ハンドル回転方向、１０１…ハンドル伸縮方向、１０２…試料ホルダ水平移動用ステージ、１０３…試料ホルダ垂直移動用ステージ、１１０…アーム、１１１…空圧アクチュエータ、１１２…空圧アクチュエータベース、１１３…ベース DESCRIPTION OF SYMBOLS 1 ... Mirror body, 2 ... Load plate, 10 ... Sample stage, 20 ... Loader, 21 ... Guide rail, 22 ... 1st support part, 23 ... 2nd support part, 24 ... Motor, 25 ... Ball screw, 26 ... Sensor, 27 ... Position detection plate, 28 ... Handle, 29 ... R guide, 30 ... Base, 31 ... Sample holder stocker, 32 ... Sample holder transport arm, 40 ... Sample holder, 41 ... O-ring for holder, 42 ... Guide pin, 43 Specimen 44, Support rod 45, Projection 1 50, Base 51, Electron gun 53, Stage controller 54, Electronic lens 55, Detector 57, Main controller 60 Rotating cylinder 61 ... Z drive linear mechanism, 62 ... Z spring, 63 ... bearing, 64 ... base, 65 ... air lock vacuum exhaust port, 73 ... inner cylinder, 74 ... air lock valve 1, 75 ... valve fixing part, 76 ... spherical support, 77 ... spherical fulcrum, 78 ... outer cylinder, 79 ... holder guide groove, 81 ... pin, 82 ... O-ring for air lock valve, 83 ... O-ring 1 for spherical fulcrum, 84 ... O-ring 2 for spherical fulcrum , 100: Handle rotation direction, 101: Handle expansion / contraction direction, 102: Sample holder horizontal movement stage, 103 ... Sample holder vertical movement stage, 110 ... Arm, 111 ... Pneumatic actuator, 112 ... Pneumatic actuator base, 113 ... base
Claims (11)
前記試料ホルダが搭載されるホルダ支持部と、前記ホルダ支持部を駆動する駆動部を備えたローダを備え、
当該ローダにより前記試料ホルダの荷電粒子線装置の鏡体内への導入及び引き出しを行うこと
を特徴とする荷電粒子線装置。 In a charged particle beam device in which a side entry type sample holder is inserted,
A loader provided with a holder support part on which the sample holder is mounted, and a drive part for driving the holder support part;
A charged particle beam apparatus, wherein the loader performs introduction and extraction of the charged particle beam apparatus of the sample holder into a mirror body.
前記試料ホルダはガイドピンを備え、
前記ガイドピンにより前記荷電粒子線装置に設けられた予備排気室のバルブの開閉を行うことを特徴とする荷電粒子線装置。 The charged particle beam device according to claim 1,
The sample holder includes a guide pin,
A charged particle beam apparatus, wherein a valve of a preliminary exhaust chamber provided in the charged particle beam apparatus is opened and closed by the guide pin.
前記ローダは回転機構を備え、前記試料ホルダを当該回転機構により前記ガイドピンを駆動し、前記予備排気室のバルブの開閉を行うこと
を特徴とする荷電粒子線装置。 The charged particle beam device according to claim 2,
The loader comprises a rotating mechanism, and the sample holder drives the guide pin by the rotating mechanism to open and close the valve of the preliminary exhaust chamber.
前記ローダは回転機構を備え、前記回転機構により前記試料ホルダの軸中心に回転することを特徴とする荷電粒子線装置。 The charged particle beam device according to claim 1,
The charged particle beam apparatus according to claim 1, wherein the loader includes a rotation mechanism, and the rotation mechanism rotates the axis of the sample holder.
前記ホルダ支持部と前記試料ホルダには、互いに固定する固定部が設けられていることを特徴とする荷電粒子線装置。 The charged particle beam device according to claim 1,
The charged particle beam apparatus, wherein the holder support part and the sample holder are provided with a fixing part for fixing to each other.
前記支持部は前記試料ホルダを鉛直方向に駆動が可能であることを特徴とする荷電粒子線装置。 The charged particle beam device according to claim 1,
The charged particle beam apparatus according to claim 1, wherein the support portion can drive the sample holder in a vertical direction.
前記ローダは、前記試料ホルダの位置を認識する位置センサを備えたことを特徴とする荷電粒子線装置。 The charged particle beam device according to claim 1,
The charged particle beam apparatus, wherein the loader includes a position sensor for recognizing a position of the sample holder.
前記ローダは前記試料ホルダを複数備えるホルダストッカーを有することを特徴とする荷電粒子線装置。 The charged particle beam device according to claim 1,
The charged particle beam apparatus, wherein the loader includes a holder stocker including a plurality of the sample holders.
前記ホルダストッカーは、前記試料ホルダの有無を判断するセンサを備えたこと
を特徴とする荷電粒子線装置。 The charged particle beam apparatus according to claim 8.
The charged particle beam apparatus according to claim 1, wherein the holder stocker includes a sensor for determining the presence or absence of the sample holder.
前記ローダは、試料ホルダを駆動する空圧アクチュエータを備えたこと
を特徴とする荷電粒子線装置。 The charged particle beam device according to claim 1,
The charged particle beam apparatus, wherein the loader includes a pneumatic actuator for driving a sample holder.
前記ローダは、前記荷電粒子線装置の鏡体に固定されていること
を特徴とする荷電粒子線装置。 The charged particle beam device according to claim 1,
The charged particle beam apparatus, wherein the loader is fixed to a mirror body of the charged particle beam apparatus.
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| JP2013153168A JP6286146B2 (en) | 2013-07-24 | 2013-07-24 | Charged particle beam equipment |
| PCT/JP2014/063010 WO2015011967A1 (en) | 2013-07-24 | 2014-05-16 | Charged particle beam apparatus |
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| JPH10199466A (en) * | 1997-01-13 | 1998-07-31 | Hitachi Ltd | Ion beam working observation device |
| JP4185604B2 (en) * | 1998-11-18 | 2008-11-26 | 株式会社日立製作所 | Sample analysis method, sample preparation method and apparatus therefor |
| JP4847711B2 (en) * | 2004-04-16 | 2011-12-28 | 株式会社日立ハイテクノロジーズ | Charged particle beam equipment |
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| JPS60156658U (en) * | 1984-03-29 | 1985-10-18 | 日本電子株式会社 | Sample mounting device |
| JPH08124508A (en) * | 1994-10-20 | 1996-05-17 | Jeol Ltd | Sample holding device for electron microscope |
| JP2000182561A (en) * | 1998-12-14 | 2000-06-30 | Hitachi Ltd | Electron beam drawing device |
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| KR102118266B1 (en) * | 2018-10-25 | 2020-06-03 | 한국기초과학지원연구원 | Tem sample holding device |
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