JP2015017008A - Porous laminate, adsorption buffer material, and adsorption method - Google Patents
Porous laminate, adsorption buffer material, and adsorption method Download PDFInfo
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- JP2015017008A JP2015017008A JP2013144702A JP2013144702A JP2015017008A JP 2015017008 A JP2015017008 A JP 2015017008A JP 2013144702 A JP2013144702 A JP 2013144702A JP 2013144702 A JP2013144702 A JP 2013144702A JP 2015017008 A JP2015017008 A JP 2015017008A
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Abstract
Description
本発明は、多孔質積層体、該多孔質積層体を含む吸着緩衝材、及び該吸着緩衝材を用いた吸着方法に関する。 The present invention relates to a porous laminate, an adsorption buffer material including the porous laminate, and an adsorption method using the adsorption buffer material.
液晶用ガラス板や積層セラミックコンデンサ用のグリーンシート等、薄膜状、板状、又はフィルム状の物を固定又は搬送するための手段のひとつに、減圧吸引により上記薄膜等を吸着ステージ上に吸着固定又は吸着搬送する方法がある。その吸着ステージには、吸着面に吸着緩衝材として通気性を有する無機焼結体が装着される。これにより、被吸着部材に歪みが生じるのを防ぐことができる。このような無機焼結体としては、剛性等の観点から、セラミック粉末を焼結成形して得られる焼結成形体が用いられることがある。 One of the means for fixing or transporting thin-film, plate- or film-like objects such as liquid crystal glass plates and multilayer ceramic capacitor green sheets. Alternatively, there is a method of sucking and conveying. An air-permeable inorganic sintered body is attached to the adsorption stage as an adsorption buffer material on the adsorption surface. Thereby, distortion can be prevented from occurring in the attracted member. As such an inorganic sintered body, a sintered compact obtained by sintering a ceramic powder may be used from the viewpoint of rigidity and the like.
近年、液晶や積層セラミックコンデンサは小型化及び高性能化が急激に進行しており、その原料であるガラス板やセラミックグリーンシートの薄型化が進んでいる。このため非常に精密な吸着固定又は吸着搬送を行う必要が生じている。したがって、減圧吸引での吸着ステージに装着する吸着緩衝材としても、優れた表面平滑性や傷を防ぐ表面構造等が求められている。 In recent years, liquid crystal and multilayer ceramic capacitors have been rapidly reduced in size and performance, and glass plates and ceramic green sheets, which are raw materials, have been reduced in thickness. For this reason, it is necessary to perform very precise adsorption fixation or adsorption conveyance. Therefore, an excellent surface smoothness and a surface structure for preventing scratches are also required as an adsorption buffer material to be mounted on the adsorption stage by vacuum suction.
このような、表面平滑性に優れる多孔質シートとして、細孔層と粗孔層からなる多孔質焼結体が提案されている（例えば、特許文献１参照。）。また、強度剛性に優れ、吸引物の変形を防ぐ吸着固定板として、吸着孔を有する金属板あるいは樹脂板に網目スクリーンを添着させた吸着固定板の提案もなされている（例えば、特許文献２参照。）。 As such a porous sheet excellent in surface smoothness, a porous sintered body composed of a pore layer and a coarse pore layer has been proposed (see, for example, Patent Document 1). In addition, as a suction fixing plate that has excellent strength and rigidity and prevents the deformation of the sucked material, a suction fixing plate in which a mesh screen is attached to a metal plate or a resin plate having suction holes has been proposed (for example, see Patent Document 2). .)
液晶やセラミックコンデンサ等の精密部品の吸着固定又は吸着搬送では、被吸着部材に傷が付かないよう細心の注意が払われる。そのため、吸着面の表面構造にシャープエッジがないこと、つまり、切削や研削、研磨等の表面仕上げを行わないことが求められている。 In the suction fixing or suction transportation of precision parts such as liquid crystals and ceramic capacitors, great care is taken to avoid scratching the attracted member. Therefore, it is required that the surface structure of the suction surface has no sharp edges, that is, that surface finishing such as cutting, grinding, and polishing is not performed.
しかしながら、上記特許文献１に開示されている多孔質焼結体は、表面構造に関する検討がなされていない。また、上記特許文献２に開示されているフィルム吸着保持治具は、表面平滑性に関する検討がなされていない。 However, the porous sintered body disclosed in Patent Document 1 has not been studied on the surface structure. In addition, the film suction holding jig disclosed in Patent Document 2 has not been studied for surface smoothness.
また、液晶やセラミックコンデンサ等の精密部品の吸着固定又は吸着搬送では、吸着緩衝材の目詰まりによる減圧吸引時の圧損が高まることや、汚染により精密な着脱が出来なくなることも問題となる。そのため、吸着緩衝材には使用後、目詰まりや汚染のない状態に容易に戻せることも求められている。しかしながら、吸着緩衝材を切削や研削、研磨をし、洗浄すると原料粒子の切削屑や研削屑が発生する。そのため、吸着緩衝材の吸着面部分のみ交換できる技術も求められている。 Further, in the suction fixing or suction transportation of precision parts such as liquid crystal and ceramic capacitors, there is a problem that the pressure loss at the time of vacuum suction due to clogging of the suction buffer material is increased, and that precise attachment / detachment cannot be performed due to contamination. Therefore, it is also required that the adsorption buffer material can be easily returned to a state free from clogging and contamination after use. However, if the adsorption buffer material is cut, ground, polished, and cleaned, raw material particle cutting waste and grinding waste are generated. For this reason, there is a need for a technique that can replace only the adsorption surface portion of the adsorption buffer material.
さらに、被吸着部材に歪みが生じるのを防ぐことができる多孔質積層体も求められている。 Furthermore, a porous laminate that can prevent the adsorbed member from being distorted is also desired.
本発明は、上記問題点に鑑みてなされたものであり、優れた表面平滑性を有し、その表面構造に切削又は研削又は研磨面がなく、かつ原料粒子の脱落のない多孔質積層体、該多孔質積層体を含む吸着緩衝材、及び該吸着緩衝材を用いた吸着方法を提供することを目的とする。 The present invention has been made in view of the above problems, and has an excellent surface smoothness, a surface structure having no cutting or grinding or polishing surface, and no loss of raw material particles, An object of the present invention is to provide an adsorption buffer material including the porous laminate, and an adsorption method using the adsorption buffer material.
本発明者らは、上記課題を解決するために鋭意検討を行った結果、焼結体の少なくとも片面に通気性を有し表面平滑性に優れたシートが積層された多孔質積層体であれば、上記課題を解決することができることを見出し、本発明を完成するに至った。 As a result of intensive studies to solve the above-mentioned problems, the inventors of the present invention have a porous laminate in which a sheet having air permeability and excellent surface smoothness is laminated on at least one surface of the sintered body. The present inventors have found that the above problems can be solved, and have completed the present invention.
すなわち、本発明は以下の通りである。
〔１〕
無機焼結体及び／又は金属焼結体を含む焼結体（ａ）を有し、
該焼結体（ａ）の少なくとも片面に、通気性を有し、表面粗さ（Ｒａ）が０．１〜２０μｍであるシート（ｂ）が積層されている、
多孔質積層体。
〔２〕
前記焼結体（ａ）の平均気孔径が、５〜６００μｍである、前項〔１〕に記載の多孔質積層体。
〔３〕
前記シート（ｂ）が、織布、不織布、細孔シート、又は多孔質膜のいずれかである、前項〔１〕又は〔２〕に記載の多孔質積層体。
〔４〕
前記シート（ｂ）の表面粗さ（Ｒａ）が、０．１〜１０μｍである、前項〔１〕〜〔３〕のいずれか１項に記載の多孔質積層体。
〔５〕
厚さが１〜２０ｍｍである、前項〔１〕〜〔４〕のいずれか１項に記載の多孔質積層体。
〔６〕
通気量が０．０１〜６０ｃｍ３／ｃｍ２／ｓである、前項〔１〕〜〔５〕のいずれか１項に記載の多孔質積層体。
〔７〕
前項〔１〕〜〔６〕のいずれか１項に記載の多孔質積層体を含む、吸着緩衝材。
〔８〕
前項〔７〕に記載の吸着緩衝材を用いて薄膜を吸着する、吸着方法。
〔９〕
前記吸着緩衝材を吸着ステージの吸着面に装着し、前記吸着緩衝材上に前記薄膜を吸着する、前項〔８〕に記載の吸着方法。
〔１０〕
焼結体（ａ）を吸着ステージの吸着面に装着し、シート（ｂ）を前記焼結体（ａ）にさらに積層させて前記吸着緩衝材とし、該吸着緩衝材上に前記薄膜を吸着する、前項〔８〕に記載の吸着方法。
〔１１〕
前記薄膜がセラミックグリーンシートである、前項〔８〕〜〔１０〕のいずれか１項に記載の吸着方法。
That is, the present invention is as follows.
[1]
Having a sintered body (a) containing an inorganic sintered body and / or a metal sintered body;
A sheet (b) having air permeability and having a surface roughness (Ra) of 0.1 to 20 μm is laminated on at least one surface of the sintered body (a).
Porous laminate.
[2]
The porous laminate according to [1] above, wherein the sintered body (a) has an average pore diameter of 5 to 600 μm.
[3]
The porous laminate according to [1] or [2] above, wherein the sheet (b) is any one of a woven fabric, a nonwoven fabric, a pore sheet, or a porous membrane.
[4]
The porous laminate according to any one of [1] to [3], wherein the sheet (b) has a surface roughness (Ra) of 0.1 to 10 μm.
[5]
The porous laminate according to any one of [1] to [4], wherein the thickness is 1 to 20 mm.
[6]
The porous laminate according to any one of [1] to [5], wherein the air flow rate is 0.01 to 60 cm 3 / cm 2 / s.
[7]
An adsorption buffer material comprising the porous laminate according to any one of [1] to [6].
[8]
An adsorption method for adsorbing a thin film using the adsorption buffer material according to the item [7].
[9]
The adsorption method according to [8], wherein the adsorption buffer material is attached to an adsorption surface of an adsorption stage, and the thin film is adsorbed on the adsorption buffer material.
[10]
The sintered body (a) is mounted on the adsorption surface of the adsorption stage, the sheet (b) is further laminated on the sintered body (a) to form the adsorption buffer material, and the thin film is adsorbed on the adsorption buffer material. The adsorption method according to [8] above.
[11]
The adsorption method according to any one of [8] to [10], wherein the thin film is a ceramic green sheet.
本発明によれば、優れた表面平滑性を有し、その表面構造に切削又は研削又は研磨面がなく、かつ原料粒子の脱落のない多孔質積層体、該多孔質積層体を含む吸着緩衝材、及び該吸着緩衝材を用いた吸着方法を提供することができる。 According to the present invention, a porous laminate having excellent surface smoothness, having no cutting, grinding, or polishing surface in its surface structure, and having no falling off of raw material particles, and an adsorption buffer material including the porous laminate , And an adsorption method using the adsorption buffer material.
以下、本発明を実施するための形態（以下、「本実施形態」という。）について詳細に説明する。なお、本発明は、以下の本実施の形態に限定されるものではなく、その要旨の範囲内で種々変形して実施することができる。 Hereinafter, a mode for carrying out the present invention (hereinafter referred to as “the present embodiment”) will be described in detail. The present invention is not limited to the following embodiment, and can be implemented with various modifications within the scope of the gist.
〔多孔質積層体〕
本実施形態に係る多孔質積層体は、
無機焼結体及び／又は金属焼結体を含む焼結体（ａ）を有し、
該焼結体（ａ）の少なくとも片面に、通気性を有し、表面粗さ（Ｒａ）が０．１〜２０μｍであるシート（ｂ）が積層されている。
[Porous laminate]
The porous laminate according to this embodiment is
Having a sintered body (a) containing an inorganic sintered body and / or a metal sintered body;
A sheet (b) having air permeability and having a surface roughness (Ra) of 0.1 to 20 μm is laminated on at least one surface of the sintered body (a).
〔無機焼結体及び／又は金属焼結体を含む焼結体（ａ）〕
本実施形態に係る多孔質積層体は、無機焼結体及び／又は金属焼結体を含む焼結体（ａ）を有する。焼結体は連続気孔を有する多孔質体のため、減圧吸引時の空気の流路が複雑となり、吸引圧力を分散させることができる。そのため、このような焼結体（ａ）を有することにより、被吸着部材に歪みが生じるのを防ぐことができる。また、パンチングシートよりも焼結体の方が気孔径を小さくすることが容易であり、焼結体の気孔径は使用する原料粒子の粒径を変更するだけで調整することができるという利点もある。
[Sintered body including inorganic sintered body and / or metal sintered body (a)]
The porous laminate according to this embodiment has a sintered body (a) including an inorganic sintered body and / or a metal sintered body. Since the sintered body is a porous body having continuous pores, the air flow path during vacuum suction is complicated, and the suction pressure can be dispersed. Therefore, by having such a sintered body (a), it is possible to prevent the adsorbed member from being distorted. In addition, the sintered body is easier to reduce the pore diameter than the punched sheet, and the pore diameter of the sintered body can be adjusted simply by changing the particle diameter of the raw material particles used. is there.
無機焼結体を構成する材質としては、特に限定されないが、例えば、セラミックスまたはガラスが挙げられる。無機焼結体としては、特に限定されないが、具体的には、アルミナ、ジルコニア、コージライト、イットリア、窒化珪素、炭化珪素、窒化アルミ、ムライト、チタニアや、セラミックスと金属の複合材料であるサーメット等が挙げられる。 Although it does not specifically limit as a material which comprises an inorganic sintered compact, For example, ceramics or glass is mentioned. The inorganic sintered body is not particularly limited, and specifically, alumina, zirconia, cordierite, yttria, silicon nitride, silicon carbide, aluminum nitride, mullite, titania, cermet which is a composite material of ceramics and metal, etc. Is mentioned.
金属焼結体を構成する材質としては、特に限定されないが、例えば、金属、又は合金が挙げられる。このような金属又は合金としては、特に限定されないが、具体的には、マルテンサイト系ステンレス鋼、フェライト系ステンレス鋼、オーステナイト系ステンレス鋼、オーステナイト・フェライト二相ステンレス鋼、析出硬化ステンレス鋼等のステンレス鋼；青銅や黄銅等の銅合金；鉄、銅等が挙げられる。 Although it does not specifically limit as a material which comprises a metal sintered compact, For example, a metal or an alloy is mentioned. Such metal or alloy is not particularly limited, and specifically, stainless steel such as martensitic stainless steel, ferritic stainless steel, austenitic stainless steel, austenitic / ferritic duplex stainless steel, precipitation hardened stainless steel, etc. Steel; copper alloys such as bronze and brass; iron, copper and the like.
また、焼結体（ａ）は、黒鉛、モリブテン、二硫化モリブテン、炭化タングステン、コバルト、ニッケル、マンガン、チタン、タンタル、ジルコニウム、フッ化ストロンチウムなどに代表される金属フッ化物、バリウム、カルシウム等を含んでもよい。このような成分を含むことにより、焼結体（ａ）の硬度がより向上し、耐熱性、耐食性、及び切削性がより向上する傾向にある。 The sintered body (a) is made of graphite, molybdenum, molybdenum disulfide, tungsten carbide, cobalt, nickel, manganese, titanium, tantalum, zirconium, strontium fluoride, metal fluorides such as barium and calcium. May be included. By including such a component, the hardness of the sintered body (a) is further improved, and the heat resistance, corrosion resistance, and machinability tend to be further improved.
焼結体（ａ）の形成方法としては、特に限定されず公知の方法を用いることができ、例えば、プレス成形、冷間静水圧加圧成形、押出成形、射出成形、鋳込成形、粉末冶金等で成形し、真空中、大気中、不活性ガス雰囲気中など目的に応じて焼結することで形成することが可能である。また焼結方法としては、特に限定されないが、例えば、ホットプレス法、反応焼結法、常圧焼結法、反応焼結法と常圧焼結法の組合せである２段焼結法、熱間静水圧プレス法、ガス圧焼結法、化学気層析出法等が挙げられる。また、寸法精度や表面平滑性を向上させるため、切削や研削、研磨加工を行うこともできる。なお、本実施形態に係る多孔質積層体は、後述するシート（ｂ）を有し、シート（ｂ）が被吸着部材と接触するように使用できるため、焼結体（ａ）自体が切削又は研削又は研磨面を有していたとしてもそれにより被吸着部材に傷がつくことを回避することができる。 The method for forming the sintered body (a) is not particularly limited, and a known method can be used. For example, press molding, cold isostatic pressing, extrusion molding, injection molding, casting molding, powder metallurgy It can be formed by sintering according to the purpose such as in vacuum, in the air, or in an inert gas atmosphere. The sintering method is not particularly limited. For example, a hot press method, a reaction sintering method, a normal pressure sintering method, a two-stage sintering method that is a combination of the reaction sintering method and the normal pressure sintering method, Examples include an isostatic pressing method, a gas pressure sintering method, and a chemical vapor deposition method. Moreover, in order to improve dimensional accuracy and surface smoothness, cutting, grinding, and polishing can be performed. In addition, since the porous laminated body which concerns on this embodiment has a sheet | seat (b) mentioned later, and can use it so that a sheet | seat (b) may contact an adsorbed member, sintered compact (a) itself cuts or Even if it has a ground or polished surface, it is possible to avoid scratching the attracted member.
焼結体（ａ）の平均気孔径は、５〜６００μｍが好ましく、１０〜３００μｍがより好ましく、２０〜１５０μｍがさらに好ましく、２０〜１００μｍがよりさらに好ましい。焼結体（ａ）の平均気孔径が５μｍ以上であることにより、焼結体（ａ）の通気性がより優れ、被吸着部材の吸着性がより向上する傾向にある。また、焼結体（ａ）の平均気孔径が６００μｍ以下であることにより、減圧吸引時にシート（ｂ）が焼結体（ａ）焼結体の内部に吸引され撓んでしまうことをより抑制でき、さらにコストにも優れる傾向にある。なお、平均気孔径は、ポロシメータ（株式会社島津製作所社製「オートポアＩＶ９５００」）を用い、測定して得ることができる。 The average pore diameter of the sintered body (a) is preferably 5 to 600 μm, more preferably 10 to 300 μm, further preferably 20 to 150 μm, and still more preferably 20 to 100 μm. When the average pore diameter of the sintered body (a) is 5 μm or more, the air permeability of the sintered body (a) is more excellent, and the adsorptivity of the member to be adsorbed tends to be further improved. In addition, since the average pore diameter of the sintered body (a) is 600 μm or less, it is possible to further suppress the sheet (b) from being sucked into the sintered body (a) and bent during suction under reduced pressure. In addition, the cost tends to be excellent. The average pore diameter can be obtained by measurement using a porosimeter (“Autopore IV9500” manufactured by Shimadzu Corporation).
焼結体（ａ）の平均気孔径は原料粒子の粒径によって調整することができる。焼結方法や条件、粒子の形状によっても異なるが、焼結体（ａ）を構成する原料粒子の平均粒径を１０〜１０００μｍとすることにより平均気孔径を５〜６００μｍに制御することができ、２０〜６００μｍとすることにより平均気孔径を１０〜３００μｍに制御することができ、４０〜３００μｍとすることにより平均気孔径を２０〜１５０μｍに制御することができ、８０〜２００μｍとすることにより平均気孔径を４０〜１００μｍに制御することができる。ここで、「原料粒子の平均粒径」とは、累積重量が５０％となる粒子径、すなわちメディアン径をいう。原料粒子の平均粒径は、レーザ回析式粒度分布測定装置（株式会社島津製作所社製「ＳＡＬＤ−２１００」）を用い、メタノールを分散媒として測定することができる。 The average pore diameter of the sintered body (a) can be adjusted by the particle diameter of the raw material particles. Although it depends on the sintering method, conditions, and particle shape, the average pore diameter can be controlled to 5 to 600 μm by setting the average particle diameter of the raw material particles constituting the sintered body (a) to 10 to 1000 μm. By setting the average pore diameter to 20 to 600 μm, the average pore diameter can be controlled to 10 to 300 μm. By setting the average pore diameter to 40 to 300 μm, the average pore diameter can be controlled to 20 to 150 μm, and by setting to 80 to 200 μm. The average pore diameter can be controlled to 40 to 100 μm. Here, the “average particle diameter of the raw material particles” refers to a particle diameter at which the cumulative weight becomes 50%, that is, a median diameter. The average particle diameter of the raw material particles can be measured using a laser diffraction particle size distribution measuring apparatus (“SALD-2100” manufactured by Shimadzu Corporation) using methanol as a dispersion medium.
焼結体（ａ）の厚さは、１〜２０ｍｍが好ましく、２〜１５ｍｍがより好ましく、２〜１０ｍｍがさらに好ましく、２〜６ｍｍがよりさらに好ましい。焼結体（ａ）の厚さが上記範囲内であることにより、取扱い性の簡便さとコストにより優れる傾向にある。ここで言う焼結体（ａ）の厚さとは、シート（ｂ）を積層する前の厚さであってもいいし、シート（ｂ）を積層した後に焼結体（ａ）のみの厚さを測ったものであってもよい。なお、焼結体（ａ）のみの厚さは実施例に記載の方法により測定することができる。 1-20 mm is preferable, as for the thickness of a sintered compact (a), 2-15 mm is more preferable, 2-10 mm is further more preferable, and 2-6 mm is still more preferable. When the thickness of the sintered body (a) is within the above range, it tends to be easier to handle and more cost-effective. The thickness of the sintered body (a) here may be the thickness before the sheet (b) is laminated, or the thickness of only the sintered body (a) after the sheet (b) is laminated. It may be measured. The thickness of only the sintered body (a) can be measured by the method described in the examples.
〔通気性を有するシート（ｂ）〕
本実施形態に係る多孔質積層体は、上記焼結体（ａ）の少なくとも片面に、通気性を有し、表面粗さ（Ｒａ）が０．１〜２０μｍであるシート（ｂ）が積層されたものである。このようなシート（ｂ）を用いることにより、優れた表面平滑性を有し、その表面構造に切削又は研削又は研磨面がないため被吸着部材に傷がつくことを抑制でき、焼結体（ａ）からの原料粒子の脱落をより抑制することができる。
[Bleeding sheet (b)]
In the porous laminate according to this embodiment, a sheet (b) having air permeability and a surface roughness (Ra) of 0.1 to 20 μm is laminated on at least one surface of the sintered body (a). It is a thing. By using such a sheet (b), it has excellent surface smoothness, and since there is no cutting or grinding or polishing surface in its surface structure, it is possible to suppress damage to the adsorbed member, and a sintered body ( Omission of the raw material particles from a) can be further suppressed.
また、液晶やセラミックコンデンサ等の精密部品の吸着固定又は吸着搬送において、吸着緩衝材の目詰まりによる減圧吸引時の圧損が高まった場合や、汚染により精密な着脱が出来なくなった場合には、多孔質積層体のシート（ｂ）のみ交換することにより、目詰まりや汚染のない状態に容易に戻すことができる。これにより、吸着緩衝材を切削や研削、研磨をし、洗浄すること等による原料粒子の切削屑や研削屑の発生をより抑制することができる。 In addition, if the pressure loss during vacuum suction due to clogging of the adsorption buffer material increases or the attachment / detachment of precision parts such as liquid crystal and ceramic capacitors is difficult, or if precise attachment / detachment becomes impossible due to contamination, By replacing only the sheet (b) of the porous laminate, it can be easily returned to a state free from clogging and contamination. Thereby, generation | occurrence | production of the cutting waste and grinding waste of raw material particle | grains by cutting, grinding, grinding | polishing and wash | cleaning an adsorption buffer material can be suppressed more.
ここで「通気性」とは、シート（ｂ）の片面側とその反対の面側に空気の圧力差があるとき、高い圧力の面側から低い圧力の面側に空気が通過する性質（空気を通す性質）をいう。 Here, “breathability” means the property that air passes from the high pressure surface side to the low pressure surface side (air) when there is a difference in air pressure between the one surface side and the opposite surface side of the sheet (b). Property).
また、ここで、「切削面」とは、ドリル、バイト、フライス、エンドミル、リーマー、タップ、ホブ、ピニオンカッタ、ダイス、ブローチ、トリマ、ルータ等の切削工具を用いて削った面、のことをいう。 In addition, here, the “cutting surface” means a surface cut using a cutting tool such as a drill, a bite, a milling cutter, an end mill, a reamer, a tap, a hob, a pinion cutter, a die, a broach, a trimmer, or a router. Say.
また、「研削面」とは、酸化アルミニウム、炭化ケイ素、セリウム、ジルコニウム、ガーネット、ダイヤモンド、ＣＢＮ等の砥石を高速回転させて削った面、のことをいう。 The “grinding surface” refers to a surface obtained by grinding a grindstone such as aluminum oxide, silicon carbide, cerium, zirconium, garnet, diamond, or CBN at high speed.
「研磨面」とは、ラッピング、ポリッシング、バフ等の加工に代表される、砥粒が固定されていない状態で削った面、のことをいう。 “Polished surface” refers to a surface that has been ground in a state where abrasive grains are not fixed, such as lapping, polishing, buffing, and the like.
シート（ｂ）としては、特に限定されないが、織布、不織布、細孔シート、多孔質膜が挙げられる。一般に、織布、不織布、細孔シート、多孔質膜に対しては、切削又は研削又は研磨を行わないため、これらをシート（ｂ）として用いることにより、表面構造が切削又は研削又は研磨面ではない多孔質積層体を得ることができる。 Although it does not specifically limit as a sheet | seat (b), A woven fabric, a nonwoven fabric, a pore sheet | seat, and a porous membrane are mentioned. In general, woven fabrics, non-woven fabrics, fine pore sheets, and porous membranes are not cut, ground, or polished. Therefore, by using these as the sheet (b), the surface structure is cut, ground, or polished. A porous laminate can be obtained.
「織布」とは、繊維を経緯に組み合わせて作った織物、もしくは繊維を編みあげた編物をいう。織布は従来公知の方法により得ることができる。 “Woven fabric” refers to a woven fabric made by combining fibers with a background, or a knitted fabric in which fibers are knitted. The woven fabric can be obtained by a conventionally known method.
「不織布」とは、繊維同士を織らないで積層して重ね合わせ、種々の方法により結合させて得たシートをいう。上記不織布を製造する方法としては、特に限定されないが、例えば、湿式法、スパンレース法、メルトブロー法、電気紡糸法等が挙げられる。不織布のなかでも、脱落繊維がないことから、耐摩耗性に優れ、強度の高い長繊維不織布が好ましい。 “Nonwoven fabric” refers to a sheet obtained by laminating and superposing fibers without being woven together and bonding them by various methods. The method for producing the nonwoven fabric is not particularly limited, and examples thereof include a wet method, a spunlace method, a melt blow method, and an electrospinning method. Among non-woven fabrics, a long-fiber non-woven fabric having excellent wear resistance and high strength is preferred because there are no falling fibers.
「細孔シート」とは、薄膜、板状、又はフィルム状のシートにパンチ等を用いて穴を打つことにより製造したものをいう。細孔シートの細孔は特に限定されず、円状のほか、多角形等の種々の形状であってよい。配列も格子状、千鳥状等の種々の配列であってよい。 The “pore sheet” refers to a sheet produced by punching holes using a punch or the like in a thin film, plate, or film sheet. The pores of the pore sheet are not particularly limited, and may be various shapes such as a polygon as well as a circle. The arrangement may also be various arrangements such as a lattice shape and a staggered shape.
「多孔質膜」とは、相分離法、抽出法、化学処理法、延伸法、照射エッチング法、融着法、発泡法等の従来公知の方法により、連通した細孔を形成したものである。 “Porous membrane” is a film in which continuous pores are formed by a conventionally known method such as a phase separation method, an extraction method, a chemical treatment method, a stretching method, an irradiation etching method, a fusion method, or a foaming method. .
なかでも、織布や細孔シートは、篩の篩網として使用されることが広く知られている。さらに織布の中でも繊維を経緯に組み合わせて作った織物は、スクリーン印刷の版にも使用されていることが広く知られている。 Among these, woven fabrics and pore sheets are widely used as sieve screens. Furthermore, it is widely known that fabrics made by combining fibers among woven fabrics are also used for screen printing plates.
織布又は不織布の場合にシート（ｂ）に用いられる材質としては、特に限定されないが、例えば、ナイロン６、ナイロン６６、共重合ポリアミド等のポリアミド系繊維；ポリエチレンテレフタレート、ポリブチレンテレフタレート、ポリトリメチレンテレフタレート、共重合ポリエステル等のポリエステル系繊維；ポリエチレン、ポリプロピレン、共重合ポリプロピレン等のポリオレフィン系繊維；ポリテトラフルオロエチレン、ポリビニリジンフルオリド、ペルフルオロポリマー等のフッ素系繊維；ポリエーテルウレタン等のポリウレタン繊維；ビニロン繊維、ポリ塩化ビニル繊維、ポリ塩化ビニリデン繊維、アクリル繊維、ポリイミド繊維、ポリエーテルイミド繊維、ポリアリレート繊維、ポリフェニレンサルファイド繊維、ポリビニルアルコール繊維、ポリカーボネート繊維、ポリ乳酸繊維、ポリオキシド繊維、ポリエチレンオキシド繊維、ポリスチレン繊維、ポリエチレングリコール誘導体繊維、ポリホスファゼン繊維等に代表される合成繊維；セルロースアセテート、セルロースアセテートブチレート、セルロースアセテートプロピオネート、プロミックス等に代表される半合成繊維；ガラス繊維、炭素繊維等に代表される無機繊維；レーヨン、キュプラ等に代表される再生繊維；綿、木綿、石綿、羊毛、麻、絹等に代表される天然繊維；あるいは金属繊維が挙げられる。これらは単独で用いても２種類以上混合して用いてもよい。また、鞘部分がポリエチレン、ポリプロピレン、共重合ポリエステル等からなり、芯部分がポリプロピレン、ポリエステル等からなる複合繊維等であってもよい。さらに、繊維の互いに交差する部分が、溶融させることで接合されていてもよく、接着物質で接合されていてもよい。 The material used for the sheet (b) in the case of a woven fabric or a non-woven fabric is not particularly limited. For example, polyamide-based fibers such as nylon 6, nylon 66, copolymer polyamide; polyethylene terephthalate, polybutylene terephthalate, polytrimethylene Polyester fibers such as terephthalate and copolyester; Polyolefin fibers such as polyethylene, polypropylene, and copolypropylene; Fluorine fibers such as polytetrafluoroethylene, polyvinylidin fluoride, and perfluoropolymer; Polyurethane fibers such as polyether urethane Vinylon fiber, polyvinyl chloride fiber, polyvinylidene chloride fiber, acrylic fiber, polyimide fiber, polyetherimide fiber, polyarylate fiber, polyphenylene sulfide fiber, polyvinyl Synthetic fibers typified by lucor fiber, polycarbonate fiber, polylactic acid fiber, polyoxide fiber, polyethylene oxide fiber, polystyrene fiber, polyethylene glycol derivative fiber, polyphosphazene fiber, etc .; cellulose acetate, cellulose acetate butyrate, cellulose acetate propionate, Semi-synthetic fibers represented by promixes, etc .; inorganic fibers represented by glass fibers, carbon fibers, etc .; recycled fibers represented by rayon, cupra, etc .; represented by cotton, cotton, asbestos, wool, hemp, silk, etc. Natural fibers; or metal fibers. These may be used alone or in combination of two or more. Moreover, the sheath part may be made of polyethylene, polypropylene, copolyester or the like, and the core part may be a composite fiber made of polypropylene, polyester or the like. Furthermore, the crossing portions of the fibers may be joined by melting or may be joined by an adhesive substance.
また、細孔シート又は多孔質膜の場合にシート（ｂ）に用いられる材質としては、特に限定されないが、例えば、ポリエチレン、ポリプロピレン、エチレン酢酸ビニル共重合体、エチレン−ビニルアルコール共重合体、エチレン−メタクリル酸共重合体、環状オレフィンコポリマー、ポリメチルペンテン等に代表されるポリオレフィン系樹脂；エチレン−四フッ化エチレン共重合体、四フッ化エチレン−六フッ化プロピレン共重合体、エチレン−クロロトリフルオロエチレン共重合体、ペルフルオロアルコキシフッ素樹脂、ポリテトラフルオロエチレン、ポリクロロトリフルオロエチレン、ポリフッ化ビニリデン、ポリフッ化ビニル等に代表されるフッ素系樹脂；ナイロン６、ナイロン６６、共重合ポリアミド等のポリアミド系樹脂；ポリエチレンテレフタレート、ポリブチレンテレフタレート、ポリトリメチレンテレフタレート、共重合ポリエステル等のポリエステル系樹脂；アイオノマー、ポリウレタン、セロファン、ポリ乳酸、セルロース、酢酸セルロース、硝酸セルロース、トリアセチルセルロース、ポリケトン、ポリエーテルエーテルケトン、ポリイミド、ポリエーテルイミド、ポリアミドイミド、ポリアリレート、ポリアセタール、変性ポリフェニレンエーテル、ポリ酢酸ビニル、ポリ塩化ビニル、ポリ塩化ビニリデン、ポリフェニレンサルファイド、ポリスルホン、ポリエーテルスルホン、ポリビニルアルコール、ポリビニルブチラール、ポリカーボネート、ポリスチレン、ポリアクリル酸エステル、ポリアクリロニトリル、フェノール樹脂等が挙げられる。これらは単独で用いても２種類以上混合して用いてもよい。 In addition, the material used for the sheet (b) in the case of a pore sheet or a porous membrane is not particularly limited, but for example, polyethylene, polypropylene, ethylene vinyl acetate copolymer, ethylene-vinyl alcohol copolymer, ethylene -Polyolefin resins represented by methacrylic acid copolymer, cyclic olefin copolymer, polymethylpentene, etc .; ethylene-tetrafluoroethylene copolymer, tetrafluoroethylene-hexafluoropropylene copolymer, ethylene-chlorotri Fluoropolymers typified by fluoroethylene copolymers, perfluoroalkoxy fluororesins, polytetrafluoroethylene, polychlorotrifluoroethylene, polyvinylidene fluoride, polyvinyl fluoride, etc .; polyamides such as nylon 6, nylon 66, copolymerized polyamide, etc. Resin; Polyester resins such as terephthalate, polybutylene terephthalate, polytrimethylene terephthalate, copolyester; ionomer, polyurethane, cellophane, polylactic acid, cellulose, cellulose acetate, cellulose nitrate, triacetyl cellulose, polyketone, polyether ether ketone, polyimide , Polyetherimide, polyamideimide, polyarylate, polyacetal, modified polyphenylene ether, polyvinyl acetate, polyvinyl chloride, polyvinylidene chloride, polyphenylene sulfide, polysulfone, polyethersulfone, polyvinyl alcohol, polyvinyl butyral, polycarbonate, polystyrene, polyacryl An acid ester, polyacrylonitrile, a phenol resin, etc. are mentioned. These may be used alone or in combination of two or more.
本実施形態に用いるシート（ｂ）の表面粗さ（Ｒａ）は、０．１〜２０μｍであり、０．１〜１０μｍが好ましく、０．１〜５μｍがより好ましく、０．１〜３μｍがさらに好ましい。表面粗さ（Ｒａ）が上記範囲内であることにより、表面平滑性の部分的なバラつきが少なく、表面平滑性により優れる。なお、表面粗さ（Ｒａ）は、実施例に記載の方法により測定することができる。 The surface roughness (Ra) of the sheet (b) used in the present embodiment is 0.1 to 20 μm, preferably 0.1 to 10 μm, more preferably 0.1 to 5 μm, and further 0.1 to 3 μm. preferable. When the surface roughness (Ra) is within the above range, the surface smoothness is less likely to be partially varied, and the surface smoothness is more excellent. In addition, surface roughness (Ra) can be measured by the method as described in an Example.
シート（ｂ）の表面粗さ（Ｒａ）は、織布であれば用いる繊維の繊維径やメッシュ数で、不織布又は多孔質膜であれば気孔径で、細孔シートであれば細孔の形状やサイズによって調整することができる。 The surface roughness (Ra) of the sheet (b) is the fiber diameter and the number of meshes of fibers used in the case of a woven fabric, the pore diameter in the case of a nonwoven fabric or a porous film, and the pore shape in the case of a pore sheet. And can be adjusted by size.
用いる材質によっても異なるが、平織の織布であればメッシュ数を１５０メッシュ以上とすることにより、表面粗さ（Ｒａ）を２０μｍ以下にすることができる。 The surface roughness (Ra) can be reduced to 20 μm or less by changing the number of meshes to 150 mesh or more if it is a plain woven fabric, although it depends on the material used.
繊維を経緯に組み合わせて作った織布であれば、メッシュ数は１５０メッシュ以上が好ましく、２５０メッシュ以上がより好ましく、４２０メッシュ以上がさらに好ましい。メッシュ数が１５０メッシュ以上であることにより、表面平滑性により優れる傾向にある。さらに、４２０メッシュ以上の織物に表面平滑性を向上させるカレンダー加工や開口部を小さくするシュリンク加工を行ったシート（ｂ）も好ましい。このような加工を施したシート（ｂ）を用いることにより、表面平滑性にさらに優れる傾向にある。ここでいう「メッシュ数」とは、１インチあたりの糸の本数である。 In the case of a woven fabric made by combining fibers with the background, the number of meshes is preferably 150 mesh or more, more preferably 250 mesh or more, and further preferably 420 mesh or more. When the number of meshes is 150 mesh or more, the surface smoothness tends to be superior. Furthermore, the sheet | seat (b) which performed the calendar process which improves surface smoothness, and the shrink process which makes an opening part small for the textile fabric of 420 mesh or more is also preferable. By using the sheet (b) subjected to such processing, the surface smoothness tends to be further improved. Here, the “number of meshes” is the number of yarns per inch.
また、不織布又は多孔質膜であればポロシメータにて測定できる平均気孔径を１００μｍ以下とすることにより、表面粗さ（Ｒａ）を２０μｍ以下にすることができる。 Moreover, if it is a nonwoven fabric or a porous film, the surface roughness (Ra) can be 20 micrometers or less by making the average pore diameter measurable with a porosimeter into 100 micrometers or less.
また、細孔シートであればシートの厚みによっても異なるが、例えば厚み０．０５ｍｍであれば開口径１００μｍ以下とすることにより、表面粗さ（Ｒａ）を２０μｍ以下にすることができる。 Moreover, if it is a pore sheet | seat, it changes also with the thickness of a sheet | seat, However If the thickness is 0.05 mm, surface roughness (Ra) can be 20 micrometers or less by setting it as an opening diameter of 100 micrometers or less.
シート（ｂ）の厚さは、０．００１〜５ｍｍが好ましく、０．０１〜２ｍｍがより好ましく、０．０１〜０．５ｍｍがさらに好ましく、０．０２〜０．２ｍｍがよりさらに好ましい。厚さが上記範囲内にあることにより、取扱の簡便さ、及びコストにより優れる傾向にある。多孔質積層体中のシート（ｂ）の厚みは実施例に記載の方法により測定することができる。 The thickness of the sheet (b) is preferably 0.001 to 5 mm, more preferably 0.01 to 2 mm, still more preferably 0.01 to 0.5 mm, and still more preferably 0.02 to 0.2 mm. When the thickness is within the above range, the handling tends to be easier and the cost tends to be better. The thickness of the sheet (b) in the porous laminate can be measured by the method described in Examples.
通気性を有するシート（ｂ）は、同じ開口部の面積でも空隙率の異なる仕様で製造することが容易である。また、その開口部の面積や厚みの安定性という観点で、シート（ｂ）を用いることは産業上極めて有効である。 The sheet (b) having air permeability can be easily manufactured with specifications having different porosity even in the area of the same opening. In addition, using the sheet (b) is extremely effective from the viewpoint of stability of the area and thickness of the opening.
〔多孔質積層体の製造方法〕
焼結体（ａ）とシート（ｂ）を積層させるには、接着剤等を用いて接着してもよいし、熱によって融着させてもよい。
[Method for producing porous laminate]
In order to laminate the sintered body (a) and the sheet (b), they may be bonded using an adhesive or the like, or may be fused by heat.
通気性を確保するために、焼結体（ａ）とシート（ｂ）とを部分的に接着及び／又は熱による融着をすることが好ましい。このような積層方法としては、特に限定されないが、例えば、スプレー式粘着剤等の接着剤を用いて点状、繊維状等の接着面の形成する方法、グラビアコータ、ロールコータ、スクリーン印刷機等を用いて点状、網目状、筋状等に接着面を形成する方法、粒子形状、ネット形状の熱可塑性樹脂を介して、加圧加熱して融着させる方法、超音波ウエルダー機、超音波ミシン等を用いスポット溶接させる方法、焼結体（ａ）と接するシート（ｂ）の面をわずかに溶融することで融着させる方法等が挙げられる。中でも、スプレー式接着剤を用い点状、繊維状等の接着面を形成する方法は簡便であるため好ましい。 In order to ensure air permeability, it is preferable that the sintered body (a) and the sheet (b) are partially bonded and / or fused by heat. Such a laminating method is not particularly limited. For example, a method of forming a dotted or fibrous adhesive surface using an adhesive such as a spray adhesive, a gravure coater, a roll coater, a screen printing machine, or the like. A method of forming adhesive surfaces in the form of dots, meshes, streaks, etc., a method of pressurizing and fusing via a thermoplastic resin having a particle shape or a net shape, an ultrasonic welder, an ultrasonic wave Examples thereof include a method of spot welding using a sewing machine and the like, a method of fusing by slightly melting the surface of the sheet (b) in contact with the sintered body (a), and the like. Among these, a method of forming a dotted or fibrous adhesive surface using a spray adhesive is preferable because it is simple.
スプレー式粘着剤等の接着剤としては、特に限定されないが、例えば、ポリエステル系樹脂、アクリル系樹脂、ポリアミド系樹脂、ポリイミド系樹脂、α−オレフィン系樹脂、ポリオレフィン系樹脂、ウレタン系樹脂、エーテル系セルロース、ニトロセルロース、ポリ酢酸ビニル系樹脂、ポリスチレン系樹脂、ポリビニルアルコール系樹脂、ポリビニルピロリドン系樹脂、ポリビニルブチラール系樹脂、ポリベンズイミダソール系樹脂、ポリメタクリレート系樹脂、メラミン系樹脂、ユリア系樹脂、レゾルシノール系樹脂、エチレン酢酸ビニル系樹脂、酢酸ビニル系樹脂、エポキシ系樹脂、塩化ビニル系樹脂、クロロプレンゴム系樹脂、スチレンブタジエンゴム系樹脂、ニトリルゴム系樹脂、シアノアクリレート系樹脂、水性高分子、イソシアネート系樹脂、シリコーン系樹脂、変性シリコーン系樹脂、フェノール系樹脂、フッ素系樹脂、もしくはエチレン酢酸ビニル樹脂ホットメルト、反応性ホットメルト、ポリアミド樹脂ホットメルト、ポリウレタンホットメルト、ポリオレフィンホットメルト等の既存のものを採用可能である。 The adhesive such as a spray-type pressure-sensitive adhesive is not particularly limited. For example, a polyester resin, an acrylic resin, a polyamide resin, a polyimide resin, an α-olefin resin, a polyolefin resin, a urethane resin, and an ether resin. Cellulose, nitrocellulose, polyvinyl acetate resin, polystyrene resin, polyvinyl alcohol resin, polyvinyl pyrrolidone resin, polyvinyl butyral resin, polybenzimidazole resin, polymethacrylate resin, melamine resin, urea resin Resorcinol resin, ethylene vinyl acetate resin, vinyl acetate resin, epoxy resin, vinyl chloride resin, chloroprene rubber resin, styrene butadiene rubber resin, nitrile rubber resin, cyanoacrylate resin, aqueous polymer, Isoshi Nate resin, silicone resin, modified silicone resin, phenol resin, fluorine resin, or ethylene vinyl acetate resin hot melt, reactive hot melt, polyamide resin hot melt, polyurethane hot melt, polyolefin hot melt, etc. Can be adopted.
焼結体（ａ）とシート（ｂ）を積層させるには、接着剤付き織布を使用することもできる。この場合、接着剤層を織布の線状部分上のみに設ける公知の方法（例えば、特開２００９−１６７２７５号公報に記載）を用いることもできる。 In order to laminate the sintered body (a) and the sheet (b), a woven fabric with an adhesive can also be used. In this case, a known method (for example, described in JP-A-2009-167275) in which an adhesive layer is provided only on the linear portion of the woven fabric can also be used.
本実施形態に係る多孔質積層体の厚さは、１〜２０ｍｍが好ましく、２〜１５ｍｍがより好ましく、２〜１０ｍｍがさらに好ましく、２〜６ｍｍがよりさらに好ましい。厚さが上記範囲内であることにより、取扱の簡便さやコストにより優れる傾向にある。なお、多孔質積層体の厚さは、実施例に記載の方法により測定することができる。 1-20 mm is preferable, as for the thickness of the porous laminated body which concerns on this embodiment, 2-15 mm is more preferable, 2-10 mm is further more preferable, and 2-6 mm is further more preferable. When the thickness is within the above range, it tends to be superior in terms of ease of handling and cost. In addition, the thickness of a porous laminated body can be measured by the method as described in an Example.
本実施形態に係る多孔質積層体の通気量は、０．０１〜６０ｃｍ３／ｃｍ２／ｓが好ましく、０．１〜３０ｃｍ３／ｃｍ２／ｓがより好ましく、０．３〜１０ｃｍ３／ｃｍ２／ｓがさらに好ましく、１〜１０ｃｍ３／ｃｍ２／ｓがよりさらに好ましい。通気量が上記範囲内であることにより、吸着緩衝材としての通気性により優れる傾向にある。なお、多孔質積層体の通気量は、実施例に記載の方法により測定することができる。 Aeration rate of the porous laminate according to the present embodiment is preferably 0.01~60cm 3 / cm 2 / s, more preferably 0.1~30cm 3 / cm 2 / s, 0.3~10cm 3 / cm 2 / s is more preferable, and 1 to 10 cm 3 / cm 2 / s is still more preferable. When the air flow rate is within the above range, the air permeability as an adsorption buffer material tends to be superior. The air permeability of the porous laminate can be measured by the method described in the examples.
〔吸着緩衝材〕
本実施形態に係る吸着緩衝材は、上記多孔質積層体を含む。本実施形態に係る多孔質積層体は、優れた表面平滑性を有し、その表面構造に切削又は研削又は研磨面がなく、原料粒子の脱落がないことから、吸着緩衝材として好適に用いることができる。「吸着緩衝材」とは、液晶用ガラス板や積層セラミックコンデンサ用のシート等の、薄膜状、板状、又はフィルム状の物を固定又は搬送するために、減圧吸引での吸着ステージで吸着固定又は吸着搬送する方法において、その吸着ステージの吸着面に装着するものである。
[Adsorption buffer material]
The adsorption buffer material according to the present embodiment includes the porous laminate. The porous laminate according to the present embodiment has excellent surface smoothness, has no cutting or grinding or polishing surface in its surface structure, and does not fall off raw material particles, and therefore is suitably used as an adsorption buffer material. Can do. “Adsorption buffer material” means adsorption and fixation at an adsorption stage with vacuum suction to fix or transport thin-film, plate-like, or film-like objects such as liquid crystal glass plates and multilayer ceramic capacitor sheets. Alternatively, in the suction conveyance method, the suction stage is mounted on the suction surface.
吸着緩衝材としては、上記多孔質積層体をそのまま用いてもよい。また、吸着緩衝材として加工する方法としては、特に限定されないが、例えば、吸着ステージに装着する際、必要に応じて、吸着ステージに粘着加工を施すことや、多孔質積層体を所定のサイズにカットする方法が挙げられる。 As the adsorption buffer material, the porous laminate may be used as it is. In addition, the method of processing as an adsorption buffer material is not particularly limited, but for example, when attached to the adsorption stage, if necessary, the adsorption stage may be subjected to adhesive processing, or the porous laminate may be set to a predetermined size. The method of cutting is mentioned.
〔吸着方法〕
本実施形態に係る吸着方法は、吸着緩衝材を用いて薄膜を吸着する工程を有する。より具体的には、吸着緩衝材を吸着ステージの吸着面に装着し、吸着緩衝材上に薄膜状、板状、又はフィルム状の物を固定し、搬送することができる。吸着緩衝材の装着は減圧吸引などにより行なうことができるが、特に限定されない。
[Adsorption method]
The adsorption method according to the present embodiment includes a step of adsorbing a thin film using an adsorption buffer material. More specifically, an adsorption buffer material is attached to the adsorption surface of the adsorption stage, and a thin film, plate, or film object can be fixed on the adsorption buffer material and conveyed. The attachment of the adsorption buffer material can be performed by vacuum suction or the like, but is not particularly limited.
なお、吸着緩衝材を装着する方法としては、特に限定されないが、例えば、（Ｉ）焼結体（ａ）とシート（ｂ）を積層した多孔質積層体を吸着ステージの吸着面に装着する方法の他に、（ＩＩ）焼結体（ａ）を吸着ステージの吸着面に装着した後にシート（ｂ）を焼結体（ａ）にさらに積層させて吸着緩衝材を装着する方法、（ＩＩＩ）吸着ステージの吸着面に装着する直前に、焼結体（ａ）にシート（ｂ）を積層させる方法、（ＩＶ）シート（ｂ）を吸着ステージの吸着面に装着した後に焼結体（ａ）をシート（ｂ）にさらに積層させて吸着緩衝材を装着する方法等が挙げられる。本実施形態に係る吸着方法では、このように装着された吸着緩衝材上に薄膜を吸着することができる。なお、被吸着部材を吸着する吸着面はシート（ｂ）側であることが好ましい。これにより、被吸着部材に傷がつくことをより抑制できる。 The method for attaching the adsorption buffer material is not particularly limited. For example, (I) a method of attaching a porous laminate in which the sintered body (a) and the sheet (b) are laminated to the adsorption surface of the adsorption stage. In addition, (II) a method of attaching the adsorption buffer material by further laminating the sheet (b) on the sintered body (a) after attaching the sintered body (a) to the adsorption surface of the adsorption stage, (III) Immediately before mounting on the suction surface of the suction stage, a method of laminating the sheet (b) on the sintered body (a), (IV) After mounting the sheet (b) on the suction surface of the suction stage, the sintered body (a) And a method of attaching the adsorption buffer material by further laminating the film on the sheet (b). In the adsorption method according to the present embodiment, the thin film can be adsorbed on the adsorption buffer material thus mounted. In addition, it is preferable that the adsorption surface which adsorb | sucks a to-be-adsorbed member is a sheet | seat (b) side. Thereby, it can suppress more that a to-be-adsorbed member damages.
また、シート（ｂ）は織布、不織布、細孔シート、又は多孔質膜のいずれか単独で装着しても、２種類以上の複層として装着してもよい。 In addition, the sheet (b) may be attached alone or in the form of two or more types of woven fabric, non-woven fabric, pore sheet, or porous membrane.
ここで、固定又は搬送される薄膜としては、特に限定されないが、例えば、セラミックグリーンシートが挙げられる。セラミックグリーンシートは、通常、セラミック粉体、バインダ（アクリル系樹脂、ブチラール系樹脂等）、可塑剤（フタル酸エステル類、グリコール類、アジピン酸、燐酸エステル類）及び有機溶剤（トルエン、ＭＥＫ、アセトン等）からなるセラミック塗料を準備し、このセラミック塗料を、ドクターブレード法等によりキャリアシート上に塗布し、加熱乾燥させたものである。 Here, the thin film to be fixed or conveyed is not particularly limited, and examples thereof include a ceramic green sheet. Ceramic green sheets are usually ceramic powder, binders (acrylic resin, butyral resin, etc.), plasticizers (phthalates, glycols, adipic acid, phosphates) and organic solvents (toluene, MEK, acetone). Etc.) is prepared, and this ceramic paint is applied onto a carrier sheet by the doctor blade method or the like and dried by heating.
次に、実施例及び比較例を挙げて本実施形態をより具体的に説明するが、本実施形態はその要旨を超えない限り、以下の実施例に限定されるものではない。 Next, the present embodiment will be described more specifically with reference to examples and comparative examples. However, the present embodiment is not limited to the following examples unless it exceeds the gist.
各材料の各物性の測定は以下のとおりに行った。 Each physical property of each material was measured as follows.
［平均気孔径］
平均通気量の測定は、ポロシメータ（株式会社島津製作所社製「オートポアＩＶ９５００」）を用いて行なった。
[Average pore size]
The average air flow rate was measured using a porosimeter (“Autopore IV9500” manufactured by Shimadzu Corporation).
［表面粗さ（Ｒａ）］
表面粗さ（Ｒａ）の測定は、触針式表面粗さ計（株式会社東京精密社製「ハンディサーフＥ−３５Ｂ」）を用い、先端径Ｒ：５μｍ、速度：０．６ｍｍ／ｓ、測定長：１２．５ｍｍ、カットオフ値λｃ：２．５ｍｍの条件にて行なった。測定位置は、被測定物の面の中心付近１箇所とした。上記測定の算術平均粗さを、表面粗さ（Ｒａ）として求めた。
[Surface roughness (Ra)]
Surface roughness (Ra) was measured using a stylus type surface roughness meter (“Handy Surf E-35B” manufactured by Tokyo Seimitsu Co., Ltd.), tip diameter R: 5 μm, speed: 0.6 mm / s, measurement. The length was 12.5 mm and the cut-off value λc was 2.5 mm. The measurement position was one near the center of the surface of the object to be measured. The arithmetic average roughness of the above measurement was determined as the surface roughness (Ra).
［表面構造］
表面構造として、触針式表面粗さ計（株式会社東京精密社製「ハンディサーフＥ−３５Ｂ」）を用い、先端径Ｒ：５μｍ、速度：０．６ｍｍ／ｓ、測定長：１．３ｍｍ、カットオフ値λｃ：０．２５ｍｍ、測定位置：被測定物の面の中心付近の条件にて測定したときの断面曲線を観察した。その結果を図１〜４に示す。
[Surface structure]
As a surface structure, a stylus type surface roughness meter (“Handy Surf E-35B” manufactured by Tokyo Seimitsu Co., Ltd.) was used, tip diameter R: 5 μm, speed: 0.6 mm / s, measurement length: 1.3 mm, Cut-off value λc: 0.25 mm, measurement position: A cross-sectional curve when measured under conditions near the center of the surface of the object to be measured was observed. The results are shown in FIGS.
［粉落ち性］
粉落ち性の測定は、原料粒子の色と反対色の紙の上で、２００ｍｍ×２００ｍｍサイズの１枚の多孔質積層体をバイブレータ（神鋼電機株式会社製「バイブレートリパッカＶＰ−１５Ｄ」）を用いて２分間振動を加えた後、反対色の紙の上に原料粒子があるか否かを目視で確認し、以下の判定基準に基づき、評価した。
◎：原料粒子の脱落が殆どなかった。
○：原料粒子の脱落が極少量であった。
×：原料粒子の脱落が多数あった。
[Powder removal]
The measurement of powder fall-off is performed on a piece of porous laminate having a size of 200 mm × 200 mm on a paper of a color opposite to that of the raw material particles using a vibrator (“Vibrated Repacker VP-15D” manufactured by Shinko Electric Co., Ltd.). After using and vibrating for 2 minutes, whether or not there are raw material particles on the opposite color paper was visually confirmed and evaluated based on the following criteria.
A: There was almost no dropout of the raw material particles.
○: Dropping of raw material particles was very small.
X: There were many dropping off of raw material particles.
［通気量］
通気量の測定は、通気度測定機（ＴＥＸＴＥＳＴ社製「ＦＸ３３６０ＰＯＲＴＡＩＲ」）を用い、測定範囲２０ｃｍ２、測定差圧１２５Ｐａの条件にて行なった。
[Air flow rate]
The air flow rate was measured using an air permeability measuring device (“FX3360PORTAIR” manufactured by TEXTEST) under the conditions of a measurement range of 20 cm 2 and a measurement differential pressure of 125 Pa.
［厚さ］
多孔質積層体の厚さは、１／１０００ｍｍ読みのマイクロメータ（株式会社ミツトヨ社製「ＭＤＣ−ＳＢ」）を用いて測定した。なお、測定数値は、小数点以下第３位まで測定し、小数点以下第３位の値を四捨五入した。
[thickness]
The thickness of the porous laminate was measured using a micrometer having a reading of 1/1000 mm (“MDC-SB” manufactured by Mitutoyo Corporation). In addition, the measured numerical value was measured to the third decimal place, and the value of the third decimal place was rounded off.
積層された後の焼結体（ａ）と、シート（ｂ）の厚さは、積層された多孔質積層体を厚さ方向に沿って切断し、その切断面を光学顕微鏡（株式会社キーエンス社製「マイクロスコープＶＨ−Ｚ１００ＵＲ」）を用い観察することで測定した。なお、測定数値は、小数点以下第３位まで測定し、小数点以下第３位の値を四捨五入した。 The thicknesses of the sintered body (a) and the sheet (b) after being laminated are cut along the thickness direction of the laminated porous laminate, and the cut surface is optical microscope (Keyence Corporation). It was measured by observing using “Microscope VH-Z100UR”. In addition, the measured numerical value was measured to the third decimal place, and the value of the third decimal place was rounded off.
［実施例１］
焼結体（ａ）として、セラミック焼結体（材質：アルミナ）ＦＡ２２０（富士ケミカル株式会社社製）を用いた。１６０℃に設定したホットメルトアプリケーターを用い、焼結体（ａ）にポリオレフィン系ホットメルト接着剤（Ｔｅｘ Ｙｅａｒ Ｉｎｄｕｓｔｒｉｅｓ Ｉｎｃ．社製、製品名９６６Ｐ）を２０ｇ／ｍ２で繊維状にスプレー塗布した。シート（ｂ）として、織布（経糸／緯糸：ポリエチレンテレフタレートモノフィラメント）Ｌ−ｓｃｒｅｅｎ１６５−０２７／４２０ＰＷ（株式会社ＮＢＣメッシュテック社製）を焼結体（ａ）上に積層させることで実施例１の多孔質積層体を得た。多孔質積層体の特性を表１と図１に示す。
[Example 1]
As the sintered body (a), a ceramic sintered body (material: alumina) FA220 (manufactured by Fuji Chemical Co., Ltd.) was used. Using a hot melt applicator set at 160 ° C., a polyolefin hot melt adhesive (manufactured by Tex Year Industries Inc., product name 966P) was spray-coated in a fibrous form at 20 g / m 2 on the sintered body (a). As the sheet (b), a woven fabric (warp / weft: polyethylene terephthalate monofilament) L-screen165-027 / 420PW (manufactured by NBC Meshtec Co., Ltd.) is laminated on the sintered body (a), and the sheet of Example 1 is laminated. A porous laminate was obtained. The characteristics of the porous laminate are shown in Table 1 and FIG.
［実施例２］
シート（ｂ）として、Ｌ−ｓｃｒｅｅｎ１６５−０２７／４２０ＰＷ（株式会社ＮＢＣメッシュテック社製）の代わりに、織布（経糸／緯糸：ステンレス材）ＢＳ−３００／３０（アサダメッシュ株式会社製）を用いたこと以外は、実施例１と同様の方法で実施例２の多孔質積層体を得た。実施例１と同様の評価を行った。その測定結果を表１と図２に示す。
[Example 2]
As the sheet (b), a woven fabric (warp / weft: stainless steel) BS-300 / 30 (manufactured by Asada Mesh Co., Ltd.) is used instead of L-screen165-027 / 420PW (manufactured by NBC Meshtec Co., Ltd.). A porous laminate of Example 2 was obtained in the same manner as in Example 1 except that it was. Evaluation similar to Example 1 was performed. The measurement results are shown in Table 1 and FIG.
［実施例３］
シート（ｂ）として、Ｌ−ｓｃｒｅｅｎ１６５−０２７／４２０ＰＷ（株式会社ＮＢＣメッシュテック社製）の代わりに、織布（経糸／緯糸：ステンレス材）ＢＳ−２００／４０（アサダメッシュ株式会社製）を用いたこと以外は、実施例１と同様の方法で実施例３の多孔質積層体を得た。実施例１と同様の評価を行った。その測定結果を表１と図３に示す。
[Example 3]
As the sheet (b), a woven fabric (warp / weft: stainless steel) BS-200 / 40 (manufactured by Asada Mesh Co., Ltd.) is used instead of L-screen165-027 / 420PW (manufactured by NBC Meshtec Co., Ltd.). A porous laminate of Example 3 was obtained in the same manner as in Example 1 except that it was. Evaluation similar to Example 1 was performed. The measurement results are shown in Table 1 and FIG.
［比較例１］
焼結体（ａ）として、セラミック焼結体（材質：アルミナ）ＦＡ２２０（富士ケミカル株式会社社製）を用いた。該焼結体にシート（ｂ）を積層させずにそのまま用いて、実施例１と同様の評価を行った。結果を表１と図４に示す。
[Comparative Example 1]
As the sintered body (a), a ceramic sintered body (material: alumina) FA220 (manufactured by Fuji Chemical Co., Ltd.) was used. The same evaluation as in Example 1 was performed using the sintered body as it was without laminating the sheet (b). The results are shown in Table 1 and FIG.
表１と図１〜４が示す結果より、焼結体において、少なくとも片面に通気性を有し表面平滑性に優れたシートを実質一体化されて成る多孔質積層体は、優れた表面平滑性、通気性を有し、その表面構造に切削又は研削又は研磨面がなく、原料粒子の脱落が少ないことが分かった。 From the results shown in Table 1 and FIGS. 1 to 4, in the sintered body, the porous laminate formed by substantially integrating a sheet having air permeability on at least one side and excellent in surface smoothness is excellent in surface smoothness. It has been found that the material has air permeability, the surface structure thereof has no cutting, grinding, or polishing surface, and the raw material particles are less dropped.
特に、図１〜３では、多孔質積層体の表面がに鋭い凹凸が無かったことに対し、図４では、表面に削ったことによる小さい凹凸や、鋭い凹凸があった。 In particular, in FIGS. 1 to 3, the surface of the porous laminate had no sharp irregularities, whereas in FIG. 4, there were small irregularities or sharp irregularities due to scraping on the surface.
本発明の多孔質積層体は、液晶用ガラス板や積層セラミックコンデンサ用のグリーンシート等、薄膜状、板状、又はフィルム状の物を固定又は搬送するための方法に用いる吸着緩衝材として産業上の利用可能性を有する。 The porous laminate of the present invention is industrially used as an adsorption buffer material used in a method for fixing or transporting thin-film, plate-like, or film-like materials such as liquid crystal glass plates and multilayer ceramic capacitor green sheets. With the availability of
Claims (11)
該焼結体（ａ）の少なくとも片面に、通気性を有し、表面粗さ（Ｒａ）が０．１〜２０μｍであるシート（ｂ）が積層されている、
多孔質積層体。 Having a sintered body (a) containing an inorganic sintered body and / or a metal sintered body;
A sheet (b) having air permeability and having a surface roughness (Ra) of 0.1 to 20 μm is laminated on at least one surface of the sintered body (a).
Porous laminate.
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| JP2018103270A (en) * | 2016-12-22 | 2018-07-05 | 東京エレクトロン株式会社 | Multilayer porous plate and manufacturing method of the same |
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| KR102076251B1 (en) * | 2019-05-15 | 2020-02-11 | 정경우 | Multilayer structure for exfoliating and transferring ceramic green sheet |
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