JP2013236046A - 配線基板、及び、配線基板の製造方法 - Google Patents
配線基板、及び、配線基板の製造方法 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 50
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 22
- 238000007747 plating Methods 0.000 claims abstract description 44
- 239000000696 magnetic material Substances 0.000 abstract description 7
- 239000000758 substrate Substances 0.000 description 117
- 239000010408 film Substances 0.000 description 101
- 229920005989 resin Polymers 0.000 description 33
- 239000011347 resin Substances 0.000 description 33
- 239000003990 capacitor Substances 0.000 description 22
- 230000000052 comparative effect Effects 0.000 description 18
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 16
- 238000010586 diagram Methods 0.000 description 15
- 229910052802 copper Inorganic materials 0.000 description 14
- 239000010949 copper Substances 0.000 description 14
- 229920001721 polyimide Polymers 0.000 description 14
- 239000003822 epoxy resin Substances 0.000 description 13
- 229920000647 polyepoxide Polymers 0.000 description 13
- 239000009719 polyimide resin Substances 0.000 description 9
- 239000000463 material Substances 0.000 description 8
- 230000004048 modification Effects 0.000 description 8
- 238000012986 modification Methods 0.000 description 8
- 229910000859 α-Fe Inorganic materials 0.000 description 8
- 239000000654 additive Substances 0.000 description 7
- 229910045601 alloy Inorganic materials 0.000 description 7
- 239000000956 alloy Substances 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 238000009713 electroplating Methods 0.000 description 5
- 239000004642 Polyimide Substances 0.000 description 4
- 239000011575 calcium Substances 0.000 description 4
- 238000007772 electroless plating Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 239000011777 magnesium Substances 0.000 description 4
- 239000011572 manganese Substances 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 4
- 229910000679 solder Inorganic materials 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 238000004804 winding Methods 0.000 description 4
- 239000011701 zinc Substances 0.000 description 4
- 229910001297 Zn alloy Inorganic materials 0.000 description 3
- 238000010030 laminating Methods 0.000 description 3
- 230000003071 parasitic effect Effects 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 2
- 208000032365 Electromagnetic interference Diseases 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 2
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 229910052788 barium Inorganic materials 0.000 description 2
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 2
- 229910052790 beryllium Inorganic materials 0.000 description 2
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 2
- 229910052791 calcium Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 239000011889 copper foil Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- -1 etc. Inorganic materials 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- 229910052748 manganese Inorganic materials 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 229910052712 strontium Inorganic materials 0.000 description 2
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 2
- 239000011800 void material Substances 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000003063 flame retardant Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
- H01F41/041—Printed circuit coils
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
- H01F41/041—Printed circuit coils
- H01F41/046—Printed circuit coils structurally combined with ferromagnetic material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
- H01F2017/0066—Printed inductances with a magnetic layer
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
Abstract
【解決手段】配線基板は、第1絶縁層と、前記第1絶縁層の上にめっき処理で形成される第1磁性体層と、前記第1磁性体層の上に形成される平面コイルと、前記平面コイルの上にめっき処理で形成される第2磁性体層とを含む。
【選択図】図2
Description
図1は、比較例の配線基板ユニット10を示す図である。
図2(A)〜(D)は、実施の形態1の配線基板100を示す図である。
図9は、実施の形態2の配線基板200を示す断面図である。
110 コア基板
120、120A、120B、120C 配線層
130 絶縁層
140 絶縁層
150 コイル
151 磁性体層
152、152A、252、252A 絶縁膜
153 コイル部
154 絶縁樹脂
155 磁性体層
160A、160B 配線
170、170A、170B、170C 配線層
180 絶縁層
190 絶縁層
Claims (11)
- 第1絶縁層と、
前記第1絶縁層の上にめっき膜で形成される第1磁性体層と、
前記第1磁性体層の上に形成される平面コイルと、
前記平面コイルの上にめっき膜で形成される第2磁性体層と
を含む、配線基板。 - 前記平面コイルと前記第1磁性体層との間に絶縁膜が形成される、請求項1記載の配線基板。
- 前記平面コイルは、めっき膜で形成される、請求項1又は2記載の配線基板。
- 前記平面コイルの平面視における隙間の部分に形成される絶縁部をさらに含む、請求項1乃至3のいずれか一項記載の配線基板。
- 前記第2磁性体層の上に形成される第2絶縁層と、
前記第2絶縁層の上に形成される第1配線部と
をさらに含み、
前記平面コイルの一端は、前記第2絶縁層及び前記第2磁性体層を貫通する第1ビアを介して、前記第1配線部に接続される、請求項1乃至4のいずれか一項記載の配線基板。 - 前記第2絶縁層の上に形成される第2配線部をさらに含み、
前記平面コイルの他端は、前記第2絶縁層を貫通する第2ビアを介して、前記第2配線部に接続される、請求項5記載の配線基板。 - 前記第2磁性体層は、前記第1ビアを挿通する開口部を有する、請求項5又は6記載の配線基板。
- 前記第2磁性体層と前記第2絶縁層との間に形成される絶縁膜をさらに含む、請求項5乃至7のいずれか一項記載の配線基板。
- 前記第1絶縁層と前記第1磁性体層との間に形成される第3絶縁膜をさらに含む、請求項1乃至8のいずれか一項記載の配線基板。
- 第1絶縁層の上にめっき処理で第1磁性体層を形成する工程と、
前記第1磁性体層の上に、平面コイルを形成する工程と、
前記平面コイルの上にめっき処理で第2磁性体層を形成する工程と
を含む、配線基板の製造方法。 - 前記平面コイルをめっき処理で形成する、請求項10記載の配線基板の製造方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012183523A JP6283158B2 (ja) | 2012-04-12 | 2012-08-22 | 配線基板、及び、配線基板の製造方法 |
US13/857,226 US9336938B2 (en) | 2012-04-12 | 2013-04-05 | Wiring substrate and method for manufacturing the wiring substrate |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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JP2012091289 | 2012-04-12 | ||
JP2012091289 | 2012-04-12 | ||
JP2012183523A JP6283158B2 (ja) | 2012-04-12 | 2012-08-22 | 配線基板、及び、配線基板の製造方法 |
Publications (3)
Publication Number | Publication Date |
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JP2013236046A true JP2013236046A (ja) | 2013-11-21 |
JP2013236046A5 JP2013236046A5 (ja) | 2015-09-24 |
JP6283158B2 JP6283158B2 (ja) | 2018-02-21 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2012183523A Active JP6283158B2 (ja) | 2012-04-12 | 2012-08-22 | 配線基板、及び、配線基板の製造方法 |
Country Status (2)
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US (1) | US9336938B2 (ja) |
JP (1) | JP6283158B2 (ja) |
Cited By (1)
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---|---|---|---|---|
JP2021044294A (ja) * | 2019-09-06 | 2021-03-18 | 株式会社村田製作所 | インダクタ部品 |
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KR102069629B1 (ko) * | 2014-05-08 | 2020-01-23 | 삼성전기주식회사 | 칩 전자부품 및 그 제조방법 |
US10483035B2 (en) * | 2015-09-21 | 2019-11-19 | Qorvo Us, Inc. | Substrates with integrated three dimensional solenoid inductors |
US10720788B2 (en) * | 2015-10-09 | 2020-07-21 | Taiwan Semiconductor Manufacturing Company, Ltd. | Wireless charging devices having wireless charging coils and methods of manufacture thereof |
US10923259B2 (en) * | 2016-07-07 | 2021-02-16 | Samsung Electro-Mechanics Co., Ltd. | Coil component |
JP2021136310A (ja) * | 2020-02-26 | 2021-09-13 | 株式会社村田製作所 | インダクタ部品 |
US20220285079A1 (en) * | 2021-03-04 | 2022-09-08 | Intel Corporation | Coreless electronic substrates having embedded inductors |
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JPS5752114A (en) * | 1980-09-16 | 1982-03-27 | Asahi Chem Ind Co Ltd | Fine coil |
JPS5967909U (ja) * | 1982-10-28 | 1984-05-08 | 日本電気ホームエレクトロニクス株式会社 | コイル装置 |
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JP2021044294A (ja) * | 2019-09-06 | 2021-03-18 | 株式会社村田製作所 | インダクタ部品 |
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JP7449660B2 (ja) | 2019-09-06 | 2024-03-14 | 株式会社村田製作所 | インダクタ部品 |
Also Published As
Publication number | Publication date |
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JP6283158B2 (ja) | 2018-02-21 |
US20130271252A1 (en) | 2013-10-17 |
US9336938B2 (en) | 2016-05-10 |
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