JP2013166608A - Device and method of floating conveyance - Google Patents

Device and method of floating conveyance Download PDF

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JP2013166608A
JP2013166608A JP2012029473A JP2012029473A JP2013166608A JP 2013166608 A JP2013166608 A JP 2013166608A JP 2012029473 A JP2012029473 A JP 2012029473A JP 2012029473 A JP2012029473 A JP 2012029473A JP 2013166608 A JP2013166608 A JP 2013166608A
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transport
conveyance
swirl flow
target
substrate
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JP6076606B2 (en
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Takahiro Yasuda
貴裕 安田
Koichi Tsunoda
耕一 角田
Toshiyuki Ikeda
俊之 池田
Hideo Ozawa
秀夫 小澤
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Oiles Corp
Oiles Industry Co Ltd
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Oiles Corp
Oiles Industry Co Ltd
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Priority to JP2012029473A priority Critical patent/JP6076606B2/en
Priority to PCT/JP2012/079077 priority patent/WO2013121634A1/en
Priority to CN201280067934.6A priority patent/CN104066664B/en
Priority to KR20147025435A priority patent/KR20140132732A/en
Priority to TW101144796A priority patent/TWI564231B/en
Publication of JP2013166608A publication Critical patent/JP2013166608A/en
Priority to HK14110653A priority patent/HK1197221A1/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Intermediate Stations On Conveyors (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide an inexpensive conveyance technique capable of stably conveying an object to be conveyed in a non-contact manner, even when a plurality of rails are arranged in a conveyance direction to constitute a conveyance line.SOLUTION: A plurality of compressed gas blowing ports 22 blowing out compressed gas supplied to a ventilation passage and blowing it onto a substrate 5 on a conveyance face 20, and a plurality of swirl flow generating parts 23 blowing out the compressed gas to generate a swirl flow, are formed on the conveyance face 20 of a rail 2. The plurality of swirl flow generating parts 23 are formed at least to a position on the conveyance face 20 corresponding to a rear end part 51b of the substrate 5 when a tip part 51a of the substrate 5 reaches a rear end part 21b in a conveyance direction A of the conveyance face 20 of a following rail 2, and to a position on the conveyance face 20 corresponding to a tip part 51a of the substrate 5 when the rear end part 51b of the substrate 5 reaches a front end part 21a in the conveyance direction A of the conveyance face 20 of the rail 2. The plurality of compressed gas blowing ports 22 are formed to a whole surface of an area 28 on the conveyance face 20 excluding areas 29 to which the swirl flow generating parts 23 are formed.

Description

本発明は、搬送対象を浮上させて非接触で搬送する浮上搬送技術に関する。   The present invention relates to a levitation conveyance technique in which a conveyance target is levitated and conveyed without contact.

製造ライン等において、搬送対象を搬送用レール等の搬送面から浮上させて非接触で搬送する浮上搬送装置が知られている。例えば、特許文献１には、搬送用レールの搬送面から気体の噴出と吸引とを同時に行うことにより、搬送用レールの搬送面からの搬送対象の浮上高さを安定させて搬送することが可能な浮上搬送装置が開示されている。   In a production line or the like, a levitation conveyance device that levitates a conveyance target from a conveyance surface such as a conveyance rail and conveys the object in a non-contact manner is known. For example, in Patent Document 1, it is possible to stably convey the flying height of the object to be conveyed from the conveyance surface of the conveyance rail by simultaneously performing gas ejection and suction from the conveyance surface of the conveyance rail. A levitation conveying apparatus is disclosed.

特開２００８−７３１９号公報JP 2008-7319 A

しかしながら、特許文献１に記載の浮上搬送装置は、気体噴出用および気体吸引用の二系統の通気路を搬送用レール内に構築しなければならない。その上、気体噴出および気体吸引の両方に対応したポンプが必要となる。このため、装置の構造が複雑化し、コストが高くなる。   However, the levitation conveyance device described in Patent Document 1 must construct two ventilation paths for gas ejection and gas suction in the conveyance rail. In addition, a pump that supports both gas ejection and gas suction is required. This complicates the structure of the device and increases the cost.

また、一般に、浮上搬送装置においては、搬送対象の搬送距離を延ばす場合に、搬送用レールを搬送対象の搬送方向に沿って継ぎ足すことが行われている。特許文献１に記載の浮上搬送装置においては、２本の搬送用レールを搬送方向に沿って並べた状態で浮上搬送ラインが構築されているため、搬送方向において隣り合う搬送用レールが密着せず、それらの間（いわゆる搬送用レールの繋ぎ目）に、搬送面の不連続部、つまり隙間が形成される。また、浮上搬送装置の用途によっては、搬送方向において隣り合う搬送用レール間に、例えばレーザスクライブユニット等を配置するための隙間が設けられることもある。   In general, in the levitation transport apparatus, when the transport distance of the transport target is extended, the transport rail is added along the transport direction of the transport target. In the levitation conveyance apparatus described in Patent Document 1, since the levitation conveyance line is constructed with two conveyance rails arranged in the conveyance direction, adjacent conveyance rails do not adhere to each other in the conveyance direction. A discontinuous portion of the transport surface, that is, a gap is formed between them (so-called transport rail joints). Further, depending on the use of the levitation conveyance device, a gap for arranging, for example, a laser scribe unit or the like may be provided between conveyance rails adjacent in the conveyance direction.

このような搬送用レール間の隙間においては、搬送対象に気体を吹き付けることが困難なため、気体膜圧が発生し難い。したがって、搬送中の搬送対象は、搬送方向に沿って並べた隣り合う２本の搬送用レールの一方から他方へ、搬送用レール間の隙間を通って移動する際、搬送対象の端部がこの隙間に位置したときに自重により撓みを生じ、この搬送対象の端部が他方の搬送用レールの端部と接触する可能性がある。特に、液晶ディスプレイパネル、プラズマディスプレイパネル等のフラットディスプレイパネルに用いられる大型のガラス基板等は、非常に薄くて撓みやすいため、搬送中に、ガラス基板の端部が搬送用レール間の隙間を通過する際に後続の搬送用レールの端部と接触する可能性が高い。   In such a gap between the transfer rails, it is difficult to blow a gas onto the transfer target, so that a gas film pressure is hardly generated. Therefore, when the transport target being transported moves from one of the two adjacent transport rails arranged in the transport direction through the gap between the transport rails, the end of the transport target is There is a possibility that the end of the object to be conveyed comes into contact with the end of the other transport rail when it is positioned in the gap due to its own weight. In particular, large glass substrates used in flat display panels such as liquid crystal display panels and plasma display panels are very thin and flexible, so the edges of the glass substrate pass through the gap between the rails during transportation. There is a high possibility that it will come into contact with the end of the subsequent transport rail.

本発明は上記事情に鑑みてなされたものであり、その目的は、搬送面から気体を噴出する機構を有した搬送用レールを複数搬送方向に並べて構築された浮上搬送ラインにおいて、搬送対象と搬送用レールとの衝突を防止でき、これにより安定して搬送対象を非接触で搬送することが可能であり、かつ低コストの浮上搬送技術を提供することにある。   The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a transport object and a transport in a levitation transport line constructed by arranging transport rails having a mechanism for ejecting gas from a transport surface in a plurality of transport directions. Therefore, it is possible to prevent a collision with a rail for use in transportation, thereby stably transporting a transport target in a non-contact manner, and to provide a low-cost floating transport technique.

上記課題を解決するために、本発明の浮上搬送装置は、搬送対象に気体を噴出する気体噴出口が複数設けられた搬送面を備える搬送用レールにおいて、搬送対象の搬送方向における一方の端部が、搬送面の搬送方向における一方の端部を通過した際に、搬送対象の搬送方向における他方の端部に対応する搬送面の位置に、気体を噴出して旋回流を生成することにより負圧を発生させる旋回流生成手段を少なくとも一つ設けた。   In order to solve the above-described problem, the levitation transport apparatus according to the present invention includes a transport rail provided with a plurality of gas ejection ports for ejecting gas to a transport target, and one end portion in the transport direction of the transport target. However, when it passes through one end in the transport direction of the transport surface, negative pressure is generated by blowing a gas to the position of the transport surface corresponding to the other end in the transport direction of the transport target to generate a swirling flow. At least one swirling flow generating means for generating pressure is provided.

例えば、本発明は、搬送対象を搬送用レールの搬送面から浮上させて、搬送方向に非接触で搬送する浮上搬送装置であって、
前記搬送面に複数形成され、前記搬送対象に向けて気体を噴出する気体噴出口と、
前記搬送対象の前記搬送方向における一方の端部が、前記搬送面の前記搬送方向における一方の端部を通過した際に、前記搬送対象の前記搬送方向における他方の端部が対応する前記搬送面の位置に少なくとも一つ設けられ、気体を噴出して旋回流を生成することにより負圧を発生させる旋回流生成手段と、を有する。 For example, the present invention is a levitation conveyance device that floats a conveyance target from a conveyance surface of a conveyance rail and conveys the conveyance target in a conveyance direction in a non-contact manner,
A plurality of gas ejection ports that are formed on the conveyance surface and eject gas toward the conveyance target;
The transport surface to which the other end of the transport target in the transport direction corresponds when one end of the transport target in the transport direction passes through one end of the transport surface in the transport direction. And a swirling flow generating means for generating a negative pressure by generating a swirling flow by ejecting gas.

本発明において、搬送方向に沿って並べた２本の搬送用レールの一方から他方へ、搬送対象が搬送用レール間の隙間を通って移動する際に、搬送対象の搬送方向における一方の端部がこの隙間に位置したときに、搬送対象が自重により撓んで、搬送対象の搬送方向における他方の端部が搬送面から離れる方向（浮上する方向）に移動しようとする力が発生する。しかし、この力は搬送対象の他方の端部に対応する搬送面の位置において、旋回流生成手段によって生成された旋回流による負圧によって打ち消され、搬送対象の搬送方向における他方の端部が搬送面に引き寄せられる。これにより、搬送対象の自重により発生する撓みを防止することができ、搬送対象の搬送方向における端部が搬送用レールの搬送方向における端部に衝突するのを防止できる。   In the present invention, when the conveyance target moves through the gap between the conveyance rails from one of the two conveyance rails arranged along the conveyance direction, one end in the conveyance direction of the conveyance target Is positioned in this gap, the conveyance target is bent by its own weight, and a force is generated to move the other end in the conveyance direction of the conveyance target in a direction away from the conveyance surface (floating direction). However, this force is canceled by the negative pressure due to the swirl flow generated by the swirl flow generating means at the position of the transport surface corresponding to the other end of the transport target, and the other end in the transport direction of the transport target is transported. Be drawn to the surface. Thereby, the bending which generate | occur | produces by the dead weight of conveyance object can be prevented, and it can prevent that the edge part in the conveyance direction of a conveyance object collides with the edge part in the conveyance direction of the conveyance rail.

また、本発明では、気体を噴出して旋回流を生成し、負圧を発生させて搬送対象を搬送用レールの搬送面に引き寄せるので、搬送対象を搬送面から浮上させるための気体を噴出させるための圧縮気体噴出口と搬送物の端部を搬送面に引き寄せるために気体を噴出させるための旋回流生成手段とで気体を供給する通気路およびポンプを共用できる。このため、本発明によれば、搬送用レールを搬送方向に沿って複数並べて浮上搬送ラインを構築する場合でも、搬送対象と搬送用レールとの衝突を防止でき、これにより安定して基板等の搬送対象を非接触で搬送することが可能であり、かつ低コストの浮上搬送技術を提供することができる。   Further, in the present invention, a gas is jetted to generate a swirl flow, and a negative pressure is generated to attract the conveyance target to the conveyance surface of the conveyance rail. Therefore, a gas for floating the conveyance target from the conveyance surface is ejected. An air passage and a pump for supplying gas can be shared by the compressed gas ejection port for the gas and the swirl flow generating means for ejecting the gas to draw the end of the conveyed product to the conveyance surface. For this reason, according to the present invention, even when a plurality of transfer rails are arranged along the transfer direction to construct a floating transfer line, it is possible to prevent a collision between the transfer target and the transfer rail, thereby stably supporting a substrate or the like. It is possible to convey the object to be conveyed in a non-contact manner, and to provide a low-cost floating conveyance technique.

図１は、本発明の一実施の形態に係る基板搬送装置１の概略構成図である。FIG. 1 is a schematic configuration diagram of a substrate transfer apparatus 1 according to an embodiment of the present invention. 図２（Ａ）は、レール２の搬送面２０上における旋回流生成部２３の形成部分の拡大図であり、図２（Ｂ）は図２（Ａ）に示す旋回流生成部２３のＡ−Ａ断面図である。2A is an enlarged view of a portion where the swirl flow generation unit 23 is formed on the conveyance surface 20 of the rail 2, and FIG. 2B is an A- view of the swirl flow generation unit 23 shown in FIG. 2A. It is A sectional drawing. 図３は、基板搬送装置１のレール２を基板搬送方向Ａに沿って複数並べて構築された基板搬送ライン６の一例を説明するための図である。FIG. 3 is a diagram for explaining an example of the substrate transport line 6 constructed by arranging a plurality of rails 2 of the substrate transport apparatus 1 along the substrate transport direction A. FIG. 図４（Ａ）、（Ｂ）は、搬送面２０から浮上して非接触で基板搬送ライン６上を搬送される基板５の様子を説明するための図である。FIGS. 4A and 4B are views for explaining the state of the substrate 5 that floats from the transport surface 20 and is transported on the substrate transport line 6 in a non-contact manner.

以下、本発明の一実施の形態について、図面を参照して説明する。   Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

図１は、本実施の形態に係る基板搬送装置１の概略構成図である。   FIG. 1 is a schematic configuration diagram of a substrate transfer apparatus 1 according to the present embodiment.

図示するように、本実施の形態に係る基板搬送装置１は、液晶ディスプレイパネル、プラズマディスプレイパネル等のフラットディスプレイパネルに用いられる大型ガラス基板等の基板５（図３参照）を非接触で搬送するための搬送面２０を備えたレール２と、圧縮気体を供給するポンプ３と、ポンプ３の圧縮気体噴出口（不図示）とレール２の給気口（不図示）とに連結されたチューブ４と、有している。   As shown in the figure, the substrate transport apparatus 1 according to the present embodiment transports a substrate 5 (see FIG. 3) such as a large glass substrate used in a flat display panel such as a liquid crystal display panel or a plasma display panel in a non-contact manner. A tube 2 connected to a rail 2 provided with a conveying surface 20 for use, a pump 3 for supplying compressed gas, a compressed gas outlet (not shown) of the pump 3 and an air inlet (not shown) of the rail 2. And have.

ここで、レール２の内部には、給気口につながる通気路（不図示）が形成されており、レール２の搬送面２０には、この通気路につながる圧縮気体噴出口２２と、この通気路につながる後述の旋回流噴出口２６（図２参照）を含む旋回流生成部２３と、が複数ずつ形成されている。なお、図１および後述の図３においては、図の簡略化のため、一部の圧縮気体噴出口２２と一部の旋回流生成部２３とにのみ符号を付してある。   Here, an air passage (not shown) connected to the air supply port is formed inside the rail 2, and a compressed gas jet port 22 connected to the air passage and the air passage are provided on the transport surface 20 of the rail 2. A plurality of swirl flow generating portions 23 including swirl flow outlets 26 (see FIG. 2), which will be described later, connected to the road are formed. In FIG. 1 and FIG. 3 described later, only a part of the compressed gas ejection ports 22 and a part of the swirl flow generation unit 23 are denoted by reference numerals for the sake of simplicity.

圧縮気体噴出口２２は、レール２の搬送面２０上の、レール２の長手方向の両端２１ａ、２１ｂ側の領域（圧縮気体噴出領域）２９内に複数ずつ形成されている。これらの圧縮気体噴出口２２は、それぞれ、搬送面２０の垂線方向に向いて開口しており、通気路に供給される圧縮気体ａを、搬送面２０上を搬送中の基板５に向けて噴出する（図４（Ａ）、（Ｂ）参照）。後述する図４に示すように、所定の隙間ｄをあけて２本のレール２（２Ａ、２Ｂ）を基板搬送方向Ａに沿って並べた場合に、搬送中の基板５がレール２Ａ上の旋回流生成領域２８上を通過している間に、基板５の先端部５１ａまたは後端部５１ｂが隙間ｄを乗り越えるように、基板搬送方向Ａ（レール２の長手方向）において、各圧縮気体噴出領域２９の幅は、基板５の幅Ｈと隙間ｄの幅との差よりも狭い寸法とされている。   A plurality of compressed gas ejection ports 22 are formed in a region (compressed gas ejection region) 29 on the transport surface 20 of the rail 2 on both ends 21 a and 21 b side in the longitudinal direction of the rail 2. Each of these compressed gas ejection ports 22 is opened in the direction perpendicular to the conveyance surface 20, and the compressed gas a supplied to the air passage is ejected on the conveyance surface 20 toward the substrate 5 being conveyed. (See FIGS. 4A and 4B). As shown in FIG. 4 described later, when the two rails 2 (2A, 2B) are arranged along the substrate transport direction A with a predetermined gap d, the substrate 5 being transported turns on the rail 2A. While passing over the flow generation region 28, each compressed gas ejection region in the substrate transport direction A (longitudinal direction of the rail 2) so that the front end 51a or the rear end 51b of the substrate 5 gets over the gap d. The width 29 is narrower than the difference between the width H of the substrate 5 and the width of the gap d.

一方、旋回流生成部２３は、レール２の搬送面２０上の、両端部２１ａ、２１ｂ側に位置する圧縮気体噴出口領域２９に挟まれた領域（旋回流生成領域）２８内に複数形成されている。これらの旋回流生成部２３は、それぞれ、通気路に供給される圧縮気体Ｅを旋回させることによって旋回流ｂを生成する（図２（Ａ）、図４（Ａ）、（Ｂ）参照）。   On the other hand, a plurality of swirl flow generating portions 23 are formed in a region (swirl flow generating region) 28 sandwiched between compressed gas jet regions 29 located on the both end portions 21a, 21b side on the transport surface 20 of the rail 2. ing. These swirl flow generation units 23 respectively generate swirl flow b by swirling the compressed gas E supplied to the ventilation path (see FIGS. 2A, 4A, and 4B).

図２（Ａ）は、レール２の搬送面２０上における旋回流生成部２３の形成部分の拡大図であり、図２（Ｂ）は、図２（Ａ）に示す旋回流生成部２３のＡ−Ａ断面図である。   2A is an enlarged view of a portion where the swirl flow generation unit 23 is formed on the conveying surface 20 of the rail 2, and FIG. 2B is an A view of the swirl flow generation unit 23 shown in FIG. It is -A sectional drawing.

図示するように、旋回流生成部２３は、レール２の搬送面２０に形成された円筒状の凹部２４と、凹部２４の内周面２５に形成され、凹部２４の内周面２５の接線方向に圧縮気体Ｅを噴出する旋回流用噴出口２６と、を有している。   As shown in the figure, the swirl flow generator 23 is formed in a cylindrical recess 24 formed on the transport surface 20 of the rail 2 and an inner peripheral surface 25 of the recess 24, and is tangential to the inner peripheral surface 25 of the recess 24. And a swirl flow outlet 26 for ejecting the compressed gas E.

旋回流用噴出口２６は通気路につながっており、ポンプ３から通気路を介して供給される圧縮気体Ｅは、旋回流用噴出口２６から凹部２４の内部に、その凹部２４の内周面２５の接線方向に噴出して、凹部２４の内周面２５に沿って旋回する。これにより、旋回流ｂが形成される。そして、この旋回流に巻き込まれた気体が、凹部２４からレール２の搬送面２０と搬送中の基板５との間へと噴出しやすいように、凹部２４の内周面２５には、開口側にテーパ２７が設けられている。   The swirl flow outlet 26 is connected to the air passage, and the compressed gas E supplied from the pump 3 through the air passage is introduced into the recess 24 from the swirl flow outlet 26 to the inner peripheral surface 25 of the recess 24. It ejects in the tangential direction and turns along the inner peripheral surface 25 of the recess 24. Thereby, the swirl flow b is formed. The inner circumferential surface 25 of the recess 24 has an opening side so that the gas entrained in the swirl flow can easily be ejected from the recess 24 to between the transport surface 20 of the rail 2 and the substrate 5 being transported. A taper 27 is provided.

また、レール２の搬送面２０上の領域２８には、右回りの旋回流を発生させる旋回流生成部２３と左回りの旋回流を発生させる旋回流生成部２３とが分散配置されている。このようにすることで、レール２の搬送面２０上を非接触で搬送される基板５に作用する旋回流によるモーメントを打ち消すようにしている。   In addition, a swirl flow generation unit 23 that generates a clockwise swirl flow and a swirl flow generation unit 23 that generates a counterclockwise swirl flow are distributed in the region 28 on the transport surface 20 of the rail 2. By doing in this way, the moment by the swirl | flow which acts on the board | substrate 5 conveyed on the conveyance surface 20 of the rail 2 by non-contact is negated.

なお、本実施の形態においては、旋回流生成部２３の凹部２４および旋回流用噴出口２６をレール２の搬送面２０に直接形成しているが、円筒室と円筒室の内周方向の接線方向に気体を噴出できるように形成されたノズルとを有するチップをレール２の搬送面２０に埋め込むことによって旋回流生成部２３を形成してもよい。   In the present embodiment, the concave portion 24 and the swirl flow jet port 26 of the swirl flow generating unit 23 are formed directly on the transport surface 20 of the rail 2, but the cylindrical chamber and the tangential direction of the inner circumferential direction of the cylindrical chamber Alternatively, the swirl flow generating section 23 may be formed by embedding a chip having a nozzle formed so as to be able to eject gas into the transport surface 20 of the rail 2.

図３は、基板搬送装置１のレール２を基板搬送方向Ａに沿って複数並べて構築した基板搬送ライン６の一例を説明するための図である。   FIG. 3 is a diagram for explaining an example of the substrate transport line 6 constructed by arranging a plurality of rails 2 of the substrate transport apparatus 1 along the substrate transport direction A. FIG.

図示するように、一般に、基板搬送ライン６は、基板搬送ライン６のライン長に応じた本数のレール２を基板搬送方向Ａに沿って一列に並べ、これを、複数列、基板５の幅ｈに応じて配列することにより構築される。例えば、レイアウト上の都合等から、基板搬送方向Ａにおいて隣接するレール２の端部２ａ、２１ｂ間に隙間ｄが設けられている。このため、基板搬送ライン６上にレール２の搬送面２０の不連続部が生じており、この位置では、基板５に圧縮気体を吹き付けることができない。   As shown in the figure, in general, the substrate transfer line 6 has a number of rails 2 corresponding to the line length of the substrate transfer line 6 arranged in a line along the substrate transfer direction A, and this is divided into a plurality of rows and a width h of the substrate 5. It is constructed by arranging according to. For example, a gap d is provided between the end portions 2a and 21b of the rails 2 adjacent to each other in the substrate transport direction A for convenience of layout and the like. For this reason, the discontinuous part of the conveyance surface 20 of the rail 2 has arisen on the board | substrate conveyance line 6, and compressed gas cannot be sprayed on the board | substrate 5 in this position.

また、図示するように、旋回流生成部２３は、少なくとも、搬送中の基板５の先端部５１ａが、後続レール２Ｂの搬送面２０の基板搬送方向Ａ後方における端部（後端部）２１ｂに到達する際に、基板５の後端部５１ｂに対応するレール２Ａの搬送面２０上の位置（図４（Ａ））、および、搬送中の基板５の後端部５１ｂが、レール２Ａの搬送面２０の基板搬送方向Ａ前方における端部（先端部）２１ａに到達した際に、基板５の先端部５１ａに対応するレール２Ｂの搬送面２０上の位置（図４（Ｂ））に複数形成されている。また、圧縮気体噴出口２２は、旋回流生成部２３の形成領域２８を除く、搬送面２０上の領域２９の全面に複数形成されている。   Further, as shown in the drawing, the swirl flow generating unit 23 has at least the front end portion 51a of the substrate 5 being transferred to the end portion (rear end portion) 21b on the rear side of the transfer surface 20 of the subsequent rail 2B in the substrate transfer direction A. When reaching, the position of the rail 2A on the transport surface 20 corresponding to the rear end portion 51b of the substrate 5 (FIG. 4A) and the rear end portion 51b of the substrate 5 being transported are transported by the rail 2A. A plurality of rails 2B are formed at positions on the transport surface 20 of the rail 2B corresponding to the front end portion 51a of the substrate 5 (FIG. 4B) when the end 20 (front end portion) 21a in front of the substrate 20 in the substrate transport direction A is reached. Has been. In addition, a plurality of compressed gas ejection ports 22 are formed on the entire surface of the region 29 on the transport surface 20 excluding the formation region 28 of the swirl flow generation unit 23.

図４（Ａ）、（Ｂ）は、搬送面２０から浮上して非接触で基板搬送ライン６上を搬送される基板５の様子を説明するための図である。   FIGS. 4A and 4B are views for explaining the state of the substrate 5 that floats from the transport surface 20 and is transported on the substrate transport line 6 in a non-contact manner.

図４（Ａ）に示すように、基板５は、レール２Ａの搬送面２０に形成された複数の圧縮気体噴出口２２から噴出する圧縮気体ａによりレール２Ａの搬送面２０から浮上しながら非接触で基板搬送方向Ａに搬送される。そして、基板５の先端部５１ａは、レール２Ａの先端部２１ａを通過して、このレール２Ａの先端部２１ａと後続のレール２Ｂの後端部２１ｂとの隙間ｄに到達すると、基板５の自重により基板５の先端部５１ａに撓みが発生し、この隙間ｄに落下してレール２Ｂに衝突しようとする。これにより、基板５の後端部５１ｂは、レール２Ａの搬送面２０から離れる方向（浮上する方向）に移動しようとする。このとき、基板５の後端部５１ｂに対向するレール２Ａの搬送面２０上の位置に形成されている複数の旋回流生成部２３によって生成された旋回流ｂの中心部の負圧Ｐにより、基板５の後端部５１ｂ側がレール２Ａの搬送面２０に引き寄せられる。これにより、基板５の先端部５１ａ側が持ち上がるため、基板５の先端部５１ａの、自重による落下を防止して、基板５がレール２Ｂに衝突することを回避できる。   As shown in FIG. 4A, the substrate 5 is not contacted while being lifted from the transport surface 20 of the rail 2A by the compressed gas a ejected from a plurality of compressed gas ejection ports 22 formed on the transport surface 20 of the rail 2A. Is transferred in the substrate transfer direction A. Then, when the tip 51a of the substrate 5 passes through the tip 21a of the rail 2A and reaches the gap d between the tip 21a of the rail 2A and the rear end 21b of the subsequent rail 2B, the weight of the substrate 5 is reduced. As a result, the tip 51a of the substrate 5 is bent and falls into the gap d and tries to collide with the rail 2B. As a result, the rear end portion 51b of the substrate 5 tends to move in a direction away from the transport surface 20 of the rail 2A (the direction of rising). At this time, due to the negative pressure P at the center of the swirling flow b generated by the plurality of swirling flow generating portions 23 formed at the position on the transport surface 20 of the rail 2A facing the rear end portion 51b of the substrate 5, The rear end portion 51b side of the substrate 5 is drawn toward the transport surface 20 of the rail 2A. Thereby, since the front end portion 51a side of the substrate 5 is lifted, the front end portion 51a of the substrate 5 is prevented from dropping due to its own weight, and the substrate 5 can be prevented from colliding with the rail 2B.

その後、図４（Ｂ）に示すように、基板５の後端部５１ｂが、レール２Ａの先端部２１ａを通過して、このレール２Ａの先端部２１ａと後続のレール２Ｂの後端部２１ｂとの隙間ｄに到達すると、基板５の自重により基板５の後端部５１Ｂ側に撓みが発生し、この隙間ｄに落下しようとする。これにより、基板５の先端部５１ａは、後続のレール２Ｂの搬送面２０から離れる方向に移動しようとする。このとき、基板５の先端部５１ａに対向するレール２Ｂの搬送面２０上の位置に形成されている複数の旋回流生成部２３によって生成された旋回流ｂの中心部の負圧Ｐにより、基板５の先端部５１ａが後続のレール２Ｂの搬送面２０に引き寄せられる。これにより、基板５の後端部５１ｂ側が持ち上がるため、基板５の後端部５１ｂの自重による落下を防止して、基板５がレール２Ｂに衝突することを回避できる。   Thereafter, as shown in FIG. 4B, the rear end portion 51b of the substrate 5 passes through the front end portion 21a of the rail 2A, and the rear end portion 21b of the rail 2A and the rear end portion 21b of the subsequent rail 2B When the gap d is reached, the substrate 5 is bent by the weight of the rear end 51B of the substrate 5 and tends to fall into the gap d. Thereby, the front-end | tip part 51a of the board | substrate 5 tends to move in the direction away from the conveyance surface 20 of the subsequent rail 2B. At this time, due to the negative pressure P at the center of the swirling flow b generated by the plurality of swirling flow generating portions 23 formed at the position on the transport surface 20 of the rail 2B facing the front end portion 51a of the substrate 5, the substrate 5 end portions 51a are drawn to the conveying surface 20 of the subsequent rail 2B. Thereby, since the rear end portion 51b side of the substrate 5 is lifted, it is possible to prevent the rear end portion 51b of the substrate 5 from falling due to its own weight and to avoid the substrate 5 from colliding with the rail 2B.

以上、本発明の一実施の形態を説明した。   The embodiment of the present invention has been described above.

本実施の形態では、図４（Ａ）、（Ｂ）に示すように、基板５の一方の端部（先端部５１ａあるいは後端部５１ｂ）側がレール２の搬送面２０に引き寄せられることで基板５の他方の端部（後端部５１ｂあるいは先端部５１ａ）が持ち上がるため、基板搬送ライン６上を搬送中の基板５の先端部５１ａあるいは後端部５１ｂが、基板搬送ライン６上のレール２の搬送面２０における不連続部（基板搬送方向Ａにおいて隣接するレール２間に形成される隙間ｄ）に自重により落下するのを防止することによりレール２Ｂに衝突することを回避できる。また、本実施の形態では、ポンプ３からレール２内の通気路に供給される圧縮気体が、レール２の搬送面２０の圧縮気体噴出口２２からレール２の搬送面２０上の基板５に向けて噴出するとともに、旋回流生成部２３の旋回流用噴出口２６からも噴出して旋回流ｂを形成し、この旋回流ｂの中央部に生じる負圧Ｐで基板５をレール２の搬送面２０に引き寄せるので、圧縮気体噴出口２２と旋回流生成部２３とにおいて、レール２内の通気路（不図示）およびポンプ３を共用することができる。このため、本実施の形態によれば、基板搬送ライン６にレール２の搬送面２０の不連続部が存在しても、基板５と搬送用レール２との衝突を防止でき、これにより安定して基板５を非接触で搬送することができ、基板搬送装置１のコストを抑制することができる。   In the present embodiment, as shown in FIGS. 4A and 4B, one end (the front end portion 51a or the rear end portion 51b) side of the substrate 5 is drawn toward the transport surface 20 of the rail 2 to thereby form the substrate. 5 is lifted, the front end portion 51a or the rear end portion 51b of the substrate 5 being transferred on the substrate transfer line 6 is connected to the rail 2 on the substrate transfer line 6. It is possible to avoid colliding with the rail 2B by preventing it from dropping due to its own weight into a discontinuous portion (gap d formed between adjacent rails 2 in the substrate transport direction A) on the transport surface 20 of the substrate. Further, in the present embodiment, the compressed gas supplied from the pump 3 to the ventilation path in the rail 2 is directed from the compressed gas ejection port 22 on the conveying surface 20 of the rail 2 to the substrate 5 on the conveying surface 20 of the rail 2. And is also ejected from the swirl flow outlet 26 of the swirl flow generating portion 23 to form a swirl flow b, and the substrate 5 is moved to the transport surface 20 of the rail 2 by the negative pressure P generated at the center of the swirl flow b. Therefore, the compressed gas jet port 22 and the swirl flow generator 23 can share the air passage (not shown) in the rail 2 and the pump 3. For this reason, according to the present embodiment, even if there is a discontinuous portion of the transport surface 20 of the rail 2 on the substrate transport line 6, it is possible to prevent the substrate 5 and the transport rail 2 from colliding with each other. Thus, the substrate 5 can be transported in a non-contact manner, and the cost of the substrate transport apparatus 1 can be suppressed.

また、本実施の形態では、レール２の搬送面２０に円筒状の凹部２４を設け、この凹部２４の内周面２５の接線方向に圧縮気体Ｅを噴出する旋回流用噴出口２６を、この凹部２５の内周面２５に設けることにより、旋回流生成部２３を形成している。このため、簡単な構成で、レール２の搬送面２０に基板５を引き寄せる負圧Ｐを発生させることができる。   Further, in the present embodiment, a cylindrical recess 24 is provided on the conveying surface 20 of the rail 2, and the swirl flow jet outlet 26 that ejects the compressed gas E in the tangential direction of the inner peripheral surface 25 of the recess 24 is provided as the recess. The swirl flow generating portion 23 is formed by providing the inner peripheral surface 25 of the 25. For this reason, the negative pressure P which draws the board | substrate 5 toward the conveyance surface 20 of the rail 2 with a simple structure can be generated.

また、本実施の形態では、右回りの旋回流を生成する旋回流生成部２３と、左回りの旋回流を生成する旋回流生成部２３とをレール２の搬送面２０上に混在させているので、レール２の搬送面２０上を非接触で搬送される基板５に作用する旋回流によるモーメントを打ち消すことができる。このため、より安定して基板５を非接触で搬送することが可能となる。   Further, in the present embodiment, the swirl flow generation unit 23 that generates a clockwise swirl flow and the swirl flow generation unit 23 that generates a counterclockwise swirl flow are mixed on the transport surface 20 of the rail 2. Therefore, the moment due to the swirling flow acting on the substrate 5 conveyed in a non-contact manner on the conveying surface 20 of the rail 2 can be canceled out. For this reason, it becomes possible to convey the board | substrate 5 more stably without contact.

なお、本実施の形態において、基板５の先端部５１ａが旋回流生成部２３上に到達した際に基板５の後端部５１ｂが圧縮気体噴出口２２上に位置するように、旋回流生成部２３を配置した場合、旋回流ｂの中心部の負圧Ｐによって基板５の先端部５１ａが搬送面２０に引き寄せられるとともに、噴出口２２から噴出した圧縮気体ａにより、基板５の後端部５１ｂが搬送面２０から離れる方向に移動しようとする。しかし、この場合でも、旋回流生成部２３において、旋回流に巻き込まれた気体ｅ（図４参照）が、凹部２４の周囲から、基板５とレール２の搬送面２０との間に流出するため、基板５の先端部５１ａが搬送面２０に接触するまで引き寄せられるのを防止することができる。   In the present embodiment, the swirl flow generating portion is arranged such that the rear end portion 51b of the substrate 5 is positioned on the compressed gas jet port 22 when the front end portion 51a of the substrate 5 reaches the swirl flow generating portion 23. 23, the front end 51a of the substrate 5 is attracted to the transport surface 20 by the negative pressure P at the center of the swirling flow b, and the rear end 51b of the substrate 5 is compressed by the compressed gas a ejected from the ejection port 22. Tries to move away from the transfer surface 20. However, even in this case, the gas e (see FIG. 4) entrained in the swirl flow flows out between the substrate 5 and the transport surface 20 of the rail 2 from the periphery of the recess 24 in the swirl flow generation unit 23. Further, it is possible to prevent the front end portion 51a of the substrate 5 from being drawn until it contacts the transport surface 20.

また、本実施の形態においては、液晶ディスプレイパネル、プラズマディスプレイパネル等のフラットディスプレイパネルに用いられる大型ガラス基板等の基板５を搬送対象とする場合を例に挙げたが、基板に限らず、撓みやすいシート状の搬送物を良好に搬送することができる。   Further, in the present embodiment, the case where the substrate 5 such as a large glass substrate used in a flat display panel such as a liquid crystal display panel or a plasma display panel is an object to be transported is described as an example. It is possible to satisfactorily convey an easy sheet-like conveyed product.

１：基板搬送装置、２：レール、３：ポンプ、４：チューブ、５：基板、６：基板搬送ライン、２０：搬送面、２１ａ：搬送面の先端部、２１ｂ：搬送面の後端部、２２：圧縮気体噴出口、２３：旋回流生成部、２４：凹部、２５：凹部の内周面、２６：旋回流用噴出口、２７：テーパ、２８：圧縮気体噴出領域、２９：旋回流生成領域、５１ａ：基板の先端部、５１ｂ：基板の後端部 1: substrate transfer device, 2: rail, 3: pump, 4: tube, 5: substrate, 6: substrate transfer line, 20: transfer surface, 21a: leading end of transfer surface, 21b: rear end of transfer surface, 22: Compressed gas ejection port, 23: Swirl flow generating section, 24: Recessed portion, 25: Inner circumferential surface of the recessed portion, 26: Swirl flow ejection port, 27: Taper, 28: Compressed gas ejection region, 29: Swirl flow generating region , 51a: front end portion of substrate, 51b: rear end portion of substrate

Claims (6)

搬送対象を搬送用レールの搬送面から浮上させて、搬送方向に非接触で搬送する浮上搬送装置であって、
前記搬送面に複数形成され、前記搬送対象に向けて気体を噴出する気体噴出口と、
前記搬送対象の前記搬送方向における一方の端部が、前記搬送面の前記搬送方向における一方の端部を通過した際に、前記搬送対象の前記搬送方向における他方の端部が対応する前記搬送面の位置に少なくとも一つ設けられ、気体を噴出して旋回流を生成することにより負圧を発生させる旋回流生成手段と、を有する
ことを特徴とする浮上搬送装置。 A levitation conveyance device that floats a conveyance target from a conveyance surface of a conveyance rail and conveys the conveyance target in a conveyance direction without contact,
A plurality of gas ejection ports that are formed on the conveyance surface and eject gas toward the conveyance target;
The transport surface to which the other end of the transport target in the transport direction corresponds when one end of the transport target in the transport direction passes through one end of the transport surface in the transport direction. And a swirling flow generating means for generating a negative pressure by generating a swirling flow by jetting gas. 請求項１に記載の浮上搬送装置であって、
前記旋回流生成手段は、
前記搬送対象の前記搬送方向における先端部が、前記搬送面の前記搬送方向における先端部を通過した際に、前記搬送対象の前記搬送方向における後端部に対応する前記搬送面の位置にも少なくとも一つ設けられている
ことを特徴とする浮上搬送装置。 The levitation transport apparatus according to claim 1,
The swirl flow generating means includes
When the front end portion of the transport target in the transport direction passes the front end portion of the transport surface in the transport direction, the position of the transport surface corresponding to the rear end portion of the transport target in the transport direction is at least One levitation conveyance device provided with one. 請求項１または２に記載の浮上搬送装置であって、
前記旋回流生成手段は、
前記搬送対象の前記搬送方向における後端部が、前記搬送面の前記搬送方向における後端部に到達した際に、前記搬送対象の前記搬送方向における先端部に対応する前記搬送面の位置にも少なくとも一つ設けられている
ことを特徴とする浮上搬送装置。 The levitation transport apparatus according to claim 1 or 2,
The swirl flow generating means includes
When the rear end of the transport target in the transport direction reaches the rear end of the transport surface in the transport direction, the position of the transport surface corresponding to the front end of the transport target in the transport direction is also At least one levitation conveyance apparatus provided. 請求項１ないし３のいずれか一項に記載の浮上搬送装置であって、
前記旋回流生成手段は、
前記搬送面に形成された円筒状の凹部と、
前記凹部の内周面に形成され、当該凹部の内周面の接線方向に向かって気体を噴出する旋回流用噴出口と、を有する
ことを特徴とする浮上搬送装置。 A levitation transport apparatus according to any one of claims 1 to 3,
The swirl flow generating means includes
A cylindrical recess formed in the transport surface;
And a swirl flow jet port formed on the inner peripheral surface of the concave portion and ejecting gas toward a tangential direction of the inner peripheral surface of the concave portion. 請求項１ないし４のいずれか一項に記載の浮上搬送装置であって、
前記旋回流生成手段は、
一方向回りの旋回流を生成する一方向旋回流生成手段と、当該一方向回りと逆方向回りの旋回流を生成する逆方向旋回流生成手段とが混在するように複数設けられている
ことを特徴とする浮上搬送装置。 A levitation transport apparatus according to any one of claims 1 to 4,
The swirl flow generating means includes
A plurality of unidirectional swirl flow generating means for generating a swirl flow around one direction and a reverse swirl flow generating means for generating a swirl flow around the one direction and the opposite direction are provided. Floating transport device characterized. 搬送対象を搬送用レールの搬送面から浮上させて、搬送方向に非接触で搬送する浮上搬送方法であって、
前記搬送面に複数形成された気体噴出口から気体を噴出させて前記搬送対象に吹き付け、前記搬送対象を前記搬送面から浮上させるとともに、
前記搬送対象の前記搬送方向における一方の端部が前記搬送面の前記搬送方向における一方の端部を通過した際に、前記搬送対象の前記搬送方向における他方の端部に対応する前記搬送面の位置において気体の旋回流を発生させ、当該旋回流によって生じる負圧により、前記搬送対象の前記搬送方向における後端部を前記搬送面に引き寄せる
ことを特徴とする浮上搬送方法。 A levitation conveyance method in which a conveyance target is levitated from a conveyance surface of a conveyance rail and conveyed in a non-contact manner in a conveyance direction,
While ejecting gas from a plurality of gas outlets formed on the transport surface and blowing the gas to the transport target, the transport target is levitated from the transport surface,
When one end in the transport direction of the transport target passes through one end in the transport direction of the transport surface, the transport surface corresponding to the other end in the transport direction of the transport target A levitation transport method, wherein a swirl flow of gas is generated at a position, and a rear end portion of the transport target in the transport direction is drawn toward the transport surface by a negative pressure generated by the swirl flow.
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