JP2013143364A5 - - Google Patents
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- Publication number
- JP2013143364A5 JP2013143364A5 JP2012004580A JP2012004580A JP2013143364A5 JP 2013143364 A5 JP2013143364 A5 JP 2013143364A5 JP 2012004580 A JP2012004580 A JP 2012004580A JP 2012004580 A JP2012004580 A JP 2012004580A JP 2013143364 A5 JP2013143364 A5 JP 2013143364A5
- Authority
- JP
- Japan
- Prior art keywords
- sample
- charged particle
- particle beam
- internal structure
- observation method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000002245 particle Substances 0.000 claims description 21
- 239000000126 substance Substances 0.000 claims 3
- 238000006073 displacement reaction Methods 0.000 claims 1
- 230000001678 irradiating Effects 0.000 claims 1
- 239000010410 layer Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 230000002040 relaxant effect Effects 0.000 claims 1
- 239000002356 single layer Substances 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012004580A JP5904799B2 (ja) | 2012-01-13 | 2012-01-13 | 試料の内部構造を観察する荷電粒子線装置および試料観察方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012004580A JP5904799B2 (ja) | 2012-01-13 | 2012-01-13 | 試料の内部構造を観察する荷電粒子線装置および試料観察方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2013143364A JP2013143364A (ja) | 2013-07-22 |
JP2013143364A5 true JP2013143364A5 (es) | 2014-12-18 |
JP5904799B2 JP5904799B2 (ja) | 2016-04-20 |
Family
ID=49039813
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012004580A Expired - Fee Related JP5904799B2 (ja) | 2012-01-13 | 2012-01-13 | 試料の内部構造を観察する荷電粒子線装置および試料観察方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5904799B2 (es) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2019008699A1 (ja) * | 2017-07-05 | 2019-01-10 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
JP7083629B2 (ja) * | 2017-11-27 | 2022-06-13 | 日本電子株式会社 | 定量分析方法および電子顕微鏡 |
JP7127088B2 (ja) | 2020-07-21 | 2022-08-29 | 日本電子株式会社 | 荷電粒子線装置及び設定支援方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05290786A (ja) * | 1992-04-10 | 1993-11-05 | Hitachi Ltd | 走査試料像表示方法および装置ならびにそれに供される試料 |
JPH10283965A (ja) * | 1997-04-10 | 1998-10-23 | Jeol Ltd | 走査電子顕微鏡における試料の帯電除去方法および走査電子顕微鏡 |
JP4372339B2 (ja) * | 2000-12-28 | 2009-11-25 | 株式会社島津製作所 | 凹凸像形成装置及び電子線分析装置 |
JP2005259396A (ja) * | 2004-03-10 | 2005-09-22 | Hitachi High-Technologies Corp | 欠陥画像収集方法およびその装置 |
JP5517559B2 (ja) * | 2009-10-26 | 2014-06-11 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置及び荷電粒子線装置における三次元情報の表示方法 |
-
2012
- 2012-01-13 JP JP2012004580A patent/JP5904799B2/ja not_active Expired - Fee Related
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