JP2014022296A5 - - Google Patents

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Publication number: JP2014022296A5
Authority: JP; Japan
Prior art keywords: charged particle; particle beam; sample; cross; section
Prior art date: 2012-07-23
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP2012162256A

Other languages

English (en)

Japanese (ja)

Other versions

JP6002489B2 (ja

JP2014022296A (ja

Filing date

2012-07-23

Publication date

2015-04-16

2012-07-23 Application filed filed Critical

2012-07-23 Priority to JP2012162256A priority Critical patent/JP6002489B2/ja

2012-07-23 Priority claimed from JP2012162256A external-priority patent/JP6002489B2/ja

2014-02-03 Publication of JP2014022296A publication Critical patent/JP2014022296A/ja

2015-04-16 Publication of JP2014022296A5 publication Critical patent/JP2014022296A5/ja

2016-10-05 Application granted granted Critical

2016-10-05 Publication of JP6002489B2 publication Critical patent/JP6002489B2/ja

Status Active legal-status Critical Current

2032-07-23 Anticipated expiration legal-status Critical

Links

239000002245 particle Substances 0.000 claims description 41
238000010884 ion-beam technique Methods 0.000 claims description 6
238000010894 electron beam technology Methods 0.000 claims description 5
239000000523 sample Substances 0.000 claims 34
230000005540 biological transmission Effects 0.000 claims 6
239000010409 thin film Substances 0.000 claims 4
230000002950 deficient Effects 0.000 claims 2
239000010408 film Substances 0.000 claims 2
238000003754 machining Methods 0.000 claims 2
238000003801 milling Methods 0.000 claims 1

JP2012162256A 2012-07-23 2012-07-23 荷電粒子線装置及び試料作製方法 Active JP6002489B2 (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP2012162256A JP6002489B2 (ja)	2012-07-23	2012-07-23	荷電粒子線装置及び試料作製方法

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP2012162256A JP6002489B2 (ja)	2012-07-23	2012-07-23	荷電粒子線装置及び試料作製方法

Publications (3)

Publication Number	Publication Date
JP2014022296A JP2014022296A (ja)	2014-02-03
JP2014022296A5 true JP2014022296A5 (es)	2015-04-16
JP6002489B2 JP6002489B2 (ja)	2016-10-05

Family

ID=50196931

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP2012162256A Active JP6002489B2 (ja)	2012-07-23	2012-07-23	荷電粒子線装置及び試料作製方法

Country Status (1)

Country	Link
JP (1)	JP6002489B2 (es)

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* Cited by examiner, † Cited by third party
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JP6867015B2 (ja) *	2017-03-27	2021-04-28	株式会社日立ハイテクサイエンス	自動加工装置
KR102677678B1 (ko) *	2017-09-25	2024-06-21	셀라 - 솔루션스 인에이블링 나노 어낼리시스 엘티디.	깊이 제어 가능한 이온 밀링
CN107894357B (zh) *	2017-11-08	2021-03-05	上海华力微电子有限公司	一种自动化的样本减薄方法
JP7154531B2 (ja) *	2018-03-22	2022-10-18	国立大学法人東北大学	電子デバイスの評価方法および評価装置
CN109059812B (zh) *	2018-09-11	2020-11-24	太原理工大学	一种精确测量曲面上多层微纳米薄膜厚度的方法
JP7202642B2 (ja) *	2019-03-26	2023-01-12	株式会社日立ハイテクサイエンス	荷電粒子ビーム装置、及び制御方法
WO2021130992A1 (ja) *	2019-12-26	2021-07-01	株式会社日立ハイテク	解析システム、ラメラの検査方法および荷電粒子線装置
JP7352718B2 (ja) *	2020-02-27	2023-09-28	株式会社日立ハイテク	半導体解析システム
JP7407906B2 (ja) *	2020-02-27	2024-01-04	株式会社日立ハイテク	半導体解析システム
CN113390914B (zh) *	2020-03-13	2022-10-14	中国科学院上海硅酸盐研究所	一种基于聚焦离子束表征陶瓷涂层材料三维显微结构的方法
CN113865915B (zh) *	2021-09-18	2023-10-13	长江存储科技有限责任公司	一种切片样品的检测方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP4307470B2 (ja) *	2006-08-08	2009-08-05	株式会社日立ハイテクノロジーズ	荷電粒子線装置、試料加工方法及び半導体検査装置
JP4691529B2 (ja) *	2007-07-20	2011-06-01	株式会社日立ハイテクノロジーズ	荷電粒子線装置、及び試料加工観察方法
JP5105357B2 (ja) *	2007-11-01	2012-12-26	エスアイアイ・ナノテクノロジー株式会社	欠陥認識方法、欠陥観察方法、及び荷電粒子ビーム装置
JP4965481B2 (ja) *	2008-02-15	2012-07-04	エスアイアイ・ナノテクノロジー株式会社	複合荷電粒子ビーム装置、それを用いた試料加工方法及び透過電子顕微鏡用試料作製方法
JP5216739B2 (ja) *	2009-10-15	2013-06-19	株式会社日立ハイテクノロジーズ	荷電粒子線装置、及び膜厚測定方法
JP5292348B2 (ja) *	2010-03-26	2013-09-18	株式会社日立ハイテクノロジーズ	複合荷電粒子線装置

2012
- 2012-07-23 JP JP2012162256A patent/JP6002489B2/ja active Active

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