JP2013140147A - マイクロメカニクスによるコリオリ式回転速度センサ - Google Patents
マイクロメカニクスによるコリオリ式回転速度センサ Download PDFInfo
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- 239000000758 substrate Substances 0.000 claims abstract description 47
- 238000001514 detection method Methods 0.000 claims abstract description 24
- 239000000725 suspension Substances 0.000 claims abstract description 17
- 238000005259 measurement Methods 0.000 claims abstract description 14
- 230000008878 coupling Effects 0.000 claims description 24
- 238000010168 coupling process Methods 0.000 claims description 24
- 238000005859 coupling reaction Methods 0.000 claims description 24
- 238000006073 displacement reaction Methods 0.000 claims description 5
- 230000000694 effects Effects 0.000 abstract description 2
- 230000035939 shock Effects 0.000 abstract 2
- 238000010276 construction Methods 0.000 abstract 1
- 230000010355 oscillation Effects 0.000 abstract 1
- 230000008859 change Effects 0.000 description 7
- 238000013459 approach Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
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- 239000003990 capacitor Substances 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
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- 230000035945 sensitivity Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
- G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/02—Rotary gyroscopes
- G01C19/04—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
- G01C19/5621—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks the devices involving a micromechanical structure
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
- G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
- G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T74/00—Machine element or mechanism
- Y10T74/12—Gyroscopes
- Y10T74/1293—Flexure hinges for gyros
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
- Micromachines (AREA)
- Pressure Sensors (AREA)
Abstract
【解決手段】マイクロメカニクスによるコリオリ式回転速度センサであって、基板と、互いに直交するよう配置された測定軸(X軸)、検出軸(Y軸)および、駆動軸(Z軸)と、前記基板と平行なX−Y平面に配置され、Y軸に沿って配置される2つの中心サスペンション3、4によって、それぞれが前記基板に回転可能に接続される第1および第2の駆動質量体2と、前記中心サスペンション3、4において、前記駆動軸(Z)に関して前記駆動質量体2を回転振動させる駆動手段と、少なくとも1つの弾性連結要素5と、を備え、前記弾性連結要素5は、前記Y軸の両側において、前記駆動質量体2のそれぞれに配置され、かつ、前記駆動質量体2を、互いに調整し合うように連結して振動させるために、前記駆動質量体2から距離を置いて配置される。
【選択図】図1
Description
Claims (15)
- 回転速度を検出するためのマイクロメカニクスによるコリオリ式回転速度センサであって、
基板と、
互いに直交するよう配置された測定軸(X軸)、検出軸(Y軸)および、駆動軸(Z軸)と、
前記基板と平行なX−Y平面に配置され、Y軸に沿って配置される2つの中心サスペンションによって、それぞれが前記基板に回転可能に接続される第1および第2の駆動質量体(2)と、
前記中心サスペンションにおいて、前記駆動軸(Z)に関して前記駆動質量体(2)を回転振動させる駆動手段と、
少なくとも1つの弾性を有する連結要素(5)と、を備え、
前記連結要素は、前記Y軸の両側において、前記駆動質量体(2)のそれぞれに配置され、かつ、前記駆動質量体(2)を、互いに調整し合うように連結して振動させるために、前記駆動質量体(2)から距離を置いて配置される、
回転速度センサ。 - 前記連結要素(5)は、前記X軸方向において、前記駆動質量体(2)の最外端に取り付けられる、請求項1に記載の回転速度センサ。
- 前記連結要素(5)は、カンチレバーおよび弾性連結バネ(6’’’)を含む、請求項1および2のいずれかに記載の回転速度センサ。
- 前記弾性連結バネ(6’’’)は、前記2つの駆動質量体の間にある空間に突出する、請求項3に記載の回転速度センサ。
- 前記連結要素(5)は、前記第1および第2の駆動質量体(2)の間に配置される、請求項1から4のいずれかに記載の回転速度センサ。
- 前記連結要素(5)は、前記弾性連結バネ(6’’’)によって前記第1および第2の駆動質量体(2)に連結される第1の質量部(14)である、請求項3から5のいずれかに記載の回転速度センサ。
- 前記第1の質量部(14)によって第2の質量部(15)をフレーム状で囲い、バネ(16)を用いて、前記第1の質量部(14)と前記第2の質量部(15)とを連結する、請求項6に記載の回転速度センサ。
- 前記連結要素(5)の前記第2の質量部(15)は、前記X軸に関して回転可能なように、アンカーによって前記基板に連結される、請求項7に記載の回転速度センサ。
- 前記基板と前記駆動質量体(2)、および/または、前記第1の質量部(14)と前記第2の質量部(15)との間には、検出素子(8)が配置される、請求項7または8に記載の回転速度センサ。
- 前記駆動質量体(2)には駆動要素(7)が配置される、請求項1から9のいずれかに記載の回転速度センサ。
- 前記駆動要素(7)にはフィードバック要素(12)が設けられている、請求項10に記載の回転速度センサ。
- 前記駆動質量体(2)は、複数のアンカーバネ(4)によって前記中心サスペンションに配置される、請求項1から11のいずれかに記載の回転速度センサ。
- 前記駆動質量体(2)と前記第1の質量部(14)との間、および/または、前記第1の質量部(14)と前記第2の質量部(15)との間には、前記駆動質量体(2)、前記第1の質量部(14)、および、前記第2の質量部(15)の変位を制限する変位ストッパ(19、20)が配置される、請求項7から12のいずれかに記載の回転速度センサ。
- 前記中心サスペンションと前記駆動質量体(2)との間には中心ストッパ(21)が配置される、請求項1から13のいずれかに記載の回転速度センサ。
- 前記基板と前記駆動質量体(2)との間、および/または、前記駆動質量体(2)と前記アンカーバネ(4)との間にはストッパ(13)が配置される、請求項12に記載の回転速度センサ。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102011056971A DE102011056971A1 (de) | 2011-12-23 | 2011-12-23 | Mikromechanischer Coriolis-Drehratensensor |
DE102011056971.5 | 2011-12-23 |
Publications (2)
Publication Number | Publication Date |
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JP2013140147A true JP2013140147A (ja) | 2013-07-18 |
JP6190587B2 JP6190587B2 (ja) | 2017-08-30 |
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Application Number | Title | Priority Date | Filing Date |
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JP2012277887A Active JP6190587B2 (ja) | 2011-12-23 | 2012-12-20 | マイクロメカニクスによるコリオリ式回転速度センサ |
Country Status (6)
Country | Link |
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US (2) | US9279681B2 (ja) |
EP (1) | EP2607850B1 (ja) |
JP (1) | JP6190587B2 (ja) |
KR (1) | KR102032732B1 (ja) |
CN (1) | CN103175982B (ja) |
DE (1) | DE102011056971A1 (ja) |
Cited By (1)
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JP2016530542A (ja) * | 2013-09-11 | 2016-09-29 | 株式会社村田製作所 | 改良されたジャイロスコープ構造体およびジャイロスコープ |
Families Citing this family (8)
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US20120285275A1 (en) * | 2011-05-10 | 2012-11-15 | Kongsberg Defence & Aerospace As | Stabilization platform |
FI125696B (en) * | 2013-09-11 | 2016-01-15 | Murata Manufacturing Co | Gyroscope structure and gyroscope with improved quadrature compensation |
CN107289920B (zh) * | 2017-05-10 | 2021-02-09 | 中国航空工业集团公司西安飞行自动控制研究所 | 一种角速率敏感方向直接耦合的四质量块微机械陀螺 |
DE102017213802A1 (de) * | 2017-08-08 | 2019-02-14 | Robert Bosch Gmbh | Drehratensensor, Verfahren zur Herstellung eines Drehratensensors |
DE102017216010A1 (de) * | 2017-09-12 | 2019-03-14 | Robert Bosch Gmbh | Mikromechanische Drehraten-Sensoranordnung und entsprechendes Herstellungsverfahren |
DE102020202158A1 (de) | 2020-02-19 | 2021-08-19 | Robert Bosch Gesellschaft mit beschränkter Haftung | Mikromechanische Drehraten-Sensoranordnung, Drehraten-Sensorarray und entsprechendes Herstellungsverfahren |
US11525680B2 (en) * | 2021-02-17 | 2022-12-13 | Nxp Usa, Inc. | Angular rate sensor with centrally positioned coupling structures |
CN115727840A (zh) * | 2021-08-31 | 2023-03-03 | 华为技术有限公司 | 惯性传感器和电子设备 |
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2011
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2012
- 2012-12-14 EP EP12197111.3A patent/EP2607850B1/en active Active
- 2012-12-19 US US13/720,217 patent/US9279681B2/en active Active
- 2012-12-20 KR KR1020120149396A patent/KR102032732B1/ko active IP Right Grant
- 2012-12-20 JP JP2012277887A patent/JP6190587B2/ja active Active
- 2012-12-21 CN CN201210563246.0A patent/CN103175982B/zh active Active
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- 2016-02-19 US US15/048,020 patent/US10024663B2/en active Active
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JPH11325905A (ja) * | 1998-05-08 | 1999-11-26 | Fuji Electric Co Ltd | 振動ジャイロ |
JP2002207048A (ja) * | 2000-10-20 | 2002-07-26 | Robert Bosch Gmbh | マイクロメカニズムの構成部材 |
JP2006525514A (ja) * | 2003-04-28 | 2006-11-09 | アナログ ディバイス インコーポレイテッド | 1軸の加速度検知及び2軸の角速度検知を与える微細加工マルチセンサ |
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Publication number | Publication date |
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DE102011056971A1 (de) | 2013-06-27 |
US10024663B2 (en) | 2018-07-17 |
EP2607850A3 (en) | 2016-05-18 |
EP2607850B1 (en) | 2021-04-14 |
US20160169676A1 (en) | 2016-06-16 |
CN103175982B (zh) | 2018-03-09 |
KR20130073832A (ko) | 2013-07-03 |
JP6190587B2 (ja) | 2017-08-30 |
KR102032732B1 (ko) | 2019-10-16 |
US20130269469A1 (en) | 2013-10-17 |
US9279681B2 (en) | 2016-03-08 |
EP2607850A2 (en) | 2013-06-26 |
CN103175982A (zh) | 2013-06-26 |
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