JP2013011556A - 隔膜気圧計 - Google Patents
隔膜気圧計 Download PDFInfo
- Publication number
- JP2013011556A JP2013011556A JP2011145495A JP2011145495A JP2013011556A JP 2013011556 A JP2013011556 A JP 2013011556A JP 2011145495 A JP2011145495 A JP 2011145495A JP 2011145495 A JP2011145495 A JP 2011145495A JP 2013011556 A JP2013011556 A JP 2013011556A
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- Prior art keywords
- standard
- atmospheric pressure
- diaphragm
- pressure chamber
- pressure
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
- G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
- G01L21/14—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured using thermocouples
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/04—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
【解決手段】標準圧室を有する隔膜気圧計において、標準圧室内に熱型気圧センサを備え、その標準圧室内の気圧を常時または必要に応じて計測して、この計測した気圧を標準気圧として利用するようにした。熱伝導型センサとしてシリコン基板を利用し、絶対温度センサを備える。標準圧室の気圧を所望の気圧付近に調整することもできるようにする。
【選択図】図1
Description
2 基板
10 熱伝導型センサ
11 隔膜気圧計測定子筺体
12 ハーメチックシール
15 隔膜
16 標準圧室
17 測定室
18 被気圧測定チャンバ連通部
19 静電容量計測用電極
20 静電容量部
21 絶対温度センサ
22 オーム性コンタクト
25 ヒータ
28 歪ゲージ
30 測定子接続管
31 真空排気封止管
32 封止部
40 空洞
41 熱抵抗部
45 センシングカンチレバ
46 カンチレバ先端領域
50 シリコン酸化膜
71a、71b 熱電対用電極パッド
72a、72b ヒータ用電極パッド
73a、73b 絶対温度センサ用電極パッド
81a,
81b 熱電対温接点
82 熱電対冷接点
100 隔膜気圧計測定子
110 静電容量電極用端子
111 歪みゲージ用端子
115 熱伝導型センサ用端子
120a、120b 熱電対
130 大気圧連通管
210 配線
250 隔膜支持リング
300 集積回路
301 増幅回路
302 演算回路
303 ヒータ駆動回路
304 表示用回路
305 分配器
310 集積回路用電極パッド
400 回路モジュール
410 プリント基板
420 ソケット用端子板
430 端子
450 表示部
500 モジュール化した隔膜気圧計
Claims (9)
- 標準圧室を有する隔膜気圧計において、該標準圧室内に熱伝導型センサを備え、その標準圧室内の気圧を計測して、標準気圧として利用するようにしたことを特徴とする隔膜気圧計。
- 標準圧室は、密閉された気圧室である請求項1記載の隔膜気圧計。
- 標準圧室の気圧を所望の気圧付近に調整できるようにした請求項2記載の隔膜気圧計。
- 標準圧室は、大気に解放された気圧室である請求項1記載の隔膜気圧計。
- 熱伝導型センサとしてシリコン基板を用いた請求項1から4のいずれかに記載の隔膜気圧計。
- 熱伝導型センサとして、センシングカンチレバに、少なくとも1個のヒータと2個の熱電対を形成してあり、該2個の熱電対の出力差の計測により前記標準圧室内の気圧が計測できるようにした請求項1から5のいずれかに記載の隔膜気圧計。
- 熱伝導型センサに絶対温度センサを備えた請求項1から6のいずれかに記載の隔膜気圧計。
- 熱伝導型センサのセンサチップに増幅回路を含む集積回路を組み込んだ請求項1から7のいずれかに記載の隔膜気圧計。
- 熱伝導型センサを用いた気圧センシング機能の他に、少なくとも、増幅回路、演算回路、ヒータ駆動回路をも備えてモジュール化した請求項1から8のいずれかに記載の隔膜気圧計。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011145495A JP2013011556A (ja) | 2011-06-30 | 2011-06-30 | 隔膜気圧計 |
US14/130,196 US20140216127A1 (en) | 2011-06-30 | 2012-06-25 | Separated type pressure gauge |
PCT/JP2012/066159 WO2013002180A1 (ja) | 2011-06-30 | 2012-06-25 | 隔膜気圧計 |
TW101123395A TW201315980A (zh) | 2011-06-30 | 2012-06-29 | 隔膜氣壓計 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011145495A JP2013011556A (ja) | 2011-06-30 | 2011-06-30 | 隔膜気圧計 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2013011556A true JP2013011556A (ja) | 2013-01-17 |
Family
ID=47424072
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011145495A Pending JP2013011556A (ja) | 2011-06-30 | 2011-06-30 | 隔膜気圧計 |
Country Status (4)
Country | Link |
---|---|
US (1) | US20140216127A1 (ja) |
JP (1) | JP2013011556A (ja) |
TW (1) | TW201315980A (ja) |
WO (1) | WO2013002180A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR200489691Y1 (ko) * | 2018-12-31 | 2019-07-24 | (주)아토벡 | 반도체 제조용 가스 또는 케미컬 공급장치에 안전성을 향상시키기 위해 구성되는 멤스센서를 이용한 진공게이지 |
JP2019219338A (ja) * | 2018-06-22 | 2019-12-26 | 株式会社アルバック | トランスデューサ型真空計 |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI550261B (zh) * | 2014-03-17 | 2016-09-21 | 立錡科技股份有限公司 | 微機電壓力計以及其製作方法 |
US9983080B2 (en) * | 2015-12-01 | 2018-05-29 | National Chung Shan Institute Of Science And Technology | High-temperature gas pressure measuring method |
CA3007375A1 (en) * | 2017-06-15 | 2018-12-15 | Kevin Kornelsen | Calibration-less micro-fabricated vacuum gauge devices and method for measuring pressure |
DE102018107852B4 (de) * | 2018-04-03 | 2023-07-20 | Trafag Ag | Dichtewächter mit integrierter Niederdruckanzeige |
JP7418248B2 (ja) * | 2020-03-05 | 2024-01-19 | 株式会社堀場エステック | 真空計 |
CN112066947B (zh) * | 2020-08-10 | 2022-07-05 | 北京二郎神科技有限公司 | 无人机及其飞控装置以及用于气压计的稳压结构 |
US11428596B2 (en) * | 2020-09-16 | 2022-08-30 | Wisenstech Ltd. | Vacuum gauge with an extended dynamic measurement range |
Citations (6)
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JPS61155931A (ja) * | 1984-12-24 | 1986-07-15 | ローベルト・ボツシユ・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング | 電気的な圧力発生器 |
JPH0465643A (ja) * | 1990-07-05 | 1992-03-02 | Mitsubishi Electric Corp | 半導体圧力センサ及びその製造方法 |
JPH10206455A (ja) * | 1997-01-21 | 1998-08-07 | Murata Mfg Co Ltd | 減圧封止電子部品の製造方法 |
JP2009079965A (ja) * | 2007-09-26 | 2009-04-16 | Mitsuteru Kimura | 熱電対ヒータとこれを用いた温度計測装置 |
JP2009258109A (ja) * | 2008-04-18 | 2009-11-05 | Korea Research Inst Of Standards & Science | ダイヤフラムを用いた圧力測定装置及び圧力測定方法 |
JP2011069733A (ja) * | 2009-09-25 | 2011-04-07 | Mitsuteru Kimura | 加熱励振を利用した熱伝導型気圧センサ |
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-
2011
- 2011-06-30 JP JP2011145495A patent/JP2013011556A/ja active Pending
-
2012
- 2012-06-25 WO PCT/JP2012/066159 patent/WO2013002180A1/ja active Application Filing
- 2012-06-25 US US14/130,196 patent/US20140216127A1/en not_active Abandoned
- 2012-06-29 TW TW101123395A patent/TW201315980A/zh unknown
Patent Citations (6)
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JPS61155931A (ja) * | 1984-12-24 | 1986-07-15 | ローベルト・ボツシユ・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング | 電気的な圧力発生器 |
JPH0465643A (ja) * | 1990-07-05 | 1992-03-02 | Mitsubishi Electric Corp | 半導体圧力センサ及びその製造方法 |
JPH10206455A (ja) * | 1997-01-21 | 1998-08-07 | Murata Mfg Co Ltd | 減圧封止電子部品の製造方法 |
JP2009079965A (ja) * | 2007-09-26 | 2009-04-16 | Mitsuteru Kimura | 熱電対ヒータとこれを用いた温度計測装置 |
JP2009258109A (ja) * | 2008-04-18 | 2009-11-05 | Korea Research Inst Of Standards & Science | ダイヤフラムを用いた圧力測定装置及び圧力測定方法 |
JP2011069733A (ja) * | 2009-09-25 | 2011-04-07 | Mitsuteru Kimura | 加熱励振を利用した熱伝導型気圧センサ |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019219338A (ja) * | 2018-06-22 | 2019-12-26 | 株式会社アルバック | トランスデューサ型真空計 |
JP7063742B2 (ja) | 2018-06-22 | 2022-05-09 | 株式会社アルバック | トランスデューサ型真空計 |
KR200489691Y1 (ko) * | 2018-12-31 | 2019-07-24 | (주)아토벡 | 반도체 제조용 가스 또는 케미컬 공급장치에 안전성을 향상시키기 위해 구성되는 멤스센서를 이용한 진공게이지 |
Also Published As
Publication number | Publication date |
---|---|
US20140216127A1 (en) | 2014-08-07 |
TW201315980A (zh) | 2013-04-16 |
WO2013002180A1 (ja) | 2013-01-03 |
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