JP2012169287A - Display panel and method for manufacturing the same - Google Patents

Display panel and method for manufacturing the same Download PDF

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JP2012169287A
JP2012169287A JP2012097590A JP2012097590A JP2012169287A JP 2012169287 A JP2012169287 A JP 2012169287A JP 2012097590 A JP2012097590 A JP 2012097590A JP 2012097590 A JP2012097590 A JP 2012097590A JP 2012169287 A JP2012169287 A JP 2012169287A
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display panel
melting point
low melting
substrates
barrier layer
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JP5135480B2 (en
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Tomohiro Nagata
智啓 永田
Hirohiko Murakami
村上　　裕彦
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Ulvac Inc
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Abstract

PROBLEM TO BE SOLVED: To provide a display panel low in moisture permeability without the need of firing in a sealing process, and a method for manufacturing the display panel.SOLUTION: In a display panel of the present invention, a peripheral part between two substrates facing each other, which is formed by the substrates, is sealed by a seal part, an internal space of the peripheral part is maintained in reduced pressure or an inert gas atmosphere, the seal part is formed of a hardening resin, and a barrier layer formed of a low melting point metal or a low melting point alloy is provided on an outside of the seal part. In a method for manufacturing the display panel of the present invention, a seal part is formed of a hardening resin, a periphery part between substrates is sealed by the seal part, and thereafter an outside of the seal part is covered with a barrier layer formed of a low melting point metal or a low melting point alloy.

Description

本発明は、フィールドエミッションディスプレイ（ＦＥＤ）やプラズマディスプレイパネル（ＰＤＰ）のような表示パネル及びその製造法に関する。   The present invention relates to a display panel such as a field emission display (FED) or a plasma display panel (PDP) and a method for manufacturing the same.

原理的には、ＦＥＤは、平面上に格子状に配列した多数の微細な電極から、真空を保って対向して設けた発光面に形成した蛍光体に電子を真空中に放出して発光させるものであり、またＰＤＰは、表面に電極を形成した二枚のガラス基板の間にヘリウムやネオンなどの希ガスを高圧で封入し、高圧の希ガスに高い電圧を掛けて紫外線を発生させて発光させるものである。   In principle, an FED emits electrons from a large number of fine electrodes arranged in a grid pattern on a plane to a phosphor formed on a light-emitting surface provided facing each other while maintaining a vacuum to emit light. In addition, a PDP encloses a rare gas such as helium or neon at a high pressure between two glass substrates having electrodes formed on the surface, and generates a UV ray by applying a high voltage to the high-pressure rare gas. It emits light.

ＦＥＤやＰＤＰは、一般的には、前面基板と背面基板の２枚のガラス基板をスペーサーやリブを介して対向させて、貼り合せる構造をとっている。これらの表示パネルに画像を表示させるためには、２枚の基板およびスペーサーまたはリブで囲まれた内部空間は、ＦＥＤでは所定の減圧雰囲気、ＰＤＰでは大気圧以下のガス雰囲気（ＡｒやＸｅなど）である必要がある。   FEDs and PDPs generally have a structure in which two glass substrates, a front substrate and a rear substrate, are opposed to each other via spacers or ribs and bonded together. In order to display an image on these display panels, an internal space surrounded by two substrates and spacers or ribs is a predetermined reduced pressure atmosphere in FED, and a gas atmosphere (Ar, Xe, etc.) below atmospheric pressure in PDP. Need to be.

このようなパネルは普通下記のような工程で作成される。まず、２枚の基板を貼り合せる封着工程では、ペースト状のガラスフリットを封着部に塗布した後、対向する２枚の基板の位置合わせを行い、およそ４００℃以上の加熱および冷却の過程を経て封着する。その後、パネル内の空気を排気するため予め２枚の基板のいずれかに設けた排気孔にチップ管を取り付け、チップ管に接続した真空ポンプを用いて２枚の基板間の真空排気を行う。そしてＰＤＰの場合にはさらに２枚の基板間にパネル作動用ガスを導入する。パネル作動雰囲気になった段階で、チップ管を切断し気密封止する（特許文献１の図２参照）。   Such panels are usually made by the following process. First, in the sealing step of bonding two substrates together, paste-like glass frit is applied to the sealing portion, then the two opposing substrates are aligned, and the process of heating and cooling at about 400 ° C. or higher After sealing. Thereafter, in order to exhaust the air in the panel, a chip tube is attached in advance to an exhaust hole provided in one of the two substrates, and vacuum exhaust is performed between the two substrates using a vacuum pump connected to the chip tube. In the case of the PDP, panel operation gas is further introduced between the two substrates. When the panel operating atmosphere is reached, the chip tube is cut and hermetically sealed (see FIG. 2 of Patent Document 1).

このような工程では、パネルは各処理装置を順次搬送されて処理されるため広いスペースを必要とし、また、チップ管を必要とするためコストや手間が掛かるという欠点があった。この欠点を改善するために、チップ管を不要とした一貫封着技術も提案されている（特許文献１参照）。   In such a process, the panel has a drawback that it requires a large space because each processing apparatus is sequentially conveyed and processed, and a chip tube is required, so that a cost and labor are required. In order to improve this defect, a consistent sealing technique that eliminates the need for a tip tube has also been proposed (see Patent Document 1).

特許文献１に記載の発明では、まず、加熱装置と排気装置とガス封入装置とを備えたチャンバ内に位置合わせした互いに接触していない２枚の基板を導入し、チャンバを排気する。その後、封止剤を真空状態で仮焼成し、パネル動作ガスをチャンバ内に導入してから対向する２枚の基板を接触させ封着剤の本焼成を行い、基板内空間にガスを封入している。   In the invention described in Patent Document 1, first, two non-contact substrates aligned in a chamber provided with a heating device, an exhaust device, and a gas sealing device are introduced, and the chamber is exhausted. After that, the sealing agent is temporarily fired in a vacuum state, the panel operating gas is introduced into the chamber, the two opposing substrates are brought into contact with each other, the sealing agent is finally fired, and the gas is sealed in the space in the substrate. ing.

この種の表示パネルの封着に関するその他の先行技術としては、一般的に用いられるガラスフリットより低温で硬化する熱硬化樹脂や加熱過程を必要としない紫外線硬化樹脂を用いた封着技術もある（特許文献２参照）。
特開平１０−４０８１８ 特開平１０−３４０６７６ Other prior art relating to the sealing of this type of display panel includes a sealing technique using a thermosetting resin that cures at a lower temperature than a commonly used glass frit and an ultraviolet curable resin that does not require a heating process ( Patent Document 2).
JP 10-40818 JP 10-340676

ガラスフリットを用いた先行技術の封着手法においては、特許文献１の図２に示すようなチップ管を用いた工程であれ、特許文献１に記載の発明のような一貫工程であれ、加熱・冷却過程を経るため、処理時間が長くなり生産性に乏しいという問題点がある。   In the prior art sealing method using glass frit, whether it is a process using a tip tube as shown in FIG. 2 of Patent Document 1 or an integrated process like the invention described in Patent Document 1, Due to the cooling process, there is a problem that the processing time is long and the productivity is poor.

また、特許文献２に記載されたように紫外線硬化樹脂を用いた場合、焼成を必要としないため処理時間は短くなるものの、市販されている紫外線硬化樹脂の水蒸気透過率は一日当たり１０〜２０ｇ／ｍ２と高く、時間が経つにつれこの水蒸気が発光輝度や駆動電圧といったパネル特性に影響を及ぼすことになるという問題点がある。ディスプレイパネルの耐水性を高めるためにこのような接着部に要求される水蒸気透過性は、一日当たりｌ０−２ｇ／ｍ２オーダー以下と言われている。 In addition, when an ultraviolet curable resin is used as described in Patent Document 2, the treatment time is shortened because baking is not required, but the water vapor transmission rate of a commercially available ultraviolet curable resin is 10 to 20 g / day. m 2 and higher, there is a problem that the water vapor over time will affect the panel characteristics such as light emission luminance and drive voltage. It is said that the water vapor permeability required for such an adhesion part in order to improve the water resistance of the display panel is not more than the order of 10 −2 g / m 2 per day.

そこで、本発明は、上記の問題点を解決して、封着工程において焼成を必要とせず、かつ水分透過率の少ない表示パネル及びその製造法を提供することを目的とする。   Accordingly, an object of the present invention is to solve the above-described problems and provide a display panel that does not require firing in the sealing step and has a low moisture permeability and a method for manufacturing the same.

前記の目的を達成するために、本発明の第１の発明によれば、対向する２枚の基板によって構成される基板間周縁部をシール部によって封着し、その内部空間が減圧または不活性ガス雰囲気に維持された表示パネルにおいて、シール部を硬化性樹脂で形成し、シール部の外側に、低融点金属又は低融点合金から成るバリア層を設けたことを特徴としている。   In order to achieve the above object, according to the first aspect of the present invention, the inter-substrate peripheral edge constituted by two opposing substrates is sealed with a seal portion, and the internal space is decompressed or inactivated. In a display panel maintained in a gas atmosphere, a seal portion is formed of a curable resin, and a barrier layer made of a low melting point metal or a low melting point alloy is provided outside the seal portion.

バリア層は、一実施形態ではポリウレタン、シリコーン、或いはＩｎ単体金属から構成され得る。代わりに、バリア層は、Ｓｎ及びＰｂを含む合金から構成され得る。その場合、合金はＢｉ、Ｃｄ、Ｉｎの少なくとも一つを含み得る。   In one embodiment, the barrier layer may be composed of polyurethane, silicone, or In single metal. Alternatively, the barrier layer can be composed of an alloy comprising Sn and Pb. In that case, the alloy may include at least one of Bi, Cd, and In.

またバリア層は、Ｓｎ及びＺｎを含む合金から構成され得る。   The barrier layer can be made of an alloy containing Sn and Zn.

本発明の第２の発明によれば、対向する２枚の基板によって構成される基板間周縁部をシール部によって封着し、その内部空間が減圧または不活性ガス雰囲気に維持された表示パネルの製造法において、シール部を硬化性樹脂で形成し、該シール部によって基板間周縁部を封着した後に、該シール部の外側を低融点金属又は低融点合金から成るバリア層にて被覆することを特徴としている。   According to the second aspect of the present invention, the display panel in which the peripheral portion between the substrates constituted by the two substrates facing each other is sealed by the seal portion, and the internal space thereof is maintained in a reduced pressure or inert gas atmosphere. In the manufacturing method, after forming the seal portion with a curable resin and sealing the peripheral portion between the substrates with the seal portion, the outside of the seal portion is covered with a barrier layer made of a low melting point metal or a low melting point alloy. It is characterized by.

本発明の第１の発明による表示パネルは、時間の経過に伴う水蒸気による発光輝度や駆動電圧といったパネル特性への影響を軽減でき、長期間安定して使用できるようになる。   The display panel according to the first aspect of the present invention can reduce the influence on the panel characteristics such as light emission luminance and driving voltage due to water vapor with the passage of time, and can be used stably for a long period of time.

また、本発明の第２の発明による表示パネルの製造法では、封着工程において焼成を必要とせず簡便かつ迅速な封着が可能となり、かつ水分透過率の少ない表示パネルを効率的に製造できるようになる。   Further, in the method for manufacturing a display panel according to the second invention of the present invention, it is possible to easily and quickly seal without requiring firing in the sealing step, and to efficiently manufacture a display panel with a low moisture permeability. It becomes like this.

本発明による表示パネルの製造に用いられる装置の第一の封着工程すなわちシール部形成工程における封着前の状態を示す概略図。Schematic which shows the state before sealing in the 1st sealing process of the apparatus used for manufacture of the display panel by this invention, ie, a seal | sticker part formation process. 本発明による表示パネルの製造に用いられる装置の第二の封着工程すなわちバリア層形成工程を示す概略図。Schematic which shows the 2nd sealing process, ie, barrier layer formation process, of the apparatus used for manufacture of the display panel by this invention. （ａ）は図２に示すバリア層形成工程を示す部分断面側面図。（ｂ）は図２に示すバリア層形成工程を示す部分断面平面図。(A) is a fragmentary sectional side view which shows the barrier layer formation process shown in FIG. FIG. 3B is a partial cross-sectional plan view showing the barrier layer forming step shown in FIG. 本発明の別の実施形態によるＦＥＤ表示パネルの製造に用いられる装置の構成を示す概略図。Schematic which shows the structure of the apparatus used for manufacture of the FED display panel by another embodiment of this invention. （ａ）は図４に示す装置を用いたシール部形成工程を示す部分平面図。（ｂ）は図４に示す装置を用いたシール部形成工程を示す部分側面図。(A) is a partial top view which shows the seal | sticker part formation process using the apparatus shown in FIG. (B) is the partial side view which shows the seal | sticker part formation process using the apparatus shown in FIG.

以下、添付図面を参照して、本発明の実施形態について説明する。
図１及び図２には、本発明による表示パネルの製造方法を実施している装置の一実施形態を概略的に示している。図１及び図２において、１は真空チャンバで、その上部には紫外線ランプ２が配置され、また真空チャンバ１は開閉バルブ３を介して一方では排気系を成す開閉バルブ４及び真空ポンプ５に接続され、他方ではＰＤＰの動作ガス供給系を成す開閉バルブ６及びガス源７に接続されている。 Embodiments of the present invention will be described below with reference to the accompanying drawings.
FIG. 1 and FIG. 2 schematically show an embodiment of an apparatus that implements a method for manufacturing a display panel according to the present invention. In FIG. 1 and FIG. 2, reference numeral 1 denotes a vacuum chamber, an ultraviolet lamp 2 is disposed on the upper part thereof, and the vacuum chamber 1 is connected via an opening / closing valve 3 to an opening / closing valve 4 and a vacuum pump 5 forming an exhaust system. On the other hand, it is connected to an open / close valve 6 and a gas source 7 which form an operating gas supply system of the PDP.

このように構成した装置を用いて本発明にる表示パネルの製造について説明する。
真空チャンバ１内には図示していない搬送機構によって前面板１０及び背面板１１が導入される。背面板１１には図示したようにその周縁部に沿って紫外線硬化樹脂１２が予め塗布される。次に、開閉バルブ３及び排気系の開閉バルブ４を開き、真空ポンプ５によって真空チャンバ１内を排気する。 The manufacture of the display panel according to the present invention using the thus configured apparatus will be described.
A front plate 10 and a back plate 11 are introduced into the vacuum chamber 1 by a transport mechanism (not shown). As illustrated, the back plate 11 is preliminarily coated with an ultraviolet curable resin 12 along its peripheral edge. Next, the open / close valve 3 and the exhaust system open / close valve 4 are opened, and the vacuum chamber 1 is evacuated by the vacuum pump 5.

製作しようとする表示パネルがＦＥＤパネルである場合には、この状態から図２に示す状態に示すように、前面板１０及び背面板１１が紫外線硬化樹脂１２を介して接触するように貼り合わせ、そして紫外線ランプ２を作動して前面板１０及び背面板１１に紫外線を照射して紫外線硬化樹脂１２を硬化させる。こうしてシール部を形成する。   When the display panel to be manufactured is an FED panel, as shown in the state shown in FIG. 2 from this state, the front plate 10 and the back plate 11 are bonded so as to be in contact via the ultraviolet curable resin 12, Then, the ultraviolet lamp 2 is operated to irradiate the front plate 10 and the back plate 11 with ultraviolet rays to cure the ultraviolet curable resin 12. Thus, a seal portion is formed.

一方、ＰＤＰの場合には、真空チャンバ１を真空ポンプ５によって排気した後、排気系の開閉バルブ４を閉じ、ＰＤＰの動作ガス供給系の開閉バルブ６を開け、ガス源７から真空チャンバ１にＰＤＰの動作ガスを導入する。その後、開閉バルブ６を閉じ、図２に示すように、前面板１０と背面板１１を紫外線硬化樹脂１２を介して接触するように貼り合わせ、そして紫外線ランプ２を作動して前面板１０及び背面板１１に紫外線を照射して紫外線硬化樹脂１２を硬化させ、こうしてシール部を形成する。   On the other hand, in the case of the PDP, after the vacuum chamber 1 is evacuated by the vacuum pump 5, the opening / closing valve 4 of the exhaust system is closed and the opening / closing valve 6 of the operating gas supply system of the PDP is opened. PDP working gas is introduced. Thereafter, the opening / closing valve 6 is closed, and as shown in FIG. 2, the front plate 10 and the back plate 11 are bonded to each other through the ultraviolet curable resin 12, and the ultraviolet lamp 2 is operated to operate the front plate 10 and the back plate. The face plate 11 is irradiated with ultraviolet rays to cure the ultraviolet curable resin 12, thus forming a seal portion.

このようにして封着した基板を真空チャンバ１から取り出した後、図３に示すように、塗布用シリンジ１３を用いて、追加封着剤１４を貼りあわせた基板の周縁部に塗布する。追加封着剤１４として紫外線硬化樹脂を用いる場合には、塗布後に紫外線ランプ３を作動して紫外線を再照射する。また追加封着剤１４として室温放置型の樹脂や低融点金属もしくは低融点合金を用いる場合には、そのまま放置して硬化、凝固させる。このようにして硬化した追加封着剤１４により、シール部の外側にバリア層が形成される。   After the substrate thus sealed is taken out from the vacuum chamber 1, as shown in FIG. 3, an additional sealing agent 14 is applied to the peripheral portion of the bonded substrate using a coating syringe 13. In the case where an ultraviolet curable resin is used as the additional sealant 14, the ultraviolet lamp 3 is operated after application to irradiate ultraviolet rays again. Further, when a room temperature standing type resin, a low melting point metal or a low melting point alloy is used as the additional sealant 14, it is left as it is to be cured and solidified. The additional sealing agent 14 thus cured forms a barrier layer outside the seal portion.

使用する紫外線硬化樹脂は、主に光重合性オリゴマーと光重合性モノマーと光重合開始剤とで構成され、主な光重合性オリゴマーとしては、ポリエステルアクリレート、ポリウレタンアクリレート、エポキシアクリレートを挙げることができ、また主な光重合性モノマーとしては、アクリル酸エステルを挙げることができ、更に主な光重合開始剤としては、カルポニル化合物、イオウ化合物、アゾ化合物などを挙げることができる。   The UV curable resin used is mainly composed of a photopolymerizable oligomer, a photopolymerizable monomer, and a photopolymerization initiator, and examples of the main photopolymerizable oligomer include polyester acrylate, polyurethane acrylate, and epoxy acrylate. In addition, examples of the main photopolymerizable monomer include acrylic acid esters, and examples of the main photopolymerization initiator include carbonyl compounds, sulfur compounds, and azo compounds.

追加封着剤１４として用いることのできる低融点金属としては、ポリウレタン、シリコーン、Ｉｎ（融点１５６．６℃）の単体金属を挙げることができ、また使用できる低融点合金としては、Ｓｎ及びＺｎを含む合金、Ｓｎ及びＰｂを含む合金、或いはＢｉ、Ｃｄ、Ｉｎの少なくとも一つを含む合金を挙げることができる。かかる合金の所定の組成比（原子％）で組み合わせたときの融点を挙げると次の通りである。
融点（℃） Ｂｉ Ｐｂ Ｓｎ Ｃｄ Ｉｎ Ｚｎ
４６．７ ４４．７ ２２．６ ８．３ ５．３ １９．１
６０．０ ５３．５ １７ １９ １０．５
７０．０ ２６．７ １３．３ １０
６０．５ ５０ ２５．０ １２．５ １２．５
１００．０ ５０ ２８．０ ２２．０
１９９ ９１．２ ８．８ Examples of the low melting point metal that can be used as the additional sealing agent 14 include single metals such as polyurethane, silicone, and In (melting point: 156.6 ° C.), and examples of the low melting point alloy that can be used include Sn and Zn. An alloy containing Sn, Pb, or an alloy containing at least one of Bi, Cd, and In. The melting points when such alloys are combined at a predetermined composition ratio (atomic%) are as follows.
Melting point (° C) Bi Pb Sn Cd In Zn
46.7 44.7 22.6 8.3 5.3 19.1
60.0 53.5 17 19 10.5
70.0 26.7 13.3 10
60.5 50 25.0 12.5 12.5
100.0 50 28.0 22.0
199 91.2 8.8

ところで、ディスプレイ駆動時に基板及び封止剤の温度は上昇するが、一般にPDPの通常駆動時は基板の温度は40〜60℃になるので、前記の合金を使用でき、例えば一番下段のBi 50%, Pb 28%, Sn 22%では融点が100℃であり、シール部の紫外線硬化樹脂１２を傷めずパネル駆動中の温度にも耐え得ることが認められる。   By the way, the temperature of the substrate and the sealing agent rises when the display is driven, but generally the temperature of the substrate is 40 to 60 ° C. during the normal driving of the PDP. Therefore, the above alloy can be used, for example, Bi 50 at the bottom. %, Pb 28%, and Sn 22% have a melting point of 100 ° C., and it is recognized that they can withstand the temperature during panel driving without damaging the ultraviolet curable resin 12 in the seal portion.

図４には、本発明によるＦＥＤ表示パネルの製造に使用される装置の一実施形態を概略的に示し、２１は仕込み／取り出し室で、室内を所定の真空度に排気する排気系２２が接続されている。この仕込み／取り出し室２１はゲートバルブ２３を介して搬送室２４に接続され、搬送室２４は排気系２５によって所定の真空レベルに排気され得る。搬送室２４内には、搬送ロボットアーム２６が配置されている。また、搬送室２４はゲートバルブ２７を介して位置合わせ／硬化室２８に接続され、この位置合わせ／硬化室２８には位置合わせ機構２９及び紫外線ランプ３０が設けられている。そして位置合わせ／硬化室２８は、排気系３１によって所定の真空レベルに排気され得る。   FIG. 4 schematically shows an embodiment of an apparatus used for manufacturing an FED display panel according to the present invention. Reference numeral 21 denotes a preparation / removal chamber, to which an exhaust system 22 for exhausting the chamber to a predetermined degree of vacuum is connected. Has been. The preparation / removal chamber 21 is connected to a transfer chamber 24 via a gate valve 23, and the transfer chamber 24 can be exhausted to a predetermined vacuum level by an exhaust system 25. A transfer robot arm 26 is arranged in the transfer chamber 24. The transfer chamber 24 is connected to an alignment / curing chamber 28 via a gate valve 27, and an alignment mechanism 29 and an ultraviolet lamp 30 are provided in the alignment / curing chamber 28. The alignment / curing chamber 28 can then be evacuated to a predetermined vacuum level by the exhaust system 31.

また、搬送室２４はゲートバルブ３２を介して塗布室３３に接続され、この塗布室３３内にはＸＹステージ３４及び樹脂ディスペンサ３５が設けられ、そして塗布室３３内は真空排気系３６により所定の真空レベルに排気され得る。   The transfer chamber 24 is connected to a coating chamber 33 through a gate valve 32, and an XY stage 34 and a resin dispenser 35 are provided in the coating chamber 33. The inside of the coating chamber 33 is predetermined by a vacuum exhaust system 36. It can be evacuated to a vacuum level.

このように構成した装置を用いてＦＥＤパネルを製作する方法について説明する。部材としては、カーボンナノチューブをエミッタとして用いたカソード基板３７（ＣＮＴ／Ｃｒ電極／ガラス構造）、蛍光体／ＩＴＯ 電極／ガラスで構成されるアノード基板（図示していない）、ガラススペーサー３８（厚さ１ｍｍ）を用いた。   A method of manufacturing an FED panel using the apparatus configured as described above will be described. The members include a cathode substrate 37 (CNT / Cr electrode / glass structure) using carbon nanotubes as an emitter, an anode substrate (not shown) made of phosphor / ITO electrode / glass, and a glass spacer 38 (thickness). 1 mm) was used.

まず、カソード基板３７とガラススペーサー３８を位置合わせて重ね合わせ、仕込み／取り出し室２１にセットして排気系２２により排気する。このカソード基板３７とガラススペーサー３７を、ゲートバルブ２３を開いて搬送室２４に入れ、搬送室２４のロボットアーム２６を用いてゲートバルブ３２を介して塗布室３３のＸＹロボットステージ３４に搬送する。塗布室３３内でカソード基板３７の周縁部に樹脂ディスペンサ３５で紫外線硬化樹脂３９（積水化学社製 紫外線速硬化型樹脂Ａ−７０４）を塗布する。このとき、図５に示すように、ガラススペーサー３８の外側にかかるように紫外線硬化樹脂３９を塗布する。   First, the cathode substrate 37 and the glass spacer 38 are aligned and overlapped, set in the preparation / removal chamber 21, and exhausted by the exhaust system 22. The cathode substrate 37 and the glass spacer 37 are opened into the transfer chamber 24 by opening the gate valve 23, and transferred to the XY robot stage 34 in the coating chamber 33 through the gate valve 32 using the robot arm 26 in the transfer chamber 24. In the coating chamber 33, an ultraviolet curable resin 39 (UV quick-curable resin A-704 manufactured by Sekisui Chemical Co., Ltd.) is applied to the peripheral edge of the cathode substrate 37 by the resin dispenser 35. At this time, as shown in FIG. 5, an ultraviolet curable resin 39 is applied so as to cover the outside of the glass spacer 38.

その後、こうして紫外線硬化樹脂３９を塗布したカソード基板３７を、搬送室２４のロボットアーム２６により、位置合わせ／硬化室２８に搬入し、位置合わせ機構２９を構成している位置合わせステージにセットする。   Thereafter, the cathode substrate 37 thus coated with the ultraviolet curable resin 39 is carried into the alignment / curing chamber 28 by the robot arm 26 of the transfer chamber 24 and set on the alignment stage constituting the alignment mechanism 29.

次に、図示していないアノード基板を仕込み／取り出し室２１にセットし、これを、搬送室２４のロボットアーム２６により、位置合わせ／硬化室２８に搬入し、セットされているカソード基板３７上に位置合わせした後、排気系３１を作動して圧力が１０−５Ｐａオーダーとなるまで位置合わせ／硬化室２８内を排気し、ガラススペーサー３８／カソード基板３７上に乗せる。 Next, an anode substrate (not shown) is set in the preparation / removal chamber 21, and this is loaded into the alignment / curing chamber 28 by the robot arm 26 in the transfer chamber 24, and placed on the set cathode substrate 37. After the alignment, the exhaust system 31 is operated to evacuate the alignment / curing chamber 28 until the pressure reaches the order of 10 −5 Pa, and is placed on the glass spacer 38 / cathode substrate 37.

次に、位置合わせ／硬化室２８内に設置された紫外線ランプ３０を構成している高圧水銀ランプ（主波長３５２ｎｍ）で紫外線を重ね合わせた基板に１分間照射する。その後、搬送室２４のロボットアーム２６を用いて、仕込み／取り出し室２１に搬送してから取り出す。   Next, the high-pressure mercury lamp (main wavelength 352 nm) constituting the ultraviolet lamp 30 installed in the alignment / curing chamber 28 is irradiated for 1 minute on the substrate on which the ultraviolet rays are superimposed. Thereafter, the robot arm 26 in the transfer chamber 24 is used to transfer to the preparation / removal chamber 21 and take out.

続いてのバリア層の形成工程については図３に示すような塗布用シリンジを用いて行う。すなわち外周の追加封着剤の塗布は、リボンヒーターを巻いたガラス製の塗布用シリンジにインジウム片を入れ１８０℃まで加熱する。溶解したインジウムをカソード基板３７とアノード基板の間でスペーサー３８の外周部に塗布して放冷する。こうしてバリア層が形成される。   The subsequent barrier layer forming step is performed using a coating syringe as shown in FIG. In other words, the outer peripheral additional sealing agent is applied by placing indium pieces in a glass application syringe wrapped with a ribbon heater and heating to 180 ° C. The dissolved indium is applied between the cathode substrate 37 and the anode substrate on the outer periphery of the spacer 38 and allowed to cool. A barrier layer is thus formed.

１段階目の紫外線硬化樹脂３９のみを塗布し硬化したものと、２段階目の外周部へのインジウム塗布を行ったそれぞれのＦＥＤ基板において、電源を用いてカソード電極３６とアノードの間に３ｋＶの電圧をかけた時に生じる蛍光体発光の輝度を分光器で測定した。表１に０時間のときの輝度で規格化したときの２４時間後、７２時間後の輝度割合を示す。紫外線硬化樹脂のみの封着では７２時間後には点灯しなかった。一方、本発明の封着方法では７２時間後でも９０％以上の輝度を保つことができている。本発明の方法でも７２時間で約９％の輝度劣化が見られているが、これは簡易パネルを作製したため蛍光体の塗布条件も最適でない可能性があり、封着性能に関わる劣化でない可能性も考慮する必要がある。封着部を通して水蒸気の拡散に関して拡散時間は拡散距離（樹脂の塗り幅）の２乗に比例するので、例えば、樹脂塗布前に十分に脱ガスした樹脂を１mm幅で塗布しＵＶ硬化した後、脱ガスした樹脂を３０mmで塗布しＵＶ硬化すると外壁に到達した水蒸気がパネル内に混入するのを約１０００倍遅らせることができる。
〔表１〕
規格化発光輝度（％）
基板形態 初期（０時間） ２４時間経過後 ７２時間経過後
バリア層なし １００ ６５ 発光せず
バリア層あり １００ ９６ ９１ In each FED substrate in which only the first-stage ultraviolet curable resin 39 is applied and cured and in which the second-stage outer periphery is coated with indium, 3 kV is applied between the cathode electrode 36 and the anode using a power source. The luminance of the phosphor emission generated when voltage was applied was measured with a spectroscope. Table 1 shows the luminance ratio after 24 hours and after 72 hours when normalized with the luminance at 0 hour. In the case of sealing only with an ultraviolet curable resin, it did not light up after 72 hours. On the other hand, the sealing method of the present invention can maintain a luminance of 90% or more even after 72 hours. Even with the method of the present invention, luminance degradation of about 9% was observed in 72 hours. However, because a simple panel was produced, the phosphor coating conditions may not be optimal, and there may be no degradation related to sealing performance. It is also necessary to consider. Since the diffusion time with respect to the diffusion of water vapor through the sealing portion is proportional to the square of the diffusion distance (resin coating width), for example, after applying a resin that has been sufficiently degassed before application of the resin to a width of 1 mm, When the degassed resin is applied at 30 mm and UV-cured, the water vapor reaching the outer wall can be delayed by about 1000 times in the panel.
[Table 1]
Normalized emission brightness (%)
Substrate form Initial (0 hours) After 24 hours 72 hours have passed No barrier layer 100 65 No light emission and barrier layer 100 96 91

図示実施の形態では、封着部の大気側に水蒸気の透過を防止するバリア層を形成しているが、代わりに封着部の真空側すなわち内側にバリア層を形成することも可能である。   In the illustrated embodiment, a barrier layer that prevents permeation of water vapor is formed on the atmosphere side of the sealing portion, but it is also possible to form a barrier layer on the vacuum side of the sealing portion, that is, on the inside.

１：真空チャンバ
２：紫外線ランプ
３：開閉バルブ
４：開閉バルブ
５：真空ポンプ
６：開閉バルブ
７：ガス源
１０：前面板
１１：背面板
１２：紫外線硬化樹脂
１３：塗布用シリンジ
１４：追加封着剤
２１：仕込み／取り出し室
２２：排気系
２３：ゲートバルブ
２４：搬送室
２５：排気系
２６：搬送ロボットアーム
２７：ゲートバルブ
２８：位置合わせ／硬化室
２９：位置合わせ機構
３０：紫外線ランプ
３１：排気系
３２：ゲートバルブ
３３：塗布室
３４：ＸＹステージ
３５：樹脂ディスペンサ
３６：真空排気系
３７：カソード基板
３８：ガラススペーサー
３９：紫外線硬化樹脂 1: Vacuum chamber 2: UV lamp 3: Open / close valve 4: Open / close valve 5: Vacuum pump 6: Open / close valve 7: Gas source 10: Front plate 11: Back plate 12: UV curable resin 13: Syringe for application 14: Additional sealing Adhesive 21: Preparation / removal chamber 22: Exhaust system 23: Gate valve 24: Transfer chamber 25: Exhaust system 26: Transfer robot arm 27: Gate valve 28: Positioning / curing chamber 29: Positioning mechanism 30: Ultraviolet lamp 31 : Exhaust system 32: Gate valve 33: Coating chamber 34: XY stage 35: Resin dispenser 36: Vacuum exhaust system 37: Cathode substrate 38: Glass spacer 39: UV curable resin

このように構成した装置を用いて本発明による表示パネルの製造について説明する。
真空チャンバ１内には図示していない搬送機構によって前面板１０及び背面板１１が導入される。背面板１１には図示したようにその周縁部に沿って紫外線硬化樹脂１２が予め塗布される。次に、開閉バルブ３及び排気系の開閉バルブ４を開き、真空ポンプ５によって真空チャンバ１内を排気する。 Thus constituted apparatus for manufacturing a display panel that by the present invention with be described.
A front plate 10 and a back plate 11 are introduced into the vacuum chamber 1 by a transport mechanism (not shown). As illustrated, the back plate 11 is preliminarily coated with an ultraviolet curable resin 12 along its peripheral edge. Next, the open / close valve 3 and the exhaust system open / close valve 4 are opened, and the vacuum chamber 1 is evacuated by the vacuum pump 5.

Claims (4)

対向する２枚の基板によって構成される基板間周縁部をシール部によって封着し、その内部空間が減圧または不活性ガス雰囲気に維持された表示パネルにおいて、
シール部を硬化性樹脂で形成し、シール部の外側に、低融点金属又は低融点合金から成るバリア層を設けたことを特徴とする表示パネル。 In a display panel in which a peripheral edge portion between substrates constituted by two opposing substrates is sealed by a seal portion, and the internal space is maintained in a reduced pressure or inert gas atmosphere,
A display panel, wherein a seal portion is formed of a curable resin, and a barrier layer made of a low melting point metal or a low melting point alloy is provided outside the seal portion. 前記バリア層を成す低融点金属がＧａ、Ｉｎ単体金属から構成され、また前記バリア層を成す低融点合金がＳｎ及びＰｂを含む合金又はＢｉ、Ｃｄ、Ｉｎの少なくとも一つを含む合金又はＳｎ及びＺｎを含む合金から構成されることを特徴とする請求項１記載の表示パネル。   The low melting point metal forming the barrier layer is composed of Ga, In single metal, and the low melting point alloy forming the barrier layer is an alloy containing Sn and Pb or an alloy containing at least one of Bi, Cd, In, or Sn and The display panel according to claim 1, wherein the display panel is made of an alloy containing Zn. 前記シール部を成す硬化性樹脂が光重合性オリゴマーと光重合性モノマーと光重合開始剤とで構成されていることを特徴とする請求項１又は２のいずれか一項記載の表示パネル。   3. The display panel according to claim 1, wherein the curable resin forming the seal portion is composed of a photopolymerizable oligomer, a photopolymerizable monomer, and a photopolymerization initiator. 対向する２枚の基板によって構成される基板間周縁部をシール部によって封着し、その内部空間が減圧または不活性ガス雰囲気に維持された表示パネルの製造法において、
シール部を硬化性樹脂で形成し、該シール部によって基板間周縁部を封着した後に、該シール部の外側を低融点金属又は低融点合金から成るバリア層にて被覆することを特徴とする表示パネルの製造方法。 In a method for manufacturing a display panel in which a peripheral part between substrates constituted by two opposing substrates is sealed by a seal part, and the internal space is maintained in a reduced pressure or inert gas atmosphere,
The seal portion is formed of a curable resin, and the peripheral portion between the substrates is sealed by the seal portion, and then the outside of the seal portion is covered with a barrier layer made of a low melting point metal or a low melting point alloy. Manufacturing method of display panel.
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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002182585A (en) * 2000-12-12 2002-06-26 Toshiba Corp Image display device and method for manufacturing the same
JP2002338900A (en) * 2001-05-11 2002-11-27 Shin Etsu Polymer Co Ltd Ultraviolet-curable adhesive, bonding method and molded article to be produced therefrom
WO2005091325A1 (en) * 2004-03-18 2005-09-29 Asahi Glass Company, Limited Electric field emission type image display unit and production method therefor
WO2006019032A1 (en) * 2004-08-17 2006-02-23 Matsushita Electric Industrial Co., Ltd. Plasma display panel and method for manufacturing same

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002182585A (en) * 2000-12-12 2002-06-26 Toshiba Corp Image display device and method for manufacturing the same
JP2002338900A (en) * 2001-05-11 2002-11-27 Shin Etsu Polymer Co Ltd Ultraviolet-curable adhesive, bonding method and molded article to be produced therefrom
WO2005091325A1 (en) * 2004-03-18 2005-09-29 Asahi Glass Company, Limited Electric field emission type image display unit and production method therefor
WO2006019032A1 (en) * 2004-08-17 2006-02-23 Matsushita Electric Industrial Co., Ltd. Plasma display panel and method for manufacturing same

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