JP2012019209A - 半径方向位置ずれの補償を含む分子接合による貼り合わせ方法 - Google Patents
半径方向位置ずれの補償を含む分子接合による貼り合わせ方法 Download PDFInfo
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Abstract
【解決手段】第1のウェーハ100及び第2のウェーハ200間に接合波(Bonding wave)の伝播を起こさせるために、第1のウェーハ100及び第2のウェーハ0200を接触させる少なくとも1つのステップを含む。接触させるステップ中に、予め定められた貼り合せ曲率(KB)が、初期半径方向位置ずれの関数として第1のウェーハ100及び第2のウェーハ200の少なくとも1枚に課される。
【選択図】図5D
Description
− 補償されるべき第1及び第2のウェーハ間の初期半径方向位置ずれを測定するステップと、
− 貼り合せ前に各ウェーハの曲率を測定するステップと、
− 第1及び第2のウェーハ間の初期半径方向位置ずれに対する補償半径方向位置ずれを決定するステップと、
− 第1及び第2のウェーハ間の補償半径方向位置ずれを生成することができる貼り合せ後曲率を計算するステップと、
− 計算された貼り合せ後曲率の関数として予め定められた貼り合せ曲率を計算するステップと、
を含む。
− 第1の保持支持具および第2の保持支持具をそれぞれ使用して、第1のウェーハおよび第2のウェーハを互いに向かい合っている状態で保持するステップであって、第1の支持具が、予め定められた貼り合せ曲率を第1のウェーハに課す、ステップと、
− 第1及び第2のウェーハ間に接合波の伝播を起こさせるために、第1及び第2のウェーハを接触させるステップと、
− 第2のウェーハを、第1のウェーハと接触する前に、または接触している間に第2の保持支持具から解放するステップであって、その結果、第2のウェーハが、接合波の伝播中に第1のウェーハに課される貼り合せ曲率に適応する、ステップと、
を含む。
この式は、非特許文献1の文献中に与えられた式(12)に基づいて決定された。
ここで、Rは、ウェーハの中心と半径方向位置ずれの測定点の間の距離であり、εは、第1のウェーハ50(上)の表面に加えられる歪である。
ここで、hは、第1のウェーハの厚さである。
半径方向位置ずれDRは、貼り合せ後曲率KFの関数であることが分かる。
式(1)は、貼り合せ後曲率KFが、2枚のウェーハの初期曲率K1およびK2と貼り合せ曲率KBの関数として決定されることを示している。曲率K1およびK2は、2枚のウェーハの固有の曲率に対応するので、曲率KBだけが、貼り合せ後曲率KFの値を調節することを可能にする可変パラメータを示している。
本発明の実施形態による半径方向位置ずれの補償を含む貼り合せ方法を使用して、第1のウェーハ100上に形成された微小構成部品の層を第2のウェーハ200に転写することによる3次元構造の例示の製造が、これから、図5Aから5Gおよび6を参照して説明される。ウェーハは、特に、150mm、200mm、および300mmの直径を有することがある。
ここで、Dは、曲げられるウェーハの直径である。
Claims (15)
- 分子接合によって第1のウェーハ(100)を第2のウェーハ(200)に貼り合わせる方法であって、前記第1および第2のウェーハは、前記第1および第2のウェーハ間に初期半径方向位置ずれ(DR)を有し、前記方法は、前記第1および第2のウェーハ間に接合波(Bonding wave)の伝播を起こさせるために、前記第1および第2のウェーハ(100、200)を接触させるステップを少なくとも含む方法であって、
前記接触させるステップ中に、予め定められた貼り合せ曲率(KB)が、前記初期半径方向位置ずれ(DR)の関数として前記第1および第2のウェーハの少なくとも1枚に課されることを特徴とする方法。 - 前記第2のウェーハ(200)は、前記接合波の伝播中に前記第1のウェーハ(100)に課される前記予め定められた貼り合せ曲率(KB)に自由に適応することができることを特徴とする請求項1に記載の方法。
- 前記第1および第2のウェーハ(100、200)は、直径300mmのシリコンの円形ウェーハであり、各々微小構成部品を備えることを特徴とする請求項1または2に記載の方法。
- 前記第1および第2ウェーハ(100、200)の貼り合せ前に、
補償されるべき前記第1および第2のウェーハ間の初期半径方向位置ずれ(DR)を測定するステップと、
貼り合せ前に第1および第2ウェーハ(100、200)の曲率(K1、K2)を測定するステップと、
前記第1および第2のウェーハ(100、200)間の前記初期半径方向位置ずれ(DR)に対する補償半径方向位置ずれ(DRc)を決定するステップと、
前記第1および第2のウェーハ間の前記補償半径方向位置ずれ(DRc)を生成することができる貼り合せ後曲率(KFc)を計算するステップと、
前記計算された貼り合せ後曲率(KFc)の関数として前記予め定められた貼り合せ曲率(KC)を計算するステップと
を含むことを特徴とする請求項1から3のいずれか1項に記載の方法。 - 前記貼り合せ後曲率は、次の式を使用して計算され、
KFc=DRc/(h.R)
当該式において、KFcは前記貼り合せ後曲率であり、DRcは前記補償半径方向位置ずれであり、hは前記第1のウェーハの前記厚さであり、Rは前記第1のウェーハの中心から前記半径方向位置ずれの測定点までの距離であることを特徴とする請求項4に記載の方法。 - 前記予め定められた貼り合せ曲率は、次の式を使用して計算され、
KB=(8KFc−(K1+K2))/6
当該式において、KBは前記予め定められた貼り合せ曲率であり、K1は前記第1のウェーハの前記初期曲率であり、K2は前記第2のウェーハの初期曲率であり、KFcは前記貼り合せ後曲率であることを特徴とする請求項4または5に記載の方法。 - 第1の保持支持具(310)および第2の保持支持具(320)をそれぞれ使用して、前記第1のウェーハ(100)および前記第2のウェーハ(200)を互いに向かい合っている状態で保持するステップであって、前記第1の支持具が、前記予め定められた貼り合せ曲率を前記第1のウェーハに課す、ステップと、
前記第1および第2のウェーハ間に接合波(Bonding wave)の伝播を起こさせるために、前記第1および第2のウェーハ(100、200)を接触させるステップと、
前記第2のウェーハ(200)を、前記第1のウェーハ(100)と接触する前にまたは接触している間に、前記第2の保持支持具(320)から解放するステップであって、その結果、前記第2のウェーハが、前記接合波の前記伝播中に前記第1のウェーハに課された貼り合せ曲率に適応する、ステップと
を含むことを特徴とする請求項1から6のいずれか1項に記載の方法。 - 前記予め定められた貼り合せ曲率(Kc)は、前記第1の保持支持具に取り付けられたジャッキ(312)を動かすことによって、前記第1のウェーハ(100)に課されることを特徴とする請求項7に記載の方法。
- 前記予め定められた貼り合せ曲率は、前記第1のウェーハ(100)と前記第1の保持支持具(310)の間に置かれた膜によって、前記第1のウェーハ(100)に課され、前記膜は、前記予め定められた貼り合せ曲率に対応する曲率を有することを特徴とする請求項7に記載の方法。
- 前記予め定められた貼り合せ曲率は、前記第1の保持支持具(310)によって、前記第1のウェーハ(100)に課され、前記第1の保持支持具は、前記予め定められた貼り合せ曲率に対応する曲率を有することを特徴とする請求項7に記載の方法。
- 前記第1及び第2のウェーハ(100、200)は、各々、それぞれのその貼り合せ面に微小構成部品(110、210)を備え、前記第1及び第2のウェーハの一方(100)の前記微小構成部品(110)の少なくともいくつかは、前記他方(200)のウェーハの前記微小構成部品(210)の少なくともいくつかと位置合せしようとすることを特徴とする請求項1から10のいずれか1項に記載の方法。
- 分子接合によって第1のウェーハ(100)を第2のウェーハ(200)に貼り合わせるための装置(300)であって、前記第1及び第2のウェーハは、前記第1及び第2のウェーハ間に初期半径方向位置ずれ(DR)を有し、前記装置は、前記第1のウェーハ(100)および前記第2のウェーハ(200)をそれぞれ保持する第1の保持支持具(310)および第2の保持支持具(320)を備える装置であって、
前記第1の保持支持具は、予め定められた貼り合せ曲率(Kc)を前記初期半径方向位置ずれの関数として前記第1のウェーハに課すための手段を備え、
前記装置は、前記第2のウェーハ(200)を、前記第1のウェーハ(100)と接触する前または接触している間に、前記第2の保持支持具(320)から解放するために前記第2の支持具を制御し、その結果、前記第2のウェーハ(200)は、接合波の前記伝播中に前記第1のウェーハ(100)に課される前記貼り合せ曲率に適応することを特徴とする装置。 - 前記予め定められた貼り合せ曲率(Kc)を前記初期半径方向位置ずれの関数として、または、前記予め定められた貼り合せ曲率に対応する曲率半径を前記初期半径方向位置ずれ(DR)の関数として計算するための処理手段を備えることを特徴とする請求項12に記載の装置。
- 前記第1の保持支持具(310)は、前記予め定められた貼り合せ曲率(Kc)を前記第1のウェーハ(100)に課すことができるジャッキ(312)をさらに備え、前記ジャッキは、前記予め定められた貼り合せ曲率(Kc)に対応する曲率半径に従って駆動され、
前記装置は、前記第2のウェーハ(200)を、前記第1のウェーハ(100)と接触した後で、前記第2の保持支持具(320)から解放するために前記第2の支持具を制御し、その結果、前記第2のウェーハが(200)が、接合波の前記伝播中に前記第1のウェーハに課される前記貼り合せ曲率に適応することを特徴とする請求項13に記載の装置。 - 前記第1の保持支持具は、前記予め定められた貼り合せ曲率に対応する曲率を有すること、または、前記装置は、前記第1のウェーハ(100)と前記第1の保持支持具の間に置かれた膜をさらに備え、前記膜は、前記予め定められた貼り合せ曲率(Kc)に対応する曲率を有することを特徴とする請求項12に記載の装置。
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- 2011-04-28 SG SG2011029980A patent/SG177811A1/en unknown
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- 2011-05-11 CN CN201110126409.4A patent/CN102315149B/zh not_active Expired - Fee Related
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US11020952B2 (en) | 2013-05-29 | 2021-06-01 | Ev Group E. Thallner Gmbh | Device and method for bonding substrates |
US11697281B2 (en) | 2013-05-29 | 2023-07-11 | Ev Group E. Thallner Gmbh | Device and method for bonding substrates |
JP2016526299A (ja) * | 2013-05-29 | 2016-09-01 | エーファウ・グループ・エー・タルナー・ゲーエムベーハー | 基板をボンディングする装置および方法 |
US11059280B2 (en) | 2013-05-29 | 2021-07-13 | Ev Group E. Thallner Gmbh | Device and method for bonding substrates |
US11020951B2 (en) | 2013-05-29 | 2021-06-01 | Ev Group E. Thallner Gmbh | Device and method for bonding substrates |
US10279575B2 (en) | 2013-05-29 | 2019-05-07 | Ev Group E. Thallner Gmbh | Device and method for bonding substrates |
US11020950B2 (en) | 2013-05-29 | 2021-06-01 | Ev Group E. Thallner Gmbh | Device and method for bonding substrates |
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JP2020074369A (ja) * | 2014-12-10 | 2020-05-14 | 株式会社ニコン | 基板処理方法、基板処理システム、露光装置、露光方法、算出装置および算出方法 |
US10483212B2 (en) | 2014-12-10 | 2019-11-19 | Nikon Corporation | Apparatus for stacking substrates and method for the same |
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Also Published As
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US9818614B2 (en) | 2017-11-14 |
EP2405465A1 (fr) | 2012-01-11 |
US20130210171A1 (en) | 2013-08-15 |
US8475612B2 (en) | 2013-07-02 |
KR101217682B1 (ko) | 2012-12-31 |
KR20120004917A (ko) | 2012-01-13 |
TW201207914A (en) | 2012-02-16 |
US9123631B2 (en) | 2015-09-01 |
US20120006463A1 (en) | 2012-01-12 |
CN102315149B (zh) | 2015-11-25 |
FR2962594B1 (fr) | 2012-08-31 |
FR2962594A1 (fr) | 2012-01-13 |
JP5346063B2 (ja) | 2013-11-20 |
TWI426555B (zh) | 2014-02-11 |
US20150348933A1 (en) | 2015-12-03 |
SG177811A1 (en) | 2012-02-28 |
CN102315149A (zh) | 2012-01-11 |
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