FR2987166B1 - Procede de transfert d'une couche - Google Patents

Procede de transfert d'une couche

Info

Publication number
FR2987166B1
FR2987166B1 FR1200449A FR1200449A FR2987166B1 FR 2987166 B1 FR2987166 B1 FR 2987166B1 FR 1200449 A FR1200449 A FR 1200449A FR 1200449 A FR1200449 A FR 1200449A FR 2987166 B1 FR2987166 B1 FR 2987166B1
Authority
FR
France
Prior art keywords
transferring
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1200449A
Other languages
English (en)
Other versions
FR2987166A1 (fr
Inventor
Gweltaz Gaudin
Oleg Kononchuk
Ionut Radu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Soitec SA
Original Assignee
Soitec SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Soitec SA filed Critical Soitec SA
Priority to FR1200449A priority Critical patent/FR2987166B1/fr
Priority to PCT/IB2013/000128 priority patent/WO2013121260A1/fr
Priority to CN201380009581.9A priority patent/CN104170073B/zh
Priority to DE112013000985.4T priority patent/DE112013000985T5/de
Priority to US14/377,738 priority patent/US9548237B2/en
Publication of FR2987166A1 publication Critical patent/FR2987166A1/fr
Application granted granted Critical
Publication of FR2987166B1 publication Critical patent/FR2987166B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
    • H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
    • H01L21/76254—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques with separation/delamination along an ion implanted layer, e.g. Smart-cut, Unibond
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04—Interconnection of layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
    • B32B9/04—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising such particular substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00—Electrical equipment
    • B32B2457/14—Semiconductor wafers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Recrystallisation Techniques (AREA)
  • Micromachines (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
FR1200449A 2012-02-16 2012-02-16 Procede de transfert d'une couche Active FR2987166B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR1200449A FR2987166B1 (fr) 2012-02-16 2012-02-16 Procede de transfert d'une couche
PCT/IB2013/000128 WO2013121260A1 (fr) 2012-02-16 2013-01-28 Procédé de transfert d'une couche
CN201380009581.9A CN104170073B (zh) 2012-02-16 2013-01-28 用于转移层的方法
DE112013000985.4T DE112013000985T5 (de) 2012-02-16 2013-01-28 Verfahren zum Übertragen einer Schicht
US14/377,738 US9548237B2 (en) 2012-02-16 2013-01-28 Method for transferring a layer comprising a compressive stress layer and related structures

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1200449A FR2987166B1 (fr) 2012-02-16 2012-02-16 Procede de transfert d'une couche

Publications (2)

Publication Number Publication Date
FR2987166A1 FR2987166A1 (fr) 2013-08-23
FR2987166B1 true FR2987166B1 (fr) 2017-05-12

Family

ID=47716127

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1200449A Active FR2987166B1 (fr) 2012-02-16 2012-02-16 Procede de transfert d'une couche

Country Status (5)

Country Link
US (1) US9548237B2 (fr)
CN (1) CN104170073B (fr)
DE (1) DE112013000985T5 (fr)
FR (1) FR2987166B1 (fr)
WO (1) WO2013121260A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3032555B1 (fr) * 2015-02-10 2018-01-19 Soitec Procede de report d'une couche utile
FR3062398B1 (fr) * 2017-02-02 2021-07-30 Soitec Silicon On Insulator Procede de fabrication d'un substrat pour la croissance d'un film bidimensionnel de structure cristalline hexagonale
CN110491827B (zh) * 2019-08-13 2021-02-12 北京工业大学 一种半导体薄膜层的转移方法及复合晶圆的制备方法

Family Cites Families (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6033974A (en) 1997-05-12 2000-03-07 Silicon Genesis Corporation Method for controlled cleaving process
FR2777115B1 (fr) 1998-04-07 2001-07-13 Commissariat Energie Atomique Procede de traitement de substrats semi-conducteurs et structures obtenues par ce procede
FR2797713B1 (fr) 1999-08-20 2002-08-02 Soitec Silicon On Insulator Procede de traitement de substrats pour la microelectronique et substrats obtenus par ce procede
FR2797714B1 (fr) 1999-08-20 2001-10-26 Soitec Silicon On Insulator Procede de traitement de substrats pour la microelectronique et substrats obtenus par ce procede
US7074623B2 (en) * 2002-06-07 2006-07-11 Amberwave Systems Corporation Methods of forming strained-semiconductor-on-insulator finFET device structures
US20030227057A1 (en) * 2002-06-07 2003-12-11 Lochtefeld Anthony J. Strained-semiconductor-on-insulator device structures
US6953736B2 (en) * 2002-07-09 2005-10-11 S.O.I.Tec Silicon On Insulator Technologies S.A. Process for transferring a layer of strained semiconductor material
US6911379B2 (en) * 2003-03-05 2005-06-28 Taiwan Semiconductor Manufacturing Company, Ltd. Method of forming strained silicon on insulator substrate
US7202124B2 (en) * 2004-10-01 2007-04-10 Massachusetts Institute Of Technology Strained gettering layers for semiconductor processes
EP1835533B1 (fr) * 2006-03-14 2020-06-03 Soitec Méthode de fabrication de plaquettes composites et procédé de recyclage d'un substrat donneur usagé
CN101529578B (zh) 2006-10-27 2012-01-11 硅绝缘体技术有限公司 用于转移在具有空位团的基片中形成的薄层的改进方法
FR2910177B1 (fr) 2006-12-18 2009-04-03 Soitec Silicon On Insulator Couche tres fine enterree
JP5185284B2 (ja) 2006-12-26 2013-04-17 ソイテック 半導体オンインシュレータ構造体を製造する方法
KR101358361B1 (ko) 2006-12-26 2014-02-06 소이텍 절연체 상 반도체 구조물을 제조하는 방법
ATE518241T1 (de) 2007-01-24 2011-08-15 Soitec Silicon On Insulator Herstellungsverfahren für wafer aus silizium auf isolator und entsprechender wafer
EP1986229A1 (fr) 2007-04-27 2008-10-29 S.O.I.T.E.C. Silicon on Insulator Technologies Procédé de fabrication de galettes de matériau composé et galette de matériau composé correspondante
FR2926925B1 (fr) 2008-01-29 2010-06-25 Soitec Silicon On Insulator Procede de fabrication d'heterostructures
EP2161741B1 (fr) 2008-09-03 2014-06-11 Soitec Procédé de fabrication d'un semi-conducteur sur un substrat isolant doté d'une densité réduite de défauts SECCO
FR2936356B1 (fr) 2008-09-23 2010-10-22 Soitec Silicon On Insulator Procede de dissolution locale de la couche d'oxyde dans une structure de type semi-conducteur sur isolant
FR2937797B1 (fr) 2008-10-28 2010-12-24 S O I Tec Silicon On Insulator Tech Procede de fabrication et de traitement d'une structure de type semi-conducteur sur isolant, permettant de deplacer des dislocations, et structure correspondante
FR2938119B1 (fr) 2008-10-30 2011-04-22 Soitec Silicon On Insulator Procede de detachement de couches semi-conductrices a basse temperature
FR2938202B1 (fr) 2008-11-07 2010-12-31 Soitec Silicon On Insulator Traitement de surface pour adhesion moleculaire
FR2953328B1 (fr) 2009-12-01 2012-03-30 S O I Tec Silicon On Insulator Tech Heterostructure pour composants electroniques de puissance, composants optoelectroniques ou photovoltaiques
FR2962594B1 (fr) 2010-07-07 2012-08-31 Soitec Silicon On Insulator Procede de collage par adhesion moleculaire avec compensation de desalignement radial
US8481406B2 (en) 2010-07-15 2013-07-09 Soitec Methods of forming bonded semiconductor structures
US8461017B2 (en) 2010-07-19 2013-06-11 Soitec Methods of forming bonded semiconductor structures using a temporary carrier having a weakened ion implant region for subsequent separation along the weakened region
FR2965398B1 (fr) 2010-09-23 2012-10-12 Soitec Silicon On Insulator Procédé de collage par adhésion moléculaire avec réduction de desalignement de type overlay
FR2973159B1 (fr) 2011-03-22 2013-04-19 Soitec Silicon On Insulator Procede de fabrication d'un substrat de base
US8501537B2 (en) 2011-03-31 2013-08-06 Soitec Methods for bonding semiconductor structures involving annealing processes, and bonded semiconductor structures formed using such methods
US8716105B2 (en) 2011-03-31 2014-05-06 Soitec Methods for bonding semiconductor structures involving annealing processes, and bonded semiconductor structures and intermediate structures formed using such methods
FR2978603B1 (fr) 2011-07-28 2013-08-23 Soitec Silicon On Insulator Procede de transfert d'une couche semi-conductrice monocristalline sur un substrat support
US8673733B2 (en) 2011-09-27 2014-03-18 Soitec Methods of transferring layers of material in 3D integration processes and related structures and devices
US8841742B2 (en) 2011-09-27 2014-09-23 Soitec Low temperature layer transfer process using donor structure with material in recesses in transfer layer, semiconductor structures fabricated using such methods
US9136134B2 (en) 2012-02-22 2015-09-15 Soitec Methods of providing thin layers of crystalline semiconductor material, and related structures and devices

Also Published As

Publication number Publication date
DE112013000985T5 (de) 2014-11-27
CN104170073A (zh) 2014-11-26
US20150364364A1 (en) 2015-12-17
CN104170073B (zh) 2017-12-08
US9548237B2 (en) 2017-01-17
FR2987166A1 (fr) 2013-08-23
WO2013121260A1 (fr) 2013-08-22

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