JP2011202971A - 分析装置 - Google Patents
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Abstract
【解決手段】分析装置1は、発光部10と、透過型の分光フィルタ22と、光検出器23と、分析部31とを備える。分光フィルタ22は、光透過性の基板と、基板の一方の面上に第1の金属材料で形成された複数の凸部と、第1の金属材料よりも屈折率の高い第2の金属材料によって、凸部と共に一方の面を覆うように形成された金属膜とを備える。凸部は、凸部間に存在する金属膜が回折格子となり、凸部が導波路となるように配置される。回折格子の格子周期、凸部の高さ、金属膜の厚みは、分光フィルタの透過光の波長が部分毎に変化するよう、部分毎に異なる値に設定される。光検出器23は、各受光素子24が、分光フィルタの透過光を受光するように配置される。分析部31は、受光素子24の出力信号から対象物40のスペクトルを取得する。
【選択図】図1
Description
以下、本発明の実施の形態1における分析装置について、図1〜図5を参照しながら説明する。最初に、図1及び図2を用いて、本実施の形態1における分析装置1の構成について説明する。図1は、本発明の実施の形態1における分析装置の概略構成を示す構成図である。図2は、図1に示した分光フィルタの構成を部分的に拡大して示す断面図である。
D3k=D2k−D1k
V2k=V1k−D1k
Vk=D3k−V2k
Αλ=−log10(V2j/D3j)
次に、本発明の実施の形態2における分析装置について、図6及び図7を参照しながら説明する。最初に、図6を用いて、本実施の形態2における分析装置2の構成について説明する。図6は、本発明の実施の形態2における分析装置の概略構成を示す構成図である。
B2k=B1k−E1k
B3k=B0k−E0k
Bk=(B2k/G)/B3k
Αλ=−log10(Bj/α)
次に本発明の実施の形態2における分析装置について、図8を参照しながら説明する。図8は、本発明の実施の形態3における分析装置の概略構成を示す構成図である。図8に示すように、本実施の形態3において、分析装置3は、発光部12及び駆動部35を除き、図6に示した実施の形態2における分析装置2と同様に構成されている。以下においては、実施の形態2との相違点を中心に説明する。
2 分析装置(実施の形態2)
3 分析装置(実施の形態3)
10 発光部
11 光源
12 発光部
20 メインセンサユニット
21 レンズ
22 分光フィルタ
22a 基板
22b 凸部
22c 金属膜
23 光検出器
24 受光素子
30 制御装置
31 分析部
32 記憶部
33 駆動部
34 分析部
35 駆動部
40 対象物
50 リファレンスセンサユニット
51 レンズ
52 分光フィルタ
53 光検出器
54 受光素子
60 ビームスプリッタ
61 減光フィルタ
Claims (9)
- 対象物に含まれる成分を分析する分析装置であって、
前記対象物に光を照射する発光部と、透過型の分光フィルタと、複数の受光素子を有する光検出器と、分析部とを備え、
前記分光フィルタは、前記対象物で反射された前記光又は前記対象物を透過した前記光の光路上に配置され、且つ、光透過性を有する基板と、前記基板の一方の面上に第1の金属材料で形成された複数の凸部と、前記第1の金属材料よりも屈折率の高い第2の金属材料によって、前記複数の凸部と共に前記基板の前記一方の面を覆うように形成された金属膜とを備え、
前記複数の凸部は、隣り合う凸部間に存在する前記金属膜が回折格子となり、前記凸部が導波路となるように配置され、
前記回折格子の格子周期、前記凸部の高さ、及び前記金属膜の厚みの少なくとも一つは、前記分光フィルタを透過する光の波長が部分毎に変化するように、前記部分毎に異なる値に設定され、
前記光検出器は、前記複数の受光素子それぞれが、前記分光フィルタを透過する光を受光するように配置され、
前記分析部は、前記複数の受光素子それぞれの出力信号から、前記対象物のスペクトルを取得する、ことを特徴とする分析装置。 - 前記分析部が、取得した前記スペクトルから、前記対象物に含まれる成分を同定し、そして、予め用意されている複数の検量線の中から、同定された前記成分に対応する検量線を選択し、選択した前記検量線を用いて、前記成分の含有量を算出する、請求項1に記載の分析装置。
- 前記発光部が、前記対象物に対して、間欠的に光を照射する、請求項1または2に記載の分析装置。
- 前記発光部が、複数の発光素子を備え、且つ、1又は2以上の前記発光素子毎に交互に発光させて、前記対象物に対して、連続的に光を照射する、請求項1または2に記載の分析装置。
- 当該分析装置が、更に、前記発光部が照射した光を分割するビームスプリッタと、前記ビームスプリッタで分割された光を受光してリファレンス信号を出力するリファレンスセンサユニットとを備え、
前記ビームスプリッタは、前記発光部と前記対象物との間に配置され、
前記リファレンスセンサユニットは、減衰フィルタと、前記分光フィルタと同一の第2の分光フィルタと、前記光検出器と同一の第2の光検出器とを備え、
前記減衰フィルタ、前記第2の分光フィルタ、及び前記第2の光検出器は、前記ビームスプリッタで分割された光が、前記減衰フィルタ、前記第2の分光フィルタ及び前記第2の光検出器に順に入射するように配置され、
前記第2の光検出器の複数の受光素子は、入射した光に応じた信号を出力し、
前記分析部が、前記第2の光検出器からの信号に基づいて、前記光検出器の前記複数の受光素子それぞれの出力信号を補正する、請求項1から4のいずれかに記載の分析装置。 - 前記回折格子の格子周期が、前記部分毎に、当該部分において透過することが求められている光の波長よりも短くなるように形成されている、請求項1から5のいずれかに記載の分析装置。
- 前記基板の形成材料が酸化シリコンを含み、前記第1の金属材料が金(Au)を含み、前記第2の金属材料が酸化チタンを含む、請求項1から6のいずれかに記載の分析装置。
- 前記複数の凸部が、角柱状に形成され、且つ、マトリクス状に配置されている、請求項1から7のいずれかに記載の分析装置。
- 前記光検出器が、複数の受光素子がマトリクス状に形成された半導体基板を有する固体撮像装置である、請求項1〜8のいずれかに記載の分析装置。
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JP2019132605A (ja) * | 2018-01-29 | 2019-08-08 | 株式会社Jvcケンウッド | 分光器 |
US10393581B2 (en) | 2018-01-29 | 2019-08-27 | JVC Kenwood Corporation | Spectroscope |
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KR20130051918A (ko) | 2013-05-21 |
US9279720B2 (en) | 2016-03-08 |
CN102812346B (zh) | 2015-07-29 |
US20130003054A1 (en) | 2013-01-03 |
EP2551661A1 (en) | 2013-01-30 |
CN102812346A (zh) | 2012-12-05 |
EP2551661B1 (en) | 2018-04-11 |
EP2551661A4 (en) | 2015-03-18 |
WO2011118309A1 (ja) | 2011-09-29 |
JP4812141B2 (ja) | 2011-11-09 |
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