JP2011116609A - Glass plate scribing method and device - Google Patents

Glass plate scribing method and device Download PDF

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JP2011116609A
JP2011116609A JP2009277647A JP2009277647A JP2011116609A JP 2011116609 A JP2011116609 A JP 2011116609A JP 2009277647 A JP2009277647 A JP 2009277647A JP 2009277647 A JP2009277647 A JP 2009277647A JP 2011116609 A JP2011116609 A JP 2011116609A
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glass plate
plate
suction
cutter
mounting surface
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Masahiro Kobayashi
正宏 小林
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Nippon Electric Glass Co Ltd
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Nippon Electric Glass Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide the glass plate scribing method and device capable of forming a cut line on a thin glass plate at high speed. <P>SOLUTION: The glass plate scribing device 1 includes: a sucking plate 7 having a placing surface 3 thereon and comprising a porous body having air holes through which air passes; a support 11 providing a wind belt 9 which connects to the sucking plate 7; a sucker 13 guiding a negative pressure to the wind belt 9; a cutter 17 capable of cutting in a glass plate 15; and a cut line-forming tool 19 for running the cutter 17. The porous body being a material of the sucking plate 7 is a porous metal produced by sintering aluminum powders. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

本発明は、電子部品等の材料となる薄いガラス板を切断するためのガラス板のスクライブ方法、及びスクライブ装置に関する。   The present invention relates to a glass plate scribing method and a scribing apparatus for cutting a thin glass plate that is a material for electronic components and the like.

ガラス板の表面にその上方からカッターを押し付け、水平方向にカッターを走行させることにより、ガラス板の厚みよりも浅い切筋（スクライブ線）をガラス板に形成する方法が、特許文献１に記されている。この後の工程として、ガラス板に厚み方向の剪断力が加えられると、ガラス板は切筋を境に切断される。   Patent Document 1 describes a method for forming a cutting line (scribe line) shallower than the thickness of the glass plate on the glass plate by pressing the cutter against the surface of the glass plate from above and running the cutter in the horizontal direction. ing. As a subsequent process, when a shearing force in the thickness direction is applied to the glass plate, the glass plate is cut at the cut line.

図２は、通風孔１０１が開放された載置面１０３を有する基台１０５に、ガラス板１０７を載せ、基台１０５の通風孔１０１を満たす空気を矢印ｖの向きに吸引することにより、ガラス板１０７を基台１０５に吸着させた例を示している。このような通風孔１０１による吸引は、比較的厚手のガラス板１０７を基台１０５に固定するのに役立つが、ガラス板１０７の厚みが２００μｍ以下であると、ガラス板１０７は大気圧により通風孔１０１に押し込まれる力を受けて凹形に変形し、その周囲が凸形に盛り上がる。図示のガラス板１０７は凹凸を誇張している。   FIG. 2 shows that a glass plate 107 is placed on a base 105 having a mounting surface 103 in which the ventilation holes 101 are opened, and air that fills the ventilation holes 101 of the base 105 is sucked in the direction of the arrow v, whereby glass An example in which the plate 107 is adsorbed to the base 105 is shown. Such suction by the ventilation hole 101 is useful for fixing the relatively thick glass plate 107 to the base 105. If the thickness of the glass plate 107 is 200 μm or less, the glass plate 107 is ventilated by atmospheric pressure. Upon receiving the force pushed into 101, it is deformed into a concave shape, and its periphery rises into a convex shape. The illustrated glass plate 107 exaggerates the unevenness.

上記の水平方向に走行するカッターは、ガラス板１０７の凹形の部分１０９を通過するとき、ガラス板１０７の表面から相対的に浮き上がるので、切筋が途切れることになる。カッターの走行する速度を減速すれば、カッターをガラス板１０７の凹凸に従わせる余裕が得られるためカッターの浮きを予防できるが、その分、切筋を形成する工程が遅延する。   When the cutter that travels in the horizontal direction passes through the concave portion 109 of the glass plate 107, the cutter floats relatively from the surface of the glass plate 107, so that the cut lines are interrupted. If the speed at which the cutter travels is reduced, it is possible to prevent the cutter from being lifted since a margin for allowing the cutter to follow the unevenness of the glass plate 107 is obtained, but the process of forming the cut line is delayed accordingly.

また、ガラス板１０７の凸形の部分１１１にカッターが切れ込むと、ガラス板１０７がカッターから受ける荷重が過大になり、ガラス板１０７にラテラルクラックが発生する。以上に述べた不具合のあるガラス板１０７に上記の剪断力を加えても、その切断を良好に行うことはできない。   Further, when the cutter cuts into the convex portion 111 of the glass plate 107, the load that the glass plate 107 receives from the cutter becomes excessive, and a lateral crack occurs in the glass plate 107. Even if the above-mentioned shearing force is applied to the glass plate 107 having the above-mentioned problems, the cutting cannot be performed satisfactorily.

基台１０５とガラス板１０７との間に、両者が互いに擦れるのを回避するためのプラスチック多孔質シートを介在することが、特許文献２，３に示されている。基台１０５は、ガラス板１０７がカッターから受ける荷重に耐える剛性を有するのに対して、多孔質シートは、自在に撓むことのできる材料である。また、基台１０５の材料は金属であるので、基台１０５の載置面１０３を研削する等して高い精度の平面に仕上げられるが、これに相当する精度で多孔質シートの厚みを一様にするのは困難である。   Patent Documents 2 and 3 show that a plastic porous sheet is interposed between the base 105 and the glass plate 107 to avoid rubbing them. The base 105 is rigid enough to withstand the load that the glass plate 107 receives from the cutter, whereas the porous sheet is a material that can be flexed freely. In addition, since the material of the base 105 is metal, it can be finished to a highly accurate plane by grinding the mounting surface 103 of the base 105 or the like, but the thickness of the porous sheet is made uniform with an equivalent accuracy. It is difficult to make.

このため、基台１０５にガラス板１０７を直に載せる場合に比較して、両者の間に多孔質シートを介在すると、ガラス板１０７が多孔質シートの形状に沿うことになり、ガラス板１０７の平面度は多孔質シートの厚みの精度に依存し低下する。また、多孔質シートの材料が合成樹脂であると、これが帯電するという問題がある。   For this reason, compared with the case where the glass plate 107 is placed directly on the base 105, when a porous sheet is interposed between the two, the glass plate 107 follows the shape of the porous sheet. The flatness decreases depending on the accuracy of the thickness of the porous sheet. Further, when the material of the porous sheet is a synthetic resin, there is a problem that it is charged.

２００９−１４３７７４号公報2009-143774 特開平８−１６９９７１号公報JP-A-8-169971 特開平９−２２９３５号公報Japanese Patent Laid-Open No. 9-22935

本発明は、上記の実情に鑑みて為されたものであり、薄いガラス板に高速で切筋を形成できるガラス板のスクライブ方法、及びスクライブ装置を提供することを目的とする。   The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a scribing method and scribing apparatus for a glass plate that can form a cut line on a thin glass plate at high speed.

本発明は、気孔を有する多孔質体から成り、載置面が形成された吸着プレートを準備する工程と、前記吸着プレートの載置面にガラス板を接触させる工程と、前記吸着プレートの気孔に負圧を導くことにより、前記吸着プレートにガラス板を吸引させる工程と、前記吸着プレートに吸引されたガラス板にカッターを押し付けながら前記カッターを走行させる工程と、を含むことを特徴とする。   The present invention includes a step of preparing a suction plate made of a porous body having pores and having a placement surface formed thereon, a step of bringing a glass plate into contact with the placement surface of the suction plate, and a pore of the suction plate. The method includes a step of sucking the glass plate by the suction plate by introducing a negative pressure, and a step of running the cutter while pressing the cutter against the glass plate sucked by the suction plate.

また、本発明は、前記多孔質体がアルミニウムを成分とする多孔質金属であることを特徴とする。   The present invention is characterized in that the porous body is a porous metal containing aluminum as a component.

また、本発明は、前記吸着プレートの載置面が前記ガラス板の片面の全域に密接することを特徴とする。   Further, the present invention is characterized in that the placement surface of the suction plate is in close contact with the entire area of one side of the glass plate.

また、本発明は、ガラス板の厚み方向の片面に密接する載置面を形成され、気孔を有する多孔質体から成る吸着プレートと、前記吸着プレートに接続した風道と、前記風道に負圧を導くことにより、前記吸着プレートの気孔にガラス板を吸引する吸引力を発生させる吸引手段と、前記吸着プレートの載置面に対向し、前記前記吸着プレートに吸引されたガラス板にその厚みよりも浅く切れ込むカッターと、前記カッターを走行させる切筋形成手段と、を備えることを特徴とする。   In addition, the present invention provides an adsorption plate formed of a porous body having a mounting surface that is in close contact with one surface in the thickness direction of the glass plate, an air passage connected to the adsorption plate, and an air passage that is negative to the air passage. A suction means for generating a suction force for sucking the glass plate into the pores of the suction plate by introducing pressure; and a thickness of the glass plate opposed to the placement surface of the suction plate and sucked by the suction plate And a cutting line forming means for running the cutter.

本発明に係るガラス板のスクライブ方法によれば、吸着プレートの気孔に負圧を導くことにより、吸着プレートにガラス板を吸引させ、吸着プレートの載置面にガラス板の下面を吸着させることができる。この状態で、ガラス板の形状は載置面に倣うため、ガラス板の平面度が高く保たれる。   According to the scribing method for a glass plate according to the present invention, by introducing a negative pressure into the pores of the suction plate, the suction plate can suck the glass plate and the lower surface of the glass plate can be sucked by the placement surface of the suction plate. it can. In this state, since the shape of the glass plate follows the placement surface, the flatness of the glass plate is kept high.

続いて、吸着プレートの載置面に対向するカッターを、吸着プレートに吸引されたガラス板にその厚みよりも浅く切れ込ませることにより、ガラス板に切筋を形成することができる。このように平面度を高く保たれたガラス板にカッターの切り込む深さ、及びカッターからガラス板の受ける荷重は、カッターが走行する過程で一定であり、しかも最適に保たれる。   Subsequently, a cutting line can be formed in the glass plate by causing the cutter facing the mounting surface of the suction plate to cut into the glass plate sucked by the suction plate to a depth smaller than its thickness. Thus, the depth at which the cutter cuts into the glass plate with high flatness and the load received by the glass plate from the cutter are constant during the course of the cutter and are optimally maintained.

従って、本発明に係るガラス板のスクライブ方法は、カッターの走行する速度を高く設定しても、切筋が途切れることはなく、又はラテラルクラックの発生を予防できるので、薄いガラス板に高速で切筋を形成することができる。また、本発明に係るスクライブ装置は、以上に述べた方法を実現し、当該方法と同様の効果を達成することができる。   Accordingly, the scribing method for a glass plate according to the present invention can cut a thin glass plate at a high speed because the cutting line will not be interrupted or lateral cracks can be prevented even if the cutter traveling speed is set high. Muscles can be formed. Moreover, the scribing apparatus according to the present invention can realize the method described above and achieve the same effect as the method.

更に、多孔質体がアルミニウムを成分とする多孔質金属である場合、吸着プレートの載置面を研削する等すれば高い精度の平面に仕上げられるので、ガラス板の形状を載置面に倣わせガラス板の平面度を向上させるのに有利である。また、多孔質金属は帯電することがないので、電子部品の材料となるガラス板から静電気を除去することができる。   Furthermore, when the porous body is a porous metal containing aluminum as the component, the surface of the suction plate can be finished to a highly accurate surface by grinding the surface, so that the shape of the glass plate can be made to follow the surface of the mounting. It is advantageous for improving the flatness of the glass plate. In addition, since the porous metal is not charged, static electricity can be removed from the glass plate as the material of the electronic component.

更に、吸着プレートの載置面がガラス板の片面の全域に密接する場合、吸着プレートがガラス板を吸引するときに、ガラス板が載置面から受ける反力をガラス板の全体に分散できる。このため、ガラス板を吸着プレートに吸着された状態で、ガラス板の平面度を高く維持することができる。   Furthermore, when the mounting surface of the suction plate is in close contact with the entire area of one side of the glass plate, the reaction force that the glass plate receives from the mounting surface when the suction plate sucks the glass plate can be dispersed throughout the glass plate. For this reason, the flatness of the glass plate can be kept high while the glass plate is adsorbed to the adsorption plate.

本発明の実施形態に係るスクライブ装置の使用例を示す断面図。Sectional drawing which shows the usage example of the scribing apparatus which concerns on embodiment of this invention. 従来例のスクライブ装置の使用例を示す断面図。Sectional drawing which shows the usage example of the scribing apparatus of a prior art example.

本発明の実施形態に係るスクライブ装置について図１に基づき説明する。スクライブ装置１は、載置面３を形成され空気が通り抜ける気孔を有する多孔質体から成る吸着プレート７と、吸着プレート７に接続した風道９を内側に設けた中空状の支持体１１と、風道９に負圧を導く吸引手段１３と、ガラス板１５に切り込むことのできるカッター１７と、カッター１７の後述の動作を実現する切筋形成手段１９とを備える。   A scribing apparatus according to an embodiment of the present invention will be described with reference to FIG. The scribing device 1 includes a suction plate 7 formed of a porous body that has a mounting surface 3 and has pores through which air passes, and a hollow support 11 that has an air passage 9 connected to the suction plate 7 on the inside. A suction unit 13 that guides negative pressure to the air passage 9, a cutter 17 that can cut into the glass plate 15, and a cut line forming unit 19 that realizes the operation of the cutter 17 described later.

吸着プレート７の材料である多孔質体は、アルミニウムの粉末を焼結した多孔質金属であり、表１に物性が示されている。載置面３は、ガラス板１５に密接できるように平坦に仕上げられている。なお以下に記す厚みとは図中の上下方向の寸法を意味する。ガラス板１５が有する２つの主面は、吸着プレート７の載置面３に密接する側の面と、この反対側の面とをそれぞれ下面２１、上面２３と記して区別する。   The porous body, which is the material of the adsorption plate 7, is a porous metal obtained by sintering aluminum powder. Table 1 shows the physical properties. The mounting surface 3 is finished flat so as to be in close contact with the glass plate 15. In addition, the thickness described below means the dimension of the up-down direction in a figure. The two main surfaces of the glass plate 15 are distinguished from each other by marking the surface close to the placement surface 3 of the suction plate 7 and the opposite surface as a lower surface 21 and an upper surface 23, respectively.

Figure 2011116609
Figure 2011116609

ガラス板１５は、厚みが１〜２００μｍの範囲のものであれば良い。ガラス板１５を平面視した形状は円形、又は方形であっても良い。吸着プレート７の厚みは、多孔質体の物理的強度を考慮して任意に設定しても良いが、ガラス板１５の下面２１よりも載置面３の面積を大きくし、載置面３をガラス板１５の下面２１の全域に密接できるようにすることが好ましい。   The glass plate 15 only needs to have a thickness in the range of 1 to 200 μm. The shape of the glass plate 15 in plan view may be circular or square. The thickness of the suction plate 7 may be arbitrarily set in consideration of the physical strength of the porous body, but the area of the mounting surface 3 is made larger than the lower surface 21 of the glass plate 15 so that the mounting surface 3 It is preferable that the entire area of the lower surface 21 of the glass plate 15 can be in close contact.

支持体１１は、その上端の開口２５を吸着プレート７に塞がれた状態で、吸着プレート７を支持するものであり、吸着プレート７と支持体１１の底部２７との間に空隙２９を確保している。風道９は、支持体１１の底部２７を貫き吸引手段１３に連なる。吸引手段１３として、大気圧よりも減圧された空気を供給するバキュームラインを適用し、このバキュームラインに風道９を接続しても良い。或いは、エアブロワーの吸気口に風道９を接続しても良い。   The support 11 supports the suction plate 7 in a state where the upper opening 25 is closed by the suction plate 7, and secures a gap 29 between the suction plate 7 and the bottom 27 of the support 11. is doing. The air passage 9 passes through the bottom 27 of the support 11 and continues to the suction means 13. As the suction means 13, a vacuum line that supplies air depressurized from the atmospheric pressure may be applied, and the air passage 9 may be connected to the vacuum line. Alternatively, the air passage 9 may be connected to the air inlet of the air blower.

カッター１７は、超硬金属から成るホイール、又はダイヤモンド刃のホイールを、作動アーム１８の先端に回転自在に取付けたものである。切筋形成手段１９は、作動アーム１８を図中の上下、及び水平方向に移動させ、これに従わせカッター１７を昇降させ、更に水平方向に走行させることができる。カッター１７の走行する向きが、直線、円周、又は自由曲線に沿うようにしても良い。   The cutter 17 has a wheel made of cemented carbide or a diamond blade wheel attached to the tip of the operating arm 18 so as to be freely rotatable. The scoring means 19 can move the operating arm 18 up and down and in the horizontal direction in the drawing, move the cutter 17 up and down accordingly, and further move it in the horizontal direction. The traveling direction of the cutter 17 may be along a straight line, a circumference, or a free curve.

スクライブ装置１を使用したガラス板のスクライブ方法について以下に説明する。先ず、上記のバキュームライン、又はエアブロワーの吸気口に空気を吸引させる。これにより、吸着プレート７の上方の空気は、吸着プレート７の気孔を通して空隙２９に流入する。   A glass plate scribing method using the scribing apparatus 1 will be described below. First, air is sucked into the suction line of the vacuum line or the air blower. Thereby, the air above the suction plate 7 flows into the gap 29 through the pores of the suction plate 7.

ガラス板１５を水平に保持できるトランスファーが、ガラス板１５を載置面３の真上まで搬送し、ガラス板１５を下降させる。ガラス板１５の下面２１が載置面３に触れる位置まで降下したところで、トランスファーはガラス板１５を解放する。この時点で、大気圧と空隙２９との圧力差は、吸着プレート７がガラス板１５を吸引する吸引力として作用し、吸着プレート７の載置面３にガラス板１５の下面２１を吸着させ、ガラス板１５を載置面３に固定できる。   A transfer that can hold the glass plate 15 horizontally conveys the glass plate 15 to a position directly above the placement surface 3 and lowers the glass plate 15. When the lower surface 21 of the glass plate 15 is lowered to a position where it touches the placement surface 3, the transfer releases the glass plate 15. At this time, the pressure difference between the atmospheric pressure and the gap 29 acts as a suction force for the suction plate 7 to suck the glass plate 15, and the lower surface 21 of the glass plate 15 is sucked to the mounting surface 3 of the suction plate 7, The glass plate 15 can be fixed to the mounting surface 3.

この状態で、ガラス板１５の形状は載置面３に倣うので、ガラス板１５の平面度は高く保たれる。しかも、吸着プレート７の材料である多孔質金属は、ヤング率が６０〜７０GPaであり、合成樹脂（１〜３GPa）に比べ曲げ力に対して著しく変形し難い。このため、多孔質金属は、吸着プレート７にガラス板１５を強く吸着させるのに上記の圧力差を増大しても、載置面３の平面度を高く保つことができる。   In this state, the shape of the glass plate 15 follows the placement surface 3, so that the flatness of the glass plate 15 is kept high. And the porous metal which is the material of the adsorption | suction plate 7 has a Young's modulus of 60-70 GPa, and it is hard to deform | transform remarkably with respect to bending force compared with a synthetic resin (1-3 GPa). For this reason, the porous metal can keep the flatness of the mounting surface 3 high even if the pressure difference is increased to strongly adsorb the glass plate 15 to the adsorption plate 7.

上記のトランスファーは載置面３から退き、新たなガラス板を保持する準備をする。続いて、カッター１７が、吸着プレート７に吸引されたガラス板１５の上方からガラス板１５の上面２３に押し付けられる位置まで降下し、更に水平方向に移動する。これにより、吸着プレート７に吸引されたガラス板１５の上面２３に、ガラス板１５の厚みよりも浅くカッター１７が切れ込むことにより、３０〜１００μｍの深さの切筋をガラス板１５に形成することができる。例えば、円形の切筋を形成する場合、カッター１７は、ガラス板１５に切り込み始めた始点から約３６０°周回したところで切筋の形成を終え、ガラス板１５から上方へ離脱する。   The above transfer retreats from the mounting surface 3 and prepares to hold a new glass plate. Subsequently, the cutter 17 descends from above the glass plate 15 sucked by the suction plate 7 to a position where it is pressed against the upper surface 23 of the glass plate 15 and further moves in the horizontal direction. Thereby, the cutter 17 cuts into the upper surface 23 of the glass plate 15 sucked by the suction plate 7 so as to be shallower than the thickness of the glass plate 15, thereby forming a cut line having a depth of 30 to 100 μm in the glass plate 15. Can do. For example, when forming a circular cut line, the cutter 17 finishes forming the cut line when it has turned about 360 ° from the starting point at which the glass plate 15 has started to be cut, and then detaches upward from the glass plate 15.

このように切筋が形成される間、ガラス板１５の平面度は上記の通り高く保たれるので、ガラス板１５にカッター１７の切り込む深さ、及びカッター１７からガラス板１５の受ける荷重は一定であり、しかも最適に保たれる。従って、スクライブ装置１を使用したガラス板のスクライブ方法によれば、カッター１７の走行する速度を５００ｍｍ／ｓの高速に設定しても、切筋が途切れることはなく、或いはラテラルクラックの発生を予防できるので、厚みが２００μｍ以下の薄いガラス板１５に切筋を形成する時間を短縮することができる。   Since the flatness of the glass plate 15 is kept high as described above while the cut lines are formed in this way, the depth at which the cutter 17 is cut into the glass plate 15 and the load received by the glass plate 15 from the cutter 17 are constant. And it is kept optimal. Therefore, according to the scribing method of the glass plate using the scribing device 1, even if the traveling speed of the cutter 17 is set to a high speed of 500 mm / s, the cut line is not interrupted or the occurrence of lateral cracks is prevented. Therefore, the time for forming the cut line on the thin glass plate 15 having a thickness of 200 μm or less can be shortened.

更に、吸着プレート７の材料として多孔質金属を適用しているので、吸着プレート７の載置面３に研削のような機械加工を施し、載置面３の平面度を、その５０×５０ｍｍの正方形エリア内で０．０１ｍｍ以下に仕上げることができる。このように載置面３を高い精度の平面に仕上げられるので、ガラス板１５の形状を載置面３に倣わせガラス板１５の平面度を向上させるのに有利である。また、多孔質金属は帯電しないので、電子部品の材料であるガラス板１５から静電気を除去することができる。   Furthermore, since porous metal is applied as the material of the suction plate 7, the mounting surface 3 of the suction plate 7 is subjected to machining such as grinding, and the flatness of the mounting surface 3 is 50 × 50 mm. It can be finished to 0.01 mm or less in a square area. Since the mounting surface 3 can be finished to a highly accurate plane in this way, it is advantageous to make the shape of the glass plate 15 follow the mounting surface 3 and improve the flatness of the glass plate 15. Further, since the porous metal is not charged, static electricity can be removed from the glass plate 15 which is a material of the electronic component.

更に、吸着プレート７の載置面３をガラス板１５の下面２１の全域に密接させた場合、吸着プレート７がガラス板１５を吸引するときに、ガラス板１５が載置面３から受ける反力をガラス板１５の全体に分散できる。このため、ガラス板１５は吸着プレート７に吸着された状態で、高い平面度を維持される。   Further, when the placement surface 3 of the suction plate 7 is brought into close contact with the entire lower surface 21 of the glass plate 15, the reaction force that the glass plate 15 receives from the placement surface 3 when the suction plate 7 sucks the glass plate 15. Can be dispersed throughout the glass plate 15. For this reason, high flatness is maintained in the state in which the glass plate 15 is adsorbed by the adsorption plate 7.

尚、本発明は、その趣旨を逸脱しない範囲で当業者の知識に基づいて種々なる改良、修正、又は変形を加えた態様でも実施でき、以下の態様で実施しても良い。多孔質体は、アルミニウムを主成分としない金属、或いはセラミック等の非金属を成分とするものでも良い。また、カッター１７の走行は行わず、カッター１７に対して吸着プレート７を移動させるようにしても良い。   In addition, this invention can be implemented also in the aspect which added various improvement, correction, or a deformation | transformation based on the knowledge of those skilled in the art within the range which does not deviate from the meaning, and may be implemented in the following aspects. The porous body may be composed of a metal not mainly composed of aluminum or a non-metal such as ceramic. Further, the suction plate 7 may be moved with respect to the cutter 17 without running the cutter 17.

本発明は、液晶用ガラスパネル、又は光センサーのカバー等に使用できるガラス板１５を切断するのに有益な技術である。   The present invention is a technique useful for cutting a glass plate 15 that can be used for a liquid crystal glass panel or a cover of an optical sensor.

１…スクライブ装置、３…載置面、７…吸着プレート、９…風道、１１…支持体、１３…吸引手段、１５…ガラス板、１７…カッター、１８…作動アーム、１９…切筋形成手段、２１…下面、２３…上面、２５…開口、２７…底部、２９…空隙。   DESCRIPTION OF SYMBOLS 1 ... Scribing device, 3 ... Mounting surface, 7 ... Adsorption plate, 9 ... Air path, 11 ... Supporting body, 13 ... Suction means, 15 ... Glass plate, 17 ... Cutter, 18 ... Working arm, 19 ... Cutting line formation Means, 21 ... lower surface, 23 ... upper surface, 25 ... opening, 27 ... bottom, 29 ... gap.

Claims (4)

気孔を有する多孔質体から成り、載置面が形成された吸着プレートを準備する工程と、
前記吸着プレートの載置面にガラス板を接触させる工程と、
前記吸着プレートの気孔に負圧を導くことにより、前記吸着プレートにガラス板を吸引させる工程と、
前記吸着プレートに吸引されたガラス板にカッターを押し付けながら前記カッターを走行させる工程と、
を含むことを特徴とするガラス板のスクライブ方法。 A step of preparing an adsorption plate made of a porous body having pores and having a mounting surface formed;
A step of bringing a glass plate into contact with the mounting surface of the suction plate;
A step of sucking the glass plate to the suction plate by introducing a negative pressure into the pores of the suction plate;
A step of running the cutter while pressing the cutter against the glass plate sucked by the suction plate;
A scribing method for a glass plate, comprising: 前記多孔質体がアルミニウムを成分とする多孔質金属であることを特徴とする請求項１に記載のガラス板のスクライブ方法。   The glass plate scribing method according to claim 1, wherein the porous body is a porous metal containing aluminum as a component. 前記吸着プレートの載置面が前記ガラス板の片面の全域に密接することを特徴とする請求項１乃至２の何れか一つに記載のガラス板のスクライブ方法。   The glass plate scribing method according to claim 1, wherein a placement surface of the suction plate is in close contact with the entire area of one side of the glass plate. ガラス板の厚み方向の片面に密接する載置面を形成され、気孔を有する多孔質体から成る吸着プレートと、
前記吸着プレートに接続した風道と、
前記風道に負圧を導くことにより、前記吸着プレートの気孔にガラス板を吸引する吸引力を発生させる吸引手段と、
前記吸着プレートの載置面に対向し、前記前記吸着プレートに吸引されたガラス板にその厚みよりも浅く切れ込むカッターと、
前記カッターを走行させる切筋形成手段と、
を備えることを特徴とするスクライブ装置。 An adsorption plate formed of a porous body having a pore formed with a mounting surface in close contact with one surface in the thickness direction of the glass plate,
An air passage connected to the suction plate;
A suction means for generating a suction force for sucking the glass plate into the pores of the suction plate by introducing a negative pressure to the air passage;
A cutter that faces the mounting surface of the suction plate and cuts into the glass plate sucked by the suction plate to a depth smaller than its thickness;
Incision forming means for running the cutter,
A scribing device comprising:
JP2009277647A 2009-12-07 2009-12-07 Glass plate scribing method and device Pending JP2011116609A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014085182A1 (en) * 2012-11-28 2014-06-05 Corning Incorporated Pads, methods of forming scribing mark, and methods of cutting a sheet of glass
CN108067894A (en) * 2018-01-17 2018-05-25 苏州日普模具有限公司 A kind of multi-functional frock clamp

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0847835A (en) * 1994-08-01 1996-02-20 Ckd Corp Suction plate of vacuum chuck
JP2005247646A (en) * 2004-03-04 2005-09-15 Sharp Corp Method of manufacturing display element

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0847835A (en) * 1994-08-01 1996-02-20 Ckd Corp Suction plate of vacuum chuck
JP2005247646A (en) * 2004-03-04 2005-09-15 Sharp Corp Method of manufacturing display element

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014085182A1 (en) * 2012-11-28 2014-06-05 Corning Incorporated Pads, methods of forming scribing mark, and methods of cutting a sheet of glass
CN108067894A (en) * 2018-01-17 2018-05-25 苏州日普模具有限公司 A kind of multi-functional frock clamp

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