JP2011044654A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP2011044654A JP2011044654A JP2009193318A JP2009193318A JP2011044654A JP 2011044654 A JP2011044654 A JP 2011044654A JP 2009193318 A JP2009193318 A JP 2009193318A JP 2009193318 A JP2009193318 A JP 2009193318A JP 2011044654 A JP2011044654 A JP 2011044654A
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Abstract
【解決手段】半導体装置50は、最外層の配線層の所要の箇所に画定されたパッド11Pを有する配線基板10と、この配線基板上にフェイスアップの態様で並列して実装された複数の半導体素子(チップ)20a,20bと、各チップ上にまたがって実装されたインターポーザ30とを備える。各チップ20a,20bは、そのフェイス面側に配列された電極パッドのうち一部の電極パッド21が導電性ワイヤ24を介して配線基板10の対応するパッド11Pに接続されている。残りの電極パッド22は、インターポーザ30を介して相互に電気的に接続されている。
【選択図】図1
Description
11,13,15,17,34…配線層、
11P,17P,32,36…パッド、
12,14,16,33…ビア、
18,19…ソルダレジスト層(保護膜)、
20a、20b,20c,20d,20e…半導体素子(チップ)、
21,22…電極パッド、
23…ダイ・アタッチ・フィルム(接着剤層)、
24,38…ボンディングワイヤ(導電性ワイヤ)、
30,30a…インターポーザ、
31,35…絶縁層、
37…貫通電極(導体)、
40,43…はんだ(導電性部材)、
41,44…アンダーフィル樹脂、
42…封止樹脂(層)、
50,60,70…半導体装置(マルチチップモジュール)。
Claims (6)
- 最外層の配線層の所要の箇所に画定されたパッドを有する配線基板と、
前記配線基板上にフェイスアップの態様で並列して実装され、各々のフェイス面側に配列された電極パッドのうち一部の電極パッドが導電性ワイヤを介して前記配線基板の対応するパッドに接続された複数の半導体素子と、
前記複数の半導体素子上にまたがって実装され、各半導体素子の残りの電極パッド間を相互に電気的に接続するインターポーザとを備えたことを特徴とする半導体装置。 - 前記インターポーザは、一方の面に形成された複数の第1のパッドと、該複数の第1のパッド間を内部で電気的に接続する配線層とを有し、
前記各半導体素子の残りの電極パッドが、それぞれ導電性部材を介して前記インターポーザの対応する第1のパッドに接続されていることを特徴とする請求項1に記載の半導体装置。 - 前記インターポーザは、さらに他方の面に形成された第2のパッドと、該第2のパッドを前記複数の第1のパッドのうち対応するパッドに電気的に接続する貫通導体とを有し、前記第2のパッドが導電性ワイヤを介して前記配線基板の対応するパッドに接続されていることを特徴とする請求項2に記載の半導体装置。
- 前記インターポーザの前記第2のパッドが形成されている側の面に、半導体素子がフリップチップ実装されていることを特徴とする請求項3に記載の半導体装置。
- 前記インターポーザは、その基材が前記半導体素子を構成する材料と同じ材料からなることを特徴とする請求項1に記載の半導体装置。
- さらに前記複数の半導体素子と前記インターポーザとの間隙にアンダーフィル樹脂が充填され、前記配線基板上の各半導体素子及び前記導電性ワイヤと前記インターポーザとを被覆する封止樹脂層が形成されていることを特徴とする請求項1に記載の半導体装置。
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Cited By (7)
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JP2015220291A (ja) * | 2014-05-15 | 2015-12-07 | 株式会社ソシオネクスト | 半導体装置及びその製造方法 |
JP2016018876A (ja) * | 2014-07-08 | 2016-02-01 | 日本電気株式会社 | 電子装置又はその製造方法 |
CN107041137A (zh) * | 2014-09-05 | 2017-08-11 | 英帆萨斯公司 | 多芯片模块及其制法 |
US9875969B2 (en) | 2009-06-24 | 2018-01-23 | Intel Corporation | Multi-chip package and method of providing die-to-die interconnects in same |
US10283434B2 (en) | 2015-11-04 | 2019-05-07 | Fujitsu Limited | Electronic device, method for manufacturing the electronic device, and electronic apparatus |
DE102014116417B4 (de) | 2013-12-18 | 2022-01-27 | Intel Corporation | Paket integrierter Schaltungen mit eingebetteter Brücke, Verfahren zum Zusammenbau eines solchen und Paketzusammensetzung |
WO2024053103A1 (ja) * | 2022-09-09 | 2024-03-14 | ウルトラメモリ株式会社 | Icブリッジ、icモジュールおよびicモジュールの製造方法 |
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Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10763216B2 (en) | 2009-06-24 | 2020-09-01 | Intel Corporation | Multi-chip package and method of providing die-to-die interconnects in same |
US9875969B2 (en) | 2009-06-24 | 2018-01-23 | Intel Corporation | Multi-chip package and method of providing die-to-die interconnects in same |
US10510669B2 (en) | 2009-06-24 | 2019-12-17 | Intel Corporation | Multi-chip package and method of providing die-to-die interconnects in same |
US10923429B2 (en) | 2009-06-24 | 2021-02-16 | Intel Corporation | Multi-chip package and method of providing die-to-die interconnects in same |
DE112010002705B4 (de) | 2009-06-24 | 2021-11-11 | Intel Corporation | Multi-Chip-Baugruppe und Verfahren zur Bereitstellung von Chip-Chip-Zwischenverbindungen in derselben |
US11824008B2 (en) | 2009-06-24 | 2023-11-21 | Intel Corporation | Multi-chip package and method of providing die-to-die interconnects in same |
US11876053B2 (en) | 2009-06-24 | 2024-01-16 | Intel Corporation | Multi-chip package and method of providing die-to-die interconnects in same |
DE102014116417B4 (de) | 2013-12-18 | 2022-01-27 | Intel Corporation | Paket integrierter Schaltungen mit eingebetteter Brücke, Verfahren zum Zusammenbau eines solchen und Paketzusammensetzung |
JP2015220291A (ja) * | 2014-05-15 | 2015-12-07 | 株式会社ソシオネクスト | 半導体装置及びその製造方法 |
JP2016018876A (ja) * | 2014-07-08 | 2016-02-01 | 日本電気株式会社 | 電子装置又はその製造方法 |
CN107041137A (zh) * | 2014-09-05 | 2017-08-11 | 英帆萨斯公司 | 多芯片模块及其制法 |
US10283434B2 (en) | 2015-11-04 | 2019-05-07 | Fujitsu Limited | Electronic device, method for manufacturing the electronic device, and electronic apparatus |
WO2024053103A1 (ja) * | 2022-09-09 | 2024-03-14 | ウルトラメモリ株式会社 | Icブリッジ、icモジュールおよびicモジュールの製造方法 |
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