JP2010287745A - 搬送モジュール - Google Patents

搬送モジュール Download PDF

Info

Publication number: JP2010287745A
Authority: JP; Japan
Prior art keywords: arm; robot; link; transfer; transfer chamber
Prior art date: 2009-06-11
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

JP2009140598A

Other languages

English (en)

Japanese (ja)

Inventor

Tsutomu Hiroki

勤廣木

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Tokyo Electron Ltd

Original Assignee

Tokyo Electron Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2009-06-11

Filing date

2009-06-11

Publication date

2010-12-24

2009-06-11 Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd

2009-06-11 Priority to JP2009140598A priority Critical patent/JP2010287745A/ja

2010-05-20 Priority to PCT/JP2010/058498 priority patent/WO2010143505A1/ja

2010-06-11 Priority to TW99119075A priority patent/TW201117313A/zh

2010-12-24 Publication of JP2010287745A publication Critical patent/JP2010287745A/ja

Status Pending legal-status Critical Current

Links

Images

Classifications

- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
- B25J9/1065—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
- B25J9/107—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms of the froglegs type
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance

Landscapes

Engineering & Computer Science (AREA)
Robotics (AREA)
Physics & Mathematics (AREA)
Condensed Matter Physics & Semiconductors (AREA)
General Physics & Mathematics (AREA)
Manufacturing & Machinery (AREA)
Computer Hardware Design (AREA)
Microelectronics & Electronic Packaging (AREA)
Power Engineering (AREA)
Mechanical Engineering (AREA)
Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

JP2009140598A 2009-06-11 2009-06-11 搬送モジュール Pending JP2010287745A (ja)

Priority Applications (3)

Application Number	Priority Date	Filing Date	Title
JP2009140598A JP2010287745A (ja)	2009-06-11	2009-06-11	搬送モジュール
PCT/JP2010/058498 WO2010143505A1 (ja)	2009-06-11	2010-05-20	搬送モジュール
TW99119075A TW201117313A (en)	2009-06-11	2010-06-11	Delivery module

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP2009140598A JP2010287745A (ja)	2009-06-11	2009-06-11	搬送モジュール

Publications (1)

Publication Number	Publication Date
JP2010287745A true JP2010287745A (ja)	2010-12-24

Family

ID=43308764

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP2009140598A Pending JP2010287745A (ja)	2009-06-11	2009-06-11	搬送モジュール

Country Status (3)

Country	Link
JP (1)	JP2010287745A (zh)
TW (1)	TW201117313A (zh)
WO (1)	WO2010143505A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
KR20160127797A (ko) *	2014-03-31	2016-11-04	도쿄엘렉트론가부시키가이샤	기판 처리 시스템

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH08172121A (ja) *	1994-12-20	1996-07-02	Hitachi Ltd	基板搬送装置
JP2000120824A (ja) *	1998-10-16	2000-04-28	Seiko Seiki Co Ltd	パラレルリンク機構
JP2003231076A (ja) *	2002-02-08	2003-08-19	Jel:Kk	搬送アーム
JP4737123B2 (ja) *	2007-03-19	2011-07-27	トヨタ自動車株式会社	移送ロボット

2009
- 2009-06-11 JP JP2009140598A patent/JP2010287745A/ja active Pending
2010
- 2010-05-20 WO PCT/JP2010/058498 patent/WO2010143505A1/ja active Application Filing
- 2010-06-11 TW TW99119075A patent/TW201117313A/zh unknown

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
KR20160127797A (ko) *	2014-03-31	2016-11-04	도쿄엘렉트론가부시키가이샤	기판 처리 시스템
KR101866112B1 (ko) *	2014-03-31	2018-06-08	도쿄엘렉트론가부시키가이샤	기판 처리 시스템

Also Published As

Publication number	Publication date
WO2010143505A1 (ja)	2010-12-16
TW201117313A (en)	2011-05-16

Publication	Publication Date	Title
CN101262986B (zh)	2012-11-14	不等连杆scara臂
KR102647806B1 (ko)	2024-03-15	기판 이송 장치
JP4660434B2 (ja)	2011-03-30	搬送機構およびそれを備えた処理装置
KR101292135B1 (ko)	2013-08-16	시저 리프트 이송 로봇
KR100438502B1 (ko)	2004-07-03	웨이퍼 가공 시스템
JP5467115B2 (ja)	2014-04-09	搬送装置及びこれを用いた真空処理装置
US20130272823A1 (en)	2013-10-17	Robot systems, apparatus, and methods having independently rotatable waists
TWI704038B (zh)	2020-09-11	用於在進行電子設備製造時輸送基板的機械手組件、基板處理裝置及方法
TWI453854B (zh)	2014-09-21	基板無粒子處理裝置
JP5984036B2 (ja)	2016-09-06	ｚ運動し、多関節アームを備える直線真空ロボット
TW201536494A (zh)	2015-10-01	用於傳輸電子裝置製造中之基板之機器人設備、驅動組件，及方法
TW201145430A (en)	2011-12-16	Conveyance arm and conveyance robot with same
US20230129289A1 (en)	2023-04-27	Transport apparatus with linear bearing and method therefor
JP2007019216A (ja)	2007-01-25	基板の搬送ロボット
TWI514499B (zh)	2015-12-21	Drive device and substrate processing system
JP5306908B2 (ja)	2013-10-02	搬送モジュール
JP2010076073A (ja)	2010-04-08	回転駆動装置
WO2010143505A1 (ja)	2010-12-16	搬送モジュール
US20020182036A1 (en)	2002-12-05	Semiconductor wafer handling robot for linear transfer chamber
CN117637564A (zh)	2024-03-01	具有单独附件馈通的衬底运输装置
CN101740439B (zh)	2014-05-07	用于传输和处理衬底的装置和方法
JP5239845B2 (ja)	2013-07-17	基板搬送ロボット、基板搬送装置および半導体製造装置
JP2000216214A (ja)	2000-08-04	基板処理装置
JPH04264749A (ja)	1992-09-21	ウエハ移送ロボット
JP2010093028A (ja)	2010-04-22	基板搬送システム