JP2010164306A - Method and device for hardened depth - Google Patents

Method and device for hardened depth Download PDF

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JP2010164306A
JP2010164306A JP2009004181A JP2009004181A JP2010164306A JP 2010164306 A JP2010164306 A JP 2010164306A JP 2009004181 A JP2009004181 A JP 2009004181A JP 2009004181 A JP2009004181 A JP 2009004181A JP 2010164306 A JP2010164306 A JP 2010164306A
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coil
quenching depth
measurement object
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Masatoshi Mizutani
政敏 水谷
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NTN Corp
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NTN Toyo Bearing Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a hardened depth measuring method capable of precisely measuring the hardened depth of rolling devices and components of rolling devices without necessity of complicated control of a gap, and a hardened depth measuring device used in this measuring method. <P>SOLUTION: In the hardened depth measuring method, a hardened depth measuring device 1 including an exciting coil 3 for exciting a rolling device or a component of the rolling device as a measurement target 20, an impedance detection circuit 5, and a signal processing circuit 6 is used. From the change of the impedance of the excitation coil 2, the hardened depth of the measurement target 20 is measured. The measurement is performed with the excitation coil 2 in contact with the measurement target 20. In addition to the excitation coil 3, another detection coil may be provided so that the hardened depth can be measured from a magnetic flux detected by the detection coil. Further, a correction based on the temperature may be performed. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

この発明は、軸受などの転動装置またはその転動装置部品の焼入れ深さを測定する焼入れ深さ測定方法、およびその測定に用いられる焼入れ深さ測定装置に関する。   The present invention relates to a quenching depth measuring method for measuring a quenching depth of a rolling device such as a bearing or a part of the rolling device, and a quenching depth measuring device used for the measurement.

軸受などの転動装置の構成部品には、焼入れ処理や焼戻し処理が施される。これらの処理の中でも、高周波焼入れ処理や、浸炭処理、浸炭窒化処理などの表面硬化処理では、品質保証のために表面硬化層の検査が行なわれる。この表面硬化層検査の一般的なものは、実際の製品を切断し、その切断面上で、製品表面から深さ方向に硬度を測定して硬化層の深さを測定する。また、製品を切断できないものでは、テストピースに製品と同じ炉で熱処理を施し、そのテストピースを切断して硬化層深さを測定することにより、製品の硬化層深さの保証を行なっている。   The components of the rolling device such as the bearing are subjected to quenching and tempering. Among these processes, in the surface hardening process such as induction hardening process, carburizing process, and carbonitriding process, the surface hardened layer is inspected for quality assurance. In general, the surface hardened layer inspection is performed by cutting the actual product and measuring the depth of the hardened layer by measuring the hardness in the depth direction from the product surface on the cut surface. For products that cannot be cut, the test piece is heat treated in the same furnace as the product, and the test piece is cut and the hardened layer depth is measured to guarantee the hardened layer depth of the product. .

上記表面硬化層検査のうち、製品を切断して行う一般的な破壊検査では、製品が破壊されるため、マテリアルロスコストが大きくなるという問題点がある。また、製品の切断および硬度計による深さ方向の硬度測定に時間がかかり、工数が増えるという問題点もある。
また、製品を切断できない場合に行なわれるテストピースによる破壊検査では、実際の製品の検査ではないため、保証精度が悪いなどの問題点がある。 Among the surface hardened layer inspections, the general destructive inspection performed by cutting the product has a problem that the material loss cost increases because the product is destroyed. In addition, it takes time to cut the product and measure the hardness in the depth direction with a hardness meter, which increases the number of steps.
Further, the destructive inspection using a test piece performed when the product cannot be cut has a problem that the accuracy of guarantee is poor because it is not an actual product inspection.

そこで、焼入れ硬化層を非破壊で検査する各種方法が提案されている（例えば特許文献１〜３）。そのうち、電磁方式の非破壊検査方法は、焼入れ深さと表面硬度を測定することができるなどの利点があり、実用化されている。   Therefore, various methods for inspecting the hardened hardened layer in a nondestructive manner have been proposed (for example, Patent Documents 1 to 3). Among them, the electromagnetic non-destructive inspection method has an advantage that it can measure the quenching depth and the surface hardness, and has been put into practical use.

特開平６−２７１９２６号公報JP-A-6-271926 特開２００４−１０８８７３号公報JP 2004-108873 A 特開２００８−３２６７７号公報JP 2008-32677 A

例えば特許文献３に開示の非破壊検査方法では、電磁方式により浸炭処理および浸炭窒化処理を施した転動装置部品の硬化層深さを検出している。しかし、この検査方法では、検出精度を上げるために、測定対象物である製品と検出ヘッドとのギャップを精度良く保つ必要があり、ギャップ管理が不十分であると精度の良い測定を行なえない。また、転動装置やその構成部品などの測定対象物の温度が変化すると、測定対象物の透磁率が変化するため、検出精度が低下するという問題点がある。   For example, in the nondestructive inspection method disclosed in Patent Document 3, the hardened layer depth of a rolling device component that has been subjected to carburizing and carbonitriding by an electromagnetic method is detected. However, in this inspection method, in order to increase detection accuracy, it is necessary to accurately maintain a gap between the product to be measured and the detection head. If the gap management is insufficient, accurate measurement cannot be performed. Further, when the temperature of the measurement object such as the rolling device or its component parts changes, the magnetic permeability of the measurement object changes, so that there is a problem that detection accuracy decreases.

この発明の目的は、煩雑なギャップ管理を要することなく、転動装置や転動装置部品の焼入れ深さを精度良く測定することができる焼入れ深さ測定方法、およびこの測定方法に用いられる焼入れ深さ測定装置を提供することである。
この発明の他の目的は、測定対象物の温度に左右されることなく、転動装置や転動装置部品の焼入れ深さを精度良く測定することができる焼入れ深さ測定装置および焼入れ深さ測定方法を提供することである。 An object of the present invention is to provide a quenching depth measuring method capable of accurately measuring the quenching depth of a rolling device or a rolling device component without requiring complicated gap management, and a quenching depth used in this measuring method. It is to provide a measuring device.
Another object of the present invention is to provide a quenching depth measuring device and a quenching depth measurement capable of accurately measuring the quenching depth of a rolling device or a rolling device component without being affected by the temperature of the measurement object. Is to provide a method.

この発明にかかる第１の焼入れ深さ測定方法は、交流磁界を発生する励磁コイルを、転動装置または転動装置部品からなる測定対象物に対向させ、この励磁コイルのインピーダンスの変化から、前記測定対象物の焼入れ深さを測定する焼入れ深さ測定方法であって、前記励磁コイルを測定対象物に接触させた状態で測定することを特徴とする。ここで言う励磁コイルは、鉄心等の磁心を設ける場合は、コイル巻線と磁心とを含む意味である。磁心を有する場合は、その磁心を測定対象物に接触させる。以下、この明細書で「コイル」とある記載は、いずれも、磁心を設ける場合は磁心を含む意味である。
この焼入れ深さ測定方法によると、励磁コイルを測定対象物に接触させた状態で焼入れ深さの測定を行うので、励磁コイルと測定対象物との間の煩雑なギャップ管理が不要となり、転動装置や転動装置部品の焼入れ深さを精度良く測定することができる。
また、この測定方法では、励磁コイルのインピーダンスの変化から焼入れ深さを測定するので、励磁コイルとは別に検出コイル等の検出手段を設けることが不要で、測定装置が簡単な構成のもので済む。 In the first quenching depth measurement method according to the present invention, an excitation coil that generates an alternating magnetic field is made to face a measurement object made of a rolling device or a rolling device component, and the change in impedance of the exciting coil A quenching depth measurement method for measuring a quenching depth of a measurement object, wherein the measurement is performed in a state where the excitation coil is in contact with the measurement object. The term “excitation coil” as used herein means a coil winding and a magnetic core when a magnetic core such as an iron core is provided. When it has a magnetic core, the magnetic core is brought into contact with the measurement object. Hereinafter, the description of “coil” in this specification means that a magnetic core is included when a magnetic core is provided.
According to this quenching depth measurement method, the quenching depth is measured while the excitation coil is in contact with the object to be measured, so that complicated gap management between the excitation coil and the object to be measured is not required. The quenching depth of the device and rolling device parts can be accurately measured.
Further, in this measurement method, since the quenching depth is measured from the change in impedance of the exciting coil, it is not necessary to provide a detecting means such as a detecting coil separately from the exciting coil, and the measuring device can have a simple configuration. .

この発明における第２の焼入れ深さ測定方法は、転動装置または転動装置部品からなる測定対象物を交流磁界内に配置し、この状態で測定対象物から発生する磁束を検出コイルで検出し、この検出された磁束から、測定対象物の焼入れ深さを測定する焼入れ深さ測定方法であって、前記検出コイルを測定対象物に接触させた状態で測定することを特徴とする。検出コイルが磁心を有する場合は、その磁心を測定対象物に接触させる。
この焼入れ深さ測定方法の場合は、検出コイルを測定対象物に接触させた状態で焼入れ深さの測定を行うので、検出コイルと測定対象物との間の煩雑なギャップ管理が不要となり、転動装置や転動装置部品の焼入れ深さを精度良く測定することができる。 In the second quenching depth measuring method according to the present invention, a measuring object consisting of a rolling device or rolling device parts is arranged in an AC magnetic field, and a magnetic flux generated from the measuring object in this state is detected by a detection coil. A quenching depth measurement method for measuring a quenching depth of a measurement object from the detected magnetic flux, wherein the measurement is performed in a state where the detection coil is in contact with the measurement object. When the detection coil has a magnetic core, the magnetic core is brought into contact with the measurement object.
In the case of this quenching depth measurement method, the quenching depth is measured while the detection coil is in contact with the measurement object, so that complicated gap management between the detection coil and the measurement object becomes unnecessary, and The quenching depth of the moving device and rolling device parts can be accurately measured.

上記第２の焼入れ深さ測定方法において、前記磁束を検出コイルで検出し、この検出された磁束から焼入れ深さを測定する処理が、電磁誘導により検出コイルに誘導される電圧の振幅または位相を検出し、この検出した振幅または位相から焼入れ深さを測定する処理であっても良い。   In the second quenching depth measurement method, the magnetic flux is detected by a detection coil, and the process of measuring the quenching depth from the detected magnetic flux is to determine the amplitude or phase of the voltage induced in the detection coil by electromagnetic induction. It may be a process of detecting and measuring the quenching depth from the detected amplitude or phase.

この発明における第３の焼入れ深さ測定方法は、転動装置または転動装置部品からなる測定対象物にコイルによって交流磁界を印加し、この交流磁界を印加するコイル、またはこのコイルとは別に設けたコイルから検出される物理量から前記測定対象物の焼入れ深さを測定する焼入れ深さ測定方法であって、前記物理量を検出するコイルを測定対象物に接触させた状態で測定することを特徴とする。この第３の焼入れ深さ測定方法は、上記第１および第２の焼入れ深さ測定方法を含む上位概念で示した焼入れ深さ測定方法である。
この第３の焼入れ深さ測定方法の場合も、物理量を検出するコイルを測定対象物に接触させた状態で焼入れ深さの測定を行うので、コイルと測定対象物との間の煩雑なギャップ管理が不要となり、転動装置や転動装置部品の焼入れ深さを精度良く測定することができる。 A third quenching depth measuring method according to the present invention is such that an alternating magnetic field is applied to a measurement object comprising a rolling device or rolling device parts by a coil, and a coil for applying the alternating magnetic field is provided separately from the coil. A quenching depth measuring method for measuring a quenching depth of the measurement object from a physical quantity detected from a coil, wherein the measurement is performed in a state where the coil for detecting the physical quantity is in contact with the measurement object. To do. This third quenching depth measurement method is the quenching depth measurement method shown in the superordinate concept including the first and second quenching depth measurement methods.
Also in the case of the third quenching depth measurement method, since the quenching depth is measured in a state where the coil for detecting the physical quantity is in contact with the measurement object, complicated gap management between the coil and the measurement object is performed. Is eliminated, and the quenching depth of the rolling device or rolling device parts can be measured with high accuracy.

この発明の上記各焼入れ深さ測定方法において、前記測定対象物の温度を測定し、その測定した温度を用いて焼入れ深さの測定値の補正を行っても良い。
この方法の場合、測定対象物の温度を用いて、測定値を補正するので、測定対象物の温度変化による透磁率変化の影響が補正され、測定対象物の温度に左右されることなく、転動装置や転動装置部品の焼入れ深さを精度良く測定することができる。なお、測定値の補正は、励磁コイルのインピーダンスや、検出コイルで検出される磁束、電圧の振幅、位相などのコイルで直接に検出される測定値につき行うようにしても、また得られたインピーダンス、磁束、電圧の振幅、位相などから計算した焼入れ深さの値を補正を行うようにしても良く、結果として焼入れ深さの値が温度で補正されていれば良い。 In each quenching depth measuring method of the present invention, the temperature of the measurement object may be measured, and the measured value of the quenching depth may be corrected using the measured temperature.
In this method, since the measured value is corrected using the temperature of the measurement object, the influence of the magnetic permeability change due to the temperature change of the measurement object is corrected, and the change is not affected by the temperature of the measurement object. The quenching depth of the moving device and rolling device parts can be accurately measured. It should be noted that the correction of the measurement value may be performed on the measurement value directly detected by the coil such as the impedance of the excitation coil, the magnetic flux detected by the detection coil, the amplitude of the voltage, and the phase, and the obtained impedance. The quenching depth value calculated from the magnetic flux, voltage amplitude, phase, and the like may be corrected. As a result, the quenching depth value only needs to be corrected by the temperature.

また、前記測定対象物に接触させるコイルの温度を測定し、その測定した温度を用いて焼入れ深さの測定値の補正を行うようにしても良い。前記測定対象物の温度による補正と、コイルの温度による補正との両方を行っても良い。
測定対象物の温度変化による透磁率変化の影響だけでなく、励磁コイルや検出コイルの温度変化による透磁率変化の影響もあるため、この励磁コイルや検出コイルの温度変化に対する補正を行うことで、焼入れ深さの測定精度が向上する。測定対象物の温度に対する補正と併用した場合は、さらに精度良く測定することができる。 Moreover, the temperature of the coil brought into contact with the measurement object may be measured, and the measured value of the quenching depth may be corrected using the measured temperature. You may perform both the correction | amendment by the temperature of the said measurement object, and the correction | amendment by the temperature of a coil.
Not only the influence of the permeability change due to the temperature change of the measurement object, but also the influence of the permeability change due to the temperature change of the excitation coil and the detection coil, so by correcting for the temperature change of the excitation coil and the detection coil, The measurement accuracy of quenching depth is improved. When used in combination with correction of the temperature of the measurement object, it is possible to measure with higher accuracy.

上記測定対象物やコイルの温度の測定は、非接触温度センサにより行うようにしてもよい。非接触温度センサを用いると、温度センサを測定対象物等に接触させることによる測定値の誤差の発生が回避される。   You may make it perform the measurement of the said measurement object and the temperature of a coil with a non-contact temperature sensor. When a non-contact temperature sensor is used, the occurrence of measurement value errors due to the temperature sensor being brought into contact with a measurement object or the like is avoided.

この発明における第１の焼入れ深さ測定装置は、交流磁界を発生し、転動装置または転動装置部品からなる測定対象物に交流磁界を印加する励磁コイルと、この励磁コイルのインピーダンスの変化を検出するインピーダンス検出回路と、このインピーダンス検出回路で検出したインピーダンスの変化から前記測定対象物の焼入れ深さを計算する信号処理回路とを備え、前記励磁コイルは前記測定対象物に接触させた状態で前記交流磁界を印加するものである。
この構成の場合、励磁コイルを測定対象物に接触させた状態で焼入れ深さの測定を行うので、励磁コイルと測定対象物との間の煩雑なギャップ管理が不要となり、転動装置や転動装置部品の焼入れ深さを精度良く測定することができる。また、励磁コイルのインピーダンスの変化から焼入れ深さを測定するので、励磁コイルとは別に検出コイル等の検出手段を設けることが不要で、構成が簡単なものとできる。 A first quenching depth measuring device according to the present invention generates an alternating magnetic field and applies an alternating magnetic field to a measurement object composed of a rolling device or rolling device parts, and changes in impedance of the exciting coil. An impedance detection circuit for detecting, and a signal processing circuit for calculating a quenching depth of the measurement object from a change in impedance detected by the impedance detection circuit, wherein the excitation coil is in contact with the measurement object The alternating magnetic field is applied.
In this configuration, the quenching depth is measured while the exciting coil is in contact with the object to be measured, so that complicated gap management between the exciting coil and the object to be measured is not required, and a rolling device or rolling device is not required. The quenching depth of the device parts can be measured with high accuracy. Further, since the quenching depth is measured from the change in impedance of the exciting coil, it is not necessary to provide a detecting means such as a detecting coil separately from the exciting coil, and the configuration can be simplified.

この発明における第２の焼入れ深さ測定装置は、交流磁界を発生し、転動装置または転動装置部品からなる測定対象物に交流磁界を印加する励磁コイルと、この印加された交流磁界により前記測定対象物から発生する磁束を検出する検出コイルと、この検出コイルで検出された磁束から測定対象物の焼入れ深さを計算する信号処理回路とを備え、前記検出コイルは、前記測定対象物に接触させた状態で前記磁束の検出を行うものであることを特徴とする。
この構成の測定装置によると、検出コイルを測定対象物に接触させた状態で焼入れ深さの測定を行うので、検出コイルと測定対象物との間の煩雑なギャップ管理が不要となり、転動装置や転動装置部品の焼入れ深さを精度良く測定することができる。 The second quenching depth measuring device according to the present invention generates an AC magnetic field and applies the AC magnetic field to a measurement object composed of a rolling device or a rolling device component, and the applied AC magnetic field to A detection coil for detecting a magnetic flux generated from the measurement object; and a signal processing circuit for calculating a quenching depth of the measurement object from the magnetic flux detected by the detection coil, wherein the detection coil is attached to the measurement object. The magnetic flux is detected in a contacted state.
According to the measuring device of this configuration, since the quenching depth is measured in a state where the detection coil is in contact with the measurement object, complicated gap management between the detection coil and the measurement object becomes unnecessary, and the rolling device And the quenching depth of rolling device parts can be accurately measured.

上記第２の焼入れ深さ測定装置において、前記検出コイルに誘導される電圧の振幅または位相を検出する検出回路を設け、前記信号処理回路は、前記検出回路で検出した振幅または位相から焼入れ深さを計算するものとしても良い。すなわち、検出コイルで検出された磁束から測定対象物の焼入れ深さを計算する手段として、具体的には、上記の処理を行う検出回路および信号処理回路を設けても良い。   In the second quenching depth measuring apparatus, a detection circuit for detecting an amplitude or a phase of a voltage induced in the detection coil is provided, and the signal processing circuit performs a quenching depth based on the amplitude or the phase detected by the detection circuit. It is good also as what calculates. That is, as a means for calculating the quenching depth of the measurement object from the magnetic flux detected by the detection coil, specifically, a detection circuit and a signal processing circuit for performing the above processing may be provided.

この発明における第３の焼入れ深さ測定装置は、転動装置または転動装置部品からなる測定対象物に交流磁界を印加するコイルと、この交流磁界を印加するコイル、またはこのコイルとは別に設けたコイルから検出される物理量を検出する検出手段と、この検出手段の検出値から前記測定対象物の焼入れ深さを測定する信号処理回路とを備え、前記物理量を検出するコイルは、測定対象物に接触させた状態で測定するものであることを特徴とする。
この構成の場合も、検出用のコイルを測定対象物に接触させた状態で焼入れ深さの測定を行うので、検出コイルと測定対象物との間の煩雑なギャップ管理が不要となり、転動装置や転動装置部品の焼入れ深さを精度良く測定することができる。 A third quenching depth measuring device according to the present invention is provided separately from a coil for applying an alternating magnetic field to a measurement object comprising a rolling device or rolling device parts, a coil for applying the alternating magnetic field, or this coil. A detection unit for detecting a physical quantity detected from the coil and a signal processing circuit for measuring a quenching depth of the measurement object from a detection value of the detection unit, and the coil for detecting the physical quantity is a measurement object It is a thing measured in the state contacted to.
Also in this configuration, since the quenching depth is measured with the detection coil in contact with the measurement object, complicated gap management between the detection coil and the measurement object becomes unnecessary, and the rolling device And the quenching depth of rolling device parts can be accurately measured.

上記第２の焼入れ深さ測定装置において、前記検出コイルに誘導される電圧を積分することでコイルに鎖交する磁束を算出する鎖交磁束算出手段を設け、前記信号処理回路は、前記鎖交磁束算出手段で算出された磁束の大きさから研削焼けを検出する機能を有するものとしても良い。   In the second quenching depth measuring apparatus, linkage magnetic flux calculating means for calculating a magnetic flux linked to the coil by integrating a voltage induced in the detection coil is provided, and the signal processing circuit includes the linkage It may have a function of detecting grinding burn from the magnitude of the magnetic flux calculated by the magnetic flux calculating means.

上記第２の焼入れ深さ測定装置において、前記検出コイルを２個設け、前記信号処理回路は、前記各検出コイルに電磁誘導により誘導される電圧の差から研削焼けを検出する機能を有するものとしても良い。前記２個の検出コイルは直列に接続されてブリッジ回路を形成するものであっても良い。２つの検出コイルを設けることで、研削焼けの検出が可能になる。   In the second quenching depth measuring device, two detection coils are provided, and the signal processing circuit has a function of detecting grinding burn from a difference in voltage induced by electromagnetic induction in each detection coil. Also good. The two detection coils may be connected in series to form a bridge circuit. By providing two detection coils, grinding burn can be detected.

この発明の上記各構成の焼入れ深さ測定装置において、前記いずれかのコイルは、磁性材料の鉄心を有するものであっても良い。また、そのコイルの鉄心の少なくとも測定対象物との接触面を保護コーティングで覆っても良い。保護コーティングで覆われていると、測定対象物の被測定面に励磁コイルの磁心先端部を摺動させても測定対象物に傷が付くのを防止することができる。   In the quenching depth measuring device of each of the above configurations of the present invention, any one of the coils may have a magnetic material iron core. Further, at least the contact surface of the iron core of the coil with the object to be measured may be covered with a protective coating. If it is covered with a protective coating, it is possible to prevent the measuring object from being damaged even if the magnetic core tip of the exciting coil slides on the surface to be measured of the measuring object.

この発明の上記各構成の焼入れ深さ測定装置において、前記信号処理回路で計算された焼入れ深さを設定範囲を比較し、設定範囲から外れている場合に焼入れ異常と判定する焼入れ異常判定手段を設けても良い。   In the quenching depth measuring device of each of the above configurations of the present invention, a quenching abnormality determination means for comparing the quenching depth calculated by the signal processing circuit with a set range and determining a quenching abnormality when it is out of the set range. It may be provided.

この発明における第４の焼入れ深さ測定方法は、交流磁界を発生する励磁コイルを、転動装置または転動装置部品からなる測定対象物に対向させ、この励磁コイルのインピーダンスの変化から、前記測定対象物の焼入れ深さを測定する焼入れ深さ測定方法であって、前記測定対象物の温度および励磁コイルの温度のいずれか片方または両方を測定し、その測定した温度を用いて焼入れ深さの測定値の補正を行うことを特徴とする。前記温度の測定は、非接触温度センサにより行っても良い。
この方法の場合、例えば、測定対象物の温度を用いて、測定値を補正するので、測定対象物の温度変化による透磁率変化の影響が補正され、測定対象物の温度に左右されることなく、転動装置や転動装置部品の焼入れ深さを精度良く測定することができる。なお、測定値の補正は、励磁コイルのインピーダンスや、検出コイルで検出される磁束、電圧の振幅、位相などのコイルで直接に検出される測定値につき行うようにしても、また得られたインピーダンス、磁束、電圧の振幅、位相などから計算した焼入れ深さの値を補正を行うようにしても良く、結果として焼入れ深さの値が温度で補正されていれば良い。また、測定対象物の温度変化による透磁率変化の影響だけでなく、励磁コイルや検出コイルの温度変化による透磁率変化の影響もあるため、この励磁コイルや検出コイルの温度変化に対する補正を行うことで、焼入れ深さの測定精度が向上する。測定対象物の温度に対する補正と併用した場合は、さらに精度良く測定することができる。
前記温度の測定を非接触温度センサにより行う場合は、温度センサを測定対象物等に接触させることによる測定値の誤差の発生が回避される。 According to a fourth quenching depth measurement method of the present invention, an excitation coil that generates an alternating magnetic field is made to face a measurement object composed of a rolling device or rolling device parts, and the measurement is performed based on a change in impedance of the excitation coil. A quenching depth measurement method for measuring a quenching depth of an object, wherein one or both of the temperature of the object to be measured and the temperature of an exciting coil is measured, and the quenching depth is measured using the measured temperature. The measurement value is corrected. The temperature may be measured with a non-contact temperature sensor.
In the case of this method, for example, the measurement value is corrected using the temperature of the measurement object, so that the influence of the permeability change due to the temperature change of the measurement object is corrected and is not affected by the temperature of the measurement object. The quenching depth of the rolling device and rolling device parts can be measured with high accuracy. It should be noted that the correction of the measurement value may be performed on the measurement value directly detected by the coil such as the impedance of the excitation coil, the magnetic flux detected by the detection coil, the amplitude of the voltage, and the phase, and the obtained impedance. The quenching depth value calculated from the magnetic flux, voltage amplitude, phase, and the like may be corrected. As a result, the quenching depth value only needs to be corrected by the temperature. In addition to the influence of the permeability change due to the temperature change of the measurement object, there is also the influence of the permeability change due to the temperature change of the excitation coil and the detection coil. Thus, the measurement accuracy of the quenching depth is improved. When used in combination with correction of the temperature of the measurement object, it is possible to measure with higher accuracy.
In the case where the temperature is measured by a non-contact temperature sensor, the occurrence of a measurement value error caused by bringing the temperature sensor into contact with an object to be measured is avoided.

この発明における第４の焼入れ深さ測定装置は、交流磁界を発生し、転動装置または転動装置部品からなる測定対象物に交流磁界を印加する励磁コイルと、この励磁コイルのインピーダンスの変化を検出するインピーダンス検出回路と、このインピーダンス検出回路で検出したインピーダンスの変化から前記測定対象物の焼入れ深さを計算する信号処理回路と、前記測定対象物の温度および前記励磁コイルの温度のいずれか一方または両方を測定する温度センサと、この温度センサで測定された温度により前記信号処理回路で計算する焼入れ深さを補正する補正手段とを備えたことを特徴とする。
この構成の場合、第４の焼入れ深さ測定方法につき述べたと同様に、測定対象物の温度変化による透磁率変化の影響が補正され、測定対象物の温度に左右されることなく、転動装置や転動装置部品の焼入れ深さを精度良く測定することができる。 A fourth quenching depth measuring device according to the present invention generates an alternating magnetic field, applies an alternating magnetic field to a measurement object composed of a rolling device or rolling device parts, and changes in impedance of the exciting coil. An impedance detection circuit to detect, a signal processing circuit to calculate the quenching depth of the measurement object from a change in impedance detected by the impedance detection circuit, and either one of the temperature of the measurement object and the temperature of the excitation coil Or a temperature sensor for measuring both, and a correction means for correcting the quenching depth calculated by the signal processing circuit based on the temperature measured by the temperature sensor.
In the case of this configuration, as described in the fourth quenching depth measurement method, the influence of the magnetic permeability change due to the temperature change of the measurement object is corrected, and the rolling device is not affected by the temperature of the measurement object. And the quenching depth of rolling device parts can be accurately measured.

この発明の第１の焼入れ深さ測定方法は、交流磁界を発生する励磁コイルを、転動装置または転動装置部品からなる測定対象物に対向させ、この励磁コイルのインピーダンスの変化から、前記測定対象物の焼入れ深さを測定する焼入れ深さ測定方法であって、前記励磁コイルを測定対象物に接触させた状態で測定するため、煩雑なギャップ管理を要することなく、転動装置や転動装置部品の焼入れ深さを精度良く測定することができる。また、励磁コイルとは別に検出コイル等の検出手段を設けることが不要で、測定装置が簡単な構成のもので済む。   According to the first quenching depth measurement method of the present invention, an excitation coil that generates an alternating magnetic field is made to face a measurement object composed of a rolling device or rolling device parts, and the measurement is performed based on a change in impedance of the exciting coil. A quenching depth measurement method for measuring a quenching depth of an object, wherein the excitation coil is measured in a state where the exciting coil is in contact with the object to be measured. The quenching depth of the device parts can be measured with high accuracy. Further, it is not necessary to provide a detection means such as a detection coil separately from the excitation coil, and the measurement apparatus can be of a simple configuration.

この発明の第２の焼入れ深さ測定方法は、転動装置または転動装置部品からなる測定対象物を交流磁界内に配置し、この状態で測定対象物から発生する磁束を検出コイルで検出し、この検出された磁束から、測定対象物の焼入れ深さを測定する焼入れ深さ測定方法であって、前記検出コイルを測定対象物に接触させた状態で測定するため、煩雑なギャップ管理を要することなく、転動装置や転動装置部品の焼入れ深さを精度良く測定することができる。   According to a second quenching depth measuring method of the present invention, a measuring object consisting of a rolling device or rolling device parts is arranged in an AC magnetic field, and a magnetic flux generated from the measuring object in this state is detected by a detection coil. A quenching depth measurement method for measuring the quenching depth of the measurement object from the detected magnetic flux, and the measurement coil is measured in a state in which the detection coil is in contact with the measurement object, so that complicated gap management is required. Therefore, the quenching depth of the rolling device and the rolling device parts can be measured with high accuracy.

この発明の第３の焼入れ深さ測定方法は、転動装置または転動装置部品からなる測定対象物にコイルによって交流磁界を印加し、この交流磁界を印加するコイル、またはこのコイルとは別に設けたコイルから検出される物理量から前記測定対象物の焼入れ深さを測定する焼入れ深さ測定方法であって、前記物理量を検出するコイルを測定対象物に接触させた状態で測定するため、煩雑なギャップ管理を要することなく、転動装置や転動装置部品の焼入れ深さを精度良く測定することができる。   A third quenching depth measuring method of the present invention is such that an alternating magnetic field is applied to a measuring object consisting of a rolling device or rolling device parts by a coil, and a coil for applying the alternating magnetic field or a separate coil is provided. A quenching depth measurement method for measuring a quenching depth of the measurement object from a physical quantity detected from the coil, since the measurement is performed in a state where the coil for detecting the physical quantity is in contact with the measurement object. The quenching depth of the rolling device and the rolling device parts can be accurately measured without requiring gap management.

この発明の第４の焼入れ深さ測定方法は、交流磁界を発生する励磁コイルを、転動装置または転動装置部品からなる測定対象物に対向させ、この励磁コイルのインピーダンスの変化から、前記測定対象物の焼入れ深さを測定する焼入れ深さ測定方法であって、前記測定対象物の温度および励磁コイルの温度のいずれか片方または両方を測定し、その測定した温度を用いて焼入れ深さの測定値の補正を行うことを特徴とするため、測定対象物の温度、あるいはコイルの温度に左右されることなく、転動装置や転動装置部品の焼入れ深さを精度良く測定することができる。また、励磁コイルとは別に検出コイル等の検出手段を設けることが不要で、測定装置が簡単な構成のもので済む。   According to a fourth quenching depth measurement method of the present invention, an excitation coil that generates an alternating magnetic field is opposed to a measurement object made of a rolling device or a rolling device component, and the measurement is performed based on a change in impedance of the exciting coil. A quenching depth measurement method for measuring a quenching depth of an object, wherein one or both of the temperature of the object to be measured and the temperature of an exciting coil is measured, and the quenching depth is measured using the measured temperature. Since the measurement value is corrected, it is possible to accurately measure the quenching depth of the rolling device and the rolling device parts without being influenced by the temperature of the object to be measured or the temperature of the coil. . Further, it is not necessary to provide a detection means such as a detection coil separately from the excitation coil, and the measurement apparatus can be of a simple configuration.

この発明の第１の焼入れ深さ測定装置は、交流磁界を発生し、転動装置または転動装置部品からなる測定対象物に交流磁界を印加する励磁コイルと、この励磁コイルのインピーダンスの変化を検出するインピーダンス検出回路と、このインピーダンス検出回路で検出したインピーダンスの変化から前記測定対象物の焼入れ深さを計算する信号処理回路とを備え、前記励磁コイルは前記測定対象物に接触させた状態で前記交流磁界を印加するものであるため、煩雑なギャップ管理を要することなく、転動装置や転動装置部品の焼入れ深さを精度良く測定することができる。また、励磁コイルとは別に検出コイル等の検出手段を設けることが不要で、測定装置が簡単な構成のもので済む。   A first quenching depth measuring device according to the present invention generates an alternating magnetic field, applies an alternating magnetic field to a measurement object composed of a rolling device or rolling device parts, and changes the impedance of the exciting coil. An impedance detection circuit for detecting, and a signal processing circuit for calculating a quenching depth of the measurement object from a change in impedance detected by the impedance detection circuit, wherein the excitation coil is in contact with the measurement object Since the AC magnetic field is applied, the quenching depth of the rolling device and the rolling device parts can be accurately measured without requiring complicated gap management. Further, it is not necessary to provide a detection means such as a detection coil separately from the excitation coil, and the measurement apparatus can be of a simple configuration.

この発明の第２の焼入れ深さ測定装置は、交流磁界を発生し、転動装置または転動装置部品からなる測定対象物に交流磁界を印加する励磁コイルと、この印加された交流磁界により前記測定対象物から発生する磁束を検出する検出コイルと、この検出コイルで検出された磁束から測定対象物の焼入れ深さを計算する信号処理回路とを備え、前記検出コイルは、前記測定対象物に接触させた状態で前記磁束の検出を行うものであるため、煩雑なギャップ管理を要することなく、転動装置や転動装置部品の焼入れ深さを精度良く測定することができる。   The second quenching depth measuring device of the present invention generates an AC magnetic field, applies an AC magnetic field to a measurement object composed of a rolling device or rolling device parts, and the applied AC magnetic field to A detection coil for detecting a magnetic flux generated from the measurement object; and a signal processing circuit for calculating a quenching depth of the measurement object from the magnetic flux detected by the detection coil, wherein the detection coil is attached to the measurement object. Since the magnetic flux is detected in a contacted state, the quenching depth of the rolling device and the rolling device parts can be accurately measured without requiring complicated gap management.

この発明の第３の焼入れ深さ測定装置は、転動装置または転動装置部品からなる測定対象物に交流磁界を印加するコイルと、この交流磁界を印加するコイル、またはこのコイルとは別に設けたコイルから検出される物理量を検出する検出手段と、この検出手段の検出値から前記測定対象物の焼入れ深さを測定する信号処理回路とを備え、前記物理量を検出するコイルは、測定対象物に接触させた状態で測定するものであるため、煩雑なギャップ管理を要することなく、転動装置や転動装置部品の焼入れ深さを精度良く測定することができる。   A third quenching depth measuring apparatus according to the present invention is provided separately from a coil for applying an alternating magnetic field to a measurement object composed of a rolling device or rolling device parts, a coil for applying the alternating magnetic field, or this coil. A detection unit for detecting a physical quantity detected from the coil and a signal processing circuit for measuring a quenching depth of the measurement object from a detection value of the detection unit, and the coil for detecting the physical quantity is a measurement object Therefore, it is possible to accurately measure the quenching depth of the rolling device and the rolling device parts without requiring complicated gap management.

この発明の第４の焼入れ深さ測定装置は、交流磁界を発生し、転動装置または転動装置部品からなる測定対象物に交流磁界を印加する励磁コイルと、この励磁コイルのインピーダンスの変化を検出するインピーダンス検出回路と、このインピーダンス検出回路で検出したインピーダンスの変化から前記測定対象物の焼入れ深さを計算する信号処理回路と、前記測定対象物の温度および前記励磁コイルの温度のいずれか一方または両方を測定する温度センサと、この温度センサで測定された温度により前記信号処理回路で計算する焼入れ深さを補正する補正手段とを備えたため、測定対象物の温度、あるいはコイルの温度に左右されることなく、転動装置や転動装置部品の焼入れ深さを精度良く測定することができる。また、励磁コイルとは別に検出コイル等の検出手段を設けることが不要で、簡単な構成となる。   A fourth quenching depth measuring apparatus according to the present invention generates an alternating magnetic field and applies an alternating magnetic field to a measurement object composed of a rolling device or rolling device parts, and changes in impedance of the exciting coil. An impedance detection circuit to detect, a signal processing circuit to calculate the quenching depth of the measurement object from a change in impedance detected by the impedance detection circuit, and either one of the temperature of the measurement object and the temperature of the excitation coil Or a temperature sensor for measuring both and a correction means for correcting the quenching depth calculated by the signal processing circuit based on the temperature measured by the temperature sensor. Therefore, the quenching depth of the rolling device or rolling device parts can be accurately measured. Further, it is not necessary to provide a detection means such as a detection coil separately from the excitation coil, and the configuration is simple.

この発明の焼入れ深さ測定方法の一実施形態を示す概略図である。It is the schematic which shows one Embodiment of the quenching depth measuring method of this invention. 同焼入れ深さ測定方法に用いられる焼入れ深さ測定装置の他の実施形態の概略図である。It is the schematic of other embodiment of the quenching depth measuring apparatus used for the quenching depth measuring method. 同焼入れ深さ測定方法に用いられる焼入れ深さ測定装置のさらに他の実施形態の概略図である。It is the schematic of other embodiment of the quenching depth measuring apparatus used for the quenching depth measuring method. 同焼入れ深さ測定方法に用いられる焼入れ深さ測定装置のさらに他の実施形態の概略図である。It is the schematic of other embodiment of the quenching depth measuring apparatus used for the quenching depth measuring method. 同焼入れ深さ測定方法に用いられる焼入れ深さ測定装置のさらに他の実施形態の概略図である。It is the schematic of other embodiment of the quenching depth measuring apparatus used for the quenching depth measuring method. 同焼入れ深さ測定方法に用いられる焼入れ深さ測定装置のさらに他の実施形態の概略図である。It is the schematic of other embodiment of the quenching depth measuring apparatus used for the quenching depth measuring method. 同焼入れ深さ測定方法に用いられる焼入れ深さ測定装置のさらに他の実施形態の概略図である。It is the schematic of other embodiment of the quenching depth measuring apparatus used for the quenching depth measuring method. 同焼入れ深さ測定方法に用いられる焼入れ深さ測定装置のさらに他の実施形態の概略図である。It is the schematic of other embodiment of the quenching depth measuring apparatus used for the quenching depth measuring method. 同焼入れ深さ測定方法に用いられる焼入れ深さ測定装置のさらに他の実施形態の概略図である。It is the schematic of other embodiment of the quenching depth measuring apparatus used for the quenching depth measuring method. 同焼入れ深さ測定方法に用いられる焼入れ深さ測定装置のさらに他の実施形態の概略図である。It is the schematic of other embodiment of the quenching depth measuring apparatus used for the quenching depth measuring method. この発明の焼入れ深さ測定方法の他の実施形態を示す概略図である。It is the schematic which shows other embodiment of the quenching depth measuring method of this invention. （Ａ）は同焼入れ深さ測定方法に用いられる焼入れ深さ測定装置における検出ヘッドの平面図、（Ｂ）は同正面図である。(A) is a top view of the detection head in the quenching depth measuring apparatus used for the quenching depth measuring method, (B) is the front view. この発明のさらに他の実施形態にかかる焼入れ深さ測定装置を用いた焼入れ深さ測定の説明図である。It is explanatory drawing of the quenching depth measurement using the quenching depth measuring apparatus concerning further another embodiment of this invention. 焼入れ深さ測定装置の具体的な使用例を示す説明図である。It is explanatory drawing which shows the specific usage example of a quenching depth measuring apparatus.

この発明の第１の実施形態を図１と共に説明する。図１は、この実施形態の焼入れ深さ測定方法に用いられる焼入れ深さ測定装置の概略図を示す。この焼入れ深さ測定装置１は、測定対象物２０を励磁する励磁コイル３を有する検出ヘッド２と、励磁された前記測定対象物２０からの磁化信号を検出する検出手段であるインピーダンス検出回路５を含む制御部１０とを備える。この場合の測定対象物２０は、軸受などの転動装置または転動装置の構成部品である。   A first embodiment of the present invention will be described with reference to FIG. FIG. 1 shows a schematic diagram of a quenching depth measuring device used in the quenching depth measuring method of this embodiment. The quenching depth measuring apparatus 1 includes a detection head 2 having an excitation coil 3 that excites a measurement object 20 and an impedance detection circuit 5 that is detection means for detecting a magnetization signal from the excited measurement object 20. Including a control unit 10. The measuring object 20 in this case is a rolling device such as a bearing or a component of the rolling device.

検出ヘッド２における励磁コイル３は、その磁心となる鉄心４にコイル巻線が巻かれている。励磁コイル３には、励磁のための交流磁界を発生させる交流電流が制御部１０の電源１１から供給される。この励磁コイル３を導電体である測定対象物２０に接近させると、励磁コイル３がつくる磁界による電磁誘導で測定対象物２０に渦電流が発生する。この渦電流は励磁コイル３がつくる磁界と反対方向の磁界を発生させ、また測定対象物２０中でも渦電流により損失が発生するので、励磁コイル３のインピーダンスが変化する。そこで、検出手段である前記インピーダンス検出回路５は、測定対象物２０からの磁化信号として前記インピーダンスを検出する。具体的には、インピーダンス検出回路５は、励磁コイル３に誘導される電圧の大きさや、励磁コイル３を流れる電流と電圧の位相差を測定し、これらの値から励磁コイル３のインピーダンスを算出する。   The exciting coil 3 in the detection head 2 has a coil winding wound around an iron core 4 serving as a magnetic core. An alternating current that generates an alternating magnetic field for excitation is supplied to the exciting coil 3 from the power supply 11 of the control unit 10. When the exciting coil 3 is brought close to the measuring object 20 which is a conductor, an eddy current is generated in the measuring object 20 by electromagnetic induction by a magnetic field generated by the exciting coil 3. This eddy current generates a magnetic field in a direction opposite to the magnetic field generated by the exciting coil 3, and loss occurs due to the eddy current in the measurement target 20, so that the impedance of the exciting coil 3 changes. Therefore, the impedance detection circuit 5 serving as detection means detects the impedance as a magnetization signal from the measurement object 20. Specifically, the impedance detection circuit 5 measures the magnitude of the voltage induced in the excitation coil 3 and the phase difference between the current flowing through the excitation coil 3 and the voltage, and calculates the impedance of the excitation coil 3 from these values. .

測定対象物２０に流れる渦電流は、測定対象物２０の導電率，透磁率により変化する。そこで、測定対象物２０の導電率，透磁率に応じて励磁コイル３のインピーダンスも変化するので、前記インピーダンス検出回路５で検出される励磁コイル３のインピーダンス変化から測定対象物２０の材質変化を検出することができる。   The eddy current flowing through the measurement object 20 varies depending on the conductivity and magnetic permeability of the measurement object 20. Therefore, since the impedance of the exciting coil 3 also changes in accordance with the conductivity and permeability of the measuring object 20, the material change of the measuring object 20 is detected from the impedance change of the exciting coil 3 detected by the impedance detection circuit 5. can do.

また、測定対象物２０となる転動装置やその構成部品は、焼入れにより硬度が大きくなると、透磁率が母材よりも低下する。これにより、焼入れ深さに応じて励磁コイル３の磁路中の磁気抵抗が変化することから、測定対象物２０の内部を透過する磁束が変化し、測定対象物２０中に誘導される渦電流も変化するので、焼入れ深さに応じて励磁コイル３のインピーダンが変化することになる。   In addition, when the hardness of the rolling device and its components that are the measurement object 20 is increased by quenching, the magnetic permeability is lower than that of the base material. Thereby, since the magnetic resistance in the magnetic path of the exciting coil 3 changes according to the quenching depth, the magnetic flux passing through the inside of the measuring object 20 changes, and the eddy current induced in the measuring object 20 Therefore, the impedance of the exciting coil 3 changes according to the quenching depth.

そこで、測定対象物２０となる転動装置やその構成部品について、焼入れ深さと励磁コイル３のインピーダンスとの関係を予め測定しておき、その関係式のグラフである検量線を作成しておけば、その検量線に測定された励磁コイル３のインピーダンスを当てはめることで、焼入れ深さを測定することが可能である。前記制御部１０は、インピーダンス検出回路５のほかに、このインピーダンス検出回路５が検出したインピーダンスから焼入れ深さを求める信号処理回路６を有する。この信号処理回路６には、前記検量線のデータを書き込んだメモリが含まれる。   Therefore, if the relationship between the quenching depth and the impedance of the exciting coil 3 is measured in advance for the rolling device to be measured 20 and its components, a calibration curve that is a graph of the relational expression is created. By applying the measured impedance of the exciting coil 3 to the calibration curve, it is possible to measure the quenching depth. In addition to the impedance detection circuit 5, the control unit 10 has a signal processing circuit 6 that obtains the quenching depth from the impedance detected by the impedance detection circuit 5. The signal processing circuit 6 includes a memory in which the calibration curve data is written.

この焼入れ深さ測定方法では、上記焼入れ深さ測定装置１を用いることにより、検出手段であるインピーダンス検出回路５の検出する励磁コイル３のインピーダンスから、測定対象物２０の焼入れ深さを測定する。
ところで、励磁コイル３のインピーダンスは、励磁コイル３と測定対象物２０の間のギャップや、励磁コイル３の姿勢つまり測定対象物２０に対する角度によって変化する。そこで、この焼入れ深さ測定方法では、検出ヘッド２の先端部、つまり励磁コイル３の磁心である鉄心４の測定対象物２０に対向する先端部を、測定対象物２０の被測定面に接触させた状態で前記測定を行う。 In this quenching depth measurement method, the quenching depth of the measuring object 20 is measured from the impedance of the exciting coil 3 detected by the impedance detection circuit 5 serving as a detecting means by using the quenching depth measuring device 1.
By the way, the impedance of the excitation coil 3 varies depending on the gap between the excitation coil 3 and the measurement object 20 and the attitude of the excitation coil 3, that is, the angle with respect to the measurement object 20. Therefore, in this quenching depth measurement method, the tip of the detection head 2, that is, the tip of the iron core 4, which is the magnetic core of the exciting coil 3, is brought into contact with the surface to be measured of the measurement object 20. The measurement is performed in the state.

このように、検出ヘッド２の先端部を測定対象物２０の被測定面に接触させた状態で
焼入れ深さの測定を行うことにより、励磁コイル３と測定対象物２０との間の煩雑なギャップ管理が不要となり、焼入れ深さを精度良く行うことができる。
また、この実施形態の場合、励磁コイル３のインピーダンスから焼入れ深さを測定するので、励磁コイル３とは別に検出用のコイルを設ける必要がなく、装置の測定装置の構成が簡素になる。 Thus, the complicated gap between the exciting coil 3 and the measuring object 20 is obtained by measuring the quenching depth with the tip of the detection head 2 in contact with the surface to be measured of the measuring object 20. No management is required, and the quenching depth can be accurately performed.
In the case of this embodiment, since the quenching depth is measured from the impedance of the exciting coil 3, it is not necessary to provide a detection coil separately from the exciting coil 3, and the configuration of the measuring device of the apparatus is simplified.

図２は、焼入れ深さ測定装置の他の実施形態を示す。この焼入れ深さ測定装置１では、測定対象物２０からの磁化信号を検出する検出手段として、図１の実施形態におけるインピーダンス検出回路５に代えて、励磁コイル３の磁心である鉄心４に巻かれた検出コイル７と、電磁誘導により前記検出コイル７に誘導される電圧の振幅および位相を検出する振幅・位相検出回路８とを用いている。振幅・位相検出回路８は制御部１０に設けられる。励磁コイル３に、励磁のための高周波の交流磁界を発生させる交流電流が制御部１０の電源１１から供給され、励磁コイル３が発生する交流磁界により測定対象物２０に渦電流が誘導されることは、図１の実施形態の場合と同様である。   FIG. 2 shows another embodiment of the quenching depth measuring apparatus. In this quenching depth measuring apparatus 1, a detecting means for detecting a magnetization signal from the measurement object 20 is wound around an iron core 4 that is a magnetic core of the exciting coil 3 instead of the impedance detection circuit 5 in the embodiment of FIG. 1. The detection coil 7 and an amplitude / phase detection circuit 8 for detecting the amplitude and phase of the voltage induced in the detection coil 7 by electromagnetic induction are used. The amplitude / phase detection circuit 8 is provided in the control unit 10. An alternating current that generates a high-frequency alternating magnetic field for excitation is supplied to the exciting coil 3 from the power supply 11 of the control unit 10, and an eddy current is induced in the measurement object 20 by the alternating magnetic field generated by the exciting coil 3. Is the same as in the embodiment of FIG.

検出コイル７には、励磁コイル３のつくる磁束と渦電流がつくる磁束を合成した磁束による電磁誘導で発生する電圧が誘導される。すなわち、検出コイル７は、測定対象物２０からの磁化信号として、励磁コイル３のつくる磁束と渦電流がつくる磁束を合成した磁束による電磁誘導で発生する電圧を検出する。前記制御部１０は、振幅・位相検出回路８のほかに、この振幅・位相検出回路８が検出した検出コイル７の電圧の振幅または位相から焼入れ深さを求める信号処理回路６Ａを有する。この信号処理回路６Ａには、予め測定した焼入れ深さと検出コイル７の電圧の振幅または位相との関係を示す検量線のデータを書き込んだメモリが含まれる。これにより、信号処理回路６Ａでは、振幅・位相検出回路８が検出した検出コイル７の電圧の振幅または位相を前記検量線に当てはめることで、焼入れ深さが測定される。   The detection coil 7 is induced with a voltage generated by electromagnetic induction using a magnetic flux obtained by synthesizing the magnetic flux generated by the exciting coil 3 and the magnetic flux generated by the eddy current. That is, the detection coil 7 detects, as a magnetization signal from the measurement object 20, a voltage generated by electromagnetic induction by a magnetic flux obtained by synthesizing the magnetic flux generated by the exciting coil 3 and the magnetic flux generated by the eddy current. In addition to the amplitude / phase detection circuit 8, the control unit 10 includes a signal processing circuit 6 </ b> A for obtaining a quenching depth from the amplitude or phase of the voltage of the detection coil 7 detected by the amplitude / phase detection circuit 8. The signal processing circuit 6A includes a memory in which calibration curve data indicating the relationship between the quenching depth measured in advance and the amplitude or phase of the voltage of the detection coil 7 is written. Thereby, in the signal processing circuit 6A, the quenching depth is measured by applying the amplitude or phase of the voltage of the detection coil 7 detected by the amplitude / phase detection circuit 8 to the calibration curve.

また、前記信号処理回路６Ａは、測定された焼入れ深さが所定の範囲から外れたとき、焼入れ異常であると判定する焼入れ異常判定手段９を有する。これにより、測定対象物２０の焼入れ異常を簡単に知ることができる。前記所定の範囲は、任意に設定される設定範囲である。制御部１０の次段には、制御部１０での測定結果などのデータを表示する表示部１２が接続されている。この表示部１２に、測定された焼入れ深さや焼入れ異常の判定結果などが表示される。   Further, the signal processing circuit 6A includes a quenching abnormality determination unit 9 that determines that the quenching abnormality is present when the measured quenching depth is out of a predetermined range. Thereby, the quenching abnormality of the measuring object 20 can be easily known. The predetermined range is a set range that is arbitrarily set. A display unit 12 that displays data such as measurement results obtained by the control unit 10 is connected to the next stage of the control unit 10. The display unit 12 displays the measured quenching depth, the determination result of quenching abnormality, and the like.

この実施形態では、励磁コイル３の磁心である鉄心４の測定対象物２０の被測定面に接触する先端部に保護コーティング１３が施されている。保護コーティング１３の材料として、例えばエポキシ系樹脂など、測定対象物２０の材料とされる金属材料よりも柔らかく、金属材料に傷を付けることのないものが用いられる。このように、鉄心４における測定対象物２０の被測定面に接触する先端部に保護コーティング１３を施すことにより、測定対象物２０の被測定面に検出ヘッド２を摺動させても測定対象物２０に傷が付くのを防止することができる。   In this embodiment, a protective coating 13 is applied to the tip portion of the iron core 4 that is the magnetic core of the exciting coil 3 that comes into contact with the surface to be measured. As the material of the protective coating 13, a material that is softer than the metal material used as the material of the measurement target 20, such as an epoxy resin, and does not damage the metal material is used. Thus, even if the detection head 2 is slid on the surface to be measured of the measuring object 20 by applying the protective coating 13 to the tip of the iron core 4 that contacts the surface to be measured of the measuring object 20, the measuring object is measured. It is possible to prevent the 20 from being scratched.

図３は、焼入れ深さ測定装置のさらに他の実施形態を示す。この焼入れ深さ測定装置１は、図２の実施形態において、検出コイル７に誘導される電圧の振幅および位相を検出する振幅・位相検出回路８に代えて、検出コイル７に誘導される電圧を積分して検出コイル７に鎖交する磁束を算出する鎖交磁束算出回路１４を用いている。制御部１０は、鎖交磁束算出回路１４のほかに、この鎖交磁束算出回路１４が算出した鎖交磁束から焼入れ深さを求める信号処理回路６Ｂを有する。この信号処理回路６Ｂには、予め測定した焼入れ深さと検出コイル７の鎖交磁束との関係を示す検量線のデータを書き込んだメモリが含まれる。これにより、信号処理回路６Ｂでは、鎖交磁束算出回路１４が算出した検出コイル７の鎖交磁束を前記検量線に当てはめることで、焼入れ深さが測定される。その他の構成は、図２の実施形態の場合と同様である。   FIG. 3 shows still another embodiment of the quenching depth measuring apparatus. In the embodiment shown in FIG. 2, the quenching depth measuring apparatus 1 uses the voltage induced in the detection coil 7 instead of the amplitude / phase detection circuit 8 that detects the amplitude and phase of the voltage induced in the detection coil 7. An interlinkage magnetic flux calculation circuit 14 that integrates and calculates a magnetic flux interlinking with the detection coil 7 is used. In addition to the interlinkage magnetic flux calculation circuit 14, the control unit 10 includes a signal processing circuit 6B that obtains the quenching depth from the interlinkage magnetic flux calculated by the interlinkage magnetic flux calculation circuit 14. The signal processing circuit 6B includes a memory in which calibration curve data indicating the relationship between the quenching depth measured in advance and the linkage flux of the detection coil 7 is written. Thereby, in the signal processing circuit 6B, the quenching depth is measured by applying the interlinkage magnetic flux of the detection coil 7 calculated by the interlinkage magnetic flux calculation circuit 14 to the calibration curve. Other configurations are the same as those in the embodiment of FIG.

図４は、焼入れ深さ測定装置のさらに他の実施形態を示す。この焼入れ深さ測定装置１は、図２の実施形態において、励磁コイル３の磁心をコ字状の鉄心４Ａとし、焼入れ深さの測定時には、その鉄心４Ａの両端を測定対象物２０の被測定面に接触させるものとしている。ここでは、鉄心４Ａの両端に保護コーティング１３（図２）を施していないが、保護コーティング１３を施しても良い。その他の構成は図２の実施形態の場合と同様である。   FIG. 4 shows still another embodiment of the quenching depth measuring apparatus. In the embodiment shown in FIG. 2, the quenching depth measuring apparatus 1 has a U-shaped iron core 4A as the magnetic core of the exciting coil 3, and when measuring the quenching depth, both ends of the iron core 4A are measured on the object 20 to be measured. It shall be in contact with the surface. Here, although the protective coating 13 (FIG. 2) is not applied to both ends of the iron core 4A, the protective coating 13 may be applied. Other configurations are the same as those in the embodiment of FIG.

この実施形態の場合も、前記コ字状の鉄心４Ａと測定対象物２０とで形成される磁路の抵抗が、測定対象物２０の焼入れ深さに応じて変化するので、検出コイル７に誘導される電圧の振幅、および励磁コイル３と検出コイル７の電圧の位相差が変化し、振幅・位相検出回路８がその振幅および位相差を検出する。信号処理回路６Ａでは、振幅・位相検出回路８が検出した振幅または位相差を予め作成した検量線に当てはめることにより、焼入れ深さを測定する。   Also in this embodiment, the resistance of the magnetic path formed by the U-shaped iron core 4 </ b> A and the measurement object 20 changes according to the quenching depth of the measurement object 20. The amplitude of the applied voltage and the phase difference between the excitation coil 3 and the detection coil 7 change, and the amplitude / phase detection circuit 8 detects the amplitude and phase difference. In the signal processing circuit 6A, the quenching depth is measured by applying the amplitude or phase difference detected by the amplitude / phase detection circuit 8 to a calibration curve prepared in advance.

図５は、焼入れ深さ測定装置のさらに他の実施形態を示す。この焼入れ深さ測定装置１は、図２の実施形態において、測定対象物２０からの磁化信号を検出する検出手段として、励磁コイル３の磁心である鉄心４に巻かれた２つの検出コイル７Ａ，７Ｂと、電磁誘導により前記両検出コイル７Ａ，７Ｂに誘導される電圧の差を検出する電圧差検出回路１５とを用いている。電圧差検出回路１５は制御部１０に設けられる。２つの検出コイル７Ａ，７Ｂは互いに逆方向に巻かれて直列接続され、これら両検出コイル７Ａ，７Ｂと電圧差検出回路１５とでブリッジ回路１６が構成される。これにより、２つの検出コイル７Ａ，７Ｂには逆位相の電圧が誘導され、ブリッジ回路１６によりこれら両検出コイル７Ａ，７Ｂに誘導された電圧の差分だけを増幅して電圧差検出回路１５で検出することができる。   FIG. 5 shows still another embodiment of the quenching depth measuring apparatus. In the embodiment of FIG. 2, the quenching depth measuring device 1 has two detection coils 7 </ b> A wound around an iron core 4 that is a magnetic core of the exciting coil 3 as detection means for detecting a magnetization signal from the measurement object 20. 7B and a voltage difference detection circuit 15 that detects a difference between voltages induced in the detection coils 7A and 7B by electromagnetic induction. The voltage difference detection circuit 15 is provided in the control unit 10. The two detection coils 7A and 7B are wound in opposite directions and connected in series, and the detection circuit 7A and 7B and the voltage difference detection circuit 15 constitute a bridge circuit 16. As a result, opposite phase voltages are induced in the two detection coils 7A and 7B, and only the difference between the voltages induced in the two detection coils 7A and 7B by the bridge circuit 16 is amplified and detected by the voltage difference detection circuit 15. can do.

制御部１０は、電圧差検出回路１５のほかに、この電圧差検出回路１５が検出した電圧差から焼入れ深さを求める信号処理回路６Ｃを有する。この信号処理回路６Ｃには、予め測定した焼入れ深さと検出コイル７Ａ，７Ｂの電圧差との関係を示す検量線のデータを書き込んだメモリが含まれる。これにより、信号処理回路６Ｃでは、電圧差検出回路１５が検出した検出コイル７Ａ，７Ｂの電圧差を前記検量線に当てはめることで、焼入れ深さが測定される。その他の構成は、図２の実施形態の場合と同様である。   In addition to the voltage difference detection circuit 15, the control unit 10 includes a signal processing circuit 6 </ b> C that obtains the quenching depth from the voltage difference detected by the voltage difference detection circuit 15. The signal processing circuit 6C includes a memory in which calibration curve data indicating the relationship between the quenching depth measured in advance and the voltage difference between the detection coils 7A and 7B is written. Thereby, in the signal processing circuit 6C, the quenching depth is measured by applying the voltage difference between the detection coils 7A and 7B detected by the voltage difference detection circuit 15 to the calibration curve. Other configurations are the same as those in the embodiment of FIG.

この実施形態の場合、励磁コイル３の鉄心４に２つの検出コイル７Ａ，７Ｂを互いに逆方向に巻き、これら両検出コイル７Ａ，７Ｂを直列接続して、両検出コイル７Ａ，７Ｂに誘導される電圧の差を検出する電圧差検出回路１５とでブリッジ回路を構成しているので、測定対象物２０の透磁率変化、つまり焼入れ深さを感度良く測定することができる。   In the case of this embodiment, two detection coils 7A and 7B are wound around the iron core 4 of the exciting coil 3 in opposite directions, and both the detection coils 7A and 7B are connected in series to be guided to both the detection coils 7A and 7B. Since the bridge circuit is constituted by the voltage difference detection circuit 15 that detects the voltage difference, the permeability change of the measurement object 20, that is, the quenching depth can be measured with high sensitivity.

図６は、焼入れ深さ測定装置のさらに他の実施形態を示す。この焼入れ深さ測定装置１では、図１の実施形態において、検出ヘッド２の基板２２に、前記励磁コイル３のほかに、測定対象物２０の温度を測定する測定対象物用温度センサ２３を実装している。測定対象物用温度センサ２３は、前記基板２２の励磁コイル３が突出する側に設けられ、励磁コイル３の磁心である鉄心４の先端部を測定対象物２０の被測定面に接触させた測定状態において、測定対象物用温度センサ２３が測定対象物２０に近接するようにされている。この測定対象物用温度センサ２３として、例えばサーモバイルのような非接触温度センサが用いられる。   FIG. 6 shows still another embodiment of the quenching depth measuring apparatus. In the quenching depth measuring apparatus 1, in the embodiment of FIG. 1, a measurement object temperature sensor 23 for measuring the temperature of the measurement object 20 is mounted on the substrate 22 of the detection head 2 in addition to the excitation coil 3. is doing. The measurement object temperature sensor 23 is provided on the side of the substrate 22 where the excitation coil 3 protrudes, and the measurement is performed by bringing the tip of the iron core 4 that is the magnetic core of the excitation coil 3 into contact with the surface to be measured of the measurement object 20. In the state, the temperature sensor 23 for the measurement object is set close to the measurement object 20. As the measurement object temperature sensor 23, for example, a non-contact temperature sensor such as a surf mobile is used.

また、励磁コイル３の磁心である鉄心４にも、鉄心４の温度を測定するコイル用温度センサ２４が設けられている。このコイル用温度センサ２４としては、サーミスタ、熱電対、測温抵抗体などを用いることができる。測定対象物用温度センサ２３およびコイル用温度センサ２４は、制御部１０に設けられた温度センサ回路２５に接続されており、この温度センサ回路２５で各温度センサ２３，２４の検出信号が数値化される。   A coil temperature sensor 24 that measures the temperature of the iron core 4 is also provided in the iron core 4 that is the magnetic core of the exciting coil 3. As the coil temperature sensor 24, a thermistor, a thermocouple, a resistance temperature detector, or the like can be used. The measurement object temperature sensor 23 and the coil temperature sensor 24 are connected to a temperature sensor circuit 25 provided in the control unit 10, and the detection signals of the temperature sensors 23 and 24 are digitized by the temperature sensor circuit 25. Is done.

測定対象物２０の温度が変化するとその透磁率も変化するので、測定対象物２０の温度変化はインピーダンス検出回路５が検出するインピーダンにも影響を及ぼす。また、励磁コイル３の磁心である鉄心４の温度が変化するとその透磁率も変化するので、鉄心４の温度変化もインピーダンス検出回路５が検出するインピーダンスに影響を及ぼす。そこで、制御部１０の信号処理回路６には、温度センサ回路２５で数値化される前記各温度センサ２３，２４の測定値に基づき、インピーダンス検出回路５が検出するインピーダンスを補正する補正手段２６が設けられている。これにより、信号処理回路６では、温度センサ２３，２４の測定する測定値に基づき補正したインピーダンスを、検量線に当てはめることで、測定対象物２０の焼入れ深さを測定する。   When the temperature of the measurement object 20 changes, the magnetic permeability thereof also changes. Therefore, the temperature change of the measurement object 20 also affects the impedance detected by the impedance detection circuit 5. Further, when the temperature of the iron core 4 that is the magnetic core of the exciting coil 3 changes, the magnetic permeability also changes. Therefore, the temperature change of the iron core 4 also affects the impedance detected by the impedance detection circuit 5. Therefore, the signal processing circuit 6 of the control unit 10 includes correction means 26 that corrects the impedance detected by the impedance detection circuit 5 based on the measured values of the temperature sensors 23 and 24 that are digitized by the temperature sensor circuit 25. Is provided. Thereby, in the signal processing circuit 6, the quenching depth of the measuring object 20 is measured by applying the impedance corrected based on the measured values measured by the temperature sensors 23 and 24 to the calibration curve.

このように、インピーダンス検出回路５が検出する励磁コイル３のインピーダンスを、温度センサ２３，２４で測定される測定対象物２０および励磁コイル３の磁心である鉄心４の温度に基づき補正することにより、測定対象物２０や前記鉄心４の温度変化による透磁率変化の影響を受けることなく、測定対象物２０の焼入れ深さを精度良く行うことができる。この実施形態では、測定対象物２０の温度だけでなく、励磁コイル３の磁心である鉄心４の温度もインピーダンスを補正するデータとして加えているので、それだけ測定精度を向上させることができるが、測定対象物２０の温度だけでインピーダンを補正するようにしても十分な測定精度を得ることができる。   Thus, by correcting the impedance of the excitation coil 3 detected by the impedance detection circuit 5 based on the temperature of the measurement object 20 measured by the temperature sensors 23 and 24 and the temperature of the iron core 4 that is the magnetic core of the excitation coil 3, The quenching depth of the measuring object 20 can be accurately performed without being affected by the magnetic permeability change due to the temperature change of the measuring object 20 or the iron core 4. In this embodiment, not only the temperature of the measuring object 20 but also the temperature of the iron core 4 that is the magnetic core of the exciting coil 3 is added as data for correcting the impedance, so that the measurement accuracy can be improved accordingly. Even if the impedance is corrected only by the temperature of the object 20, sufficient measurement accuracy can be obtained.

図７は、焼入れ深さ測定装置のさらに他の実施形態を示す。この焼入れ深さ測定装置１では、図２の実施形態において、検出ヘッド２の基板２２に、前記励磁コイル３の磁心である鉄心４のほかに、測定対象物２０の温度を測定する測定対象物用温度センサ２３を実装している。測定対象物用温度センサ２３が、前記基板２２の鉄心４が突出する側に設けられ、鉄心４の先端部を測定対象物２０の被測定面に接触させた測定状態において、測定対象物用温度センサ２３が測定対象物２０に近接するようにされていることは、図６の実施形態の場合と同様である。   FIG. 7 shows still another embodiment of the quenching depth measuring apparatus. In the quenching depth measuring apparatus 1, in the embodiment of FIG. 2, in addition to the iron core 4 that is the magnetic core of the exciting coil 3, the measuring object that measures the temperature of the measuring object 20 is formed on the substrate 22 of the detection head 2. An industrial temperature sensor 23 is mounted. A measurement object temperature sensor 23 is provided on the side of the substrate 22 from which the iron core 4 protrudes, and the measurement object temperature is measured in a measurement state in which the tip of the iron core 4 is in contact with the surface to be measured of the measurement object 20. The sensor 23 is set close to the measurement object 20 as in the embodiment of FIG.

また、鉄心４にも、鉄心４の温度を測定するコイル用温度センサ２４が設けられている。測定対象物用温度センサ２３およびコイル用温度センサ２４は、制御部１０に設けられた温度センサ回路２５に接続されており、この温度センサ回路２５で各温度センサ２３，２４の検出信号が数値化される。信号処理回路６Ａには、温度センサ回路２５で数値化される前記各温度センサ２３，２４の測定値に基づき、振幅・位相検出回路８が検出する検出コイル７の電圧の振幅または位相差を補正する補正手段２６が設けられている。   The iron core 4 is also provided with a coil temperature sensor 24 for measuring the temperature of the iron core 4. The measurement object temperature sensor 23 and the coil temperature sensor 24 are connected to a temperature sensor circuit 25 provided in the control unit 10, and the detection signals of the temperature sensors 23 and 24 are digitized by the temperature sensor circuit 25. Is done. The signal processing circuit 6A corrects the amplitude or phase difference of the voltage of the detection coil 7 detected by the amplitude / phase detection circuit 8 based on the measured values of the temperature sensors 23 and 24 digitized by the temperature sensor circuit 25. Correction means 26 is provided.

この実施形態の場合も、信号処理回路６Ａでは、温度センサ２３，２４の測定する測定値に基づき補正した検出コイル７の電圧の振幅または位相差を、検量線に当てはめることで、測定対象物２０の焼入れ深さを測定する。これにより測定対象物２０や前記鉄心４Ａの温度変化による透磁率変化の影響を受けることなく、測定対象物２０の焼入れ深さの測定を精度良く行うことができる。   Also in this embodiment, in the signal processing circuit 6A, the amplitude or phase difference of the voltage of the detection coil 7 corrected based on the measurement values measured by the temperature sensors 23 and 24 is applied to the calibration curve, so that the measurement object 20 Measure the quenching depth. Thereby, the quenching depth of the measuring object 20 can be accurately measured without being affected by the change in permeability due to the temperature change of the measuring object 20 or the iron core 4A.

図８は、焼入れ深さ測定装置のさらに他の実施形態を示す。この焼入れ深さ測定装置１では、図３の実施形態において、検出ヘッド２の基板２２に、前記励磁コイル３の磁心である鉄心４のほかに、測定対象物２０の温度を測定する測定対象物用温度センサ２３を実装している。測定対象物用温度センサ２３が、前記基板２２の鉄心４が突出する側に設けられ、鉄心４の先端部を測定対象物２０の被測定面に接触させた測定状態において、測定対象物用温度センサ２３が測定対象物２０に近接するようにされていることは、図６の実施形態の場合と同様である。   FIG. 8 shows still another embodiment of the quenching depth measuring apparatus. In the quenching depth measuring apparatus 1, in the embodiment of FIG. 3, in addition to the iron core 4 that is the magnetic core of the exciting coil 3 on the substrate 22 of the detection head 2, the measuring object that measures the temperature of the measuring object 20 is measured. An industrial temperature sensor 23 is mounted. A measurement object temperature sensor 23 is provided on the side of the substrate 22 from which the iron core 4 protrudes, and the measurement object temperature is measured in a measurement state in which the tip of the iron core 4 is in contact with the surface to be measured of the measurement object 20. The sensor 23 is set close to the measurement object 20 as in the embodiment of FIG.

また、鉄心４にも、鉄心４の温度を測定するコイル用温度センサ２４が設けられている。測定対象物用温度センサ２３およびコイル用温度センサ２４は、制御部１０に設けられた温度センサ回路２５に接続されており、この温度センサ回路２５で各温度センサ２３，２４の検出信号が数値化される。信号処理回路６Ｂには、温度センサ回路２５で数値化される前記各温度センサ２３，２４の測定値に基づき、振幅・位相検出回路８が検出する検出コイル７の電圧の振幅または位相差を補正する補正手段２６が設けられている。   The iron core 4 is also provided with a coil temperature sensor 24 for measuring the temperature of the iron core 4. The measurement object temperature sensor 23 and the coil temperature sensor 24 are connected to a temperature sensor circuit 25 provided in the control unit 10, and the detection signals of the temperature sensors 23 and 24 are digitized by the temperature sensor circuit 25. Is done. The signal processing circuit 6B corrects the amplitude or phase difference of the voltage of the detection coil 7 detected by the amplitude / phase detection circuit 8 based on the measured values of the temperature sensors 23 and 24 digitized by the temperature sensor circuit 25. Correction means 26 is provided.

この実施形態の場合も、信号処理回路６Ｂでは、温度センサ２３，２４の測定する測定値に基づき補正した鎖交磁束算出回路１４が算出した鎖交磁束を補正し、その補正値を検量線に当てはめることで、測定対象物２０の焼入れ深さを測定する。これにより測定対象物２０や前記鉄心４Ａの温度変化による透磁率変化の影響を受けることなく、測定対象物２０の焼入れ深さの測定を精度良く行うことができる。   Also in this embodiment, the signal processing circuit 6B corrects the flux linkage calculated by the flux linkage calculation circuit 14 corrected based on the measured values measured by the temperature sensors 23 and 24, and uses the corrected value as a calibration curve. By applying, the quenching depth of the measuring object 20 is measured. Thereby, the quenching depth of the measuring object 20 can be accurately measured without being affected by the change in permeability due to the temperature change of the measuring object 20 or the iron core 4A.

図９は、焼入れ深さ測定装置のさらに他の実施形態を示す。この焼入れ深さ測定装置１では、図４の実施形態において、検出ヘッド２の基板２２に、前記励磁コイル３の磁心である鉄心４Ａのほかに、測定対象物２０の温度を測定する測定対象物用温度センサ２３を実装している。測定対象物用温度センサ２３が、前記基板２２の鉄心４Ａが突出する側に設けられ、鉄心４Ａの先端部を測定対象物２０の被測定面に接触させた測定状態において、測定対象物用温度センサ２３が測定対象物２０に近接するようにされていることは、図６の実施形態の場合と同様である。   FIG. 9 shows still another embodiment of the quenching depth measuring apparatus. In the quenching depth measuring apparatus 1, in the embodiment of FIG. 4, in addition to the iron core 4 </ b> A that is the magnetic core of the exciting coil 3, the measuring object that measures the temperature of the measuring object 20 is formed on the substrate 22 of the detection head 2. An industrial temperature sensor 23 is mounted. In the measurement state in which the measurement object temperature sensor 23 is provided on the side of the substrate 22 where the iron core 4A protrudes, and the tip of the iron core 4A is in contact with the surface to be measured of the measurement object 20, the measurement object temperature is measured. The sensor 23 is set close to the measurement object 20 as in the embodiment of FIG.

また、鉄心４Ａにも、鉄心４Ａの温度を測定するコイル用温度センサ２４が設けられている。測定対象物用温度センサ２３およびコイル用温度センサ２４は、制御部１０に設けられた温度センサ回路２５に接続されており、この温度センサ回路２５で各温度センサ２３，２４の検出信号が数値化される。信号処理回路６Ａには、温度センサ回路２５で数値化される前記各温度センサ２３，２４の測定値に基づき、振幅・位相検出回路８が検出する検出コイル７の電圧の振幅または位相差を補正する補正手段２６が設けられている。   The iron core 4A is also provided with a coil temperature sensor 24 for measuring the temperature of the iron core 4A. The measurement object temperature sensor 23 and the coil temperature sensor 24 are connected to a temperature sensor circuit 25 provided in the control unit 10, and the detection signals of the temperature sensors 23 and 24 are digitized by the temperature sensor circuit 25. Is done. The signal processing circuit 6A corrects the amplitude or phase difference of the voltage of the detection coil 7 detected by the amplitude / phase detection circuit 8 based on the measured values of the temperature sensors 23 and 24 digitized by the temperature sensor circuit 25. Correction means 26 is provided.

この実施形態の場合も、信号処理回路６Ａでは、温度センサ２３，２４の測定する測定値に基づき補正した検出コイル７の電圧の振幅または位相差を検量線に当てはめることで、測定対象物２０の焼入れ深さを測定する。これにより測定対象物２０や前記鉄心４Ａの温度変化による透磁率変化の影響を受けることなく、測定対象物２０の焼入れ深さの測定を精度良く行うことができる。   Also in this embodiment, in the signal processing circuit 6A, the amplitude or phase difference of the voltage of the detection coil 7 corrected based on the measurement values measured by the temperature sensors 23 and 24 is applied to the calibration curve, so that the measurement object 20 is measured. Measure the quenching depth. Thereby, the quenching depth of the measuring object 20 can be accurately measured without being affected by the change in permeability due to the temperature change of the measuring object 20 or the iron core 4A.

図１０は、焼入れ深さ測定装置のさらに他の実施形態を示す。この焼入れ深さ測定装置１では、図５の実施形態において、検出ヘッド２の基板２２に、前記励磁コイル３の磁心である鉄心４のほかに、測定対象物２０の温度を測定する測定対象物用温度センサ２３を実装している。測定対象物用温度センサ２３が、前記基板２２の鉄心４が突出する側に設けられ、鉄心４の先端部を測定対象物２０の被測定面に接触させた測定状態において、測定対象物用温度センサ２３が測定対象物２０に近接するようにされていることは、図６の実施形態の場合と同様である。   FIG. 10 shows still another embodiment of the quenching depth measuring apparatus. In the quenching depth measuring apparatus 1, in the embodiment of FIG. 5, in addition to the iron core 4 that is the magnetic core of the exciting coil 3, the measuring object that measures the temperature of the measuring object 20 is formed on the substrate 22 of the detection head 2. An industrial temperature sensor 23 is mounted. A measurement object temperature sensor 23 is provided on the side of the substrate 22 from which the iron core 4 protrudes, and the measurement object temperature is measured in a measurement state in which the tip of the iron core 4 is in contact with the surface to be measured of the measurement object 20. The sensor 23 is set close to the measurement object 20 as in the embodiment of FIG.

また、鉄心４にも、鉄心４の温度を測定するコイル用温度センサ２４が設けられている。測定対象物用温度センサ２３およびコイル用温度センサ２４は、制御部１０に設けられた温度センサ回路２５に接続されており、この温度センサ回路２５で各温度センサ２３，２４の検出信号が数値化される。信号処理回路６Ｃには、温度センサ回路２５で数値化される前記各温度センサ２３，２４の測定値に基づき、電圧差検出回路１５が検出した検出コイル７Ａ，７Ｂの電圧差を補正する補正手段２６が設けられている。   The iron core 4 is also provided with a coil temperature sensor 24 for measuring the temperature of the iron core 4. The measurement object temperature sensor 23 and the coil temperature sensor 24 are connected to a temperature sensor circuit 25 provided in the control unit 10, and the detection signals of the temperature sensors 23 and 24 are digitized by the temperature sensor circuit 25. Is done. The signal processing circuit 6C includes correction means for correcting the voltage difference between the detection coils 7A and 7B detected by the voltage difference detection circuit 15 based on the measured values of the temperature sensors 23 and 24 digitized by the temperature sensor circuit 25. 26 is provided.

この実施形態の場合も、信号処理回路６Ｃでは、温度センサ２３，２４の測定する測定値に基づき電圧差検出回路１５が検出した検出コイル７Ａ，７Ｂの電圧差を補正し、その補正値を検量線に当てはめることで、測定対象物２０の焼入れ深さを測定する。これにより測定対象物２０や前記鉄心４の温度変化による透磁率変化の影響を受けることなく、測定対象物２０の焼入れ深さの測定を精度良く行うことができる。   Also in this embodiment, the signal processing circuit 6C corrects the voltage difference between the detection coils 7A and 7B detected by the voltage difference detection circuit 15 based on the measured values measured by the temperature sensors 23 and 24, and the calibration value is calibrated. The quenching depth of the measuring object 20 is measured by applying it to the line. Thereby, the quenching depth of the measuring object 20 can be accurately measured without being affected by the change in magnetic permeability due to the temperature change of the measuring object 20 or the iron core 4.

この発明のさらに他の実施形態を図１１および図１２と共に説明する。図１１は、この実施形態の焼入れ深さ測定装置を用いて測定対象物の焼入れ深さを測定する場合の説明図を示す。この焼入れ深さ測定装置１は、測定対象物２０を励磁する励磁コイル３を有する検出ヘッド２と、励磁された前記測定対象物２０からの磁化信号を検出する検出手段であるインピーダンス検出回路５を含む制御部１０とを備える。この場合の測定対象物２０も、軸受などの転動装置または転動装置の構成部品である。   Still another embodiment of the present invention will be described with reference to FIGS. FIG. 11 shows an explanatory diagram in the case of measuring the quenching depth of the measurement object using the quenching depth measuring apparatus of this embodiment. The quenching depth measuring apparatus 1 includes a detection head 2 having an excitation coil 3 that excites a measurement object 20 and an impedance detection circuit 5 that is detection means for detecting a magnetization signal from the excited measurement object 20. Including a control unit 10. The measuring object 20 in this case is also a rolling device such as a bearing or a component of the rolling device.

検出ヘッド２における励磁コイル３は、その磁心となる鉄心４に巻かれており、基板２２上に実装されている。励磁コイル３には、励磁のための交流磁界を発生させる交流電流が制御部１０の電源１１から供給される。この励磁コイル３を導電体である測定対象物２０に接近させると、励磁コイル３がつくる磁界による電磁誘導で測定対象物２０に渦電流が発生する。この渦電流は励磁コイル３がつくる磁界と反対方向の磁界を発生させ、また測定対象物２０中でも渦電流により損失が発生するので、励磁コイル３のインピーダンスが変化する。そこで、検出手段である前記インピーダンス検出回路５は、測定対象物２０からの磁化信号として前記インピーダンスを検出する。具体的には、インピーダンス検出回路５は、励磁コイル３に誘導される電圧の大きさや、励磁コイル３を流れる電流と電圧の位相差を測定し、これらの値から励磁コイル３のインピーダンスを算出する。   The exciting coil 3 in the detection head 2 is wound around an iron core 4 serving as a magnetic core and mounted on a substrate 22. An alternating current that generates an alternating magnetic field for excitation is supplied to the exciting coil 3 from the power supply 11 of the control unit 10. When the exciting coil 3 is brought close to the measuring object 20 which is a conductor, an eddy current is generated in the measuring object 20 by electromagnetic induction by a magnetic field generated by the exciting coil 3. This eddy current generates a magnetic field in a direction opposite to the magnetic field generated by the exciting coil 3, and loss occurs due to the eddy current in the measurement target 20, so that the impedance of the exciting coil 3 changes. Therefore, the impedance detection circuit 5 serving as detection means detects the impedance as a magnetization signal from the measurement object 20. Specifically, the impedance detection circuit 5 measures the magnitude of the voltage induced in the excitation coil 3 and the phase difference between the current flowing through the excitation coil 3 and the voltage, and calculates the impedance of the excitation coil 3 from these values. .

測定対象物２０に流れる渦電流は、測定対象物２０の導電率，透磁率により変化する。そこで、測定対象物２０の導電率，透磁率に応じて励磁コイル３のインピーダンスも変化するので、前記インピーダンス検出回路５で検出される励磁コイル３のインピーダンス変化から測定対象物２０の材質変化を検出することができる。   The eddy current flowing through the measurement object 20 varies depending on the conductivity and magnetic permeability of the measurement object 20. Therefore, since the impedance of the exciting coil 3 also changes in accordance with the conductivity and permeability of the measuring object 20, the material change of the measuring object 20 is detected from the impedance change of the exciting coil 3 detected by the impedance detection circuit 5. can do.

また、測定対象物２０となる転動装置やその構成部品は、焼入れにより硬度が大きくなると、透磁率が母材よりも低下する。これにより、焼入れ深さに応じて励磁コイル３の磁路中の磁気抵抗が変化することから、測定対象物２０の内部を透過する磁束が変化し、測定対象物２０中に誘導される渦電流も変化するので、焼入れ深さに応じて励磁コイル３のインピーダンが変化することになる。   In addition, when the hardness of the rolling device and its components that are the measurement object 20 is increased by quenching, the magnetic permeability is lower than that of the base material. Thereby, since the magnetic resistance in the magnetic path of the exciting coil 3 changes according to the quenching depth, the magnetic flux passing through the inside of the measuring object 20 changes, and the eddy current induced in the measuring object 20 Therefore, the impedance of the exciting coil 3 changes according to the quenching depth.

そこで、測定対象物２０となる転動装置やその構成部品について、焼入れ深さと励磁コイル３のインピーダンスとの関係を予め測定しておき、その関係式のグラフである検量線を作成しておけば、その検量線に測定された励磁コイル３のインピーダンスを当てはめることで、焼入れ深さを測定することが可能である。前記制御部１０は、インピーダンス検出回路５のほかに、このインピーダンス検出回路５が検出したインピーダンスから焼入れ深さを求める信号処理回路６を有する。この信号処理回路６には、前記検量線のデータを書き込んだメモリが含まれる。ここまでの構成は、図１の実施形態における焼入れ深さ測定装置１の場合と同様である。   Therefore, if the relationship between the quenching depth and the impedance of the exciting coil 3 is measured in advance for the rolling device to be measured 20 and its components, a calibration curve that is a graph of the relational expression is created. By applying the measured impedance of the exciting coil 3 to the calibration curve, it is possible to measure the quenching depth. In addition to the impedance detection circuit 5, the control unit 10 has a signal processing circuit 6 that obtains the quenching depth from the impedance detected by the impedance detection circuit 5. The signal processing circuit 6 includes a memory in which the calibration curve data is written. The structure so far is the same as that of the case of the quenching depth measuring apparatus 1 in the embodiment of FIG.

この焼入れ深さ測定では、前記励磁コイル３を、その磁心である鉄心４の先端部が測定対象物２０の被測定面と所定のギャップを介して対向するように配置して測定を行う点がが、これまでの接触方式の測定と異なる。   In this quenching depth measurement, the exciting coil 3 is measured by placing the exciting coil 3 such that the tip of the iron core 4 faces the surface to be measured of the measuring object 20 with a predetermined gap therebetween. However, it is different from the conventional contact method measurement.

検出ヘッド２の基板２２には、前記励磁コイル３のほかに、測定対象物２０の温度を測定する測定対象物用温度センサ２３が実装されている。測定対象物用温度センサ２３は、前記基板２２の励磁コイル３が突出する側に設けられ、励磁コイル３を所定のギャップを介して測定対象物２０に対向配置させた測定状態において、測定対象物用温度センサ２３が測定対象物２０に近接するようにされている。この測定対象物用温度センサ２３として、例えばサーモバイルのような非接触温度センサが用いられる。   On the substrate 22 of the detection head 2, in addition to the excitation coil 3, a measurement object temperature sensor 23 for measuring the temperature of the measurement object 20 is mounted. The temperature sensor 23 for the measurement object is provided on the side of the substrate 22 where the excitation coil 3 protrudes. In the measurement state in which the excitation coil 3 is disposed to face the measurement object 20 through a predetermined gap, the measurement object is measured. The temperature sensor 23 is arranged close to the measuring object 20. As the measurement object temperature sensor 23, for example, a non-contact temperature sensor such as a surf mobile is used.

また、励磁コイル３の磁心である鉄心４にも、鉄心４の温度を測定するコイル用温度センサ２４が設けられている。このコイル用温度センサ２４としては、サーミスタ、熱電対、測温抵抗体などを用いることができる。測定対象物用温度センサ２３およびコイル用温度センサ２４は、制御部１０に設けられた温度センサ回路２５に接続されており、この温度センサ回路２５で各温度センサ２３，２４の検出信号が数値化される。図１１のように、温度センサ回路２５の一部２５Ａを、検出ヘッド２における基板２２の裏面に実装しても良い。図１２（Ａ），（Ｂ）は、前記検出ヘッド２の平面図および正面図を示す。   A coil temperature sensor 24 that measures the temperature of the iron core 4 is also provided in the iron core 4 that is the magnetic core of the exciting coil 3. As the coil temperature sensor 24, a thermistor, a thermocouple, a resistance temperature detector, or the like can be used. The measurement object temperature sensor 23 and the coil temperature sensor 24 are connected to a temperature sensor circuit 25 provided in the control unit 10, and the detection signals of the temperature sensors 23 and 24 are digitized by the temperature sensor circuit 25. Is done. As shown in FIG. 11, a part 25 </ b> A of the temperature sensor circuit 25 may be mounted on the back surface of the substrate 22 in the detection head 2. 12A and 12B show a plan view and a front view of the detection head 2.

測定対象物２０の温度が変化するとその透磁率も変化するので、測定対象物２０の温度変化はインピーダンス検出回路５が検出するインピーダンにも影響を及ぼす。また、励磁コイル３の磁心である鉄心４の温度が変化するとその透磁率も変化するので、鉄心４の温度変化もインピーダンス検出回路５が検出するインピーダンスに影響を及ぼす。そこで、制御部１０の信号処理回路６には、温度センサ回路２５で数値化される前記各温度センサ２３，２４の測定値に基づき、インピーダンス検出回路５が検出するインピーダンスを補正する補正手段２６が設けられている。これにより、信号処理回路６では、温度センサ２３，２４の測定する測定値に基づき補正したインピーダンスを、上記した検量線に当てはめることで、測定対象物２０の焼入れ深さを測定する。   When the temperature of the measurement object 20 changes, the magnetic permeability thereof also changes. Therefore, the temperature change of the measurement object 20 also affects the impedance detected by the impedance detection circuit 5. Further, when the temperature of the iron core 4 that is the magnetic core of the exciting coil 3 changes, the magnetic permeability also changes. Therefore, the temperature change of the iron core 4 also affects the impedance detected by the impedance detection circuit 5. Therefore, the signal processing circuit 6 of the control unit 10 includes correction means 26 that corrects the impedance detected by the impedance detection circuit 5 based on the measured values of the temperature sensors 23 and 24 that are digitized by the temperature sensor circuit 25. Is provided. Thereby, in the signal processing circuit 6, the quenching depth of the measuring object 20 is measured by applying the impedance corrected based on the measured values measured by the temperature sensors 23 and 24 to the above-described calibration curve.

このように、インピーダンス検出回路５が検出する励磁コイル３のインピーダンスを、温度センサ２３，２４で測定される測定対象物２０および励磁コイル３の磁心である鉄心４の温度に基づき補正することにより、測定対象物２０や前記鉄心４の温度変化による透磁率変化の影響を受けることなく、測定対象物２０の焼入れ深さの測定を精度良く行うことができる。この実施形態では、測定対象物２０の温度だけでなく、励磁コイル３の磁心である鉄心４の温度もインピーダンスを補正するデータとして加えているので、それだけ測定精度を向上させることができるが、測定対象物２０の温度だけでインピーダンを補正するようにしても十分な測定精度を得ることができる。   Thus, by correcting the impedance of the excitation coil 3 detected by the impedance detection circuit 5 based on the temperature of the measurement object 20 measured by the temperature sensors 23 and 24 and the temperature of the iron core 4 that is the magnetic core of the excitation coil 3, The quenching depth of the measurement object 20 can be accurately measured without being affected by the change in permeability due to the temperature change of the measurement object 20 or the iron core 4. In this embodiment, not only the temperature of the measuring object 20 but also the temperature of the iron core 4 that is the magnetic core of the exciting coil 3 is added as data for correcting the impedance, so that the measurement accuracy can be improved accordingly. Even if the impedance is corrected only by the temperature of the object 20, sufficient measurement accuracy can be obtained.

図１３は、焼入れ深さ測定装置のさらに他の実施形態を示す。この焼入れ深さ測定装置１では、測定対象物２０からの磁化信号を検出する検出手段として、図１１の実施形態におけるインピーダンス検出回路５に代えて、励磁コイル３の磁心であるコ字状の鉄心４Ａに巻かれた検出コイル７と、電磁誘導により前記検出コイル７に誘導される電圧の振幅および励磁コイル３の電圧との位相差を検出する振幅・位相検出回路８とを用いている。検出ヘッド２は、励磁コイル３、その磁心であるコ字状の鉄心４Ａ、測定対象物用温度センサ２３Ａ、および前記鉄心４Ａに設けられたコイル用温度センサ２４などを備える。焼入れ深さの測定時には、コ字状の鉄心４Ａの両端を測定対象物２０の被測定面に接触させるものとしている。この測定状態で、測定対象物用温度センサ２３Ａは、測定対象物２０の被測定面に接触する位置に配置される。振幅・位相検出回路８は制御部１０に設けられる。励磁コイル３に、励磁のための交流磁界を発生させる交流電流が制御部１０の電源１１から供給され、励磁コイル３が発生する交流磁界により測定対象物２０に渦電流が誘導されること、各温度センサ２３Ａ，２４の検出信号を数値化する温度センサ回路２５が制御部１０に設けられることは、図１１の実施形態の場合と同様である。   FIG. 13 shows still another embodiment of the quenching depth measuring apparatus. In this quenching depth measuring apparatus 1, a U-shaped iron core, which is a magnetic core of the exciting coil 3, is used instead of the impedance detection circuit 5 in the embodiment of FIG. 11 as detection means for detecting the magnetization signal from the measurement object 20. A detection coil 7 wound around 4A and an amplitude / phase detection circuit 8 for detecting the phase difference between the amplitude of the voltage induced in the detection coil 7 by electromagnetic induction and the voltage of the excitation coil 3 are used. The detection head 2 includes an exciting coil 3, a U-shaped iron core 4A that is a magnetic core thereof, a temperature sensor 23A for a measurement object, a coil temperature sensor 24 provided on the iron core 4A, and the like. At the time of measuring the quenching depth, both ends of the U-shaped iron core 4A are brought into contact with the surface to be measured of the measuring object 20. In this measurement state, the measurement object temperature sensor 23 </ b> A is disposed at a position in contact with the measurement target surface of the measurement object 20. The amplitude / phase detection circuit 8 is provided in the control unit 10. An alternating current that generates an alternating magnetic field for excitation is supplied to the exciting coil 3 from the power supply 11 of the control unit 10, and an eddy current is induced in the measurement object 20 by the alternating magnetic field generated by the exciting coil 3. The temperature sensor circuit 25 that digitizes the detection signals of the temperature sensors 23A and 24 is provided in the control unit 10 as in the case of the embodiment of FIG.

検出コイル７には、励磁コイル３のつくる磁束と渦電流がつくる磁束を合成した磁束による電磁誘導で発生する電圧が誘導される。すなわち、検出コイル７は、測定対象物２０からの磁化信号として、励磁コイル３のつくる磁束と渦電流がつくる磁束を合成した磁束による電磁誘導で発生する電圧を検出する。前記制御部１０は、振幅・位相検出回路８のほかに、この振幅・位相検出回路８が検出した検出コイル７の電圧の振幅または励磁コイル３の電圧との位相差から焼入れ深さを求める信号処理回路６Ａを有する。この信号処理回路６Ａには、予め測定した焼入れ深さと検出コイル７の電圧の振幅または位相差との関係を示す検量線のデータを書き込んだメモリが含まれる。これにより、信号処理回路６Ａでは、振幅・位相検出回路８が検出した検出コイル７の電圧の振幅または位相差を前記検量線に当てはめることで、焼入れ深さが測定される。この信号処理回路６Ａには、図１１の実施形態の場合と同様に、温度センサ回路２５で数値化される前記各温度センサ２３Ａ，２４の測定値に基づき、振幅・位相検出回路８が検出する検出コイル７の電圧の振幅または位相差を補正する補正手段２６が設けられている。   The detection coil 7 is induced with a voltage generated by electromagnetic induction using a magnetic flux obtained by synthesizing the magnetic flux generated by the exciting coil 3 and the magnetic flux generated by the eddy current. That is, the detection coil 7 detects, as a magnetization signal from the measurement object 20, a voltage generated by electromagnetic induction by a magnetic flux obtained by synthesizing the magnetic flux generated by the exciting coil 3 and the magnetic flux generated by the eddy current. In addition to the amplitude / phase detection circuit 8, the control unit 10 obtains a quenching depth from the amplitude of the voltage of the detection coil 7 detected by the amplitude / phase detection circuit 8 or the phase difference from the voltage of the excitation coil 3. It has a processing circuit 6A. The signal processing circuit 6A includes a memory in which calibration curve data indicating the relationship between the quenching depth measured in advance and the voltage amplitude or phase difference of the detection coil 7 is written. Thereby, in the signal processing circuit 6A, the quenching depth is measured by applying the amplitude or phase difference of the voltage of the detection coil 7 detected by the amplitude / phase detection circuit 8 to the calibration curve. In the signal processing circuit 6A, the amplitude / phase detection circuit 8 detects based on the measured values of the temperature sensors 23A and 24 that are digitized by the temperature sensor circuit 25, as in the case of the embodiment of FIG. Correction means 26 for correcting the amplitude or phase difference of the voltage of the detection coil 7 is provided.

この実施形態の場合も、前記コ字状の鉄心４Ａと測定対象物２０とで形成される磁路の抵抗が、測定対象物２０の焼入れ深さに応じて変化するので、検出コイル７に誘導される電圧の振幅、および励磁コイル３と検出コイル７の電圧の位相差が変化し、振幅・位相検出回路８がその振幅および位相差を検出する。信号処理回路６Ａでは、温度センサ２３Ａ，２４の測定する測定値に基づき補正した検出コイル７の電圧の振幅または位相差を、上記した検量線に当てはめることで、測定対象物２０の焼入れ深さが測定する。これにより測定対象物２０や前記鉄心４Ａの温度変化による透磁率変化の影響を受けることなく、測定対象物２０の焼入れ深さの測定を精度良く行うことができる。   Also in this embodiment, the resistance of the magnetic path formed by the U-shaped iron core 4 </ b> A and the measurement object 20 changes according to the quenching depth of the measurement object 20. The amplitude of the applied voltage and the phase difference between the excitation coil 3 and the detection coil 7 change, and the amplitude / phase detection circuit 8 detects the amplitude and phase difference. The signal processing circuit 6A applies the amplitude or phase difference of the voltage of the detection coil 7 corrected based on the measurement values measured by the temperature sensors 23A and 24 to the above-described calibration curve, so that the quenching depth of the measurement object 20 is increased. taking measurement. Thereby, the quenching depth of the measuring object 20 can be accurately measured without being affected by the change in permeability due to the temperature change of the measuring object 20 or the iron core 4A.

図１４は、上記した例えば接触式の焼入れ深さ測定装置１を使用して行う焼入れ深さ測定の具体例を示す。ここでは、転動装置の構成部品、具体的には軸受の内輪３１が測定対象物とされ、その転走面３１ａに施された焼入れの深さが測定される。焼入れ深さ測定装置１の検出ヘッド２は、移動可能な支持部材３２に支持され、支持部材３２の移動により軸受内輪３１の転走面３１ａの表面を摺動しながら深入れ深さを測定する。軸受内輪３１は回転軸３３の外径面に嵌着されており、回転軸３３を回転させることで、軸受内輪３１の転走面３１ａの全周面に前記検出ヘッド２を移動させて焼入れ深さを測定することができる。なお、非接触式の焼入れ深さ測定装置１を使用する場合には、支持部材３３に支持された検出ヘッド２が、軸受内輪３１の転走面３１ａの表面との間に所定のギャップを保って周方向に移動しながらや焼入れ深さを測定する。
オンライン上で、このように焼入れ深さ測定装置１を使用すると、軸受内輪３１の転走面３１ａの焼入れを全数検査することができるので、品質保証能力を高めることができる。 FIG. 14 shows a specific example of quenching depth measurement performed using the contact quenching depth measuring apparatus 1 described above. Here, the component parts of the rolling device, specifically, the inner ring 31 of the bearing is set as the measurement object, and the depth of quenching applied to the rolling surface 31a is measured. The detection head 2 of the quenching depth measuring device 1 is supported by a movable support member 32, and measures the depth of penetration while sliding the surface of the rolling surface 31a of the bearing inner ring 31 by the movement of the support member 32. . The bearing inner ring 31 is fitted on the outer diameter surface of the rotating shaft 33. By rotating the rotating shaft 33, the detection head 2 is moved to the entire peripheral surface of the rolling surface 31a of the bearing inner ring 31, and the quenching depth is increased. Can be measured. When the non-contact quenching depth measuring device 1 is used, the detection head 2 supported by the support member 33 keeps a predetermined gap between the surface of the rolling surface 31 a of the bearing inner ring 31. Measure the quenching depth while moving in the circumferential direction.
When the quenching depth measuring device 1 is used on-line in this manner, the quenching of the rolling surface 31a of the bearing inner ring 31 can be completely inspected, so that the quality assurance capability can be enhanced.

１…焼入れ深さ測定装置
３…励磁コイル
４，４Ａ…鉄心
５…インピーダンス検出回路
７，７Ａ，７Ｂ…検出コイル
８…振幅・位相検出回路
９…焼入れ異常判定手段
１０…制御部
１１…電源
１３…保護コーティング
１４…鎖交磁束算出回路
１５…電圧差検出回路
１６…ブリッジ回路
２０…測定対象物
２３，２３Ａ…測定対象物用温度センサ DESCRIPTION OF SYMBOLS 1 ... Hardening depth measuring device 3 ... Excitation coil 4, 4A ... Iron core 5 ... Impedance detection circuit 7,7A, 7B ... Detection coil 8 ... Amplitude / phase detection circuit 9 ... Hardening abnormality determination means 10 ... Control part 11 ... Power supply 13 ... Protective coating 14 ... Interlinkage magnetic flux calculation circuit 15 ... Voltage difference detection circuit 16 ... Bridge circuit 20 ... Measurement object 23, 23A ... Temperature sensor for measurement object

Claims (20)

交流磁界を発生する励磁コイルを、転動装置または転動装置部品からなる測定対象物に対向させ、この励磁コイルのインピーダンスの変化から、前記測定対象物の焼入れ深さを測定する焼入れ深さ測定方法であって、前記励磁コイルを測定対象物に接触させた状態で測定することを特徴とする焼入れ深さ測定方法。   A quenching depth measurement in which an excitation coil that generates an alternating magnetic field is opposed to a measurement object composed of a rolling device or rolling device parts, and a quenching depth of the measurement object is measured from a change in impedance of the excitation coil. It is a method, Comprising: It measures in the state which made the said excitation coil contact the measuring object, The quenching depth measuring method characterized by the above-mentioned. 転動装置または転動装置部品からなる測定対象物を交流磁界内に配置し、この状態で測定対象物から発生する磁束を検出コイルで検出し、この検出された磁束から、測定対象物の焼入れ深さを測定する焼入れ深さ測定方法であって、前記検出コイルを測定対象物に接触させた状態で測定することを特徴とする焼入れ深さ測定方法。   A measuring object consisting of a rolling device or rolling device parts is placed in an AC magnetic field, and in this state, the magnetic flux generated from the measuring object is detected by a detection coil, and the measurement object is quenched from the detected magnetic flux. A quenching depth measuring method for measuring a depth, wherein the quenching depth is measured in a state where the detection coil is in contact with a measurement object. 請求項２において、前記磁束を検出コイルで検出し、この検出された磁束から焼入れ深さを測定する処理が、電磁誘導により検出コイルに誘導される電圧の振幅または位相を検出し、この検出した振幅または位相から焼入れ深さを測定する処理である焼入れ深さ測定方法。   3. The process according to claim 2, wherein the magnetic flux is detected by a detection coil, and the process of measuring the quenching depth from the detected magnetic flux detects the amplitude or phase of the voltage induced in the detection coil by electromagnetic induction. A quenching depth measurement method, which is a process for measuring a quenching depth from amplitude or phase. 転動装置または転動装置部品からなる測定対象物にコイルによって交流磁界を印加し、この交流磁界を印加するコイル、またはこのコイルとは別に設けたコイルから検出される物理量から前記測定対象物の焼入れ深さを測定する焼入れ深さ測定方法であって、前記物理量を検出するコイルを測定対象物に接触させた状態で測定することを特徴とする焼入れ深さ測定方法。   An AC magnetic field is applied to a measurement object consisting of a rolling device or rolling device parts by a coil, and a physical quantity detected from a coil to which the AC magnetic field is applied or a coil provided separately from the coil is measured. A quenching depth measuring method for measuring a quenching depth, wherein the quenching depth is measured in a state where a coil for detecting the physical quantity is in contact with an object to be measured. 請求項１ないし請求項４のいずれか１項において、前記測定対象物の温度を測定し、その測定した温度を用いて焼入れ深さの測定値の補正を行う焼入れ深さ測定方法。   The quenching depth measurement method according to claim 1, wherein the temperature of the measurement object is measured, and the measured value of the quenching depth is corrected using the measured temperature. 請求項１ないし請求項５のいずれか１項において、前記測定対象物に接触させるコイルの温度を測定し、その測定した温度を用いて焼入れ深さの測定値の補正を行う焼入れ深さ測定方法。   The quenching depth measurement method according to any one of claims 1 to 5, wherein the temperature of the coil brought into contact with the measurement object is measured, and the measured value of the quenching depth is corrected using the measured temperature. . 請求項５または請求項６において、前記温度の測定を、非接触温度センサにより行う焼入れ深さ測定方法。   The quenching depth measurement method according to claim 5 or 6, wherein the temperature is measured by a non-contact temperature sensor. 交流磁界を発生し、転動装置または転動装置部品からなる測定対象物に交流磁界を印加する励磁コイルと、この励磁コイルのインピーダンスの変化を検出するインピーダンス検出回路と、このインピーダンス検出回路で検出したインピーダンスの変化から前記測定対象物の焼入れ深さを計算する信号処理回路とを備え、前記励磁コイルは前記測定対象物に接触させた状態で前記交流磁界を印加するものであることを特徴とする焼入れ深さ測定装置。   An excitation coil that generates an AC magnetic field and applies an AC magnetic field to a measurement object consisting of a rolling device or rolling device parts, an impedance detection circuit that detects a change in impedance of the excitation coil, and detection by this impedance detection circuit And a signal processing circuit for calculating a quenching depth of the measurement object from a change in impedance, wherein the excitation coil applies the alternating magnetic field while being in contact with the measurement object. Hardening depth measuring device. 交流磁界を発生し、転動装置または転動装置部品からなる測定対象物に交流磁界を印加する励磁コイルと、この印加された交流磁界により前記測定対象物から発生する磁束を検出する検出コイルと、この検出コイルで検出された磁束から測定対象物の焼入れ深さを計算する信号処理回路とを備え、前記検出コイルは、前記測定対象物に接触させた状態で前記磁束の検出を行うものであることを特徴とする焼入れ深さ測定装置。   An excitation coil that generates an alternating magnetic field and applies an alternating magnetic field to a measurement object composed of a rolling device or rolling device parts, and a detection coil that detects a magnetic flux generated from the measurement object by the applied alternating magnetic field, A signal processing circuit that calculates the quenching depth of the measurement object from the magnetic flux detected by the detection coil, and the detection coil detects the magnetic flux in contact with the measurement object. A quenching depth measuring device characterized by being. 請求項９において、前記検出コイルに誘導される電圧の振幅または位相を検出する検出回路を設け、前記信号処理回路は、前記検出回路で検出した振幅または位相から焼入れ深さを計算するものとした焼入れ深さ測定装置。   10. The detection circuit according to claim 9, wherein a detection circuit for detecting an amplitude or phase of a voltage induced in the detection coil is provided, and the signal processing circuit calculates a quenching depth from the amplitude or phase detected by the detection circuit. Hardening depth measuring device. 転動装置または転動装置部品からなる測定対象物に交流磁界を印加するコイルと、この交流磁界を印加するコイル、またはこのコイルとは別に設けたコイルから検出される物理量を検出する検出手段と、この検出手段の検出値から前記測定対象物の焼入れ深さを測定する信号処理回路とを備え、前記物理量を検出するコイルは、測定対象物に接触させた状態で測定するものであることを特徴とする焼入れ深さ測定装置。   A coil for applying an alternating magnetic field to a measuring object comprising a rolling device or rolling device parts, a coil for applying the alternating magnetic field, or a detecting means for detecting a physical quantity detected from a coil provided separately from the coil; A signal processing circuit for measuring the quenching depth of the measurement object from the detection value of the detection means, and the coil for detecting the physical quantity is to be measured while being in contact with the measurement object. A quenching depth measuring device. 請求項９において、前記検出コイルに誘導される電圧を積分することでコイルに鎖交する磁束を算出する鎖交磁束算出手段を設け、前記信号処理回路は、前記鎖交磁束算出手段で算出された磁束の大きさから研削焼けを検出する機能を有するものとした焼入れ深さ測定装置。   10. The linkage magnetic flux calculation means for calculating the magnetic flux linked to the coil by integrating the voltage induced in the detection coil is provided, and the signal processing circuit is calculated by the linkage flux calculation means. A quenching depth measuring device having a function of detecting grinding burn from the magnitude of the magnetic flux. 請求項９において、前記検出コイルを２個設け、前記信号処理回路は、前記各検出コイルに電磁誘導により誘導される電圧の差から研削焼けを検出する機能を有するものとした焼入れ深さ測定装置。   The quenching depth measuring device according to claim 9, wherein two detection coils are provided, and the signal processing circuit has a function of detecting grinding burn from a difference in voltage induced by electromagnetic induction in each detection coil. . 請求項１３において、前記２個の検出コイルは直列に接続されてブリッジ回路を形成する焼入れ深さ測定装置。   14. The quenching depth measuring device according to claim 13, wherein the two detection coils are connected in series to form a bridge circuit. 請求項７ないし請求項１３のいずれか１項において、前記いずれかのコイルは、磁性材料の鉄心を有する焼入れ深さ測定装置。   The quenching depth measuring device according to any one of claims 7 to 13, wherein any one of the coils includes an iron core made of a magnetic material. 請求項１５において、前記コイルの鉄心の少なくとも測定対象物との接触面を保護コーティングで覆った焼入れ深さ測定装置。   The quenching depth measuring device according to claim 15, wherein at least a contact surface of the iron core of the coil with a measurement object is covered with a protective coating. 請求項８ないし請求項１６のいずれか１項において、前記信号処理回路で計算された焼入れ深さを設定範囲を比較し、設定範囲から外れている場合に焼入れ異常と判定する焼入れ異常判定手段を設けた焼入れ深さ測定装置。   The quenching abnormality determining means according to any one of claims 8 to 16, wherein the quenching depth calculated by the signal processing circuit is compared with a set range, and when it is outside the set range, a quenching abnormality determining unit determines that the quenching is abnormal. A quenching depth measuring device provided. 交流磁界を発生する励磁コイルを、転動装置または転動装置部品からなる測定対象物に対向させ、この励磁コイルのインピーダンスの変化から、前記測定対象物の焼入れ深さを測定する焼入れ深さ測定方法であって、前記測定対象物の温度および励磁コイルの温度のいずれか片方または両方を測定し、その測定した温度を用いて焼入れ深さの測定値の補正を行うことを特徴とする焼入れ深さ測定方法。   A quenching depth measurement in which an excitation coil that generates an alternating magnetic field is opposed to a measurement object composed of a rolling device or rolling device parts, and a quenching depth of the measurement object is measured from a change in impedance of the excitation coil. A method of measuring a quenching depth by measuring one or both of the temperature of the object to be measured and the temperature of the exciting coil, and correcting the measured value of the quenching depth using the measured temperature. Measuring method. 請求項１８において、前記温度の測定を、非接触温度センサにより行う焼入れ深さ測定方法。   The quenching depth measurement method according to claim 18, wherein the temperature is measured by a non-contact temperature sensor. 交流磁界を発生し、転動装置または転動装置部品からなる測定対象物に交流磁界を印加する励磁コイルと、この励磁コイルのインピーダンスの変化を検出するインピーダンス検出回路と、このインピーダンス検出回路で検出したインピーダンスの変化から前記測定対象物の焼入れ深さを計算する信号処理回路と、前記測定対象物の温度および前記励磁コイルの温度のいずれか一方または両方を測定する温度センサと、この温度センサで測定された温度により前記信号処理回路で計算する焼入れ深さを補正する補正手段とを備えた焼入れ深さ測定装置。
An excitation coil that generates an AC magnetic field and applies an AC magnetic field to a measurement object consisting of a rolling device or rolling device parts, an impedance detection circuit that detects a change in impedance of the excitation coil, and detection by this impedance detection circuit A signal processing circuit for calculating the quenching depth of the measurement object from the impedance change, a temperature sensor for measuring one or both of the temperature of the measurement object and the temperature of the excitation coil, and the temperature sensor A quenching depth measuring device comprising: correction means for correcting the quenching depth calculated by the signal processing circuit based on the measured temperature.
JP2009004181A 2009-01-13 2009-01-13 Method and device for hardened depth Pending JP2010164306A (en)

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