CN114199993A - Multi-sensor-based laser quenching detection system and control method thereof - Google Patents
Multi-sensor-based laser quenching detection system and control method thereof Download PDFInfo
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- 238000012360 testing method Methods 0.000 description 3
- 238000009529 body temperature measurement Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 229910000734 martensite Inorganic materials 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 238000001931 thermography Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910001018 Cast iron Inorganic materials 0.000 description 1
- 229910001208 Crucible steel Inorganic materials 0.000 description 1
- 229910001141 Ductile iron Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 229910000746 Structural steel Inorganic materials 0.000 description 1
- 229910001566 austenite Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000000265 homogenisation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
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- 239000010959 steel Substances 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
- G01N27/82—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws
- G01N27/90—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws using eddy currents
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- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/06—Surface hardening
- C21D1/09—Surface hardening by direct application of electrical or wave energy; by particle radiation
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- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/18—Hardening; Quenching with or without subsequent tempering
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- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D11/00—Process control or regulation for heat treatments
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/0003—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter
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Abstract
The invention discloses a multi-sensor-based laser quenching detection system and a control method thereof, and solves the technical problems of single detection index and low precision in the process of detecting the laser quenching quality by using a single sensor. The detection system comprises a laser quenching head, an infrared camera, an eddy current sensor and a computer. The control method comprises the following steps: the method comprises the following steps: establishing a correlation model of eddy current impedance parameters and surface hardness cross section distribution according to the characteristics of the conductivity and the magnetic conductivity of the workpiece; step two: setting a target temperature, adjusting the power of a laser, and starting laser quenching operation; step three: the infrared camera and the eddy current sensor respectively detect the quenching temperature and the eddy current impedance of the workpiece on line in real time, and the target temperature is adjusted according to the detection data. The invention can realize real-time online detection of the surface quenching hardness by adopting multiple sensors, has comprehensive indexes and high reliability, ensures the effect of intelligently controlling the consistency and uniformity of the surface hardness of the workpiece by laser quenching, and has better practicability.
Description
Technical Field
The invention belongs to the technical field of laser quenching, and particularly relates to a multi-sensor-based laser quenching detection system and a control method thereof.
Background
Laser quenching is a metal surface heat treatment method in which a laser is used to scan a relevant part to be heat-treated, so that the temperature of a scanned area is rapidly increased, and the temperature of an unscanned area is kept at normal temperature. The laser quenching has the characteristics of high power density, high cooling speed, no need of cooling media such as water or oil, natural green environmental protection and the like. In addition, the laser-hardenable workpieces are made of structural steel, hardened and tempered steel and cast steel, and various types of cast iron such as flake graphite or spheroidal graphite cast iron. Therefore, the laser surface quenching process has unique superiority and is widely researched and applied.
The strengthening mechanism, the process application, the temperature field simulation and the like of the laser surface quenching are researched in a large quantity, and a mature theory and production application are obtained, but the process is complex, the influence factors are more, more problems still exist to influence the hardening quality, and the working performance of the actual part after quenching is influenced. The laser quenching surface hardening quality mainly comprises the indexes of hardening width uniformity, depth consistency, surface burning loss rate and the like. The laser quenching process detection at home and abroad is mainly carried out by a single sensor mode: for example, patent application No. 202010920105.4 entitled laser quenching quality uniformity control method and device, which adopts an infrared temperature detector to detect the temperature of a quenching area; the design of a laser quenching process real-time detection system of the paper of Yangchaxia et al [ J ]. laser technology, 2011,35(03): 334-; the method is characterized in that the real-time detection control research on the phase change hardening width of laser surface quenching of the thesis of Washuxi seal [ D ] Hunan university, 2012, adopts a CCD camera to obtain a heat radiation image in the laser surface quenching process, applies a colorimetric temperature measurement principle to obtain a relative temperature value, displays the temperature field distribution after digital image processing, then judges the hardening condition of the surface of a workpiece, mainly applies a color CCD colorimetric temperature measurement principle, and has low cost, low precision and the like.
The existing laser quenching quality detection index is single, the surface hardness obtained indirectly by adopting temperature field detection has certain distortion, and the various indexes of the laser quenching surface hardening quality are difficult to be detected comprehensively and objectively in real time, so that the effect of regulating and controlling the laser quenching surface hardening quality by a control system is not ideal, and the large-area surface homogenization quenching is difficult to realize.
Therefore, the present invention provides a multi-sensor based laser quenching detection system and a control method thereof, which effectively solve the above problems.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: the laser quenching detection system based on the multiple sensors and the control method thereof are provided, and the problems are effectively solved.
In order to achieve the purpose, the technical scheme adopted by the invention is as follows:
a multi-sensor-based laser quenching detection system comprises a laser quenching head arranged on a workpiece and used for performing laser quenching on the workpiece, an infrared camera arranged on the workpiece and used for detecting the quenching temperature of the workpiece in real time, an eddy current sensor arranged on the workpiece and used for monitoring the hardness of the workpiece in real time, and a computer respectively connected with the laser quenching head, the infrared camera and the eddy current sensor.
Further, the inclination angle of the infrared camera is 15-60 degrees.
Further, the inclination angle of the eddy current sensor is 15-60 degrees.
Further, the laser quenching head, the infrared camera and the eddy current sensor are respectively connected with a computer through an industrial bus.
Further, the computer is an upper computer.
A control method of a multi-sensor-based laser quenching detection system comprises the following steps:
the method comprises the following steps: establishing a correlation model of eddy current impedance parameters and surface hardness cross section distribution according to the characteristics of the conductivity and the magnetic conductivity of the workpiece;
step two: setting a target temperature, adjusting the power of a laser, and starting laser quenching operation;
step three: the infrared camera and the eddy current sensor respectively detect the quenching temperature and the eddy current impedance of the workpiece in real time, and the target temperature is adjusted according to the detection data.
Further, different workpieces have different conductivities and magnetic conductivities, and the correlation models are different.
Further, in step three, the infrared camera and the eddy current sensor transmit the detection data to the computer in real time, and the computer controls and adjusts the laser power of the laser quenching head.
Further, in the third step, the computer judges whether the hardness distribution of the workpiece is ideal or not according to the detection data of the eddy current sensor and the correlation model of the eddy current impedance parameter and the surface hardness cross section distribution, and if the hardness distribution of the workpiece is not ideal, the computer returns to the second step to readjust the target temperature.
Further, in the third step, the computer judges whether the temperature difference is smaller than a threshold value according to the detection data of the infrared camera, if so, the computer returns to the second step, the target temperature is readjusted, and if not, the power of the laser is kept constant, and the processing is continued until the end.
Compared with the prior art, the invention has the following beneficial effects:
the invention has simple structure, scientific and reasonable design and convenient use, can realize the online detection of the surface quenching hardness by adopting multiple sensors, has comprehensive indexes and high reliability, can realize the real-time detection of the quenching laser spot temperature field and the quenching width, and can also carry out the dynamic online detection and the real-time control on the distribution characteristic of the laser surface quenching hardness, thereby effectively ensuring the effect of intelligently controlling the consistency and the uniformity of the surface hardness of the workpiece by laser quenching and having better practicability.
Drawings
FIG. 1 is a schematic view of the structure of the present invention.
FIG. 2 is a schematic diagram of the principle of the eddy current sensor for detecting the hardness of the metal surface according to the present invention.
FIG. 3 is a schematic diagram of hardness distribution characteristics in two-dimensional cross-sectional directions of width and depth of a quenching track area of the eddy current sensor according to the invention.
FIG. 4 is a schematic diagram of the detection of hardness distribution on the metal surface section of the eddy current sensor according to the present invention.
FIG. 5 is a flow chart of a laser quenching control method according to the present invention.
Fig. 6 shows an embodiment of the invention on a robot platform.
Wherein, the names corresponding to the reference numbers are:
1-workpiece, 2-laser quenching head, 3-infrared camera, 4-eddy current sensor, 5-industrial bus, 6-computer and 7-robot platform.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to the accompanying drawings. It is to be understood that the described embodiments are merely exemplary of the invention, and not restrictive of the full scope of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation or be constructed and operated in a particular orientation, and thus, it should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; of course, mechanical connection and electrical connection are also possible; alternatively, they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
As shown in figures 1-6, the multi-sensor-based laser quenching detection system and the control method thereof provided by the invention have the advantages of simple structure, scientific and reasonable design, convenience in use, comprehensive indexes and high reliability, can realize surface quenching hardness detection by adopting the multi-sensor, can realize real-time detection of a quenching laser spot temperature field and quenching width, and can also perform dynamic real-time detection on laser surface quenching hardness distribution characteristics, thereby effectively ensuring the effect of intelligently controlling the consistency and uniformity of the surface hardness of a workpiece by laser quenching, and having better practicability.
The detection system comprises a laser quenching head 2 arranged on a workpiece 1 and used for carrying out laser quenching on the workpiece 1, an infrared camera 3 arranged on the workpiece 1 and used for carrying out real-time detection on the quenching temperature of the workpiece 1, an eddy current sensor 4 arranged on the workpiece 1 and used for carrying out real-time monitoring on the hardness of the workpiece 1, and a computer 6 respectively connected with the laser quenching head 2, the infrared camera 3 and the eddy current sensor 4. The infrared camera 3 and the eddy current sensor 4 are arranged obliquely to the workpiece 1, the inclination angle of the infrared camera 3 is 15-60 degrees, the inclination angle of the eddy current sensor 4 is 15-60 degrees, and the inclination angles are reasonably adjusted according to actual needs. The laser quenching head 2, the infrared camera 3 and the eddy current sensor 4 are respectively connected with a computer 6 through an industrial bus 5, and the computer 6 is an upper computer.
The invention adopts the infrared camera 3 to detect the highest laser spot temperature of the laser quenching area and the width of the quenching track area in real time. The infrared camera 3 utilizes an infrared detector and an optical imaging objective lens to receive the infrared radiation energy distribution pattern of the detected target and reflect the infrared radiation energy distribution pattern on a photosensitive element of the infrared detector, so that an infrared thermography is obtained, and the infrared thermography has the advantage that the temperature of a full-field area can be measured.
The invention adopts the eddy current sensor 4 to detect the hardness distribution characteristics of the width and depth two-dimensional section direction of the quenching track area of the workpiece surface after the laser quenching facula is instantly scanned. The principle of the eddy current sensor 4 for detecting hardness distribution characteristics is shown in fig. 1, in which a probe coil of an eddy current detecting unit through which an alternating current I1 is passed is used to generate an alternating magnetic field H1, and when a conductor is placed in the alternating magnetic field H1, an induced current I2 exists in the surface (conductor) of the workpiece 1, i.e., an eddy current is generated. The generation of eddy currents inevitably consumes a part of the magnetic field energy (I2 generates a magnetic field H2, opposite to H1) and thus causes the impedance of the coil generating the magnetic field to vary. The laser quenching is an advanced quenching technology which heats the surface of the material to a phase change point by using laser to measure the change of impedance, further measures the characteristics of the test piece such as conductivity, magnetic conductivity, size and the like, and transforms austenite into martensite along with the self cooling of the material so as to harden the surface of the material. If the martensite content in the material is more, the hardness of the surface layer of the material is higher, and the magnetic conductivity and the electric conductivity are smaller, according to the eddy current detection principle, the eddy current output signal has good correlation with the electromagnetic property of the detected material, and then the hardness distribution property of the detected material is judged.
The control method comprises the following steps:
the method comprises the following steps: establishing a correlation model of eddy current impedance parameters and surface hardness cross section distribution according to the characteristics of the conductivity and the magnetic conductivity of the workpiece;
step two: setting a target temperature, adjusting the power of a laser, and starting laser quenching operation;
step three: the infrared camera and the eddy current sensor respectively detect the quenching temperature and the eddy current impedance of the workpiece in real time, and the target temperature is adjusted according to the detection data.
The invention has different workpiece conductivity and permeability and different correlation models. The same material selects different hardness (namely different conductivity and magnetic conductivity) to carry out calibration test, the different hardness measures the corresponding eddy current impedance parameter, finally, a correlation model of the eddy current impedance parameter and the surface hardness cross section distribution is established, the same hardness carries out at least five times of parallel test, and then the average value is taken.
In the third step of the invention, the infrared camera and the eddy current sensor transmit the detection data to the computer in real time, and the computer controls and adjusts the laser power of the laser quenching head. The specific adjustment process is as follows:
in the third step, the computer judges whether the hardness distribution of the workpiece is ideal or not according to the detection data of the eddy current sensor and the correlation model of the eddy current impedance parameter and the surface hardness cross section distribution, and if the hardness distribution of the workpiece is not ideal, the computer returns to the second step to readjust the target temperature.
In the third step, the computer judges whether the temperature difference is smaller than the threshold value according to the detection data of the infrared camera, if so, the computer returns to the second step, the target temperature is readjusted, and if not, the power of the laser is kept constant, and the processing is continued until the end. Due to the temperature difference within a reasonable range caused by equipment fluctuation, in order to avoid equipment damage caused by frequently adjusted equipment output power, a temperature difference threshold value is usually set, and the range of the temperature difference threshold value is within +/-30 ℃.
The laser quenching head 2, the infrared camera 3 and the eddy current sensor 4 can be fixed on a robot platform 7 for real-time detection, and a specific embodiment of the invention is shown in fig. 6. The laser quenching head 2, the infrared camera 3, the eddy current sensor 4 and the upper computer used in the invention are all known electrical equipment or photoelectric sensing elements, and can be purchased and used directly in the market, and the structures, circuits and control principles thereof are all known technologies, so the structures, circuits and control principles of the laser quenching head 2, the infrared camera 3, the eddy current sensor 4 and the upper computer are not repeated herein.
Finally, it should be noted that: the above embodiments are only preferred embodiments of the present invention to illustrate the technical solutions of the present invention, but not to limit the technical solutions, and certainly not to limit the patent scope of the present invention; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention; that is, the technical problems to be solved by the present invention, which are not substantially changed or supplemented by the spirit and the concept of the main body of the present invention, are still consistent with the present invention and shall be included in the scope of the present invention; in addition, the technical scheme of the invention is directly or indirectly applied to other related technical fields, and the technical scheme is included in the patent protection scope of the invention.
Claims (10)
1. The utility model provides a laser quenching detecting system based on multisensor, its characterized in that is used for laser quenching head (2) to work piece (1) laser quenching including locating on work piece (1), locates on work piece (1) and is used for infrared camera (3) to work piece (1) quenching temperature real-time detection, locates on work piece (1) and is used for eddy current sensor (4) to work piece (1) hardness real-time supervision to and computer (6) that are connected with laser quenching head (2), infrared camera (3) and eddy current sensor (4) respectively.
2. The multi-sensor based laser quenching detection system according to claim 1, wherein the angle of inclination of the infrared camera (3) is 15-60 degrees.
3. The multi-sensor based laser quenching detection system according to claim 1, wherein the inclination angle of the eddy current sensor (4) is 15-60 degrees.
4. The multi-sensor based laser quenching detection system according to claim 1, wherein the laser quenching head (2), the infrared camera (3) and the eddy current sensor (4) are respectively connected with the computer (6) through an industrial bus (5).
5. The multi-sensor based laser quenching detection system according to claim 1, wherein the computer (6) is an upper computer.
6. The control method of the multi-sensor based laser quenching detection system according to any one of claims 1-5, characterized by comprising the following steps:
the method comprises the following steps: establishing a correlation model of eddy current impedance parameters and surface hardness cross section distribution according to the characteristics of the conductivity and the magnetic conductivity of the workpiece;
step two: setting a target temperature, adjusting the power of a laser, and starting laser quenching operation;
step three: the infrared camera and the eddy current sensor respectively detect the quenching temperature and the eddy current impedance of the workpiece in real time, and the target temperature is adjusted according to the detection data.
7. The method of claim 6, wherein the correlation model is different for different workpiece conductivities and magnetic conductivities.
8. The method as claimed in claim 6, wherein the infrared camera and the eddy current sensor transmit the detected data to the computer in real time, and the computer controls and adjusts the laser power of the laser quenching head.
9. The method as claimed in claim 8, wherein in the third step, the computer determines whether the hardness distribution of the workpiece is ideal according to the detection data of the eddy current sensor and the correlation model of the eddy current impedance parameter and the surface hardness cross-section distribution, and if the hardness distribution of the workpiece is not ideal, the method returns to the second step to readjust the target temperature.
10. The method as claimed in claim 8, wherein in step three, the computer determines whether the temperature difference is smaller than a threshold value according to the detection data of the infrared camera, if so, the computer returns to step two, readjusts the target temperature, and if so, keeps the laser power constant and continues processing until the end.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114740489A (en) * | 2022-04-13 | 2022-07-12 | 江苏联宸激光科技有限公司 | Surface measuring equipment for measuring laser quenched surface |
Citations (5)
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| JPH11153581A (en) * | 1997-11-21 | 1999-06-08 | Kawasaki Steel Corp | Method and apparatus for measuring on line progress of recovery-recrystallization of steel plate being annealed and method for continuous annealing of steel plate |
| JP2010164306A (en) * | 2009-01-13 | 2010-07-29 | Ntn Corp | Method and device for hardened depth |
| US20150315669A1 (en) * | 2012-10-31 | 2015-11-05 | Ntn Corporation | Heat treatment method and method of manufacturing machine part |
| CN112111628A (en) * | 2020-09-04 | 2020-12-22 | 江苏徐工工程机械研究院有限公司 | Laser quenching quality uniformity control method and device |
| CN113720841A (en) * | 2021-08-25 | 2021-11-30 | 武汉飞能达激光技术有限公司 | Laser quenching quality monitoring method and application thereof |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11153581A (en) * | 1997-11-21 | 1999-06-08 | Kawasaki Steel Corp | Method and apparatus for measuring on line progress of recovery-recrystallization of steel plate being annealed and method for continuous annealing of steel plate |
| JP2010164306A (en) * | 2009-01-13 | 2010-07-29 | Ntn Corp | Method and device for hardened depth |
| US20150315669A1 (en) * | 2012-10-31 | 2015-11-05 | Ntn Corporation | Heat treatment method and method of manufacturing machine part |
| CN112111628A (en) * | 2020-09-04 | 2020-12-22 | 江苏徐工工程机械研究院有限公司 | Laser quenching quality uniformity control method and device |
| CN113720841A (en) * | 2021-08-25 | 2021-11-30 | 武汉飞能达激光技术有限公司 | Laser quenching quality monitoring method and application thereof |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114740489A (en) * | 2022-04-13 | 2022-07-12 | 江苏联宸激光科技有限公司 | Surface measuring equipment for measuring laser quenched surface |
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