JP2010115727A - Conveyance device and vacuum device - Google Patents

Conveyance device and vacuum device Download PDF

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JP2010115727A
JP2010115727A JP2008288785A JP2008288785A JP2010115727A JP 2010115727 A JP2010115727 A JP 2010115727A JP 2008288785 A JP2008288785 A JP 2008288785A JP 2008288785 A JP2008288785 A JP 2008288785A JP 2010115727 A JP2010115727 A JP 2010115727A
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driven
urging
section
substrate
drive
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JP5193813B2 (en
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Nobufumi Minami
展史 南
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Ulvac Inc
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Ulvac Inc
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a technique for achieving high speed conveyance while surely retaining an object to be conveyed under high temperature environment, and for minimizing dust in conveyance of the object. <P>SOLUTION: This conveyance device 50 is provided with: a freely extendable link mechanism 20 with a plurality of arms; and a placement part 5 connected via a third left arm 3L and a third right arm 3R at its front end of movement for placing a substrate 10 thereon. In the placement part 5, locking parts 5a, 5b contacted with the side part of the substrate to be locked, are arranged. In the distal ends of the left arm 3L and the right arm 3R, an energizing means 9 provided with: protruded drive support parts 31L, 31R arranged in the arms 3L, 3R; and a driven mechanism part 6 driven by the protruded drive support parts 31L, 31R, is arranged. The driven mechanism part 6 includes: a driven part 61 with an oblong hole 62 slidably engageable with the drive support parts 31L, 31R; and an energizing part 6a guided and moved toward the locking parts 5a, 5b of the placement part 5 corresponding to the movement of the drive support parts 31L, 31R in the oblong hole 62 of the driven part 61. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、例えば基板等の搬送物を搬送する搬送装置に関し、特に、半導体製造装置等の複数のプロセスチャンバを備えた真空装置に好適な搬送装置に関する。   The present invention relates to a transfer apparatus for transferring a transfer object such as a substrate, and more particularly to a transfer apparatus suitable for a vacuum apparatus including a plurality of process chambers such as a semiconductor manufacturing apparatus.

半導体製造等の分野においては、従来から図９及び図１０に示すような基板搬送装置１０１が用いられている。
この基板搬送装置１０１は、駆動部１０２と、この駆動部１０２に連結され複数のアームからなるアーム部１０３と、このアーム部１０３の先端に連結されたエンドエフェクタ１０４とを有しており、エンドエフェクタ１０４の上面で基板Ｗの裏面を支持し、複数のプロセスチャンバ（図示せず）間で基板Ｗの受け渡しを行うように構成されている。 In the field of semiconductor manufacturing or the like, a substrate transfer apparatus 101 as shown in FIGS. 9 and 10 has been conventionally used.
The substrate transport apparatus 101 includes a drive unit 102, an arm unit 103 including a plurality of arms connected to the drive unit 102, and an end effector 104 connected to the tip of the arm unit 103. The back surface of the substrate W is supported by the upper surface of the effector 104, and the substrate W is transferred between a plurality of process chambers (not shown).

エンドエフェクタ１０４は、一般には、セラミックスやステンレス鋼などで製作されている。従って、アーム部１０３を高速で伸縮動作や旋回動作させるとエンドエフェクタ１０４も高速で動作するので、基板Ｗに加わる加速度の影響で基板Ｗがエンドエフェクタ１０４上で滑ってしまい、基板Ｗを正しい位置に搬送できない問題がある。   The end effector 104 is generally made of ceramics or stainless steel. Accordingly, when the arm portion 103 is extended and retracted or swiveled at a high speed, the end effector 104 also operates at a high speed. Therefore, the substrate W slides on the end effector 104 due to the acceleration applied to the substrate W, so that the substrate W is positioned correctly. There is a problem that can not be transported.

加えて、従来技術では、基板Ｗがエンドエフェクタ１０４上を滑る際に発生するダストが、基板Ｗの表面を汚染してしまう問題がある。
そこで、図１０に示すように、エンドエフェクタ１０４の上面に複数の保持部１０５を設け、基板Ｗ裏面の所定箇所で接触することも提案されている。 In addition, in the prior art, there is a problem that dust generated when the substrate W slides on the end effector 104 contaminates the surface of the substrate W.
Therefore, as shown in FIG. 10, it has been proposed to provide a plurality of holding portions 105 on the upper surface of the end effector 104 and make contact at a predetermined location on the back surface of the substrate W.

この保持部１０５は一般にゴムやエラストマー等の樹脂系弾注材料で形成されているので、基板Ｗの裏面の滑りを抑制し、滑り止めパッドとして機能している。これにより、エンドエフェクタ１０４の上面において基板Ｗは滑ることなく安定した搬送姿勢で保持される（例えば特許文献１参照）。   Since the holding portion 105 is generally formed of a resin-based elastic material such as rubber or elastomer, it prevents the back surface of the substrate W from slipping and functions as a non-slip pad. As a result, the substrate W is held in a stable transport posture without slipping on the upper surface of the end effector 104 (see, for example, Patent Document 1).

ここで、エラストマー等の樹脂系弾性材料で形成された保持部１０５は、基板Ｗや周囲の雰囲気温度が比較的低い（例えば２００℃以下）場合には、効率よく基板Ｗの滑りは抑制されるが、当該温度が高い（例えば３００〜５００℃）場合には、保持部１０５が熱による変質や変形で、基板Ｗの滑りを抑制できなくなる問題がある。   Here, when the holding portion 105 formed of a resin-based elastic material such as an elastomer has a relatively low temperature of the substrate W and the surrounding atmosphere (for example, 200 ° C. or lower), the slip of the substrate W is efficiently suppressed. However, when the temperature is high (for example, 300 to 500 ° C.), there is a problem that the holding unit 105 cannot be prevented from slipping due to the alteration or deformation due to heat.

一方、当該温度が比較的低い（例えば２００℃以下）場合でも、基板Ｗが保持部１０５の粘着力で貼り付き、エンドエフェクタ１０４から基板Ｗが適正に離れなくなることがある。例えば、プロセスチャンバ内のステージに基板Ｗを受け渡す際、保持部１０５から基板Ｗが離れず割れてしまう問題や、正しい位置に基板Ｗが搬送できない問題がある。   On the other hand, even when the temperature is relatively low (for example, 200 ° C. or lower), the substrate W may stick due to the adhesive force of the holding unit 105, and the substrate W may not be properly separated from the end effector 104. For example, when the substrate W is delivered to the stage in the process chamber, there are problems that the substrate W is not separated from the holding unit 105 and that the substrate W is cracked, and that the substrate W cannot be transferred to the correct position.

さらに、原理的に保持部１０５と基板Ｗとの間の摩擦力により基板Ｗの滑りを抑制しているので、双方の物質で決まる最大静止摩擦力を超えるような加速度が基板Ｗに加わると、基板Ｗはエンドエフェクタ１０４上で滑ってしまう。従って、基板搬送装置１０１の動作速度は保持部１０５と基板Ｗとの間の最大静止摩擦力を超えて大きくすることができないという問題がある。
特開２００２−３５３２９１号公報 Furthermore, since the slip of the substrate W is suppressed by the frictional force between the holding unit 105 and the substrate W in principle, when an acceleration exceeding the maximum static frictional force determined by both substances is applied to the substrate W, The substrate W slips on the end effector 104. Therefore, there is a problem that the operation speed of the substrate transport apparatus 101 cannot be increased beyond the maximum static frictional force between the holding unit 105 and the substrate W.
JP 2002-353291 A

本発明は、このような従来の技術の課題を解決するためになされたもので、その目的とするところは、搬送物や周囲の雰囲気温度が比較的低い環境下においても当該温度が高い環境下においても搬送物を確実に保持して高速搬送を図ることにある。
また、本発明の他の目的は、搬送物の搬送時におけるダストをできるだけ少なくする技術を提供することにある。 The present invention has been made in order to solve the above-described problems of the prior art, and the object of the present invention is to provide an environment in which the temperature of the conveyed product and the surrounding atmosphere is high even in a relatively low environment. In this case, the transported object is reliably held and high-speed transport is achieved.
Another object of the present invention is to provide a technique for reducing dust as much as possible during conveyance of a conveyed product.

上記目的を達成するためになされた本発明は、駆動源からの動力が伝達される複数のアームを有する伸縮自在なリンク機構と、前記リンク機構の動作先端部において駆動リンク部を介して連結され、搬送物を載置するための載置部とを備え、前記載置部には、当該搬送物の側部と当接して係止するための係止部が設けられるとともに、前記リンク機構の駆動リンク部にはスライド機構による付勢手段が設けられ、前記付勢手段は、前記リンク機構の駆動リンク部に設けられた駆動支持部と、当該駆動支持部によって駆動される従動機構部とを備え、前記従動機構部は、前記駆動支持部と係合摺動可能な長溝状摺動部を有する従動部と、当該従動部に連結され当該従動部の長溝状摺動部内における前記駆動支持部の移動に応じて前記載置部の係止部に向かう方向に沿って案内移動される付勢部とを有する搬送装置である。
本発明では、前記付勢手段は、回転方向が反対方向である一対の隣接するリンク部材にそれぞれ凸状の前記駆動支持部が設けられ、かつ、前記従動機構部には、前記一対の隣接するリンク部材にそれぞれ設けられた当該凸状の駆動支持部と係合する長溝状摺動部を有する従動部と、凸状の前記付勢部を有することも効果的である。
本発明では、前記付勢手段は、回転方向が反対方向である一対の隣接するリンク部材の一方に支軸を中心として回動自在の従動部が設けられるとともに、前記一対の隣接するリンク部材の他方に凸状の前記駆動支持部が設けられ、前記一対の隣接するリンク部材の他方に設けられた当該凸状の駆動支持部と、前記従動部に設けられた長溝状摺動部とが係合摺動するように構成されていることも効果的である。
本発明では、前記従動機構部は、前記従動部と前記付勢部とが一体的に構成されていることも効果的である。
本発明では、前記従動機構部は、前記従動部と前記付勢部とが分離され、前記従動部側に設けられた駆動当接部と前記付勢部側に設けられた従動当接部とが、前記従動部の移動に伴って当接して動力を伝達するように構成されていることも効果的である。
本発明では、前記従動機構部の付勢部側には、前記従動部に対する付勢力を調整するための付勢力調整部材を有することも効果的である。
本発明では、前記付勢手段の従動機構部の付勢部には、当該付勢部の付勢力を減勢させるための減勢部材を有することも効果的である。
本発明では、前記従動機構部の従動部の長溝状摺動部は、長孔であることも効果的である。
また、本発明は、真空槽と、上述した搬送装置とを有し、前記搬送装置の載置部が前記真空槽内に対して搬入及び搬出するように構成されている真空装置である。 The present invention, which has been made to achieve the above object, is connected to a telescopic link mechanism having a plurality of arms to which power from a driving source is transmitted, and a driving link portion at the operating tip of the link mechanism. A placement portion for placing the conveyed product, and the placement portion is provided with a locking portion for contacting and locking the side portion of the conveyed product, and the link mechanism The drive link unit is provided with an urging unit by a slide mechanism, and the urging unit includes a drive support unit provided in the drive link unit of the link mechanism and a driven mechanism unit driven by the drive support unit. The driven mechanism portion includes a driven portion having a long groove-like sliding portion that can be slidably engaged with the drive support portion, and the drive support portion connected to the driven portion in the long groove-like sliding portion of the driven portion. Depending on the movement of A conveying device having a biasing portion which is guided movement along a direction towards the part.
In the present invention, the biasing means is provided with the convex drive support portions on a pair of adjacent link members whose rotation directions are opposite to each other, and the driven mechanism portion is adjacent to the pair of adjacent drive members. It is also effective to have a driven portion having a long groove-like sliding portion that engages with the convex drive support portion provided on each link member, and the convex biasing portion.
In the present invention, the biasing means is provided with a follower that is rotatable about a support shaft on one of a pair of adjacent link members whose rotation directions are opposite directions, and the biasing means of the pair of adjacent link members. The convex drive support portion is provided on the other side, and the convex drive support portion provided on the other of the pair of adjacent link members and the long groove-like sliding portion provided on the driven portion are engaged. It is also effective to be configured to slide together.
In the present invention, it is also effective that the driven mechanism portion is configured such that the driven portion and the biasing portion are integrally formed.
In the present invention, the driven mechanism portion includes a driven contact portion provided on the driven portion side and a driven contact portion provided on the biased portion side in which the driven portion and the biased portion are separated. However, it is also effective that the power is transmitted by contacting with the movement of the driven portion.
In the present invention, it is also effective to have a biasing force adjusting member for adjusting a biasing force with respect to the driven portion on the biasing portion side of the driven mechanism portion.
In the present invention, it is also effective to have a biasing member for reducing the biasing force of the biasing portion in the biasing portion of the driven mechanism portion of the biasing means.
In the present invention, it is also effective that the long groove-like sliding portion of the driven portion of the driven mechanism portion is a long hole.
Moreover, this invention is a vacuum apparatus which has a vacuum chamber and the conveying apparatus mentioned above, and is comprised so that the mounting part of the said conveying apparatus may carry in and out in the said vacuum tank.

本発明にあっては、リンク機構の動作先端部にスライド機構によって動作する付勢手段を設け、その従動機構部の付勢部と載置部の係止部によって搬送物を機械的に把持して保持するようにしたので、載置部上面での搬送物の滑りを抑制して（原理的には滑り無しで）、搬送物の高速搬送を実現することができる。   In the present invention, the urging means that is operated by the slide mechanism is provided at the operating tip of the link mechanism, and the conveyed product is mechanically gripped by the urging portion of the driven mechanism portion and the locking portion of the mounting portion. Therefore, it is possible to suppress the slip of the transported object on the upper surface of the mounting portion (in principle, without slipping) and realize the high-speed transport of the transported object.

また、付勢手段を含めて全ての部材を金属で作製することにより、搬送物や周囲の雰囲気温度が比較的低い環境下のみならず、搬送時の温度が高い（例えば３００〜５００℃）場合であっても熱変質や変形無しに搬送物の滑りを抑制することができる。   In addition, when all members including the urging means are made of metal, not only in the environment where the temperature of the transported object and the surrounding atmosphere is relatively low, but also when the temperature during transport is high (eg, 300 to 500 ° C.) Even so, slippage of the conveyed product can be suppressed without thermal alteration or deformation.

さらに、付勢手段は、駆動リンク部に設けた例えば凸状の駆動支持部とこれに係合摺動可能な長溝状摺動部を有する従動部によって動力を伝達するように構成されているので、簡素な構成で小型の搬送装置を提供することができる。
さらにまた、搬送物を把持する部分には摺動する部分が無いので、搬送物を汚染するダストの発生を低減することができる。 Further, the urging means is configured to transmit power by a driven portion having, for example, a convex drive support portion provided in the drive link portion and a long groove-like slide portion capable of engaging and sliding with the drive support portion. A small transport device can be provided with a simple configuration.
Furthermore, since there is no sliding part in the part which grips a conveyed product, generation | occurrence | production of the dust which contaminates a conveyed product can be reduced.

一方、本発明において、付勢手段の従動機構部が、従動部と付勢部とが分離され、従動部側に設けられた駆動当接部と付勢部側に設けられた従動当接部とが、従動部の移動に伴って当接して動力を伝達するように構成されている場合には、従動機構部の付勢部に設けられた従動当接部を適切な力で従動部の駆動当接部に押し付けて密着させることができるので、従動機構部を例えばガイド部材に沿って確実に高精度で基板搬送方向下流側に移動させることができる。   On the other hand, in the present invention, the driven mechanism portion of the urging means includes a driven contact portion provided on the driven portion side and a driven contact portion provided on the urged portion side, in which the driven portion and the urged portion are separated. Is configured to contact with the movement of the driven portion to transmit the power, the driven contact portion provided in the biasing portion of the driven mechanism portion is moved with an appropriate force by the driven portion. Since it can be pressed and brought into close contact with the driving contact portion, the driven mechanism portion can be reliably moved to the downstream side in the substrate transport direction with high accuracy, for example, along the guide member.

また、本発明において、付勢手段の従動機構部の付勢部に付勢力を減勢させるための減勢部材を有する場合には、装置構成や搬送物の大きさ等に応じて最適の力で搬送物を確実に保持することができる。   Further, in the present invention, when the urging portion of the driven mechanism portion of the urging means has a depressing member for depressing the urging force, the optimum force according to the device configuration, the size of the conveyed object, etc. Thus, the conveyed product can be held securely.

以下、本発明の好ましい実施の形態を図面を参照して詳細に説明する。
図１は、本発明に係る搬送装置の実施の形態の構成を示す平面図である。
図１に示すように、本実施の形態の搬送装置５０は、例えば真空処理槽内において搬送物である基板１０の搬送を行う所謂フロッグレック方式のもので、以下に説明するリンク機構２０を駆動するための鉛直方向に同心状に配設した第１及び第２の駆動軸１１、１２を有している。 Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a plan view showing a configuration of an embodiment of a transport apparatus according to the present invention.
As shown in FIG. 1, the transfer device 50 of the present embodiment is of a so-called frog-leg type that transfers a substrate 10 as a transfer object in a vacuum processing tank, for example, and drives a link mechanism 20 described below. The first and second drive shafts 11 and 12 are arranged concentrically in the vertical direction.

これら各駆動軸１１、１２は、独立した第１及び第２の駆動源Ｍ１、Ｍ２からそれぞれ時計回り方向又は反時計回り方向の回転動力が伝達されるように構成されている。
第１の駆動軸１１には第１の左アーム１Ｌの一方の端部（基端部）が固定され、第２の駆動軸１２の一方の端部（基端部）には、第１の右アーム１Ｒが固定されている。 Each of the drive shafts 11 and 12 is configured such that the rotational power in the clockwise direction or the counterclockwise direction is transmitted from the independent first and second drive sources M1 and M2, respectively.
One end portion (base end portion) of the first left arm 1L is fixed to the first drive shaft 11, and one end portion (base end portion) of the second drive shaft 12 is fixed to the first end portion (base end portion). The right arm 1R is fixed.

第１の左アーム１Ｌの他方の端部（先端部）には、第２の左アーム２Ｌの一方の端部（基端部）が、支軸２１Ｌを中心として水平方向に回転自在に取り付けられている。
第１の右アーム１Ｒの他方の端部（先端部）には、第２の右アーム２Ｒの一方の端部（基端部）が、支軸２１Ｒを中心として水平方向に回転自在に取り付けられている。 One end portion (base end portion) of the second left arm 2L is attached to the other end portion (tip portion) of the first left arm 1L so as to be rotatable in the horizontal direction around the support shaft 21L. ing.
One end portion (base end portion) of the second right arm 2R is attached to the other end portion (tip end portion) of the first right arm 1R so as to be rotatable in the horizontal direction around the support shaft 21R. ing.

本実施の形態では、これら第１の左アーム１Ｌ及び第１の右アーム１Ｒは、直線状に形成され、同一の支点間距離を有するように構成されている。
第２の左アーム２Ｌは、直線状に形成され、その他方の端部（先端部）には、第３の左アーム３Ｌの一方の端部（基端部）が、固定ねじ２２Ｌで固定されている。
第２の右アーム２Ｒは、直線状に形成され、その他方の端部（先端部）には、第３の右アーム３Ｒの一方の端部（基端部）が、固定ねじ２２Ｒで固定されている。 In the present embodiment, the first left arm 1L and the first right arm 1R are formed in a straight line and have the same distance between fulcrums.
The second left arm 2L is formed in a straight line, and one end (base end) of the third left arm 3L is fixed to the other end (tip) by a fixing screw 22L. ing.
The second right arm 2R is formed in a straight line, and one end (base end) of the third right arm 3R is fixed to the other end (tip) by a fixing screw 22R. ing.

ここで、第３の左アーム３Ｌ、第３の右アーム３Ｒは、駆動リンク部を構成するもので、ほぼ「く」字状に形成されており、それぞれの屈曲部分の凸部がリンク外方側に向けられて配置されている。
また、第３の左アーム３Ｌの他方の端部（先端部）は、後述する動力伝達機構４の表面に設けられた支軸２３Ｌを中心として水平方向に回転自在に取り付けられている。 Here, the third left arm 3L and the third right arm 3R constitute a drive link portion, and are formed in a substantially “<” shape, and the convex portions of the respective bent portions are outward of the link. It is arranged facing the side.
Further, the other end portion (tip portion) of the third left arm 3L is attached so as to be rotatable in the horizontal direction around a support shaft 23L provided on the surface of the power transmission mechanism 4 described later.

一方、第３の右アーム３Ｒの他方の端部（先端部）は、後述する動力伝達機構４の例えば表面側に設けられた支軸２３Ｒを中心として水平方向に回転自在に取り付けられている。
本実施の形態においては、第２の左アーム２Ｌの支軸２１Ｌから第３の左アーム３Ｌの支軸２３Ｌの支点間距離と第２の右アーム２Ｒの支軸２１Ｒから第３の右アーム３Ｒの支軸２３Ｒの支点間距離は、同一の距離を有するように構成されている。 On the other hand, the other end portion (tip portion) of the third right arm 3R is attached so as to be rotatable in the horizontal direction around a support shaft 23R provided on, for example, the surface side of the power transmission mechanism 4 described later.
In the present embodiment, the distance between the support shafts 23L of the second left arm 2L to the support shaft 23L of the third left arm 3L and the support shaft 21R of the second right arm 2R to the third right arm 3R. The distance between the fulcrums of the support shaft 23R is configured to have the same distance.

また、動力伝達機構４は、例えば矩形薄型箱形状のハウジング内に互いに噛み合う一対の歯車を有している（図示せず）。
これらの歯車は同一の歯数を有し、それぞれの回転軸が、上述した支軸２３Ｌ、２３Ｒに固定され、これにより、姿勢制御機構として作用すべく逆方向に同一速度で回転するように構成されている。
これら支軸２３Ｌ、２３Ｒは、基板１０の搬送方向に対して直交する方向に近接して配置されている。 The power transmission mechanism 4 includes a pair of gears (not shown) that mesh with each other in a rectangular thin box-shaped housing, for example.
These gears have the same number of teeth, and the respective rotation shafts are fixed to the above-described support shafts 23L and 23R, and thus are configured to rotate at the same speed in the reverse direction to act as posture control mechanisms. Has been.
These support shafts 23L and 23R are arranged close to each other in a direction orthogonal to the conveyance direction of the substrate 10.

本発明の場合、特に限定されることはないが、バランスよく搬送物を保持する観点からは、第１及び第２の駆動軸１１、１２の回転中心軸線を通り基板搬送方向（矢印Ｐ方向）に対して直交する位置に支軸２３Ｌ、２３Ｒを配置するように構成することが好ましい。   In the case of the present invention, there is no particular limitation, but from the viewpoint of holding the conveyed product in a balanced manner, it passes through the rotation center axis of the first and second drive shafts 11 and 12, and the substrate conveyance direction (arrow P direction). It is preferable that the support shafts 23L and 23R are arranged at positions orthogonal to the axis.

動力伝達機構４の基板搬送方向下流側には、所謂エンドエフェクタである載置部５が設けられている。
この載置部５には、所定の間隔をおいて設けた支持部材５Ｌ、５Ｒが設けられている。 On the downstream side of the power transmission mechanism 4 in the substrate transport direction, a mounting portion 5 as a so-called end effector is provided.
The mounting portion 5 is provided with support members 5L and 5R provided at a predetermined interval.

ここで、支持部材５Ｌ、５Ｒの基板搬送方向下流側の端部には、基板１０の側部と当接可能な凸部形状の係止部５ａ、５ｂがそれぞれ設けられている。
一方、本実施の形態においては、以下に説明するスライド機構による付勢手段９が設けられている。 Here, at the end of the support members 5L and 5R on the downstream side in the substrate transport direction, convex locking portions 5a and 5b that can come into contact with the side of the substrate 10 are provided.
On the other hand, in the present embodiment, an urging means 9 by a slide mechanism described below is provided.

図２（ａ）は、本実施の形態における付勢手段の全体を示す構成図、図２（ｂ）は、図２（ａ）のＡ−Ａ線断面図である。
図２（ａ）に示すように、本実施の形態においては、第３の左アーム３Ｌと第３の右アーム３Ｒはその先端部がそれぞれ半円形状に形成されている。そして、第３の左アーム３Ｌ及び第３の右アーム３Ｒの表側面３０Ｌ、３０Ｒにそれぞれ凸状の駆動支持部３１Ｌ、３１Ｒ（以下単に「駆動凸部」という。）が設けられ、これら駆動凸部３１Ｌ、３１Ｒと従動機構部６とによって付勢手段９が構成されている。 FIG. 2A is a configuration diagram showing the entire urging means in the present embodiment, and FIG. 2B is a cross-sectional view taken along line AA of FIG.
As shown in FIG. 2A, in the present embodiment, the tip ends of the third left arm 3L and the third right arm 3R are each formed in a semicircular shape. Convex drive support portions 31L and 31R (hereinafter simply referred to as “drive convex portions”) are provided on the front side surfaces 30L and 30R of the third left arm 3L and the third right arm 3R, respectively. The biasing means 9 is constituted by the portions 31L and 31R and the driven mechanism portion 6.

本実施の形態では、駆動凸部３１Ｌ、３１Ｒは、好ましくはステンレス等の金属材料からなり、第３の左アーム３Ｌの支軸２３Ｌと、第３の右アーム３Ｒの支軸２３Ｒから所定の距離だけ離れた位置に設けられている。この場合、駆動凸部３１Ｌ、３１Ｒは、第３の左アーム３Ｌ及び第３の右アーム３Ｒの支軸２３Ｌ、２３Ｒより基板搬送方向下流側に配置されている。   In the present embodiment, the drive protrusions 31L and 31R are preferably made of a metal material such as stainless steel, and a predetermined distance from the support shaft 23L of the third left arm 3L and the support shaft 23R of the third right arm 3R. It is provided only at a position apart. In this case, the drive convex portions 31L and 31R are disposed on the downstream side in the substrate transport direction from the support shafts 23L and 23R of the third left arm 3L and the third right arm 3R.

なお、本例では、第３の左アーム３Ｌと第３の右アーム３Ｒの各駆動凸部３１Ｌ、３１Ｒは、第１及び第２の駆動軸１１、１２の回転中心軸線を通り基板搬送方向に延びる直線に対して線対称となるように設けられている。
本実施の形態の駆動凸部３１Ｌ、３１Ｒは、後述する従動部６１の長孔（長溝状摺動部）６２と係合するもので、同一の構成を有している。 In this example, the drive convex portions 31L and 31R of the third left arm 3L and the third right arm 3R pass through the rotation center axes of the first and second drive shafts 11 and 12 in the substrate transport direction. It is provided so as to be line symmetric with respect to the extending straight line.
The drive convex portions 31L and 31R of the present embodiment are engaged with a long hole (long groove-like sliding portion) 62 of the driven portion 61 described later, and have the same configuration.

図２（ｂ）に示すように、各駆動凸部３１Ｌ、３１Ｒは、第３の左アーム３Ｌ及び第３の右アーム３Ｒの表側面３０Ｌ、３０Ｒに立設された支軸３２Ｌ、３２Ｒを中心として水平方向に回動自在に支持された円筒状の回転軸３３Ｌ、３３Ｒを有している。   As shown in FIG. 2B, the drive convex portions 31L and 31R are centered on support shafts 32L and 32R provided upright on the front side surfaces 30L and 30R of the third left arm 3L and the third right arm 3R. As cylindrical rotating shafts 33L and 33R supported so as to be rotatable in the horizontal direction.

各回転軸３３Ｌ、３３Ｒの上部には、各回転軸３３Ｌ、３３Ｒより若干径の大きな例えば円板状の支持部３４Ｌ、３４Ｒが設けられている。
一方、本実施の形態の従動機構部６は、好ましくはステンレス等の金属部材から構成されるもので、直線棒状の本体部６０を有している。 For example, disk-shaped support portions 34L and 34R having slightly larger diameters than the respective rotation shafts 33L and 33R are provided above the respective rotation shafts 33L and 33R.
On the other hand, the driven mechanism portion 6 of the present embodiment is preferably made of a metal member such as stainless steel and has a straight bar-like main body portion 60.

従動機構部６の本体部６０の一端部には、例えば本体部６０に対して直交する方向に延びる長方形平板状の従動部６１が取り付けられている。この従動部６１には、例えばその幅方向の中央領域に、従動部６１の長手方向に沿って直線状に延びる長孔６２が形成されている。   At one end of the main body portion 60 of the driven mechanism portion 6, for example, a rectangular flat plate driven portion 61 extending in a direction orthogonal to the main body portion 60 is attached. In the driven portion 61, for example, a long hole 62 extending linearly along the longitudinal direction of the driven portion 61 is formed in the central region in the width direction.

図２（ｂ）に示すように、従動部６１の長孔６２は、その幅が、上述の駆動凸部３１Ｌ、３１Ｒの回転軸３３Ｌ、３３Ｒの直径より若干大きく、かつ、支持部３４Ｌ、３４Ｒの径より小さくなるように設定されている。   As shown in FIG. 2B, the long hole 62 of the driven portion 61 has a width that is slightly larger than the diameter of the rotation shafts 33L and 33R of the drive convex portions 31L and 31R, and the support portions 34L and 34R. It is set to be smaller than the diameter.

また、従動部６１の長孔６２の長さは、第３の左アーム３Ｌと第３の右アーム３Ｒの回転に伴って移動する駆動凸部３１Ｌ、３１Ｒ間の最大距離より長くなるように設定されている。
このような構成により、第３の左アーム３Ｌと第３の右アーム３Ｒを回転させると、各駆動凸部３１Ｌ、３１Ｒの駆動軸３３Ｌ、３３Ｒが、従動部６１の長孔６２内において係合摺動しつつその基板搬送方向上流又は下流側の開口縁部を押圧するようになっている。 In addition, the length of the long hole 62 of the driven portion 61 is set to be longer than the maximum distance between the driving convex portions 31L and 31R that move as the third left arm 3L and the third right arm 3R rotate. Has been.
With such a configuration, when the third left arm 3L and the third right arm 3R are rotated, the drive shafts 33L, 33R of the drive convex portions 31L, 31R are engaged in the long holes 62 of the driven portion 61. While sliding, the edge of the opening upstream or downstream in the substrate transport direction is pressed.

従動機構部６の本体部６０の他端部には、凸状（例えばピン形状）の付勢部６ａが取り付けられている。この付勢部６ａの先端部は、ダストの発生を防止するための例えばＰＴＦＥ（ポリ４フッ化エチレン樹脂）等の耐熱性の樹脂材料からなるコーティングを施すこともできる。   A convex (for example, pin-shaped) biasing portion 6 a is attached to the other end portion of the main body portion 60 of the driven mechanism portion 6. The tip of the urging portion 6a can be coated with a heat-resistant resin material such as PTFE (polytetrafluoroethylene resin) for preventing the generation of dust.

本実施の形態では、図２（ｂ）に示すように、第３の左アーム３Ｌと第３の右アーム３Ｒの各駆動凸部３１Ｌ、３１Ｒを、従動機構部６の従動部６１の長孔６２に係合させた状態で、例えば載置部５の表側面に設けたガイド部材６３によって案内されることにより、従動機構部６の本体部６０が基板搬送方向又はその反対方向に直線移動するように構成されている。   In the present embodiment, as shown in FIG. 2 (b), the drive convex portions 31L and 31R of the third left arm 3L and the third right arm 3R are formed as long holes in the driven portion 61 of the driven mechanism portion 6. In the state engaged with 62, for example, by being guided by a guide member 63 provided on the front side surface of the mounting portion 5, the main body portion 60 of the driven mechanism portion 6 linearly moves in the substrate transport direction or the opposite direction. It is configured as follows.

次に、図３（ａ）（ｂ）を用いて、本発明の動作原理及び構成を詳細に説明する。
以下、第３の左アーム３Ｌの支軸２３Ｌと駆動凸部３１Ｌの支軸３２Ｌとの間の距離、及び第３の右アーム３Ｒの支軸２３Ｒと駆動凸部３１Ｒの支軸３２Ｒとの間の距離をそれぞれｒとした場合を考える。 Next, the operation principle and configuration of the present invention will be described in detail with reference to FIGS.
Hereinafter, the distance between the support shaft 23L of the third left arm 3L and the support shaft 32L of the drive convex portion 31L, and the distance between the support shaft 23R of the third right arm 3R and the support shaft 32R of the drive convex portion 31R. Let us consider the case where r is the distance of each.

本発明の実施の形態では、リンク機構２０が伸びた状態において、図３（ａ）に示すように、第３の左アーム３Ｌ及び第３の右アーム３Ｒの先端部のなす角度が例えば１８０度より大きくなるように設定する。   In the embodiment of the present invention, when the link mechanism 20 is extended, as shown in FIG. 3A, the angle formed by the distal ends of the third left arm 3L and the third right arm 3R is, for example, 180 degrees. Set to be larger.

この状態において、従動機構部６の従動部６１の長孔６２に係合させた第３の左アーム３Ｌと第３の右アーム３Ｒの各駆動凸部３１Ｌ、３１Ｒが、当該長孔６２内において両端部に位置するように、従動部６１の長孔６２の大きさ、各駆動凸部３１Ｌ、３１Ｒの位置を定める。   In this state, the drive convex portions 31L and 31R of the third left arm 3L and the third right arm 3R engaged with the long hole 62 of the driven portion 61 of the driven mechanism portion 6 are within the long hole 62. The size of the long hole 62 of the driven portion 61 and the positions of the drive convex portions 31L and 31R are determined so as to be positioned at both ends.

そして、従動機構部６の基板搬送方向下流側の付勢部６ａが、搬送すべき基板１０の側部と接触しないように、従動機構部６の基準長さ（ここでは、付勢部６ａの先端部から駆動凸部３１Ｌ、３１Ｒの支軸３２Ｌ、３２Ｒまでの距離）を設定する。   Then, the reference length of the driven mechanism portion 6 (here, the biasing portion 6a of the biasing portion 6a) is set so that the biasing portion 6a on the downstream side of the driven mechanism portion 6 in the substrate transport direction does not come into contact with the side portion of the substrate 10 to be transported. The distance from the front end portion to the support shafts 32L, 32R of the drive convex portions 31L, 31R is set.

本例では、例えば各駆動凸部３１Ｌ、３１Ｒが、第３の左アーム３Ｌ及び第３の右アーム３Ｒの支軸２３Ｌ、２３Ｒより基板搬送方向に対して直交する方向で外方側に位置するように構成する（基板搬送方向に対する角度θ1）。 In this example, for example, the drive protrusions 31L and 31R are positioned outward in the direction orthogonal to the substrate transport direction from the support shafts 23L and 23R of the third left arm 3L and the third right arm 3R. (An angle θ 1 with respect to the substrate transport direction).

一方、リンク機構２０が縮んだ状態においては、図３（ｂ）に示すように、第３の左アーム３Ｌ及び第３の右アーム３Ｒの先端部のなす角度が例えば１８０度より小さくなるように設定する。
この状態では、駆動凸部３１Ｌ、３１Ｒが、それぞれ第３の左アーム３Ｌ又は第３の右アーム３Ｒの支軸２３Ｌ、２３Ｒを中心として互いに接近する方向に回転移動している。 On the other hand, in the state where the link mechanism 20 is contracted, as shown in FIG. 3B, the angle formed by the distal ends of the third left arm 3L and the third right arm 3R is smaller than 180 degrees, for example. Set.
In this state, the driving convex portions 31L and 31R are rotationally moved in directions approaching each other around the support shafts 23L and 23R of the third left arm 3L or the third right arm 3R, respectively.

ここで、基板搬送方向に対する角度θ0が、リンク機構２０が伸びた状態における基板搬送方向に対する角度θ1より絶対値で小さくなるように、例えば、各駆動凸部３１Ｌ、３１Ｒが、第３の左アーム３Ｌ及び第３の右アーム３Ｒの支軸２３Ｌ、２３Ｒより基板搬送方向の垂直方向の内方側に位置するように、上述した各部材の大きさ・形状・位置を設定する。 Here, for example, each of the drive protrusions 31L and 31R has a third value so that the angle θ 0 with respect to the substrate transport direction is smaller in absolute value than the angle θ 1 with respect to the substrate transport direction when the link mechanism 20 is extended. The size, shape, and position of each member described above are set so as to be positioned on the inner side in the vertical direction of the substrate transport direction from the support shafts 23L and 23R of the left arm 3L and the third right arm 3R.

このような構成において、第３の左アーム３Ｌ及び第３の右アーム３Ｒの縮み方向への回転させると、各駆動凸部３１Ｌ、３１Ｒが基板搬送方向下流側に移動して従動部６１の長孔６２の開口縁部を押圧し、従動機構部６が基板搬送方向下流側に移動して、付勢部６ａと搬送すべき基板１０の側部との距離が小さくなる（ｒ・ｃｏｓθ0＞ｒ・ｃｏｓθ1、すなわち、ｄ＜Ｄ）。 In such a configuration, when the third left arm 3L and the third right arm 3R are rotated in the contraction direction, the drive convex portions 31L and 31R move downstream in the substrate transport direction, and the length of the driven portion 61 is increased. The opening edge of the hole 62 is pressed, the driven mechanism 6 moves downstream in the substrate transport direction, and the distance between the urging portion 6a and the side of the substrate 10 to be transported becomes small (r · cos θ 0 > r · cos θ 1 , that is, d <D).

その結果、従動機構部６の基板搬送方向下流側の部分（付勢部６ａ）が、搬送すべき基板１０の側部と接触し、基板１０の側部に対し、載置部５の係止部５ａ、５ｂに向かう方向の力Ｆが作用し、これにより、当該基板１０に対して基板搬送方向に関して上流及び下流側から押圧力が働き、載置部５上において基板１０が保持（把持）される。   As a result, the downstream portion (biasing portion 6a) of the driven mechanism portion 6 in the substrate transport direction comes into contact with the side portion of the substrate 10 to be transported, and the placement portion 5 is locked to the side portion of the substrate 10. A force F in the direction toward the portions 5a and 5b acts, and thereby, a pressing force acts on the substrate 10 from the upstream and downstream sides in the substrate transport direction, and the substrate 10 is held (gripped) on the mounting portion 5. Is done.

このようなリンク機構２０の縮み状態においては、第１の左アーム１Ｌ及び第１の右アーム１Ｒを同一の方向へ回転させることにより、基板１０を保持した状態で旋回動作を行うことができる。   In such a contracted state of the link mechanism 20, the first left arm 1 </ b> L and the first right arm 1 </ b> R can be rotated in the same direction to perform a turning operation while holding the substrate 10.

図４（ａ）〜（ｃ）は、本実施の形態における搬送装置の動作を示す説明図である。
ここでは、搬送室７から処理室８内に基板１０を搬入する場合を例にとって説明する。なお、搬送室７及び処理室８は、図示しない真空排気系に接続されている。また、搬送室７と処理室８間には図示しないゲートバルブが接続されており、そのゲートバルブが開いた後、搬入、搬出動作を行う。 4A to 4C are explanatory views showing the operation of the transport device in the present embodiment.
Here, a case where the substrate 10 is carried into the processing chamber 8 from the transfer chamber 7 will be described as an example. The transfer chamber 7 and the processing chamber 8 are connected to a vacuum exhaust system (not shown). In addition, a gate valve (not shown) is connected between the transfer chamber 7 and the processing chamber 8, and after the gate valve is opened, the loading and unloading operations are performed.

まず、図４（ａ）に示すように、上述した如くリンク機構２０を縮ませて基板１０を保持した状態で載置部５の係止部５ａ、５ｂを処理室８側に向ける。
この状態から第１の左アーム１Ｌを時計回り方向へ回転させるとともに、第１の右アーム１Ｒを反時計回り方向へ回転させることにより、リンク機構２０の伸び動作が開始され、図４（ｂ）に示すように、基板１０は処理室８に向って直進する。 First, as shown in FIG. 4A, the locking mechanism 5a, 5b of the mounting portion 5 is directed to the processing chamber 8 side while the link mechanism 20 is contracted and the substrate 10 is held as described above.
From this state, the first left arm 1L is rotated in the clockwise direction and the first right arm 1R is rotated in the counterclockwise direction, whereby the extension operation of the link mechanism 20 is started, and FIG. As shown, the substrate 10 goes straight toward the processing chamber 8.

さらに、リンク機構２０の伸び動作を継続することにより、図４（ｃ）に示すように、基板１０を処理室８内に搬入する。
この状態では、図３（ａ）を用いて説明したように、従動機構部６の付勢部６ａと基板１０の側部とが接触しない状態となるため、処理室８に設置されている図示しない昇降機構によって基板１０を支持して上昇させることにより、基板１０を搬送装置５０の載置部５から離脱させることができる。 Further, by continuing the extension operation of the link mechanism 20, the substrate 10 is carried into the processing chamber 8 as shown in FIG.
In this state, as described with reference to FIG. 3A, the biasing portion 6 a of the driven mechanism portion 6 and the side portion of the substrate 10 are not in contact with each other, so that the illustration shown in the processing chamber 8 is provided. The substrate 10 can be detached from the placement unit 5 of the transfer device 50 by supporting and raising the substrate 10 by the lifting mechanism that does not.

なお、従動機構部６の付勢部６ａと基板１０の側部との接触を解除するタイミングは、リンク機構２０が伸び切った状態と同時でもよいし、リンク機構２０が伸び切る前（直前）であってもよく、本発明が適用される搬送装置及び真空装置の大きさや配置構成に応じて適宜変更することができる。   The timing for releasing the contact between the biasing portion 6a of the driven mechanism portion 6 and the side portion of the substrate 10 may be the same as the state in which the link mechanism 20 is fully extended, or before the link mechanism 20 is fully extended (immediately before). However, it can be changed as appropriate according to the size and arrangement of the transfer device and vacuum device to which the present invention is applied.

その後、第１の左アーム１Ｌを反時計回り方向へ回転させるとともに、第１の右アーム１Ｒを時計回り方向へ回転させてリンク機構２０の縮み動作を行うことにより、載置部５を搬送室７内に戻して上述した状態にすることができる。   Thereafter, the first left arm 1L is rotated in the counterclockwise direction, and the first right arm 1R is rotated in the clockwise direction to perform the contraction operation of the link mechanism 20, whereby the placement unit 5 is moved into the transfer chamber. 7 to return to the state described above.

以上述べたように本実施の形態にあっては、リンク機構２０の動作先端部にスライド機構によって動作する付勢手段９を設け、基板搬送方向下流側に移動する従動機構部６の付勢部６ａと係止部５ａ、５ｂによって基板１０を機械的に把持して保持するようにしたので、載置部５上面での基板１０の滑りを抑制して（原理的には滑り無しで）、基板１０の高速搬送を実現することができる。   As described above, in the present embodiment, the biasing means 9 that operates by the slide mechanism is provided at the operating tip of the link mechanism 20, and the biasing section of the driven mechanism 6 that moves downstream in the substrate transport direction. Since the substrate 10 is mechanically gripped and held by the 6a and the locking portions 5a and 5b, the sliding of the substrate 10 on the upper surface of the mounting portion 5 is suppressed (in principle, no slipping), High-speed conveyance of the substrate 10 can be realized.

また、従動機構部６を含めて全ての部材を金属で作製することにより、搬送物や周囲の雰囲気温度が比較的低い環境下のみならず、搬送時の温度が高い（例えば３００〜５００℃）場合であっても熱変質や変形無しに基板１０の滑りを抑制することができる。
さらに、従動機構部６の付勢部６ａは凸状の部材であり、基板１０を把持する部分には摺動部が無いので、基板１０を汚染するダストの発生を低減することができる。 In addition, by making all members including the driven mechanism portion 6 from metal, not only the environment of the conveyed product and the surrounding atmosphere is relatively low, but also the temperature during conveyance is high (for example, 300 to 500 ° C.). Even if it is a case, the slip of the board | substrate 10 can be suppressed without a thermal alteration and a deformation | transformation.
Furthermore, the urging portion 6a of the driven mechanism portion 6 is a convex member, and since there is no sliding portion in the portion that holds the substrate 10, generation of dust that contaminates the substrate 10 can be reduced.

図５〜図７は、本発明の他の実施の形態を示すもので、以下、上述した実施の形態と対応する部分には共通の符号を付しその詳細な説明を省略する。
図５は、付勢手段の従動機構部に、当該付勢部の付勢力を減勢させるための減勢部材を有する例を示すものである。 5 to 7 show other embodiments of the present invention. In the following, portions corresponding to those of the above-described embodiments are denoted by common reference numerals, and detailed description thereof is omitted.
FIG. 5 shows an example in which the driven mechanism portion of the urging means has a depressing member for depressing the urging force of the urging portion.

図５に示すように、本実施の形態では、付勢部６ａの支持部６４が本体部６０の延びる方向に沿って移動するように構成され、これら本体部６０の先端部と付勢部６ａとの間の支持部６４の周囲には、圧縮コイルばね（減勢部材）６５が装着されている。そして、付勢部６ａの先端部に本体部６０方向への力が作用した場合に圧縮コイルばね６５の弾性力に抗して付勢部６ａが本体部６０方向へ移動するように構成されている。   As shown in FIG. 5, in the present embodiment, the support portion 64 of the urging portion 6a is configured to move along the direction in which the main body portion 60 extends, and the front end portion of the main body portion 60 and the urging portion 6a. A compression coil spring (a depressing member) 65 is mounted around the support portion 64 therebetween. And when the force to the main-body part 60 direction acts on the front-end | tip part of the urging | biasing part 6a, it is comprised so that the urging | biasing part 6a may move to the main-body part 60 direction against the elastic force of the compression coil spring 65. Yes.

このような構成を有する本実施の形態によれば、基板１０を保持（把持）する際に基板１０に対する付勢力を調整することができるので、種々の搬送物や装置構成に応じて設計の自由度が大きくなり汎用性が高くなるというメリットがある。その他の構成及び作用効果については上述の実施の形態と同一であるのでその詳細な説明を省略する。   According to the present embodiment having such a configuration, the urging force with respect to the substrate 10 can be adjusted when the substrate 10 is held (gripped). There is a merit that the degree becomes large and versatility becomes high. Since other configurations and operational effects are the same as those of the above-described embodiment, detailed description thereof is omitted.

図６は、本発明の更なる他の実施の形態の要部を示す部分断面側面図で、動力伝達機構４の下方に第３の左アーム３Ｌと第３の右アーム３Ｒが位置するように構成したものである。
図６に示すように、本実施の形態においては、動力伝達機構４の下方に設けられた第３の左アーム３Ｌと第３の右アーム３Ｒの先端部に、上述した構成の従動機構部６が配設され、その本体部６０が基板搬送方向に沿って直進移動するように構成されている。 FIG. 6 is a partial cross-sectional side view showing the main part of still another embodiment of the present invention so that the third left arm 3L and the third right arm 3R are positioned below the power transmission mechanism 4. It is composed.
As shown in FIG. 6, in the present embodiment, the driven mechanism portion 6 having the above-described configuration is provided at the distal ends of the third left arm 3 </ b> L and the third right arm 3 </ b> R provided below the power transmission mechanism 4. The main body 60 is configured to move straight along the substrate transport direction.

従動機構部６の本体部６０の先端部には、減勢部材６ｂが取り付けられている。この減勢部材６ｂは、例えばステンレス等の金属からなる板状の弾性材料から構成され、本体部６０の先端部から上方に向けて配設されている。   A biasing member 6 b is attached to the distal end portion of the main body portion 60 of the driven mechanism portion 6. The biasing member 6 b is made of a plate-like elastic material made of a metal such as stainless steel, and is disposed upward from the tip of the main body 60.

そして、減勢部材６ｂの先端部には例えば凹部形状の付勢部６ｃが設けられ、この付勢部６ｃが、載置部５に設けた孔部５ｃを介して載置部５上に突出して、従動機構部６の移動に伴い、基板１０の側部に対して付勢部６ｃの凹面部分が当接又は離間するように構成されている。
このような構成を有する本実施の形態によれば、上記実施の形態同様基板１０を保持（把持）する際に基板１０に対する付勢力を調整することができる。 The tip of the biasing member 6b is provided with, for example, a concave-shaped biasing portion 6c, and the biasing portion 6c protrudes onto the mounting portion 5 through a hole 5c provided in the mounting portion 5. As the driven mechanism portion 6 moves, the concave surface portion of the urging portion 6 c comes into contact with or separates from the side portion of the substrate 10.
According to the present embodiment having such a configuration, the urging force with respect to the substrate 10 can be adjusted when the substrate 10 is held (gripped) as in the above embodiment.

加えて、本実施の形態によれば、例えば、米国特許６，３６４，５９９Ｂ１の図２２や図２３に示されている上側のエンドエフェクタと下側のエンドエフェクタの上下間隔を小さくしたアーム機構の下側アームのウエハ把持機構として使用することができる。なお、このアーム機構の上側アームのウエハ把持機構として前述した図２（ａ）（ｂ）及び図３（ａ）（ｂ）の構成を使用できる。その他の構成及び作用効果については上述の実施の形態と同一であるのでその詳細な説明を省略する。   In addition, according to the present embodiment, for example, an arm mechanism in which the vertical distance between the upper end effector and the lower end effector shown in FIGS. 22 and 23 of US Pat. No. 6,364,599B1 is reduced. It can be used as a wafer gripping mechanism for the lower arm. 2A and 3B can be used as the wafer gripping mechanism of the upper arm of this arm mechanism. Since other configurations and operational effects are the same as those of the above-described embodiment, detailed description thereof is omitted.

図７は、本発明の更なる他の実施の形態の要部を示す構成図で、当該付勢部の付勢力を減勢させるための減勢部材を有する他の例を示すものである。
図７に示すように、本実施の形態は、図５に示す実施の形態の変形例であり、従動機構部６の本体部６０の先端部に、例えば本体部６０の延びる方向と直交する方向に延びる直線棒状の取付部材６７が固定され、この取付部材６７の両端部に、例えばステンレス等の金属からなる帯状リング状の二つの減勢付勢部６ｄ、６ｅが、取付部材６７から基板搬送方向下流側に突出するように取り付けられている。 FIG. 7 is a block diagram showing a main part of still another embodiment of the present invention, and shows another example having a biasing member for reducing the biasing force of the biasing part.
As shown in FIG. 7, the present embodiment is a modification of the embodiment shown in FIG. 5, and a direction orthogonal to the extending direction of the main body 60, for example, at the distal end of the main body 60 of the driven mechanism 6. A straight rod-shaped attachment member 67 extending in the direction of the belt is fixed, and two band-shaped ring-shaped biasing urging portions 6d and 6e made of metal such as stainless steel are transported from the attachment member 67 to the both ends of the attachment member 67, respectively. It is attached so as to protrude downstream in the direction.

ここで、二つの減勢付勢部６ｄ、６ｅは、同一の大きさ及び形状に形成され、上記第１及び第２の駆動軸１１、１２の回転中心軸線を通り基板搬送方向に延びる直線に対して線対称となるように配置されている。   Here, the two depressurizing and urging portions 6d and 6e are formed in the same size and shape, and are straight lines extending in the substrate transport direction through the rotation center axes of the first and second drive shafts 11 and 12. It arrange | positions so that it may become line symmetrical with respect to it.

このような構成を有する本実施の形態によれば、図５に示す実施の形態と同様基板１０を保持（把持）する際に基板１０に対する付勢力を調整することができることに加え、基板搬送方向に対して線対称に配置された二つの減勢付勢部６ｄ、６ｅによって基板１０を付勢するため、バランス良く基板１０を保持（把持）することができるというメリットがある。   According to the present embodiment having such a configuration, it is possible to adjust the urging force with respect to the substrate 10 when holding (gripping) the substrate 10 as in the embodiment shown in FIG. In contrast, since the substrate 10 is biased by the two biasing biasing portions 6d and 6e arranged in line symmetry, there is an advantage that the substrate 10 can be held (gripped) with a good balance.

なお、本実施の形態では、図６に示す実施の形態のように、第３の左アーム３Ｌと第３の右アーム３Ｒ並びに従動機構部６を動力伝達機構４の下方に位置するように構成することも可能である。   In the present embodiment, the third left arm 3L, the third right arm 3R, and the driven mechanism portion 6 are configured to be positioned below the power transmission mechanism 4 as in the embodiment shown in FIG. It is also possible to do.

この場合は、図６に示す実施の形態と同様に載置部５に孔部（図示せず）を設け、この孔部を介して取付部材６７及び減勢付勢部６ｄ、６ｅを載置部５の上方に位置させ、基板１０の側部に対して減勢付勢部６ｄ、６ｅが当接又は離間するように構成するとよい。   In this case, the mounting portion 5 is provided with a hole (not shown) as in the embodiment shown in FIG. 6, and the mounting member 67 and the depressing biasing portions 6d and 6e are mounted through the hole. The depressurizing and urging portions 6 d and 6 e may be configured to be positioned above the portion 5 and to be in contact with or separated from the side portion of the substrate 10.

このような本実施の形態によれば、例えば、米国特許６，３６４，５９９Ｂ１の図２２や図２３に示されている上側のエンドエフェクタと下側のエンドエフェクタの上下間隔を小さくしたアーム機構の下側アームのウエハ把持機構として使用できるというメリットがある。なお、このアーム機構の上側アームのウエハ把持機構として前述した図７の構成そのものを使用することができる。その他の構成及び作用効果については上述の実施の形態と同一であるのでその詳細な説明を省略する。   According to this embodiment, for example, an arm mechanism having a small vertical distance between the upper end effector and the lower end effector shown in FIGS. 22 and 23 of US Pat. No. 6,364,599B1. There is an advantage that it can be used as a wafer gripping mechanism of the lower arm. Note that the above-described configuration of FIG. 7 can be used as the wafer gripping mechanism of the upper arm of this arm mechanism. Since other configurations and operational effects are the same as those of the above-described embodiment, detailed description thereof is omitted.

図８（ａ）（ｂ）は、本発明の更なる他の実施の形態の要部を示す構成図で、図８（ａ）は、リンク機構２０が伸びた状態を示すもの、図８（ｂ）は、リンク機構２０が縮んだ状態を示すを示すものである。
図８（ａ）（ｂ）に示すように、本実施の形態では、従動部６１Ａには、従動部６１Ａの第３の右アーム３Ｒ側に対応する領域にのみ長孔６２Ａが設けられている。 8 (a) and 8 (b) are configuration diagrams showing the main part of still another embodiment of the present invention. FIG. 8 (a) shows a state in which the link mechanism 20 is extended, FIG. b) shows a state in which the link mechanism 20 is contracted.
As shown in FIGS. 8A and 8B, in the present embodiment, the follower 61A is provided with a long hole 62A only in a region corresponding to the third right arm 3R side of the follower 61A. .

この従動部６１Ａは、第３の左アーム３Ｌの表側面３０Ｌに設けた支軸３５を中心として水平方向に回動自在に支持されている。本例では、支軸３５は、上述した駆動凸部３１Ｌと同じ位置に設けられ、これにより従動部６１Ａが一方の端部（左側の端部）を中心として回動するように構成されている。   The follower 61A is supported so as to be rotatable in the horizontal direction about a support shaft 35 provided on the front side surface 30L of the third left arm 3L. In this example, the support shaft 35 is provided at the same position as the drive convex portion 31L described above, and thus the driven portion 61A is configured to rotate around one end portion (left end portion). .

従動部６１Ａの長孔６２Ａは、従動部６１Ａの長手方向に沿って直線状に延びるように形成され、第３の右アーム３Ｒに設けた駆動凸部３１Ｒ（回転軸３３Ｒ）と係合するように構成されている。   The elongated hole 62A of the driven portion 61A is formed so as to extend linearly along the longitudinal direction of the driven portion 61A, and engages with the driving convex portion 31R (rotary shaft 33R) provided on the third right arm 3R. It is configured.

また、本実施の形態の従動部６１Ａは、従動機構部６Ａの本体部６０と分離されている。そして、従動部６１Ａの基板搬送方向下流側の部位には、基板搬送方向に対して直交する方向に延び所定の大きさを有する駆動当接部６１ａが設けられている。
一方、従動機構部６Ａの本体部６０の付勢部６ａと反対側の端部には、上述した従動部６１Ａの駆動当接部６１ａと当接する従動当接部６０ａが設けられている。 Further, the driven portion 61A of the present embodiment is separated from the main body portion 60 of the driven mechanism portion 6A. A drive contact portion 61a extending in a direction orthogonal to the substrate transport direction and having a predetermined size is provided at a downstream side of the follower portion 61A in the substrate transport direction.
On the other hand, a driven contact portion 60a that contacts the drive contact portion 61a of the driven portion 61A described above is provided at the end portion of the driven mechanism portion 6A opposite to the biasing portion 6a of the main body portion 60.

また、従動機構部６Ａの本体部６０の付勢部６ａと反対側の端部には支持部６０ｂが設けられ、この支持部６０ｂと上述したガイド部材６３との間には、当該本体部６０の周囲に圧縮コイルばね６６が装着されている。   Further, a support portion 60b is provided at an end portion of the driven mechanism portion 6A opposite to the biasing portion 6a of the main body portion 60, and the main body portion 60 is provided between the support portion 60b and the guide member 63 described above. A compression coil spring 66 is mounted around the.

このような構成において、図８（ａ）に示す伸び状態から第３の左アーム３Ｌ及び第３の右アーム３Ｒを縮み方向への回転させると、従動部６１Ａが支軸３５を中心として時計回り方向に回転するとともに、駆動凸部３１Ｒが反時計回り方向に回転し、これにより従動部６１Ａが基板搬送方向下流側に移動する。   In such a configuration, when the third left arm 3L and the third right arm 3R are rotated in the contraction direction from the extended state shown in FIG. 8A, the driven portion 61A rotates clockwise about the support shaft 35. And the driving convex portion 31R rotates counterclockwise, whereby the driven portion 61A moves downstream in the substrate transport direction.

そして、従動部６１Ａの駆動当接部６１ａが従動機構部６Ａの本体部６０の従動当接部６０ａに当接しこれを基板搬送方向下流側に付勢することにより、従動機構部６Ａが圧縮コイルばね６６の弾性力に抗して基板搬送方向下流側に移動する。   Then, the drive contact portion 61a of the driven portion 61A contacts the driven contact portion 60a of the main body portion 60 of the driven mechanism portion 6A and urges it to the downstream side in the substrate transport direction, so that the driven mechanism portion 6A becomes a compression coil. It moves to the downstream side in the substrate transport direction against the elastic force of the spring 66.

その結果、従動機構部６Ａの基板搬送方向下流側の付勢部６ａが、搬送すべき基板１０の側部と接触し、基板１０の側部に対し、載置部５の係止部５ａ、５ｂに向かう方向の力Ｆが作用し、これにより、当該基板１０に対して基板搬送方向に関して上流及び下流側から押圧力が働き、載置部５上において基板１０が保持（把持）される。   As a result, the biasing portion 6a on the downstream side in the substrate transport direction of the driven mechanism portion 6A comes into contact with the side portion of the substrate 10 to be transported, and the locking portion 5a of the placement portion 5 is in contact with the side portion of the substrate 10. A force F in a direction toward 5 b acts, and thereby, a pressing force acts on the substrate 10 from the upstream side and the downstream side in the substrate transport direction, and the substrate 10 is held (gripped) on the mounting portion 5.

このような構成を有する本実施の形態によれば、従動機構部６Ａの付勢部６ａに設けられた従動当接部６０ａを適切な力で従動部６１Ａの駆動当接部６１ａに押し付けて密着させることができるので、従動機構部６Ａを例えばガイド部材６３に沿って確実に高精度で基板搬送方向下流側に移動させることができる。   According to the present embodiment having such a configuration, the driven contact portion 60a provided on the biasing portion 6a of the driven mechanism portion 6A is pressed against the drive contact portion 61a of the driven portion 61A with an appropriate force to be in close contact. Therefore, the driven mechanism portion 6A can be reliably moved to the downstream side in the substrate transport direction with high accuracy along the guide member 63, for example.

加えて、本実施の形態によれば、従動部６１Ａと本体部６０が分離しているので、付勢部６ａが基板１０の側部と接触する部分の近傍のみで本体部６０をスライドさせることができ、ガイド部材６３と本体部６０の摺動によるダストの発生を低減させることができるというメリットがある。その他の構成及び作用効果については上述の実施の形態と同一であるのでその詳細な説明を省略する。   In addition, according to the present embodiment, since the driven portion 61A and the main body portion 60 are separated, the main body portion 60 is slid only in the vicinity of the portion where the biasing portion 6a contacts the side portion of the substrate 10. There is a merit that generation of dust due to sliding between the guide member 63 and the main body 60 can be reduced. Since other configurations and operational effects are the same as those of the above-described embodiment, detailed description thereof is omitted.

なお、本発明は上述の実施の形態に限られることなく、種々の変更を行うことができる。
例えば、上述の実施の形態においては、駆動凸部と、従動部を貫通する長孔とを組み合わせて動力伝達を行うようにしたが、本発明はこれに限られず、駆動凸部に係合し摺動して動力伝達を行う構成である限り、従動側として凹部状の溝を用いることもできる。 The present invention is not limited to the above-described embodiment, and various changes can be made.
For example, in the above-described embodiment, the power is transmitted by combining the driving convex portion and the long hole penetrating the driven portion. However, the present invention is not limited to this, and the driving convex portion is engaged with the driving convex portion. As long as the power transmission is performed by sliding, a concave groove can be used as the driven side.

また、付勢手段のスライド機構に関し、駆動凸部の形状、長溝状摺動部の大きさ等については、本発明を適用する搬送装置に応じて適宜変更をすることができる。
さらに、本発明は種々のリンク機構を有する搬送装置及び複数の処理室を有する真空装置に適用することができるものである。
さらにまた、それぞれ相対的に平行移動する複数の隣接リンク部に駆動凸部を形成し、当該駆動凸部によって従動機構部を移動させ上述した動作によって搬送物を保持するように構成することも可能である。 Further, regarding the slide mechanism of the urging means, the shape of the drive convex portion, the size of the long groove-like sliding portion, and the like can be appropriately changed according to the transport device to which the present invention is applied.
Furthermore, the present invention can be applied to a transfer apparatus having various link mechanisms and a vacuum apparatus having a plurality of processing chambers.
Furthermore, it is also possible to form a driving convex portion on a plurality of adjacent link portions that move relatively in parallel, and to move the driven mechanism portion by the driving convex portion to hold the conveyed product by the above-described operation. It is.

本発明に係る搬送装置の実施の形態の構成を示す平面図The top view which shows the structure of embodiment of the conveying apparatus which concerns on this invention （ａ）：同実施の形態における付勢手段の全体を示す構成図、（ｂ）：同実施の形態における付勢手段の従動機構部を示す構成図（図２（ａ）のＡ−Ａ線断面図）(A): The block diagram which shows the whole urging | biasing means in the embodiment, (b): The block diagram which shows the driven mechanism part of the urging means in the embodiment (AA line of FIG. 2 (a)) (Cross section) （ａ）（ｂ）：本発明の動作原理及び構成を詳細に示す説明図(A) (b): Explanatory drawing which shows the operation principle and structure of this invention in detail （ａ）〜（ｃ）：本発明の実施の形態における搬送装置の動作を示す説明図(A)-(c): Explanatory drawing which shows operation | movement of the conveying apparatus in embodiment of this invention. 本発明の他の実施の形態の要部を示す構成図The block diagram which shows the principal part of other embodiment of this invention 本発明の更なる他の実施の形態の要部を示す部分断面側面図The fragmentary sectional side view which shows the principal part of further another embodiment of this invention 本発明の更なる他の実施の形態の要部を示す構成図The block diagram which shows the principal part of further another embodiment of this invention （ａ）（ｂ）：本発明の更なる他の実施の形態の要部を示す構成図(A) (b): The block diagram which shows the principal part of further another embodiment of this invention 従来技術に係る搬送装置の概略構成図Schematic configuration diagram of a transfer device according to the prior art 従来技術に係る搬送装置の要部概略構成図Schematic configuration diagram of the main part of a conventional transport device

符号の説明Explanation of symbols

１Ｌ…第１の左アーム、１Ｒ…第１の右アーム、２Ｌ…第２の左アーム、２Ｒ…第２の右アーム、３Ｌ…第３の左アーム（駆動リンク部）、３Ｒ…第３の右アーム（駆動リンク部）、４…動力伝達機構、５…載置部、５ａ、５ｂ…係止部、６…従動機構部、６ａ…付勢部、７…搬送室、８…処理室、９…付勢手段、１０…基板（搬送物）、２０…リンク機構、３１Ｌ，３１Ｒ…駆動凸部（凸状の駆動支持部）、５０…搬送装置、６１…従動部、６２…長孔（長溝状摺動部） 1L ... 1st left arm, 1R ... 1st right arm, 2L ... 2nd left arm, 2R ... 2nd right arm, 3L ... 3rd left arm (drive link part), 3R ... 3rd Right arm (drive link portion), 4 ... power transmission mechanism, 5 ... mounting portion, 5a, 5b ... locking portion, 6 ... driven mechanism portion, 6a ... biasing portion, 7 ... conveying chamber, 8 ... processing chamber, DESCRIPTION OF SYMBOLS 9 ... Energizing means, 10 ... Board | substrate (conveyed object), 20 ... Link mechanism, 31L, 31R ... Drive convex part (convex drive support part), 50 ... Conveyance apparatus, 61 ... Drive part, 62 ... Long hole ( Long groove sliding part)

Claims (9)

駆動源からの動力が伝達される複数のアームを有する伸縮自在なリンク機構と、
前記リンク機構の動作先端部において駆動リンク部を介して連結され、搬送物を載置するための載置部とを備え、
前記載置部には、当該搬送物の側部と当接して係止するための係止部が設けられるとともに、
前記リンク機構の駆動リンク部にはスライド機構による付勢手段が設けられ、
前記付勢手段は、前記リンク機構の駆動リンク部に設けられた駆動支持部と、当該駆動支持部によって駆動される従動機構部とを備え、
前記従動機構部は、前記駆動支持部と係合摺動可能な長溝状摺動部を有する従動部と、当該従動部に連結され当該従動部の長溝状摺動部内における前記駆動支持部の移動に応じて前記載置部の係止部に向かう方向に沿って案内移動される付勢部とを有する搬送装置。 A telescopic link mechanism having a plurality of arms to which power from a drive source is transmitted;
A connecting portion for placing a transported object, connected via a drive link portion at the operating tip of the link mechanism;
The mounting portion is provided with a locking portion for contacting and locking with the side portion of the conveyed product,
The drive link portion of the link mechanism is provided with a biasing means by a slide mechanism,
The biasing means includes a drive support portion provided in a drive link portion of the link mechanism, and a driven mechanism portion driven by the drive support portion,
The driven mechanism section includes a driven section having a long groove-shaped sliding section that can be slidably engaged with the drive support section, and movement of the drive support section within the long groove-shaped sliding section of the driven section connected to the driven section. And a biasing portion that is guided and moved along a direction toward the locking portion of the placement portion. 前記付勢手段は、回転方向が反対方向である一対の隣接するリンク部材にそれぞれ凸状の前記駆動支持部が設けられ、かつ、前記従動機構部には、前記一対の隣接するリンク部材にそれぞれ設けられた当該凸状の駆動支持部と係合する長溝状摺動部を有する従動部と、凸状の前記付勢部を有する請求項１記載の搬送装置。   The biasing means includes a pair of adjacent link members whose rotation directions are opposite to each other, and the convex drive support portions are provided on the pair of adjacent link members, respectively, and the driven mechanism portion is provided on each of the pair of adjacent link members. The conveying apparatus according to claim 1, further comprising: a driven portion having a long groove-like sliding portion that engages with the convex drive support portion provided; and the convex urging portion. 前記付勢手段は、回転方向が反対方向である一対の隣接するリンク部材の一方に支軸を中心として回動自在の従動部が設けられるとともに、前記一対の隣接するリンク部材の他方に凸状の前記駆動支持部が設けられ、前記一対の隣接するリンク部材の他方に設けられた当該凸状の駆動支持部と、前記従動部に設けられた長溝状摺動部とが係合摺動するように構成されている請求項１記載の搬送装置。   The biasing means is provided with a follower that is rotatable about a support shaft on one of a pair of adjacent link members whose rotation directions are opposite to each other, and is convex on the other of the pair of adjacent link members The convex drive support portion provided on the other of the pair of adjacent link members and the long groove-like slide portion provided on the follower portion are engaged and slid. The conveying apparatus according to claim 1 configured as described above. 前記従動機構部は、前記従動部と前記付勢部とが一体的に構成されている請求項１乃至３のいずれか１項記載の搬送装置。   The conveying device according to any one of claims 1 to 3, wherein the driven mechanism unit is configured such that the driven unit and the urging unit are integrally formed. 前記従動機構部は、前記従動部と前記付勢部とが分離され、前記従動部側に設けられた駆動当接部と前記付勢部側に設けられた従動当接部とが、前記従動部の移動に伴って当接して動力を伝達するように構成されている請求項１乃至４のいずれか１項記載の搬送装置。   In the driven mechanism section, the driven section and the urging section are separated from each other, and a driving contact section provided on the driven section side and a driven contact section provided on the urging section side include the driven section. The conveying device according to any one of claims 1 to 4, wherein the conveying device is configured to contact with the movement of the portion to transmit power. 前記従動機構部の付勢部側には、前記従動部に対する付勢力を調整するための付勢力調整部材を有する請求項５記載の搬送装置。   The conveying device according to claim 5, further comprising an urging force adjusting member for adjusting an urging force with respect to the driven portion on the urging portion side of the driven mechanism portion. 前記付勢手段の従動機構部の付勢部には、当該付勢部の付勢力を減勢させるための減勢部材を有する請求項１乃至６のいずれか１項記載の搬送装置。   The conveying device according to any one of claims 1 to 6, wherein the urging portion of the driven mechanism portion of the urging means has a urging member for urging the urging force of the urging portion. 前記従動機構部の従動部の長溝状摺動部は、長孔である請求項１乃至７のいずれか１項記載の搬送装置。   The conveying device according to claim 1, wherein the long groove-like sliding portion of the driven portion of the driven mechanism portion is a long hole. 真空槽と、
請求項１乃至請求項８のいずれか１項記載の搬送装置とを有し、
前記搬送装置の載置部が前記真空槽内に対して搬入及び搬出するように構成されている真空装置。 A vacuum chamber;
It has a conveyance device given in any 1 paragraph of Claims 1 thru / or 8,
The vacuum apparatus comprised so that the mounting part of the said conveying apparatus may carry in and out in the said vacuum chamber.
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