JP2009507166A - 真空ポンプ - Google Patents

真空ポンプ Download PDF

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Publication number
JP2009507166A
JP2009507166A JP2008528456A JP2008528456A JP2009507166A JP 2009507166 A JP2009507166 A JP 2009507166A JP 2008528456 A JP2008528456 A JP 2008528456A JP 2008528456 A JP2008528456 A JP 2008528456A JP 2009507166 A JP2009507166 A JP 2009507166A
Authority
JP
Japan
Prior art keywords
pump
rotor
pump rotor
vacuum pump
stator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2008528456A
Other languages
English (en)
Japanese (ja)
Inventor
グレーフェン アロイス
ロンゲリヒ トーマス
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of JP2009507166A publication Critical patent/JP2009507166A/ja
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
JP2008528456A 2005-09-01 2006-08-15 真空ポンプ Pending JP2009507166A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005041500A DE102005041500A1 (de) 2005-09-01 2005-09-01 Vakuumpumpe
PCT/EP2006/065315 WO2007025854A1 (de) 2005-09-01 2006-08-15 Vakuumpumpe

Publications (1)

Publication Number Publication Date
JP2009507166A true JP2009507166A (ja) 2009-02-19

Family

ID=37115720

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008528456A Pending JP2009507166A (ja) 2005-09-01 2006-08-15 真空ポンプ

Country Status (6)

Country Link
US (1) US20100303640A1 (de)
EP (1) EP1920160B1 (de)
JP (1) JP2009507166A (de)
CN (1) CN100585188C (de)
DE (2) DE102005041500A1 (de)
WO (1) WO2007025854A1 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011516794A (ja) * 2008-04-17 2011-05-26 オーリコン レイボルド バキューム ゲーエムベーハー 真空ポンプ
JP2012074035A (ja) * 2010-09-27 2012-04-12 General Electric Co <Ge> 回転子表面のリアルタイム測定

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007053980A1 (de) * 2007-11-13 2009-05-14 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102008019451A1 (de) 2008-04-17 2009-10-22 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
WO2011140276A2 (en) * 2010-05-04 2011-11-10 Remy Technologies, Llc Electric machine component temperature monitoring
FR2964164B1 (fr) * 2010-09-01 2014-05-09 Snecma Turbomachine comprenant un element tournant soumis a des conditions extremes
DE102010049138A1 (de) * 2010-10-22 2012-04-26 Ksb Aktiengesellschaft Vorrichtung zur Pumpenüberwachung
DE102011112748B3 (de) * 2011-09-07 2012-12-27 Maschinenfabrik Reinhausen Gmbh Motorantrieb zur Betätigung eines Stufenschalters
US9046431B2 (en) * 2012-06-28 2015-06-02 Honeywell International Inc. Single ear stator antenna for wireless torque measurement system
CN104005968B (zh) * 2014-06-05 2016-01-20 核工业理化工程研究院 可测转子表面温度的牵引式分子泵
CN104612984B (zh) * 2015-01-26 2017-02-22 核工业理化工程研究院 牵引式分子泵的转子端面测温装置
JP2018035684A (ja) * 2016-08-29 2018-03-08 株式会社島津製作所 真空ポンプ
EP3443993A1 (de) * 2017-08-17 2019-02-20 Berlin Heart GmbH Pumpe mit einem rotorsensor zur erfassung von physiologischen parametern, strömungs- und bewegungsparametern

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3824857A (en) * 1972-08-07 1974-07-23 Electric Machinery Mfg Co Temperature measuring system for rotating machines
JP2001322411A (ja) * 2000-05-12 2001-11-20 Denso Corp 空気圧検出装置及びタイヤ状態監視システム
JP2002039088A (ja) * 2000-07-26 2002-02-06 Seiko Instruments Inc 回転体装置
JP2005170274A (ja) * 2003-12-12 2005-06-30 Toyota Motor Corp 車輪状態検出装置、車輪及び車体

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4723445A (en) * 1986-05-19 1988-02-09 Neotech Industries, Inc. Vehicle wheel and tire pressure monitor
US5252962A (en) * 1990-08-03 1993-10-12 Bio Medic Data Systems System monitoring programmable implantable transponder
US5160925C1 (en) * 1991-04-17 2001-03-06 Halliburton Co Short hop communication link for downhole mwd system
DE4309018A1 (de) * 1993-03-20 1994-09-22 Balzers Pfeiffer Gmbh Temperatur-Meßanordnung
US5844130A (en) * 1996-04-03 1998-12-01 Ssi Technologies Apparatus for maintaining a constant radial distance between a transmitting circuit and an antenna coil
JP2000064986A (ja) * 1998-08-12 2000-03-03 Seiko Seiki Co Ltd ターボ分子ポンプ
DE69909507T2 (de) * 1998-12-03 2004-06-09 Psi Global Ltd., Bowburn Verdichter oder vakuumpumpe, die einen fluidfilter mit verborgener maschinenlesbarer identifizierung anwendet
DE19857453B4 (de) * 1998-12-12 2008-03-20 Pfeiffer Vacuum Gmbh Temperaturüberwachung an Rotoren von Vakuumpumpen
US6369712B2 (en) * 1999-05-17 2002-04-09 The Goodyear Tire & Rubber Company Response adjustable temperature sensor for transponder
DE10018513A1 (de) * 2000-04-14 2001-10-18 Knorr Bremse Systeme Überwachungseinrichtung für Bremsscheiben und Überwachungsverfahren zur Überwachung der Temperatur von Bremsscheiben
DE10114969A1 (de) * 2001-03-27 2002-10-10 Leybold Vakuum Gmbh Turbomolekularpumpe
JP2003269367A (ja) * 2002-03-13 2003-09-25 Boc Edwards Technologies Ltd 真空ポンプ
DE20206267U1 (de) * 2002-04-20 2003-08-28 Leybold Vakuum Gmbh Vakuumpumpe
US6739840B2 (en) * 2002-05-22 2004-05-25 Applied Materials Inc Speed control of variable speed pump
US20060078435A1 (en) * 2004-08-19 2006-04-13 Metropolitan Industries Pump monitoring system
US7336153B2 (en) * 2005-06-30 2008-02-26 Hewlett-Packard Development Company, L.P. Wireless temperature monitoring for an electronics system
WO2007044593A2 (en) * 2005-10-07 2007-04-19 Chemimage Corporation System and method for a chemical imaging threat assessor with a probe

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3824857A (en) * 1972-08-07 1974-07-23 Electric Machinery Mfg Co Temperature measuring system for rotating machines
JP2001322411A (ja) * 2000-05-12 2001-11-20 Denso Corp 空気圧検出装置及びタイヤ状態監視システム
JP2002039088A (ja) * 2000-07-26 2002-02-06 Seiko Instruments Inc 回転体装置
JP2005170274A (ja) * 2003-12-12 2005-06-30 Toyota Motor Corp 車輪状態検出装置、車輪及び車体

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011516794A (ja) * 2008-04-17 2011-05-26 オーリコン レイボルド バキューム ゲーエムベーハー 真空ポンプ
JP2012074035A (ja) * 2010-09-27 2012-04-12 General Electric Co <Ge> 回転子表面のリアルタイム測定

Also Published As

Publication number Publication date
WO2007025854A1 (de) 2007-03-08
CN101253332A (zh) 2008-08-27
EP1920160B1 (de) 2009-01-07
US20100303640A1 (en) 2010-12-02
DE502006002609D1 (de) 2009-02-26
EP1920160A1 (de) 2008-05-14
CN100585188C (zh) 2010-01-27
DE102005041500A1 (de) 2007-03-08

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