JP2009260379A - ボンディング装置およびそれを用いたボンディング方法 - Google Patents
ボンディング装置およびそれを用いたボンディング方法 Download PDFInfo
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- JP2009260379A JP2009260379A JP2009178493A JP2009178493A JP2009260379A JP 2009260379 A JP2009260379 A JP 2009260379A JP 2009178493 A JP2009178493 A JP 2009178493A JP 2009178493 A JP2009178493 A JP 2009178493A JP 2009260379 A JP2009260379 A JP 2009260379A
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- H01—ELECTRIC ELEMENTS
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- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/75—Apparatus for connecting with bump connectors or layer connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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- H—ELECTRICITY
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- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
- H01L2224/7525—Means for applying energy, e.g. heating means
- H01L2224/753—Means for applying energy, e.g. heating means by means of pressure
- H01L2224/75301—Bonding head
- H01L2224/75314—Auxiliary members on the pressing surface
- H01L2224/75315—Elastomer inlay
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- H—ELECTRICITY
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- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/831—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector the layer connector being supplied to the parts to be connected in the bonding apparatus
- H01L2224/83101—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector the layer connector being supplied to the parts to be connected in the bonding apparatus as prepeg comprising a layer connector, e.g. provided in an insulating plate member
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/156—Material
- H01L2924/15786—Material with a principal constituent of the material being a non metallic, non metalloid inorganic material
- H01L2924/15788—Glasses, e.g. amorphous oxides, nitrides or fluorides
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- Liquid Crystal (AREA)
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Abstract
【解決手段】熱圧着ツール20における押圧ヘッド部21の押圧面21aが湾曲した凹面に形成され、ステージ10における圧着支持部12の支持面12aが湾曲した凸面に形成されたボンディング装置に、液晶表示素子1の基板延出部3aの所定位置に異方性導電接着材7を介して半導体チップ6が配置された液晶パネルワークWをセットし、熱圧着ツール20の基体部22に埋設されているヒータ23をオンして昇温させた押圧面21aで半導体チップ6の表面を加熱しつつ加圧する。
【選択図】図1
Description
図1は、本発明の一実施形態としての熱圧着式ボンディング装置によって液晶表示素子にLSIチップをCOGボンディングする工程を示す斜視図で、図2(a)はその熱圧着工程における圧着状態を示す模式的側断面図、図2(b)は熱圧着を終え放置冷却されて得られた液晶表示パネルを示す模式的断面図である。
例えば、図1に示す実施形態において、図5に示すように、熱圧着ツール20の押圧ヘッド部21を基体部22に対し着脱自在に分割してもよい。この場合、ヒータ23は基体部22に埋設することが好ましい。これにより、図3に示す実施形態等と同様に、製造すべき液晶表示パネルの機種変更に柔軟に対応可能となる。
2、3 ガラス基板
4 前偏光板
5 引き出し配線
6 半導体チップ
7 異方性導電接着材
10、40、60 ステージ
11 本体支持部
12 圧着支持部
12a、41a 支持面
20、30、50 熱圧着ツール
21 押圧ヘッド部
21a 押圧面
22 基体部
23、33 ヒータ
31、51 当接部材
32 ツール本体
41、61 支持部材
42 ステージ本体
Claims (5)
- 回路基板表面の所定位置に回路素子を熱硬化性の導電接着部材を介して搭載するボンディング装置であって、
前記回路基板の少なくとも前記回路素子が搭載される領域を支持する支持面が、湾曲した凸面をなすステージと、
加熱手段を有し、前記ステージに支持された回路基板上に載置された前記回路素子を加熱しつつ加圧するために当接させる押圧面が、前記ステージの支持面の曲率に対応した曲率で湾曲した凹面をなす熱圧着ツールとを、備えることを特徴とするボンディング装置。 - 前記熱圧着ツールは、前記押圧面を有する当接部材と、該当接部材を着脱自在に保持すると共に前記回路素子に接離させる基体部とから、なることを特徴とする請求項1に記載のボンディング装置。
- 前記熱圧着ツールの押圧面と前記ステージの支持面とは、それぞれ、実質的に同心円の円周面をなしている請求項1または請求項2に記載のボンディング装置。
- 回路基板表面の所定位置に回路素子を熱硬化性の導電接着部材を介して搭載するボンディング装置であって、
前記回路基板の前記回路素子が搭載される領域の中央部を支持するステージと、
加熱手段を有し、前記ステージに支持された回路基板上に配置されている前記回路素子に当接し、前記回路素子を加熱するとともに、前記回路素子の両側部を加圧する熱圧着ツールとを、備えることを特徴とするボンディング装置。 - 前記ステージが前記回路基板を支持する支持部材及び該支持部材が設置される基体部とからなり、且つ、前記熱圧着ツールが前記加熱手段を有すると共に昇降駆動されるツール本体部及び該ツール本体部と前記回路素子との間に介在させる当接部材とからなることを特徴とする請求項4に記載のボンディング装置。
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JP2004246223A Division JP4385895B2 (ja) | 2004-08-26 | 2004-08-26 | ボンディング装置 |
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Cited By (6)
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JP2010166097A (ja) * | 2010-04-28 | 2010-07-29 | Sony Chemical & Information Device Corp | 接続方法、接続装置及び接続方法を用いて得られる接続構造体 |
WO2014190674A1 (zh) * | 2013-05-31 | 2014-12-04 | 北京京东方光电科技有限公司 | 去除ic的装置 |
CN104570455A (zh) * | 2014-12-19 | 2015-04-29 | 深圳市华星光电技术有限公司 | 一种液晶显示面板的制作方法 |
WO2017107094A1 (zh) * | 2015-12-23 | 2017-06-29 | 深圳市柔宇科技有限公司 | 绑定装置及柔性显示模组的绑定方法 |
CN108962775A (zh) * | 2018-06-20 | 2018-12-07 | 武汉华星光电半导体显示技术有限公司 | 一种芯片的绑定模组及装置 |
JP2018206792A (ja) * | 2017-05-30 | 2018-12-27 | Tdk株式会社 | 熱圧着装置および電子部品の製造方法 |
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JPS6386530A (ja) * | 1986-09-30 | 1988-04-16 | Oki Electric Ind Co Ltd | 半導体装置の製造方法 |
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JP2000150584A (ja) * | 1998-11-13 | 2000-05-30 | Matsushita Electric Ind Co Ltd | 半導体素子実装装置 |
JP2000150580A (ja) * | 1998-11-09 | 2000-05-30 | Matsushita Electric Ind Co Ltd | 半導体素子実装装置および半導体素子実装方法 |
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2009
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Patent Citations (5)
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JPS6386530A (ja) * | 1986-09-30 | 1988-04-16 | Oki Electric Ind Co Ltd | 半導体装置の製造方法 |
JPH08293525A (ja) * | 1995-02-23 | 1996-11-05 | Matsushita Electric Works Ltd | リード付き基板の接合方法 |
JP2000150580A (ja) * | 1998-11-09 | 2000-05-30 | Matsushita Electric Ind Co Ltd | 半導体素子実装装置および半導体素子実装方法 |
JP2000150584A (ja) * | 1998-11-13 | 2000-05-30 | Matsushita Electric Ind Co Ltd | 半導体素子実装装置 |
JP2004071608A (ja) * | 2002-08-01 | 2004-03-04 | Matsushita Electric Ind Co Ltd | 半導体装置の製造装置 |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010166097A (ja) * | 2010-04-28 | 2010-07-29 | Sony Chemical & Information Device Corp | 接続方法、接続装置及び接続方法を用いて得られる接続構造体 |
WO2014190674A1 (zh) * | 2013-05-31 | 2014-12-04 | 北京京东方光电科技有限公司 | 去除ic的装置 |
CN104216154A (zh) * | 2013-05-31 | 2014-12-17 | 北京京东方光电科技有限公司 | 一种去除ic的装置 |
CN104570455A (zh) * | 2014-12-19 | 2015-04-29 | 深圳市华星光电技术有限公司 | 一种液晶显示面板的制作方法 |
WO2017107094A1 (zh) * | 2015-12-23 | 2017-06-29 | 深圳市柔宇科技有限公司 | 绑定装置及柔性显示模组的绑定方法 |
CN107210242A (zh) * | 2015-12-23 | 2017-09-26 | 深圳市柔宇科技有限公司 | 绑定装置及柔性显示模组的绑定方法 |
US10126578B2 (en) | 2015-12-23 | 2018-11-13 | Shenzhen Royole Technologies Co., Ltd. | Bonding apparatus and bonding method of flexible display module |
EP3324425A4 (en) * | 2015-12-23 | 2019-03-06 | Shenzhen Royole Technologies Co., Ltd | BONDING DEVICE AND BOND PROCESS OF A FLEXIBLE DISPLAY MODULE |
JP2018206792A (ja) * | 2017-05-30 | 2018-12-27 | Tdk株式会社 | 熱圧着装置および電子部品の製造方法 |
US11139626B2 (en) * | 2017-05-30 | 2021-10-05 | Tdk Corporation | Thermocompression apparatus and method of manufacturing electronic device |
CN108962775A (zh) * | 2018-06-20 | 2018-12-07 | 武汉华星光电半导体显示技术有限公司 | 一种芯片的绑定模组及装置 |
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