JP2009147283A - 基板搬送装置 - Google Patents
基板搬送装置 Download PDFInfo
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- JP2009147283A JP2009147283A JP2008034467A JP2008034467A JP2009147283A JP 2009147283 A JP2009147283 A JP 2009147283A JP 2008034467 A JP2008034467 A JP 2008034467A JP 2008034467 A JP2008034467 A JP 2008034467A JP 2009147283 A JP2009147283 A JP 2009147283A
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- Prior art keywords
- substrate
- arm portions
- transfer apparatus
- base
- substrate transfer
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
- H01L21/67781—Batch transfer of wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/02—Controlled or contamination-free environments or clean space conditions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Nonlinear Science (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Optics & Photonics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
【解決手段】基板搬送装置100は、基台110と、基台の側面に互いに平行に配置された複数のアーム部120と、複数のアーム部上に配置された真空吸着用の複数のファスナ130と、を備え、アーム部上に基板が載置されているか否かを検知するセンサと、センサがアーム部上に基板が載置されていることを検知したときに、複数の真空チャックを駆動させて基板を吸着させる駆動装置と、をさらに備える。
【選択図】図1
Description
そのため本発明の目的は、複数の基板を同時に搬入出および搬送することが可能な複数のアーム部を有する基板搬送装置を提供することにある。
Claims (8)
- 基台と、
前記基台の側面に互いに平行に配置された複数のアーム部と、
前記複数のアーム部上に配置された複数のファスナと、を備えることを特徴とする基板搬送装置。 - 前記複数のファスナは真空チャックであることを特徴とする請求項1に記載の基板搬送装置。
- 前記複数のアーム部上に少なくとも1つの基板が載置されているか否かを検知するセンサと、
前記センサが前記複数のアーム部上に前記基板が載置されていることを検知した時に、前記複数の真空チャックを駆動させて前記基板を吸着させる駆動装置と、をさらに備えることを特徴とする請求項2に記載の基板搬送装置。 - 前記複数のアーム部は抗静電気材料からなることを特徴とする請求項1に記載の基板搬送装置。
- 基台と、
前記基台の側面に互いに同じ垂直高度で離間した複数のアーム部と、
前記複数のアーム部上に配置された複数のファスナと、を備えることを特徴とする基板搬送装置。 - 前記複数のファスナは真空チャックであることを特徴とする請求項5に記載の基板搬送装置。
- 前記複数のアーム部上に少なくとも1つの基板が載置されているか否かを検知するセンサと、
前記センサが前記複数のアーム部上に前記基板が載置されていることを検知した時に、前記複数の真空チャックを駆動させて前記基板を吸着させる駆動装置と、をさらに備えることを特徴とする請求項6に記載の基板搬送装置。 - 前記複数のアーム部は抗静電気材料からなることを特徴とする請求項5に記載の基板搬送装置。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW096148009A TWI372717B (en) | 2007-12-14 | 2007-12-14 | Apparatus for transferring substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2009147283A true JP2009147283A (ja) | 2009-07-02 |
Family
ID=40753880
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008034467A Pending JP2009147283A (ja) | 2007-12-14 | 2008-02-15 | 基板搬送装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US20090156082A1 (ja) |
JP (1) | JP2009147283A (ja) |
KR (1) | KR100982818B1 (ja) |
TW (1) | TWI372717B (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2021164427A1 (zh) * | 2020-02-21 | 2021-08-26 | 深圳市华星光电半导体显示技术有限公司 | 加工平台 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108190519A (zh) * | 2018-01-26 | 2018-06-22 | 江苏大丰和顺电子有限公司 | 一种平板电视机保护玻璃转运*** |
WO2021107207A1 (ko) * | 2019-11-29 | 2021-06-03 | 엘지전자 주식회사 | 자기부상 반송장치 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0529435A (ja) * | 1991-07-24 | 1993-02-05 | Tokyo Electron Ltd | 搬送装置 |
JPH0672974U (ja) * | 1993-03-31 | 1994-10-11 | 株式会社芝浦製作所 | 搬送装置 |
JP2001110874A (ja) * | 1999-10-07 | 2001-04-20 | Texas Instr Japan Ltd | 半導体ウェハの搬送ハンド |
JP2002517088A (ja) * | 1998-05-27 | 2002-06-11 | バリアン・セミコンダクター・エクイップメント・アソシエイツ・インコーポレイテッド | 半導体ウエハハンドリング用バッチ式エンドエフェクタ |
JP2003086659A (ja) * | 2001-09-11 | 2003-03-20 | Hirata Corp | 基板の移載装置 |
JP2005534587A (ja) * | 2002-07-29 | 2005-11-17 | イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニー | 反射面付き炭素繊維複合移動部材 |
Family Cites Families (25)
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FR2656599B1 (fr) * | 1989-12-29 | 1992-03-27 | Commissariat Energie Atomique | Dispositif de rangement d'objets plats dans une cassette avec rayonnages intermediaires. |
US5297910A (en) * | 1991-02-15 | 1994-03-29 | Tokyo Electron Limited | Transportation-transfer device for an object of treatment |
JP2867194B2 (ja) * | 1992-02-05 | 1999-03-08 | 東京エレクトロン株式会社 | 処理装置及び処理方法 |
US5562387A (en) * | 1993-10-04 | 1996-10-08 | Tokyo Electron Limited | Device for transferring plate-like objects |
US5565034A (en) * | 1993-10-29 | 1996-10-15 | Tokyo Electron Limited | Apparatus for processing substrates having a film formed on a surface of the substrate |
AU5994898A (en) * | 1997-02-08 | 1998-08-26 | Rodney Philip Jackson | A positional device |
JPH1111663A (ja) * | 1997-06-27 | 1999-01-19 | Tokyo Electron Ltd | 基板搬送装置 |
US6053688A (en) * | 1997-08-25 | 2000-04-25 | Cheng; David | Method and apparatus for loading and unloading wafers from a wafer carrier |
JP4296587B2 (ja) * | 1998-02-09 | 2009-07-15 | 株式会社ニコン | 基板支持装置、基板搬送装置及びその方法、基板保持方法、並びに露光装置及びその製造方法 |
JP3260683B2 (ja) | 1998-02-23 | 2002-02-25 | 鹿児島日本電気株式会社 | 基板移載装置 |
US6450755B1 (en) * | 1998-07-10 | 2002-09-17 | Equipe Technologies | Dual arm substrate handling robot with a batch loader |
TW502346B (en) * | 2000-02-17 | 2002-09-11 | Matsushita Electric Ind Co Ltd | Component mounting apparatus and component mounting method, and, recognition apparatus for component mount panel, component mounting apparatus for liquid crystal panel, and component mounting method for liquid crystal panel |
DE10013413C2 (de) * | 2000-03-17 | 2003-06-05 | Harry Gaus | Rollsportgerät |
US6464445B2 (en) * | 2000-12-19 | 2002-10-15 | Infineon Technologies Richmond, Lp | System and method for improved throughput of semiconductor wafer processing |
JP3916473B2 (ja) * | 2002-01-31 | 2007-05-16 | 東京エレクトロン株式会社 | 基板処理装置および基板処理方法 |
JP2004022807A (ja) | 2002-06-17 | 2004-01-22 | Renesas Technology Corp | 半導体処理装置およびその調整方法 |
JP3779702B2 (ja) * | 2003-06-27 | 2006-05-31 | 株式会社シマノ | 自転車用フロントフォーク、自転車用ハブ、及びそれらを備えた自転車用電力供給システム |
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TWI293281B (en) * | 2003-08-22 | 2008-02-11 | Innolux Display Corp | Substrate transfer |
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TWI241934B (en) * | 2003-12-03 | 2005-10-21 | Quanta Display Inc | Apparatus and method for inspecting and repairing circuit defect |
JP2006156667A (ja) * | 2004-11-29 | 2006-06-15 | Fujitsu Ltd | ウェハ移載装置及び半導体装置の製造方法 |
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-
2007
- 2007-12-14 TW TW096148009A patent/TWI372717B/zh not_active IP Right Cessation
-
2008
- 2008-02-15 JP JP2008034467A patent/JP2009147283A/ja active Pending
- 2008-04-17 US US12/104,687 patent/US20090156082A1/en not_active Abandoned
- 2008-05-30 KR KR1020080050645A patent/KR100982818B1/ko active IP Right Grant
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0529435A (ja) * | 1991-07-24 | 1993-02-05 | Tokyo Electron Ltd | 搬送装置 |
JPH0672974U (ja) * | 1993-03-31 | 1994-10-11 | 株式会社芝浦製作所 | 搬送装置 |
JP2002517088A (ja) * | 1998-05-27 | 2002-06-11 | バリアン・セミコンダクター・エクイップメント・アソシエイツ・インコーポレイテッド | 半導体ウエハハンドリング用バッチ式エンドエフェクタ |
JP2001110874A (ja) * | 1999-10-07 | 2001-04-20 | Texas Instr Japan Ltd | 半導体ウェハの搬送ハンド |
JP2003086659A (ja) * | 2001-09-11 | 2003-03-20 | Hirata Corp | 基板の移載装置 |
JP2005534587A (ja) * | 2002-07-29 | 2005-11-17 | イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニー | 反射面付き炭素繊維複合移動部材 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2021164427A1 (zh) * | 2020-02-21 | 2021-08-26 | 深圳市华星光电半导体显示技术有限公司 | 加工平台 |
Also Published As
Publication number | Publication date |
---|---|
TW200925083A (en) | 2009-06-16 |
TWI372717B (en) | 2012-09-21 |
US20090156082A1 (en) | 2009-06-18 |
KR100982818B1 (ko) | 2010-09-16 |
KR20090064271A (ko) | 2009-06-18 |
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