JP2009046700A - Heat treatment method and heat treatment facility - Google Patents

Heat treatment method and heat treatment facility Download PDF

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JP2009046700A
JP2009046700A JP2007211207A JP2007211207A JP2009046700A JP 2009046700 A JP2009046700 A JP 2009046700A JP 2007211207 A JP2007211207 A JP 2007211207A JP 2007211207 A JP2007211207 A JP 2007211207A JP 2009046700 A JP2009046700 A JP 2009046700A
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temperature
chamber
carburizing
treatment
descending
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JP5225634B2 (en
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Takashi Sakurai
崇 櫻井
Takuhiro Noda
拓宏 野田
Masakazu Iwamoto
将和 岩本
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Dowa Thermotech Co Ltd
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Dowa Thermotech Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To efficiently perform a heat treatment to a material to be treated with a simple control. <P>SOLUTION: The material to be treated is carburizing-treated in a carburizing chamber, and thereafter, the material to be treated, performed with the carburizing-treatment, is shifted to a temperature-dropping chamber to perform a diffusion-treatment and a temperature-dropping treatment. Further, under state of making an atmospheric temperature in a temperature-dropping chamber as a first treating temperature, the diffusion-treatment is performed, and the atmospheric temperature in the temperature-dropping chamber is dropped to a second treating temperature at lower than the first treating temperature so as to perform the temperature-dropping treatment. A carbon-potential in the temperature-dropping chamber at the time of performing the diffusion-treatment is lower than the carbon potential in the carburizing chamber. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、例えば鋼材等の被処理体を熱処理する熱処理方法及び熱処理設備に関する。   The present invention relates to a heat treatment method and heat treatment equipment for heat treating an object to be treated such as steel.

従来、鋼材等の被処理体を熱処理する熱処理設備の一種として、連続ガス浸炭設備が知られている。かかる連続ガス浸炭設備としては、例えば、予熱処理を行う予熱室、浸炭処理を行う浸炭室、拡散処理を行う拡散室、降温処理を行う降温室（冷却室）、焼入処理を行う焼入室等の処理室を、被処理体の搬送方向においてこの順に並べて設けたものが知られている（特許文献１参照）。また、このような設備においては、各処理室の雰囲気制御（カーボンポテンシャル（ＣＰ）、組成、温度等の調節）を行いやすくするため、例えば拡散室と降温室の間、及び、降温室と焼入室の間などに、開閉扉が設けられており、各処理室を開閉扉によって仕切ることができるように構成されている（特許文献１参照）。   2. Description of the Related Art Conventionally, a continuous gas carburizing facility is known as a kind of heat treatment equipment for heat treating an object to be treated such as steel. Examples of such continuous gas carburizing equipment include a preheating chamber that performs preheating, a carburizing chamber that performs carburizing, a diffusion chamber that performs diffusion processing, a cooling chamber that performs temperature lowering, a quenching chamber that performs quenching processing, and the like. In which the processing chambers are arranged in this order in the conveyance direction of the object to be processed is known (see Patent Document 1). Further, in such equipment, in order to facilitate control of the atmosphere in each processing chamber (adjustment of carbon potential (CP), composition, temperature, etc.), for example, between the diffusion chamber and the descending chamber and between the descending chamber and the firing chamber. An opening / closing door is provided between the entrances, and the like, and each processing chamber can be partitioned by the opening / closing door (see Patent Document 1).

このような連続ガス浸炭設備においては、例えば図５に示すように、浸炭室のＣＰを所定の値（例えば約１．１％程度）にして、浸炭処理を所定時間（例えば約６時間程度）行った後、拡散室のＣＰを所定の値（例えば約０．８％程度）に低下させ、拡散室において拡散処理を所定時間（例えば約１．５時間程度）行い、その後、降温室において降温処理を行うようにしている。   In such a continuous gas carburizing facility, for example, as shown in FIG. 5, the CP of the carburizing chamber is set to a predetermined value (for example, about 1.1%), and the carburizing process is performed for a predetermined time (for example, about 6 hours). After performing, the CP of the diffusion chamber is lowered to a predetermined value (for example, about 0.8%), the diffusion treatment is performed in the diffusion chamber for a predetermined time (for example, about 1.5 hours), and then the temperature is lowered in the cooling room Processing is performed.

上記のような複数の処理室を有する設備は、多数の被処理体を効率的に処理することが可能で、生産性が高い利点があるが、設備の規模が比較的大きいため、設備の設置スペースを広く取れない場合には、適用が難しいことがある。そのため、上記の設備よりも小型の連続ガス浸炭設備も開発されている。そのような小型の設備としては、拡散室を省略した４つの処理室、即ち、予熱室、浸炭室（浸炭拡散室）、降温室、焼入室をこの順に並べて設け、予熱室と浸炭室の間、浸炭室と降温室、降温室と焼入室の間に、それぞれ開閉扉を設けたものが提案されている（特許文献２参照）。   Equipment having a plurality of processing chambers as described above can efficiently process a large number of objects to be processed, and has an advantage of high productivity. It may be difficult to apply if there is not enough space. Therefore, a continuous gas carburizing facility that is smaller than the above facilities has been developed. As such a small equipment, four treatment chambers without a diffusion chamber, that is, a preheating chamber, a carburizing chamber (carburizing diffusion chamber), a descending greenhouse, and a quenching chamber are arranged in this order, and between the preheating chamber and the carburizing chamber. In addition, a carburizing chamber and a descending greenhouse, and an open / close door provided between the descending chamber and the quenching chamber have been proposed (see Patent Document 2).

このような小型の連続ガス浸炭設備を用いた処理方法としては、例えば図６に示すように、浸炭処理を比較的低いＣＰで長時間（例えば約９時間程度）行うことにより、浸炭処理の後に拡散処理を行わず、浸炭処理のみで表面炭素濃度を調節する方法（第一の従来方法）がある。なお、この方法では、浸炭処理時の浸炭室のＣＰを高くしすぎると、浸炭が過剰に進み、表面炭素濃度を調節することが難しくなるため、浸炭処理における浸炭室のＣＰは、標準的な連続ガス浸炭設備における浸炭処理のＣＰよりも低い値、例えば約０．９％程度に調節される。また、特許文献２には、浸炭室のＣＰを浸炭反応域（約１．２％程度）と拡散反応域（約０．４％程度）との間で、正弦波状に時間変化させながら処理する方法（第二の従来方法）も提案されている。   As a processing method using such a small continuous gas carburizing facility, for example, as shown in FIG. 6, by performing the carburizing process at a relatively low CP for a long time (for example, about 9 hours), There is a method (first conventional method) in which the surface carbon concentration is adjusted only by carburization without performing diffusion treatment. In this method, if the CP of the carburizing chamber at the time of the carburizing process is too high, the carburizing proceeds excessively, and it becomes difficult to adjust the surface carbon concentration. It is adjusted to a value lower than the CP of the carburizing process in the continuous gas carburizing equipment, for example, about 0.9%. Further, in Patent Document 2, the CP of the carburizing chamber is processed while changing the time in a sinusoidal manner between the carburizing reaction zone (about 1.2%) and the diffusion reaction zone (about 0.4%). A method (second conventional method) has also been proposed.

特開平１１−１７５９号公報Japanese Patent Laid-Open No. 11-1759 特開平１１−１８１５１６号公報JP-A-11-181516

しかしながら、従来の熱処理方法にあっては、小型の連続ガス浸炭設備などにおいて、被処理体の熱処理を簡単な制御で効率的に行うことが難しい問題があった。例えば上記の第一の従来方法を用いた場合では、浸炭処理に長時間を要し、生産性を向上させることができない問題があった。また、第二の従来方法を用いた場合では、ＣＰの制御が複雑になり、ＣＰを所望の値に正確に調節すること、ひいては、処理効果の信頼性を確保することが難しい懸念があった。   However, in the conventional heat treatment method, there is a problem that it is difficult to efficiently perform the heat treatment of the object to be processed by simple control in a small continuous gas carburizing facility or the like. For example, when the first conventional method is used, there is a problem that it takes a long time for the carburizing process and the productivity cannot be improved. Further, when the second conventional method is used, the control of the CP becomes complicated, and there is a concern that it is difficult to accurately adjust the CP to a desired value, and thus to ensure the reliability of the processing effect. .

本発明は、上記の点に鑑みてなされたものであり、被処理体の熱処理を簡単な制御で効率的に行うことができる熱処理方法及び熱処理設備を提供することを目的とする。   This invention is made | formed in view of said point, and it aims at providing the heat processing method and heat processing equipment which can perform the heat processing of a to-be-processed object efficiently by simple control.

上記課題を解決するため、本発明によれば、被処理体を熱処理する熱処理方法であって、被処理体を浸炭室において浸炭処理し、前記浸炭処理が行われた被処理体を降温室において拡散処理し、前記拡散処理が行われた被処理体を前記降温室において降温処理することを特徴とする、熱処理方法が提供される。   In order to solve the above-described problems, according to the present invention, there is provided a heat treatment method for heat-treating an object to be processed, wherein the object to be processed is carburized in a carburizing chamber, and the object to be processed is subjected to carburizing in a descending room. A heat treatment method is provided, characterized by performing a diffusion treatment, and subjecting the object to be treated to the temperature reduction treatment to the temperature falling chamber.

この熱処理方法にあっては、前記降温室の雰囲気温度を第一の処理温度にした状態で、前記拡散処理を行い、前記降温室の雰囲気温度を前記第一の処理温度よりも低い第二の処理温度に低下させ、前記降温処理を行うようにしても良い。   In this heat treatment method, the diffusion treatment is performed in a state where the ambient temperature of the descending greenhouse is set to the first treatment temperature, and the ambient temperature of the descending greenhouse is lower than the first treatment temperature. The temperature lowering process may be performed by lowering the temperature to the processing temperature.

また、前記拡散処理が行われる際の前記降温室のカーボンポテンシャル、及び、前記降温処理が行われる際の前記降温室のカーボンポテンシャルは、前記浸炭処理が行われる際の前記浸炭室のカーボンポテンシャルよりも低くしても良い。   Further, the carbon potential of the descending greenhouse when the diffusion treatment is performed, and the carbon potential of the descending greenhouse when the temperature decreasing treatment is performed are more than the carbon potential of the carburizing chamber when the carburizing treatment is performed. May be lowered.

また、前記被処理体を前記降温処理した後、焼入れ処理しても良い。さらに、前記被処理体を前記浸炭処理する前に、予熱室において予熱処理しても良い。その予熱室において、前記被処理体を前記予熱処理した後、一次浸炭処理を行っても良い。   Moreover, after the said to-be-processed object temperature-lowering process, you may quench. Furthermore, you may pre-heat in the pre-heating chamber, before carrying out the said carburizing process of the said to-be-processed object. In the preheating chamber, a primary carburizing process may be performed after the object to be processed is preheated.

さらに、本発明によれば、被処理体を熱処理する熱処理設備であって、被処理体の浸炭処理を行う浸炭室と、前記浸炭処理が行われた被処理体の拡散処理、及び、前記拡散処理が行われた被処理体の降温処理を行う降温室とを備えることを特徴とする、熱処理設備が提供される。   Furthermore, according to the present invention, there is a heat treatment facility for heat-treating a workpiece, a carburizing chamber for carburizing the workpiece, a diffusion treatment of the workpiece subjected to the carburizing treatment, and the diffusion There is provided a heat treatment facility comprising a temperature drop chamber for performing a temperature lowering process on an object to be processed.

この熱処理設備にあっては、前記降温室の雰囲気温度を調節する温度調節機構を備えても良い。前記温度調節機構は、前記降温室の雰囲気温度を、被処理体の拡散処理を行うことが可能な第一の処理温度と、前記第一の処理温度よりも低い第二の処理温度とに調節することが可能な構成としても良い。前記降温室の雰囲気温度は、前記拡散処理の間は前記第一の処理温度に調節され、前記降温処理を行う際は前記第二の処理温度に低下させられる構成としても良い。   In this heat treatment facility, a temperature adjustment mechanism for adjusting the ambient temperature of the descending greenhouse may be provided. The temperature adjusting mechanism adjusts the ambient temperature of the descending room to a first processing temperature at which the object to be processed can be diffused and a second processing temperature lower than the first processing temperature. It is good also as a structure which can do. The atmospheric temperature of the descending greenhouse may be adjusted to the first processing temperature during the diffusion process, and may be lowered to the second processing temperature when performing the temperature lowering process.

さらに、前記降温室のカーボンポテンシャルを前記浸炭室のカーボンポテンシャルよりも低い値に調節するカーボンポテンシャル調節機構を備えても良い。前記浸炭室と前記降温室の間を開閉する開閉扉を備えても良い。また、前記降温処理が行われた被処理体の焼入処理を行う油槽室を備えても良い。   Furthermore, a carbon potential adjusting mechanism for adjusting the carbon potential of the descending greenhouse to a value lower than the carbon potential of the carburizing chamber may be provided. You may provide the opening-and-closing door which opens and closes between the said carburizing chamber and the said greenhouse. Moreover, you may provide the oil tank chamber which performs the quenching process of the to-be-processed object in which the said temperature-fall process was performed.

本発明によれば、被処理体を降温室において拡散処理することで、被処理体を効率的に処理することができる。即ち、浸炭室における浸炭処理を、高いＣＰによって行った後、拡散処理を行うことで、被処理体の表面炭素濃度を好適に調節することができ、また、浸炭処理開始から降温処理開始までの処理時間を短縮することができる。また、降温室の雰囲気温度を制御するだけで、被処理体の拡散処理と降温処理を簡単に切り換えて行うことができる。即ち、ＣＰを調節するといった面倒な制御を行うことなく、雰囲気温度に関する簡単な制御を利用して、処理効率の向上を図ることができる。小型の熱処理設備であっても、被処理体の熱処理を簡単な制御で効率的に行えるようになる。   ADVANTAGE OF THE INVENTION According to this invention, a to-be-processed object can be processed efficiently by carrying out the diffusion process of a to-be-processed object in a descending greenhouse. That is, by performing the diffusion treatment after performing the carburizing process in the carburizing chamber with high CP, it is possible to suitably adjust the surface carbon concentration of the object to be processed, and from the start of the carburizing process to the start of the temperature lowering process. Processing time can be shortened. Moreover, the diffusion process and the temperature lowering process of the object to be processed can be easily switched by simply controlling the atmospheric temperature of the temperature lowering room. That is, the processing efficiency can be improved by using simple control relating to the ambient temperature without performing troublesome control such as adjusting the CP. Even with a small heat treatment facility, the heat treatment of the object to be processed can be efficiently performed with simple control.

以下、本発明にかかる実施形態を、熱処理設備としての連続ガス浸炭設備１に基づいて、図面を参照しながら説明する。図１に示すように、連続ガス浸炭設備１は、鋼材品である被処理体２をＸ方向（略水平方向）に沿った搬送方向Ｄに搬送しながら被処理体２を高温の状態で処理する（予熱処理、浸炭処理、拡散処理、降温処理からなるガス浸炭を行う）熱処理炉３と、被処理体２の油冷（油焼入れ処理）を行う油冷部４と、連続ガス浸炭設備１の各部を制御する制御部５（制御コンピュータ）を備えている。   Hereinafter, an embodiment according to the present invention will be described based on a continuous gas carburizing facility 1 as a heat treatment facility with reference to the drawings. As shown in FIG. 1, the continuous gas carburizing equipment 1 processes the object 2 in a high temperature state while conveying the object 2 to be treated, which is a steel product, in the conveying direction D along the X direction (substantially horizontal direction). A heat treatment furnace 3 for performing gas carburization including pre-heat treatment, carburizing treatment, diffusion treatment, and temperature lowering treatment, an oil cooling section 4 for performing oil cooling (oil quenching treatment) of the object 2 and a continuous gas carburizing equipment 1 The control part 5 (control computer) which controls each part of is provided.

熱処理炉３の炉体１０内には、複数の処理室として、被処理体２の予熱処理（昇温）を行う予熱室１１、浸炭処理を行う浸炭室１２、浸炭処理後の拡散処理及び降温処理を行う降温室１４（拡散降温室）が、入口側から出口側に向かう搬送方向Ｄにおいてこの順に並べて設けられている。炉体１０の入口側には、被処理体２を連続ガス浸炭設備１の外部から炉体１０内（予熱室１１）に搬入するための搬入口２１、及び、搬入口２１を開閉する搬入口扉２２が設けられている。炉体１０の出口側には、被処理体２を炉体１０内（降温室１４）から搬出して油冷部４（後述する油槽室１０２）に搬入するための搬入出口２５、及び、搬入出口２５を開閉する搬入出口扉２６が設けられている。   In the furnace body 10 of the heat treatment furnace 3, as a plurality of treatment chambers, a preheating chamber 11 that preheats (heats) the workpiece 2, a carburizing chamber 12 that performs carburizing treatment, a diffusion treatment and a temperature lowering after carburizing treatment. A descending greenhouse 14 (diffusion descending greenhouse) that performs processing is arranged in this order in the transport direction D from the entrance side to the exit side. On the inlet side of the furnace body 10, a carry-in port 21 for carrying the workpiece 2 from the outside of the continuous gas carburizing equipment 1 into the furnace body 10 (preheating chamber 11), and a carry-in port for opening and closing the carry-in port 21. A door 22 is provided. On the outlet side of the furnace body 10, a loading / unloading port 25 for unloading the workpiece 2 from the furnace body 10 (falling room 14) and loading it into the oil cooling unit 4 (oil tank chamber 102 described later), and loading A loading / unloading door 26 that opens and closes the outlet 25 is provided.

炉体１０の内部において、予熱室１１と浸炭室１２の間、浸炭室１２と降温室１４の間には、壁体３１、３２（仕切壁）がそれぞれ備えられている。即ち、炉体１０の内部は２つの壁体３１、３２によって３つの処理室に仕切られている。各壁体３１、３２には、被処理体２をＸ方向に通過させる通過口４１、４２がそれぞれ開口されている。各通過口４１、４２は、開閉扉５１、５２によってそれぞれ開閉される。即ち、予熱室１１と浸炭室１２の間は開閉扉５１によって開閉され、浸炭室１２と降温室１４の間は開閉扉５２によって開閉されるようになっている。このような開閉扉５１、５２を設け、開閉扉５１、５２によって各処理室の雰囲気を仕切ることが可能な構成にすると、開閉扉５１、５２を設けない場合と比較して、各処理室の雰囲気制御を行い易くなる。   Inside the furnace body 10, wall bodies 31 and 32 (partition walls) are provided between the preheating chamber 11 and the carburizing chamber 12 and between the carburizing chamber 12 and the descending chamber 14, respectively. That is, the interior of the furnace body 10 is divided into three processing chambers by the two wall bodies 31 and 32. The wall bodies 31 and 32 are respectively provided with passage ports 41 and 42 through which the workpiece 2 passes in the X direction. The passage ports 41 and 42 are opened and closed by opening and closing doors 51 and 52, respectively. That is, the opening / closing door 51 opens and closes the preheating chamber 11 and the carburizing chamber 12, and the opening / closing door 52 opens and closes the carburizing chamber 12 and the descending chamber 14. When such opening / closing doors 51, 52 are provided and the atmosphere of each processing chamber can be partitioned by the opening / closing doors 51, 52, compared to the case where the opening / closing doors 51, 52 are not provided, It becomes easy to control the atmosphere.

搬入出口２５は、降温室１４と油冷部４（後述する油槽室１０２）との間に設けられている。搬入出口扉２６には、降温室１４側と油冷部４側（後述する油槽室１０２）とを連通させる連通孔２６ａが設けられている。   The carry-in / out port 25 is provided between the descending greenhouse 14 and the oil cooling unit 4 (oil tank chamber 102 described later). The carry-in / out door 26 is provided with a communication hole 26 a that allows communication between the descending greenhouse 14 side and the oil cooling unit 4 side (oil tank chamber 102 described later).

因みに、本実施形態においては、予熱室１１は、被処理体２を収納する１区画分の大きさに形成されている。浸炭室１２は被処理体２を収納する３区画分をＸ方向において一列に並べることができる大きさに形成されている。即ち、搬送方向Ｄにおいて浸炭室１２の上流側、浸炭室１２の中央部、浸炭室１２の下流側に、被処理体２を収納する区画をそれぞれ１区画ずつ配置できるように構成されている。降温室１４は被処理体２を収納する１区画を配置できる大きさに形成されている。   Incidentally, in this embodiment, the preheating chamber 11 is formed in the size for one division which accommodates the to-be-processed object 2. FIG. The carburizing chamber 12 is formed in such a size that the three sections for storing the workpiece 2 can be arranged in a line in the X direction. In other words, in the transport direction D, one section for storing the object to be processed 2 can be arranged on the upstream side of the carburizing chamber 12, the central portion of the carburizing chamber 12, and the downstream side of the carburizing chamber 12. The descending greenhouse 14 is formed in such a size that a section for storing the object to be processed 2 can be arranged.

また、熱処理炉３には、被処理体２を搬送する搬送機構としてのローラコンベア５５、炉体１０内の雰囲気を攪拌する攪拌機構５６（ファン）、炉体１０内の雰囲気を加熱するヒータ５７（図２参照）、炉体１０内のＣＰ（カーボンポテンシャル）を検出するためのＣＰ検出用センサ６１（図２参照）が設けられている。   The heat treatment furnace 3 includes a roller conveyor 55 as a transport mechanism for transporting the workpiece 2, a stirring mechanism 56 (fan) for stirring the atmosphere in the furnace body 10, and a heater 57 for heating the atmosphere in the furnace body 10. (See FIG. 2) A CP detection sensor 61 (see FIG. 2) for detecting CP (carbon potential) in the furnace body 10 is provided.

図１に示すように、ローラコンベア５５は、複数のローラ５５ａを備えている。ローラ５５ａは、炉体１０の下部においてＸ方向に並べて設けられており、各ローラ５５ａの上面に被処理体２を載せて搬送するように構成されている。攪拌機構５６は、予熱室１１、浸炭室１２、降温室１４の天井部にそれぞれ設けられている。   As shown in FIG. 1, the roller conveyor 55 includes a plurality of rollers 55a. The rollers 55a are provided side by side in the X direction at the lower part of the furnace body 10, and are configured to carry the workpiece 2 on the upper surface of each roller 55a. The stirring mechanism 56 is provided in each of the preheating chamber 11, the carburizing chamber 12, and the ceiling part of the descending greenhouse 14.

ヒータ５７（図２参照）は、予熱室１１、浸炭室１２、降温室１４にそれぞれ設けられている。各ヒータ５７は、例えばラジアントチューブヒータ等であっても良い。また、各ヒータ５７（発熱体部分）は、炉体１０の内側面（即ち、ローラコンベア５５による被処理体２の搬送経路の両側）に沿って、Ｘ方向において複数本並べて設けられている。さらに、各ヒータ５７は、制御部５の制御命令に従って出力（発熱量）が調節されるように構成されている。また、各ヒータ５７の出力、即ち、予熱室１１の温度、浸炭室１２の温度、降温室１４の温度は、それぞれ個別に調節できるようになっている。   The heaters 57 (see FIG. 2) are provided in the preheating chamber 11, the carburizing chamber 12, and the descending greenhouse 14, respectively. Each heater 57 may be a radiant tube heater, for example. Further, a plurality of heaters 57 (heating element portions) are provided side by side in the X direction along the inner side surface of the furnace body 10 (that is, both sides of the conveyance path of the workpiece 2 by the roller conveyor 55). Further, each heater 57 is configured such that the output (heat generation amount) is adjusted according to the control command of the control unit 5. Further, the output of each heater 57, that is, the temperature of the preheating chamber 11, the temperature of the carburizing chamber 12, and the temperature of the descending chamber 14 can be individually adjusted.

ＣＰ検出用センサ６１は、例えば酸素センサであり、予熱室１１、浸炭室１２、降温室１４にそれぞれ設けられている。各ＣＰ検出用センサ６１の検出信号は、制御部５に送信され、これにより、制御部５が予熱室１１の処理雰囲気のＣＰ、浸炭室１２の処理雰囲気のＣＰ、降温室１４の処理雰囲気のＣＰをそれぞれ検知できるように構成されている。なお、ＣＰとは、処理雰囲気の平衡炭素濃度を示す値である。   The CP detection sensor 61 is an oxygen sensor, for example, and is provided in each of the preheating chamber 11, the carburizing chamber 12, and the descending chamber 14. The detection signal of each CP detection sensor 61 is transmitted to the control unit 5, whereby the control unit 5 detects the processing atmosphere CP of the preheating chamber 11, the processing atmosphere CP of the carburizing chamber 12, and the processing atmosphere of the descending greenhouse 14. Each CP can be detected. Note that CP is a value indicating the equilibrium carbon concentration of the processing atmosphere.

さらに、図１に示すように、熱処理炉３には、炉体５内に各種ガスを供給するガス供給路として、例えば都市ガスなどの炭化水素系のガス（ＣｍＨｎ）をエンリッチガスとして供給するエンリッチガス供給路７１、変成ガスとしてのＲＸガス（例えばＣＯ、ＣＯ２、Ｈ２、Ｎ２等を含有するガス）を供給するＲＸガス供給路７２、空気を供給する空気供給路７３、窒素ガス（Ｎ２）を供給する窒素ガス供給路７４が接続されている。また、炉体１０内の排気を行うエキセス８１（入口側排気機構）が設けられている。 Further, as shown in FIG. 1, in the heat treatment furnace 3, as a gas supply path for supplying various gases into the furnace body 5, for example, a hydrocarbon gas (C m H n ) such as city gas is used as an enriched gas. An enriched gas supply path 71 for supplying, an RX gas supply path 72 for supplying RX gas (for example, a gas containing CO, CO 2 , H 2 , N 2, etc.) as a modified gas, an air supply path 73 for supplying air, A nitrogen gas supply path 74 for supplying nitrogen gas (N 2 ) is connected. An exhaust 81 (inlet side exhaust mechanism) that exhausts the furnace body 10 is also provided.

エンリッチガス供給路７１は、例えば浸炭室１２、降温室１４にエンリッチガスを供給するように配設されている。ＲＸガス供給路７２は、例えば予熱室１１、浸炭室１２、降温室１４にＲＸガスを供給するように配設されている。空気供給路７３は、例えば予熱室１１、浸炭室１２、降温室１４に空気を供給するように配設されている。窒素ガス供給路７４は、例えば予熱室１１、浸炭室１２、降温室１４に窒素ガスを供給するように配設されている。また、これらのガス供給路には、各処理室に供給される各ガスの供給流量を調節するための流量調節弁７５がそれぞれ介設されている。各流量調節弁７５の開度（即ち、各処理室にそれぞれ供給されるエンリッチガス、ＲＸガス、空気、窒素ガス等の流量）は、制御部５の制御信号によって調節されるようになっている。   The enriched gas supply path 71 is disposed so as to supply the enriched gas to, for example, the carburizing chamber 12 and the descending greenhouse 14. The RX gas supply path 72 is arranged to supply RX gas to, for example, the preheating chamber 11, the carburizing chamber 12, and the descending chamber 14. The air supply path 73 is disposed so as to supply air to the preheating chamber 11, the carburizing chamber 12, and the descending greenhouse 14, for example. The nitrogen gas supply path 74 is disposed so as to supply nitrogen gas to the preheating chamber 11, the carburizing chamber 12, and the descending greenhouse 14, for example. In addition, a flow rate adjusting valve 75 for adjusting the supply flow rate of each gas supplied to each processing chamber is interposed in each gas supply path. The opening degree of each flow rate adjustment valve 75 (that is, the flow rate of enriched gas, RX gas, air, nitrogen gas, etc. supplied to each processing chamber) is adjusted by a control signal of the control unit 5. .

エキセス８１は、例えば予熱室１１の天井部に設けられており、予熱室１１内のガスを連続ガス浸炭設備１の外部に排出するようになっている。なお、このエキセス８１は、例えば予熱室１１が外部の圧力に対して陰圧になった場合等には、予熱室１１に対する外気（連続ガス浸炭設備１の外部の雰囲気）の取り入れを行う外気取り入れ路として機能することも可能である。エキセス８１の開度、即ち、予熱室１１の排ガスの排気量又は外気の流入量は、調節可能にしても良い。   The exhaust 81 is provided, for example, at the ceiling of the preheating chamber 11 and discharges the gas in the preheating chamber 11 to the outside of the continuous gas carburizing equipment 1. The exhaust 81 takes in outside air to take in outside air into the preheating chamber 11 (atmosphere outside the continuous gas carburizing equipment 1), for example, when the preheating chamber 11 becomes negative pressure with respect to outside pressure. It can also function as a road. The opening degree of the exhaust 81, that is, the exhaust amount of exhaust gas in the preheating chamber 11 or the inflow amount of outside air may be adjustable.

油冷部４は、油冷部筐体１０１の内部に油槽室１０２が形成された構成になっており、油槽室１０２の下部には、オイル（冷却液）を貯留する油槽１０３が設けられている。また、油冷部４には、被処理体２を油槽室１０２内で搬送方向Ｄに搬送、及び、油槽１０３の上方と油槽１０３との間でＺ方向に昇降移動させる搬送昇降機１０５（エレベータ）が設けられている。油冷部筐体１０１の出口側には、被処理体２を油槽室１０２から連続ガス浸炭設備１の外部に搬出させる油槽室搬出口１１１と、油槽室搬出口１１１を開閉する油槽室搬出口扉１１２が設けられている。   The oil cooling unit 4 has a configuration in which an oil tank chamber 102 is formed inside an oil cooling unit housing 101, and an oil tank 103 for storing oil (coolant) is provided at the lower part of the oil tank chamber 102. Yes. Further, the oil cooling unit 4 transports the workpiece 2 in the transport direction D in the oil tank chamber 102 and moves up and down in the Z direction between the oil tank 103 and the oil tank 103 (elevator). Is provided. On the outlet side of the oil cooling unit casing 101, an oil tank chamber outlet 111 for discharging the object 2 from the oil tank chamber 102 to the outside of the continuous gas carburizing facility 1, and an oil tank chamber outlet for opening and closing the oil tank chamber outlet 111. A door 112 is provided.

また、油冷部４には、前述したＲＸガス供給路７２と、窒素ガス供給路７４が接続されており、ＲＸガス供給路７２、窒素ガス供給路７４からＲＸガス、窒素ガスがそれぞれ供給されるようになっている。ＲＸガス供給路７２、窒素ガス供給路７４には、油槽室１０２に供給される各ガスの供給流量を調節するための油槽室用流量調節弁１１５がそれぞれ介設されている。各油槽室用流量調節弁１１５の開度（即ち、油槽室１０２に供給されるＲＸガス、窒素ガス等の流量）は、制御部５の制御信号によって調節されるようになっている。   Further, the RX gas supply path 72 and the nitrogen gas supply path 74 described above are connected to the oil cooling unit 4, and RX gas and nitrogen gas are supplied from the RX gas supply path 72 and the nitrogen gas supply path 74, respectively. It has become so. The RX gas supply path 72 and the nitrogen gas supply path 74 are provided with oil tank chamber flow rate adjusting valves 115 for adjusting the supply flow rates of the respective gases supplied to the oil tank chamber 102. The opening degree of each oil tank chamber flow control valve 115 (that is, the flow rate of RX gas, nitrogen gas, etc. supplied to the oil tank chamber 102) is adjusted by a control signal of the control unit 5.

さらに、油冷部４には、油槽室１０２の排気を行う排気機構としてのエキセス１２０（出口側排気機構）が設けられている。エキセス１２０は、例えば油槽室１０２の天井部に設けられており、油槽室１０２内のガスを連続ガス浸炭設備１の外部に排出するようになっている。なお、このエキセス１２０は、例えば油槽室１０２が外部の圧力に対して陰圧になった場合等には、油槽室１０２に対する外気の取り入れを行う外気取り入れ路として機能することも可能である。エキセス１２０の開度、即ち、油槽室１０２の排ガスの排気量又は外気の流入量は、調節可能にしても良い。   Further, the oil cooling unit 4 is provided with an exhaust 120 (exit side exhaust mechanism) as an exhaust mechanism for exhausting the oil tank chamber 102. The exhaust 120 is provided, for example, on the ceiling of the oil tank chamber 102, and discharges the gas in the oil tank chamber 102 to the outside of the continuous gas carburizing equipment 1. The exhaust 120 can also function as an outside air intake path that takes in outside air into the oil tank chamber 102, for example, when the oil tank chamber 102 has a negative pressure with respect to the external pressure. The opening degree of the exhaust 120, that is, the exhaust amount of exhaust gas in the oil tank chamber 102 or the inflow amount of outside air may be adjustable.

上述した連続ガス浸炭設備１の各部の機能要素（例えば開閉扉５１、５２の移動機構、ローラコンベア５５、ヒータ５７、流量調節弁７５、油槽室用流量調節弁１１５等）は、制御部５の命令によって制御される。制御部５は、例えば汎用コンピュータ、シーケンサ等を備えており、所定の処理レシピに従って被処理体２を自動的に処理する制御を行うように構成されている。即ち、制御部５の制御により、後に詳細に説明する予熱処理工程、浸炭処理工程、拡散処理工程、降温処理工程、油焼入処理工程からなる一連の被処理体処理工程（図３参照）、及び、降温室１４の雰囲気温度（処理雰囲気の温度）を降温（低下）させる降温室降温工程、降温室１４の雰囲気温度を昇温させる降温室昇温工程（図４参照）を実施できるようになっている。   The functional elements (for example, the moving mechanism of the doors 51 and 52, the roller conveyor 55, the heater 57, the flow control valve 75, the oil tank chamber flow control valve 115, etc.) of each part of the continuous gas carburizing equipment 1 described above are Controlled by command. The control unit 5 includes, for example, a general-purpose computer, a sequencer, and the like, and is configured to perform control for automatically processing the workpiece 2 according to a predetermined processing recipe. That is, under the control of the control unit 5, a series of object processing steps (see FIG. 3) including a pre-heat treatment step, a carburization treatment step, a diffusion treatment step, a temperature lowering treatment step, and an oil quenching treatment step, which will be described in detail later, Further, it is possible to perform a lowering greenhouse temperature lowering step for lowering (decreasing) the ambient temperature of the lowering greenhouse 14 (temperature of the processing atmosphere) and a lowering greenhouse temperature raising step for raising the ambient temperature of the lowering greenhouse 14 (see FIG. 4). It has become.

なお、拡散処理工程は、図４に示すように、降温室降温工程が開始されることにより終了させられ、降温処理工程は、降温室降温工程が開始されることにより開始されるようになっている。降温室昇温工程は、降温室降温工程や降温処理工程の後に行なわれ、次の拡散処理工程が行われる前に終了するように設定されている。   In addition, as shown in FIG. 4, the diffusion treatment process is terminated by starting the temperature-falling-room temperature lowering process, and the temperature-falling processing process is started by starting the temperature-lowering temperature-falling process. Yes. The temperature-lowering greenhouse temperature raising step is set to be performed after the temperature-lowering temperature-falling temperature step or the temperature-falling treatment step, and is finished before the next diffusion treatment step.

また、制御部５は、図３に示すように、予熱処理工程を１サイクル（単位所要時間）の間に行い、浸炭処理工程を３サイクルの間に行うように設定されている。さらに、図４に示すように、拡散処理工程開始から降温室昇温工程終了までの工程（拡散処理工程、降温処理工程、降温室昇温工程）を、１サイクルの間に行うように設定されている。   Further, as shown in FIG. 3, the control unit 5 is set so that the pre-heat treatment process is performed during one cycle (unit required time) and the carburizing process is performed during three cycles. Further, as shown in FIG. 4, the process from the start of the diffusion process step to the end of the temperature-lowering greenhouse temperature raising step (diffusion processing step, temperature-falling temperature step, temperature-falling temperature rising step) is set to be performed during one cycle. ing.

１サイクルに要する単位所要時間は、本実施形態においては約２時間２０分程度に設定されている。従って、予熱処理工程に要する予熱処理時間（被処理体２が予熱室１１に搬入されてから予熱室１１から搬出されるまでの間の所要時間）は約２時間２０分となっている。浸炭処理工程に要する浸炭処理時間（被処理体２が浸炭室１２に搬入されてから浸炭室１２から搬出されるまでの間の所要時間）は約７時間（２時間２０分×３サイクル）となっている。また、拡散処理工程に要する拡散処理時間は約１時間、降温処理工程に要する降温処理時間は約１時間となっている。即ち、被処理体２が降温室１４に搬入されてから降温室１４から搬出されるまでの間の所要時間は、約２時間となっている。   The unit required time for one cycle is set to about 2 hours and 20 minutes in this embodiment. Therefore, the pre-heat treatment time required for the pre-heat treatment process (the time required from when the workpiece 2 is carried into the pre-heating chamber 11 until it is carried out of the pre-heating chamber 11) is about 2 hours and 20 minutes. The carburizing time required for the carburizing process (the time required from when the workpiece 2 is carried into the carburizing chamber 12 until it is carried out from the carburizing chamber 12) is about 7 hours (2 hours 20 minutes × 3 cycles). It has become. Further, the diffusion processing time required for the diffusion processing step is about 1 hour, and the temperature reduction processing time required for the temperature reduction processing step is about 1 hour. In other words, the required time from when the workpiece 2 is carried into the descending greenhouse 14 to when it is removed from the descending greenhouse 14 is about 2 hours.

さらに、本実施形態においては、予熱室１１の雰囲気温度、浸炭室１２の雰囲気温度、及び、降温室１４の雰囲気温度を調節する温度調節機構１３１が構成されている。温度調節機構１３１は、制御部５、予熱室１１に備えられたヒータ５７、浸炭室１２に備えられたヒータ５７、降温室１４に備えられたヒータ５７を有している（図２参照）。   Furthermore, in this embodiment, the temperature adjustment mechanism 131 which adjusts the atmospheric temperature of the preheating chamber 11, the atmospheric temperature of the carburizing chamber 12, and the atmospheric temperature of the descending greenhouse 14 is comprised. The temperature adjustment mechanism 131 includes the control unit 5, the heater 57 provided in the preheating chamber 11, the heater 57 provided in the carburizing chamber 12, and the heater 57 provided in the descending chamber 14 (see FIG. 2).

温度調節機構１３１は、例えば予熱室１１の雰囲気温度を、所定の目標値、即ち、予熱処理温度に昇温させる機能を有している。また、予熱室１１の雰囲気温度を昇温させることで、予熱室１１に収納されている被処理体２の温度を予熱処理温度に昇温させることができる。予熱処理温度は、後述する浸炭処理温度と同程度（例えば約９００℃〜９５０℃程度）であっても良く、本実施形態においては約９３０℃に設定されている（図３参照）。   The temperature adjustment mechanism 131 has a function of raising the ambient temperature of the preheating chamber 11 to a predetermined target value, that is, a preheat treatment temperature, for example. Moreover, the temperature of the to-be-processed object 2 accommodated in the preheating chamber 11 can be raised to the preheat treatment temperature by raising the atmospheric temperature of the preheating chamber 11. The preheat treatment temperature may be approximately the same as the carburizing treatment temperature described later (for example, about 900 ° C. to 950 ° C.), and is set to about 930 ° C. in this embodiment (see FIG. 3).

また、温度調節機構１３１は、浸炭室１２の雰囲気温度を、被処理体２の浸炭処理を行うことが可能な所定の目標値、即ち、浸炭処理温度に調節する機能を有する。さらに、浸炭室１２の雰囲気温度を調節することで、浸炭室１２に収納されている被処理体２の温度を浸炭処理温度にすることができる。浸炭処理温度は、例えば約９００℃〜９５０℃程度であっても良く、好ましくは９２０〜９４０℃程度であり、本実施形態においては約９３０℃に設定されている（図３参照）。   Further, the temperature adjusting mechanism 131 has a function of adjusting the atmospheric temperature of the carburizing chamber 12 to a predetermined target value capable of performing the carburizing process of the workpiece 2, that is, the carburizing process temperature. Furthermore, the temperature of the workpiece 2 accommodated in the carburizing chamber 12 can be set to the carburizing temperature by adjusting the atmospheric temperature of the carburizing chamber 12. The carburizing temperature may be about 900 ° C. to 950 ° C., for example, preferably about 920 to 940 ° C., and is set to about 930 ° C. in this embodiment (see FIG. 3).

さらに、温度調節機構１３１は、降温室１４の雰囲気温度を、２段階の目標値、即ち、被処理体２の拡散処理を行うことが可能な第一の処理温度と、第一の処理温度よりも低く被処理体２の降温処理を行うことが可能な第二の処理温度とに調節することが可能である（図４参照）。即ち、降温室１４の雰囲気温度を変化させることで、降温室１４に収納されている被処理体２の温度を、第一の処理温度と第二の処理温度に変化させることができる。   Further, the temperature adjustment mechanism 131 sets the ambient temperature of the descending room 14 from two target values, that is, a first processing temperature at which the object 2 can be diffused and a first processing temperature. Can be adjusted to a second processing temperature at which the temperature of the workpiece 2 can be lowered (see FIG. 4). That is, by changing the atmospheric temperature of the descending greenhouse 14, the temperature of the object 2 accommodated in the descending chamber 14 can be changed to the first treatment temperature and the second treatment temperature.

第一の処理温度は、標準的な連続ガス浸炭設備において拡散処理を行う際の雰囲気温度（拡散室の温度（拡散処理温度））とほぼ同程度（約９００℃〜９５０℃程度、好ましくは９２０〜９４０℃程度）であれば良い。本実施形態においては、第一の処理温度は約９３０℃、即ち、浸炭処理温度とほぼ同じ値に設定されている（図３、図４参照）。換言すれば、予熱処理工程における予熱室１１の雰囲気温度の目標値と、浸炭処理工程における浸炭室１２の雰囲気温度の目標値と、拡散処理工程における降温室１４の雰囲気温度の目標値は、互いにほぼ同じ値に設定されている。   The first treatment temperature is approximately the same (about 900 ° C. to 950 ° C., preferably 920 ° C.) as the atmospheric temperature (diffusion chamber temperature (diffusion treatment temperature)) when performing diffusion treatment in a standard continuous gas carburizing facility. ˜940 ° C.). In the present embodiment, the first treatment temperature is set to about 930 ° C., that is, substantially the same value as the carburizing treatment temperature (see FIGS. 3 and 4). In other words, the target value of the ambient temperature of the preheating chamber 11 in the preheating process, the target value of the ambient temperature of the carburizing chamber 12 in the carburizing process, and the target value of the ambient temperature of the descending chamber 14 in the diffusion process are mutually It is set to almost the same value.

第二の処理温度は、標準的な連続ガス浸炭設備において降温処理（焼入処理）を行う際の雰囲気温度（降温室の温度（降温処理温度）、焼入室の温度（焼入処理温度））とほぼ同程度（被処理体２のオーステナイト化温度以上）であれば良く、本実施形態においては約８５０℃に設定されている（図３、図４参照）。   The second treatment temperature is the ambient temperature (temperature of the descending greenhouse (temperature-decreasing temperature), temperature of the quenching chamber (quenching temperature)) when performing the temperature-decreasing process (quenching process) in a standard continuous gas carburizing facility. (This is equal to or higher than the austenitizing temperature of the object 2 to be processed), and is set to about 850 ° C. in this embodiment (see FIGS. 3 and 4).

また、温度調節機構１３１は、図４に示すように、降温室１４の雰囲気温度を、第一の処理温度と第二の処理温度に、所定の周期で交互に昇降させるようになっている。より具体的には、降温室１４に被処理体２が搬入される際は、降温室１４の雰囲気温度を第一の処理温度に調節し、拡散処理工程の間（拡散処理時間、約１時間の間）は、降温室１４の雰囲気温度を第一の処理温度に維持するようになっている。そして、拡散処理工程の後、降温室降温工程において、降温室１４の雰囲気温度を第一の処理温度から第二の処理温度に低下させる。さらに、降温室降温工程の後も、降温処理工程が終了するまで、降温室１４の雰囲気温度を第二の処理温度に維持するように設定されている。そして、降温処理工程の後、降温室昇温工程において、降温室１４の雰囲気温度を第二の処理温度から第一の処理温度に上昇させるように設定されている。   In addition, as shown in FIG. 4, the temperature adjustment mechanism 131 alternately raises and lowers the ambient temperature of the descending greenhouse 14 to the first processing temperature and the second processing temperature at a predetermined cycle. More specifically, when the workpiece 2 is carried into the descending room 14, the atmospheric temperature of the descending room 14 is adjusted to the first processing temperature, and during the diffusion process (diffusion process time, approximately 1 hour). In the meantime, the ambient temperature of the descending greenhouse 14 is maintained at the first processing temperature. Then, after the diffusion treatment step, the atmospheric temperature in the temperature drop chamber 14 is lowered from the first treatment temperature to the second treatment temperature in the temperature drop temperature drop step. Furthermore, after the temperature drop process, the atmosphere temperature in the temperature drop room 14 is set to the second process temperature until the temperature reduction process is completed. Then, after the temperature lowering process step, the temperature of the lowering greenhouse 14 is set so as to be raised from the second processing temperature to the first processing temperature in the temperature decreasing step.

また、本実施形態においては、予熱室１１のＣＰ、浸炭室１２のＣＰ、及び、降温室１４のＣＰを調節するＣＰ調節機構１３２（カーボンポテンシャル調節機構、図１、図２参照）が構成されている。ＣＰ調節機構１３２は、例えば制御部５、予熱室１１に設けられているＣＰ検出用センサ６１、浸炭室１２に設けられているＣＰ検出用センサ６１、降温室１４に設けられているＣＰ検出用センサ６１、エンリッチガス供給路７１に設けられている流量調節弁７５、ＲＸガス供給路７２に設けられている流量調節弁７５、空気供給路７３に設けられている流量調節弁７５、窒素ガス供給路７４に設けられている流量調節弁７５を備える構成になっている。   In the present embodiment, a CP adjustment mechanism 132 (a carbon potential adjustment mechanism, see FIGS. 1 and 2) for adjusting the CP of the preheating chamber 11, the CP of the carburizing chamber 12, and the CP of the descending room 14 is configured. ing. The CP adjustment mechanism 132 includes, for example, the control unit 5, a CP detection sensor 61 provided in the preheating chamber 11, a CP detection sensor 61 provided in the carburizing chamber 12, and a CP detection sensor provided in the descending room 14. Sensor 61, flow control valve 75 provided in enrich gas supply passage 71, flow control valve 75 provided in RX gas supply passage 72, flow control valve 75 provided in air supply passage 73, nitrogen gas supply The flow rate adjustment valve 75 provided in the passage 74 is provided.

ＣＰ調節機構１３２において、制御部５は、予熱室１１、浸炭室１２、降温室１４にそれぞれ設けられているＣＰ検出用センサ６１の検出信号に基づいて、流量調節弁７５を操作し、予熱室１１、浸炭室１２、降温室１４に供給される各ガスの流量を調節し、これにより、予熱室１１のＣＰ、浸炭室１２のＣＰ、降温室１４のＣＰをそれぞれ所定の値に制御（フィードバック制御）するように構成されている。   In the CP adjustment mechanism 132, the control unit 5 operates the flow rate adjustment valve 75 based on the detection signals of the CP detection sensors 61 provided in the preheating chamber 11, the carburizing chamber 12, and the descending chamber 14, respectively. 11, the flow rate of each gas supplied to the carburizing chamber 12 and the descending greenhouse 14 is adjusted, thereby controlling the CP of the preheating chamber 11, the CP of the carburizing chamber 12, and the CP of the descending chamber 14 to predetermined values (feedback). Control).

また、ＣＰ調節機構１３２は、予熱室１１のＣＰを、浸炭室１２のＣＰ（第一のＣＰ値）と同程度、あるいはそれ以上のＣＰ値に調節するようになっている（図３参照）。予熱室１１のＣＰは、例えば０．９％以上であることが好ましく、本実施形態においては約１．０％に調節されるように設定されている。   Further, the CP adjusting mechanism 132 adjusts the CP of the preheating chamber 11 to a CP value equal to or higher than the CP (first CP value) of the carburizing chamber 12 (see FIG. 3). . The CP of the preheating chamber 11 is preferably 0.9% or more, for example, and is set to be adjusted to about 1.0% in this embodiment.

また、ＣＰ調節機構１３２は、浸炭室１２のＣＰを、被処理体２の浸炭処理を行うことが可能なＣＰ値、即ち、第一のＣＰ値（第一のカーボンポテンシャル値）に調節するようになっている（図３参照）。第一のＣＰ値は、例えば０．９％以上であることが好ましく、本実施形態においては約０．９５％に調節されるように設定されている。   The CP adjusting mechanism 132 adjusts the CP of the carburizing chamber 12 to a CP value at which the carburizing treatment of the workpiece 2 can be performed, that is, a first CP value (first carbon potential value). (See FIG. 3). The first CP value is preferably 0.9% or more, for example, and is set to be adjusted to about 0.95% in this embodiment.

さらに、ＣＰ調節機構１３２は、降温室１４のＣＰを、浸炭室１２のＣＰ（第一のＣＰ値）よりも低い値、即ち、第二のＣＰ値（第二のカーボンポテンシャル値）に調節するようになっている（図３参照）。第二のＣＰ値は、例えば０．９％以下であることが好ましく、本実施形態においては約０．８％に調節されるように設定されている。   Further, the CP adjusting mechanism 132 adjusts the CP of the descending room 14 to a value lower than the CP (first CP value) of the carburizing chamber 12, that is, the second CP value (second carbon potential value). (See FIG. 3). The second CP value is preferably 0.9% or less, for example, and is set to be adjusted to about 0.8% in the present embodiment.

次に、以上のように構成された連続ガス浸炭設備１を用いた被処理体２の熱処理方法について説明する。   Next, the heat processing method of the to-be-processed object 2 using the continuous gas carburizing equipment 1 comprised as mentioned above is demonstrated.

先ず、被処理体２が搬入される前の連続ガス浸炭設備１においては、予熱室１１、浸炭室１２、降温室１４、油槽室１０２内の雰囲気（雰囲気温度、圧力、組成、ＣＰ等）が、制御部５の制御により、それぞれ所定の処理条件に調節される。例えば、予熱室１１の温度は約９３０℃程度（予熱処理温度）、浸炭室１２の温度は約９３０℃程度（浸炭処理温度）、降温室１４の温度は約９３０℃程度（拡散処理温度）に調節される。また、予熱室１１のＣＰ値は約１．０％程度、浸炭室１２のＣＰ値は約０．９５％程度（第一のＣＰ値）、降温室１４のＣＰ値は約０．８％程度（第二のＣＰ値）に調節される。即ち、炉体１０内の温度は、Ｘ方向においてほぼ均一な温度に調節され、炉体１０内のＣＰは、搬入出口２５側に向かうに従い次第に低くなるように調節される。   First, in the continuous gas carburizing equipment 1 before the workpiece 2 is carried in, the atmosphere (atmosphere temperature, pressure, composition, CP, etc.) in the preheating chamber 11, the carburizing chamber 12, the descending greenhouse 14, and the oil tank chamber 102 is maintained. Each is adjusted to a predetermined processing condition under the control of the control unit 5. For example, the temperature of the preheating chamber 11 is about 930 ° C. (preheating temperature), the temperature of the carburizing chamber 12 is about 930 ° C. (carburizing temperature), and the temperature of the descending chamber 14 is about 930 ° C. (diffusion processing temperature). Adjusted. The CP value of the preheating chamber 11 is about 1.0%, the CP value of the carburizing chamber 12 is about 0.95% (first CP value), and the CP value of the descending chamber 14 is about 0.8%. (Second CP value). That is, the temperature in the furnace body 10 is adjusted to a substantially uniform temperature in the X direction, and the CP in the furnace body 10 is adjusted to gradually decrease toward the loading / unloading port 25 side.

予熱室１１、浸炭室１２、降温室１４、油槽室１０２の雰囲気の調節は、制御部５の制御により、ヒータ５７の発熱量、エンリッチガス供給路７１によるエンリッチガスの供給流量、ＲＸガス供給路７２によるＲＸガスの供給流量、空気供給路７３による空気の供給流量、窒素ガス供給路７４による窒素ガスの供給流量、熱処理炉３のエキセス８１による排気量、油冷部４のエキセス１２０による排気量等がそれぞれ調整されることにより行われる。具体的には、例えば予熱室１１、浸炭室１２、降温室１４の雰囲気温度は、温度調節機構１３１の機能によって調節される。また、予熱室１１、浸炭室１２、降温室１４のＣＰは、ＣＰ調節機構１３２の機能によって調節される。   Adjustment of the atmosphere in the preheating chamber 11, the carburizing chamber 12, the descending chamber 14, and the oil tank chamber 102 is controlled by the control unit 5, the amount of heat generated by the heater 57, the supply flow rate of the rich gas through the rich gas supply channel 71, and the RX gas supply channel. 72, the supply flow rate of RX gas, the supply flow rate of air through the air supply passage 73, the supply flow rate of nitrogen gas through the nitrogen gas supply passage 74, the exhaust amount by the exhaust 81 of the heat treatment furnace 3, and the exhaust amount by the exhaust 120 of the oil cooling section 4. Etc. are performed by adjusting each of them. Specifically, for example, the ambient temperature of the preheating chamber 11, the carburizing chamber 12, and the descending chamber 14 is adjusted by the function of the temperature adjustment mechanism 131. Further, the CP of the preheating chamber 11, the carburizing chamber 12, and the descending chamber 14 is adjusted by the function of the CP adjusting mechanism 132.

また、熱処理炉３の搬入口２１、通過口４１、４２、搬入出口２５、油冷部４の油槽室搬出口１１１は、搬入口扉２２、開閉扉５１、５２、搬入出口扉２６、油槽室搬出口扉１１２によってそれぞれ閉じられている。このように予熱室１１と浸炭室１２の間に開閉扉５１を備えることで、予熱室１１と浸炭室１２の間においてガスが過剰に移動することを抑制でき、予熱室１１のＣＰと浸炭室１２のＣＰを互いに異なる値に調節し易くなる。浸炭室１２と降温室１４の間に開閉扉５２を備えることで、浸炭室１２と降温室１４の間においてガスが過剰に移動することを抑制でき、浸炭室１２のＣＰと降温室１４のＣＰを互いに異なる値に調節し易くなる。   The carry-in port 21, the passage ports 41 and 42, the carry-in / out port 25 of the heat treatment furnace 3, and the oil tank chamber carry-out port 111 of the oil cooling unit 4 are a carry-in door 22, opening / closing doors 51 and 52, a carry-in / out door 26, and an oil bath chamber. Each is closed by a carry-out door 112. Thus, by providing the opening / closing door 51 between the preheating chamber 11 and the carburizing chamber 12, it is possible to suppress excessive movement of gas between the preheating chamber 11 and the carburizing chamber 12, and the CP of the preheating chamber 11 and the carburizing chamber. It becomes easy to adjust 12 CPs to different values. By providing the open / close door 52 between the carburizing chamber 12 and the descending greenhouse 14, it is possible to suppress excessive movement of gas between the carburizing chamber 12 and the descending greenhouse 14, and the CP of the carburizing chamber 12 and the CP of the descending greenhouse 14. Can be easily adjusted to different values.

なお、通過口４１、４２は、完全には密閉されておらず、例えば開閉扉５１、５２の上方等には、炉体５内のガスが通過可能な隙間が形成される。また、降温室１４と油槽室１０２は、連通孔２６ａを通じて互いに連通している。従って、浸炭室１２や降温室１４内のガスは、予熱室１１、エキセス８１を通じて外部に排気することができ、また、連通孔２６ａ、油槽室１０２、エキセス１２０を通じて外部に排気することができる。このように適度に排気を行うことが可能な状態にしながら、各ガスを供給することで、予熱室１１の処理雰囲気、浸炭室１２の処理雰囲気、降温室１４の処理雰囲気を、それぞれ適切に調節できる。   The passage ports 41 and 42 are not completely sealed, and a gap through which the gas in the furnace body 5 can pass is formed, for example, above the open / close doors 51 and 52. Further, the descending greenhouse 14 and the oil tank chamber 102 communicate with each other through the communication hole 26a. Therefore, the gas in the carburizing chamber 12 and the descending greenhouse 14 can be exhausted to the outside through the preheating chamber 11 and the exhaust 81, and can be exhausted to the outside through the communication hole 26a, the oil tank chamber 102, and the exhaust 120. By supplying each gas while maintaining a state in which exhaust can be appropriately performed in this manner, the processing atmosphere of the preheating chamber 11, the processing atmosphere of the carburizing chamber 12, and the processing atmosphere of the descending greenhouse 14 are adjusted appropriately. it can.

以上のように、連続ガス浸炭設備１内の雰囲気が所定の処理条件に調節された状態において、熱処理炉３の搬入口２１が開かれ、被処理体２が搬入口２１を通じて予熱室１１に搬入され、搬入口２１が閉じられる。   As described above, in the state where the atmosphere in the continuous gas carburizing equipment 1 is adjusted to predetermined processing conditions, the inlet 21 of the heat treatment furnace 3 is opened, and the workpiece 2 is transferred into the preheating chamber 11 through the inlet 21. Then, the carry-in port 21 is closed.

こうして被処理体２が熱処理炉３に搬入されると、先ず、予熱処理工程が開始される。即ち、浸炭室１２から開閉扉５１によって遮断された状態の予熱室１１において、被処理体２が予熱処理される。かかる予熱処理により、被処理体２の温度は、予熱室１１に搬入される前の常温から、予熱室１１の雰囲気温度、即ち、約９３０℃程度まで昇温される。この予熱処理に要する時間は、約１時間程度であり、昇温後、予熱室内においても一次浸炭処理が行われる。なお、予熱室１１のＣＰは、昇温完了後約１．０％程度に維持される。ただし、予熱室内での浸炭処理は必須ではなく、1サイクルの時間を長くすれば、予熱室内で浸炭処理する必要はない。本例のように予熱室内で一次浸炭処理を行うことにより、1サイクルの時間を短くでき、より効率的に処理できる。   When the workpiece 2 is thus carried into the heat treatment furnace 3, first, the pre-heat treatment process is started. That is, the workpiece 2 is preheated in the preheating chamber 11 that is cut off from the carburizing chamber 12 by the open / close door 51. By such pre-heat treatment, the temperature of the object to be treated 2 is raised from the normal temperature before being carried into the pre-heating chamber 11 to the ambient temperature of the pre-heating chamber 11, that is, about 930 ° C. The time required for this pre-heat treatment is about 1 hour, and after the temperature rise, the primary carburizing process is also performed in the pre-heating chamber. Note that the CP of the preheating chamber 11 is maintained at about 1.0% after the temperature rise is completed. However, carburizing treatment in the preheating chamber is not essential, and if the time for one cycle is lengthened, it is not necessary to perform carburizing treatment in the preheating chamber. By performing the primary carburizing process in the preheating chamber as in this example, the time for one cycle can be shortened and the process can be performed more efficiently.

予熱室１１内の被処理体２の予熱処理が終了すると、通過口４１が開かれ、予熱処理が終了した被処理体２は、通過口４１を通じて予熱室１１から搬出され、浸炭室１２に搬入される。被処理体２が浸炭室１２に搬入されると、通過口４１が閉じられ、予熱室１１と浸炭室１２が開閉扉５１によって遮断された状態になる。そして、浸炭処理工程が開始される。即ち、被処理体２が浸炭室１２において浸炭処理される。   When the pretreatment of the object to be treated 2 in the preheating chamber 11 is completed, the passage opening 41 is opened, and the object to be treated 2 that has undergone the preheat treatment is unloaded from the preheating chamber 11 through the passage opening 41 and carried into the carburizing chamber 12. Is done. When the workpiece 2 is carried into the carburizing chamber 12, the passage port 41 is closed, and the preheating chamber 11 and the carburizing chamber 12 are blocked by the open / close door 51. Then, the carburizing process is started. That is, the workpiece 2 is carburized in the carburizing chamber 12.

なお、被処理体２が予熱室１１から浸炭室１２に移動させられた後は、次の未処理の被処理体２を搬入口２１から予熱室１１に搬入し、続けて予熱処理することができる。即ち、熱処理炉３では、複数の被処理体２を並行して連続的に処理することができる。   In addition, after the to-be-processed object 2 is moved from the preheating chamber 11 to the carburizing chamber 12, the next unprocessed to-be-processed object 2 can be carried in into the preheating chamber 11 from the carrying-in entrance 21, and it can continue pre-heat-processing. it can. That is, in the heat treatment furnace 3, a plurality of objects to be processed 2 can be continuously processed in parallel.

浸炭処理工程においては、浸炭室１２に搬入された被処理体２は、浸炭室１２において周期的に移動させられながら浸炭処理される。この浸炭処理に要する時間は、約７時間程度である。   In the carburizing process, the workpiece 2 carried into the carburizing chamber 12 is carburized while being periodically moved in the carburizing chamber 12. The time required for this carburizing process is about 7 hours.

浸炭室１２内の被処理体２は、１サイクルごとに１区画分だけ、搬送方向Ｄに移動させられる。従って、浸炭室１２に被処理体２が搬入されてから単位所要時間（約２時間２０分）が経過すると、先に搬入された被処理体２（浸炭室１２の上流側に配置されていた被処理体２）は、搬送方向Ｄに１区画分だけ移動させられ、浸炭室１２の中央部に配置される。そして、次の被処理体２（予熱処理が行われた被処理体２）を、予熱室１１から浸炭室１２に搬入し、先に浸炭室１２に搬入されている被処理体２に対して並ぶ位置（浸炭室１２上流側）に配置することができる。その後、さらに単位所要時間（約２時間２０分）が経過すると、先に搬入された被処理体２（浸炭室１２の中央部に配置されていた被処理体２）は、搬送方向Ｄに１区画分だけ移動させられ、浸炭室１２の下流側に配置され、次に搬入された被処理体２（浸炭室１２の上流側に配置されていた被処理体２）は、搬送方向Ｄに１区画分だけ移動させられ、浸炭室１２の中央部に配置される。そして、その次の被処理体２（予熱処理が行われた被処理体２）を、予熱室１１から浸炭室１２に搬入し、先に浸炭室１２に搬入されている被処理体２に対して並ぶ位置（浸炭室１２の上流側）に配置することができる。こうして、２区画分以上（３区画分以下）の被処理体２を浸炭室１２内に並べ、並行して浸炭処理することができる。   The workpiece 2 in the carburizing chamber 12 is moved in the transport direction D by one section for each cycle. Therefore, when the unit required time (about 2 hours and 20 minutes) has elapsed since the workpiece 2 was carried into the carburizing chamber 12, the workpiece 2 that was carried in earlier (arranged upstream of the carburizing chamber 12). The object to be processed 2) is moved by one section in the transport direction D and is arranged in the center of the carburizing chamber 12. And the next to-be-processed object 2 (to-be-processed object 2 to which pre-heat processing was performed) is carried in from the preheating chamber 11 to the carburizing chamber 12, and with respect to the to-be-processed object 2 previously carried into the carburizing chamber 12 It can arrange | position in the lined position (the carburizing chamber 12 upstream). Thereafter, when the unit required time (about 2 hours and 20 minutes) further elapses, the object 2 to be processed previously (the object 2 to be processed disposed in the center of the carburizing chamber 12) is 1 in the transport direction D. The object to be processed 2 (the object to be processed 2 disposed on the upstream side of the carburizing chamber 12) that has been moved by the section, disposed on the downstream side of the carburizing chamber 12, and loaded next is 1 in the transport direction D. It is moved by the section and is arranged in the center of the carburizing chamber 12. And the next to-be-processed object 2 (to-be-processed object 2 to which pre-heat processing was performed) is carried in from the preheating chamber 11 to the carburizing chamber 12, and with respect to the to-be-processed body 2 previously carried into the carburizing chamber 12 Can be arranged in a line (upstream side of the carburizing chamber 12). In this way, it is possible to arrange the objects to be processed 2 for two sections or more (three sections or less) in the carburizing chamber 12 and perform the carburizing process in parallel.

なお、浸炭処理工程においては、浸炭室１２の雰囲気温度は、約９３０℃程度に維持され、浸炭室１２のＣＰは、約０．９５％程度に維持される。このような高温、高ＣＰの処理雰囲気により、浸炭を好適に進行させることができる。即ち、被処理体２の浸炭処理を効率的に行うことができる。   In the carburizing process, the ambient temperature of the carburizing chamber 12 is maintained at about 930 ° C., and the CP of the carburizing chamber 12 is maintained at about 0.95%. Carburization can be suitably advanced by such a high temperature and high CP treatment atmosphere. That is, the carburizing process of the to-be-processed object 2 can be performed efficiently.

浸炭室１２内の被処理体２（浸炭室１２の下流側に配置されている被処理体２）の浸炭処理が終了すると、通過口４２が開かれ、浸炭処理が終了した被処理体２は、通過口４２を通じて浸炭室１２の下流側から搬出され、降温室１４に搬入される。被処理体２が降温室１４に搬入されると、通過口４２が閉じられ、浸炭室１２と降温室１４が開閉扉５２によって遮断された状態になる。そして、拡散処理工程が開始される。即ち、浸炭室１２から開閉扉５２によって遮断され、かつ、油槽室１０２から搬入出口扉２６によって遮断された状態の降温室１４において、被処理体２が拡散処理される。この拡散処理に要する時間は、約１時間程度である。   When the carburizing process of the object to be processed 2 in the carburizing chamber 12 (the object to be processed 2 arranged on the downstream side of the carburizing chamber 12) is completed, the passage opening 42 is opened, and the object 2 to be processed after the carburizing process is completed. Then, it is carried out from the downstream side of the carburizing chamber 12 through the passage port 42 and carried into the descending greenhouse 14. When the workpiece 2 is carried into the descending greenhouse 14, the passage 42 is closed, and the carburizing chamber 12 and the descending greenhouse 14 are blocked by the open / close door 52. Then, the diffusion process step is started. That is, the object to be treated 2 is subjected to diffusion treatment in the descending greenhouse 14 in a state where it is blocked from the carburizing chamber 12 by the open / close door 52 and from the oil tank chamber 102 by the loading / unloading door 26. The time required for this diffusion process is about 1 hour.

なお、拡散処理工程においては、降温室１４の雰囲気温度は、約９３０℃程度に維持され、降温室１４のＣＰは、約０．８％程度に維持される。かかる処理雰囲気により、被処理体２は効率的に拡散処理される。   In the diffusion process, the ambient temperature of the descending room 14 is maintained at about 930 ° C., and the CP of the descending room 14 is maintained at about 0.8%. In this processing atmosphere, the object to be processed 2 is efficiently diffused.

拡散処理工程が終了すると、続いて、降温室降温工程（図４参照）が行われる。即ち、例えば降温室１４に設けられているヒータ５７の発熱量が低減されること等により、降温室１４の雰囲気温度が、約９３０℃（第一の処理温度）から時間が経過するに従い次第に低下させられ、約８５０℃（第二の処理温度）程度まで降温される。また、降温室降温工程が開始されることにより、被処理体２の拡散処理工程が終了させられ、降温処理工程が開始される。即ち、被処理体２の温度が、降温室１４の雰囲気温度の降温に伴って、約９３０℃から約８５０℃に、時間が経過するに従い次第に低下させられる。そして、降温室降温工程が終了した後は、降温室１４の雰囲気温度と被処理体２の温度は、暫くの間、約８５０℃程度に保持される。即ち、被処理体２の降温処理工程が継続され、被処理体２の均熱処理が行われる。この降温処理工程に要する時間は、約１時間程度である。   When the diffusion treatment process is completed, a temperature lowering temperature lowering process (see FIG. 4) is subsequently performed. That is, for example, the amount of heat generated by the heater 57 provided in the descending room 14 is reduced, so that the ambient temperature of the descending room 14 gradually decreases as time passes from about 930 ° C. (first processing temperature). The temperature is lowered to about 850 ° C. (second processing temperature). In addition, the start of the temperature-lowering temperature-falling step ends the diffusion processing step of the object to be processed 2 and starts the temperature-falling processing step. That is, the temperature of the object to be processed 2 is gradually lowered from about 930 ° C. to about 850 ° C. as time passes, as the ambient temperature of the descending greenhouse 14 falls. And after the temperature-falling-room temperature-fall process is complete | finished, the atmospheric temperature of the temperature-falling room 14 and the temperature of the to-be-processed object 2 are hold | maintained at about 850 degreeC for a while. That is, the temperature lowering process of the object to be processed 2 is continued, and the soaking process of the object 2 is performed. The time required for the temperature lowering process is about 1 hour.

なお、降温室降温工程により、降温室１４の雰囲気温度が約８５０℃に低下させられる間、及び、降温処理工程が行われる間も、浸炭室１２と降温室１４の間は、開閉扉５２によって仕切られた状態になっている。このようにすると、浸炭室１２と降温室１４を開閉扉５２によって熱的に良好に遮断できる。従って、開閉扉５２を設けない場合と比較して、浸炭室１２の雰囲気温度と降温室１４の雰囲気温度を、それぞれ個別に制御し易くなる。即ち、降温室降温工程によって浸炭室１２の雰囲気温度と降温室１４の雰囲気温度に温度差が生じても、浸炭室１２の熱が降温室１４に逃げること等を防止できる。そのため、浸炭室１２の雰囲気温度を好適に維持でき、また、浸炭室１２の加熱効率が低下することを防止できる。さらに、降温室１４の降温効率を向上させることができる。即ち、降温室降温工程を効率的に行い、被処理体２の温度を効率的に低下させることができる。降温室降温工程後は、降温室１４の雰囲気温度を好適に維持できる。   Note that the door 52 is provided between the carburizing chamber 12 and the cooler 14 while the temperature of the cooler 14 is lowered to about 850 ° C. by the temperature drop process and the temperature drop process. It is in a partitioned state. If it does in this way, carburizing room 12 and descending room 14 can be intercepted thermally favorably by opening and closing door 52. Therefore, compared with the case where the opening / closing door 52 is not provided, the atmosphere temperature of the carburizing chamber 12 and the atmosphere temperature of the descending greenhouse 14 can be easily controlled individually. That is, even if there is a temperature difference between the ambient temperature of the carburizing chamber 12 and the ambient temperature of the descending greenhouse 14 by the descending temperature lowering process, the heat of the carburizing chamber 12 can be prevented from escaping to the descending chamber 14. Therefore, the atmospheric temperature of the carburizing chamber 12 can be suitably maintained, and the heating efficiency of the carburizing chamber 12 can be prevented from decreasing. Furthermore, the temperature lowering efficiency of the temperature drop greenhouse 14 can be improved. That is, the temperature-lowering temperature-falling step can be efficiently performed, and the temperature of the object to be processed 2 can be efficiently reduced. After the temperature lowering step, the ambient temperature of the temperature lowering chamber 14 can be suitably maintained.

拡散処理工程、降温処理工程が行われる間、被処理体２は降温室１４において停止させられたまま保持される。即ち、被処理体２を互いに異なる処理室の間で移動させることなく、同一の処理室で連続的に処理することができる。従って、被処理体２の移動に要する時間を削減でき、効率的に処理することができる。   While the diffusion treatment step and the temperature lowering treatment step are performed, the object to be treated 2 is held in the greenhouse 16 while being stopped. That is, it is possible to continuously process in the same processing chamber without moving the workpiece 2 between different processing chambers. Therefore, it is possible to reduce the time required to move the object to be processed 2 and to process efficiently.

降温処理工程においても、降温室１４のＣＰは、約０．８％程度に維持される。即ち、降温室１４においては、降温室１４のＣＰを増減させることなく、降温室１４の雰囲気温度を変化させることだけで、被処理体２の拡散処理工程が行われる状態と降温処理工程が行われる状態とが切り換えられる。このように、ＣＰの面倒な制御を行うことなく、雰囲気温度の調節のみによって処理工程を切り換えるようにすると、処理雰囲気の制御が簡単になり、処理工程を好適に切り換えることができる。   Also in the temperature lowering process, the CP of the descending greenhouse 14 is maintained at about 0.8%. That is, in the descending room 14, the state in which the diffusion treatment process of the object to be processed 2 is performed and the descending process are performed only by changing the ambient temperature of the descending room 14 without increasing or decreasing the CP of the descending room 14. The state to be displayed is switched. As described above, if the processing steps are switched only by adjusting the atmospheric temperature without performing troublesome control of the CP, the control of the processing atmosphere becomes simple, and the processing steps can be suitably switched.

降温処理工程が終了すると、搬入出口２５が開口され、油槽室１０２が降温室１４に対して連通させられる。そして、降温処理された被処理体２が、搬入出口２５を通じて降温室１４から油槽室１０２に移動させられ、搬送昇降機１０５上に受け渡される。以上のようにして、熱処理炉３に搬入された被処理体２は、ローラコンベア５５によって、予熱室１１、浸炭室１２、降温室１４に順次搬送され、予熱室１１における予熱処理、浸炭室１２における浸炭処理、降温室１４における拡散処理および降温処理がこの順に施される。   When the temperature lowering process is completed, the carry-in / out port 25 is opened, and the oil tank chamber 102 is communicated with the descending greenhouse 14. And the to-be-processed object 2 by which the temperature reduction process was carried out is moved to the oil tank chamber 102 from the descending greenhouse 14 through the carrying-in / out opening 25, and is delivered on the conveyance elevator 105. As described above, the workpiece 2 carried into the heat treatment furnace 3 is sequentially transferred to the preheating chamber 11, the carburizing chamber 12, and the descending chamber 14 by the roller conveyor 55, and the preheating and carburizing chamber 12 in the preheating chamber 11 is conveyed. The carburizing process in, the diffusion process and the temperature lowering process in the descending greenhouse 14 are performed in this order.

被処理体２が降温室１４から油槽室１０２に搬入されると、搬入出口扉２６によって搬入出口２５が閉じられ、油焼入処理工程が開始される。即ち、被処理体２が油冷部４において油焼き入れされる。   When the workpiece 2 is carried into the oil tank chamber 102 from the descending greenhouse 14, the carry-in / out door 25 is closed by the carry-in / out door 26, and the oil quenching process is started. In other words, the workpiece 2 is oil-quenched in the oil cooling unit 4.

一方、降温処理工程の後（被処理体２が降温室１４から油槽室１０２に搬出させられた後、次の被処理体２が浸炭室１２から降温室１４に搬入される前までの間）、降温室１４においては、降温室昇温工程が行われる（図４参照）。即ち、降温室１４に被処理体２が存在しない状態において、例えば降温室１４に設けられているヒータ５７の発熱量が増加されること等により、降温室１４の雰囲気温度が約８５０℃程度から次第に上昇させられ、再び約９３０℃程度まで昇温される。   On the other hand, after the temperature lowering process (after the object 2 is carried out from the temperature drop chamber 14 to the oil tank chamber 102, before the next object 2 is carried from the carburizing chamber 12 into the temperature drop chamber 14) In the descending greenhouse 14, a descending greenhouse temperature raising step is performed (see FIG. 4). That is, in the state where the object 2 is not present in the descending chamber 14, for example, the amount of heat generated by the heater 57 provided in the descending chamber 14 is increased, so that the ambient temperature of the descending chamber 14 is about 850 ° C. The temperature is gradually raised and the temperature is raised to about 930 ° C. again.

降温室昇温工程が終了すると、次の被処理体２を浸炭室１２から降温室１４に搬入し、続けて拡散処理することができる。なお、被処理体２が降温室１４に搬入されてから（拡散処理工程が開始されてから）降温室昇温工程が終了するまでに要する時間は、約２時間２０分程度である。即ち、拡散処理工程、降温処理工程、降温室昇温工程は、１サイクルの間に行われる。つまり、降温室１４の雰囲気温度は、次の被処理体２の浸炭処理工程が行われている間（次の被処理体２の浸炭処理工程が終了する前）に、拡散処理可能な温度に戻される。従って、次の被処理体２の浸炭処理が終了した後、当該被処理体２を直ちに降温室１４に搬入して、続けて拡散処理することができる。このように、被処理体２の浸炭処理、拡散処理を連続的に行うことで、各被処理体２を適切な処理時間で効率的に処理することができる。   When the temperature-lowering greenhouse temperature raising step is completed, the next object to be processed 2 can be carried into the temperature-lowering chamber 14 from the carburizing chamber 12 and continuously diffused. It should be noted that the time required from when the object to be processed 2 is carried into the descending room 14 (after the diffusion treatment process is started) to when the descending greenhouse temperature raising process is completed is about 2 hours and 20 minutes. That is, the diffusion process, the temperature lowering process, and the temperature lowering process are performed during one cycle. That is, the ambient temperature of the descending room 14 is set to a temperature at which diffusion treatment can be performed while the next carburizing process of the object 2 is being performed (before the carburizing process of the next object 2 is completed). Returned. Therefore, after the next carburizing process of the target object 2 is completed, the target object 2 can be immediately carried into the descending room 14 and subsequently subjected to the diffusion process. In this way, by continuously performing the carburizing process and the diffusion process on the object to be processed 2, each object to be processed 2 can be efficiently processed in an appropriate processing time.

一方、油冷部４における油焼入処理工程においては、被処理体２は搬送昇降機１０５の作動によって下降させられ、油槽１０３に貯留されているオイルに浸漬させられ、油冷される。即ち、降温室１４において約８５０℃程度（オーステナイト化温度以上）の高温の状態で均熱処理された被処理体２が、オイルによってマルテンサイト化温度以下（例えば約１３０℃〜１６０℃程度）に冷却されることにより、被処理体２に焼入れが施される。   On the other hand, in the oil quenching process in the oil cooling section 4, the workpiece 2 is lowered by the operation of the transport elevator 105, immersed in the oil stored in the oil tank 103, and oil cooled. That is, the to-be-processed object 2 that has been soaked at a high temperature of about 850 ° C. (above the austenitizing temperature) in the descending room 14 is cooled to below the martensite temperature (for example, about 130 ° C. to 160 ° C.) by oil. As a result, the workpiece 2 is quenched.

その後、搬送昇降機１０５の作動により、被処理体２が引き上げられ、油槽１０３から取り出される。そして、油槽室搬出口１１１が開口され、油槽室搬出口１１１を通じて油槽室１０２から搬出される。こうして、油焼入処理工程が終了し、連続ガス浸炭設備１における被処理体２に対する一連の熱処理が終了する。   Thereafter, the workpiece 2 is pulled up and removed from the oil tank 103 by the operation of the transport elevator 105. Then, the oil tank chamber carry-out port 111 is opened and carried out from the oil tank chamber 102 through the oil tank chamber carry-out port 111. Thus, the oil quenching process is completed, and a series of heat treatments on the workpiece 2 in the continuous gas carburizing equipment 1 is completed.

なお、油焼き入れ処理工程は、１サイクルの間に行うようにしても良い。即ち、降温室１４において次の被処理体２に対する降温処理工程が終了する前に（次の被処理体２に対する拡散処理工程、降温室降温工程、降温処理工程が行われる間に）、並行して実施されるようにすると良い。そうすれば、被処理体２が油槽室１０２から搬出された後、次の被処理体２（降温処理が終了した被処理体２）を降温室１４から油槽室１０２に搬入し、続けて油焼入れ処理することができ、効率的である。被処理体２の降温処理、油焼入処理を連続的に行うことで、各被処理体２を適切な処理時間で効率的に処理することができる。   The oil quenching process may be performed during one cycle. That is, before the temperature-lowering process for the next object to be processed 2 is completed in the temperature-lowering greenhouse 14 (while the diffusion process, the temperature-lowering greenhouse temperature-lowering process, and the temperature-lowering process for the next object-to-be-processed 2 are performed). Should be implemented. Then, after the workpiece 2 is unloaded from the oil tank chamber 102, the next workpiece 2 (the workpiece 2 for which the temperature lowering process has been completed) is carried from the descending chamber 14 into the oil bath chamber 102, and then the oil It can be hardened and is efficient. By continuously performing the temperature lowering process and the oil quenching process of the object 2 to be processed, each object 2 can be efficiently processed in an appropriate processing time.

以上説明したように、かかる連続ガス浸炭設備１にあっては、被処理体２を降温室１４において拡散処理することで、被処理体２を効率的に処理することができる。即ち、浸炭室１２における浸炭処理を、高いＣＰを有する処理雰囲気によって効率的に行うことができるため、浸炭処理時間を短くすることができる。さらに、浸炭処理の後、拡散処理を行うことで、被処理体２の表面炭素濃度を確実に調節できる。即ち、被処理体２の表面炭素濃度が過剰になること、処理品質が低下することを防止できる。小型の連続ガス浸炭設備１においても、被処理体２の熱処理を効率的に行うことができる。   As described above, in the continuous gas carburizing facility 1, the object to be processed 2 can be efficiently processed by diffusing the object to be processed 2 in the descending room 14. That is, since the carburizing process in the carburizing chamber 12 can be efficiently performed in a processing atmosphere having a high CP, the carburizing process time can be shortened. Furthermore, the surface carbon density | concentration of the to-be-processed object 2 can be adjusted reliably by performing a diffusion process after a carburizing process. That is, it can prevent that the surface carbon concentration of the to-be-processed object 2 becomes excess, and that processing quality falls. Even in the small continuous gas carburizing equipment 1, the heat treatment of the workpiece 2 can be performed efficiently.

また、浸炭処理と拡散処理を組み合わせることで、予熱処理終了（浸炭処理開始）から降温処理開始までの処理時間（図３においては、浸炭処理時間（約７時間）＋拡散処理時間（約１時間）＝約８時間）を、拡散処理を行わない場合（浸炭処理を低いＣＰで長時間行うことにより拡散処理を行わずに被処理体２の表面炭素濃度を調節する場合、図６参照）における予熱処理終了から降温処理開始までの処理時間（図６においては、浸炭処理時間＝約９時間）よりも短縮することができる。また、１サイクルの時間（図３においては約２時間２０分）を、拡散処理を行わない場合における１サイクルの時間（図６においては約３時間）よりも短縮することができる。ひいては、連続ガス浸炭設備１に被処理体２を搬入してから搬出するまで（予熱処理開始から油焼き入れ処理終了まで）の、連続ガス浸炭設備１における全体の処理時間を短縮できる。従って、連続ガス浸炭設備１の処理効率、生産性を高めることができる。   Further, by combining the carburizing treatment and the diffusion treatment, the treatment time from the end of the pre-heat treatment (start of the carburization treatment) to the start of the temperature lowering treatment (in FIG. 3, the carburization treatment time (about 7 hours) + the diffusion treatment time (about 1 hour) ) = About 8 hours) when the diffusion treatment is not performed (when the surface carbon concentration of the workpiece 2 is adjusted without performing the diffusion treatment by performing the carburization treatment with a low CP for a long time, see FIG. 6). The processing time from the end of the pre-heat treatment to the start of the temperature lowering process (in FIG. 6, carburizing process time = about 9 hours) can be shortened. Further, the time of one cycle (about 2 hours and 20 minutes in FIG. 3) can be shortened compared to the time of one cycle when the diffusion process is not performed (about 3 hours in FIG. 6). As a result, the whole processing time in the continuous gas carburizing equipment 1 from carrying in the to-be-processed object 2 to the continuous gas carburizing equipment 1 until carrying it out (from the preheat treatment start to the end of the oil quenching process) can be shortened. Therefore, the processing efficiency and productivity of the continuous gas carburizing facility 1 can be improved.

なお、上記の実施形態では、１サイクルの時間を、拡散処理を行わない場合における１サイクルの時間に対して、約２２％（（３時間−２時間２０分）／３時間×１００）短縮させることができる。換言すれば、予熱処理終了から降温処理開始までの工程の生産性を、約２２％向上させることができる。即ち、被処理品は、熱処理設備から２時間２０分ごとに搬出され、その分生産性が向上する。   In the above embodiment, the time of one cycle is shortened by about 22% ((3 hours-2 hours 20 minutes) / 3 hours × 100) with respect to the time of one cycle when the diffusion process is not performed. be able to. In other words, the productivity of the process from the end of the pre-heat treatment to the start of the temperature lowering process can be improved by about 22%. That is, the product to be processed is unloaded from the heat treatment equipment every 2 hours and 20 minutes, and the productivity is improved accordingly.

さらに、予熱処理終了から降温処理開始までの処理効率を向上させることで、ＲＸガス、エンリッチガス等のガスの供給量を抑制できる。即ち、少ない消費量で効率的に処理できるようになる。従って、ＲＸガス、エンリッチガス等のガスに要するコストの削減を図ることができる。   Furthermore, the supply amount of gas such as RX gas or enriched gas can be suppressed by improving the processing efficiency from the end of the pre-heat treatment to the start of the temperature lowering process. That is, the processing can be efficiently performed with a small amount of consumption. Therefore, the cost required for gas such as RX gas and enriched gas can be reduced.

また、拡散処理と降温処理を同一の処理室（降温室１４）で行うため、被処理体２を拡散室から降温室に搬送したり、拡散室と降温室の間に設けた開閉扉を開閉させたりといった動作を行うことなく、降温処理を迅速に開始させることができる。さらに、開閉扉の開閉が少ないことにより、各処理室の雰囲気や温度の乱れを抑制することができる。そのため、フィードバック制御の負担が低減し、フィードバック制御に使用されるガスや電気などの費用を削減することができる。   In addition, since the diffusion treatment and the temperature lowering treatment are performed in the same treatment room (falling room 14), the object 2 is transferred from the diffusion room to the falling room, and the open / close door provided between the diffusion room and the falling room is opened and closed. The temperature lowering process can be started promptly without performing an operation such as letting it go. Furthermore, since the opening and closing of the opening / closing door is small, disturbances in the atmosphere and temperature of each processing chamber can be suppressed. Therefore, the burden of feedback control is reduced, and the cost of gas and electricity used for feedback control can be reduced.

さらに、開閉扉５１、５２を設けることで、各処理室の雰囲気制御を確実かつ効率的に行うことができる。即ち、ＲＸガス、エンリッチガス等のガスの供給量をより効果的に抑制できるとともに、例えばヒータ５７の発熱量を有効に利用して、各処理室の雰囲気温度を効率的に制御できる。従って、例えばヒータ５７の稼動コスト（電気代等）等の削減も図ることができる。   Furthermore, by providing the opening / closing doors 51 and 52, it is possible to reliably and efficiently control the atmosphere of each processing chamber. That is, the supply amount of gas such as RX gas or enriched gas can be more effectively suppressed, and the atmospheric temperature of each processing chamber can be efficiently controlled by effectively using, for example, the heat generation amount of the heater 57. Therefore, for example, it is possible to reduce the operating cost (such as electricity cost) of the heater 57.

以上、本発明の好適な実施形態について説明したが、本発明はかかる例に限定されない。当業者であれば、特許請求の範囲に記載された技術的思想の範疇内において、各種の変更例または修正例に想到しうることは明らかであり、それらについても当然に本発明の技術的範囲に属するものと了解される。   As mentioned above, although preferred embodiment of this invention was described, this invention is not limited to this example. It is obvious for those skilled in the art that various changes or modifications can be conceived within the scope of the technical idea described in the claims. It is understood that it belongs to.

例えば以上の実施形態では、熱処理設備は被処理体２の連続浸炭処理を行う連続ガス浸炭設備であるとし、被処理体は鋼材であるとしたが、これらはかかるものに限定されず、本実施形態は、様々な熱処理を行う熱処理設備において適用できる。例えば、被処理体は鉄系合金以外の他の合金、金属材料からなるものであっても良い。   For example, in the above embodiment, it is assumed that the heat treatment facility is a continuous gas carburizing facility that performs continuous carburization treatment of the object to be processed 2 and the object to be processed is a steel material. The form can be applied to heat treatment equipment for performing various heat treatments. For example, the object to be processed may be made of an alloy other than an iron-based alloy or a metal material.

また、予熱室１１に収容可能な被処理体２の個数、浸炭室１２に収容可能な被処理体２の個数、降温室１４に収容可能な被処理体２の個数も、以上の実施形態に示したものには限定されない。例えば予熱室１１や降温室１４に、２以上の被処理体２を並べて収容できる構成にしても良い。浸炭室１２には２以下あるいは４以上の被処理体２を収容するように構成しても良い。   In addition, the number of objects to be processed 2 that can be accommodated in the preheating chamber 11, the number of objects to be processed 2 that can be accommodated in the carburizing chamber 12, and the number of objects to be treated 2 that can be accommodated in the descending chamber 14 are also included in the above embodiment. It is not limited to what is shown. For example, you may make it the structure which can accommodate the two or more to-be-processed object 2 side by side in the preheating chamber 11 or the descending room 14. You may comprise so that the to-be-processed object 2 of 2 or less or 4 or more may be accommodated in the carburizing chamber 12. FIG.

温度調節機構１３１やＣＰ調節機構１３２の構成も、以上の実施形態に示したものに限定されない。例えばヒータ５７の種類やＣＰ検出用センサ６１の種類は、以上の実施形態に示したものに限定されない。また、温度調節機構１３１は、予熱室１１、浸炭室１２、降温室１４にそれぞれ設けられているヒータ５７の発熱量を調節することで、予熱室１１、浸炭室１２、降温室１４の雰囲気温度を調節する構成としたが、かかる構成には限定されず、例えば、予熱室１１の雰囲気を冷却する冷却路、浸炭室１２の雰囲気を冷却する冷却路、あるいは、降温室１４の雰囲気を冷却する冷却路を備える構成にしても良い。即ち、冷却路を炉体１０の壁部（予熱室１１を構成する部分、浸炭室１２を構成する部分、降温室１４を構成する部分）またはヒーターチューブ内にそれぞれ内蔵し、各冷却路に冷媒（エアまたは冷却水）をそれぞれ通過させることで、予熱室１１、浸炭室１２、降温室１４をそれぞれ個別に冷却できるようにしても良い。例えば降温室降温工程においては、降温室１４を冷却させる冷却路における冷媒の流量を増加させることにより、降温室１４の雰囲気温度を低下させるようにしても良い。   The configurations of the temperature adjustment mechanism 131 and the CP adjustment mechanism 132 are not limited to those shown in the above embodiments. For example, the type of the heater 57 and the type of the CP detection sensor 61 are not limited to those shown in the above embodiments. Further, the temperature adjustment mechanism 131 adjusts the heat generation amount of the heaters 57 provided in the preheating chamber 11, the carburizing chamber 12, and the descending chamber 14, respectively, so that the ambient temperature of the preheating chamber 11, the carburizing chamber 12, and the descending greenhouse 14 is adjusted. However, the present invention is not limited to this configuration. For example, the cooling path for cooling the atmosphere of the preheating chamber 11, the cooling path for cooling the atmosphere of the carburizing chamber 12, or the atmosphere of the descending room 14 is cooled. You may make it a structure provided with a cooling path. That is, the cooling path is built in the wall part of the furnace body 10 (the part constituting the preheating chamber 11, the part constituting the carburizing chamber 12, the part constituting the descending room 14) or the heater tube, respectively, and the refrigerant is contained in each cooling path. By passing (air or cooling water), the preheating chamber 11, the carburizing chamber 12, and the descending greenhouse 14 may be individually cooled. For example, in the temperature lowering room temperature lowering step, the ambient temperature of the temperature lowering room 14 may be lowered by increasing the flow rate of the refrigerant in the cooling path for cooling the temperature lowering room 14.

また、各処理室に対するガス供給路の配設の態様、各処理室に供給されるガスの種類等も、以上の実施形態には限定されない。例えば窒素ガスに代えて、他の不活性ガス、例えばアルゴンガス（Ａｒ）等を含むガスを使用しても良い。   Further, the manner of disposing the gas supply path for each processing chamber, the type of gas supplied to each processing chamber, and the like are not limited to the above embodiments. For example, instead of nitrogen gas, other inert gas such as argon gas (Ar) may be used.

さらに、１サイクルの単位所要時間、予熱処理時間、浸炭処理時間、拡散処理時間、降温処理時間、油焼入処理時間、予熱処理温度、浸炭処理温度、第一の処理温度（拡散処理温度）、第二の処理温度（降温処理温度）、予熱室１１のＣＰ、浸炭室１２のＣＰ（第一のＣＰ値）、降温室１４のＣＰ（第二のＣＰ値）等の値も、以上の実施形態に例示したものには限定されない。   Furthermore, the unit required time for one cycle, pre-heat treatment time, carburization treatment time, diffusion treatment time, temperature drop treatment time, oil quenching treatment time, pre-heat treatment temperature, carburization treatment temperature, first treatment temperature (diffusion treatment temperature), The values of the second treatment temperature (cooling treatment temperature), the CP of the preheating chamber 11, the CP of the carburizing chamber 12 (first CP value), the CP of the descending greenhouse 14 (second CP value), and the like are also implemented. It is not limited to what was illustrated in the form.

本発明は、例えば鋼材等の浸炭処理等を行う熱処理方法及び熱処理設備に適用できる。   The present invention can be applied to, for example, a heat treatment method and heat treatment equipment for performing a carburizing treatment of steel material or the like.

本実施形態にかかる連続ガス浸炭設備の概略縦断面図である。It is a schematic longitudinal cross-sectional view of the continuous gas carburizing equipment concerning this embodiment. 本実施形態にかかる連続ガス浸炭設備の概略縦断面図である。It is a schematic longitudinal cross-sectional view of the continuous gas carburizing equipment concerning this embodiment. 連続ガス浸炭設備において被処理体に対して行われる処理工程、被処理体の温度変化、被処理体を処理する処理雰囲気のＣＰの関係を示すグラフである。It is a graph which shows the relationship of CP of the process process performed with respect to a to-be-processed object in a continuous gas carburizing installation, the temperature change of a to-be-processed object, and the process atmosphere which processes a to-be-processed object. 降温室において行われる工程と、降温室の雰囲気温度の変化の関係を示すグラフである。It is a graph which shows the relationship between the process performed in a descending greenhouse, and the change of the atmospheric temperature of a descending greenhouse. 従来の標準的な構成の連続ガス浸炭設備において被処理体に対して行われる処理工程、被処理体の温度変化、被処理体を処理する処理雰囲気のＣＰの関係を示すグラフである。It is a graph which shows the relationship of CP of the process process performed with respect to a to-be-processed object in the continuous gas carburizing equipment of the conventional standard structure, the temperature change of a to-be-processed object, and the to-be-processed object. 従来の小型の連続ガス浸炭設備において被処理体に対して行われる処理工程、被処理体の温度変化、被処理体を処理する処理雰囲気のＣＰの関係を示すグラフである。It is a graph which shows the relationship between CP of the process process performed with respect to a to-be-processed object in the conventional small continuous gas carburizing equipment, the temperature change of a to-be-processed object, and the to-be-processed object.

符号の説明Explanation of symbols

１ 連続ガス浸炭処理設備
２ 被処理体
３ 熱処理炉
５ 制御部
１１ 予熱室
１２ 浸炭室
１４ 降温室
５７ ヒータ
１３１ 温度調節機構
１３２ ＣＰ調節機構（カーボンポテンシャル調節機構） DESCRIPTION OF SYMBOLS 1 Continuous gas carburizing processing equipment 2 To-be-processed object 3 Heat processing furnace 5 Control part 11 Preheating chamber 12 Carburizing chamber 14 Cooling chamber 57 Heater 131 Temperature control mechanism 132 CP control mechanism (carbon potential control mechanism)

Claims (11)

被処理体を熱処理する熱処理方法であって、
被処理体を浸炭室において浸炭処理し、
前記浸炭処理が行われた被処理体を降温室において拡散処理し、
前記拡散処理が行われた被処理体を前記降温室において降温処理することを特徴とする、熱処理方法。 A heat treatment method for heat treating a workpiece,
Carburize the workpiece in the carburizing chamber,
The object to be treated that has been subjected to the carburizing process is diffused in a descending greenhouse,
A heat treatment method, comprising subjecting an object to be treated, which has been subjected to the diffusion treatment, to a temperature drop treatment in the temperature drop greenhouse. 前記降温室の雰囲気温度を第一の処理温度にした状態で、前記拡散処理を行い、
前記降温室の雰囲気温度を前記第一の処理温度よりも低い第二の処理温度に低下させ、前記降温処理を行うことを特徴とする、請求項１に記載の熱処理方法。 With the atmospheric temperature of the descending greenhouse set to the first treatment temperature, the diffusion treatment is performed,
2. The heat treatment method according to claim 1, wherein the temperature lowering process is performed by lowering an ambient temperature of the temperature drop room to a second treatment temperature lower than the first treatment temperature. 前記拡散処理が行われる際の前記降温室のカーボンポテンシャル、及び、前記降温処理が行われる際の前記降温室のカーボンポテンシャルは、前記浸炭処理が行われる際の前記浸炭室のカーボンポテンシャルよりも低くすることを特徴とする、請求項１又は２に記載の熱処理方法。 The carbon potential of the descending greenhouse when the diffusion treatment is performed, and the carbon potential of the descending greenhouse when the temperature lowering treatment is performed are lower than the carbon potential of the carburizing chamber when the carburizing treatment is performed. The heat treatment method according to claim 1, wherein the heat treatment method is performed. 前記被処理体を前記降温処理した後、焼入れ処理することを特徴とする、請求項１〜３のいずれかに記載の熱処理方法。 The heat treatment method according to any one of claims 1 to 3, wherein the object to be treated is subjected to a quenching treatment after the temperature lowering treatment. 前記被処理体を前記浸炭処理する前に、予熱室において予熱処理することを特徴とする、請求項１〜４のいずれかに記載の熱処理方法。 The heat treatment method according to any one of claims 1 to 4, wherein the object to be treated is preheated in a preheating chamber before the carburizing treatment. 前記予熱室において、前記被処理体を前記予熱処理した後、一次浸炭処理を行うことを特徴とする、請求項５に記載の熱処理方法。 6. The heat treatment method according to claim 5, wherein in the preheating chamber, a primary carburizing treatment is performed after the pretreatment of the object to be treated. 被処理体を熱処理する熱処理設備であって、
被処理体の浸炭処理を行う浸炭室と、
前記浸炭処理が行われた被処理体の拡散処理、及び、前記拡散処理が行われた被処理体の降温処理を行う降温室とを備えることを特徴とする、熱処理設備。 A heat treatment facility for heat treating an object to be treated,
A carburizing chamber for carburizing the workpiece;
A heat treatment facility comprising: a diffusion treatment of the object to be treated that has been subjected to the carburizing process; and a greenhouse that performs a temperature lowering process on the object to be treated that has undergone the diffusion process. 前記降温室の雰囲気温度を調節する温度調節機構を備え、
前記温度調節機構は、前記降温室の雰囲気温度を、被処理体の拡散処理を行うことが可能な第一の処理温度と、前記第一の処理温度よりも低い第二の処理温度とに調節することが可能な構成とし、
前記降温室の雰囲気温度は、前記拡散処理の間は前記第一の処理温度に調節され、前記降温処理を行う際は前記第二の処理温度に低下させられる構成としたことを特徴とする、請求項７に記載の熱処理設備。 A temperature adjustment mechanism for adjusting the temperature of the descending greenhouse;
The temperature adjusting mechanism adjusts the ambient temperature of the descending room to a first processing temperature at which the object to be processed can be diffused and a second processing temperature lower than the first processing temperature. A configuration that can be
The atmospheric temperature of the descending greenhouse is adjusted to the first treatment temperature during the diffusion treatment, and is configured to be lowered to the second treatment temperature when performing the temperature fall treatment, The heat treatment facility according to claim 7. 前記降温室のカーボンポテンシャルを前記浸炭室のカーボンポテンシャルよりも低い値に調節するカーボンポテンシャル調節機構を備えることを特徴とする、請求項７又は８に記載の熱処理設備。 The heat treatment equipment according to claim 7 or 8, further comprising a carbon potential adjusting mechanism that adjusts a carbon potential of the descending greenhouse to a value lower than a carbon potential of the carburizing chamber. 前記浸炭室と前記降温室の間を開閉する開閉扉を備えることを特徴とする、請求項７〜９のいずれかに記載の熱処理設備。 The heat treatment equipment according to any one of claims 7 to 9, further comprising an opening / closing door that opens and closes between the carburizing chamber and the descending room. 前記降温処理が行われた被処理体の焼入処理を行う油槽室を備えることを特徴とする、請求項７〜１０のいずれかに記載の熱処理設備。 The heat treatment facility according to any one of claims 7 to 10, further comprising an oil tank chamber that performs a quenching process on the object to be processed on which the temperature lowering process has been performed.
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