JP2009012086A - Workpiece carrier - Google Patents

Workpiece carrier Download PDF

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Publication number
JP2009012086A
JP2009012086A JP2007173987A JP2007173987A JP2009012086A JP 2009012086 A JP2009012086 A JP 2009012086A JP 2007173987 A JP2007173987 A JP 2007173987A JP 2007173987 A JP2007173987 A JP 2007173987A JP 2009012086 A JP2009012086 A JP 2009012086A
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Japan
Prior art keywords
insert
opening
locking
work
carrier substrate
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JP2007173987A
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Japanese (ja)
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JP5114113B2 (en
Inventor
Shinzo Nishikawa
真三 西川
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SpeedFam Co Ltd
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SpeedFam Co Ltd
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Priority to JP2007173987A priority Critical patent/JP5114113B2/en
Priority to TW097121414A priority patent/TW200914199A/en
Priority to KR1020080057302A priority patent/KR20090004521A/en
Priority to DE102008030067A priority patent/DE102008030067A1/en
Publication of JP2009012086A publication Critical patent/JP2009012086A/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers
    • B24B37/28—Work carriers for double side lapping of plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/10—Single-purpose machines or devices
    • B24B7/16—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings
    • B24B7/17—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings for simultaneously grinding opposite and parallel end faces, e.g. double disc grinders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/24—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a workpiece carrier hardly generating displacement, falling, etc. of an insert mounted on an inner periphery of a workpiece holding hole, and also hardly generating wear when polishing the workpiece. <P>SOLUTION: In this workpiece carrier 10, an opening is provided in a metal carrier substrate 13, the soft insert 15 is mounted on an inner periphery of the opening, and the inside of the insert 15 is made as the workpiece holding hole 12. A square groove-shaped locking groove 22 is provided on at least a part of the inner periphery of the opening. A locking projected line 23 having rectangular cross section is formed on at least a part of an outer periphery of the insert 15. The insert 15 is fixed to the inner periphery of the opening of the carrier substrate 13 in a state of the locking projected line 23 being fitted and locked into the locking groove 22. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、平面研磨装置で半導体ウエハや磁気ディスク基板、光ディスク基板、あるいはガラスディスク基板のような円板状又は角板状をしたワークを研磨加工する場合に、これらのワークの保持に使用されるワークキャリアに関するものである。   The present invention is used to hold a workpiece having a disk shape or a square plate shape such as a semiconductor wafer, a magnetic disk substrate, an optical disk substrate, or a glass disk substrate by a planar polishing apparatus. It is about work career.

例えば、ラッピング装置やポリッシング装置等の平面研磨装置で上述した各種ワークの表面を研磨加工する場合、該ワークの保持に図１３に示すようなワークキャリア１が使用される。このワークキャリア１は、円板形をしていて、外周にギア２を有すると共に、一つ以上のワーク保持孔３を有するもので、このワーク保持孔３内にワークＷを嵌合、保持させた状態で、図１４に示すように、外周のギア２を平面研磨装置のサンギア４とインターナルギア５とに噛合させて上定盤６と下定盤７との間に配設し、上記サンギア４とインターナルギア５とでこのワークキャリア１を自転及び公転させながら、該ワークキャリア１が保持するワークＷを上下の定盤６，７によって研磨加工するものである。   For example, when the surfaces of various workpieces described above are polished by a flat polishing apparatus such as a lapping apparatus or a polishing apparatus, a work carrier 1 as shown in FIG. 13 is used to hold the work. The work carrier 1 has a disk shape, has a gear 2 on the outer periphery, and has one or more work holding holes 3. The work W is fitted and held in the work holding holes 3. In this state, as shown in FIG. 14, the outer peripheral gear 2 is meshed with the sun gear 4 and the internal gear 5 of the surface polishing apparatus and disposed between the upper surface plate 6 and the lower surface plate 7. The work W held by the work carrier 1 is polished by the upper and lower surface plates 6 and 7 while rotating and revolving the work carrier 1 with the internal gear 5.

上記ワークキャリア１は通常、ステンレス鋼やＳＫ鋼といった硬質の金属素材で形成されている。このため、ワークＷの研磨加工時に該ワークがワーク保持孔３の内周に接触すると、損傷を受けて不良品になるおそれがある。
そこで、従来より、例えば特許文献１〜４に記載されているように、ワーク保持孔の内周に環状をした軟質のインサートを取り付け、このインサートにワークの外周を接触させるようにした各種ワークキャリアが提案されている。 The work carrier 1 is usually made of a hard metal material such as stainless steel or SK steel. For this reason, when the workpiece comes into contact with the inner periphery of the workpiece holding hole 3 during the polishing of the workpiece W, there is a risk of being damaged and becoming a defective product.
Therefore, conventionally, as described in, for example, Patent Documents 1 to 4, various work carriers in which an annular soft insert is attached to the inner periphery of the work holding hole and the outer periphery of the work is brought into contact with the insert. Has been proposed.

しかし、特許文献１に記載のワークキャリアは、図１５に示すように、該ワークキャリヤ１の厚さ方向に平坦な内周面３ａを有する円形のワーク保持孔３の内部に、厚さ方向に平坦な外周面８ａを有する円環状のインサート（薄板保持部）８を嵌合し、該インサート８の外周面８ａとワーク保持孔３の内周面３ａとを接着剤等で固着したものであって、平坦な円周面同士を接着しているため、ワーク研磨時の作用力によってそれらの接着部分が剥離し、インサート８が傾いたりワーク保持孔３の軸線方向に位置ずれしたりして、脱落し易いという欠点がある。   However, as shown in FIG. 15, the work carrier described in Patent Document 1 is arranged in the thickness direction inside a circular work holding hole 3 having an inner peripheral surface 3 a flat in the thickness direction of the work carrier 1. An annular insert (thin plate holding portion) 8 having a flat outer peripheral surface 8a is fitted, and the outer peripheral surface 8a of the insert 8 and the inner peripheral surface 3a of the work holding hole 3 are fixed with an adhesive or the like. In addition, since the flat circumferential surfaces are bonded to each other, the bonded portions are peeled off by the acting force during the workpiece polishing, and the insert 8 is inclined or displaced in the axial direction of the workpiece holding hole 3. There is a drawback that it is easy to drop off.

また、特許文献２及び特許文献３に記載のものは、図１６に示すように、円形のワーク保持孔３の内周面３ａを凹状の曲面に形成し、この凹状曲面部に、外周面８ａが突状の曲面となったリング状のインサート（クッション材）８を嵌合して接着により固定しているが、滑らかな曲面同士の接着であるため、インサート８が上記曲面状の内周面３ａに沿って位置ずれし、ついには脱落することも考えられる。   Moreover, as shown in FIG. 16, the thing of patent document 2 and patent document 3 forms the inner peripheral surface 3a of the circular workpiece | work holding hole 3 in a concave curved surface, and the outer peripheral surface 8a is formed in this concave curved surface part. The ring-shaped insert (cushion material) 8 having a protruding curved surface is fitted and fixed by bonding. However, since the curved curved inner peripheral surface is formed by adhesion between smooth curved surfaces. It is conceivable that the position shifts along 3a and eventually falls off.

一方、特許文献４に記載のワークキャリアは、図１７に示すように、金属板１ａに設けたワーク保持孔（貫通孔）３の口縁の一部又は全部に面取り部分３ｂを形成し、該ワーク保持孔３の周辺部と内周部とをインサート（樹脂成型積層物）８で被覆したもので、上記面取り部分３ｂにおいてインサート８は、ワーク保持孔３の孔縁部分を外側から包み込んだ状態に被覆されている。換言すれば、インサート８の外周の角溝８ｂ内に、ワーク保持孔３の角形をした孔縁３ｃが嵌合した形になっている。このため、上記引用文献１〜３に記載されたものに比べると、インサート８の位置ずれが生じにくく、脱落防止には有効であると思われる。   On the other hand, as shown in FIG. 17, the work carrier described in Patent Document 4 forms a chamfered portion 3b on a part or all of the lip of the work holding hole (through hole) 3 provided in the metal plate 1a. The peripheral portion and the inner peripheral portion of the workpiece holding hole 3 are covered with an insert (resin molding laminate) 8, and the insert 8 wraps the edge portion of the workpiece holding hole 3 from the outside in the chamfered portion 3b. Is covered. In other words, the rectangular hole edge 3c of the workpiece holding hole 3 is fitted in the angular groove 8b on the outer periphery of the insert 8. For this reason, compared with what was described in the said cited literatures 1-3, the position shift of the insert 8 is hard to produce, and it seems that it is effective for drop-off prevention.

しかしながら、この特許文献４に記載のワークキャリヤ１は、金属板１ａの面取り部分３ｂをインサート８が外側から覆っているため、該インサート８の上記金属板１ａからワーク保持孔３の内側に延出してキャリアの上下面に露出する部分８ｃの露出幅Ｈが必然的に大きくなり、ワークＷの研磨加工時に、図１８に示すように、金属板１ａより軟質の該インサート８が上下の定盤により研磨されて摩耗し易い。そして、このようにインサート８が摩耗すると、ワークＷの端部の研磨量が多くなって該端部において平面度が低下する「面ダレ」の現象が生じ易くなる。
特開２００３−３０５６３７号公報 特開２０００−２８８９２２号公報 特開２００６−６８８９５号公報 特開２００２−１８７０８号公報 However, in the work carrier 1 described in Patent Document 4, since the insert 8 covers the chamfered portion 3b of the metal plate 1a from the outside, it extends from the metal plate 1a of the insert 8 to the inside of the work holding hole 3. Thus, the exposed width H of the portion 8c exposed on the upper and lower surfaces of the carrier is inevitably increased, and when the workpiece W is polished, the insert 8 softer than the metal plate 1a is moved by the upper and lower surface plates as shown in FIG. It is easily polished and worn. When the insert 8 is worn in this way, the amount of polishing at the end of the work W increases, and the phenomenon of “sagging” in which the flatness is reduced at the end tends to occur.
JP 2003-305637 A JP 2000-288922 A JP 2006-68895 A JP 2002-18708 A

そこで本発明の目的は、ワークキャリアにおける上記従来の問題点を解消し、ワーク保持孔の内周部分に設けたインサートの位置ずれや脱落等を生じにくくすると共に、該インサートのワーク研磨加工時における摩耗を防止して、該インサートの摩耗に伴うワーク外周部の面ダレを防止するワークキャリアを提供することにある。   Accordingly, an object of the present invention is to eliminate the above-mentioned conventional problems in the work carrier, to make it difficult for the insert provided in the inner peripheral portion of the work holding hole to be displaced, dropped off, etc. An object of the present invention is to provide a work carrier that prevents wear and prevents sagging of the outer periphery of the work caused by wear of the insert.

上記目的を達成するため本発明によれば、金属製のキャリア基板にワーク保持孔を形成するための開口を設け、該開口の内周にキャリア基板より軟質のインサートを固定し、このインサートの内側を上記ワーク保持孔としたワークキャリアにおいて、上記開口の内周の少なくとも一部に、溝壁に角部を有する角溝形の係止溝が該開口の周方向に延設されると共に、上記インサートの外周の少なくとも一部に、上記係止溝の角部に適合する角部を備えた角形断面の係止突条が該インサートの周方向に延設されていて、この係止突条が上記係止溝内に嵌合、係止することによって上記インサートがキャリア基板に固定されていることを特徴とするものである。   In order to achieve the above object, according to the present invention, an opening for forming a work holding hole is provided in a metal carrier substrate, and an insert that is softer than the carrier substrate is fixed to the inner periphery of the opening. In the work carrier having the work holding hole, a rectangular groove-shaped locking groove having a corner on the groove wall extends in the circumferential direction of the opening on at least a part of the inner periphery of the opening. At least a part of the outer periphery of the insert is provided with a locking protrusion having a square cross section with a corner that matches the corner of the locking groove extending in the circumferential direction of the insert. The insert is fixed to the carrier substrate by fitting and locking in the locking groove.

本発明において、上記係止溝及び係止突条の断面形状は、Ｖ字状、台形状、コ字状の何れかであることが望ましい。   In the present invention, it is desirable that the cross-sectional shape of the locking groove and the locking protrusion is any one of a V shape, a trapezoidal shape, and a U shape.

本発明においては、上記キャリア基板の開口の口縁を所定の間隔をおいて凹状に切り欠くことにより、該開口の内周に、複数の凹部と、隣接する凹部間に介在する張出部とが形成され、また、上記インサートの外周には、上記凹部に嵌合する複数の凸部と、隣接する凸部間に介在して上記張出部が嵌合する窪み部とが形成され、互いに嵌合する凹部と凸部及び／又は張出部と窪み部とに上記係止溝と係止突条とが形成されていても良い。   In the present invention, the edge of the opening of the carrier substrate is cut into a concave shape at a predetermined interval, so that a plurality of concave portions and an overhang portion interposed between adjacent concave portions are formed on the inner periphery of the opening. In addition, a plurality of convex portions that fit into the concave portion and a hollow portion that is interposed between adjacent convex portions and into which the protruding portion fits are formed on the outer periphery of the insert. The locking groove and the locking protrusion may be formed in the recessed portion and the protruding portion and / or the protruding portion and the recessed portion to be fitted.

本発明によれば、キャリア基板の開口の内周に形成した角溝形の係止溝に、インサートの外周に形成した角形の係止突条を嵌合、係止させているので、該インサートのキャリア基板に対する係止力が大きく、円弧状の係止溝と係止突条とを組み合わせた従来品のような係止溝に沿った滑りが生じにくい。この結果、ワークの研磨加工時の作用力によるインサートの位置ずれや脱落等が確実に防止されることになる。
しかも、上記インサートが外周に係止突条を有することによって該インサートの内外径方向幅が広くても、この係止突条は上記係止溝に嵌合することによってキャリア基板で両側から覆われるため、該インサートの、上記開口の内周端より内側に延在してキャリアの上下面に露出する露出幅は狭く、このため、ワーク研磨加工時におけるインサートの摩耗が防止され、該インサートの摩耗に伴うワーク外周部の面ダレが防止されるという利点もある。 According to the present invention, the rectangular locking protrusion formed on the outer periphery of the insert is fitted and locked to the rectangular locking groove formed on the inner periphery of the opening of the carrier substrate. The carrier substrate has a large locking force, and slipping along the locking groove as in the conventional product in which the arc-shaped locking groove and the locking protrusion are combined is unlikely to occur. As a result, it is possible to reliably prevent the displacement and dropout of the insert due to the acting force during the polishing of the workpiece.
Moreover, even if the insert has a locking ridge on the outer periphery, the locking ridge is covered from both sides by the carrier substrate by fitting into the locking groove even if the width of the insert in the inner and outer diameter direction is wide. Therefore, the exposed width of the insert that extends inward from the inner peripheral edge of the opening and is exposed on the upper and lower surfaces of the carrier is narrow, so that the wear of the insert is prevented during workpiece polishing, and the wear of the insert is prevented. There is also an advantage that the surface sagging of the work outer peripheral portion due to is prevented.

図１は本発明に係るワークキャリアの一実施形態を示すものである。このワークキャリア１０は、円板形をしていて、外周にギア１１を有すると共に、内部に円形をした１つ以上のワーク保持孔１２を有するもので、図１４に示す公知例と同様に、上記ワーク保持孔１２内に円形のワークＷを嵌合、保持させた状態で、外周のギア１１を平面研磨装置のサンギア４とインターナルギア５とに噛合させて上定盤６と下定盤７との間に介在させ、上記サンギア４とインターナルギア５とでこのワークキャリア１０を自転及び公転させながら、上記ワークＷを上下の定盤６，７によって研磨加工するものである。   FIG. 1 shows an embodiment of a work carrier according to the present invention. This work carrier 10 has a disk shape, has a gear 11 on the outer periphery, and has one or more work holding holes 12 having a circular shape inside. As in the known example shown in FIG. In a state where the circular workpiece W is fitted and held in the workpiece holding hole 12, the outer peripheral gear 11 is engaged with the sun gear 4 and the internal gear 5 of the surface polishing device, and the upper surface plate 6 and the lower surface plate 7 The work W is polished by upper and lower surface plates 6 and 7 while the work gear 10 is rotated and revolved by the sun gear 4 and the internal gear 5.

上記ワークキャリア１０は、図２からも分かるように、ステンレス鋼やＳＫ鋼あるいはチタンといった硬質の金属板からなる円形のキャリア基板１３の外周に上記ギア１１を形成すると共に、該キャリア基板１３の内部に上記ワーク保持孔１２を形成するための開口１４を形成し、この開口１４の内周に、ワークＷの外周に接触する中空状（リング状）のインサート１５を固定し、このインサート１５の内側を上記ワーク保持孔１２としたものである。
上記インサート１５は、上記キャリア基板１３より軟質の合成樹脂などの素材で形成されていて、ワークＷの外周に緩衝的に接触するものであり、図示した例ではその厚さが上記キャリア基板１３の厚さと等しく形成されている（図４参照）。しかし、上記インサート１５の厚さは、キャリア基板１３の厚さより厚く形成することも薄く形成することも可能である。 As can be seen from FIG. 2, the work carrier 10 has the gear 11 formed on the outer periphery of a circular carrier substrate 13 made of a hard metal plate such as stainless steel, SK steel, or titanium, and the inside of the carrier substrate 13. An opening 14 for forming the workpiece holding hole 12 is formed on the inner side of the insert 15. A hollow (ring-shaped) insert 15 that contacts the outer periphery of the workpiece W is fixed to the inner periphery of the opening 14. Is the workpiece holding hole 12.
The insert 15 is made of a material such as a synthetic resin that is softer than the carrier substrate 13 and is in contact with the outer periphery of the workpiece W in a buffered manner. In the illustrated example, the thickness of the insert 15 is It is formed equal to the thickness (see FIG. 4). However, the insert 15 can be formed thicker or thinner than the carrier substrate 13.

上記インサート１５のキャリア基板１３に対する取り付けは、射出成形により行うのが望ましい。その方法としては、合成樹脂を上記キャリア基板１３の開口１４の内周に沿ってリング状に射出成形することにより、上記インサート１５をその成形と同時に該キャリア基板１３に取り付ける方法や、合成樹脂を上記開口１４の内部全体に板状に射出成形したあと、この合成樹脂板をリング状に打ち抜くことによって上記インサート１５及びワーク保持孔１２を形成する方法などがある。このようにインサート１５を射出成形するのと同時にキャリア基板１３に取り付ける方法は、上記特許文献４に記載されているように既に公知の技術であるから、それについての詳細な説明は省略する。   The insert 15 is preferably attached to the carrier substrate 13 by injection molding. As the method, a synthetic resin is injection-molded in a ring shape along the inner periphery of the opening 14 of the carrier substrate 13, and the insert 15 is attached to the carrier substrate 13 at the same time as the molding. There is a method of forming the insert 15 and the work holding hole 12 by injection-molding the entire inside of the opening 14 into a plate shape and then punching the synthetic resin plate into a ring shape. Since the method of attaching the insert 15 to the carrier substrate 13 at the same time as the injection molding in this way is already a known technique as described in Patent Document 4, detailed description thereof will be omitted.

上記インサート１５をキャリア基板１３に強固に固定するため、図２及び図３から分かるように、上記開口１４の内周には、該開口１４の口縁を一定間隔をおいて凹状に切り欠くことにより、該開口１４の周方向に等間隔で位置する複数の凹部１８と、隣接する凹部１８，１８間に介在する複数の張出部１９とが形成されている。そして、図４及び図５からも明らかなように、上記張出部１９の内周面には、溝内の一部に角部２２ａを有する角溝形の係止溝２２が、上記開口１４の周方向に延設されている。   In order to firmly fix the insert 15 to the carrier substrate 13, as can be seen from FIGS. 2 and 3, the rim of the opening 14 is cut out in a concave shape at regular intervals on the inner periphery of the opening 14. Thus, a plurality of recesses 18 positioned at equal intervals in the circumferential direction of the opening 14 and a plurality of overhanging portions 19 interposed between the adjacent recesses 18, 18 are formed. As apparent from FIGS. 4 and 5, a rectangular groove-shaped locking groove 22 having a corner portion 22 a in a part of the groove is formed on the inner peripheral surface of the overhang portion 19. It extends in the circumferential direction.

このように凹部１８と張出部１９とが形成された開口１４に対して上記インサート１５を射出成形することにより、該インサート１５の外周には、上記凹部１８に嵌合する複数の凸部２０と、上記張出部１９が嵌合する複数の窪み部２１とが、該インサート１５の周方向に交互に形成されると共に、上記窪み部２１の外周面に、上記係止溝２２の角部に適合する角部２３ａを備えた角形断面の係止突条２３が、該インサート１５の周方向に延設され、この係止突条２３が上記係止溝２２に嵌合、係止することにより、該インサート１５が、上記キャリア基板１３の開口１４の内周部分に強固に固定された状態に取り付けられることになる。   Thus, by inserting the insert 15 into the opening 14 in which the recess 18 and the overhanging portion 19 are formed, a plurality of protrusions 20 fitted into the recess 18 are formed on the outer periphery of the insert 15. And a plurality of recesses 21 into which the overhanging portions 19 are fitted are alternately formed in the circumferential direction of the insert 15, and the corners of the locking grooves 22 are formed on the outer peripheral surface of the recesses 21. A locking protrusion 23 having a square cross section provided with a corner 23 a that conforms to the shape of the insert 15 extends in the circumferential direction of the insert 15, and the locking protrusion 23 is fitted and locked in the locking groove 22. Thus, the insert 15 is attached in a state of being firmly fixed to the inner peripheral portion of the opening 14 of the carrier substrate 13.

図示した例では、上記キャリア基板１３における凹部１８の内周面１８ａとインサート１５における凸部２０の外周面２０ａとは、それぞれ、図６に示すように、該キャリア基板１３及びインサート１５の厚さ方向に真っ直ぐな面となっていて、これらの面に上述したような係止溝２２や係止突条２３は形成されていない。
しかし、これらの凹部１８の内周面１８ａと凸部２０の外周面２０ａにも、上記係止溝２２と係止突条２３とを同時に形成することもできる。あるいは、上記張出部１９と窪み部２１とに係止溝２２と係止突条２３とを設ける代わりに、これらの凹部１８と凸部２０とに係止溝２２と係止突条２３とを形成しても良い。 In the illustrated example, the inner peripheral surface 18a of the concave portion 18 in the carrier substrate 13 and the outer peripheral surface 20a of the convex portion 20 in the insert 15 are respectively the thicknesses of the carrier substrate 13 and the insert 15 as shown in FIG. The surfaces are straight in the direction, and the locking grooves 22 and the locking protrusions 23 are not formed on these surfaces.
However, the locking groove 22 and the locking protrusion 23 can be formed simultaneously on the inner peripheral surface 18 a of the concave portion 18 and the outer peripheral surface 20 a of the convex portion 20. Alternatively, instead of providing the locking groove 22 and the locking protrusion 23 in the overhanging portion 19 and the recess portion 21, the locking groove 22 and the locking protrusion 23 are formed in the concave portion 18 and the convex portion 20. May be formed.

上記係止溝２２は、断面Ｖ字状をなすもので、互いに逆向きかつ奥狭まり状に傾斜する２つの側壁２２ｂ，２２ｂを有し、これらの側壁２２ｂ，２２ｂが交わる溝底部分に上記角部２２ａが形成されている。従って、上記係止突条２３も断面Ｖ字状をしていて、互いに逆向きかつ先狭まり状に傾斜する２つの側壁２３ｂ，２３ｂを有し、これらの側壁が交わる先端部分に上記角部２３ａが形成されている。この場合、上記係止溝２２及び係止突条２３の断面形状は、図４及び図５に示すように対称形であっても、非対称形であっても構わない。   The locking groove 22 has a V-shaped cross section, and has two side walls 22b and 22b that are inclined in opposite directions and narrowly, and the corners are formed at the groove bottom portion where these side walls 22b and 22b intersect. A portion 22a is formed. Therefore, the locking protrusion 23 also has a V-shaped cross section, and has two side walls 23b, 23b that are opposite to each other and incline in a tapered shape, and the corner portion 23a is formed at a tip portion where these side walls intersect. Is formed. In this case, the cross-sectional shapes of the locking groove 22 and the locking protrusion 23 may be symmetric or asymmetric as shown in FIGS. 4 and 5.

また、上記係止溝２２は、その溝口部分の最大溝幅がキャリア基板１３の厚さと等しく形成され、係止突条２３も、その基端部の最大突条厚がインサート１５の厚さと等しく形成されているが、図７に示すように、上記係止溝２２の最大溝幅及び係止突条２３の最大突条厚は、キャリア基板１３及びインサート１５の厚さよりも小さくすることもできる。   Further, the locking groove 22 is formed such that the maximum groove width of the groove portion is equal to the thickness of the carrier substrate 13, and the locking protrusion 23 also has the maximum protrusion thickness of the base end portion equal to the thickness of the insert 15. As shown in FIG. 7, the maximum groove width of the locking groove 22 and the maximum protrusion thickness of the locking protrusion 23 can be made smaller than the thickness of the carrier substrate 13 and the insert 15. .

上記インサート１５は、打ち抜き加工やプレス成形あるいは射出成形などの適宜製法によって独立する部材として形成し、上記キャリア基板１３の開口１４の内周に嵌め込んで接着剤により固定することも可能である。その際、このインサート１５は、交換可能に取り付けることもできる。
なお、インサート１５を上述したようにキャリア基板１３に射出成形と同時に固定した場合でも、該インサート１５は摩耗や破損を生じた場合に交換することができる。その交換は、古いインサートを除去したあと、新たなインサートをキャリア基板１３に射出成形と同時に固定することにより行われる。 The insert 15 can be formed as an independent member by an appropriate manufacturing method such as punching, press molding or injection molding, and can be fitted into the inner periphery of the opening 14 of the carrier substrate 13 and fixed by an adhesive. In that case, this insert 15 can also be attached so that replacement | exchange is possible.
Even when the insert 15 is fixed to the carrier substrate 13 at the same time as the injection molding as described above, the insert 15 can be replaced when it is worn or damaged. The replacement is performed by removing the old insert and then fixing the new insert to the carrier substrate 13 simultaneously with the injection molding.

上記の如く形成されたワークキャリア１０は、キャリア基板１３の開口１４の内周面に形成された角溝形の係止溝２２に、インサート１５の外周面に形成された角形断面の係止突条２３が嵌合、係止することにより、該インサート１５がキャリア基板１３に取り付けられているため、該キャリア基板１３に対するインサート１５の係止力が大きく、円弧状の係止溝と係止突条とを組み合わせた従来品のような係止溝に沿った滑りが生じにくい。このため、ワークの研磨加工時の作用力によるインサート１５の脱落等が確実に防止される。   The work carrier 10 formed as described above has a rectangular cross-section locking protrusion formed on the outer peripheral surface of the insert 15 in a rectangular groove-shaped locking groove 22 formed on the inner peripheral surface of the opening 14 of the carrier substrate 13. Since the insert 15 is attached to the carrier substrate 13 by fitting and locking the strips 23, the locking force of the insert 15 with respect to the carrier substrate 13 is large, and the arc-shaped locking groove and the locking protrusion Sliding along the locking groove as in the conventional product combined with the strip is unlikely to occur. For this reason, it is possible to reliably prevent the insert 15 from dropping off due to the acting force during the polishing of the workpiece.

しかも、上記インサート１５は、キャリア基板１３の開口１４よりも内側に延在してキャリアの上下面に露出する露出幅を小さくすることができるため、ワークの研磨加工時に上下の定盤との接触による摩耗を生じにくい。即ち、該インサート１５の外周に上記係止突条２３が形成されることによって該インサート１５の内外径方向の見掛けの部材幅は大きくても、この係止突条２３はキャリア基板１３の係止溝２２内に嵌合することによってキャリア基板１３で両側から覆われるため、実際にキャリア基板１３から露出するインサートの露出幅は小さくなる。そして、このようにしてインサート１５の露出幅が小さくなって摩耗しにくくなる結果、該インサート１５の摩耗によりワークの端部の研磨量が多くなって平面度が低下する「面ダレ」の現象が生じにくくなる。   In addition, the insert 15 extends inward from the opening 14 of the carrier substrate 13 and can reduce the exposed width exposed on the upper and lower surfaces of the carrier, so that it contacts the upper and lower surface plates when polishing the workpiece. Abrasion due to That is, even if the apparent width of the insert 15 in the inner and outer diameter directions is large due to the formation of the locking ridges 23 on the outer periphery of the insert 15, the locking ridges 23 are used to lock the carrier substrate 13. By fitting into the groove 22, the carrier substrate 13 covers the both sides, so that the exposed width of the insert that is actually exposed from the carrier substrate 13 is reduced. As a result, the exposed width of the insert 15 becomes smaller and is less likely to be worn. As a result, the wear of the insert 15 increases the amount of polishing at the end of the workpiece, resulting in a “surface sagging” phenomenon in which flatness decreases. It becomes difficult to occur.

上記実施形態では、キャリア基板１３に形成される係止溝２２とインサート１５に形成される係止突条２３とがＶ字形の断面形状を有しているが、それらの断面形状は、相互に適合し合う角形の断面形状であれば、これ以外の形状であっても良く、例えば、図８〜図１０に示すような断面形状とすることもできる。   In the above embodiment, the locking groove 22 formed on the carrier substrate 13 and the locking protrusion 23 formed on the insert 15 have a V-shaped cross-sectional shape. Any other shape may be used as long as the cross-sectional shapes are compatible with each other, and for example, the cross-sectional shapes as shown in FIGS.

図８に示すワークキャリア１０は、係止溝２２と係止突条２３とがそれぞれ略台形状の断面形状を有している。即ち、上記係止溝２２は、互いに逆向きかつ奥狭まり状に傾斜する２つの側壁２２ｂ，２２ｂと、これらの側壁同士を結ぶ平らな底壁２２ｃとを有し、これらの側壁２２ｂ，２２ｂと底壁２２ｃとが交わる部分に２つの角部２２ａが形成されている。同様に上記係止突条２３も、互いに逆向きかつ先狭まり状に傾斜する２つの側壁２３ｂ，２３ｂと、これらの側壁同士を結ぶ平らな端壁２３ｃとを有していて、これらの側壁２３ｂ，２３ｂと端壁２３ｃとが交わる部分に２つの角部２３ａが形成されている。
この場合にも、図７に示す例と同様に、上記係止溝２２の最大溝幅及び係止突条２３の最大突条厚を、キャリア基板１３及びインサート１５の厚さよりも小さく形成することができる。 In the work carrier 10 shown in FIG. 8, the locking groove 22 and the locking ridge 23 each have a substantially trapezoidal cross-sectional shape. That is, the locking groove 22 has two side walls 22b, 22b that are inclined in opposite directions and narrowly, and a flat bottom wall 22c that connects these side walls, and these side walls 22b, 22b Two corners 22a are formed at a portion where the bottom wall 22c intersects. Similarly, the locking ridge 23 also has two side walls 23b, 23b that are inclined oppositely and in a tapered manner, and a flat end wall 23c that connects these side walls, and these side walls 23b. , 23b and the end wall 23c are formed with two corners 23a.
Also in this case, similarly to the example shown in FIG. 7, the maximum groove width of the locking groove 22 and the maximum protrusion thickness of the locking protrusion 23 are formed smaller than the thickness of the carrier substrate 13 and the insert 15. Can do.

また、図９に示すワークキャリア１０は、係止溝２２と係止突条２３とが略コ字状の断面形状を有するもので、上記係止溝２２は、一定間隔を保って互いに平行に延びる２つの側壁２２ｄ，２２ｄと、これらの側壁同士を結ぶ平らな底壁２２ｃとを有し、これらの側壁２２ｄ，２２ｄと底壁２２ｃとが交わる部分に２つの角部２２ａが形成されており、上記係止突条２３も、互いに平行に延びる２つの側壁２３ｄ，２３ｄと、平らな端壁２３ｃとを有していて、これらの側壁２３ｄ，２３ｄと端壁２３ｃとが交わる部分に２つの角部２３ａが形成されている。   Further, in the work carrier 10 shown in FIG. 9, the locking groove 22 and the locking protrusion 23 have a substantially U-shaped cross-sectional shape, and the locking groove 22 is parallel to each other at a constant interval. It has two side walls 22d and 22d that extend and a flat bottom wall 22c that connects these side walls, and two corners 22a are formed at the intersection of these side walls 22d and 22d and the bottom wall 22c. The locking ridge 23 also has two side walls 23d and 23d extending in parallel with each other and a flat end wall 23c. Two portions are formed at the intersection of the side walls 23d and 23d and the end wall 23c. Corners 23a are formed.

更に、図１０に示すワークキャリア１０では、係止溝２２と係止突条２３とが略Ｖ字状の断面形状を有しているが、２つの側壁２２ｂ，２２ｂ及び２３ｂ，２３ｂの傾斜角度を中間位置で変化させることにより、該側壁の中間位置にも角部２２ａ，２３ａが形成されている。この場合にも、図８に示すような平らな底壁２２ｃ及び端壁２３ｃを形成しても良い。   Furthermore, in the work carrier 10 shown in FIG. 10, the locking groove 22 and the locking ridge 23 have a substantially V-shaped cross-sectional shape, but the inclination angles of the two side walls 22b, 22b and 23b, 23b. Is changed at the intermediate position, corner portions 22a and 23a are also formed at the intermediate position of the side wall. Also in this case, flat bottom wall 22c and end wall 23c as shown in FIG. 8 may be formed.

キャリア基板１３に形成される張出部１９とインサート１５に形成される窪み部２１との形状についても、図３に示す例ではそれらが略矩形をなしているが、このような形状に限定されるものではなく、相互に嵌合可能なその他の任意の形状、例えば図１１や図１２に示すような形状とすることもできる。
図１１に示す例では、張出部１９と窪み部２１とが何れも鳩尾形をしていて、このうち張出部１９は次第に先広がり状をなし、窪み部２１は次第に奥広がり状をなしている。従って、キャリア基板１３においては、上記張出部１９に隣接する凹部１８が次第に奥広がり状をなし、インサート１５においては、上記窪み部２１に隣接する凸部２０が次第に先広がり状をなすことになる。一方、図１２に示す例では、張出部１９と窪み部２１とが略Ｃ字形に形成されている。 Also in the example shown in FIG. 3, the shape of the overhanging portion 19 formed on the carrier substrate 13 and the depression portion 21 formed on the insert 15 is substantially rectangular, but is limited to such a shape. It is not a thing, and it can also be set as the other arbitrary shapes which can be mutually fitted, for example, a shape as shown in FIG.11 and FIG.12.
In the example shown in FIG. 11, the overhang portion 19 and the recess portion 21 both have a pigeon tail shape, and the overhang portion 19 gradually has a widening shape, and the recess portion 21 has a gradually widening shape. ing. Accordingly, in the carrier substrate 13, the concave portion 18 adjacent to the overhanging portion 19 gradually increases in depth, and in the insert 15, the convex portion 20 adjacent to the indented portion 21 gradually increases. Become. On the other hand, in the example shown in FIG. 12, the overhanging portion 19 and the recessed portion 21 are formed in a substantially C shape.

また、上記実施形態では、キャリア本体の開口１４にインサート１５を取り付けるに当たり、該開口１４の口縁とインサート１５の外周とに、相互に嵌合し合う凹部１８と凸部２０とを形成しているが、このような凹部１８と凸部２０とを形成することなく、全周にわたり均一な内径を有する開口１４に、全周にわたり均一な外径を有するインサート１５を嵌着しても良い。この場合、上記係止溝２２と係止突条２３とは、上記開口１４の内周全体及びインサート１５の外周全体に連続的に形成しても、部分的あるいは断続的に形成しても良い。   Moreover, in the said embodiment, when attaching insert 15 to the opening 14 of a carrier main body, the recessed part 18 and the convex part 20 which mutually fit are formed in the edge of this opening 14, and the outer periphery of the insert 15. However, the insert 15 having a uniform outer diameter over the entire circumference may be fitted into the opening 14 having a uniform inner diameter over the entire circumference without forming the concave portion 18 and the convex portion 20. In this case, the locking groove 22 and the locking protrusion 23 may be formed continuously on the entire inner periphery of the opening 14 and the entire outer periphery of the insert 15, or may be formed partially or intermittently. .

なお、上記ワーク保持孔１２は、上記実施形態に示されているような円形のものに限らず、保持すべきワークが矩形やその他の角形形状である場合には、該ワークに合わせて矩形やその他の角形形状に形成されるものである。   The workpiece holding hole 12 is not limited to a circular shape as shown in the above embodiment. When the workpiece to be held is a rectangle or other square shape, It is formed in other square shapes.

本発明に係るワークキャリアの一実施形態を示す平面図ある。It is a top view which shows one Embodiment of the work carrier which concerns on this invention. 図１の部分拡大図である。It is the elements on larger scale of FIG. 図２の一部を更に拡大して示す部分拡大図である。FIG. 3 is a partially enlarged view showing a part of FIG. 2 further enlarged. 図３におけるＡ−Ａ線での断面図である。It is sectional drawing in the AA in FIG. 図４においてインサートをキャリア基板から分離した状態の分解図である。FIG. 5 is an exploded view of the state in which the insert is separated from the carrier substrate in FIG. 4. 図３におけるＢ−Ｂ線での断面図である。It is sectional drawing in the BB line in FIG. 係止溝と係止突条との異なる形状例を示す図４と同様位置での断面図である。It is sectional drawing in the same position as FIG. 4 which shows the example of a different shape of a locking groove and a locking protrusion. 係止溝と係止突条との更に異なる形状例を示す図４と同様位置での断面図である。It is sectional drawing in the same position as FIG. 4 which shows the example of a further different shape of a locking groove and a locking protrusion. 係止溝と係止突条との更に異なる形状例を示す図４と同様位置での断面図である。It is sectional drawing in the same position as FIG. 4 which shows the example of a further different shape of a locking groove and a locking protrusion. 係止溝と係止突条との更に異なる形状例を示す図４と同様位置での断面図である。It is sectional drawing in the same position as FIG. 4 which shows the example of a further different shape of a locking groove and a locking protrusion. 張出部と窪み部との異なる形状例を示す図３と同様位置での部分拡大図である。It is the elements on larger scale in the same position as FIG. 3 which shows the example of a different shape of an overhang | projection part and a hollow part. 張出部と窪み部との更に異なる形状例を示す図３と同様位置での部分拡大図である。It is the elements on larger scale in the position similar to FIG. 3 which shows the example of a further different shape of an overhang | projection part and a hollow part. 従来のワークキャリアの平面図である。It is a top view of the conventional work carrier. ワークキャリアを使用して平面研磨装置でワークを研磨加工する態様を示す要部断面図である。It is principal part sectional drawing which shows the aspect which grind | polishes a workpiece | work with a plane grinding | polishing apparatus using a workpiece | work carrier. 従来のワークキャリアの部分拡大断面図である。It is a partial expanded sectional view of the conventional work carrier. 他の従来のワークキャリアの部分拡大断面図である。It is a partial expanded sectional view of other conventional work carriers. 更に他の従来のワークキャリアの部分拡大断面図である。It is a partial expanded sectional view of other conventional work carriers. 更に他の従来のワークキャリアの部分拡大断面図である。It is a partial expanded sectional view of other conventional work carriers.

符号の説明Explanation of symbols

Ｗ ワーク
１０ ワークキャリア
１２ ワーク保持孔
１３ キャリア基板
１４ 開口
１５ インサート
１８ 凹部
１９ 張出部
２０ 凸部
２１ 窪み部
２２ 係止溝
２２ａ 角部
２３ 係止突条
２３ａ 角部 W Work 10 Work carrier 12 Work holding hole 13 Carrier substrate 14 Opening 15 Insert 18 Recess 19 Overhang 20 Protrusion 21 Recess 22 Lock groove 22a Corner 23 Lock protrusion 23a Corner

Claims (3)

金属製のキャリア基板にワーク保持孔を形成するための開口を設け、該開口の内周にキャリア基板より軟質のインサートを固定し、このインサートの内側を上記ワーク保持孔としたワークキャリアにおいて、
上記開口の内周の少なくとも一部に、溝壁に角部を有する角溝形の係止溝が該開口の周方向に延設されると共に、上記インサートの外周の少なくとも一部に、上記係止溝の角部に適合する角部を備えた角形断面の係止突条が該インサートの周方向に延設されていて、この係止突条が上記係止溝内に嵌合、係止することによって上記インサートがキャリア基板に固定されていることを特徴とするワークキャリア。 In the work carrier having an opening for forming a work holding hole in a metal carrier substrate, fixing an insert softer than the carrier substrate to the inner periphery of the opening, and using the inside of the insert as the work holding hole,
A rectangular groove-shaped locking groove having a corner on the groove wall is provided in at least a part of the inner periphery of the opening and extends in the circumferential direction of the opening. A locking projection having a square cross section with a corner that matches the corner of the locking groove extends in the circumferential direction of the insert, and this locking projection is fitted and locked in the locking groove. By doing so, the insert is fixed to a carrier substrate. 上記係止溝及び係止突条の断面形状が、Ｖ字状、台形状、コ字状の何れかであることを特徴とする請求項１に記載のワークキャリア。   The work carrier according to claim 1, wherein a cross-sectional shape of the locking groove and the locking protrusion is any one of a V shape, a trapezoidal shape, and a U shape. 上記キャリア基板の開口の口縁を所定の間隔をおいて凹状に切り欠くことにより、該開口の内周に、複数の凹部と、隣接する凹部間に介在する張出部とが形成され、また、上記インサートの外周には、上記凹部に嵌合する複数の凸部と、隣接する凸部間に介在して上記張出部が嵌合する窪み部とが形成され、互いに嵌合する凹部と凸部及び／又は張出部と窪み部とに上記係止溝と係止突条とが形成されていることを特徴とする請求項１又は２に記載のワークキャリア。   By cutting out the edge of the opening of the carrier substrate into a concave shape with a predetermined interval, a plurality of concave portions and an overhanging portion interposed between adjacent concave portions are formed on the inner periphery of the opening. The outer periphery of the insert is formed with a plurality of convex portions that fit into the concave portions, and a concave portion that is interposed between adjacent convex portions and into which the overhanging portions are fitted, and the concave portions that are fitted to each other. The work carrier according to claim 1 or 2, wherein the locking groove and the locking protrusion are formed in the convex part and / or the overhang part and the depression part.
JP2007173987A 2007-07-02 2007-07-02 Work carrier Active JP5114113B2 (en)

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TW097121414A TW200914199A (en) 2007-07-02 2008-06-09 Workpiece carrier
KR1020080057302A KR20090004521A (en) 2007-07-02 2008-06-18 Work carrier
DE102008030067A DE102008030067A1 (en) 2007-07-02 2008-06-27 Metal workpiece holder for polishing machine has ring shaped apertures with soft liners to reduce damage risk to workpieces

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DE102008030067A1 (en) 2009-01-08
JP5114113B2 (en) 2013-01-09

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