JP2009009835A - Planar heating element - Google Patents
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本発明は、円筒形、曲管形、または球形の形状を有する被加熱物を加熱するための電気エネルギーを利用する面状発熱体に関するものである。更に詳細には、１５０℃〜１０００℃の高温領域を含む広い温度領域の加熱が可能で、可撓性が優れており、外部への熱拡散が少ない面状発熱体に関するものである。 The present invention relates to a planar heating element using electrical energy for heating an object to be heated having a cylindrical shape, a curved pipe shape, or a spherical shape. More specifically, the present invention relates to a planar heating element that can be heated in a wide temperature range including a high temperature range of 150 ° C. to 1000 ° C., has excellent flexibility, and has little heat diffusion to the outside.
従来から、各種の配管、継手等の外側に取付けて、これらを加熱するためのマントルヒータ（ジャケットヒータ）が広く利用されている。
このようなヒータの発熱素子としては、グラフトカーボン、カーボン粉末、金属粉末、あるいは金属酸化物粉末等を含む合成樹脂（導電性樹脂）を用いて、ガラスクロスに含浸させたもの、前記のような導電性樹脂をポリエステル、ポリイミド、マイカ等の絶縁基材シートに塗布または印刷により保持させたもの、金属箔をエッチングして回路としたもの、あるいは金属抵抗線を絶縁基板シートに張り巡らして回路としたもの等が使用されている。
2. Description of the Related Art Conventionally, mantle heaters (jacket heaters) that are attached to the outside of various pipes, joints, etc. and heat them have been widely used.
As a heating element of such a heater, a glass cloth impregnated with a synthetic resin (conductive resin) containing graft carbon, carbon powder, metal powder, metal oxide powder, etc. Conductive resin applied to an insulating base sheet such as polyester, polyimide, mica, etc., or held by printing, metal foil etched into a circuit, or metal resistance wire stretched around an insulating substrate sheet Used.
前記のような発熱素子の両面は、シリコーンゴムシート、ポリイミド樹脂シート、マイカシート等の電気絶縁材により被覆され、さらにその外周側は各種ゴム、各種発泡材、あるいはガラスマット等の断熱材により被覆されている。
金属箔をエッチングして回路としたもの、金属抵抗線を用いてマイカ等の絶縁基板シートに張り巡らして回路としたものは、１５０℃以上の比較的高い温度で使用できる利点がある。しかしながら、このような発熱素子を用いて被加熱物を高温に加熱する場合は、断熱材として耐熱性に優れたものを使用するとともに、外部への熱拡散を防止するために厚みを大きなものにする必要があり、可撓性に乏しく大きな面状発熱体になるという不都合、また断熱材の種類によっては高価な面状発熱体になるという不都合があった。
従って、本発明が解決しようとする課題は、１５０℃以上の比較的高い温度（１５０℃〜１０００℃程度）の高温の領域を含む広い温度領域で使用することが可能で、優れた可撓性、断熱性構造を有し、しかも廉価な面状発熱体を提供することである。
A circuit obtained by etching a metal foil and a circuit formed by stretching a metal resistance wire on an insulating substrate sheet such as mica have the advantage that they can be used at a relatively high temperature of 150 ° C. or higher. However, when heating an object to be heated to a high temperature using such a heating element, use a heat insulating material with excellent heat resistance and a large thickness to prevent heat diffusion to the outside. There is an inconvenience that it becomes a large planar heating element with poor flexibility and an expensive planar heating element depending on the type of heat insulating material.
Therefore, the problem to be solved by the present invention is that it can be used in a wide temperature range including a high temperature range of 150 ° C. or higher (about 150 ° C. to 1000 ° C.), and has excellent flexibility. Another object of the present invention is to provide an inexpensive sheet heating element having a heat insulating structure.
本発明者らは、これらの課題を解決すべく鋭意検討した結果、円筒形、曲管形、または球形の形状を有する被加熱物を加熱するための面状発熱体において、発熱素子の両面が電気絶縁材で被覆されたヒータの外周側に、断熱材層として空隙部（空気層）を設け、さらにその外周側に熱反射板として金属薄板を設けることにより、優れた可撓性、断熱性構造を有し、しかも廉価な面状発熱体が得られることを見出し、本発明の面状発熱体に到達した。 As a result of intensive studies to solve these problems, the present inventors have found that in a planar heating element for heating an object to be heated having a cylindrical shape, a curved tube shape, or a spherical shape, By providing a gap (air layer) as a heat insulating material layer on the outer peripheral side of the heater covered with an electrical insulating material, and further providing a metal thin plate as a heat reflecting plate on the outer peripheral side, excellent flexibility and heat insulation It has been found that an inexpensive planar heating element having a structure can be obtained, and has reached the planar heating element of the present invention.
すなわち本発明は、円筒形、曲管形、または球形の形状を有する被加熱物を加熱するための面状発熱体であって、発熱素子の両面が電気絶縁材で被覆されたヒータ、及び該ヒータの外周側に空隙ができるようにスペーサを介して保持された金属薄板を備えてなることを特徴とする面状発熱体である。 That is, the present invention provides a planar heating element for heating an object to be heated having a cylindrical shape, a curved tube shape, or a spherical shape, and a heater in which both sides of a heating element are covered with an electrical insulating material, and the heater A planar heating element comprising a thin metal plate held via a spacer so that a gap is formed on the outer peripheral side of the heater.
本発明の面状発熱体は、断熱材層として空隙部（空気層）を設けた構成なので、高価な断熱材を多く用いることなく、優れた可撓性、断熱性を容易に付与することができる。また、空隙部（空気層）の外周に熱反射板として金属薄板を設けているので、ヒータからの熱が外部に拡散し難く、エネルギー効率よく被加熱物を加熱することができる。 Since the planar heating element of the present invention has a gap (air layer) as a heat insulating material layer, excellent flexibility and heat insulating properties can be easily imparted without using a lot of expensive heat insulating material. it can. Moreover, since the metal thin plate is provided as a heat reflecting plate on the outer periphery of the gap (air layer), the heat from the heater is hardly diffused to the outside, and the object to be heated can be heated efficiently.
本発明の面状発熱体は、円筒形、曲管形、または球形の形状を有する被加熱物を加熱するための電気エネルギーを利用した面状発熱体に適用されるが、特に被加熱物を高い温度（１５０℃〜１０００℃）で効率よく加熱するための面状発熱体に好適に適用される。
以下、本発明の面状発熱体を、図１〜図７に基づいて説明するが、本発明がこれにより限定されるものではない。尚、図１〜図４は各々本発明の面状発熱体の一例を示す断面図である。図５は本発明におけるヒータ（電気絶縁材／発熱素子／電気絶縁材）の一例を示す斜視図である。図６、図７は各々本発明におけるスペーサと金属薄板の組合せの一例を示す斜視図である。
The planar heating element of the present invention is applied to a planar heating element using electric energy for heating an object to be heated having a cylindrical shape, a curved pipe shape, or a spherical shape. It is suitably applied to a planar heating element for efficiently heating at a high temperature (150 ° C. to 1000 ° C.).
Hereinafter, although the planar heating element of this invention is demonstrated based on FIGS. 1-7, this invention is not limited by this. 1 to 4 are sectional views showing examples of the planar heating element of the present invention. FIG. 5 is a perspective view showing an example of a heater (electrical insulating material / heating element / electrical insulating material) in the present invention. 6 and 7 are perspective views showing an example of a combination of a spacer and a thin metal plate in the present invention.
本発明の面状発熱体は、図１に示すように、円筒形、曲管形、または球形の形状を有する被加熱物を加熱するための面状発熱体であって、発熱素子１の両面が電気絶縁材２で被覆されたヒータ３、ヒータ３の外周側に空隙４ができるようにスペーサ５を介して保持された金属薄板６を備えてなる面状発熱体である。
本発明の面状発熱体は、図２に示すように、さらにヒータ（内側の電気絶縁材２）の内周側に金属薄板６を配置することもできる。また、図３に示すように、さらに金属薄板６の外周側に断熱材７を配置することもできる。面状発熱体の加熱時は、外周側の金属薄板６も比較的に高温になるので、通常はこのように断熱材７を配置して用いられる。さらに、スペーサ５は、空隙を形成できればその形状に特に制限されることはなく、例えば図４に示すように、断面が波形状のものであってもよい。
As shown in FIG. 1, the planar heating element of the present invention is a planar heating element for heating an object to be heated having a cylindrical shape, a curved pipe shape, or a spherical shape. Is a sheet heating element including a
In the planar heating element of the present invention, as shown in FIG. 2, a
尚、本発明の面状発熱体の形状は、円筒形、曲管形のほか、円筒を切断面が中心軸と平行方向となるように分割した形状（図６、図７に示すような形状）、楕円筒を切断面が中心軸と平行方向となるように分割した形状、球面または楕球面の一部の形状、またはこれらに類似する形状、若しくは平面と前記のような曲面を合わせた形状等とすることができる。
しかしながら、例えば、円筒形、または円筒を切断面が中心軸と平行方向となるように、２分割、３分割、または４分割した形状、若しくは楕円筒形、または楕円筒を切断面が中心軸と平行方向となるように、２分割または４分割した形状が実用的である。
The shape of the planar heating element of the present invention is not limited to a cylindrical shape or a curved pipe shape, but is a shape obtained by dividing the cylinder so that the cut surface is parallel to the central axis (the shape shown in FIGS. 6 and 7). ), A shape obtained by dividing an elliptic cylinder so that the cut surface is parallel to the central axis, a spherical surface, a partial shape of an elliptical surface, a shape similar to these, or a shape obtained by combining a flat surface and a curved surface as described above Etc.
However, for example, a cylindrical shape, or a shape obtained by dividing the cylinder into two, three, or four divisions, or an elliptical cylinder, or an elliptical cylinder so that the cutting plane is parallel to the central axis, the cutting plane is the central axis. A shape divided into two or four so as to be parallel is practical.
本発明の面状発熱体に用いられる金属薄板は、通常は厚みが０．０３〜２ｍｍであり、アルミ薄板、ステンレス薄板、鉄薄板等のほか、アルミ箔、ステンレス箔、鉄箔等も使用可能である。金属薄板の厚みが０．１ｍｍ未満の場合は強度が弱くなるが、断熱材を兼ねた補強材として耐熱性樹脂板（発泡させたものも使用可）を併用することにより使用可能である。また、金属薄板の厚みが２ｍｍを超えると可撓性、柔軟性が失われ所望の曲面形状に形成できなくなる虞がある。金属薄板は、例えば、図６、図７に示すような角柱状のスペーサ５のほか、円柱状、格子状、波形板状、またはこれらに類似する形状のスペーサを介してヒータと接着される。尚、接着の際は、接着剤による固着のほか、リベットによる固着も行なうことができる。また、スペーサの構成材料としては、通常は耐熱性樹脂、好ましくは可撓性を有する耐熱性樹脂が用いられるが、後述するように空隙の条件によってはセラミック等の材料が使用可能であり、さらに波形板状のスペーサの場合には金属を用いることができる。
The metal thin plate used for the planar heating element of the present invention is usually 0.03 to 2 mm in thickness, and aluminum foil, stainless steel foil, iron foil, etc. can be used in addition to aluminum thin plate, stainless steel thin plate, iron thin plate, etc. It is. When the thickness of the metal thin plate is less than 0.1 mm, the strength becomes weak, but it can be used by using a heat-resistant resin plate (which can be foamed) as a reinforcing material that also serves as a heat insulating material. Further, if the thickness of the metal thin plate exceeds 2 mm, the flexibility and softness may be lost and it may not be possible to form a desired curved surface shape. The thin metal plate is bonded to the heater via a spacer having a columnar shape, a lattice shape, a corrugated plate shape, or the like in addition to the
本発明の面状発熱体において、ヒータと金属薄板の間隙は、ヒータの大きさ、加熱温度等の条件にもよるが、通常は１〜２０ｍｍである。また、ヒータと金属薄板の間隙において、空隙が占める割合（体積）は通常は４０〜９９％、好ましくは５０〜９５％、さらに好ましくは６０〜９０％である。空隙が占める割合が９９％を超える場合は、スペーサが占める割合が１％未満となりヒータと金属薄板の結合強度が弱くなる不都合が生じる。 In the planar heating element of the present invention, the gap between the heater and the thin metal plate is usually 1 to 20 mm, although it depends on conditions such as the size of the heater and the heating temperature. In the gap between the heater and the thin metal plate, the ratio (volume) occupied by the gap is usually 40 to 99%, preferably 50 to 95%, more preferably 60 to 90%. When the proportion occupied by the voids exceeds 99%, the proportion occupied by the spacers is less than 1%, resulting in a disadvantage that the bonding strength between the heater and the thin metal plate is weakened.
尚、空隙の割合が大きいほど、スペーサに要求される可撓性の条件が緩和され、種々の耐熱性材料からスペーサの構成材料を選定することができるようになる。このような耐熱性材料として、ヒータが高い温度（２５０℃以上）で使用される場合は、セラミックを用いることが好ましい。例えば、ヒータまたは金属薄板の表面に、セラミック塗料を塗布、乾燥後、微粉体の状態で固化、あるいは焼成することによりスペーサを形成させることができる。セラミック塗料としては、例えば、アルミナ、シリカ、ジルコニア、チタニア、マイカ等のセラミック原料、あるいはこれらの２種類以上のセラミック原料を、必要に応じて無機充填材、有機充填材とともに溶媒に溶かしたものを用いることができる。 In addition, the larger the void ratio, the more flexible the requirements for the spacer, and it becomes possible to select the constituent material of the spacer from various heat resistant materials. As such a heat-resistant material, when the heater is used at a high temperature (250 ° C. or higher), it is preferable to use ceramic. For example, a spacer can be formed by applying a ceramic paint on the surface of a heater or a thin metal plate, drying, solidifying or firing in a fine powder state. As the ceramic paint, for example, a ceramic raw material such as alumina, silica, zirconia, titania, mica, or a mixture of these two or more ceramic raw materials dissolved in a solvent together with an inorganic filler and an organic filler as necessary. Can be used.
本発明の面状発熱体において用いられる金属薄板のうち、被加熱物側に配置される金属薄板（図２）は、加熱面を均一にするために用いられる。また、被加熱物側と反対側に配置される金属薄板は、熱反射板としての効果（ヒータからの熱が外部に拡散し難く、優れたエネルギー効率が得られる効果）のほか、電気絶縁材等から発生する粉塵等の外部への飛散を防止する効果もあり、例えばクリーンルーム内で使用される面状発熱体の被覆材として好適である。 Of the thin metal plates used in the planar heating element of the present invention, the thin metal plate (FIG. 2) disposed on the heated object side is used to make the heating surface uniform. In addition, the metal thin plate placed on the opposite side of the object to be heated is not only an effect as a heat reflecting plate (the effect that heat from the heater is difficult to diffuse to the outside and an excellent energy efficiency is obtained), as well as an electrical insulating material For example, it is effective as a covering material for a planar heating element used in a clean room.
本発明の面状発熱体に用いられる可撓性を有する発熱素子としては、例えば所望のパターンに成形した金属箔抵抗体（図５）、金属線抵抗体、または、グラフトカーボン、カーボン粉末、金属粉末、金属酸化物粉末から選ばれる少なくとも１種を合成樹脂に分散させた導電性樹脂を、ガラス繊維基材またはセラミック繊維基材に含浸させた抵抗体を用いることができる。このような発熱素子の厚みは、通常は０．０１〜０．５ｍｍ、好ましくは０．０５〜０．３ｍｍである。厚みが０．０１ｍｍ未満の場合は強度が弱く、０．５ｍｍを超えると可撓性、柔軟性が失われる虞が生じる。また、その他の発熱素子としては、グラフトカーボン、カーボン粉末、金属粉末、金属酸化物粉末から選ばれる少なくとも１種をシリコーン樹脂等の耐熱性樹脂に混練させた抵抗体を用いることができる。カーボン粉末をシリコーン樹脂に練り込ませた抵抗体は、１ｍｍ以上の厚みがあっても可撓性、柔軟性がある。 Examples of the flexible heating element used in the planar heating element of the present invention include a metal foil resistor (FIG. 5), a metal wire resistor, or graft carbon, carbon powder, metal, which are formed into a desired pattern. A resistor in which a glass fiber base material or a ceramic fiber base material is impregnated with a conductive resin in which at least one selected from powder and metal oxide powder is dispersed in a synthetic resin can be used. The thickness of such a heating element is usually 0.01 to 0.5 mm, preferably 0.05 to 0.3 mm. If the thickness is less than 0.01 mm, the strength is weak, and if it exceeds 0.5 mm, flexibility and softness may be lost. In addition, as the other heating element, a resistor in which at least one selected from graft carbon, carbon powder, metal powder, and metal oxide powder is kneaded with a heat-resistant resin such as silicone resin can be used. A resistor in which carbon powder is kneaded into a silicone resin has flexibility and flexibility even if it has a thickness of 1 mm or more.
尚、前記のガラス繊維基材またはセラミック繊維基材は、低温度で熱分解するバインダーを含まないようにするか、予め加熱処理してバインダーを熱分解しておくか、あるいはバインダーを使用しないようにすることが好ましい。低温度で熱分解するバインダーが含まれる場合、発熱素子が高温になるとバインダーが熱分解し、面状発熱体が劣化する不都合が生じる。ガラス繊維基材を使用する場合は、通常はガラスクロスとされる。また、ガラス繊維及びセラミック繊維を混合した基材を用いることもできる。さらに、強度及び耐熱性を向上させるために、炭素繊維等を含ませてもよいが、これらの含有量が大きくなると可撓性、柔軟性が失われる虞があるので、これらを含ませる場合は、基材全量に対して３０ｗｔ％以下であることが好ましい。 The glass fiber base or ceramic fiber base does not contain a binder that thermally decomposes at a low temperature, heat-treats the binder in advance, or does not use a binder. It is preferable to make it. When a binder that thermally decomposes at a low temperature is included, the binder is thermally decomposed when the temperature of the heating element becomes high, resulting in a disadvantage that the planar heating element deteriorates. When a glass fiber substrate is used, it is usually a glass cloth. Moreover, the base material which mixed glass fiber and ceramic fiber can also be used. Furthermore, in order to improve the strength and heat resistance, carbon fibers or the like may be included. However, if these contents increase, flexibility and flexibility may be lost. It is preferable that it is 30 wt% or less with respect to the total amount of the substrate.
次に、本発明を実施例により具体的に説明するが、本発明がこれらにより限定されるものではない。 EXAMPLES Next, although an Example demonstrates this invention concretely, this invention is not limited by these.
（ヒータの製作）
エッチングにより縦２０ｃｍ、横２５ｃｍの範囲内で形成した蛇行状の金属箔抵抗体（線幅３ｍｍ、厚さ０．０５ｍｍ）を、縦２４ｃｍ、横２８ｃｍ、厚さ０．８ｍｍの未加硫シリコーン樹脂を含浸させたガラスクロスシートで挟持した後、直径が約９０ｍｍの鉄製のパイプに巻き付け、１８０℃の炉に３０分間投入し１次硬化させた後、更に２００℃の炉に２時間投入して完全硬化させて、縦２４ｃｍ、内周２８ｃｍ、厚さ１．６ｍｍで約２ｍｍ幅のスリットが入った円筒状ヒータを製作し、図５に示すようなヒータ（但し、スリット入）（シリコーン／金属箔抵抗体／シリコーン）を得た。
(Heater production)
A meandering metal foil resistor (line width: 3 mm, thickness: 0.05 mm) formed by etching within a range of 20 cm in length and 25 cm in width is an unvulcanized silicone resin 24 cm in length, 28 cm in width, and 0.8 mm in thickness. After being sandwiched by a glass cloth sheet impregnated with an iron pipe, it is wound around an iron pipe having a diameter of about 90 mm, put into a furnace at 180 ° C. for 30 minutes and first cured, and then put into a furnace at 200 ° C. for 2 hours. Fully cured to produce a cylindrical heater with a length of 24 cm, inner circumference of 28 cm, thickness of 1.6 mm and a slit of about 2 mm width, as shown in FIG. 5 (however, with slit) (silicone / metal (Foil resistor / silicone) was obtained.
（面状発熱体の製作）
次に、縦２３．５ｃｍ、横３２ｃｍ、厚さ０．５ｍｍのアルミ薄板を横方向が円になるように曲げ加工により直径約１０ｃｍのスリット入円筒を製作し、その外側に厚さ３ｍｍのウレタンスポンジを貼り合せて最外層の断熱構造体を得た。
前述のヒータの外周側に幅１０ｍｍ、厚さ５ｍｍのシリコーンスポンジ製のスペーサを貼り合せ、さらにその外周側に前記の断熱構造体を貼り合せて、図３に示すような構成の面状発熱体（ヒータと金属薄板の間隙における空隙割合：８４．５％）を得た。
(Manufacture of sheet heating elements)
Next, a slitted cylinder with a diameter of about 10 cm is manufactured by bending an aluminum thin plate with a length of 23.5 cm, a width of 32 cm, and a thickness of 0.5 mm so that the horizontal direction is a circle, and a urethane with a thickness of 3 mm is formed on the outside. A heat insulating structure of the outermost layer was obtained by attaching a sponge.
A sheet heating element having a structure as shown in FIG. 3 is formed by bonding a spacer made of silicone sponge having a width of 10 mm and a thickness of 5 mm to the outer peripheral side of the heater, and further bonding the heat insulating structure to the outer peripheral side. (The void ratio in the gap between the heater and the thin metal plate: 84.5%) was obtained.
（面状発熱体の検査）
以上のようにして得られた面状発熱体を、ステンレス製の円筒管（長さ４０ｃｍ、直径９ｃｍ、厚さ３ｍｍ）の周囲に取付け、室温２２℃の試験室において、１００Ｖの交流電圧を通電し、円筒管の内側中央部の表面温度が１５０℃となるように温度調節しながら２時間通電して消費電力量を測定した。その結果、使用電力量は２７．０Ｗ時で、断熱構造体の外側の温度は５８℃であった。また、表面温度が２００℃となるように温度調節しながら２時間通電して消費電力を測定した。その結果、使用電力両は４２．５Ｗ時で、断熱構造体の外側の温度は７０℃であった。
(Inspection of sheet heating element)
The planar heating element obtained as described above is mounted around a stainless steel cylindrical tube (length: 40 cm, diameter: 9 cm, thickness: 3 mm), and an AC voltage of 100 V is energized in a test room at a room temperature of 22 ° C. Then, electricity was supplied for 2 hours while adjusting the temperature so that the surface temperature of the inner central portion of the cylindrical tube was 150 ° C., and the power consumption was measured. As a result, the amount of power used was 27.0 W, and the temperature outside the heat insulating structure was 58 ° C. The power consumption was measured by energizing for 2 hours while controlling the temperature so that the surface temperature was 200 ° C. As a result, the power consumption was 42.5 W, and the temperature outside the heat insulating structure was 70 ° C.
［比較例１］
実施例１の面状発熱体の製作において、スペーサと金属薄板とウレタンスポンジからなる被覆物の替わりにシリコーンスポンジの被覆物（実施例１と同様の形状、大きさで、空隙はなし）を用いたほかは実施例１と同様にして面状発熱体を製作した。この面状発熱体について、実施例１と同様の条件で、面状発熱体の検査を行なった。その結果、円筒管の内側中央部の表面温度が１５０℃の時の使用電力量は３１．５Ｗ時で、断熱構造体の外側の温度は７６℃あった。また、表面温度が２００℃の時の使用電力量は４７．０Ｗ時で、断熱構造体の外側の温度は９３℃であった。
[Comparative Example 1]
In the production of the planar heating element of Example 1, a silicone sponge coating (with the same shape and size as in Example 1 and no voids) was used instead of the coating made of spacer, metal thin plate, and urethane sponge. Otherwise, a planar heating element was produced in the same manner as in Example 1. About this planar heating element, the planar heating element was inspected under the same conditions as in Example 1. As a result, the amount of power used when the surface temperature of the inner central portion of the cylindrical tube was 150 ° C. was 31.5 W, and the temperature outside the heat insulating structure was 76 ° C. Moreover, the electric energy used when the surface temperature was 200 ° C. was 47.0 W, and the temperature outside the heat insulating structure was 93 ° C.
以上のように、前述の条件下において、本発明の実施例の面状発熱体は、比較例の面状発熱体に較べて、円筒管の内側中央部の表面温度が１５０℃の時の省エネ率は１４．３％、２００℃の時の省エネ率は９．６％となり、省エネ効果が得られ、高価な耐熱性樹脂等を多く用いることなく、１５０℃以上の高温の領域を含む広い温度領域で使用することが可能で、優れた可撓性、断熱性構造を有し、ヒータからの熱が外部に拡散し難く、エネルギー効率よく被加熱物を加熱できることがわかった。 As described above, under the above-described conditions, the sheet heating element according to the embodiment of the present invention saves energy when the surface temperature of the inner central portion of the cylindrical tube is 150 ° C. as compared with the sheet heating element according to the comparative example. The rate is 14.3% and the energy-saving rate at 200 ° C is 9.6%, and an energy-saving effect is obtained, and a wide temperature range including a high temperature region of 150 ° C or higher is obtained without using a lot of expensive heat-resistant resin. It has been found that it can be used in a region, has an excellent flexible and heat insulating structure, hardly diffuses heat from the heater to the outside, and can heat an object to be heated efficiently.
１ 発熱素子
２ 電気絶縁材
３ ヒータ
４ 空隙
５ スペーサ
６ 金属薄板
７ 断熱材
８ 電源コード
DESCRIPTION OF
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| JP2007170541A JP2009009835A (en) | 2007-06-28 | 2007-06-28 | Planar heating element |
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| JP2007170541A JP2009009835A (en) | 2007-06-28 | 2007-06-28 | Planar heating element |
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| WO2010104126A1 (en) * | 2009-03-11 | 2010-09-16 | 住友化学株式会社 | Method of retaining temperature of metal product |
| JP2012031783A (en) * | 2010-07-30 | 2012-02-16 | Aisan Industry Co Ltd | Heating element unit and evaporated fuel treatment device |
| US8545610B2 (en) | 2010-07-30 | 2013-10-01 | Aisan Kogyo Kabushiki Kaisha | Fuel vapor treating apparatuses having a high thermal conductive honeycomb core |
| JP2014135157A (en) * | 2013-01-09 | 2014-07-24 | Japan Pionics Co Ltd | Planar heater |
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| US10960732B2 (en) | 2015-09-15 | 2021-03-30 | Denso Corporation | Heater device |
| JPWO2017047301A1 (en) * | 2015-09-15 | 2018-02-01 | 株式会社デンソー | Heater device |
| CN107926081A (en) * | 2015-09-15 | 2018-04-17 | 株式会社电装 | Heater assembly |
| US11198935B2 (en) | 2015-10-16 | 2021-12-14 | Kokusai Electric Corporation | Heating part, substrate processing apparatus, and method of manufacturing semiconductor device |
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