JP2009002459A - Sealing structure - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide sealing structure preventing a fall of a seal ring 3 from a dovetail groove 12, easy to install the seal ring 3 in the dovetail groove 12, hard to generate particles, and further preventing torsion and wrong installation of the seal ring 3 without requiring a large compression load, in regard to sealing structure for sealing with the seal ring 3 installed in the dovetail groove 12. <P>SOLUTION: A seal ring 3 formed from a rubber-like elastic material is installed in a dovetail groove 12, and the seal ring 3 has: a projecting surface-like bottom part 3a tightly attached to the groove bottom 12c; side surface projecting parts 3b and 3c formed on both sides of the bottom part 3a and tightly adhered to inside slope surface 12d and 12e of the dovetail groove 12; and a head part 3d formed to be angularly projecting from a part between the bottom part 3a and the opposite end in the side surface projecting parts 3b and 3c on both sides and formed of a peak part 31, and inclined surfaces 32 and 33 on both sides and exposed outside of the dovetail groove 12. A width W<SB>3</SB>of the head part 3d is formed smaller than a width W<SB>1</SB>between groove shoulders 12a and 12b, and a width W<SB>4</SB>between peaks of the side surface projecting parts 3b and 3c is formed larger than the width W<SB>1</SB>. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、例えば半導体や液晶デバイス等の製造において使用されるチャンバ等の密封手段として好適に利用される技術であって、互いに対向する部品のうち一方の部品に形成した蟻溝にシールリングを装着し、このシールリングによって前記部品の対向面間の密封を行う密封構造に関する。   The present invention is a technique suitably used as a sealing means for a chamber or the like used in the manufacture of, for example, a semiconductor or a liquid crystal device, and a seal ring is formed in a dovetail groove formed in one of the parts facing each other. The present invention relates to a sealing structure that is mounted and seals between opposing surfaces of the component by the seal ring.

半導体製造装置や液晶製品の製造装置では、各種真空処理システムを利用し、真空環境下で、半導体デバイスの製造に必要なシリコンウエハの加工プロセスや液晶ガラスの製造プロセスを実行する。このような真空環境を創出するための真空チャンバにおけるゲートバルブ、スリットバルブ、チャンバリッド等の開閉部分を密封するための密封構造としては、前記開閉部分で互いに対向する部品間に介在させるシールリングを、一方の部品に形成した蟻溝に保持した構造が採用されており、その典型的な従来技術が、下記の特許文献１〜３に開示されている。
特開２００４−１７６８３４号公報 特開２００３−０１４１２６号公報 Semiconductor manufacturing apparatuses and liquid crystal product manufacturing apparatuses use various vacuum processing systems to execute a silicon wafer processing process and a liquid crystal glass manufacturing process necessary for manufacturing semiconductor devices in a vacuum environment. As a sealing structure for sealing open / close parts such as a gate valve, a slit valve, and a chamber lid in a vacuum chamber for creating such a vacuum environment, a seal ring interposed between components facing each other at the open / close part is used. A structure held in a dovetail formed in one component is employed, and typical conventional techniques are disclosed in Patent Documents 1 to 3 below.
JP 2004-176834 A JP 2003-014126 A

図１１は、シールリングとしてＯリングを用いた従来の密封構造を示す断面図、図１２は、特許文献１に記載の従来の密封構造を示す断面図、図１３は、図１２のシールリングを圧縮した状態を示す断面図、図１４は、特許文献２に記載の従来の密封構造を示す断面図、図１５は、図１２のシールリングを誤装着した状態、図１６は、図１４のシールリングを誤装着した状態を示す断面図である。   11 is a cross-sectional view showing a conventional sealing structure using an O-ring as a seal ring, FIG. 12 is a cross-sectional view showing a conventional sealing structure described in Patent Document 1, and FIG. 13 is a cross-sectional view of the seal ring of FIG. FIG. 14 is a cross-sectional view showing a conventional sealing structure described in Patent Document 2, FIG. 15 is a state in which the seal ring of FIG. 12 is erroneously attached, and FIG. 16 is a seal of FIG. It is sectional drawing which shows the state which carried out the incorrect mounting | wearing of the ring.

まず図１１に示される密封構造において、参照符号１１０は、真空チャンバ等を構成する第一部材、参照符号１２０は、前記チャンバの開口部を閉塞するように第一部材１１０に対向配置された第二部材であって、第一部材１１０には、前記開口部の外周に沿って蟻溝１１１が形成されている。この蟻溝１１１は、溝肩１１１ａ，１１１ｂ側の溝幅が相対的に狭く、溝底１１１ｃ側の溝幅が相対的に広くなるように傾斜した一対の内側勾配面１１１ｄ，１１１ｅを有する。   First, in the sealing structure shown in FIG. 11, reference numeral 110 is a first member constituting a vacuum chamber and the like, and reference numeral 120 is a first member arranged to face the first member 110 so as to close the opening of the chamber. In the first member 110, a dovetail groove 111 is formed along the outer periphery of the opening. The dovetail 111 has a pair of inner sloped surfaces 111d and 111e inclined such that the groove width on the groove shoulders 111a and 111b side is relatively narrow and the groove width on the groove bottom 111c side is relatively wide.

ゴム状弾性材料からなるシールリング２００は、断面形状が円形をなす、いわゆるＯリングであって、内周部及び外周部２００ａ，２００ｂが蟻溝１１１の内側勾配面１１１ｄ，１１１ｅに保持され、軸方向一端の円弧面２００ｃが溝底１１１ｃに密接されると共に、蟻溝１１１から突出した軸方向他端の円弧面２００ｄが、第二部材１２０に密接される。   The seal ring 200 made of a rubber-like elastic material is a so-called O-ring having a circular cross-sectional shape, and the inner peripheral portion and the outer peripheral portions 200a and 200b are held by the inner inclined surfaces 111d and 111e of the dovetail groove 111. The arc surface 200 c at one end in the direction is brought into close contact with the groove bottom 111 c, and the arc surface 200 d at the other end in the axial direction protruding from the dovetail 111 is brought into close contact with the second member 120.

この密封構造において、シールリング（Ｏリング）２００を蟻溝１１１に保持しているのは、脱落防止を図るためである。しかしながら、蟻溝１１１が形成された第二部材１２０が、先に説明したチャンバの開閉部分のように、第一部材１１０に対して進退するように動作するものであるような場合、この第二部材１２０が第一部材１１０から離間する方向へ動作する際に、シールリング２００が第二部材１２０との粘着によって蟻溝１１１から飛び出してしまうおそれがある。また、シールリング２００の断面の径が小さい場合は、そのつぶし代も小さくなるため、第二部材１２０が第一部材１１０に接近する方向へ動作した時に、両部材１１０，１２０の対向面同士が金属接触しやすく、パーティクルの発生を嫌うような条件では使用できなかった。   In this sealing structure, the sealing ring (O-ring) 200 is held in the dovetail groove 111 in order to prevent dropping. However, when the second member 120 in which the dovetail 111 is formed operates so as to move forward and backward with respect to the first member 110 like the opening / closing portion of the chamber described above, When the member 120 moves in a direction away from the first member 110, the seal ring 200 may jump out of the dovetail 111 due to adhesion with the second member 120. Further, when the diameter of the cross-section of the seal ring 200 is small, the crushing allowance is also small. Therefore, when the second member 120 moves in a direction approaching the first member 110, the opposing surfaces of both the members 110, 120 are It could not be used under conditions where it was easy for metal to touch and hated the generation of particles.

これに対し、図１２に示される密封構造は、ゴム状弾性材料からなるシールリング２００が、内周面及び外周面に形成された凹部２００ｅ，２００ｆによってくびれた断面形状をなすもので、この凹部２００ｅ，２００ｆを境にして、相対的にボリュームの大きい基部２００ｇと、相対的にボリュームの小さい頭部２００ｈが形成されている。そして、凹部２００ｅ，２００ｆが溝肩１１１ａ，１１１ｂと嵌合されると共に、基部２００ｇの底面が溝底１１１ｃに密接され、蟻溝１１１から突出した頭部２００ｈが、図１３に示されるように、第一部材１１０に対して進退自在に配置された第二部材に密接され、この第二部材と溝底１１１ｃとの間で適当に圧縮される。   On the other hand, the sealing structure shown in FIG. 12 has a cross-sectional shape in which the seal ring 200 made of a rubber-like elastic material is constricted by recesses 200e and 200f formed on the inner and outer peripheral surfaces. A base 200g having a relatively large volume and a head 200h having a relatively small volume are formed with 200e and 200f as a boundary. Then, the recesses 200e and 200f are fitted with the groove shoulders 111a and 111b, the bottom surface of the base 200g is brought into close contact with the groove bottom 111c, and the head 200h protruding from the dovetail 111 is as shown in FIG. The second member is disposed in close contact with the first member 110 so as to be movable back and forth, and is appropriately compressed between the second member and the groove bottom 111c.

また、図１４に示される密封構造は、シールリング２００が、蟻溝１１１の溝底１１１ｃに密接される平坦な底面２００ｉと、その両側から斜め外向きに立ち上がる一対の斜面２００ｊ，２００ｋと、その先端にそれぞれ形成され溝肩１１１ａ，１１１ｂの内側（内側勾配面１１１ｄ，１１１ｅ）に当接される肩部２００ｍ，２００ｎと、更に両肩部２００ｍ，２００ｎ間から半円弧の凸面状に形成され溝肩１１１ａ，１１１ｂ間から突出した頭部２００ｈを有する。   Further, the sealing structure shown in FIG. 14 includes a flat bottom surface 200i in which the seal ring 200 is in close contact with the groove bottom 111c of the dovetail groove 111, a pair of inclined surfaces 200j and 200k rising obliquely outward from both sides thereof, The shoulders 200m and 200n are formed at the tips and are in contact with the inner sides (inner slopes 111d and 111e) of the groove shoulders 111a and 111b, respectively, and are further formed into a semicircular convex shape between the shoulders 200m and 200n. The head 200h protrudes from between the shoulders 111a and 111b.

しかしながら、図１２及び図１４に示される密封構造によれば、シールリング２００の頭部２００ｈが第二部材１２０（図１３参照）に粘着しても、この第二部材１２０の進退動作に伴ってシールリング２００が蟻溝１１１から抜け出てしまうのを有効に防止することはできるものの、シールリング２００の圧縮に必要な荷重が大きくなったり、シールリング２００が蟻溝１１１へ過った方向に装着されたりする問題が指摘される。   However, according to the sealing structure shown in FIGS. 12 and 14, even if the head 200 h of the seal ring 200 adheres to the second member 120 (see FIG. 13), the second member 120 moves forward and backward. Although it is possible to effectively prevent the seal ring 200 from coming out of the dovetail groove 111, the load necessary for compressing the seal ring 200 is increased, or the seal ring 200 is attached to the dovetail groove 111 in the extending direction. Problems are pointed out.

詳しくは、例えば図１２に示される密封構造によれば、シールリング２００が凹部２００ｅ，２００ｆにおいて蟻溝１１１の溝肩１１１ａ，１１１ｂと嵌合しているので、図１３に示されるように第二部材１２０との間で圧縮された状態では、第一及び第二部材間１１０，１２０間にシールリング２００の頭部２００ｈが膨出変形して噛み込まれることによって、圧縮反力が高くなり、このため大きな圧縮荷重が必要になるものと思われ、更には、第一及び第二部材間１１０，１２０間に噛み込まれた部分２００ｈ’にゴムの割れが発生し、これに起因してシール性の低下を来すおそれがあった。また、溝肩１１１ａ，１１１ｂとの接触部分で応力が高くなるので、第二部材１２０を繰り返し進退動作させると、溝肩１１１ａ，１１１ｂとの接触部分が摩耗して、半導体や液晶製品の製造に有害なパーティクルを発生しやすくなることも懸念される。   Specifically, for example, according to the sealing structure shown in FIG. 12, since the seal ring 200 is fitted to the groove shoulders 111a and 111b of the dovetail groove 111 in the recesses 200e and 200f, as shown in FIG. In a state compressed with the member 120, the compression reaction force is increased by the head 200h of the seal ring 200 bulging and biting between the first and second members 110, 120, For this reason, it is considered that a large compressive load is required, and further, cracking of the rubber is generated in the portion 200h ′ engaged between the first and second members 110 and 120, and the seal is thereby caused. There was a risk of deterioration of sex. In addition, since stress is increased at the contact portions with the groove shoulders 111a and 111b, when the second member 120 is repeatedly advanced and retracted, the contact portions with the groove shoulders 111a and 111b are worn, and thus semiconductors and liquid crystal products are manufactured. There is also a concern that harmful particles are likely to be generated.

そして、この密封構造によれば、シールリング２００の基部２００ｇと頭部２００ｈが、共に円弧面をなしていて、近似した形状であるため、例えば図１５に示されるように逆さまに誤装着されても、外見上、誤装着に気が付きにくく、正規の姿勢で装着された時と同様、装着の過程で、凹部２００ｅ，２００ｆが溝肩１１１ａ，１１１ｂと嵌合されることによる手応えがあるため、この点でも誤装着に気が付きにくいものと考えられる。しかも、このように逆さまに誤装着された場合は、頭部２００ｈが溝底１１１ｃから浮き上がった状態となるため、シールするための圧縮が正常に行われなくなり、所要の密封性を確保できなくなる。   According to this sealing structure, the base 200g and the head 200h of the seal ring 200 both form an arcuate surface and have an approximate shape. For example, as shown in FIG. However, in appearance, it is difficult to notice the erroneous mounting, and there is a response by fitting the recesses 200e and 200f with the groove shoulders 111a and 111b in the mounting process as in the case of mounting in a normal posture. It is thought that it is hard to notice mis-installation in terms of points. Moreover, if the head 200h is erroneously mounted upside down in this way, the head 200h is lifted from the groove bottom 111c, so that compression for sealing is not performed normally, and the required sealing performance cannot be ensured.

また、図１４の密封構造によれば、シールリング２００が、蟻溝１１１内での捩れを防止するために底面２００ｉを平坦に形成してあるため、Ｏリングのように底面が円弧面をなすものに比較して、シールリング２００の圧縮に必要な荷重が大きくなる。また、図１６に示されるように、蟻溝１１１に、横向きに倒れた状態で誤装着されるおそれもある。   Further, according to the sealing structure of FIG. 14, since the seal ring 200 has a flat bottom surface 200i in order to prevent twisting in the dovetail 111, the bottom surface forms an arc surface like an O-ring. The load required for compression of the seal ring 200 is larger than that of the one. In addition, as shown in FIG. 16, there is a possibility that the dovetail 111 may be erroneously mounted in a state of falling down sideways.

本発明は、以上のような点に鑑みてなされたものであって、その技術的課題は、蟻溝に装着されたシールリングにより密封を行う密封構造において、蟻溝からのシールリングの脱落を防止し、しかも蟻溝へのシールリングの装着が容易で、パーティクルが発生しにくく、更にはシールリング装着時の捩れや誤装着が発生せず、過大な圧縮荷重を必要としない密封構造を提供することにある。   The present invention has been made in view of the above points, and the technical problem thereof is that the sealing ring is sealed by the seal ring attached to the dovetail, and the seal ring is removed from the dovetail. Providing a sealing structure that is easy to prevent and prevents particles from being generated in the dovetail, and that does not cause twisting or incorrect mounting when the seal ring is mounted, and does not require an excessive compressive load. There is to do.

上述した技術的課題を有効に解決するための手段として、請求項１の発明に係る密封構造は、内側へ倒れるように傾斜した内側勾配面を有する蟻溝に、ゴム状弾性材料からなるシールリングが装着され、このシールリングは、前記蟻溝の溝底に密接される凸面状の底部と、その両側に形成され前記内側勾配面に密接又は近接される側面張出部と、両側の側面張出部における前記底部と反対側の端部間から山形に突出形成されて、嶺部とその両側の斜面からなり前記蟻溝の外側へ露出される頭部とを有し、この頭部における前記山形の裾部の幅が前記蟻溝の溝肩間の幅より小さく、前記側面張出部の頂点間の幅が、前記溝肩間の幅より大きいことを特徴とする。   As a means for effectively solving the technical problem described above, the sealing structure according to the invention of claim 1 includes a seal ring made of a rubber-like elastic material in a dovetail groove having an inner inclined surface inclined so as to fall inward. The seal ring includes a convex bottom portion that is in close contact with the groove bottom of the dovetail groove, side protrusions that are formed on both sides thereof and that are in close contact with or close to the inner inclined surface, and side protrusions on both sides. A protruding portion is formed in a chevron shape from between the end opposite to the bottom portion in the protruding portion, and has a collar portion and a head portion that is formed on both sides of the slope portion and is exposed to the outside of the dovetail groove. The width of the hem of the chevron is smaller than the width between the groove shoulders of the dovetail groove, and the width between the apexes of the side projecting parts is larger than the width between the groove shoulders.

請求項２の発明に係る密封構造は、請求項１に記載の構成において、シールリングにおける底部と頭部の嶺部間の高さが、蟻溝の溝肩間の幅より大きいことを特徴とするものである。   The sealing structure according to the invention of claim 2 is characterized in that, in the structure of claim 1, the height between the bottom portion of the seal ring and the flange portion of the head portion is larger than the width between the shoulders of the dovetail groove. To do.

請求項３の発明に係る密封構造は、請求項１に記載の構成において、シールリングにおける両側の側面張出部の頂点から頭部の嶺部までの高さが、溝幅最小部分から溝底までの深さより大きいことを特徴とするものである。   According to a third aspect of the present invention, there is provided the sealing structure according to the first aspect, wherein the height from the apex of the side projecting portions on both sides of the seal ring to the flange portion of the head is from the groove width minimum portion to the groove bottom. It is characterized by being larger than the depth up to.

請求項４の発明に係る密封構造は、請求項１に記載の構成において、シールリングにおける側面張出部と頭部との境界が、前記側面張出部の頂点から前記頭部への接線より内側へ凹んでいることを特徴とするものである。   According to a fourth aspect of the present invention, there is provided the sealing structure according to the first aspect, wherein the boundary between the side surface projecting portion and the head portion of the seal ring is based on a tangent line from the apex of the side surface projecting portion to the head portion. It is characterized by being recessed inward.

請求項１の発明に係る密封構造によれば、シールリングの頭部が山形をなす突出形状であるため、蟻溝が形成された部材とこれに対向する相手部材との間でシールリングを圧縮したときの、前記相手部材に対するシールリングの頭部の接触幅は、シールリングの頭部の断面形状を従来のように円弧形にしたものに比較して狭くなり、言い換えれば相手部材に対してシールリングが粘着しにくく（粘着幅が小さく）なる。しかも、シールリングは、その側面張出部の頂点間の幅が、蟻溝の溝肩間の幅より大きいため、蟻溝からの飛び出し方向へ変位した場合に、前記側面張出部が蟻溝の内側勾配面に干渉し、上述のように、相手部材に対してシールリングが粘着しにくくなることと相俟って、蟻溝からの抜け出しが有効に防止される。   According to the sealing structure of the first aspect of the present invention, since the head portion of the seal ring has a projecting shape having a mountain shape, the seal ring is compressed between the member formed with the dovetail groove and the opposing member facing the member. The contact width of the head portion of the seal ring with respect to the mating member is narrower than that of the arc shape of the cross-section of the head portion of the seal ring as in the past, in other words, with respect to the mating member. This makes it difficult for the seal ring to stick (adhesion width is small). Moreover, since the width between the apexes of the side protrusions of the seal ring is larger than the width between the groove shoulders of the dovetail groove, the side protrusions do not move when they are displaced in the protruding direction from the dovetail groove. In combination with the fact that the seal ring is difficult to adhere to the mating member as described above, the slipping out of the dovetail is effectively prevented.

また、シールリングの頭部が山形をなす突出形状であることによって、、圧縮量が小さくても所要の密封面圧を確保でき、頭部の裾から嶺部までの高さは任意に設定できるため、蟻溝が形成された部材とこれに対向する部材とのメタルタッチも有効に防止できる。更に、内側勾配面に密接又は近接される側面張出部により、装着時の捩れや開閉運動に伴う捩れが防止される。また、シールリングの頭部の幅が、前記溝肩間の幅より小さいため、蟻溝が形成された部材とこれに対向する部材との間でシールリングを圧縮したとき、前記両部材間への頭部の膨出変形による噛み込みや、溝肩への圧接が起こりにくく、このためパーティクルの発生やシールリングの捩れも有効に防止される。   In addition, because the head portion of the seal ring has a chevron shape, the required sealing surface pressure can be ensured even if the amount of compression is small, and the height from the hem of the head to the buttocks can be set arbitrarily. Therefore, metal touch between the member in which the dovetail is formed and the member facing the member can be effectively prevented. Further, the side projecting portion that is in close contact with or close to the inner sloped surface prevents twisting during mounting and twisting associated with opening and closing movements. Further, since the width of the head portion of the seal ring is smaller than the width between the groove shoulders, when the seal ring is compressed between the member in which the dovetail groove is formed and the member facing the member, the space between the two members is reached. Owing to the bulging deformation of the head and the pressure contact with the groove shoulder hardly occur, and therefore generation of particles and twisting of the seal ring are effectively prevented.

請求項２の発明に係る密封構造によれば、シールリングの底部の頂点と頭部の嶺部が蟻溝の幅方向両側を向いた横向き状態では、シールリングが蟻溝の溝肩間を通過することができないので、請求項１による効果に加えて、シールリングが横向きに誤装着されてしまうのを確実に防止することができる。   According to the sealing structure of the second aspect of the present invention, the seal ring passes between the groove shoulders of the dovetail groove when the apex of the bottom portion of the seal ring and the flange portion of the head portion are in the lateral direction facing the both sides in the width direction of the dovetail groove. Therefore, in addition to the effect of the first aspect, it is possible to reliably prevent the seal ring from being erroneously attached in the lateral direction.

請求項３の発明に係る密封構造によれば、シールリングを、その頭部が溝底を向いた天地逆の状態で蟻溝に装着しようとしても、側面張出部の頂点が溝肩の幅方向突端を通過することができないので、請求項１による効果に加え、シールリングが天地逆の状態で蟻溝に誤装着されてしまうのを確実に防止することができる。   According to the sealing structure of the third aspect of the present invention, even if an attempt is made to attach the seal ring to the dovetail with the head portion facing the groove bottom in the upside down direction, the apex of the side projecting portion is the width of the groove shoulder. In addition to the effect of claim 1, it is possible to reliably prevent the seal ring from being erroneously attached to the dovetail in an upside down state.

請求項４の発明に係る密封構造によれば、シールリングを蟻溝に装着する際に、このシールリングにおける側面張出部と頭部との間の凹みを溝肩に接触させて、その接触部を支点としながら底部を回転するように溝内へ挿入することができるので、請求項１による効果に加え、シールリングの装着を容易に行うことができる。   According to the sealing structure of the invention of claim 4, when the seal ring is mounted in the dovetail, the recess between the side protruding portion and the head of the seal ring is brought into contact with the groove shoulder, and the contact is made. Since it can be inserted into the groove so as to rotate the bottom portion while using the portion as a fulcrum, in addition to the effect of the first aspect, the seal ring can be easily attached.

以下、本発明に係る密封構造を、図面を参照しながら説明する。まず図１及び図２は、それぞれ本発明に係る密封構造が適用される半導体製造装置の真空チャンバを示す概略的な斜視図、図３は、本発明に係る密封構造の好ましい実施の形態を示す断面図、図４は、シールリングと蟻溝との関係を示す説明図、図５は、シールリングの頭部の断面形状例を示す部分断面図、図６は、本発明に係る密封構造による密封状態を示す断面図、図７は、シールリングの装着過程を順を追って示す説明図である。   Hereinafter, a sealing structure according to the present invention will be described with reference to the drawings. 1 and 2 are schematic perspective views showing a vacuum chamber of a semiconductor manufacturing apparatus to which a sealing structure according to the present invention is applied, respectively, and FIG. 3 shows a preferred embodiment of the sealing structure according to the present invention. 4 is an explanatory view showing the relationship between the seal ring and the dovetail groove, FIG. 5 is a partial cross-sectional view showing an example of the cross-sectional shape of the head portion of the seal ring, and FIG. 6 is based on the sealing structure according to the present invention. Sectional drawing which shows a sealing state, FIG. 7 is explanatory drawing which shows the installation process of a seal ring later on.

図１又は図２に示されるように、半導体製造装置の真空チャンバは、半導体ウエハ等のワーク４を出し入れするための開口部１１を有する本体側のハウジング１と、開口部１１を開閉する蓋体２を備えており、この蓋体２による閉塞状態において、開口部１１の外周を密封状態に保持するためのシールリング３が、ハウジング１又は蓋体２に前記開口部１１の外周に沿って形成した後述の蟻溝に装着されている。以下に説明する実施の形態では、便宜上、図１のように、シールリング３がハウジング１側に装着されるものとする。   As shown in FIG. 1 or FIG. 2, the vacuum chamber of the semiconductor manufacturing apparatus includes a body-side housing 1 having an opening 11 for taking in and out a workpiece 4 such as a semiconductor wafer, and a lid for opening and closing the opening 11. 2 and a seal ring 3 for holding the outer periphery of the opening 11 in a sealed state in the closed state by the lid 2 is formed in the housing 1 or the lid 2 along the outer periphery of the opening 11. It is mounted in the dovetail described later. In the embodiment described below, for convenience, it is assumed that the seal ring 3 is mounted on the housing 1 side as shown in FIG.

図３に示される形態による密封構造において、ハウジング１には、開口部１１の外周に沿って蟻溝１２が形成されている。この蟻溝１２は、図４に示されるように、溝肩１２ａ，１２ｂ側の幅ｗ_１が相対的に狭く、溝底１２ｃ側の幅ｗ_２が相対的に広くなるように内側へ傾斜した一対の内側勾配面１２ｄ，１２ｅを有する。溝肩１２ａ，１２ｂはＲ面加工がなされている。 In the sealing structure according to the embodiment shown in FIG. 3, dovetail grooves 12 are formed in the housing 1 along the outer periphery of the opening 11. The dovetail groove 12, as shown in FIG. 4, groove shoulder 12a, the width _{w 1} of 12b side is relatively narrow, inclined inwardly such that the width _{w 2} of the groove bottom 12c side is relatively wide A pair of inner sloped surfaces 12d and 12e are provided. The groove shoulders 12a and 12b are R-surface processed.

シールリング３は、ゴム状弾性材料で無端状に成形されたものであって、図３に示されるように、蟻溝１２の溝底１２ｃに密接される円弧状凸面をなす底部３ａと、その両側に形成され蟻溝１２の内側勾配面１２ｄ，１２ｅに密接又は近接される側面張出部３ｂ，３ｃと、この側面張出部３ｂ，３ｃにおける底部３ａと反対側の端部間から突出形成されて蟻溝１２の外側へ露出される山形の凸面をなす頭部３ｄとを有する。また、側面張出部３ｂ，３ｃは、蟻溝１２の内側勾配面１２ｄ，１２ｅと対応する方向を仰ぐ傾斜面をなし、図４に示されるように、側面張出部３ｂ，３ｃの傾斜角度θ_２を、蟻溝１２の内側勾配面１２ｄ，１２ｅの傾斜角度θ_１以上とすることによって、この内側勾配面１２ｄ，１２ｅに対する適当なつぶし代が設定されている。 The seal ring 3 is formed endlessly with a rubber-like elastic material, and as shown in FIG. 3, a bottom 3a having an arcuate convex surface in close contact with the groove bottom 12c of the dovetail groove 12, and Side protrusions 3b and 3c that are formed on both sides and are in close contact with or close to the inner sloped surfaces 12d and 12e of the dovetail groove 12, and projecting from the ends opposite to the bottom 3a in the side protrusions 3b and 3c And a head 3d having a chevron-shaped convex surface exposed to the outside of the dovetail groove 12. Further, the side surface projecting portions 3b and 3c form an inclined surface that faces the direction corresponding to the inner slope surfaces 12d and 12e of the dovetail groove 12, and as shown in FIG. 4, the inclination angle of the side surface projecting portions 3b and 3c. By setting θ ₂ to be equal to or greater than the inclination angle θ ₁ of the inner gradient surfaces 12d and 12e of the dovetail groove 12, an appropriate crushing allowance for the inner gradient surfaces 12d and 12e is set.

シールリング３における側面張出部３ｂ，３ｃと頭部３ｄとの境界は、図４に示されるように、側面張出部３ｂ，３ｃの頂点（底部３ａ側の端部）から前記頭部３ｄにおける山形の裾部へ向けて引いた接線Ｌより内側へ凹んだ凹部３ｅ，３ｆとなっている。また、前記頭部３ｄにおける山形裾部の幅ｗ_３、言い換えれば側面張出部３ｂ，３ｃと頭部３ｄとの境界の凹部３ｅ，３ｆ間の幅ｗ_３は、溝肩１２ａ，１２ｂ間の幅ｗ_１より僅かに小さく、側面張出部３ｂ，３ｃの頂点（底部３ａ側の端部）間の幅ｗ_４は、前記幅ｗ_１より大きいものとなっている。 As shown in FIG. 4, the boundary between the side projections 3b, 3c and the head 3d in the seal ring 3 is from the top of the side projections 3b, 3c (the end on the bottom 3a side) to the head 3d. Are recessed portions 3e and 3f that are recessed inward from the tangent line L drawn toward the hem of the mountain shape. The width _{w 3} between the width of the chevron skirt of the head 3d _{w 3,} side protruding portion 3b other words, 3c and the recess 3e of the boundary between the head 3d, 3f are groove shoulder 12a, between 12b The width w ₄ is slightly smaller than the width w ₁ , and the width w ₄ between the apexes (ends on the bottom 3 a side) of the side surface protruding portions 3 b and 3 c is larger than the width w ₁ .

シールリング３における底部３ａと頭部３ｄの頂点間の高さｈ_１は、蟻溝１２の深さｄ_１及び溝肩１２ａ，１２ｂ間の幅ｗ_１より大きく、好ましくは、
ｈ_１≧1.1ｗ_１
となっている。また、両側の側面張出部３ｂ，３ｃの頂点（底部３ａ側の端部）から頭部３ｄの頂点までの高さｈ_２は、溝幅が最も小さくなる部分、すなわち溝肩１２ａ，１２ｂの幅方向突端から溝底１２ｃまでの深さｄ_２より大きいものとなっている。 The height h ₁ between the bottom 3a and the top of the head 3d in the seal ring 3 is larger than the depth d ₁ of the dovetail groove 12 and the width w ₁ between the groove shoulders 12a and 12b, preferably
h ₁ ≧ 1.1w ₁
It has become. Further, both sides of the side projecting portion 3b, the height _{h 2} from 3c apex of (end portion of the bottom portion 3a side) to the top of the head 3d, a portion where the groove width is the smallest, i.e. groove shoulders 12a, 12b of the We have become larger than the depth d ₂ of the bottom of the trench 12c in the width direction protruding end.

シールリング３における頭部３ｄは、図３に示されるように、嶺部３１と、その両側の斜面３２，３３を有し、斜面３２，３３の傾斜角度は任意であり、蟻溝１２からの頭部３ｄの突出高さやハウジング１と蓋体２の間での圧縮荷重などを考慮して設定される。そして、前記嶺部３１は、図５（Ａ）に示されるように、僅かな幅のフラット面としたり、図５（Ｂ）に示されるように、円弧状凸面としたり、図５（Ｃ）に示されるように、尖ったエッジ状としたものなどが考えられる。   As shown in FIG. 3, the head 3 d of the seal ring 3 has a flange 31 and slopes 32 and 33 on both sides thereof, and the slopes 32 and 33 have an arbitrary inclination angle. It is set in consideration of the protruding height of the head 3d and the compressive load between the housing 1 and the lid 2. The collar 31 is a flat surface having a slight width as shown in FIG. 5A, an arc-shaped convex surface as shown in FIG. As shown in Fig. 4, a sharp edge shape or the like can be considered.

以上の構成において、シールリング３は、図６に示されるように、蓋体２による開口部１１の閉塞時に、この蓋体２に頭部３ｄの嶺部３１が密接されることによって、図１あるいは図２に示される真空チャンバ内を密封するものである。また、このシールリング３は、蟻溝１２の溝底１２ｃに密接される底部３ａが円弧状凸面をなすため、良好なシール面が形成され、蓋体２に密接される頭部３ｄが山形をなすため、接触幅が小さく、したがって小さな圧縮荷重でも、高い密接面圧が得られる。   In the above configuration, as shown in FIG. 6, when the opening 11 is closed by the lid body 2, the seal ring 3 is brought into close contact with the flange portion 31 of the head 3 d when the lid body 2 is closed. Alternatively, the inside of the vacuum chamber shown in FIG. 2 is sealed. Further, the seal ring 3 has a bottom 3a in close contact with the groove bottom 12c of the dovetail 12 having an arcuate convex surface, so that a good seal surface is formed, and the head 3d in close contact with the lid 2 has a chevron shape. Therefore, the contact width is small, and therefore a high contact pressure can be obtained even with a small compressive load.

詳しくは、シールリング３は、ハウジング１（蟻溝１２の溝底１２ｃ）と蓋体２の間で、高さｈ_１を減少するように圧縮変形を受けると、例えば、側面張出部３ｂ，３ｃと頭部３ｄとの間の凹部３ｅ，３ｆが溝肩１２ａ，１２ｂに嵌合している場合は、先に説明した図１３のように変形されて、頭部３ｄに圧縮応力が集中することになるが、この形態によれば、頭部３ｄの幅ｗ_３が溝肩１２ａ，１２ｂ間の幅ｗ_１より小さく、すなわち前記凹部３ｅ，３ｆは、溝肩１２ａ，１２ｂと非接触、非嵌合状態にあるため、頭部３ｄでの応力集中が起こらない。しかも、頭部３ｄが山形をなすため、例え大きく圧縮された場合でも、それによる頭部３ｄの変形は、蓋体２に対する斜面３２，３３の傾斜角度が減少するようになされ、幅方向両側への膨出が抑えられるため、ハウジング１と蓋体２間への頭部３ｄの膨出変形による噛み込みや、溝肩１２ａ，１２ｂへの圧接が起こらない。したがって、低荷重で所要の圧縮量を確保でき、半導体の製造プロセスに有害なパーティクルの発生や、噛み込みによるゴムの割れに起因するシール性の低下も有効に抑えられる。 Specifically, when the seal ring 3 is compressed and deformed so as to reduce the height h ₁ between the housing 1 (groove bottom 12c of the dovetail groove 12) and the lid body 2, for example, the side protruding portions 3b, When the recesses 3e and 3f between 3c and the head 3d are fitted in the groove shoulders 12a and 12b, they are deformed as shown in FIG. 13 and the compressive stress is concentrated on the head 3d. While thus, according to this embodiment, the width _{w 3} is a groove shoulder 12a of the head 3d, less than the width _{w 1} between 12b, i.e. the recess 3e, 3f are groove shoulders 12a, 12b and a non-contact, non Since it is in a fitting state, stress concentration does not occur at the head 3d. Moreover, since the head portion 3d has a mountain shape, even if the head portion 3d is greatly compressed, the deformation of the head portion 3d is such that the inclination angle of the inclined surfaces 32, 33 with respect to the lid body 2 is reduced, and both sides in the width direction. Therefore, the head 3d is not caught between the housing 1 and the lid 2 due to the bulging deformation and the groove shoulders 12a and 12b are not pressed. Therefore, the required amount of compression can be secured with a low load, and the occurrence of particles harmful to the semiconductor manufacturing process and the deterioration of the sealing performance due to the cracking of rubber due to biting can be effectively suppressed.

また、シールリング３における山形の頭部３ｄは、蟻溝１２からの突出高さｈ_３や斜面３２，３３の傾斜角度を、ハウジング１と蓋体２の間での圧縮荷重などを考慮して任意に設定可能であるため、圧縮荷重によるハウジング１と蓋体２のメタルタッチや、これによるパーティクルの発生も有効に防止できる。 Further, Yamagata head 3d in the seal ring 3, the inclination angle of the protrusion height h ₃ and slopes 32, 33 from the dovetail groove 12, in consideration of the compressive load between the housing 1 and the cover 2 Since it can be set arbitrarily, it is possible to effectively prevent metal touch between the housing 1 and the lid 2 due to a compressive load and generation of particles due to this.

また、このシールリング３は、頭部３ｄが山形をなすので、蓋体２に対する接触幅が、先に従来例として説明した図１１，図１２及び図１４のようにシールリングの頭部の断面形状を円弧形にしたものに比較して十分に狭くなり、したがって蓋体２に対してシールリング３が粘着しにくく（粘着幅が小さく）なる。しかも、側面張出部３ｂ，３ｃが蟻溝１２の傾斜面状の内側勾配面１２ｄ，１２ｅに適当な面圧で密接されているので、上述のように、蓋体２に対してシールリング３が粘着しにくくなることと相俟って、この蓋体２の開放動作時に、シールリング３が蓋体２に引っ張られて蟻溝１２から抜け出してしまうようなことはなく、蟻溝１２内での捩れや倒れも生じない。   In addition, since the head 3d has a mountain shape in the seal ring 3, the contact width with respect to the lid body 2 is a cross-section of the head of the seal ring as shown in FIGS. The shape is sufficiently narrower than that of an arc shape, and therefore the seal ring 3 is less likely to adhere to the lid 2 (adhesion width is reduced). Moreover, since the side surface projecting portions 3b and 3c are in close contact with the inclined inner slope surfaces 12d and 12e of the dovetail groove 12 with an appropriate surface pressure, the seal ring 3 is attached to the lid 2 as described above. The seal ring 3 is not pulled out of the dovetail groove 12 by the lid body 2 during the opening operation of the lid body 2 in combination with the fact that it becomes difficult to stick. There is no twisting or falling.

シールリング３を蟻溝１２に装着するには、図７（Ａ）に示されるように、底部３ａを先頭にして蟻溝１２内へ押し込んでも良いが、図７（Ｂ）に示されるように、まず、このシールリング３を、図示の断面上で傾斜させる（捩る）ようにしながら、その一方の凹部３ｆ又はその近傍を、蟻溝１２における一方の溝肩１２ｂへ当接させ、次にその当接部を支点として、シールリング３を、その傾斜を戻す方向へ図示の断面上で回転させることによって、円弧状凸面をなす底部３ａが適当に変形を受けながら他方の溝肩１２ａ上を滑るようにして、蟻溝１２内へ挿入されて行くことによって、図７（Ｃ）に示される装着状態となる。このとき、側面張出部３ｂ，３ｃが蟻溝１２の内側勾配面１２ｄ，１２ｅに適当な面圧で嵌まり込むので、シールリング３の高さ方向が蟻溝１２の深さ方向とほぼ平行になるように、自動的に位置決めされる。したがって、シールリング３はスムーズに且つ正確に蟻溝１２に装着される。   To attach the seal ring 3 to the dovetail groove 12, as shown in FIG. 7 (A), the bottom 3a may be pushed into the dovetail groove 12 as shown in FIG. 7 (B). First, while the seal ring 3 is inclined (twisted) on the cross section shown in the drawing, one recess 3f or the vicinity thereof is brought into contact with one groove shoulder 12b in the dovetail groove 12, and then By rotating the seal ring 3 on the cross section shown in the drawing in the direction to return the inclination with the contact portion as a fulcrum, the bottom portion 3a forming the arcuate convex surface slides on the other groove shoulder 12a while being appropriately deformed. In this way, by being inserted into the dovetail groove 12, the mounting state shown in FIG. 7C is obtained. At this time, since the side surface projecting portions 3b and 3c are fitted to the inner sloped surfaces 12d and 12e of the dovetail groove 12 with an appropriate surface pressure, the height direction of the seal ring 3 is substantially parallel to the depth direction of the dovetail groove 12. It is automatically positioned so that Therefore, the seal ring 3 is smoothly and accurately attached to the dovetail groove 12.

ここで、図８は、シールリング３を横向きに装着しようとした場合を示す断面図、図９は、シールリング３を天地逆向きに装着しようとした場合を示す断面図である。   Here, FIG. 8 is a cross-sectional view showing a case where the seal ring 3 is about to be mounted sideways, and FIG. 9 is a cross-sectional view showing a case where the seal ring 3 is about to be mounted upside down.

すなわち、この形態によるシールリング３は、底部３ａの頂点と頭部３ｄの嶺部３１との間の高さｈ_１を溝肩１２ａ，１２ｂ間の幅ｗ_１より大きくし、好ましくはｗ_１の1.1倍以上としたため、図８に示されるように、底部３ａ及び頭部３ｄが蟻溝１２の幅方向両側を向いた横向きの状態では、溝肩１２ａ，１２ｂ間を通過することができない。したがって、シールリング３が蟻溝１２に横向きに誤装着されてしまうのを防止することができる。 That is, in the seal ring 3 according to this embodiment, the height h ₁ between the apex of the bottom portion 3a and the flange portion 31 of the head portion 3d is larger than the width w ₁ between the groove shoulders 12a and 12b, preferably w ₁ Since it is 1.1 times or more, as shown in FIG. 8, when the bottom portion 3 a and the head portion 3 d are facing sideways in the width direction of the dovetail groove 12, they cannot pass between the groove shoulders 12 a and 12 b. Accordingly, it is possible to prevent the seal ring 3 from being erroneously attached to the dovetail groove 12 in the lateral direction.

また、山形をなす頭部３ｄの裾部に相当する凹部３ｅ，３ｆ間の幅ｗ_３は、溝肩１２ａ，１２ｂ間の幅ｗ_１より小さいため、図９（Ａ）に示されるように、シールリング３を逆向きに装着しようとしても、前記凹部３ｅ，３ｆは溝肩１２ａ，１２ｂに嵌合されない。このため、凹部３ｅ，３ｆが溝肩１２ａ，１２ｂに嵌合されることによる手応え（装着感）もない。 The recess 3e corresponding to the skirt portion of the head 3d forming a chevron, width _{w 3} between 3f, since groove shoulders 12a, less than the width _{w 1} between 12b, as shown in FIG. 9 (A), Even if the seal ring 3 is to be mounted in the reverse direction, the recesses 3e and 3f are not fitted into the groove shoulders 12a and 12b. For this reason, there is no response (mounting feeling) due to the recesses 3e and 3f being fitted into the groove shoulders 12a and 12b.

しかも、図９（Ｂ）に示されるように、シールリング３を逆さの状態で強引に蟻溝１２内へ押し込もうとしても、ｈ_２＞ｄ_２であるため、側面張出部３ｂ，３ｃの頂点（底部３ａ側の端部）が、溝肩１２ａ，１２ｂによる最も溝幅の小さい部分を内側勾配面１２ｄ，１２ｅ側へ乗り越える前に、頭部３ｄの嶺部３１が溝底１２ｃに当接状態となる。したがって、側面張出部３ｂ，３ｃの頂点が、Ｒ面をなす溝肩１２ａ，１２ｂによる最小溝幅部を乗り越えて内側勾配面１２ｄ，１２ｅに嵌まり込んでしまうことはないので、シールリング３が蟻溝１２に逆さに誤装着されてしまうのを防止することができる。 Moreover, as shown in FIG. 9B, even if the seal ring 3 is forcibly pushed into the dovetail groove 12 in an inverted state, h ₂ > d ₂ , so that the side protruding portions 3b, 3c Of the head 3d contacts the groove bottom 12c before the apex (the end on the side of the bottom 3a) crosses the narrowest groove portion of the groove shoulders 12a and 12b toward the inner sloped surfaces 12d and 12e. It becomes a contact state. Therefore, the apex of the side surface projecting portions 3b, 3c does not get over the minimum groove width portion by the groove shoulders 12a, 12b forming the R surface and fit into the inner inclined surfaces 12d, 12e. Can be prevented from being erroneously attached to the dovetail groove 12 upside down.

次に、図１０は、本発明に係る密封構造の他の形態を示す断面図である。この形態において、上述した形態と異なるところは、蟻溝１２が互いに分離可能に接合された内周側部材１３と外周側部材１４の間に沿って形成され、言い換えれば、ハウジング１が蟻溝１２に沿って内周側部材１３と外周側部材１４に分割されていることにある。   Next, FIG. 10 is sectional drawing which shows the other form of the sealing structure based on this invention. In this embodiment, the difference from the above-described embodiment is that the dovetail groove 12 is formed along the inner peripheral side member 13 and the outer peripheral side member 14 which are joined to each other in a separable manner. And is divided into an inner peripheral side member 13 and an outer peripheral side member 14.

詳しくは、ハウジング１の内周側部材１３における外周側部材１４とのパーティング面１３ａは、蟻溝１２における一方（内周側）の内側勾配面１２ｄの延長面として形成されている。また、このパーティング面１３ａに密接衝合される外周側部材１４のパーティング面１４ａも、対応した勾配面をなしている。   Specifically, the parting surface 13 a of the inner peripheral side member 13 of the housing 1 with the outer peripheral side member 14 is formed as an extension surface of one (inner peripheral side) inner sloped surface 12 d of the dovetail groove 12. Further, the parting surface 14a of the outer peripheral side member 14 closely in contact with the parting surface 13a also forms a corresponding slope surface.

言い換えれば、蟻溝１２は、内周側部材１３にその外周のパーティング面１３ａと連続して形成された内側勾配面１２ｄと、外周側部材１４のパーティング面１４ａから溝幅方向へ延びる平坦な溝底１２ｃと、この溝底１２ｃにおける外周側の端部から内側勾配面１２ｄと対称に傾斜して立ち上がった内側勾配面１２ｅとからなり、溝肩１２ａ，１２ｂがＲ面加工されたものである。   In other words, the dovetail groove 12 is a flat surface extending in the groove width direction from the inner sloped surface 12d formed continuously with the outer peripheral parting surface 13a on the inner peripheral side member 13 and the parting surface 14a of the outer peripheral side member 14. A groove bottom 12c, and an inner sloped surface 12e that rises symmetrically with respect to the inner sloped surface 12d from the outer peripheral end of the groove bottom 12c, and the groove shoulders 12a and 12b are R-surface processed. is there.

なお、シールリング３の構成は図３と同様であり、蟻溝１２とシールリング３の寸法関係も、図４と基本的に同様である。   The configuration of the seal ring 3 is the same as that in FIG. 3, and the dimensional relationship between the dovetail groove 12 and the seal ring 3 is basically the same as that in FIG.

したがって、図１０に示される第二の形態によれば、先の説明と同様の効果が実現される。加えて、ハウジング１が蟻溝１２に沿って内周側部材１３と外周側部材１４に分割可能であることから、シールリング３の装着に際して、図中に二点鎖線で示されるように、予め内周側部材１３と外周側部材１４を分離しておき、シールリング３を外周側部材１４側に形成された溝底１２ｃ上に配置してから、内周側部材１３を外周側部材１４に衝合してハウジング１を組み立てることによって、シールリング３を溝肩１２ａ，１２ｂ間で強制変形させることなく蟻溝１２に容易に装着することができる。   Therefore, according to the 2nd form shown by FIG. 10, the effect similar to the previous description is implement | achieved. In addition, since the housing 1 can be divided into an inner peripheral side member 13 and an outer peripheral side member 14 along the dovetail groove 12, when the seal ring 3 is mounted, as shown by a two-dot chain line in the drawing, The inner peripheral side member 13 and the outer peripheral side member 14 are separated, the seal ring 3 is disposed on the groove bottom 12c formed on the outer peripheral side member 14 side, and then the inner peripheral side member 13 is changed to the outer peripheral side member 14. By assembling the housing 1 by abutting, the seal ring 3 can be easily mounted in the dovetail groove 12 without being forcedly deformed between the groove shoulders 12a and 12b.

また、いったん蟻溝１２に装着されたシールリング３は、内周側部材１３と外周側部材１４を分離することによって蟻溝１２から取り外すことができるので、メンテナンスの際にシールリング３の交換を容易に行うことができる。   Moreover, since the seal ring 3 once mounted in the dovetail groove 12 can be removed from the dovetail groove 12 by separating the inner peripheral side member 13 and the outer peripheral side member 14, the seal ring 3 can be replaced during maintenance. It can be done easily.

本発明に係る密封構造が適用される半導体製造装置を示す概略的な斜視図である。1 is a schematic perspective view showing a semiconductor manufacturing apparatus to which a sealing structure according to the present invention is applied. 本発明に係る密封構造が適用される半導体製造装置であって図１と異なる形態のものを示す概略的な斜視図である。FIG. 2 is a schematic perspective view showing a semiconductor manufacturing apparatus to which a sealing structure according to the present invention is applied, which is different from FIG. 1. 本発明に係る密封構造の好ましい実施の形態を示す断面図である。It is sectional drawing which shows preferable embodiment of the sealing structure which concerns on this invention. 本発明に係る密封構造におけるシールリングと蟻溝との関係を示す説明図である。It is explanatory drawing which shows the relationship between the seal ring and dovetail groove in the sealing structure which concerns on this invention. 本発明に係る密封構造におけるシールリングの頭部の断面形状例を示す部分断面図である。It is a fragmentary sectional view showing the example of section shape of the head of the seal ring in the sealing structure concerning the present invention. 本発明に係る密封構造による密封状態を示す断面図である。It is sectional drawing which shows the sealing state by the sealing structure which concerns on this invention. 本発明に係る密封構造におけるシールリングの装着過程を順を追って示す説明図である。It is explanatory drawing which shows order for the installation process of the seal ring in the sealing structure which concerns on this invention later on. 本発明に係る密封構造におけるシールリングを横向きに装着しようとした場合を示す断面図である。It is sectional drawing which shows the case where it is going to mount | wear with the seal ring in the sealing structure which concerns on this invention sideways. 本発明に係る密封構造におけるシールリング３を天地逆向きに装着しようとした場合を示す断面図である。It is sectional drawing which shows the case where it is going to mount | wear with the seal ring 3 in the sealing structure which concerns on this invention in the upside down direction. 本発明に係る密封構造の他の形態を示す断面図である。It is sectional drawing which shows the other form of the sealing structure which concerns on this invention. シールリングとしてＯリングを用いた従来の密封構造を示す断面図である。It is sectional drawing which shows the conventional sealing structure using O-ring as a seal ring. 従来の密封構造を示す断面図である。It is sectional drawing which shows the conventional sealing structure. 図１２のシールリングを圧縮した状態を示す断面図である。It is sectional drawing which shows the state which compressed the seal ring of FIG. 従来の密封構造の他の例を示す断面図である。It is sectional drawing which shows the other example of the conventional sealing structure. 図１２のシールリングを誤装着した状態を示す断面図である。It is sectional drawing which shows the state which mounted | worn with the seal ring of FIG. 図１４のシールリングを誤装着した状態を示す断面図である。FIG. 15 is a cross-sectional view illustrating a state where the seal ring of FIG. 14 is erroneously mounted.

符号の説明Explanation of symbols

１ ハウジング
１２ 蟻溝
１２ａ，１２ｂ 溝肩
１２ｃ 溝底
１２ｄ，１２ｅ 内側勾配面
１３ 内周側部材
１４ 外周側部材
２ 蓋体
３ シールリング
３ａ 底部
３ｂ，３ｃ 側面張出部
３ｄ 頭部
３ｅ，３ｆ 凹部
３１ 嶺部
３２，３３ 斜面 DESCRIPTION OF SYMBOLS 1 Housing 12 Dovetail groove | channel 12a, 12b Groove shoulder 12c Groove bottom 12d, 12e Inner slope surface 13 Inner peripheral side member 14 Outer peripheral side member 2 Lid 3 Seal ring 3a Bottom part 3b, 3c Side surface overhang | projection part 3d Head part 3e, 3f Recessed part 31 Slope 32, 33 Slope

Claims (4)

内側へ倒れるように傾斜した内側勾配面を有する蟻溝に、ゴム状弾性材料からなるシールリングが装着され、このシールリングは、前記蟻溝の溝底に密接される凸面状の底部と、その両側に形成され前記内側勾配面に密接又は近接される側面張出部と、両側の側面張出部における前記底部と反対側の端部間から山形に突出形成されて、嶺部とその両側の斜面からなり前記蟻溝の外側へ露出される頭部とを有し、この頭部における前記山形の裾部の幅が前記蟻溝の溝肩間の幅より小さく、前記側面張出部の頂点間の幅が、前記溝肩間の幅より大きいことを特徴とする密封構造。   A dovetail groove having an inner sloped surface inclined so as to fall inward is fitted with a seal ring made of a rubber-like elastic material, and the seal ring has a convex bottom portion in close contact with the groove bottom of the dovetail groove, and Side protrusions that are formed on both sides and are in close contact with or close to the inner inclined surface, and projectingly formed between the opposite ends of the bottom protrusions on the side protrusions on both sides. And a head exposed to the outside of the dovetail, wherein the width of the hem of the chevron at the head is smaller than the width between the shoulders of the dovetail, and the apex of the side projecting portion A sealing structure characterized in that a width between them is larger than a width between the groove shoulders. シールリングにおける底部と頭部の嶺部間の高さが、蟻溝の溝肩間の幅より大きいことを特徴とする請求項１に記載の密封構造。   The sealing structure according to claim 1, wherein a height between a bottom portion of the seal ring and a flange portion of the head portion is larger than a width between groove shoulders of the dovetail groove. シールリングにおける両側の側面張出部の頂点から頭部の嶺部までの高さが、溝幅最小部分から溝底までの深さより大きいことを特徴とする請求項１に記載の密封構造。   2. The sealing structure according to claim 1, wherein the height from the apex of the side projecting portions on both sides of the seal ring to the flange portion of the head is larger than the depth from the groove width minimum portion to the groove bottom. シールリングにおける側面張出部と頭部との境界が、前記側面張出部の頂点から前記頭部における前記山形の裾部へ向けて引いた接線より内側へ凹んでいることを特徴とする請求項１に記載の密封構造。   The boundary between the side projecting portion and the head in the seal ring is recessed inward from a tangent line drawn from the apex of the side projecting portion toward the hem of the chevron in the head. Item 2. The sealing structure according to Item 1.

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