CN113123710A - Sealing ring for plasma degumming machine table - Google Patents
Sealing ring for plasma degumming machine table Download PDFInfo
- Publication number
- CN113123710A CN113123710A CN202110330213.0A CN202110330213A CN113123710A CN 113123710 A CN113123710 A CN 113123710A CN 202110330213 A CN202110330213 A CN 202110330213A CN 113123710 A CN113123710 A CN 113123710A
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- Prior art keywords
- sealing ring
- shaped
- shaped sealing
- platen
- ring
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Links
- 238000007789 sealing Methods 0.000 title claims abstract description 118
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 238000000034 method Methods 0.000 description 11
- 230000008569 process Effects 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 5
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 239000012634 fragment Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Images
Classifications
-
- E—FIXED CONSTRUCTIONS
- E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
- E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
- E06B7/00—Special arrangements or measures in connection with doors or windows
- E06B7/16—Sealing arrangements on wings or parts co-operating with the wings
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- Engineering & Computer Science (AREA)
- Civil Engineering (AREA)
- Structural Engineering (AREA)
- Gasket Seals (AREA)
Abstract
The invention provides a sealing ring for a plasma degumming machine table, which is a T-shaped sealing ring; the slot position is used for embedding the T-shaped sealing ring; the top of the T-shaped sealing ring is a T-shaped wide part, and the bottom of the T-shaped sealing ring is a T-shaped narrow part; the wide part of the T-shaped sealing ring is embedded at the bottom of the slot; and the magnetic door is closely attached to the opening part of the slot position and the bottom of the T-shaped sealing ring. The area of the sealing ring surface of the T-shaped sealing ring, which is contacted with the magnetic door, is small relative to the sealing ring groove. When the magnetic door is opened, the sealing ring is tightly pressed in the sealing ring slot under the atmospheric pressure. The risk that the sealing ring is pulled out can be avoided, and no product is broken due to sealing failure.
Description
Technical Field
The invention relates to the technical field of semiconductors, in particular to a sealing ring for a plasma photoresist remover machine table.
Background
The Huali 12-inch production line is provided with a plurality of Suhema series dry plasma degumming machine tables of Mattson company, and is widely applied to the Asher process of the whole Huali production line. Including post-etch photoresist stripping & ion implantation photoresist stripping processes for FEOL, and post-etch photoresist stripping and surface treatment processes for BEOL.
Mattson, as a global semiconductor manufacturer, has a 12-inch Asher device widely applied to mass production of various fabs in the world, accumulates abundant 65/45nm process production experience, and actively cooperates with customers to develop 32/28nm and higher production processes. The vacuum cavity platform of Suprema is formed by combining 3 functional modules: process Module, Transfer chamber, Load Lock. In the path of the product loading device, the product first enters a Load Lock loading chamber. The current technical product transmission path of the Mattson machine is as follows: FOUPs are moved into the EFEM microenvironment area, and the EFEM microenvironment area is moved into the Load Lock, and the Load Lock is moved into the process cavity.
The sealing ring is arranged on the Load Lock cavity, and the sealing ring plays a role in isolating atmospheric action when the Load Lock cavity is vacuumized so that the Load Lock cavity can experience the change from atmosphere to vacuum. LL mag door is a door panel that isolates the atmosphere and vacuum. The sealing ring on the door plate prevents the atmospheric air of the EFEM module from entering the Load Lock, and is the key for maintaining the vacuum of the Load Lock loading cavity. But the sealing washer on the door plant is because design defect, often drops, leads to the vacuum to maintain, the piece in the Load lock cavity.
Disclosure of Invention
In view of the above disadvantages of the prior art, an object of the present invention is to provide a sealing ring for a machine of a plasma stripper, which is used to solve the problem in the prior art that fragments of the machine break down due to the falling off of the sealing ring caused by the pressure difference during the process of opening and closing a vacuum chamber of the stripper back and forth.
To achieve the above and other related objects, the present invention provides a sealing ring for a platen of a plasma stripper, comprising:
a T-shaped seal ring; the groove position is used for embedding the T-shaped sealing ring; the top of the T-shaped sealing ring is a T-shaped wide part, and the bottom of the T-shaped sealing ring is a T-shaped narrow part; the wide part of the T-shaped sealing ring is embedded in the bottom of the groove; and the magnetic door is tightly attached to the slot opening part and the bottom of the T-shaped sealing ring.
Preferably, the height of the T-shaped sealing ring is 5.4 mm.
Preferably, the width of the T-shaped sealing ring is 5.4 mm.
Preferably, the narrow part of the T-shaped sealing ring is in the shape of a circular arc, and the radius of the circular arc is 1.4 mm.
Preferably, the length of the T-shaped sealing ring is 792.538 mm.
Preferably, the tolerance of the T-shaped sealing ring is 0.5%.
Preferably, the T-shaped sealing ring is an aluminum heat conduction ring.
Preferably, the magnetic gate is used to isolate the vacuum chamber from the EFEM microenvironment.
As described above, the sealing ring for the plasma degumming machine table of the invention has the following beneficial effects: the area of the sealing ring surface of the T-shaped sealing ring, which is in contact with the Mag door, is small relative to the groove of the sealing ring. When the Mag door is opened, the sealing ring is tightly pressed in the sealing ring groove under the atmospheric pressure. The risk that the sealing ring is pulled out can be avoided, and no product is broken due to sealing failure.
Drawings
FIG. 1 is a schematic view showing the positional relationship between a T-shaped seal ring and a slot and a magnetic gate according to the present invention;
fig. 2 is a schematic diagram showing the dimensions of the T-shaped sealing ring according to the present invention.
Detailed Description
The embodiments of the present invention are described below with reference to specific embodiments, and other advantages and effects of the present invention will be easily understood by those skilled in the art from the disclosure of the present specification. The invention is capable of other and different embodiments and of being practiced or of being carried out in various ways, and its several details are capable of modification in various respects, all without departing from the spirit and scope of the present invention.
Please refer to fig. 1-2. It should be noted that the drawings provided in the present embodiment are only for illustrating the basic idea of the present invention, and the components related to the present invention are only shown in the drawings rather than drawn according to the number, shape and size of the components in actual implementation, and the type, quantity and proportion of the components in actual implementation may be changed freely, and the layout of the components may be more complicated.
The invention provides a sealing ring for a plasma degumming machine table,
at least comprises the following steps: a T-shaped seal ring; the groove position is used for embedding the T-shaped sealing ring; the top of the T-shaped sealing ring is a T-shaped wide part, and the bottom of the T-shaped sealing ring is a T-shaped narrow part; the wide part of the T-shaped sealing ring is embedded in the bottom of the groove; and the magnetic door is tightly attached to the slot opening part and the bottom of the T-shaped sealing ring.
As shown in fig. 1, fig. 1 is a schematic diagram illustrating a positional relationship between a T-shaped seal ring and a slot and a magnetic gate according to the present invention. A T-shaped seal ring 02; the slot position 01 is used for embedding the T-shaped sealing ring; the top of the T-shaped sealing ring 02 is a T-shaped wide part, and the bottom of the T-shaped sealing ring is a T-shaped narrow part; the wide part of the T-shaped sealing ring is embedded in the bottom of the slot position 01; and a magnetic gate (Mag Door) closely attached to the opening part of the slot position 01 and the bottom of the T-shaped sealing ring.
As shown in fig. 2, fig. 2 is a schematic diagram showing the size of the T-shaped sealing ring according to the present invention.
Further, the height of the T-shaped sealing ring of the present embodiment is 5.4 mm. Further, the width of T type sealing washer is 5.4 mm.
Further, the narrow part of the T-shaped sealing ring of the present embodiment is in the shape of an arc, and the radius of the arc is 1.4 mm.
Still further, the length of the T-shaped sealing ring is 792.538 mm.
In the present embodiment, the tolerance of the T-shaped seal ring is 0.5%.
Still further, the T-shaped sealing ring of the present embodiment is an aluminum heat conducting ring.
The magnetic gate is used for isolating the vacuum cavity from the EFEM microenvironment area.
The current technical product transmission path of the Mattson machine is as follows: FOUPs are moved into the EFEM microenvironment area, the EFEM microenvironment area is moved into a Load Lock (vacuum cavity), and the Load Lock is moved into the process cavity. The sealing ring is arranged on the Load Lock cavity, and the sealing ring plays a role in isolating the atmosphere when the Load Lock cavity is vacuumized.
The size of the sealing ring in the prior art is d 2: 0.21+/-0.0008inch inner diameter d 1: 9.725+/-0.04 inch; namely the diameter of the sealing ring: 5.334 mm; length of the sealing ring: 792.538 mm. When the mag door is separated, the attached surface forms vacuum and is difficult to separate under the action of atmospheric pressure. Sometimes the seal ring is pulled out of the seal ring groove. Reasons for the shedding:
because the sealing washer pressurized, Mag door, seal ring groove and the face that the sealing washer was hugged closely form the vacuum plane, and when Load Lock cavity pressure release atmospheric pressure, when Mag door prepared to separate, the sealing washer received atmospheric pressure effect, opened along with the Mag door and was pulled away the sealing washer trench. When the Mag door is closed next time and the Load Lock cavity is vacuumized, the sealing effect of the sealing ring is invalid, and the cavity pressure can change instantly under the common condition, so that the product fragments are caused.
The T-shaped sealing ring is designed, and the sealing ring surface contacting the Mag door is small, so that when the Mag door is opened, the sealing ring is tightly pressed in the sealing ring groove. Therefore, the risk of pulling out the sealing ring can be avoided, and the product is not broken due to sealing failure; the size of the sealing ring is 5.4mm in height, 5.4mm in width and 1.4mm in arc radius. The length of the sealing ring is 792.538 mm. The tolerance requirement is 0.5 percent. And designing a T-shaped sealing ring, wherein the area of the sealing ring surface contacting the Magdoor is small relative to the groove area of the sealing ring.
When the Mag door is opened, the sealing ring is tightly pressed in the sealing ring groove under the atmospheric pressure. Therefore, the risk of pulling out the sealing ring can be avoided, and no product is broken due to sealing failure.
The T-shaped sealing ring optimizes a Loadlock sealing ring of a degumming machine table, prevents the sealing ring from falling off, designs the O-shaped sealing ring in the prior art as the T-shaped sealing ring, and achieves the method for avoiding the sealing ring from falling off due to the action of pressure difference in the process of switching the Loadlock back and forth, thereby causing the breakdown of the machine table. The invention is also suitable for preventing the sealing ring of the conveying cavity of other process machines from easily falling off.
In summary, the area of the seal ring surface of the T-shaped seal ring contacting the Mag door of the invention is smaller than that of the seal ring groove. When the Mag door is opened, the sealing ring is tightly pressed in the sealing ring groove under the atmospheric pressure. The risk that the sealing ring is pulled out can be avoided, and no product is broken due to sealing failure. Therefore, the invention effectively overcomes various defects in the prior art and has high industrial utilization value.
The foregoing embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.
Claims (8)
1. The utility model provides a sealing washer for plasma degumming machine board which characterized in that includes at least:
a T-shaped seal ring; the groove position is used for embedding the T-shaped sealing ring; the top of the T-shaped sealing ring is a T-shaped wide part, and the bottom of the T-shaped sealing ring is a T-shaped narrow part; the wide part of the T-shaped sealing ring is embedded in the bottom of the groove; and the magnetic door is tightly attached to the slot opening part and the bottom of the T-shaped sealing ring.
2. The sealing ring for a platen of a plasma stripper as defined in claim 1, wherein: the height of T type sealing washer is 5.4 mm.
3. The sealing ring for a platen of a plasma stripper as defined in claim 1, wherein: the width of T type sealing washer is 5.4 mm.
4. The sealing ring for a platen of a plasma stripper as defined in claim 1, wherein: the narrow part of the T-shaped sealing ring is arc-shaped, and the radius of the arc-shaped sealing ring is 1.4 mm.
5. The sealing ring for a platen of a plasma stripper as defined in claim 1, wherein: the length of T type sealing washer is 792.538 mm.
6. The sealing ring for a platen of a plasma stripper as defined in claim 1, wherein: the tolerance of the T-shaped sealing ring is 0.5%.
7. The sealing ring for a platen of a plasma stripper as defined in claim 1, wherein: the T-shaped sealing ring is an aluminum heat conduction ring.
8. The sealing ring for a platen of a plasma stripper as defined in claim 1, wherein: the magnetic gate is used for isolating the vacuum cavity from the EFEM microenvironment area.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110330213.0A CN113123710A (en) | 2021-03-29 | 2021-03-29 | Sealing ring for plasma degumming machine table |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110330213.0A CN113123710A (en) | 2021-03-29 | 2021-03-29 | Sealing ring for plasma degumming machine table |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113123710A true CN113123710A (en) | 2021-07-16 |
Family
ID=76774002
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110330213.0A Pending CN113123710A (en) | 2021-03-29 | 2021-03-29 | Sealing ring for plasma degumming machine table |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113123710A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002295683A (en) * | 2001-03-28 | 2002-10-09 | Nok Corp | Seal for dovetail groove |
| US6523833B1 (en) * | 1999-04-12 | 2003-02-25 | Mitsubishi Cable Industries, Ltd. | Low load seal |
| JP2006046446A (en) * | 2004-08-03 | 2006-02-16 | Daikin Ind Ltd | Elastic seal construction |
| JP2009002459A (en) * | 2007-06-22 | 2009-01-08 | Nok Corp | Sealing structure |
| CN207369474U (en) * | 2017-09-24 | 2018-05-15 | 中国航空工业集团公司洛阳电光设备研究所 | A kind of airborne cabinet conductive seal circle mounting structure |
-
2021
- 2021-03-29 CN CN202110330213.0A patent/CN113123710A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6523833B1 (en) * | 1999-04-12 | 2003-02-25 | Mitsubishi Cable Industries, Ltd. | Low load seal |
| JP2002295683A (en) * | 2001-03-28 | 2002-10-09 | Nok Corp | Seal for dovetail groove |
| JP2006046446A (en) * | 2004-08-03 | 2006-02-16 | Daikin Ind Ltd | Elastic seal construction |
| JP2009002459A (en) * | 2007-06-22 | 2009-01-08 | Nok Corp | Sealing structure |
| CN207369474U (en) * | 2017-09-24 | 2018-05-15 | 中国航空工业集团公司洛阳电光设备研究所 | A kind of airborne cabinet conductive seal circle mounting structure |
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| PB01 | Publication | ||
| PB01 | Publication | ||
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| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20210716 |