JP2008515180A - テクスチャード発光ダイオード - Google Patents
テクスチャード発光ダイオード Download PDFInfo
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- JP2008515180A JP2008515180A JP2007532971A JP2007532971A JP2008515180A JP 2008515180 A JP2008515180 A JP 2008515180A JP 2007532971 A JP2007532971 A JP 2007532971A JP 2007532971 A JP2007532971 A JP 2007532971A JP 2008515180 A JP2008515180 A JP 2008515180A
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- 239000000758 substrate Substances 0.000 claims abstract description 39
- 239000004065 semiconductor Substances 0.000 claims abstract description 30
- 150000001875 compounds Chemical class 0.000 claims abstract description 26
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 20
- 239000000956 alloy Substances 0.000 claims abstract description 20
- 238000005253 cladding Methods 0.000 claims abstract description 15
- 230000006798 recombination Effects 0.000 claims abstract description 5
- 238000005215 recombination Methods 0.000 claims abstract description 5
- 230000007704 transition Effects 0.000 claims abstract description 3
- 239000010410 layer Substances 0.000 claims description 61
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 10
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 claims description 8
- 238000002248 hydride vapour-phase epitaxy Methods 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 6
- 238000000059 patterning Methods 0.000 claims description 6
- 229910052594 sapphire Inorganic materials 0.000 claims description 6
- 239000010980 sapphire Substances 0.000 claims description 6
- 239000002356 single layer Substances 0.000 claims description 6
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 5
- 229910044991 metal oxide Inorganic materials 0.000 claims description 5
- 150000004706 metal oxides Chemical class 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 238000000206 photolithography Methods 0.000 claims description 4
- 238000001451 molecular beam epitaxy Methods 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 238000000859 sublimation Methods 0.000 claims description 3
- 230000008022 sublimation Effects 0.000 claims description 3
- 238000001039 wet etching Methods 0.000 claims description 3
- 238000010894 electron beam technology Methods 0.000 claims description 2
- 238000001093 holography Methods 0.000 claims description 2
- 238000010884 ion-beam technique Methods 0.000 claims description 2
- 238000004943 liquid phase epitaxy Methods 0.000 claims description 2
- 230000000873 masking effect Effects 0.000 claims description 2
- 238000004574 scanning tunneling microscopy Methods 0.000 claims description 2
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 150000004767 nitrides Chemical class 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 238000000605 extraction Methods 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000007743 anodising Methods 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910007709 ZnTe Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000000927 vapour-phase epitaxy Methods 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/20—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
- H01L33/24—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate of the light emitting region, e.g. non-planar junction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/20—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
- H01L33/22—Roughened surfaces, e.g. at the interface between epitaxial layers
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Led Devices (AREA)
Abstract
Description
従来技術:
粗面化−「p−GaN表面の微細粗面化によるInGaN系発光ダイオードの光出力及び電気的性能の向上(Improved light−output and electrical performances of InGaN−based light−emitting diode by micro−roughening of p−GaN surface)」,C.Huh,KS Lee,EJ Kang,SJ Park,J.Appl.Physics,93(11),9383〜9385頁,2003
表面発光角度の変更:米国特許第6,768,136号、「放射線照射構造体(Radiation emitting structural element)」
エピタキシャル横方向成長(ELOG)によってパターニングされた基板上に成膜されたドープIII−V族若しくはドープII−VI族化合物半導体又はその合金を含む第1のテクスチャードクラッド/コンタクト層と、
III−V族若しくはII−VI族化合物半導体又はその合金を含み、電子と正孔の放射再結合又はサブバンド間遷移が発生するテクスチャード非ドープ又はテクスチャードドープ活性層と、
ドープIII−V族若しくはドープII−VI族化合物半導体又はその合金を含む第2のテクスチャードクラッド/コンタクト層と、
を含む構造体。
エピタキシャル横方向成長(ELOG)によってパターニングされた基板上に成膜されたn型III−V族若しくはn型II−VI族化合物半導体又はその合金を含むテクスチャードn−クラッド/コンタクト層と、
III−V族若しくはII−VI族化合物半導体又はその合金を含み、電子と正孔の放射再結合が発生するテクスチャード活性層と、
p型III−V族若しくはp型II−VI族化合物半導体又はその合金を含むテクスチャード正孔発光層及びp型コンタクト層と、
を含む構造体が提供される。
導電性又は絶縁性基板と、
HVPE、MOCVD、MBE、LPE、昇華、スパッタリング又はその他の適当な成膜法によって前記基板上に成膜されたIII−V族若しくはII−VI族化合物半導体又はその合金と、
フォトリソグラフィ、電子ビーム又は集束イオンビームを使用した直接描写、走査トンネル顕微鏡法、ホログラフィ、ナノインプリント、陽極多孔質アルミナ、ウェットエッチング又はその他のパターニング法又は組み合わせ法を含むマスク法又はマスクレス法によって形成された前記基板上のパターンと、
を含むことができる。
Claims (9)
- 高いフィルファクターを有するテクスチャード発光ダイオード構造体であって、
エピタキシャル横方向成長(ELOG)によってパターニングされた基板上に成膜されたドープIII−V族若しくはドープII−VI族化合物半導体又はその合金を含む第1のテクスチャードクラッド/コンタクト層と、
III−V族若しくはII−VI族化合物半導体又はその合金を含み、電子と正孔の放射再結合又はサブバンド間遷移が発生するテクスチャード非ドープ又はテクスチャードドープ活性層と、
ドープIII−V族若しくはドープII−VI族化合物半導体又はその合金を含む第2のテクスチャードクラッド/コンタクト層と、
を含む構造体。 - 高いフィルファクターを有するテクスチャード発光ダイオード構造体であって、
エピタキシャル横方向成長(ELOG)によってパターニングされた基板上に成膜されたn型III−V族若しくはn型II−VI族化合物半導体又はその合金を含むテクスチャードn−クラッド/コンタクト層と、
III−V族若しくはII−VI族化合物半導体又はその合金を含み、電子と正孔の放射再結合が発生するテクスチャード活性層と、
p型III−V族若しくはp型II−VI族化合物半導体又はその合金を含むテクスチャード正孔発光層及びp型コンタクト層と、
を含む構造体。 - 請求項1又は2において、
導電性又は絶縁性基板と、
HVPE、MOCVD、MBE、LPE、昇華、スパッタリング又はその他の適当な成膜法によって前記基板上に成膜されたIII−V族若しくはII−VI族化合物半導体又はその合金と、
フォトリソグラフィ、電子ビーム又は集束イオンビームを使用した直接描写、走査トンネル顕微鏡法、ホログラフィ、ナノインプリント、陽極多孔質アルミナ、ウェットエッチング又はその他のパターニング法又は組み合わせ法を含むマスク法又はマスクレス法によって形成された前記基板上のパターンと、
を含む構造体。 - 請求項1において、
前記テクスチャードクラッド/コンタクト層又は各テクスチャードクラッド/コンタクト層が単層、多層又は超格子である構造体。 - 請求項2において、
前記テクスチャード正孔発光層及びp型コンタクト層が単層、多層又は超格子である構造体。 - 前記請求項のいずれか1項において、
前記テクスチャード活性層が、ドープ又は非ドープダブルヘテロ構造体、単一量子井戸又は多重量子井戸である構造体。 - 請求項2において、
前記テクスチャードn−クラッド/コンタクト層が単層、多層又は超格子である構造体。 - 前記請求項のいずれか1項において、
前記基板が導電性であり、GaN、AlN、SiC、Si、GaAs、InP、ZnSe又はその他の金属酸化物材料を含む構造体。 - 請求項1〜8のいずれか1項において、
前記基板が絶縁性であり、サファイア、AlN、GaN、ZnO又はその他の金属酸化物材料を含む構造体。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0421500A GB2418532A (en) | 2004-09-28 | 2004-09-28 | Textured light emitting diode structure with enhanced fill factor |
PCT/GB2005/003704 WO2006035212A1 (en) | 2004-09-28 | 2005-09-27 | Textured light emitting diodes |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008515180A true JP2008515180A (ja) | 2008-05-08 |
JP2008515180A5 JP2008515180A5 (ja) | 2008-09-18 |
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Application Number | Title | Priority Date | Filing Date |
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JP2007532971A Pending JP2008515180A (ja) | 2004-09-28 | 2005-09-27 | テクスチャード発光ダイオード |
Country Status (7)
Country | Link |
---|---|
US (1) | US7915622B2 (ja) |
EP (1) | EP1800354A1 (ja) |
JP (1) | JP2008515180A (ja) |
KR (1) | KR20070058612A (ja) |
CN (1) | CN101036237B (ja) |
GB (1) | GB2418532A (ja) |
WO (1) | WO2006035212A1 (ja) |
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WO2015019969A1 (ja) * | 2013-08-09 | 2015-02-12 | スタンレー電気株式会社 | 半導体発光素子及びその製造方法 |
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Also Published As
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EP1800354A1 (en) | 2007-06-27 |
US7915622B2 (en) | 2011-03-29 |
US20090159907A1 (en) | 2009-06-25 |
WO2006035212A1 (en) | 2006-04-06 |
KR20070058612A (ko) | 2007-06-08 |
CN101036237B (zh) | 2012-03-14 |
GB2418532A (en) | 2006-03-29 |
GB0421500D0 (en) | 2004-10-27 |
CN101036237A (zh) | 2007-09-12 |
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