JP2008511146A - 薄膜電子デバイスをつくるためのインライン式の方法 - Google Patents
薄膜電子デバイスをつくるためのインライン式の方法 Download PDFInfo
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Abstract
【選択図】 図3
Description
a)構造化可能(structurable)層を基板上へと堆積させる工程と、
b)パターン化可能(patternable)材料を構造化可能層上へと第1パターンで堆積させる工程と、
c)構造化可能層をパターン化可能材料で被覆されていない領域においてエッチングする工程とを具備し、
前記複数の工程が、途中で基板を周囲空気に曝すことなく行われるインライン式の方法に関する。
d)画素に対応したOLED材料からなるばらばらの粒子を基板上に位置させる工程;
e)陰極をOLED粒子の上部に位置させて、OLEDデバイスを形成する工程;
f)OLEDを封止する工程
を行う方法に関する。
図1は、バッチ式の方法、セミバッチ式の方法及び本発明のインライン式の方法の概略的な比較を示している。
Claims (36)
- 薄膜電子デバイスを基板上につくるためのインライン式の方法であって;a)構造化可能層を基板上へと堆積させる工程と;b)パターン化可能材料を前記構造化可能層上へと第1パターンで堆積させる工程と;c)前記構造化可能層を前記パターン化可能材料で被覆されていない領域においてエッチングする工程とを具備し;前記複数の工程は、途中で前記基板が周囲空気に曝されることなく行われるインライン式の方法。
- 前記構造化可能層は、絶縁層、金属層、TCO層又は半導体層である請求項1記載のインライン式の方法。
- 前記薄膜電子デバイスは、薄膜トランジスタである請求項1又は2記載のインライン式の方法。
- 工程a)がプラズマ化学気相堆積処理を具備した請求項1乃至3のいずれか1項記載のインライン式の方法。
- 工程a)が、金属及びTCOからなる群より選ばれる材料をスパッタリングすることを具備した請求項1乃至4のいずれか1項記載のインライン式の方法。
- 工程a)が、金属及びTCOからなる群より選ばれる材料を蒸着させることを具備した請求項1乃至4のいずれか1項記載のインライン式の方法。
- 工程b)が、前記パターン化可能材料を前記構造化可能層上へと第1パターンで堆積させ、前記パターン化可能材料を選択的に処理して、第2パターンを前記第1パターン内につくることを具備した請求項1乃至6のいずれか1項記載のインライン式の方法。
- 前記パターン化可能材料を堆積させる工程に続いて、マスクを用いた光照射により前記パターン化可能材料を選択的に硬化させる請求項1乃至7のいずれか1項記載のインライン式の方法。
- 前記パターン化可能材料を堆積させる工程に続いて、直接描画を用いた光照射により前記パターン化可能材料を選択的に硬化させる請求項1乃至7のいずれか1項記載のインライン式の方法。
- 前記パターン化可能材料を堆積させる工程はプリントヘッドを使用して行われる請求項1乃至9のいずれか1項記載のインライン式の方法。
- 前記パターン化可能材料を堆積させる工程は、前記パターン化可能材料を選択的に硬化させる工程と、一体型プリントヘッド/硬化ヘッドアセンブリを使用して統合された請求項10記載のインライン式の方法。
- 前記一体型プリントヘッド/硬化ヘッドはスキャンヘッドをさらに具備した請求項11記載のインライン式の方法。
- 連続的な方法である請求項1乃至12のいずれか1項記載のインライン式の方法。
- 複数のインライン式の品質チェックに基づいたフィードバックループをさらに具備した請求項1乃至13のいずれか1項記載のインライン式の方法。
- その後に、実質的に全ての前記パターン化可能材料を除去することをさらに具備した請求項1乃至14のいずれか1項記載のインライン式の方法。
- 洗浄工程、前記パターン化可能層のプリベイク工程、前記パターン化可能層のポストベイク工程、前記構造化可能層のアニール工程、及びそれらの組み合わせからなる群より選択される処理工程をさらに具備した請求項1項記載のインライン式の方法。
- パターン化可能材料はレーザーアブレーションにより除去される請求項1乃至16のいずれか1項記載のインライン式の方法。
- 前記パターン化可能材料はネガ型のフォトレジストであり、前記方法は、前記フォトレジスト材料を現像することをさらに具備した請求項1乃至17のいずれか1項記載のインライン式の方法。
- 前記パターン化可能材料はポジ型のフォトレジストであり、前記方法は、前記フォトレジスト材料を現像することをさらに具備した請求項1乃至17のいずれか1項記載のインライン式の方法。
- 前記パターン化可能材料は表面エネルギー反応性である請求項1乃至17のいずれか1項記載のインライン式の方法。
- 前記パターン化可能材料は除去可能なラッカーである請求項1乃至17のいずれか1項記載のインライン式の方法。
- 請求項1乃至21のいずれか1項記載のインライン式の方法を組み込んだフラットパネルディスプレイの製造のためのインライン式の方法。
- 請求項1乃至22のいずれか1項記載のインライン式の方法であって:a)基板上に画素のように配列した薄膜トランジスタをつくるためのインライン式の方法と;b)前記画素に対応した離散領域に有機発光材料を印刷するためのインライン式の方法と;c)前記有機発光材料に陰極を提供してOLEDデバイスを形成しかつ前記OLEDデバイスを封止層で被覆するためのインライン式の方法とを具備したインライン式の方法。
- 異なる色の光を発する複数の有機発光材料が組み合わされて画素を形成する請求項23記載のインライン式の方法。
- 単色の光を発する有機発光材料が複数のカラーフィルタと組み合わされて画素を形成する請求項23記載のインライン式の方法。
- 単色の光を発する有機発光材料が燐光材料と組み合わされて画素を形成する請求項23記載のインライン式の方法。
- 前記有機発光材料は、蒸着技術を使用して堆積される請求項23乃至26のいずれか1項記載のインライン式の方法。
- 前記複数のカラーフィルタは、印刷技術を使用して適用される請求項25記載のインライン式の方法。
- 前記燐光材料は、印刷技術を使用して適用される請求項26記載のインライン式の方法。
- 陰極堆積工程をさらに具備した請求項23乃至30のいずれか1項記載のインライン式の方法。
- 請求項1乃至30のいずれか1項記載の方法を実施するための装置であって:a)真空ロードロックと;b)少なくとも1つの処理チャンバと;c)基板を真空ロードロックから処理チャンバへと搬送するための搬送手段とを具備した装置。
- 一連の複数の処理チャンバを具備し、各々の処理チャンバは特定の処理工程専用であり、隣り合う処理チャンバ間で基板を搬送するための搬送手段をさらに具備している請求項31記載の装置。
- 請求項23乃至30のいずれか1項記載の方法を実施するための装置であって:a)薄膜トランジスタを基板上につくるためのインライン式のモジュールと;b)発光材料を前記基板上へと印刷するためのインライン式のモジュールと;c)陰極及び封止層を提供するためのインライン式のモジュールとを具備した装置。
- カラーフィルタを適用するためのインライン式のモジュールをさらに具備した請求項33記載の装置。
- 燐光材料を適用するためのインライン式のモジュールをさらに具備した請求項33又は34記載の装置。
- 前記モジュールは真空チャンバを接続することにより接続されており、各々の接続している真空チャンバは、基板をあるモジュールから隣り合うモジュールへと搬送するための搬送手段を有している請求項33乃至35のいずれか1項記載の装置。
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US10/923,792 US7354845B2 (en) | 2004-08-24 | 2004-08-24 | In-line process for making thin film electronic devices |
EP05101618 | 2005-03-02 | ||
PCT/EP2005/054157 WO2006021568A1 (en) | 2004-08-24 | 2005-08-24 | In-line process for making thin film electronic devices |
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JP2008511146A true JP2008511146A (ja) | 2008-04-10 |
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US (2) | US7354845B2 (ja) |
EP (1) | EP1789996A1 (ja) |
JP (1) | JP2008511146A (ja) |
KR (1) | KR101236460B1 (ja) |
CN (1) | CN101088141A (ja) |
TW (1) | TWI389315B (ja) |
WO (1) | WO2006021568A1 (ja) |
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US11230757B2 (en) | 2008-06-13 | 2022-01-25 | Kateeva, Inc. | Method and apparatus for load-locked printing |
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US9550383B2 (en) | 2011-08-09 | 2017-01-24 | Kateeva, Inc. | Apparatus and method for control of print gap |
JP2016506024A (ja) * | 2012-11-30 | 2016-02-25 | カティーバ, インコーポレイテッド | ガスエンクロージャアセンブリおよびシステム |
US11107712B2 (en) | 2013-12-26 | 2021-08-31 | Kateeva, Inc. | Techniques for thermal treatment of electronic devices |
US11489119B2 (en) | 2014-01-21 | 2022-11-01 | Kateeva, Inc. | Apparatus and techniques for electronic device encapsulation |
US11338319B2 (en) | 2014-04-30 | 2022-05-24 | Kateeva, Inc. | Gas cushion apparatus and techniques for substrate coating |
US10262881B2 (en) | 2014-11-26 | 2019-04-16 | Kateeva, Inc. | Environmentally controlled coating systems |
Also Published As
Publication number | Publication date |
---|---|
KR20070051341A (ko) | 2007-05-17 |
US20070238054A1 (en) | 2007-10-11 |
WO2006021568A1 (en) | 2006-03-02 |
US20060046326A1 (en) | 2006-03-02 |
KR101236460B1 (ko) | 2013-02-22 |
EP1789996A1 (en) | 2007-05-30 |
TWI389315B (zh) | 2013-03-11 |
CN101088141A (zh) | 2007-12-12 |
TW200618308A (en) | 2006-06-01 |
US8080366B2 (en) | 2011-12-20 |
US7354845B2 (en) | 2008-04-08 |
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