JP2008294136A - 酸化物半導体を用いた電子素子及びその製造方法 - Google Patents
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 59
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 229910044991 metal oxide Inorganic materials 0.000 claims abstract description 53
- 150000004706 metal oxides Chemical class 0.000 claims abstract description 53
- 239000010408 film Substances 0.000 claims abstract description 48
- 238000002955 isolation Methods 0.000 claims abstract description 33
- 239000010409 thin film Substances 0.000 claims abstract description 31
- 238000000034 method Methods 0.000 claims abstract description 29
- 239000000758 substrate Substances 0.000 claims abstract description 28
- 238000005401 electroluminescence Methods 0.000 claims description 21
- 239000004973 liquid crystal related substance Substances 0.000 claims description 11
- 229910052760 oxygen Inorganic materials 0.000 claims description 9
- 239000001257 hydrogen Substances 0.000 claims description 8
- 229910052739 hydrogen Inorganic materials 0.000 claims description 8
- -1 hydrogen ions Chemical class 0.000 claims description 7
- 210000002858 crystal cell Anatomy 0.000 claims description 6
- 239000005300 metallic glass Substances 0.000 claims description 6
- 239000002245 particle Substances 0.000 claims description 6
- 229910052725 zinc Inorganic materials 0.000 claims description 6
- 229910052738 indium Inorganic materials 0.000 claims description 5
- 238000000137 annealing Methods 0.000 claims description 4
- 210000004027 cell Anatomy 0.000 claims description 3
- 229910052733 gallium Inorganic materials 0.000 claims description 3
- 239000011261 inert gas Substances 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- 229910052791 calcium Inorganic materials 0.000 claims description 2
- 229910052732 germanium Inorganic materials 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims description 2
- 229910052742 iron Inorganic materials 0.000 claims description 2
- 229910052749 magnesium Inorganic materials 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 229910052718 tin Inorganic materials 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 abstract description 4
- 239000010410 layer Substances 0.000 description 40
- 239000007789 gas Substances 0.000 description 10
- 238000004544 sputter deposition Methods 0.000 description 8
- 239000011701 zinc Substances 0.000 description 8
- 229910007541 Zn O Inorganic materials 0.000 description 7
- VVTSZOCINPYFDP-UHFFFAOYSA-N [O].[Ar] Chemical compound [O].[Ar] VVTSZOCINPYFDP-UHFFFAOYSA-N 0.000 description 6
- 238000005530 etching Methods 0.000 description 6
- 230000005669 field effect Effects 0.000 description 6
- 238000000206 photolithography Methods 0.000 description 6
- 229920003023 plastic Polymers 0.000 description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
- 239000001301 oxygen Substances 0.000 description 5
- 239000004033 plastic Substances 0.000 description 5
- 239000003990 capacitor Substances 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- 239000002775 capsule Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229920001721 polyimide Polymers 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 2
- 239000003086 colorant Substances 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000002985 plastic film Substances 0.000 description 2
- 229920006255 plastic film Polymers 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 238000005477 sputtering target Methods 0.000 description 2
- OFIYHXOOOISSDN-UHFFFAOYSA-N tellanylidenegallium Chemical compound [Te]=[Ga] OFIYHXOOOISSDN-UHFFFAOYSA-N 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 239000004988 Nematic liquid crystal Substances 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 125000001475 halogen functional group Chemical group 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000011946 reduction process Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N zinc oxide Inorganic materials [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/7869—Thin film transistors, i.e. transistors with a channel being at least partly a thin film having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1222—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer
- H01L27/1225—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
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- Crystallography & Structural Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Thin Film Transistor (AREA)
- Liquid Crystal (AREA)
- Electroluminescent Light Sources (AREA)
- Element Separation (AREA)
Abstract
【解決手段】基板1上に少なくとも、ソース電極6、ドレイン電極5、チャネルを含む半導体領域2、ゲート絶縁膜3、及びゲート電極4を有する薄膜トランジスタが複数設けられた電子素子である。複数設けられた薄膜トランジスタ間の素子分離領域と半導体領域2は、同一層の金属酸化物層で構成され、素子分離領域が金属酸化物層7であり、半導体領域2が高抵抗金属酸化物層7の一部を低抵抗化することにより形成されている。
【選択図】図2
Description
前記複数設けられた薄膜トランジスタ間の素子分離領域と前記半導体領域とは、同一の金属酸化物層で構成され、前記半導体領域は、前記素子分離領域よりも低抵抗であることにより形成されていることを特徴とする。
第1の金属酸化物層を形成する工程と、
該金属酸化物層の一部を低抵抗化することにより、前記半導体領域を形成する第2の工程とを特徴とする。
図2は、本実施形態に係る薄膜トランジスタの一例として、トップゲート構造(コプラナー型)のTFTの構成を示す模式的断面図である。
図4は、本実施形態に係るTFTの一例として、ボトムゲート構造(逆スタガ型)のTFTの構成を示す模式的断面図である。
次に、上記第2の実施形態の薄膜トランジスタの出力端子であるドレインに、有機又は無機のEL素子、液晶素子等の表示素子の電極に接続することで表示装置を構成することができる。以下に表示装置の断面図を用いて具体的な表示装置構成の例を説明する。
本実施例では、図2に示す実施形態1のコプラナー(トップゲート)型MISFET素子の形成方法を示す。
本実施例では、図4に示す実施形態2の逆スタガ(ボトムゲート)型MISFET素子の形成方法を示す。
本実施例では、図7に示す実施形態3のTFTを用いた表示装置について説明する。TFTの製造工程は実施例2と同様である。
実施例3の表示素子とTFTとを二次元に配列させる。例えば、実施例3の液晶セルやEL素子等の表示素子と、TFTとを含めて約30μm×115μmの面積を占める画素を、短辺方向に40μmピッチ、長辺方向に120μmピッチでそれぞれ7425×1790個方形配列する。そして、長辺方向に7425個のTFTのゲート電極を貫くゲート配線を1790本、1790個のTFTのソース電極が非晶質金属酸化物半導体膜の島から5μmはみ出した部分を短辺方向に貫く信号配線を7425本設ける。そして、それぞれをゲートドライバ回路、ソースドライバ回路に接続する。更に、液晶表示素子の場合、液晶表示素子と同サイズで位置を合わせRGBが長辺方向に反復するカラーフィルタを表面に設ければ、約211ppiでA4サイズのアクティブマトリクス型カラー画像表示装置を構成することができる。
2…半導体領域
3…ゲート絶縁膜
4…ゲート電極
5…ドレイン電極
6…ソース電極
7…金属酸化物層
Claims (14)
- 基板上に少なくとも、ソース電極と、ドレイン電極と、チャネルを含む半導体領域と、ゲート絶縁膜と、ゲート電極と、を有する薄膜トランジスタが複数設けられた電子素子であって、
前記複数設けられた薄膜トランジスタ間の素子分離領域と前記半導体領域とは、同一の金属酸化物層で構成され、前記半導体領域は、前記素子分離領域よりも低抵抗であることにより形成されていることを特徴とする電子素子。 - 前記薄膜トランジスタは、トップゲート構造であって、前記ソース電極及びドレイン電極が、前記素子分離領域と前記半導体領域と同一の金属酸化物層で構成され、前記半導体領域よりも低抵抗であることを特徴とする請求項1に記載の電子素子。
- 前記薄膜トランジスタは、ボトムゲート構造であることを特徴とする請求項1に記載の電子素子。
- 前記金属酸化物層は、ZnとOを含むことを特徴とする請求項1に記載の電子素子。
- 前記金属酸化物層は、更にIn,Ga,Al,Fe,Sn,Mg,Ca,Si,Geのうちから選択される少なくとも1種を含むアモルファス金属酸化物であることを特徴とする請求項4に記載の電子素子。
- 前記素子分離領域は、108Ω・cm以上の抵抗率であることを特徴とする請求項1から5のいずれか1項に記載の電子素子。
- 前記半導体領域は、103Ω・cm以上107Ω・cm以下の抵抗率であることを特徴とする請求項1から5のいずれか1項に記載の電子素子。
- 基板上に少なくとも、ソース電極と、ドレイン電極と、チャネルを含む半導体領域と、ゲート絶縁膜と、ゲート電極と、を有する薄膜トランジスタが複数設けられた電子素子を製造する方法であって、
金属酸化物層を形成する第1の工程と、
該金属酸化物層の一部を低抵抗化することにより、前記半導体領域を形成する第2の工程とを、
含むことを特徴とする電子素子の製造方法。 - 前記第2の工程は、前記金属酸化物層の一部に水素イオンを注入する工程を含むことを特徴とする請求項8に記載の電子素子の製造方法。
- 前記第2の工程は、前記金属酸化物層の一部を不活性ガス中でアニールする工程を含むことを特徴とする請求項8に記載の電子素子の製造方法。
- 前記第2の工程は、前記金属酸化物層の一部をランプ加熱する工程を含むことを特徴とする請求項8に記載の電子素子の製造方法。
- 請求項1から7のいずれか1項に記載の電子素子のソース又はドレイン電極は、表示素子の電極に接続されていることを特徴とする表示装置。
- 前記表示素子は、エレクトロルミネッセンス素子であることを特徴とする請求項12に記載の表示装置。
- 前記表示素子は、液晶セル又は電気泳動型粒子セルであることを特徴とする請求項13に記載の表示装置。
Priority Applications (7)
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JP2007136697A JP5196870B2 (ja) | 2007-05-23 | 2007-05-23 | 酸化物半導体を用いた電子素子及びその製造方法 |
PCT/JP2008/053109 WO2008105347A1 (en) | 2007-02-20 | 2008-02-18 | Thin-film transistor fabrication process and display device |
CN2008800053105A CN101617408B (zh) | 2007-02-20 | 2008-02-18 | 薄膜晶体管制造方法和显示装置 |
US12/524,138 US8436349B2 (en) | 2007-02-20 | 2008-02-18 | Thin-film transistor fabrication process and display device |
TW097105794A TW200901481A (en) | 2007-02-20 | 2008-02-19 | Thin-film transistor fabrication process and display device |
US12/123,103 US7855379B2 (en) | 2007-05-23 | 2008-05-19 | Electron device using oxide semiconductor and method of manufacturing the same |
US12/949,389 US8088652B2 (en) | 2007-05-23 | 2010-11-18 | Electron device using oxide semiconductor and method of manufacturing the same |
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Cited By (24)
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WO2010071034A1 (en) * | 2008-12-19 | 2010-06-24 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing transistor |
JP2010171411A (ja) * | 2008-12-26 | 2010-08-05 | Semiconductor Energy Lab Co Ltd | 半導体装置及び半導体装置の作製方法、並びに表示装置及び表示装置の作製方法 |
KR101084017B1 (ko) | 2009-09-29 | 2011-11-16 | 연세대학교 산학협력단 | 졸-겔 공정과 나노 구조체를 이용한 산화물 반도체 소자의 제조 방법 및 이에 의해 제조되는 산화물 반도체 소자 |
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JP2013168642A (ja) * | 2012-01-18 | 2013-08-29 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
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US8946702B2 (en) | 2012-04-13 | 2015-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
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