JP2008101908A - 微小部品シート構造体 - Google Patents
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Abstract
【解決手段】シート構造体は複数個の別個の微小部品2の区分を備えた単一の積層体1とすることができ、または、シート構造体は各積層体上に1以上の微小部品区分を備えた複数個の積層体とすることができる。各微小部品又は複数個の同様の微小部品は少なくとも1つの単位作動を遂行する。複数個の同様の第1微小部品を有する第1の積層体は複数個の同様の第2微小部品を有する少なくとも第2の積層体と組み合わされ、システム作動を達成するために少なくとも2つの単位作動を行う。
【選択図】図1
Description
多数の人類の生活における物理的な基準を継続的に改善するためには、一層少ない資源で一層有効な効果を達成する必要がある。現在に至るまでの産業革命から、規模の経済状態は資本設備や中央作動設備の大規模な構造及びシステムに委ねられてきた。中央設備は資本コストの増大及び効率損失をもたらす分配システムを必要とするという更なる欠点を有する。しかし、歴史的には、中央システムはその使用に支えられてコスト的な利点を享有してきた。一層小さく分布した部品及びシステムは一層高い単位コストで作られ、一層大きく一層有効な部品又はシステムの実質的な資本コストでは割りがあわないような応用に使用される。従って、所望の容量に対して適当な寸法で作ることができ、分配システムを設ける必要性を排除でき、大規模な部品及びシステムの効率をも達成できる部品及びシステムを提供する必要性がある。
米国特許第5,115,858号明細書(発明の名称:「微小チャンネル型式のウエファー冷却チャック」)は液体冷却剤を交互のチャンネルに流通させることにより水を冷却するために使用される3M微小チャンネルストックを開示している。高熱伝達流体は残りのチャンネルを通され、熱を除去する。
本発明は、例えば微小チャンネルを有する積層体の如き微小部品シート構造体に関する。シート構造体は複数個の別個の微小部品区分を備えた単一の積層体とすることができるし、または、シート構造体は各積層体上に1以上の微小部品区分を備えた複数個の積層体とすることができる。微小部品は、例えば微小流れ経路の如き受動性の微小部品、及び、マイクロポンプやマイクロコンプレッサ(これらに限定されない)の如き能動性の微小部品を含む。
本発明の別の目的は、組立てコストが積層体上に形成される微小部品の数に実質的に左右されない積層体を提供することである。
本発明は、基本構造が数十から数百万(好ましくは数百から数百万)の微小部品を有する積層体(ラミネート)又は積層体部分から成り、それによって、各積層体がマクロ寸法の単位作動を提供でき(例えば、キロワット範囲の容量を有するコンデンサを提供でき)、また、単位作動を組み合わせるように相互接続された複数の積層体が組立体やシステム(例えば、熱ポンプ)を形成できるような微小部品シート即ち個々の積層構造体に関する。
図1は積層体の基本構造を示す。材料シート即ち積層体1上において、複数個の微小部品2が材料シート1に埋設される。材料シート1は任意の固形材料で作ることができるが、好ましくは、金属、セラミック又は半導体材料で作る。微小部品2を埋設した材料シート1は積層体である。積層体は、スペーサ又は絶縁体として作用するような材料シート1とすることができ、この場合、材料シートは微小部品を有しなくてもよいし、材料シート1を貫通する導管を有してもよい。
図2a及び図2bにおいて、微小部品2は一対のヘッダ5及び横素子(laterals)6から成る溝セット4である。横素子6はヘッダ対5間での流れを許容する溝である。横素子6はヘッダ5に対して実質上垂直に示してあるが、微小部品分野の当業者なら、ヘッダ5に対して90度以外の角度で横素子6を配置できること明らかである。ヘッダ5は連結部8を具備することができ、これらの連結部は流体を授受するためのヘッダ5の拡大部分である。ヘッダ5に対する流体の授受がヘッダ5の幅W内で達成できるので、連結部8の設置はオプションである。横素子6はヘッダ5と同じ幅を有してもよく、または、ヘッダ幅とは異なり、それより一層小さな又は大きな幅を有してもよい。好ましくは、横素子6はヘッダ5より小さな幅を有する。
単一の微小部品又は一組の同様の微小部品は少なくとも1つの単位作動を行うことができる。単位作動は作業流体の状態を変化させる作動として定義され、凝縮、蒸発、圧縮、ポンピング、熱交換又は膨張を含むが、これらに限定されない。単位作動の集合がシステムとなる。1以上の単位作動を遂行する微小部品の例は圧縮と熱伝達とを同時に行う熱伝導性材料内のマイクロコンプレッサである。もちろん、マイクロコンプレッサはガスを圧縮した結果として生じる熱を扱うが、その熱はプロセス熱(例えば、冷凍空間から除去さ
れた熱)に比べて小さい。微小部品の明らかな利点は、圧縮と同時に伝達される熱が実際にプロセス熱であり、最も有効なエネルギ伝達/変換を生じさせる(理想の等温圧縮に近い)実質上一定の温度圧縮を提供することである。
微小寸法部品の熱ポンプはマクロ寸法熱ポンプと同じ基本的な単位作動を行う。蒸気圧縮熱ポンプについては、基本的な単位作動は蒸発、圧縮、凝縮、及び膨張である。しかし、各単位作動を遂行する微小寸法部品は、マクロ寸法の対応部(counterpart)と同じレベルのキロワット又はメガワット程度のマクロ寸法の加熱又は冷却を提供するのに十分な数とする。
小部品の熱組立体43を形成する。マクロ寸法のコンプレッサ44及びマクロ寸法の膨張弁46は微小寸法部品の外部で装着される。この実施例においては、絶縁積層体32を貫通する通路即ち導管42を必要としない。
微小寸法の凝縮器及び蒸発器の作動を確かめるために実験を行った。図4に示すテスト(実験用)組立体は溝セット片401とマニホルド402とを有するように形成された。溝セット片401及びマニホルド402は共に銅で作った。
溝セット4を含む溝セット片401の部分の寸法は2.3cm×2cm×1mmとし、溝の壁404をフィンのようにベース406の上方へ延出させた。溝セット4においては、対をなす溝壁404間に48個の横素子を設けた。各横素子の幅は約260ミクロンとし、深さは約1mmとした。O−リング溝408内にO−リング(図示せず)を配置し、溝セット片401とマニホルド402との間をシールした。
いて過剰寸法とし、溝セット4の端部にヘッダを形成し、ヘッダの幅をWとする。溝セット4を通る流体流れのために嵌合連結穴412を***屋根410に設けた。
入来する過熱冷媒R−124及び排出される凝縮された液体R−124のエンタルピの変化は155ジュール/グラムであり、これは、テスト組立体が熱交換器の作業領域に対して約6ワット/cm2から約8ワット/cm2までの熱伝達量を達成したことを示す。
熱ポンプのための微小寸法部品についての上述の説明及び例は蒸気圧縮サイクルに関連するものであった。熱ポンプ分野の当業者は、蒸気圧縮のほかに、他の熱力学サイクルを熱ポンプに使用できることを知っている。例えば、逆ブレイトンサイクル、スターリングサイクル及び吸収サイクルを使用してきた。
コンプレッサ積層体512に流入し、次いで、圧縮と熱排斥とを同時に遂行し熱伝導性材料内に微小コンプレッサを有するリジェクタ積層体514に至る。次いで、作業流体はゼネレータ積層体516へ流入して等エントロピーワーク抽出を行い、レシーバ積層体510へ戻る。絶縁層32はレシーバ積層体510とゼネレータ積層体516との間、ゼネレータ積層体516とコンプレッサ積層体512との間及びコンプレッサ積層体512とリジェクタ積層体514との間に位置する。破線で示す導管42は種々の積層体及び層を貫通する流体通路を表し、矢印40は少なくとも1つの単位作動を遂行するための積層体内の作業流体の流れを表す。
熱力学的には、熱エンジンは熱ポンプと逆である。しかし、実際には、熱エンジンと熱ポンプとはかなり異なっている。例えば、熱エンジンは膨張弁を使用せず、作業流体からワークを抽出する。作業流体は気体又は液体でよいが、マクロ寸法の熱エンジンはマクロ寸法の熱ポンプとは著しく異なる。
クタ501及びレシーバ503は前述の逆ブレイトンサイクルのためのものと同じでよい。ゼネレータ701はランキンサイクルのゼネレータ603と同様のものとすることができるが、異なる作業流体に適合できるように必要な修正が施される。同様に、コンプレッサ703はブレイトンサイクルの作業流体(普通は、空気の如き気体)に対応できるように作られる。
基本的な構造体及び積層体は微小部品及びマクロ部品同士、これに対応する単位作動、及び図示、説明したもの以外の微小部品の置換の種々の組み合わせとして組立てることができる。例えば、ランキンサイクルの熱エンジンの作動として図6a及び図6bに示した2つの実施例は単なる例示にすぎず、限定的なものではない。
Claims (7)
- 微小部品シート構造体において、
第1部分と第2部分とを備えた材料シートからなる第1の積層体を備え;
上記第1部分は複数個のランド部と流れ通路とを有する少なくとも一つの第1の微小部品を備え;
上記第2部分は数個の第2の微小部品を備え、各第2の微小部品は複数個のランド部と流れ通路とを備え;
上記第1の微小部品が上記数個の第2の微小部品に連結されている、
ことを特徴とする微小部品シート構造体。 - 請求項1に記載の微小部品シート構造体において、
上記第1の微小部品は熱交換器からなり、上記数個の第2の微小部品の各々はポンプからなる、
ことを特徴とする微小部品シート構造体。 - 請求項1に記載の微小部品シート構造体において、
上記第1の微小部品はポンプからなり、上記数個の第2の微小部品の各々は熱交換器からなる、
ことを特徴とする微小部品シート構造体。 - 請求項1の微小部品シート構造体において単位作動を遂行する方法において、
流体が上記第1の微小部品と上記数個の第2の微小部品を通って流れるように流体を上記第1の積層体に通すことと;
上記第1部分内の流体に第1の単位作動を遂行することと、
上記第2部分内の流体に第2の単位作動を遂行することとを含む、
ことを特徴とする方法。 - 微小部品シート構造体において単位作動を遂行する方法において、
(a)第1の複数個の微小部品を備えた材料シートからなる第1の積層体を通して第1の流体を流すことと、
(b)第2の複数個の微小部品を備えた材料シートからなる第2の積層体を通して第2の流体を流すこととを含み、
(c)上記第1の積層体内の流体は熱を排斥し、上記第2の積層体内の流体は熱を受け取り、
(d)(i)上記第1の積層体内の流体は液体を形成すべく凝縮するガスからなり、及び又は(ii)上記第2の積層体内の流体はガスを形成すべく蒸発する液体からなる、
ことを特徴とする方法。 - 請求項5に記載の方法において、
上記第1の積層体内の流体は液体を形成すべく凝縮するガスからなり、上記第2の積層体内の流体はガスを形成すべく蒸発する液体からなる、
ことを特徴とする方法。 - 微小部品シート構造体において化学的な変換を遂行する方法において、
(a)複数のランド部と流れ通路とを備え、該ランド部が横方向で開いている少なくとも一つの微小部品を備えた材料シートからなる第1の積層体を通して第1の流体を流すことと、
(b)第2の積層体を通して第2の流体を流すことと、
(c)上記第1の積層体内の流体と上記第2の積層体内の流体との間で熱交換することと、
(d)上記第1の積層体内で化学物質を変換することとを含む、
ことを特徴とする方法。
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US08/282,663 US5611214A (en) | 1994-07-29 | 1994-07-29 | Microcomponent sheet architecture |
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JP2004031667A Pending JP2004257726A (ja) | 1994-07-29 | 2004-02-09 | 微小部品シート構造体 |
JP2007308633A Expired - Lifetime JP4580422B2 (ja) | 1994-07-29 | 2007-11-29 | 微小部品シート構造体 |
JP2009217724A Pending JP2010019547A (ja) | 1994-07-29 | 2009-09-18 | 微小部品シート構造体 |
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Also Published As
Publication number | Publication date |
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ATE184101T1 (de) | 1999-09-15 |
CA2195859C (en) | 2009-06-09 |
EP0772756A1 (en) | 1997-05-14 |
JP2004257726A (ja) | 2004-09-16 |
DE69511875D1 (de) | 1999-10-07 |
ES2136297T3 (es) | 1999-11-16 |
JPH10503884A (ja) | 1998-04-07 |
JP2010019547A (ja) | 2010-01-28 |
JP2010216801A (ja) | 2010-09-30 |
DE69511875T2 (de) | 2000-03-30 |
CA2195859A1 (en) | 1996-02-15 |
JP4580422B2 (ja) | 2010-11-10 |
US5611214A (en) | 1997-03-18 |
EP0772756B1 (en) | 1999-09-01 |
WO1996004516A1 (en) | 1996-02-15 |
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